CN219417873U - Precise wavefront compensation device based on annular heating film - Google Patents
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- CN219417873U CN219417873U CN202222568320.XU CN202222568320U CN219417873U CN 219417873 U CN219417873 U CN 219417873U CN 202222568320 U CN202222568320 U CN 202222568320U CN 219417873 U CN219417873 U CN 219417873U
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Abstract
The utility model provides a precise wavefront compensation device based on an annular heating film, which comprises a fused quartz layer, a metal substrate layer and a temperature regulating device which are sequentially arranged, wherein the fused quartz layer is used for constructing the optical surface of a reflecting mirror, the metal substrate surface is provided with the temperature regulating device, the temperature regulating device is a plurality of annular micro-heating units, adjacent annular micro-heating units are concentrically arranged and are internally and externally sleeved, each annular micro-heating unit is independently controlled by a precise temperature control system, and the precise temperature control system inputs signals to regulate the temperature distribution of different areas. The utility model provides a field-control-adjustable photoelectric sensitivity detection device for improving the response rate of a detector.
Description
Technical Field
The utility model relates to the technical field of lasers, in particular to a precise wavefront compensation device based on an annular heating film.
Background
The wave front is the wave front formed by the points with consistent vibration phases when the electromagnetic wave reaches a certain position in the transmission process, and the wave front is divided into spherical waves, plane waves and the like according to the different curved surface surfaces. If the light wave passes through an ideal optical system, the wave front phase is not distorted, that is, the imaging quality is not blurred, but the wave front received by the final system is non-ideal due to factors such as atmospheric turbulence, non-ideal optical devices, temperature, gravity deformation and the like, and the wave front error needs to be compensated for to improve the image quality. With the continuous development of new optical observation technologies, the observation requirements are continuously improved, the wavefront precision requirements of the optical system are also gradually improved, and the correction of the influence of the original passive optics on the external environment is insufficient to meet the system precision requirements. Therefore, in recent years, people turn their eyes to the field of active compensation and adaptive optics.
In recent years, with the development of adaptive optics technology, a lot of adaptive optics have begun to draw attention from researchers in the laser field. The adaptive optics that are currently in much use are based primarily on the deformable mirror principle. The deformable mirror is formed by combining a plurality of units, each unit is provided with an independent controller, the shape of a wave surface can be modified under the control of an external voltage, the deformable mirror can be used as a wave front correction device to correct wave front errors, the deformable mirror plays an extremely important role in the adaptive optical system, is one of important parts in the adaptive optical system, and the research and development of the deformable mirror relate to the correction capability and correction precision of the whole adaptive optical system. The deformable mirror can be further subdivided into a continuous mirror surface deformable mirror of a separation actuator, a spliced sub-mirror deformable mirror, a thin film deformable mirror, a double-piezoelectric deformable mirror and the like. The partial method has great potential in compensating the aberration in a large dynamic range due to the capability of programmable control of free aberration. The deformable mirror has the characteristics of quick response and high flexibility, but has poor spatial resolution, is difficult to meet the requirements of space application and systems, and has inherent limitations, such as complex mechanical structure, poor stability, huge return error carried in the wavelet front, difficult correction, influence on compensation precision and the like.
Disclosure of Invention
In order to solve the problems, an object of the present utility model is to provide a precise wavefront compensation device based on an annular heating film.
For this purpose, the above object of the present utility model is achieved by the following technical solutions:
a precision wavefront compensation device based on an annular heating film is characterized in that: the temperature regulating device is arranged on the metal substrate surface, the temperature regulating device is a plurality of annular micro heating units, the adjacent annular micro heating units are concentrically arranged and are internally and externally sleeved, each annular micro heating unit is independently controlled by a precise temperature control system, and the temperature distribution of different areas of input signals of the precise temperature control system is controlled.
The utility model can also adopt or combine the following technical proposal when adopting the technical proposal:
as a preferable technical scheme of the utility model: the fused silica layer is bonded to the metal substrate layer by an optical adhesive.
As a preferable technical scheme of the utility model: the annular micro-heating unit is an annular heating film and is fixedly adhered to the rear surface of the metal substrate.
As a preferable technical scheme of the utility model: the annular heating film is an electrically heated annular flexible film.
As a preferable technical scheme of the utility model: the metal substrate is made of aluminum.
As a preferable technical scheme of the utility model: the surface of the fused quartz layer is a plane, a spherical surface or an aspheric surface.
The precise wavefront compensation device based on the annular heating film provided by the utility model adjusts the temperature distribution of the double-layer composite optical element so as to cause thermal expansion of different material degrees, realizes the function of slightly changing the curvature of the optical surface, and can realize the dynamic precise compensation of the wavefront. The precise wavefront compensation device based on the annular heating film adopts the annular arrangement mode of the micro heating units, greatly reduces the structural complexity of the wavefront compensation device on the premise of ensuring the measurement control precision, and is convenient for calculation. The precise wavefront compensation device based on the annular heating film is compact in whole, has no mechanical structure, is not easily affected by external disturbance factors such as gravity, vibration and the like, is not easily damaged, can be applied to engineering projects with high precision requirements and severe system working environments, such as space, and has wide application prospects.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a precision wavefront compensation device based on an annular heating film provided by the utility model;
fig. 2 is a schematic diagram of an arrangement of annular micro-heating units according to the present utility model.
Detailed Description
1-2, the precise wavefront compensation device based on the annular heating film comprises a fused quartz layer, a metal basal layer, a temperature adjusting device and a temperature control system; the fused quartz layer is used for forming the optical surface of the reflector, the metal substrate layer is used for fixing a temperature regulating device, the temperature regulating device is an annular micro-heating unit and is controlled by a precise temperature control system, wherein the fused quartz layer and the metal substrate layer are fixed by optical adhesive in a sticking way, and the temperature regulating device is fixed on the rear surface of the metal substrate layer in a general sticking way. The temperature adjusting device is an annular film, the heating mode is an electric heater, each annular film is independently controlled by a group of precise temperature control systems, the temperature distribution of different areas is adjusted according to input signals, the temperature distribution of each area of the wavefront compensator is inconsistent, the thermal expansion coefficients of the optical material, the mechanical material and the bonding material are mismatched according to the difference of the thermal expansion coefficients of the fused quartz layer and the metal substrate layer, so that radial thermal stress is generated in the lens, on one hand, the thermal stress can lead the optical material to generate stress birefringence, on the other hand, the lens surface can be deformed, the extremely tiny control of the surface deformation of the optical element can be realized, and the precise wavefront active compensation is completed.
When the compensation device is used, firstly, the relationship between the position of a calibrated heat source, the temperature and the deformation of the compensator is measured by combining a high-precision dynamic interferometer, a model corresponding to a surface type influence function is established, and the compensation range and the compensation precision of the compensation device are provided. The size and the interval of the annular micro heating units are determined according to the cross connection values, the coupling between each control loop is caused by the excessive cross connection values, the work of the system is affected, and the partial fluctuation of each unit surface type is formed due to the insufficient wave surface fitting caused by the excessive cross connection values, so that continuous wave surfaces cannot be formed, and the effect of compensating the wave surface errors cannot be achieved. The cross-linking value was set between 5% and 12% according to Pearson's empirical data.
Generally, the device is a reflective lens, and the rear surface of the device needs to be reflective, that is, the front surface of the device is transparent to light, and the rear surface of the device is reflective to the metal substrate layer, so that the temperature adjusting device is adhered to the rear surface, and any adhering mode of the temperature adjusting device does not directly influence the light path of light, that is, does not influence the normal operation of the fused quartz layer 1 and the metal substrate layer 3. When the temperature control system adjusts the temperature control device 4 to generate different heating amounts, the temperatures of the metal basal layer 3 and the fused quartz layer 1 are changed, and the corresponding change of the optical path of the light after passing through the wavefront compensation device can be correspondingly calculated due to the corresponding thermal expansion coefficient of the materials. According to elastoplastic theory, the thermal stress due to the temperature gradient is denoted as S, and can be described as formula (3):
S=Eα(T-T 0 ) (3)
e in the formula (3) is elastic modulus; alpha is the thermal expansion coefficient, T is the temperature of the fused quartz layer after heating, T 0 The reference temperature for the fused silica layer at room temperature before being heated.
In use, the wavefront response caused by a single region temperature change is first noted as w i, Can be described as formula (4):
w i =(z 1 ,z 2 ,...,z n ) (4)
in the formula (4), n represents the number of terms of the zernike polynomial.
The corresponding wavefront response of the overall compensator can be represented as W and can be described as equation (5):
in the formula (5), m represents the number of micro heating units, delta represents coupling residual error, and W is the wave front required to be generated and is equal to the negative wave front required to be compensated.
The precise wavefront compensation device based on the annular heating film provided by the utility model adjusts the temperature distribution of the double-layer composite optical element so as to cause thermal expansion of different material degrees, realizes the function of slightly changing the curvature of the optical surface, and can realize the dynamic precise compensation of the wavefront. The precise wavefront compensation device based on the annular heating film is compact in whole, has no mechanical structure, is not easily affected by external disturbance factors such as gravity, vibration and the like, is not easily damaged, and can be applied to engineering projects with high precision requirements and severe system working environments, such as space. The precise wavefront compensating device based on the annular heating film adopts the annular arrangement mode of the micro heating units, greatly reduces the structural complexity of the wavefront compensating device on the premise of ensuring the measurement control precision, and is convenient for calculation.
The above detailed description is intended to illustrate the present utility model by way of example only and not to limit the utility model to the particular embodiments disclosed, but to limit the utility model to the precise embodiments disclosed, and any modifications, equivalents, improvements, etc. that fall within the spirit and scope of the utility model as defined by the appended claims.
Claims (6)
1. A precision wavefront compensation device based on an annular heating film is characterized in that: the temperature regulating device is arranged on the metal substrate layer, the temperature regulating device is a plurality of annular micro heating units, the adjacent annular micro heating units are concentrically arranged and are internally and externally sleeved, each annular micro heating unit is independently controlled by a precise temperature control system, and the input signals of the precise temperature control system regulate the temperature distribution of different areas.
2. The annular heating film-based precision wavefront compensation device of claim 1, wherein: the fused silica layer is bonded to the metal substrate layer by an optical adhesive.
3. The annular heating film-based precision wavefront compensation device of claim 1, wherein: the annular micro-heating unit is an annular heating film and is fixedly adhered to the rear surface of the metal basal layer.
4. A precision wavefront compensation device based on an annular heating film as recited in claim 3 wherein: the annular heating film is an electrically heated annular flexible film.
5. The annular heating film-based precision wavefront compensation device of claim 1, wherein: the metal substrate layer is made of aluminum.
6. The annular heating film-based precision wavefront compensation device of claim 1, wherein: the surface of the fused quartz layer is a plane, a spherical surface or an aspheric surface.
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