CN105068213A - Variable-camber reflector device - Google Patents
Variable-camber reflector device Download PDFInfo
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- CN105068213A CN105068213A CN201510507265.5A CN201510507265A CN105068213A CN 105068213 A CN105068213 A CN 105068213A CN 201510507265 A CN201510507265 A CN 201510507265A CN 105068213 A CN105068213 A CN 105068213A
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Abstract
The invention relates to a variable-camber reflector device, and the device comprises a lens cone, a pressure ring, a reflector, a conical spring shaped like a super-thin plate, an annular supporting seat, an annular thrust ring, a driver array, and a supporting chassis for fixing the driver array. The reflector is pressed into the conical spring shaped like the super-thin plate, and forms a body along with the conical spring shaped like the super-thin plate. The pressure ring, the conical spring shaped like the super-thin plate, the annular supporting seat, the annular thrust ring, the driver array and the supporting chassis for fixing the driver array sequentially abut, are jointly disposed in the lens cone and are coaxial with the lens cone. The device is stable in spatial position, can achieve the uniform change of camber, and also achieve certain compensation for the surface figure accuracy after deformation.
Description
Technical field
The invention belongs to optical field, relate to a kind of curvature mirrors device.
Background technology
Curvature mirrors belongs to a kind of powered optical element, and its blank can trace back to the achievement in research of the Hebrew University of Jerusalem in 1973 the earliest.After this, USSR (Union of Soviet Socialist Republics), Germany, the U.S., France etc. have all carried out the development work of large quantifier elimination and prototype plant around curvature mirrors technology, and Chinese scientific research personnel had also joined in the middle of the research in this field in the last few years.
Curvature mirrors has the application of two main flows.The first promotes the output beam quality of high-energy laser; It two is realize movement-less part optical zoom.High power during high-energy laser work can produce high temperature in resonator cavity, thus makes the generation thermal deformation of resonator cavity window glass and introduce spherical aberration and out of focus, and then worsens the quality of output beam.The spherical aberration that curvature mirrors can be caused thermal lensing effect by the radius-of-curvature changing self and out of focus carry out effective compensation, thus reach the object of improving laser device beam quality.Traditional zoom technology is the relative motion that mechanical compensation formula or optical compensation formula all rely between eyeglass or mirror group, limits it to a certain extent to the application required in space, power consumption and stability etc. in harsh field.The appearing as of curvature mirrors realizes movement-less part zoom and provides technical possibility, in brief, the change of mirror curvature corresponds to the change of focal power, and the subtle change of local element focal power then can be enlarged into the significantly change of system focal length by the optical design of optical lever effect.
The mechanism of mirror curvature change has its source in thin plate elastic theory.Pertinent literature shows, has following two kinds of modes that can realize Curvature varying at present.The first, single drive point directly acts on (this region equivalent radius is much smaller than catoptron radius) on the region of the limited size of mirror center.Theoretical according to thin plate elastic, this type of drive can not produce spherical deformation within completely reflecting mirror bore scope, also cannot produce parabola distortion, and driving force is larger, change with the desirable face shape required by Curvature varying and differ far away, therefore seldom use in reality.The second, utilize driving ring and support ring two ring structure, driven the change realizing curvature by annular line contact load.As shown in Figure 1 and Figure 2, this type of drive has two kinds of ways of realization physically.In first kind of way, one end of driving ring is solid object surface, one end is then hollow in addition, and adopt single-point to drive the central area directly acting on solid object surface one end, by solid object surface end and driving ring ring wall, the conduction to driving force realizes the change of mirror curvature.In the second way, the two ends of driving ring are all hollow, and multiple driver is evenly distributed on driving ring, and are transmitted on catoptron by the central shaft of driving force along driver by the effect of driving ring ring wall, thus realize the change of curvature.From thin plate elastic theory, toroid load drives and can realize perfect paraboloid surface shape within the region of driving ring covering, and because the impact of shearing force can superpose other face shape pattern outside driving ring.However, in order to eliminate edge effect, utilizing after blocking the mirror edge of shielding more than 20%, just substantially can meet the requirement of Curvature varying.
If the Hebrew University of Jerusalem represents the starting point of curvature mirrors research, so the U.S. then becomes the leader of this area research current.Sandia National Laboratory of the U.S. utilize just above-mentioned toroid load drive realize mirror curvature change.Afterwards, multiple scientific research institutions development of prototype plant of all having imitated similar mechanism to carry out of China, but there is the Railway Project of general character:
1) toroid load drives and still belongs to the driving of direct contact type power, must cause cumulative stress on the surface of catoptron.When aperture of a mirror and radius-thickness ratio less time, this cumulative stress be not enough to destroy surface figure accuracy; And when aperture of a mirror and radius-thickness ratio larger time, the accumulation of mirror surface stress forms serious obstruction by the maintenance of surface figure accuracy.
2) in toroid load driving model, the radius of driving ring is not chosen arbitrarily.Research shows, too small driving ring radius can make Curvature varying model change to single-point direct contact type driving model gradually, is unfavorable for the generation of desired curvature change required face shape; Excessive driving ring radius then requires that driving ring produces larger driving force, and larger driving force can aggravate the accumulation of mirror surface stress, is unfavorable for the maintenance of surface figure accuracy.Therefore the radius of driving ring should be optimized.
3) toroid load module requires that the edge of catoptron is in a simply-supported state (limiting displacement, do not limit rotation), and the method the most simply realizing freely-supported makes between catoptron and supporting construction separate exactly, catoptron allows free-extension along the contact position of itself and supporting construction.But, this mode requires the central shaft height conllinear of catoptron, driver element and lens barrel, otherwise when mirror curvature changes, gap will be produced between catoptron and lens barrel, not conllinear between three axles can make catoptron along the plane lateral slip with central axis, thus introduce asymmetrical driving, and then destroy the surface figure accuracy of catoptron.In addition, if there is lateral slip, just mean that catoptron also can be subject to the extruding from lens barrel structure in some positions, more can worsen the surface figure accuracy of catoptron.Therefore, under the prerequisite meeting freely-supported condition, the position stability sex chromosome mosaicism in catoptron deformation process should be solved.
4) catoptron, between driver element and lens barrel height conllinear hypothesis under, under the condition achieving the optimization of driving ring radius, the cumulative stress of the mirror surface that mechanical contact type of drive produces still can not be eliminated, and along with the increase of required center deformation, stress also will synchronously increase.Therefore, the later stage adjustment of surface figure accuracy should be introduced in the middle of the structure of Curvature varying.
The U.S. (Appl.Phys.B82,275 – 281 (2006)), China (CN201010108376.6), China's (optical precision engineering, 18 (8): 1781-1787,2010) what etc. adopt is all the first single drive point toroid load Curvature varying structure as Figure 1 shows, Railway Project mentioned in background technology cannot be solved simultaneously, also do not drive Curvature varying structure (especially the radius of driving ring) to be optimized to toroid load simultaneously.
Summary of the invention
In order to solve the above-mentioned technical matters existed in background technology, the invention provides a kind of locus and stablizing, uniform Curvature varying can also carry out certain compensation curvature mirrors device to the change of the surface figure accuracy after deformation can not only be realized.
Technical solution of the present invention is: the invention provides a kind of curvature mirrors device, its special character is: described curvature mirrors device comprises lens barrel, trim ring, catoptron, coniform ultra thin plate shape spring, annular brace seat, ring-type thrust ring, drive array and the support chassis for fixed drive array; Described catoptron to be pressed in coniform ultra thin plate shape spring and to form an entirety with coniform ultra thin plate shape spring; Described trim ring, coniform ultra thin plate shape spring with catoptron, annular brace seat, ring-type thrust ring, drive array and for the support chassis of fixed drive array successively only by be co-located in lens barrel and coaxial with lens barrel.
The radius of above-mentioned ring-type thrust ring equals 1/2 of support ring radius.
Above-mentioned drive array comprises multiple piezoelectric ceramic actuator; Described piezoelectric ceramic actuator entirety distributes in the form of a ring; The force axle that in described drive array, each piezoelectric ceramic actuator has is parallel to each other.
The head of the ring-shaped distributed multiple piezoelectric ceramic actuator of above-mentioned entirety is all connected by pin with ring-type thrust ring; The afterbody of the ring-shaped distributed multiple piezoelectric ceramic actuator of described entirety is all connected by screw with support chassis; Each piezoelectric ceramic actuator in described drive array all and between support chassis is provided with adjustable contact gap.
The position that above-mentioned trim ring contacts with lens barrel is provided with screw thread, and described trim ring is connected with lens barrel by screw thread.
Above-mentioned catoptron, trim ring, coniform ultra thin plate shape spring, ring-type thrust ring and annular brace seat all adopt same material to make; Described lens barrel and support chassis adopt the intensity of material all higher than catoptron adopt the intensity of material.
The invention has the beneficial effects as follows:
Curvature mirrors device provided by the invention comprises lens barrel, trim ring, catoptron, coniform ultra thin plate shape spring, annular brace seat, ring-type thrust ring, drive array and the support chassis for fixed drive array; Catoptron to be pressed in coniform ultra thin plate shape spring and to form an entirety with coniform ultra thin plate shape spring; Trim ring, coniform ultra thin plate shape spring with catoptron, annular brace seat, ring-type thrust ring, drive array and for the support chassis of fixed drive array successively only by be co-located in lens barrel and coaxial with lens barrel; The radius of ring-type thrust ring equals 1/2 of support ring radius.The Physical Mechanism that this device realizes Curvature varying is that annular line contact load drives, theoretical as theoretic support by thin plate elastic, there are two kinds of ways of realization physically.Drive Curvature varying prototype plant different from the load of existing single drive point toroid, the device that the present invention proposes adopts many drive points to be uniformly distributed in mode driving ring carrying out superposing driving.After the radius of driving ring is optimized (1/2 of support ring radius), the locus in catoptron deformation process is kept to stablize by introducing coniform ultra thin plate shape spring, this device not only can realize uniform Curvature varying, produce larger center deformation, and the change of the trace of the relativeness between multiple driving degree of freedom can be relied on to carry out certain compensation to the change of the surface figure accuracy after deformation.The radius of ring-type thrust ring gets 1/2 of support ring radius, can realize the target of " less driving force produces larger center deformation ".The catoptron locus that the introducing of the ultra-thin leaf spring of coniform annular can realize in Curvature varying process is stablized, and eliminates lateral slip.The equally distributed annular driver array be made up of multiple driver be connected with driving ring can realize the lifting of surface figure accuracy by the adjustment of respective high precision micro.
Accompanying drawing explanation
Fig. 1 is the way of realization schematic diagram physically that annular line contact load drives Curvature varying mechanism;
Fig. 2 is another way of realization schematic diagram physically that annular line contact load drives Curvature varying mechanism;
Fig. 3 is the external structure schematic diagram of lens barrel of the present invention;
Fig. 4 is the inner structure explosive view of lens barrel of the present invention;
Fig. 5 is lens barrel sectional structure schematic diagram of the present invention;
Fig. 6 (a) is under becoming the prerequisite of goal constraint with set center shape, take monocrystalline silicon as the numerical value corresponding relation figure needed for corresponding during reflecting mirror material between driving force size and driving ring radius;
Fig. 6 (b) is under becoming the prerequisite of goal constraint with set center shape, with K9 glass for the numerical value corresponding relation figure needed for corresponding during reflecting mirror material between driving force size and driving ring radius;
Fig. 6 (c) is under becoming the prerequisite of goal constraint with set center shape, with AISI420 stainless steel for the numerical value corresponding relation figure needed for corresponding during reflecting mirror material between driving force size and driving ring radius;
Fig. 7 be adopt curvature mirrors provided by the present invention driver displacement at 5um time the measured result figure of Curvature varying;
Fig. 8 is the measured result figure of the Curvature varying adopting the curvature mirrors of curvature mirrors provided by the present invention when driver displacement 29um;
Fig. 9 adopts the measured result figure of the Curvature varying of the curvature mirrors of curvature mirrors provided by the present invention when driver displacement 47um;
Wherein:
1-trim ring; 2-leaf spring; 3-catoptron; 4-driving ring; 5-drive array; 6-chassis; 7-precession adjustment component.
Embodiment
The present invention drives the structure realizing mirror curvature change to propose the measure of improvement for toroid load, is intended to solve 4 above-mentioned problems, thus also can obtains the surface figure accuracy of high-quality while realizing Curvature varying.
Relate to a kind of curvature mirrors device, produced by the toroid load expulsion mechanism in Theory of Elastic Thin Plate, under the acting in conjunction of driving ring and support ring two ring structure, realize the change of mirror curvature.Meanwhile, certain compensation can also be carried out by the adjustment of trace relatively along the equally distributed multiple driver of driving ring to the surface figure accuracy change in catoptron deformation process.
The curvature mirrors device that the present invention proposes adopts mechanism to be still that toroid load contact drives.But with the U.S. (Appl.Phys.B82,275 – 281 (2006)), Chinese patent (CN201010108376.6), China's (optical precision engineering, 18 (8): 1781-1787,2010) etc. device adopts the difference of Fig. 1, here by being uniformly distributed multiple driver and utilizing the ring wall of driving ring driving force to be transmitted to change catoptron realizing curvature on driving ring, as shown in Figure 2.
The present invention proposes curvature mirrors device as shown in Fig. 3, Fig. 4 and Fig. 5, this device is by trim ring 1, catoptron 3, leaf spring 2 (coniform ultra thin plate shape spring), with the lens barrel of annular brace seat, driver element and regulate the precession adjustment component 7 of driver element precession vertically to form.Wherein, driver element is by ring-type thrust ring, and the chassis 6 of the ring-shaped distributed driving array that is made up of multiple piezoelectric ceramic actuator and fixing piezoelectric ceramic actuator array 5 forms, and this chassis 6 is also the chassis 6 of whole lens barrel structure simultaneously.
Catoptron is pressed into coniform ultra thin plate shape spring, utilizes the elastic force of plate shape spring to make both become as a whole; Trim ring 1 is with external thread, lens barrel head is with internal thread, trim ring 1 with rotate crimping mode by with plate shape ring spring around catoptron be fixed between himself and annular brace seat, between catoptron and trim ring 1 and supporting seat only by relative pressure and structure spacing fixing, bonding or mechanical connection without other; The head of ring-shaped distributed multiple piezoelectric ceramic actuator is connected in pin mode with driving ring 4 bottom, and bottom adopts screw to be connected with support chassis 6, and contact gap between each driver and chassis 6 is adjustable.
Catoptron, trim ring 1, coniform ultra thin plate shape spring, ring-type thrust ring and the annular brace seat for supporting reflex mirror all adopt homogeneous material; Chassis 6 its intensity of material of lens barrel and fixing piezoelectric ceramic actuator array 5 is higher than catoptron; The rigidity of piezoelectric ceramic actuator own is close to stainless steel.
All positions contacted with catoptron, and the high precision grinding and polishing of submicron order is all carried out on the surface that can produce relative sliding.Chamfering is all carried out in the position that trim ring 1 and annular brace seat contact with catoptron, and topical application paraffin or talcum powder.
Meanwhile, driving ring 4, between support ring and catoptron in linear contact lay.Driving ring 4 is different from support ring radius, and the radius of driving ring 4 equals 1/2 of support ring radius.The driving force that trim ring 1, catoptron and driver element produce all with the central shaft conllinear of whole lens barrel, and to be parallel to each other between the force axle that in driver element, each piezoelectric ceramic actuator has.Driver element is as the separate unit in device, and itself and catoptron pretension exposure level can be controlled by its precession along overall axis direction.Catoptron, after the change completing curvature, can regulate by the trace of different driving device in driver element the adjustment realizing surface figure accuracy.
As shown in Fig. 3, Fig. 4 and Fig. 5, device proposed by the invention and the maximum difference of existing curvature mirrors device are 2 points: first, driving force is not provided by single one piezoelectric ceramic actuator, but is jointly produced by multiple driver be uniformly distributed on driving ring 4.The second, after introducing the ultra-thin leaf spring 2 of coniform annular, utilize the elasticity of ultra-thin leaf spring 2 self, in the process that catoptron deformation is stretched, make its central axis that the change of large scale not occur.The superposition application of multiple piezoelectric ceramic actuator not only can increase final available practical center deformation quantity, and is that device has possessed the ability completing Curvature varying and to a certain degree regulate the surface figure accuracy of catoptron later.In deformation process, mirror center axis stable then can avoid its lateral slip and the non-homogeneous extruding of lens barrel that causes thus and the non-homogeneous driving that produces causes the phenomenon of surface figure accuracy serious degradation.
As mentioned above, drive in variable curvature structure in toroid load, the size of driving ring 4 radius has direct impact to the use of whole device and performance, should not choose randomly.From thin plate elastic theory, become constraint condition to produce specific center shape, the numerical relation between required driving force corresponding to different mirror mirror material and driving ring 4 radius can be obtained.Fig. 6 (a), Fig. 6 (b) and Fig. 6 (c) are respectively under becoming the prerequisite of goal constraint with set center shape, the numerical value corresponding relation figure needed for corresponding with different reflecting mirror material between driving force size and driving ring 4 radius; Wherein, three kinds of different reflecting mirror materials are respectively K9 glass (E=88GPa, v=0.215) (Fig. 6 (b)), monocrystalline silicon (E=160GPa, ν=0.23) (Fig. 6 (a)) and AISI420 stainless steel (E=215GPa, v=0.305) (Fig. 6 (c)), in addition the effective aperture of catoptron and thickness non-be not 88mm and 3mm.Assuming that the deformation of required center equals 3um respectively, 5um, 10um, which kind of reflecting mirror material no matter 15um and 20um, so from Fig. 6 (a), Fig. 6 (b) and Fig. 6 (c), be, after driving ring 4 radius is more than 1/2 support ring radius, driving force required for deformation all will sharply increase, and when driving ring 4 radius is less than 1/2 support ring radius, reach the driving force not too large change needed for identical central deformation.When desired deformation quantity increases, this critical effect just becomes more remarkable.For Silicon Mirror, if for center deformation quantity 20um, when driving ring 4 radius is increased to 22mm from 8.8mm, the size of total driving force W is increased to about 100N from 70N, only change 30N, and when being increased to 35.2mm from 22mm, the size of total driving force W increases about 260N from 100N, change nearly 160N.Although driving ring 4 radius is less, required driving force is less, but because too small driving ring 4 radius is unfavorable for producing desirable Curvature varying, therefore guess here, when the radius of driving ring 4 is taken as the numerical value of support ring radius 1/2, likely realize " less driving force realizes larger center deformation " this target.By to other materials catoptron, after stainless steel catoptron and K9 glass reflector carry out similar analysis, it is considered herein that, driving ring 4 radius should be the half of support ring radius close to best value.Now, not only can realize larger center deformation with less driving force, and this keeps being all useful for the face shape after reducing accumulation of mirror surface stress and deformation.
The curvature mirrors device driven based on toroid load utilizing the present invention to propose, have developed a prototype plant.Wherein, aperture of a mirror 100mm, effective aperture 88mm, thickness 3m, driving ring 4 radius 22mm, support ring radius 44mm, coniform ultra thin plate shape spring thickness 1mm, reflecting mirror material is beryllium-bronze, and the structure contacted with catoptron also all adopts homogeneous material, and lens barrel, chassis 6 and precession parts adopt high-strength stainless steel.Driver adopts the P845.40 of PI Corp., by matched design, the driving ring 4 of radius 22mm can only be uniformly distributed 6 drivers.According to specific step-length, as 5um, make the naughty driver of each piezoelectricity produce fixing displacement, and be transmitted to the back of catoptron by driving ring 4 ring wall on this basis, just can realize the change of curvature.From Fig. 7, Fig. 8 and Fig. 9, this device can realize ideal Curvature varying effect (wherein, Fig. 7 be adopt curvature mirrors provided by the present invention driver displacement at 5um time the measured result figure of Curvature varying; Fig. 8 is the measured result figure of the Curvature varying adopting the curvature mirrors of curvature mirrors provided by the present invention when driver displacement 29um; Fig. 9 adopts the measured result figure of the Curvature varying of the curvature mirrors of curvature mirrors provided by the present invention when driver displacement 47um), and under the prerequisite that set and interferometer measurement precision is fixing in the limit driving force of driver, the center deformation more than 30 wavelength (wavelength is 632.8nm) can be realized, thus demonstrate the effective of this device.
Claims (6)
1. a curvature mirrors device, is characterized in that: described curvature mirrors device comprises lens barrel, trim ring, catoptron, coniform ultra thin plate shape spring, annular brace seat, ring-type thrust ring, drive array and the support chassis for fixed drive array; Described catoptron to be pressed in coniform ultra thin plate shape spring and to form an entirety with coniform ultra thin plate shape spring; Described trim ring, coniform ultra thin plate shape spring with catoptron, annular brace seat, ring-type thrust ring, drive array and for the support chassis of fixed drive array successively only by be co-located in lens barrel and coaxial with lens barrel.
2. curvature mirrors device according to claim 1, is characterized in that: the radius of described ring-type thrust ring equals 1/2 of support ring radius.
3. curvature mirrors device according to claim 1 and 2, is characterized in that: described drive array comprises multiple piezoelectric ceramic actuator; Described piezoelectric ceramic actuator entirety distributes in the form of a ring; The force axle that in described drive array, each piezoelectric ceramic actuator has is parallel to each other.
4. curvature mirrors device according to claim 3, is characterized in that: the head of the ring-shaped distributed multiple piezoelectric ceramic actuator of described entirety is all connected by pin with ring-type thrust ring; The afterbody of the ring-shaped distributed multiple piezoelectric ceramic actuator of described entirety is all connected by screw with support chassis; Each piezoelectric ceramic actuator in described drive array all and between support chassis is provided with adjustable contact gap.
5. curvature mirrors device according to claim 4, it is characterized in that: the position that described trim ring contacts with lens barrel is provided with screw thread, described trim ring is connected with lens barrel by screw thread.
6. curvature mirrors device according to claim 5, is characterized in that: described catoptron, trim ring, coniform ultra thin plate shape spring, ring-type thrust ring and annular brace seat all adopt same material to make; Described lens barrel and support chassis adopt the intensity of material all higher than catoptron adopt the intensity of material.
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| CN107526159A (en) * | 2017-07-27 | 2017-12-29 | 中国科学院长春光学精密机械与物理研究所 | A kind of heavy caliber beat mirror |
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