CN105182529A - Spherical metal deformable mirror and integrated processing technology thereof - Google Patents
Spherical metal deformable mirror and integrated processing technology thereof Download PDFInfo
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- CN105182529A CN105182529A CN201510617155.4A CN201510617155A CN105182529A CN 105182529 A CN105182529 A CN 105182529A CN 201510617155 A CN201510617155 A CN 201510617155A CN 105182529 A CN105182529 A CN 105182529A
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- catoptron
- mirror
- sphere flow
- support chassis
- drive array
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
Abstract
The present invention relates to a spherical metal deformable mirror and an integrated processing technology thereof. The spherical metal deformable mirror includes a reflecting mirror, a driver array and a support chassis. The reflecting mirror is connected with the driver array in a glue connection manner through a reducer union, and the support chassis is connected with the driver array in a screw connection manner. The present invention provides the spherical metal deformable mirror for providing the large correct dynamic range and high operation bandwidth, and the integrated processing technology thereof.
Description
Technical field
The invention belongs to optical field, relate to a kind of sphere flow of metal mirror and integrated processing technology thereof, particularly relate to a kind of heavy caliber/large radius-thickness ratio sphere flow of metal mirror and integrated processing technology thereof.
Background technology
Distorting lens is used for the wavefront correction of imaging system or the correction of the surface figure accuracy of catoptron own, is widely used in ADAPTIVE OPTICS SYSTEMS.The mechanism being devoted to distorting lens technical research more famous in the world and company have: the Air Force Research Laboratory (AFRL), Boston university of U.S. precision engineering research laboratory (PERL), TI company, Berkeley branch school, University of California, Dutch OKO company, French ALPAO Corp., ImagingOptik company, BMC company of the U.S., IrisAO company and Intellite company etc.
Distorting lens, as the core devices of adaptive optical technique, divides according to type of drive, mainly contains several classes such as piezoelectric type, electromagnetic type, electrostatic attraction, electrostriction formula and fluid pressure type.And divide according to the form of mirror mirror, continuous mirror surface formula, piecemeal parallel-moving type and piecemeal can be divided into again to tilt to add the structures such as parallel-moving type.Due to piezoelectric actuator fast response time, displacement resolution is high, and the driving force that can provide is large, and has lower power consumption, so degree of being practical is the highest.In addition, consider that continuous mirror surface does not exist diffraction effect, do not lose luminous energy, can the continuous corrugated of matching, the first-selection of distorting lens conceptual design and development is become when catoptron bore is medium.Therefore, Piezoelectric Driving principle and continuous mirror surface design are combined, just constitutes the continuous mirror surface formula Piezoelectric Driving distorting lens extensively adopted at present.
Continuous mirror surface formula Piezoelectric Driving distorting lens have highly sensitive, dynamic range is large, error of fitting is little, can keep the plurality of advantages such as continuous phase, after have employed stacked piezoelectric pottery, the deformation of unit drive can increase a lot, various structure can also be designed as required between driver and minute surface simultaneously, there are the potentiality of very strong enforcement flexible design.The structure of continuous mirror surface formula piezoelectric deforming mirror is made up of catoptron, drive array and support chassis three parts.Its basic functional principle is: drive array is fixed in support chassis, makes minute surface produce different deformation by changing the magnitude of voltage loaded on piezoelectric ceramics, reaches and dynamically changes reflecting mirror surface shape and the object of compensated wave front-distortion accordingly.For Piezoelectric Driving continuously through face formula distorting lens, the mirror edges of catoptron is freely, so drive array is except the effect playing wavefront correction, also plays the effect of supporting reflex mirror minute surface.
At present, the Scientific Grade distorting lens device that market can obtain has following two features: the first, and initial surface shape is plane; The second, bore is be less than 50mm mostly, and more bigbore device almost be can't see.Plane deformation mirror only plays wavefront correction effect, does not contribute the overall light focal power of system, the effect of the initial aberration balancing of the system that also do not have; More small-bore by the application of serious restrained deformation mirror in large scale system, because wavefront correction needs to implement on aperture, entrance pupil or emergent pupil, supercompression is carried out on light beam and brings impact by the measurement of wavefront and compensation precision.Therefore, the spherical deformation mirror of larger caliber is one of research direction.In addition, glass material, such as k4, the material such as monocrystalline silicon and silit is the common used material of distorting lens mirror mirror, because glass-like materials is easy to obtain high-precision optical surface.But glass material quality is partially soft, limit permissible stress is lower, and the correction dynamic range therefore based on the deformation reflection mirror of substrate of glass is little, and bandwidth of operation is on the low side.By contrast, metal material good springiness, limit permissible stress is higher, therefore can obtain larger correction dynamic range using it as the support chassis of deformation reflection mirror.
Summary of the invention
For the limitation of the existing distorting lens technology described in background technology, the invention provides a kind ofly provides more senior colonel's orthokinesis scope and more the sphere flow of metal mirror of high workload bandwidth and integrated processing technology thereof.
Technical solution of the present invention is:
The present invention proposes a kind of sphere flow of metal mirror, it is characterized in that: described sphere flow of metal mirror comprises catoptron, drive array and support chassis; Described catoptron is connected with bonding mode by crossover sub with between drive array, and described support chassis is connected in a screw connection manner with between drive array.
The working surface of above-mentioned catoptron is sphere, and the substrate of described catoptron is metal material, and described aperture of a mirror is not less than 100mm, and the radius-thickness ratio of described catoptron is not less than 30.
Above-mentioned drive array comprises multiple piezoelectric ceramic actuator; Described multiple piezoelectric ceramic actuator is arranged in orthohexagonal mode.
Above-mentioned drive array is made up of 61 piezoelectric ceramic actuators.
Above-mentioned support chassis adopt the rigidity of material much larger than catoptron adopt the rigidity of material.
The present invention proposes a kind of integrated processing technology for sphere flow of metal mirror as above, its special character is: described integrated processing technology comprises the following steps:
1) roughing of super thin metal catoptron and surface forming processing;
2) piezoelectric ceramic actuator array and support chassis are connected by screw;
3) be inserted in the mesh dress protectiveness frock for spacing and enhancing drive array rigidity from the head of piezoelectric ceramic actuator array, and arrange three cushion blocks between mesh dress protectiveness frock and support chassis, three cushion blocks are 120 ° of distributions;
4) head of each driver in drive array is installed and is used for the crossover sub bonding with back of reflecting mirror, and the length of described crossover sub accurately obtains by calculating;
5) crossover sub is ground, crossover sub is mated with the trend of back of reflecting mirror curvature;
6) catoptron and crossover sub are gluedd joint, leave standstill and adhesive glue is solidified completely;
7) utilize single-point diamond lathe to carry out turnery processing to the sphere flow of metal mirror with driver and support chassis, reach the surface figure accuracy of 1 wavelength magnitude;
8) to through step 7) after sphere flow of metal mirror carry out precision optics polishing, reach and be better than 1/10 wavelength surface figure accuracy.
The invention has the beneficial effects as follows:
The invention provides a kind of sphere flow of metal mirror and integrated processing technology thereof, this sphere flow of metal mirror is identical with traditional distorting lens version, include support chassis, drive array and catoptron three parts, catoptron is arranged in support chassis by driver; Difference is that aperture of a mirror is greater than 100mm; The radius-thickness ratio of catoptron is greater than 30.Initial surface is sphere, and allowable transformation mirror just participates in aberration balancing at system design stage; The present invention simultaneously screens the material that distorting lens adopts, and reflecting mirror material is metal, and allowable transformation mirror provides larger correction dynamic range and the bandwidth of operation of Geng Gao; Larger bore, allows imaging beam unduly to compress, ensures wavefront sensing precision; The integrated processing technology of reflective mirror strips drive belts support chassis, the difficulty of the naked mirror high-precision optical processing of high-elastic variable ultra-thin metal catoptron can be overcome, single-point diamond car and classic optical polish are organically combined, the optical manufacturing of distorting lens initial surface can be completed in the shorter cycle, the primary face shape precision level being better than 1/10 wavelength can be realized.The larger caliber that the present invention proposes, large radius-thickness ratio sphere flow of metal mirror and integrated processing technology thereof are the useful supplement to current flat glass distorting lens.
Accompanying drawing explanation
Fig. 1 is the structural representation of sphere flow of metal mirror provided by the present invention.
Embodiment
As mentioned above, Conventional glass substrate Piezoelectric Driving distorting lens has that bore is little, initial surface is plane, limit permissible stress is little and several feature such as bandwidth of operation is low, the larger caliber (being greater than 100mm) that the present invention proposes, large radius-thickness ratio (being greater than 30), initial surface be sphere, adopt metal material to be the useful supplement to current distorting lens technology as the distorting lens on mirror support chassis; The integrated processing scheme of the reflective mirror strips drive belts support chassis proposed for such distorting lens in addition can eliminate the difficulty of the naked mirror high-precision surface shape processing of high-elastic yielding metallic mirror, the level making it reach initial surface figure accuracy within the shorter cycle to be better than 1/10 wavelength.
The sphere flow of metal mirror that the present invention proposes belongs to continuous mirror surface formula Piezoelectric Driving distorting lens, and by sphere metallic mirror, high density piezoelectric ceramic actuator array and support chassis three part are formed.Its feature being different from traditional distorting lens mainly comprises: 1) initial surface is sphere, and allowable transformation mirror just participates in aberration balancing at system design stage; 2) reflecting mirror material is metal, and allowable transformation mirror provides larger correction dynamic range and the bandwidth of operation of Geng Gao; 3) larger bore, allows imaging beam unduly to compress, ensures wavefront sensing precision.In FIG, give a typical example of Design of sphere flow of metal mirror proposed by the invention, wherein catoptron bore 150mm, thickness 3mm, radius-thickness ratio reaches 50, and drive array includes 61 actuator units and the distribution in hexagon altogether.If with the surface figure accuracy calibration capability of catoptron self for the adjustment capability of standard to the surface figure accuracy of this distorting lens is evaluated, so research shows, when the initial surface figure accuracy of catoptron is higher, can obtain by the adjustment of drive array the surface figure accuracy being better than 1/50 wavelength; When the initial surface figure accuracy of catoptron is lower, also can obtain by the adjustment of drive array the surface figure accuracy being better than 1/30 wavelength.This just means, obtain good aberration correction effect, and the initial surface figure accuracy of distorting lens will reach higher level.By analysis, under the impact considering assembling, clamping and other factors, the level that the initial surface figure accuracy completing the catoptron after processing at least should be better than 1/10 wavelength can meet the high-precision correction demand of later stage to himself or system wavefront distortion aberration.
Distorting lens is all the ultra-thin mirror of large radius-thickness ratio usually, it is very large that naked catoptron is machined directly to required primary face shape accuracy requirement difficulty, just larger for difficulty the yielding ultra-thin metal catoptron of good springiness, and also sharply increase along with the difficulty of the increase high-precision surface shape Seiko of catoptron bore thereupon.Therefore, the present invention proposes the integrated processing technology of a set of reflective mirror strips drive belts support chassis, effectively can solve the problem of high precision mirror finish.Integrated processing technology provided by the present invention mainly comprises following step:
1) first catoptron carries out roughing processing and forming, makes its radius-of-curvature reach requirement;
2) under the cooperation of auxiliary centering frock, catoptron and driver and support chassis are carried out reliably bonding and connect, the distorting lens device formed, and on this basis again roughing is carried out to the surface of catoptron;
3) carrying out Single point diamond turning o processing to completing rough machined distorting lens device, making its surface figure accuracy reach the level being better than 1 wavelength;
4) classic optical polish method is utilized to carry out the refine of working surface to the distorting lens after single-point turnery processing, until reach the required requirement being better than 1/10 wavelength surface figure accuracy.
Be that example is described with the development process of the Ultra-thin Beryllium of the bore 150mm shown in Fig. 1, thickness 3mm bronze catoptron print:
A) after drive array is connected with driver chassis is stable, be connected with position limiting structure opsition dependent tolerance again, except playing the effect of the locus of accurately each driver of location, also serve the effect strengthening drive array integral rigidity, make it not fragile in the process of processing;
B ~ c) connect excessive joint design to the head of driver, for carrying out bonding with the back of catoptron.Owing to needing to carry out attrition process to the excessive joint design of actuator head, seal with wax so all introduce in the gap of structural attachments, meanwhile also whole distorting lens device is encapsulated, thus avoid stained to driver and cable thereof of lapping liquid in attrition process process;
D) due to sphere that catoptron is with curvature, so by before bonding with back of reflecting mirror for the excessive joint of actuator head, attrition process is carried out to the excessive joint of actuator head, the situation of change of back of reflecting mirror curvature of can fitting, thus be convenient to the thickness controlling bonding glue-line;
E) after completing the attrition process to the excessive joint design of actuator head, utilize epoxy resin to carry out bonding by catoptron with drive array, and solidify and within more than 48 hours, make it form stable entirety;
F) in order to resist in process cross shear and axial force to the impact of drive array, to the overall external expansion ferrule arrangement of distorting lens, stressed with distorting lens structure in dispersion processing process.
Completing a) ~ f) step after, just adopt classic polishing processes and Single point diamond turning o processing method to carry out high-precision optical processing to the working surface of distorting lens, its result can reach the level being better than 1/10 wavelength.
The integrated processing technology of the sphere flow of metal mirror that the present invention proposes is applicable to comprise the multiple common metal materials such as nickel plating stainless steel, beryllium-bronze, aluminium, is with a wide range of applications.
Claims (6)
1. a sphere flow of metal mirror, is characterized in that: described sphere flow of metal mirror comprises catoptron, drive array and support chassis; Described catoptron is connected with bonding mode by crossover sub with between drive array, and described support chassis is connected in a screw connection manner with between drive array.
2. sphere flow of metal mirror according to claim 1, is characterized in that: the working surface of described catoptron is sphere, and the substrate of described catoptron is metal material, and described aperture of a mirror is not less than 100mm, and the radius-thickness ratio of described catoptron is not less than 30.
3. sphere flow of metal mirror according to claim 2, is characterized in that: described drive array comprises multiple piezoelectric ceramic actuator; Described multiple piezoelectric ceramic actuator is arranged in orthohexagonal mode.
4. sphere flow of metal mirror according to claim 3, is characterized in that: described drive array is made up of 61 piezoelectric ceramic actuators.
5. sphere flow of metal mirror according to claim 4, is characterized in that: described support chassis adopt the rigidity of material much larger than catoptron adopt the rigidity of material.
6. for an integrated processing technology for the sphere flow of metal mirror described in the arbitrary claim of claim 1-5, it is characterized in that: described integrated processing technology comprises the following steps:
1) roughing of super thin metal catoptron and surface forming processing;
2) piezoelectric ceramic actuator array and support chassis are connected by screw;
3) be inserted in the mesh dress protectiveness frock for spacing and enhancing drive array rigidity from the head of piezoelectric ceramic actuator array, and arrange three cushion blocks between mesh dress protectiveness frock and support chassis, three cushion blocks are 120 ° of distributions;
4) head of each driver in drive array is installed and is used for the crossover sub bonding with back of reflecting mirror, and the length of described crossover sub accurately obtains by calculating;
5) crossover sub is ground, crossover sub is mated with the trend of back of reflecting mirror curvature;
6) catoptron and crossover sub are gluedd joint, leave standstill and adhesive glue is solidified completely;
7) utilize single-point diamond lathe to carry out turnery processing to the sphere flow of metal mirror with driver and support chassis, reach the surface figure accuracy of 1 wavelength magnitude;
8) to through step 7) after sphere flow of metal mirror carry out precision optics polishing, reach and be better than 1/10 wavelength surface figure accuracy.
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| CN201510617155.4A CN105182529A (en) | 2015-09-24 | 2015-09-24 | Spherical metal deformable mirror and integrated processing technology thereof |
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| CN201510617155.4A CN105182529A (en) | 2015-09-24 | 2015-09-24 | Spherical metal deformable mirror and integrated processing technology thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108594756A (en) * | 2017-12-28 | 2018-09-28 | 云南北方驰宏光电有限公司 | The three-shaft linkage processing method of metallic mirror |
| CN111352233A (en) * | 2020-04-30 | 2020-06-30 | 中国科学院光电技术研究所 | High-thermal-disturbance-resistance aspheric surface deformation reflector and development method thereof |
| CN113534443A (en) * | 2020-04-21 | 2021-10-22 | 中国科学院理化技术研究所 | Driver and deformable mirror |
| CN114043321A (en) * | 2021-11-30 | 2022-02-15 | 北京创思工贸有限公司 | Deformable mirror processing method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6236490B1 (en) * | 2000-01-05 | 2001-05-22 | The B. F. Goodrich Company | Dual stage deformable mirror |
| CN101923214A (en) * | 2010-08-04 | 2010-12-22 | 中国科学院光电技术研究所 | Deformed secondary mirror based on piezoelectric driver |
| US20110211268A1 (en) * | 2008-08-14 | 2011-09-01 | Camet Sebastien | Deformable mirror having force actuators and distributed stiffness |
| CN103246058A (en) * | 2012-12-28 | 2013-08-14 | 清华大学 | Deformation mirror |
| CN103278923A (en) * | 2012-12-28 | 2013-09-04 | 清华大学 | Integrated type water-cooling heat dissipation mechanism of deformable mirror |
| CN205067863U (en) * | 2015-09-24 | 2016-03-02 | 中国科学院西安光学精密机械研究所 | Sphere metal distorting lens |
-
2015
- 2015-09-24 CN CN201510617155.4A patent/CN105182529A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6236490B1 (en) * | 2000-01-05 | 2001-05-22 | The B. F. Goodrich Company | Dual stage deformable mirror |
| US20110211268A1 (en) * | 2008-08-14 | 2011-09-01 | Camet Sebastien | Deformable mirror having force actuators and distributed stiffness |
| CN101923214A (en) * | 2010-08-04 | 2010-12-22 | 中国科学院光电技术研究所 | Deformed secondary mirror based on piezoelectric driver |
| CN103246058A (en) * | 2012-12-28 | 2013-08-14 | 清华大学 | Deformation mirror |
| CN103278923A (en) * | 2012-12-28 | 2013-09-04 | 清华大学 | Integrated type water-cooling heat dissipation mechanism of deformable mirror |
| CN205067863U (en) * | 2015-09-24 | 2016-03-02 | 中国科学院西安光学精密机械研究所 | Sphere metal distorting lens |
Non-Patent Citations (2)
| Title |
|---|
| Overview of Deformable Mirror Technologies for Adaptive Optics and Astronomy;P-Y Madec;《SPIE Astronomical Telescopes Instrumentation》;20120930;1-18页 * |
| Piezo Array Deformable Mirrors and new associated technologies:Spherical Shape and Tip/Tilt Mount;Jean-Christophe Sinquin, Jean-Marie Lurçon, Pierre Morin;《Adaptive Optics:Methods,Analysis and Applications》;20091031;1-4页 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108594756A (en) * | 2017-12-28 | 2018-09-28 | 云南北方驰宏光电有限公司 | The three-shaft linkage processing method of metallic mirror |
| CN113534443A (en) * | 2020-04-21 | 2021-10-22 | 中国科学院理化技术研究所 | Driver and deformable mirror |
| CN111352233A (en) * | 2020-04-30 | 2020-06-30 | 中国科学院光电技术研究所 | High-thermal-disturbance-resistance aspheric surface deformation reflector and development method thereof |
| CN114043321A (en) * | 2021-11-30 | 2022-02-15 | 北京创思工贸有限公司 | Deformable mirror processing method |
| CN114043321B (en) * | 2021-11-30 | 2023-03-03 | 北京创思工贸有限公司 | Deformable mirror processing method |
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