CN103969823B - Wavefront active compensating device of optical system - Google Patents
Wavefront active compensating device of optical system Download PDFInfo
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- CN103969823B CN103969823B CN201410187121.1A CN201410187121A CN103969823B CN 103969823 B CN103969823 B CN 103969823B CN 201410187121 A CN201410187121 A CN 201410187121A CN 103969823 B CN103969823 B CN 103969823B
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- temperature
- wavefront
- glass lens
- optical system
- glass
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Abstract
The invention discloses a wavefront active compensating device of an optical system, and belongs to the technical field of aberration compensation of optical systems. The problem that a wavefront active compensating device in the prior art is complex in structure and high in cost is solved. The wavefront active compensating device of the optical system comprises a glass optical lens, an electric control system and a plurality of temperature adjusting devices, the temperature adjusting devices are fixed to the surface of the glass optical lens, and the input power of the temperature adjusting devices is controlled by the electric control system. According to the compensating device, active compensation of lens wavefront is changed by adjusting the temperature distribution of the glass optical lens, the device is simple, the caliber is not limited, and the device is suitable for the precision optical system, and is mainly used for compensating the Zernike aberration of the optical system.
Description
Technical field
The present invention relates to a kind of optical system wavefront active compensation device, belong to the aberration compensation technology neck of optical system
Territory.
Background technology
Along with the development of optical technology, the resolution of optical system generally improves, and image quality is the most constantly improved, but due to
There is the impact of the factors such as mismachining tolerance, gravity deformation, variations in temperature, the optical system after reality is integrated may not reach design
Requirement, this wavefront compensation device allowing for optical system becomes the most necessary.
In prior art, optical system wavefront active compensation device mainly has active optics compensation device based on distorting lens
With such as the adaptive optics compensation device of LCD self-adapting, but, the needs of both devices additionally add machinery or
Optical system, causes apparatus structure complicated, expensive.
Summary of the invention
Present invention aim to address that in prior art, wavefront active compensation device structure technology complicated, expensive is asked
Topic, it is provided that a kind of optical system wavefront active compensation device.
The optical system wavefront active compensation device of the present invention, including glass lens, also includes electric-control system and multiple temperature
Degree adjusting means；The plurality of temperature-adjusting device is fixed on the surface of glass lens；The multiple temperature of described electric control system controls
The input power of degree adjusting means.
Further, described temperature-adjusting device is semiconductor cooler or electric heater.
Further, described temperature-adjusting device is pasted fixing.
Further, the plurality of temperature-adjusting device line centered by the optical axis of glass lens, circumferentially it is distributed.
Further, when glass lens is reflective eyeglass, the plurality of temperature-adjusting device is fixed on glass lens
The edge of front surface, rear surface, in any one or more in outer circumference surface.
Further, the edge of front surface of the plurality of temperature-adjusting device cover glass eyeglass, rear surface, excircle
In any one or more in face.
Further, when glass lens is transmission-type eyeglass, the plurality of temperature-adjusting device is fixed on glass lens
The edge of front surface, the edge of rear surface, in any one or more in outer circumference surface.
Further, the plurality of temperature-adjusting device is fixed successively, and the edge of the front surface of cover glass eyeglass, after
Any one or more in the edge on surface, outer circumference surface.
Beneficial effects of the present invention:
The optical system active compensation device of the present invention is by the Temperature Distribution of regulation glass lens thus changes eyeglass ripple
Front Active Compensation, device is simple, and bore is not limited by low cost, and is applicable to image quality requires the highest, response speed
Spend in less demanding precision optical system, such as projection lens of lithography machine, be mainly used in supplementing the Zernike picture of optical system
Difference.
Accompanying drawing explanation
Fig. 1 is that the optical system wavefront active compensation device temperature-adjusting device of the present invention is pasted on glass lens front surface
The schematic diagram at edge；
Fig. 2 is that the optical system wavefront active compensation device temperature-adjusting device of the present invention is pasted on glass lens rear surface
The schematic diagram at edge；
Fig. 3 is that the optical system wavefront active compensation device temperature-adjusting device of the present invention is pasted on glass lens excircle
The schematic diagram in face；
Fig. 4 is that the optical system wavefront active compensation device temperature-adjusting device of the present invention is pasted on glass lens rear surface
Schematic diagram；
In figure, 1, glass lens, 2, temperature-adjusting device.
Detailed description of the invention
For making it is further understood that the present invention, further illustrate the present invention below in conjunction with the accompanying drawings.
As Figure 1-4, optical system wavefront active compensation device, including glass lens 1, electric-control system and multiple temperature
Adjusting means 2.Wherein, glass lens 1 can be plane mirror, coquille or aspherical mirror, including transmission-type eyeglass and reflective
Eyeglass；Multiple temperature-adjusting devices 2 are fixed on the surface of glass lens 1, and for making apparatus structure simple, general employing is pasted admittedly
Fixed, temperature-adjusting device 2 can be semiconductor cooler, it is also possible to be electric heater, and electric heater can be thin-film electro heating
Device or little granule electric heater, multiple temperature-adjusting devices 2 can be according to the temperature of the change regulation glass lens 1 of input power
Degree distribution；Electric-control system is connected with multiple temperature-adjusting devices 2, and controls the input power of multiple temperature-adjusting device 2；Input
During different heating/refrigeration work consumption, the variations in temperature of glass lens 1 is the most different, controls the defeated of each temperature-adjusting device 2 respectively
Enter power so that in glass lens 1, the Temperature Distribution of each several part is the most inconsistent, the spy varied with temperature according to glass refraction
Point, the wavefront of glass lens 1 also will change with the Temperature Distribution within glass lens 1, i.e. can be by controlling temperature
The input power of adjusting means 2, changes Temperature Distribution and the wavefront of glass lens 1.
Concrete principle is as follows:
After electric control system controls temperature-adjusting device 2 produces different heating or refrigeration work consumption, the temperature of glass lens 1
Can change, the feature varied with temperature according to the refractive index of glass material, when the light glass by temperature non-uniform Distribution
After glass eyeglass 1, light path also can change accordingly, and change in optical path length amount OPD is represented by formula (1):
In formula (1), L is light propagation path in glass lens 1, and Δ T is the variations in temperature in glass lens 1,
Temperature refraction rate coefficient for the material of glass lens 1.The wavefront variation amount Δ of glass lens 1Zernike multinomial can be used
It is described as formula (2):
In formula (2), znIt is n-th zernike multinomial, knFor polynomial coefficient, δFor residual error.
During use, first demarcate the glass lens 1 wavefront response under single temperature-controlled zones, unit input power
wi, wherein wiCan be designated as formula (3):
wi=(z1,z2..., zN) (3)
According to linear superposition theorem, the wavefront variation amount of the lower glass lens 1 of any power input can be described as formula (4):
In formula (3) and (4), N represents the polynomial item number of zernike, and m is the quantity of temperature-controlled zones, and P is coefficient square
Battle array, W is the wavefront produced, and it is equal to the negative wavefront needing to compensate, and δ W is residual error.
Multiple temperature-adjusting devices 2 of present embodiment are not affecting on the premise of glass lens 1 normally works, and can glue
Patch is fixed on the optional position on glass lens 1 surface, and the shape of multiple temperature-adjusting devices 2, number, thickness the most do not limit,
Can select according to needs, multiple temperature-adjusting devices 2 can be connected with each other, it is also possible to is not connected to.
In general, when glass lens 1 is reflective eyeglass, the eyeglass that rear surface is reflected, i.e. reflecting mirror need to be used
Front surface printing opacity, rear surface reflection light；Multiple temperature-adjusting devices 2 are pasted and fixed on glass lens 1, can be pasted and fixed on
In any one or more in the edge of the front surface of glass lens 1, rear surface, outer circumference surface.Front table when glass lens 1
The edge in face is pasted when being fixed with multiple temperature-adjusting device 2, and the most multiple temperature-adjusting device 2 profiles are identical, and with glass
Line centered by the optical axis of eyeglass 1, the most uniform, and the edge of cover glass eyeglass 1 front surface, as shown in Figure 1.Work as glass mirror
The rear surface of sheet 1 is pasted when being fixed with multiple temperature-adjusting device 2, and the most multiple temperature-adjusting devices 2 are with the light of glass lens 1
Line centered by axle, is circumferentially distributed, and the rear surface of cover glass eyeglass 1, as shown in Figure 4.Outer circumference surface when glass lens 1
When stickup is fixed with multiple temperature-adjusting device 2, the most multiple temperature-adjusting device 2 profiles are identical and light with glass lens 1
Line centered by axle, the most uniform, and the outer circumference surface of cover glass eyeglass 1, as shown in Figure 3.
When glass lens 1 is transmission-type eyeglass, multiple temperature-adjusting devices 2 are pasted and fixed on the non-through of glass lens 1
Light region, can be pasted and fixed in the edge of the front surface of glass lens 1, the edge of rear surface, outer circumference surface is any one
Individual or multiple on.When the edge of the front surface of glass lens 1 is pasted and is fixed with multiple temperature-adjusting device 2, the most multiple temperature
Degree adjusting means 2 profile is identical, and line centered by the optical axis of glass lens 1, the most uniform, and before cover glass eyeglass 1
The edge on surface, as shown in Figure 1.When the edge of the rear surface of glass lens 1 is pasted and is fixed with multiple temperature-adjusting device 2,
The most multiple temperature-adjusting device 2 profiles are identical, and line centered by the optical axis of glass lens 1, the most uniform, and cover glass
The edge of glass eyeglass 1 rear surface, as shown in Figure 2.Paste when the outer circumference surface of glass lens 1 and be fixed with multiple temperature-adjusting device
When 2, the most multiple temperature-adjusting device 2 profiles are identical, and line centered by the optical axis of glass lens 1, the most uniform, and cover
The outer circumference surface of cover glass eyeglass 1, as shown in Figure 3.
The front surface of the glass lens 1 mentioned by the present invention and rear surface determine according to light path trend, i.e. light first passes through
Surface is the front surface of glass lens 1, and the surface passed through after light is the rear surface of glass lens 1, more than-4 table of Fig. 1 of the present invention
Face represents that front surface, lower surface represent rear surface.
Obviously, the explanation of embodiment of above is only intended to help to understand method and the core concept thereof of the present invention.Should
Point out, for the those of ordinary skill of described technical field, under the premise without departing from the principles of the invention, it is also possible to this
Invention carries out some improvement and modification, and these improve and modify in the protection domain also falling into the claims in the present invention.
Claims (7)
1. optical system wavefront active compensation device, it is characterised in that include glass lens (1), electric-control system and multiple temperature
Adjusting means (2)；
The wavefront variation amount Zernike polynomial repressentation of described glass lens (1), glass lens (1) controls in single temperature
Wavefront response w under region, unit input poweri, it is designated as formula (3):
wi=(z1,z2,…,zN) formula (3)
The arbitrarily wavefront variation amount of the lower glass lens (1) of power input is designated as formula (4):
In formula (3) and (4), N represents the polynomial item number of zernike, and m is the quantity of temperature-controlled zones, and P is coefficient matrix, W
For the wavefront produced, δ W is residual error；
The plurality of temperature-adjusting device (2) is fixed on the surface of glass lens (1), the plurality of temperature-adjusting device (2)
Line centered by the optical axis of glass lens (1), is circumferentially distributed；
The input power of the multiple temperature-adjusting device of described electric control system controls (2).
Optical system wavefront active compensation device the most according to claim 1, it is characterised in that described temperature-adjusting device
(2) it is semiconductor cooler or electric heater.
Optical system wavefront active compensation device the most according to claim 1, it is characterised in that described temperature-adjusting device
(2) stickup is fixing.
4. according to the optical system wavefront active compensation device described in claim 1-3 any one, it is characterised in that work as glass
When eyeglass (1) is reflective eyeglass, the plurality of temperature-adjusting device (2) be fixed on the front surface of glass lens (1) edge,
In any one or more in rear surface, outer circumference surface.
Optical system wavefront active compensation device the most according to claim 4, it is characterised in that the plurality of temperature regulates
Any one or more in the edge of front surface of device (2) cover glass eyeglass (1), rear surface, outer circumference surface.
6. according to the optical system wavefront active compensation device described in claim 1-3 any one, it is characterised in that work as glass
When eyeglass (1) is transmission-type eyeglass, the plurality of temperature-adjusting device (2) be fixed on the front surface of glass lens (1) edge,
In any one or more in the edge of rear surface, outer circumference surface.
Optical system wavefront active compensation device the most according to claim 6, it is characterised in that the plurality of temperature regulates
Any one or more in the edge of front surface of device cover glass eyeglass (1), the edge of rear surface, outer circumference surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410187121.1A CN103969823B (en) | 2014-05-05 | 2014-05-05 | Wavefront active compensating device of optical system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410187121.1A CN103969823B (en) | 2014-05-05 | 2014-05-05 | Wavefront active compensating device of optical system |
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| Publication Number | Publication Date |
|---|---|
| CN103969823A CN103969823A (en) | 2014-08-06 |
| CN103969823B true CN103969823B (en) | 2017-01-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410187121.1A Expired - Fee Related CN103969823B (en) | 2014-05-05 | 2014-05-05 | Wavefront active compensating device of optical system |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112068307B (en) * | 2020-09-21 | 2021-12-07 | 中国科学院长春光学精密机械与物理研究所 | Hybrid thermally-driven wavefront correction device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6846086B2 (en) * | 2002-03-11 | 2005-01-25 | Intel Corporation | Mirror assembly with thermal contour control |
| JP4032133B2 (en) * | 2003-03-31 | 2008-01-16 | 独立行政法人産業技術総合研究所 | Deformable mirror device |
| CN102957085A (en) * | 2012-11-19 | 2013-03-06 | 中国电子科技集团公司第十一研究所 | Optical device for laser beam wave-front correction and wave-front correction method |
| CN103293662B (en) * | 2013-06-07 | 2017-04-05 | 清华大学 | Reflective mirror surface shape control device |
| CN103323945A (en) * | 2013-06-17 | 2013-09-25 | 清华大学 | Transmission reflection type wave front control device |
| CN103364944B (en) * | 2013-07-17 | 2016-02-24 | 清华大学 | Boundary temperature control array type wavefront control device and manufacture method thereof |
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