CN108318952B - Manufacturing process of SiC optical reflector based on 3D printing and diamond cutting - Google Patents
Manufacturing process of SiC optical reflector based on 3D printing and diamond cutting Download PDFInfo
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- CN108318952B CN108318952B CN201711398620.5A CN201711398620A CN108318952B CN 108318952 B CN108318952 B CN 108318952B CN 201711398620 A CN201711398620 A CN 201711398620A CN 108318952 B CN108318952 B CN 108318952B
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- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
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- G02B5/0808—Mirrors having a single reflecting layer
Abstract
The invention discloses a manufacturing process of a SiC optical reflector based on 3D printing and diamond cutting, which comprises the following steps: a: analyzing to obtain a back light-weight structure of the SiC optical reflector, and constructing a three-dimensional model; b: carrying out layering treatment in a 3D printer, preparing SiC ceramic powder, deionized water, a dispersing agent, a defoaming agent and a curing agent into ceramic slurry according to a proportion, printing and sintering the ceramic slurry layer by layer through the 3D printer to form a thin section layer to obtain a SiC optical reflector blank, and directly printing and molding a lightweight structure on the back of the blank; c: carrying out ultra-precision cutting processing on the front surface of the SiC optical reflector blank by adopting a diamond ductile cutting processing technology to obtain a high-precision processing surface; d. and performing mirror surface processing through classical polishing to finally obtain the high-precision SiC optical reflector. Through the mode, the manufacturing process of the SiC optical reflector based on 3D printing and diamond cutting machining can shorten the preparation process, save the preparation time, save the material and improve the precision of the SiC optical reflector.
Description
Technical Field
The invention relates to the field of optical reflectors, in particular to a manufacturing process of a SiC optical reflector based on 3D printing and diamond cutting.
Background
The optical reflector is an optical element working by utilizing the law of optical reflection, and is an important component of systems such as a space telescope, a ground telescope, a satellite, high-energy laser, a laser radar system, a high-resolution camera and the like. The optical reflector is generally divided into a mirror surface and a mirror body. The mirror surface has the function of ensuring the transmission or reflection of electromagnetic waves in a certain waveband, and requires that the thermal deformation coefficient of a mirror surface material is small (small thermal expansion rate and high thermal conductivity), the specific rigidity is large (small density and large elastic modulus) and the surface roughness is small; the lens body is used for supporting and positioning the lens surface, and the lens body material is required to be small in density (light in weight) and large in caliber and matched with the lens surface material. Silicon Carbide (SiC) has high specific stiffness, good thermal and chemical stability, low thermal deformation coefficient and resistance to space particle irradiation, and thus it is the first choice material for high performance mirrors required for modern optical systems.
The key indexes of the SiC optical reflector in size, surface shape, surface quality and the like are mainly determined by key technologies of design, preparation, processing, surface modification and the like. At present, one bottleneck restricting the preparation of SiC optics and reflectors is low preparation efficiency. After the reflector blank is obtained, the back surface of the reflector is generally required to be subjected to light-weight processing, and the front surface of the reflector is required to be subjected to grinding and polishing processing, so that the process is complicated. And the grinding processing precision is low, so that the subsequent optical polishing processing efficiency is low.
Disclosure of Invention
The invention mainly solves the technical problem of providing a manufacturing process of the SiC optical reflector based on 3D printing and diamond cutting processing, which can shorten the preparation process, save the preparation time, save the material and improve the precision of the SiC optical reflector.
In order to solve the technical problems, the invention adopts a technical scheme that: the manufacturing process of the SiC optical reflector based on 3D printing and diamond cutting machining comprises the following steps: a: obtaining an optimized SiC optical reflector back lightweight structural pattern by developing finite element analysis, and constructing a three-dimensional model; b: b, converting the three-dimensional model obtained in the step a, introducing the three-dimensional model into a 3D printer for layering treatment, preparing ceramic slurry from SiC ceramic powder, deionized water, a dispersing agent, a defoaming agent and a curing agent according to a proportion, pressurizing, printing and sintering the ceramic slurry layer by layer through the 3D printer to form a thin section layer to obtain a SiC optical reflector blank, and printing and molding the light-weight structure on the back of the blank at one step; c. c, carrying out ultra-precision cutting processing on the front surface of the SiC optical reflector blank prepared in the step b by adopting a diamond ductile cutting processing technology to obtain a high-precision processing surface; d. and c, performing mirror surface processing on the front surface of the SiC optical reflector blank processed in the step c through classical polishing, and finally obtaining the high-precision SiC optical reflector with specified surface roughness and flatness.
In a preferred embodiment of the present invention, in the step a, the optimal structural design of the lightweight structure is obtained by finite element analysis of contact stress parameters of the mirror during polishing of SiC mirrors having different lightweight structures.
In a preferred embodiment of the invention, in the step b, the SiC ceramic powder, deionized water, a dispersing agent, a defoaming agent and a curing agent are mixed according to the following mass parts (34-38): (8-11): (1-4): (1-4): preparing ceramic slurry according to the proportion of 1, then adopting a laser 3D printer to pressurize, print and sinter layer by layer to form a thin section layer, wherein the deposition rate is 2.3 cc/min-3.4 cc/min, and applying pressure of 180-225MPa to the ceramic slurry during the printing process to finally obtain the high-purity and high-density SiC blank with the density of more than 98 percent.
In a preferred embodiment of the invention, in the step b, the SiC ceramic powder, the deionized water, the dispersant, the defoamer and the curing agent are prepared into ceramic slurry according to a mass ratio of 36:9:3:3:1, then a laser 3D printer is used for printing and sintering layer by layer to form a thin section layer, the deposition rate is 3 cc/min, and a pressure of 200Mpa is applied to the ceramic slurry during printing to finally obtain a high-purity and high-density SiC blank with a density of more than 98%.
In a preferred embodiment of the present invention, said step c is performed on an ultra-precision lathe,and c, carrying out ultra-precise diamond cutting processing on the SiC optical reflector blank prepared in the step b by adopting a natural single crystal diamond cutter. The minimum position resolution of the lathe is 5nm, the maximum rotation speed of an air floatation main shaft is 5000rpm, the rigidity is more than 100N/mum, and the angular resolution is less than 0.001oThe dynamic balance is less than 10nm, the straightness of the guide rail is 0.2 mu m/200mm, and the positioning precision is 0.8 mu m. The cutting technological parameters of the front surface of the SiC reflector blank body are as follows: the rotation speed of the air floatation main shaft is 920-1050r/min, the cutting depth is 485-520nm, and the cutting speed is 2.7-3.2 m/min. The single crystal diamond cutter has a front angle of-25 degrees and a rear angle of 10 degrees, the arc radius of a cutter point is 1mm, and the radius of a cutting edge is 100 nm.
In a preferred embodiment of the present invention, the step c is performed on an ultra-precise lathe, and the SiC optical reflector blank obtained in the step b is subjected to ultra-precise diamond cutting by using a natural single crystal diamond cutter, wherein the minimum position resolution of the lathe is 5nm, the rotation speed of an air floatation spindle is 1000r/min, the cutting depth is 500nm, and the cutting speed is 3 m/min. The single crystal diamond cutter has a front angle of-25 degrees and a rear angle of 10 degrees, the arc radius of a cutter point is 1mm, and the radius of a cutting edge is 100 nm.
In a preferred embodiment of the present invention, the diamond suspension polishing solution and the polyurethane polishing pad are used in step d, the rotation speed of the polishing disk is 160-.
In a preferred embodiment of the invention, the diamond suspension polishing solution and the polyurethane polishing pad are passed through the step d, the rotation speed of the polishing disk is 140r/min, and the polishing time is 150 min.
In a preferred embodiment of the present invention, the dispersant is polyethylene glycol, the antifoaming agent is n-octanol, and the curing agent is p-toluenesulfonic acid.
The invention has the beneficial effects that: the manufacturing process of the SiC optical reflector based on 3D printing and diamond cutting processing can shorten the manufacturing process, save the manufacturing time, save the material and improve the precision of the SiC optical reflector.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without inventive efforts, wherein:
FIG. 1 is a schematic front view of a preferred embodiment of the SiC optic mirror of the present invention;
FIG. 2 is a schematic diagram of a backside light weighting design of a preferred embodiment of the SiC optic mirror of the present invention;
FIG. 3 is a table of contact pressures during polishing of SiC optical mirrors of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1: a manufacturing process of a SiC optical reflector based on 3D printing and diamond cutting machining comprises the following steps: a: and obtaining an optimized SiC optical reflector back light-weight structure pattern by developing finite element analysis, and constructing a three-dimensional model. And (3) analyzing dynamic and static characteristics, stress concentration, strength verification and the like of different lightweight structures by adopting finite element-based computer simulation to obtain an optimal SiC optical reflector back lightweight structure, as shown in figure 3, the figure is a contact pressure distribution cloud chart of the silicon reflector in the polishing process and the contact pressure variation trend along the radius direction. And determining the quality of the light-weight structural design of the back surface of the reflector according to the distribution uniformity of the contact stress. Under the condition that the back surface of the reflector is light in weight to a certain degree, the smaller the contact pressure is, the more uniform the distribution is, and the optimal structural design of the reflector is achieved;
b: and c, converting the three-dimensional model obtained in the step a to obtain an STL format file, introducing the STL format file into a 3D printer for layering, and mixing the SiC ceramic powder, deionized water, a dispersing agent, a defoaming agent and a curing agent according to the mass part of 36:9:3:3:1, preparing ceramic slurry, wherein a dispersing agent is polyethylene glycol, a defoaming agent is n-octanol, a curing agent is p-toluenesulfonic acid, then, adopting a laser 3D printer to perform pressurized printing and sintering layer by layer to form a thin section layer, wherein the deposition rate is 3 cc/min, and applying a pressure of 200MPa to the ceramic slurry during the printing process to finally obtain a high-purity and high-density SiC blank with the density of more than 98%; the back light-weight structure of the blank obtained by printing is printed and formed at one time, the front roughness of the blank reaches 1 mu m, and the optical reflector blank with lower surface roughness compared with the prior art can be obtained by the process, so that the process is more favorable for improving the precision and efficiency of subsequent processing.
c. And c, carrying out ultra-precision cutting on the front surface of the SiC optical reflector blank prepared in the step b by adopting a diamond ductile cutting technology to obtain a high-precision processing surface, cutting on a Nano Form ultra-precision lathe, and carrying out ultra-precision diamond cutting on the SiC optical reflector blank prepared in the step b by adopting a natural single crystal diamond cutter. The minimum position resolution of the lathe is 5nm, the maximum rotation speed of an air floatation main shaft is 5000rpm, the rigidity is more than 100N/mum, and the angular resolution is less than 0.001oThe dynamic balance is less than 10nm, the straightness of the guide rail is 0.2 mu m/200mm, and the positioning precision is 0.8 mu m. The cutting technological parameters of the front surface of the SiC reflector blank body are as follows: the rotation speed of the air floatation main shaft is 1000r/min, the cutting depth is 500nm, and the cutting speed is 3 m/min. The single crystal diamond cutter has a front angle of-25 degrees and a rear angle of 10 degrees, the arc radius of a cutter point is 1mm, the radius of a cutting edge is 100nm, the front surface of a high-purity and high-density SiC blank obtained by 3D printing is subjected to ultra-precision cutting, and due to the fact that the roughness of the front surface of the blank of the optical reflector reaches 1 mu m, designated surface roughness and planeness are easily obtained through the ultra-precision cutting, the processing efficiency is improved, and the optical performance of the processed optical reflector meets the requirements;
d. and c, performing mirror surface processing on the front surface of the SiC optical reflector blank processed in the step c through classical polishing, and finally obtaining the high-precision SiC optical reflector with specified surface roughness and flatness through diamond suspension polishing liquid and a polyurethane polishing pad at the rotating speed of 140r/min and the polishing time of 150 min.
Example 2: a manufacturing process of a SiC optical reflector manufactured based on 3D printing and diamond cutting comprises the following steps: a: and obtaining an optimized SiC optical reflector back light-weight structure pattern by developing finite element analysis, and constructing a three-dimensional model. And (3) analyzing dynamic and static characteristics, stress concentration, strength verification and the like of different lightweight structures by adopting finite element-based computer simulation to obtain an optimal SiC optical reflector back lightweight structure, as shown in figure 3, the figure is a contact pressure distribution cloud chart of the silicon reflector in the polishing process and the contact pressure variation trend along the radius direction. And determining the quality of the reflector structure design according to the contact stress distribution uniformity. Under the condition that the back surface of the reflector is light in weight to a certain degree, the smaller the contact pressure is, the more uniform the distribution is, and the optimal structural design of the reflector is achieved;
b: and (b) converting the three-dimensional model obtained in the step a to obtain an STL format file, introducing the STL format file into a 3D printer for layering, and mixing the SiC ceramic powder, deionized water, a dispersing agent, a defoaming agent and a curing agent in parts by weight of 34: 8: 4: 4: 1, preparing ceramic slurry, wherein a dispersing agent is polyethylene glycol, a defoaming agent is n-octanol, a curing agent is p-toluenesulfonic acid, then, adopting a laser 3D printer to perform pressurizing, printing and sintering layer by layer to form a thin section layer, wherein the deposition rate is 3.4 cc/min, and applying 225MPa pressure to the ceramic slurry during the printing process to finally obtain a high-purity and high-density SiC blank with the density of more than 98%; printing the obtained light-weight structure on the back of the blank body for one-time printing forming, wherein the roughness of the front of the blank body reaches 1 mu m.
c. And c, carrying out ultra-precision cutting on the front surface of the SiC optical reflector blank prepared in the step b by adopting diamond ductile cutting to obtain a high-precision processing surface, cutting on a Nano Form ultra-precision lathe, and carrying out ultra-precision diamond cutting on the SiC optical reflector blank prepared in the step b by adopting a natural single crystal diamond cutter. The minimum position resolution of the lathe is 5nm, and the maximum rotation speed of the air floatation main shaft is 5000rpm, rigidity greater than 100N/mum and angular resolution less than 0.001oThe dynamic balance is less than 10nm, the straightness of the guide rail is 0.2 mu m/200mm, and the positioning precision is 0.8 mu m. The cutting technological parameters of the front surface of the SiC reflector blank body are as follows: the rotation speed of the air floatation main shaft is 1050r/min, the cutting depth is 520nm, and the cutting speed is 3.2 m/min. The single crystal diamond cutter has a front angle of-25 degrees and a rear angle of 10 degrees, the arc radius of a cutter point is 1mm, and the radius of a cutting edge is 100 nm;
d. and c, performing mirror surface processing on the front surface of the SiC optical reflector blank processed in the step c through classical polishing, and finally obtaining the high-precision SiC optical reflector with specified surface roughness and flatness through diamond suspension polishing liquid and a polyurethane polishing pad, wherein the rotating speed of a polishing disc is 160r/min, and the polishing time is 160 min.
Example 3: a manufacturing process of a SiC optical reflector manufactured based on 3D printing and diamond cutting comprises the following steps: a: and obtaining an optimized SiC optical reflector back light-weight structure pattern by carrying out finite element analysis software analysis, and constructing a three-dimensional model. Dynamic and static characteristics, stress concentration, strength verification and the like of different lightweight structures are analyzed by finite element-based computer simulation, and an optimal SiC optical reflector back lightweight structure is obtained, as shown in FIG. 3, the graph is a contact pressure distribution cloud graph of a silicon carbide reflector in the polishing process and the contact pressure variation trend along the radius direction. And determining the quality of the reflector structure design according to the contact stress distribution uniformity. Under the condition that the back surface of the reflector is light in weight to a certain degree, the smaller the contact pressure is, the more uniform the distribution is, and the optimal structural design of the reflector is achieved;
b: and (b) converting the three-dimensional model obtained in the step a to obtain an STL format file, introducing the STL format file into a 3D printer for layering, and mixing the SiC ceramic powder, deionized water, a dispersing agent, a defoaming agent and a curing agent in parts by weight of 34: 8: 1: 1: 1, preparing ceramic slurry, wherein a dispersing agent is polyethylene glycol, a defoaming agent is n-octanol, a curing agent is p-toluenesulfonic acid, then, adopting a laser 3D printer to perform pressurized printing and sintering layer by layer to form a thin section layer, wherein the deposition rate is 2.3 cc/min, and applying 180MPa pressure to the ceramic slurry during the printing process to finally obtain a high-purity and high-density SiC blank with the density of more than 98%; printing the obtained light-weight structure on the back of the blank body for one-time printing forming, wherein the roughness of the front of the blank body reaches 1 mu m.
c. And c, carrying out ultra-precision cutting on the front surface of the SiC optical reflector blank prepared in the step b by adopting diamond ductile cutting to obtain a high-precision processing surface, cutting on a Nano Form ultra-precision lathe, and carrying out ultra-precision diamond cutting on the SiC optical reflector blank prepared in the step b by adopting a natural single crystal diamond cutter. The minimum position resolution of the lathe is 5nm, the maximum rotation speed of an air floatation main shaft is 5000rpm, the rigidity is more than 100N/mum, and the angular resolution is less than 0.001oThe dynamic balance is less than 10nm, the straightness of the guide rail is 0.2 mu m/200mm, and the positioning precision is 0.8 mu m. The cutting technological parameters of the front surface of the SiC reflector blank body are as follows: the rotation speed of the air floatation main shaft is 920r/min, the cutting depth is 485nm, and the cutting speed is 2.7 m/min. The single crystal diamond cutter has a front angle of-25 degrees and a rear angle of 10 degrees, the arc radius of a cutter point is 1mm, and the radius of a cutting edge is 100 nm;
d. and c, performing mirror surface processing on the front surface of the SiC optical reflector blank processed in the step c through classical polishing, and finally obtaining the high-precision SiC optical reflector with specified surface roughness and flatness through diamond suspension polishing liquid and a polyurethane polishing pad, wherein the rotating speed of a polishing disc is 120r/min, and the polishing time is 135 min.
Compared with the existing SiC optical reflector preparation process, the manufacturing process of the SiC optical reflector based on 3D printing and diamond cutting processing of the invention obtains an optimized lightweight structure by using computer simulation analysis, and one-step forming is carried out by 3D printing additive manufacturing, so that the preparation procedures are greatly reduced, the preparation time is saved, the process innovation of replacing the traditional precision grinding by ultra-precision diamond cutting processing is adopted, the SiC surface processing precision and efficiency are effectively improved, and the material removal amount in the time-consuming polishing process is reduced, thereby effectively saving the mechanical processing time and improving the preparation efficiency.
Compared with the prior art, the manufacturing process of the SiC optical reflector based on 3D printing and diamond cutting processing can shorten the preparation process, save the preparation time, save the material and improve the precision of the SiC optical reflector.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by the present specification, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (8)
1. A manufacturing process of a SiC optical reflector based on 3D printing and diamond cutting machining is characterized by comprising the following steps:
a: obtaining a back light-weight structure of the SiC optical reflector by developing finite element analysis, and constructing a three-dimensional model;
b: b, converting the three-dimensional model obtained in the step a, introducing the three-dimensional model into a 3D printer for layering treatment, preparing ceramic slurry from SiC ceramic powder, deionized water, a dispersing agent, a defoaming agent and a curing agent according to a proportion, and performing pressurization, printing and sintering layer by layer through the 3D printer to obtain a section thin layer to obtain a SiC optical reflector blank, wherein the lightweight structure on the back of the blank is subjected to one-step printing forming;
c. carrying out ultra-precise cutting on the front surface of the SiC optical reflector blank prepared in the step b by adopting a diamond ductile cutting process to obtain a high-precision processing surface, wherein the blank is carried out on an ultra-precise lathe, and the ultra-precise diamond cutting is carried out on the front surface of the SiC optical reflector blank prepared in the step b by adopting a natural single crystal diamond cutter, the resolution of the minimum position of the lathe is 5nm, the maximum rotation speed of an air floatation spindle is 5000rpm, the rigidity is more than 100N/mu m, and the angular resolution is less than 0.001oThe dynamic balance is less than 10nm, the straightness of the guide rail is 0.2 mu m/200mm, the positioning precision is 0.8 mu m, and the cutting technological parameters of the front surface of the SiC reflector embryo body are as follows: the rotation speed of the air floatation main shaft is 920-1050r/min, the cutting depth is 485-520nm, the cutting speed is 2.7-3.2m/min, the single crystal diamond cutter has a front angle of-25 degrees and a rear angle of 10 degrees, the arc radius of the cutter tip is 1mm, and the radius of the cutting edge is 100 nm;
d. and c, performing mirror surface processing on the front surface of the SiC optical reflector blank processed in the step c through classical polishing, and finally obtaining the high-precision SiC optical reflector with specified surface roughness and flatness.
2. The manufacturing process of the SiC optical mirror based on 3D printing and diamond turning according to claim 1, wherein the optimal structural design of the light-weight structure is obtained in the step a by finite element analysis of contact stress parameters of the mirror during polishing of SiC mirrors with different light-weight structures.
3. The manufacturing process of the SiC optical mirror based on 3D printing and diamond turning according to claim 1, wherein in the step b, SiC ceramic powder, deionized water, a dispersing agent, an antifoaming agent and a curing agent are mixed according to the following mass parts (34-38): (8-11): (1-4): (1-4): 1 proportion, preparing ceramic slurry, printing and sintering the ceramic slurry layer by adopting a laser 3D printer to form a thin section layer, wherein the deposition rate is 2.3 cc/min-3.4 cc/min, applying pressure of 180 plus 225Mpa to the ceramic slurry during printing, finally obtaining a high-purity and high-density SiC blank with the density of more than 98%, printing and molding the back light-weight structure of the blank obtained by printing at one time, and the front roughness of the blank reaches 1 mu m.
4. The manufacturing process of the SiC optical reflector based on 3D printing and diamond turning according to claim 3, wherein in the step b, SiC ceramic powder, deionized water, a dispersing agent, a defoaming agent and a curing agent are prepared into ceramic slurry according to the mass ratio of 36:9:3:3:1, then a laser 3D printer is adopted to print and sinter layer by layer to form a thin section layer, the deposition rate is 3 cc/min, and in the printing process, 200MPa pressure is applied to the ceramic slurry at the same time, so that a high-purity and high-density SiC blank with the density of more than 98% is finally obtained.
5. The manufacturing process of the SiC optical reflector based on 3D printing and diamond cutting machining according to claim 1, wherein the step c is performed on an ultra-precise lathe, a natural single crystal diamond cutter is used for performing ultra-precise diamond cutting machining on the SiC optical reflector blank prepared in the step b, the minimum position resolution of the lathe is 5nm, the rotation speed of an air floatation main shaft is 1000r/min, the cutting depth is 500nm, the cutting speed is 3m/min, the single crystal diamond cutter has a front angle of-25 degrees and a rear angle of 10 degrees, the arc radius of the cutter point is 1mm, and the radius of the cutting edge is 100 nm.
6. The manufacturing process of SiC optical mirror based on 3D printing and diamond turning as claimed in claim 1, wherein the diamond suspension polishing solution and polyurethane polishing pad are used in step D, the rotation speed of the polishing disk is 160r/min and the polishing time is 160min and 135 min.
7. The manufacturing process of the SiC optical mirror based on 3D printing and diamond turning according to claim 6, wherein the polishing solution and the polyurethane polishing pad are suspended by diamond in the step D, the rotating speed of the polishing disk is 140r/min, and the polishing time is 150 min.
8. The manufacturing process of the SiC optical mirror based on 3D printing and diamond turning according to any one of claims 1 to 7, wherein the dispersant is polyethylene glycol, the antifoaming agent is n-octanol, and the curing agent is p-toluenesulfonic acid.
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| CN111390653A (en) * | 2020-03-23 | 2020-07-10 | 中国科学院长春光学精密机械与物理研究所 | Preparation method of off-axis aspheric silicon carbide lightweight reflector |
| CN111624691B (en) * | 2020-05-25 | 2021-08-20 | 中国科学院长春光学精密机械与物理研究所 | Metal reflector and manufacturing method thereof |
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| CN113277853A (en) * | 2021-05-25 | 2021-08-20 | 武汉理工大学 | Laser additive manufacturing method of silicon carbide composite large-size ultra-light optical reflector |
| CN113504626B (en) * | 2021-06-21 | 2023-04-11 | 上海现代先进超精密制造中心有限公司 | 3D prints optical reflector |
| CN114415326A (en) * | 2021-12-29 | 2022-04-29 | 北京空间机电研究所 | Mirror body and mirror frame integrated reflector design and adjustment method |
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