CN103278923A - Integrated type water-cooling heat dissipation mechanism of deformable mirror - Google Patents
Integrated type water-cooling heat dissipation mechanism of deformable mirror Download PDFInfo
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- CN103278923A CN103278923A CN2013102370193A CN201310237019A CN103278923A CN 103278923 A CN103278923 A CN 103278923A CN 2013102370193 A CN2013102370193 A CN 2013102370193A CN 201310237019 A CN201310237019 A CN 201310237019A CN 103278923 A CN103278923 A CN 103278923A
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Abstract
The invention discloses an integrated type water-cooling heat dissipation mechanism of a deformable mirror. The integrated type water-cooling heat dissipation mechanism of the deformable mirror comprises a heat sink, a mirror body, an actuating element and two water connectors, wherein a containing groove is formed in the heat sink, the top of the containing groove is open, a water inlet and a water outlet are formed in the heat sink, a plurality of mirror legs are arranged on the heat sink, and each mirror leg is arranged on the heat sink in a penetrating mode in the vertical direction. The mirror body is arranged on the top of the heat sink, and the lower surface of the mirror body is connected with the upper surface of each mirror leg. A plurality of actuating legs are arranged on the actuating element, each actuating leg is connected with the lower surface of one mirror leg, and therefore the amount of deformation of the mirror body is controlled through control over the amount of actuating of each actuating leg. The two water collectors are communicated with the water inlet and the water outlet respectively. According to the integrated type water-cooling heat dissipation mechanism of the deformable mirror, heat of laser penetrating through the mirror body can be adsorbed by cooling liquid in the heat sink, so that the phenomenon that working performance of the actuating element is influenced by radiation of the laser penetrating through the mirror body is avoided. Therefore, the amount of deformation of the mirror body will not be influenced by fluctuation of the temperature, and stability of the deformable mirror is improved.
Description
Technical field
The present invention relates to the distorting lens field, especially relate to a kind of distorting lens monoblock type water-cooling mechanism.
Background technology
Distorting lens, claim deformation reflection mirror again, mainly apply among the various ADAPTIVE OPTICS SYSTEMS, proofread and correct wavefront error as the wavefront correction device, in ADAPTIVE OPTICS SYSTEMS, play an important role, be one of vitals in the ADAPTIVE OPTICS SYSTEMS, the research and development of distorting lens is related to calibration capability and the correction accuracy of whole ADAPTIVE OPTICS SYSTEMS.
But also there is its design limitations in the distorting lens mechanism that uses now, when laser to be processed shines its workplace, the actuation element of distorting lens will be heated up rapidly by the remaining laser irradiation of small part, makes pedestal produce expansion even make the impaired inefficacy of actuation element together with each accessory.Even small temperature fluctuation also can influence the deformation quantity of distoring mirror.
Summary of the invention
The present invention is intended to solve at least one of technical matters that exists in the prior art.For this reason, one object of the present invention is to propose the distorting lens monoblock type water-cooling mechanism that a kind of deformation quantity that guarantees the mirror body is not subjected to the influence that temperature floats.
Distorting lens monoblock type water-cooling mechanism according to the embodiment of the invention, comprise: heat sink, describedly be provided be used to the groove that holds that holds liquid coolant and open-top in heat sink, described heat sink being provided with described holds water inlet and the water delivering orifice that groove is communicated with, described heat sink a plurality of mirror legs that are provided with, each described mirror leg vertical direction be located in described heat sink on; Mirror body, described mirror body are located at described heat sink top sealing the described groove that holds, and the lower surface of described mirror body links to each other with the upper surface of each described mirror leg; Actuation element, described actuation element are provided with a plurality of actuating legs, and described a plurality of actuating legs are connected to control the deformation quantity of described mirror body by the actuating amount of controlling each described actuating leg respectively with the lower surface of described a plurality of mirror legs; Two water swivels, described two water swivels are communicated with described water inlet and described water delivering orifice respectively.
Distorting lens monoblock type water-cooling mechanism according to the embodiment of the invention, heat sink by being provided with, the heat that passes the laser of mirror body can be absorbed by the liquid coolant in heat sink, and heat conduction efficiency height, avoid actuation element to be passed laser irradiation of mirror body by this and influenced the serviceability of actuation element, thereby the deformation quantity of the mirror body in this distorting lens monoblock type water-cooling mechanism is not subjected to the unsteady influence of temperature, improved the stability of distorting lens, and this distorting lens monoblock type water-cooling mechanism structure is simple.
In addition, mirror monoblock type water-cooling mechanism also has following additional technical feature according to a modification of this invention:
According to some embodiments of the present invention, the lower surface of described mirror body is provided with a plurality of connection legs, and a plurality of described connection legs link to each other with a plurality of described mirror legs respectively.Thereby be convenient to the assembling of mirror body and a plurality of mirror leg.
Further, distorting lens monoblock type water-cooling mechanism also comprises a plurality of connectors, and each described connector is located at respectively between the upper surface of the lower surface of described connection leg and described mirror leg.Thereby further be convenient to the mirror body be assemblied in heat sink on.
In some embodiments of the invention, distorting lens monoblock type water-cooling mechanism also comprises fixed frame, described fixed frame be located at described heat sink on, and the lower surface of the part of described fixed frame contacts with the upper surface of described mirror body.Thereby by be provided with fixed frame can improve the mirror body and heat sink between sealing, avoid holding the leakage of liquid coolant in the groove.
Further, the described heat sink pilot hole that is provided with, described fixed frame is provided with the positioning convex that cooperates with described pilot hole.Thereby be convenient to fixed frame be fixed on heat sink on.
According to some embodiments of the present invention, the described flute profile that holds becomes the square groove that is recessed into from described heat sink upper surface downwards.Thereby can increase the storage capacity of liquid coolant, improve the thermal diffusivity of distorting lens monoblock type water-cooling mechanism, further guarantee the influence that distorting lens is not floated by temperature.
Further, described heat sink upper surface around and close on that a described part that holds groove is recessed to form square pilot hole downwards, described mirror body is assemblied in the described square pilot hole.Thereby further be convenient to the mirror body be assemblied in heat sink on.
Preferably, the upper surface of described mirror body is concordant with described heat sink upper surface.
Alternatively, described heat sink be metalwork.Thereby be conducive to the conduction of heat.
In some embodiments of the invention, each described water swivel comprises: first cylindrical shell, described first cylindrical shell are assemblied on corresponding described water inlet or the described water delivering orifice; Second cylindrical shell, described second cylindrical shell stretches out from an end of described first cylindrical shell, and the internal diameter of described second cylindrical shell is less than the internal diameter of described first cylindrical shell; Annular protrusion, described annular protrusion are located on the end of described first cylindrical shell of vicinity of described second cylindrical shell.Thereby can improve the sealing between water swivel and corresponding water inlet or the water delivering orifice.
Additional aspect of the present invention and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Description of drawings
Above-mentioned and/or additional aspect of the present invention and advantage are from obviously and easily understanding becoming the description of embodiment in conjunction with following accompanying drawing, wherein:
Fig. 1 is the synoptic diagram according to the distorting lens monoblock type water-cooling mechanism of the embodiment of the invention;
Fig. 2 is the schematic internal view of distorting lens monoblock type water-cooling mechanism shown in Figure 1;
Fig. 3 is the decomposing schematic representation of distorting lens monoblock type water-cooling mechanism shown in Figure 1;
Fig. 4 is according to the heat sink synoptic diagram in the distorting lens monoblock type water-cooling mechanism of the embodiment of the invention.
Reference numeral:
Distorting lens monoblock type water-cooling mechanism 100, heat sink 1, hold groove 10, water inlet 11,
Activate leg 30, water swivel 4, first cylindrical shell 40, second cylindrical shell 41, annular protrusion 42,
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein identical or similar label is represented identical or similar elements or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment that is described with reference to the drawings, only be used for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center "; " vertically "; " laterally "; " on "; D score; " preceding ", " back ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", close the orientation of indications such as " outward " or position is based on orientation shown in the drawings or position relation, only be that the present invention for convenience of description and simplification are described, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second " only are used for describing purpose, and can not be interpreted as indication or hint relative importance.
In description of the invention, need to prove that unless clear and definite regulation and restriction are arranged in addition, term " installation ", " linking to each other ", " connection " should be done broad understanding, for example, can be fixedly connected, also can be to removably connect, or connect integratedly; Can be mechanical connection, also can be to be electrically connected; Can be directly to link to each other, also can link to each other indirectly by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can concrete condition understand above-mentioned term concrete implication in the present invention.In addition, in description of the invention, except as otherwise noted, the implication of " a plurality of " is two or more.
Below with reference to Fig. 1-Fig. 4 a kind of distorting lens monoblock type water-cooling mechanism 100 according to the embodiment of the invention is described.
Distorting lens monoblock type water-cooling mechanism 100 according to the embodiment of the invention, shown in Figure 4 as 1-, comprise: heat sink 1, mirror body 2, actuation element 3 and two water swivels 4, be provided with in heat sink 1 be used to what hold liquid coolant and open-top and hold groove 10, heat sink 1 is provided with and holds water inlet 11 and the water delivering orifice 12 that groove 10 is communicated with, heat sink 1 is provided with a plurality of mirror legs 13, each mirror leg 13 is located on heat sink 1 at vertical direction, be that each mirror leg 13 in the vertical direction runs through heat sink 1, that is to say, the upper end of each mirror leg 13 protrudes upward heat sink 1 upper surface, and the lower ends downward of each mirror leg 13 is stretched out heat sink 1 lower surface.Wherein, liquid coolant can be water.Alternatively, heat sink 1 is metalwork, and preferably, heat sink 1 is stainless steel part, thereby can be beneficial to the conduction of heat, and is not easy corrosion.
Wherein, what deserves to be explained is that actuation element 3 can be electrically connected with the detection agency of light path and activate the actuating amount of leg 30 with the signal controlling according to detection agency output accordingly.Actuation element 3 can comprise pedestal and various accessory, and actuation element 3 can be controlled each actuating amount that moves up and down that activates leg 30, and this actuation element 3 not only can control each to activate leg 30 mobile separately, and it is mobile simultaneously that actuation element 3 also can be controlled a plurality of actuating legs 30.The principle of work of actuation element 3 etc. has been known by those skilled in the art, just is not described in detail here.
Distorting lens monoblock type water-cooling mechanism 100 is when work, laser is radiated on the upper surface of mirror body 2, the detection agency of light path is sampled to the laser of irradiation and its wavefront front is calculated, and result of calculation fed back to actuation element 3 in real time, actuation element 3 calculates the actuating amount that each activates point according to the front intensity distributions, thus the deformation quantity of control mirror body 2.The most of laser that is radiated at mirror body 2 upper surfaces is reflected away, the laser of small portion of residual passes mirror body 2 and is radiated on heat sink 1, the liquid coolant heat that irradiation produces to laser that holds this moment in the groove 10 absorbs, and by external circulating system transfer of heat is gone out distorting lens monoblock type water-cooling mechanism 100.
Distorting lens monoblock type water-cooling mechanism 100 according to the embodiment of the invention, by being provided with heat sink 1, the heat that passes the laser of mirror body 2 can be absorbed by the liquid coolant in heat sink 1, and heat conduction efficiency height, avoid actuation element 3 to be passed laser irradiation of mirror body 2 by this and influenced the serviceability of actuation element 3, thereby the influence that the deformation quantity of the mirror body 2 in this distorting lens monoblock type water-cooling mechanism 100 is not floated by temperature, improved the stability of distorting lens, and this distorting lens monoblock type water-cooling mechanism 100 is simple in structure.
In some embodiments of the invention, as shown in Figure 2, the lower surface of mirror body 2 is provided with a plurality of connection legs 5, and a plurality of connection legs 5 link to each other with a plurality of mirror legs 13 respectively.Thereby be convenient to mirror body 2 and a plurality of mirror leg 13 assemblings.Wherein, a plurality of connection legs 5 are evenly distributed on the lower surface of mirror body 2 stability with further raising distorting lens, and a plurality of connection leg 5 can adopt the miller skill to be located on the lower surface of mirror body 2.
Further, distorting lens monoblock type water-cooling mechanism 100 also comprises a plurality of connectors 6, and each connector 6 is located at respectively between the upper surface of the lower surface of connection leg 5 and mirror leg 13.Thereby further being convenient to mirror body 2 is assemblied on heat sink 1.
As shown in Figure 1-Figure 3, in some embodiment of invention, distorting lens monoblock type water-cooling mechanism 100 also comprises fixed frame 7, and fixed frame 7 is located on heat sink 1, and the lower surface of the part of fixed frame 7 contacts with the upper surface of mirror body 2.Thereby can improve sealing between mirror body 2 and heat sink 1 by being provided with fixed frame 7, avoid holding the leakage of liquid coolants in the groove 10.Further, heat sink 1 is provided with pilot hole 14, and fixed frame 7 is provided with the positioning convex 70 that cooperates with pilot hole 14.Thereby being convenient to fixed frame 7 is fixed on heat sink 1.
As Fig. 2-shown in Figure 4, according to some embodiments of the present invention, hold groove 10 and form from heat sink 1 upper surface recessed square groove downwards.Thereby can increase the storage capacity of liquid coolant, improve the thermal diffusivity of distorting lens monoblock type water-cooling mechanism 100, further guarantee the influence that distorting lens is not floated by temperature.At this moment, a plurality of mirror legs 13 are located at and hold in the groove 10, and are evenly distributed on and hold in the groove 10, and water inlet 11 and water delivering orifice 12 are located on the sidewall that holds groove 10.Preferably, the diapire that holds groove 10 should be thinner, and purpose is the obstruction that reduces the actuation force of actuation element 3, improves the actuation effect to mirror body 2.
Further, as Fig. 2-shown in Figure 4, heat sink 1 upper surface around and close on that a part that holds groove 10 is recessed to form square pilot hole 15 downwards, mirror body 2 is assemblied in the square pilot hole 15, is assemblied on heat sink 1 thereby further be convenient to mirror body 2.Preferably, the upper surface of mirror body 2 is concordant with heat sink 1 upper surface.At this moment, fixed frame 7 side's of forming annulars, positioning convex 70 is located on the lower surface of fixed frame 7, and pilot hole 14 is located on heat sink 1 the upper surface, by cooperating of positioning convex 70 and pilot hole 14 fixed frame 7 being located on heat sink 1 the upper surface.
As shown in Figure 2, in some embodiments of the invention, each water swivel 4 comprises: first cylindrical shell 40, second cylindrical shell 41 and annular protrusion 42, the first cylindrical shells 40 are assemblied on corresponding water inlet 11 or the water delivering orifice 12.Second cylindrical shell 41 stretches out from an end of first cylindrical shell 40, and the internal diameter of second cylindrical shell 41 is less than the internal diameter of first cylindrical shell 40.Annular protrusion 42 is located on the end of vicinity first cylindrical shell 40 of second cylindrical shell 41, when being assemblied in water swivel 4 on water inlet 11 or the water delivering orifice 12, the sidewall of vicinity first cylindrical shell 40 of annular protrusion 42 is close on heat sink 1 the lateral wall, thereby can improve the sealing between water swivel 4 and corresponding water inlet 11 or the water delivering orifice 12.
Below with reference to Fig. 1-Fig. 4 the assembling process of distorting lens monoblock type water-cooling mechanism 100 is according to the preferred embodiment of the invention described.
At first, upper surface and the lower surface of each connector 6 are all coated structure glue, be placed in the top of a plurality of mirror legs 13 in heat sink 1 successively, exert oneself evenly to guarantee that each connector 6 is on the same surface level in the installation as far as possible.The upper surface that a plurality of connection legs 5 of mirror body 2 are aimed at a plurality of connectors 6 is installed in the square pilot hole 15 again, and after structure glue was solidified, namely mirror body 2 installed.Then in the pilot hole 14 of heat sink 1 upper surface, be coated with structure glue, with the pilot hole 14 on positioning convex 70 alignings heat sink 1 of fixed frame 7, put it into and compress, after structure glue is solidified, fixed frame 7 installations, coat fluid sealant at the seam crossing of fixed frame 7 peripheries this moment, guarantees heat sink 1 sealing.
First cylindrical shell 40 at each water swivel 4 is wrapped with raw material band, and it is screwed in corresponding water inlet 11 or the water delivering orifice 12.After installing, hold in the groove 10 water flowing a period of times with the sealing of check distorting lens monoblock type water-cooling mechanism 100 in heat sink 1.After after a while, guarantee the no liquid leakage, illustrate that then sealing is good.
The upper surface that each of actuation element 3 is activated leg 30 is coated structure glue at last, with be equipped with mirror body 2 and water swivel 4 heat sink 1 on a plurality of mirror legs 13 upper surface of aiming at a plurality of actuating legs 30 correspondingly install, after structure glue was solidified, distorting lens monoblock type water-cooling mechanism 100 installed.
Distorting lens monoblock type water-cooling mechanism 100 according to the embodiment of the invention, formed by four functional parts altogether, be respectively fixture, work package, radiating piece, web member, wherein, fixture comprises fixed frame 7, plays the effect of fixed mirror body 2, and work package comprises mirror body 2, it is the core component of distorting lens monoblock type water-cooling mechanism 100, and laser obtains shaping and reflection by mirror body 2.It is heat sink 1 that radiating piece comprises, it is the core component of distorting lens monoblock type water-cooling mechanism 100.Web member comprises connector 6 and water swivel 4, connector 6 plays the effect of connection heat sink 1 and mirror body 2, water swivel 4 plays the effect of the water pipe of connection heat sink 1 and periphery, thereby can greatly facilitate maintenance and the replacing of distorting lens monoblock type water-cooling mechanism 100 by this design, be conducive to the heat radiation of heavy caliber distorting lens, be conducive to improve heat dissipation capacity and conversion efficiency, the heat conduction efficiency height, the deformation quantity that has guaranteed distorting lens is not subjected to the unsteady influence of temperature, improve the stability of distorting lens, and this distorting lens monoblock type water-cooling mechanism 100 compact conformations.
In the description of this instructions, concrete feature, structure, material or characteristics that the description of reference term " embodiment ", " some embodiment ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means in conjunction with this embodiment or example description are contained at least one embodiment of the present invention or the example.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete feature, structure, material or the characteristics of description can be with the suitable manner combination in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that: can carry out multiple variation, modification, replacement and modification to these embodiment under the situation that does not break away from principle of the present invention and aim, scope of the present invention is limited by claim and equivalent thereof.
Claims (10)
1. a distorting lens monoblock type water-cooling mechanism is characterized in that, comprising:
Heat sink, describedly be provided be used to the groove that holds that holds liquid coolant and open-top in heat sink, described heat sink being provided with described holds water inlet and the water delivering orifice that groove is communicated with, described heat sink a plurality of mirror legs that are provided with, each described mirror leg vertical direction be located in described heat sink on;
Mirror body, described mirror body are located at described heat sink top sealing the described groove that holds, and the lower surface of described mirror body links to each other with the upper surface of each described mirror leg;
Actuation element, described actuation element are provided with a plurality of actuating legs, and described a plurality of actuating legs are connected to control the deformation quantity of described mirror body by the actuating amount of controlling each described actuating leg respectively with the lower surface of described a plurality of mirror legs;
Two water swivels, described two water swivels are communicated with described water inlet and described water delivering orifice respectively.
2. distorting lens monoblock type water-cooling according to claim 1 mechanism is characterized in that the lower surface of described mirror body is provided with a plurality of connection legs, and a plurality of described connection legs link to each other with a plurality of described mirror legs respectively.
3. distorting lens monoblock type water-cooling according to claim 2 mechanism is characterized in that, also comprises a plurality of connectors, and each described connector is located at respectively between the upper surface of the lower surface of described connection leg and described mirror leg.
4. distorting lens monoblock type water-cooling according to claim 1 mechanism is characterized in that, also comprises fixed frame, described fixed frame be located at described heat sink on, and the lower surface of the part of described fixed frame contacts with the upper surface of described mirror body.
5. distorting lens monoblock type water-cooling according to claim 4 mechanism is characterized in that, the described heat sink pilot hole that is provided with, and described fixed frame is provided with the positioning convex that cooperates with described pilot hole.
6. distorting lens monoblock type water-cooling according to claim 1 mechanism is characterized in that, the described flute profile that holds becomes from described heat sink upper surface recessed square groove downwards.
7. distorting lens monoblock type water-cooling according to claim 6 mechanism, it is characterized in that, described heat sink upper surface around and close on that a described part that holds groove is recessed to form square pilot hole downwards, described mirror body is assemblied in the described square pilot hole.
8. distorting lens monoblock type water-cooling according to claim 7 mechanism is characterized in that the upper surface of described mirror body is concordant with described heat sink upper surface.
9. distorting lens monoblock type water-cooling according to claim 1 mechanism is characterized in that, described heat sink be metalwork.
10. distorting lens monoblock type water-cooling according to claim 1 mechanism is characterized in that each described water swivel comprises:
First cylindrical shell, described first cylindrical shell are assemblied on corresponding described water inlet or the described water delivering orifice;
Second cylindrical shell, described second cylindrical shell stretches out from an end of described first cylindrical shell, and the internal diameter of described second cylindrical shell is less than the internal diameter of described first cylindrical shell;
Annular protrusion, described annular protrusion are located on the end of described first cylindrical shell of vicinity of described second cylindrical shell.
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| CN201310237019.3A CN103278923B (en) | 2012-12-28 | 2013-06-14 | Distorting lens monoblock type water-cooling mechanism |
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| CN201210585717.8 | 2012-12-28 | ||
| CN201210585717 | 2012-12-28 | ||
| CN201310237019.3A CN103278923B (en) | 2012-12-28 | 2013-06-14 | Distorting lens monoblock type water-cooling mechanism |
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| CN103278923B CN103278923B (en) | 2016-01-20 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103728723A (en) * | 2014-01-06 | 2014-04-16 | 中国工程物理研究院应用电子学研究所 | Active cooling type one-dimensional wave surface correction device |
| CN104330892A (en) * | 2014-11-03 | 2015-02-04 | 中国工程物理研究院应用电子学研究所 | Water-cooled type deformable mirror |
| CN105182529A (en) * | 2015-09-24 | 2015-12-23 | 中国科学院西安光学精密机械研究所 | Spherical metal deformable mirror and integrated processing technology thereof |
| CN106781936A (en) * | 2016-12-27 | 2017-05-31 | 上海宝瓶建筑装饰工程有限公司 | Mirror imaging principle exhibiting device |
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| CN106781936A (en) * | 2016-12-27 | 2017-05-31 | 上海宝瓶建筑装饰工程有限公司 | Mirror imaging principle exhibiting device |
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| Publication number | Publication date |
|---|---|
| CN103278923B (en) | 2016-01-20 |
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