CN106444014B - Curvature mirrors device - Google Patents
Curvature mirrors device Download PDFInfo
- Publication number
- CN106444014B CN106444014B CN201610838251.6A CN201610838251A CN106444014B CN 106444014 B CN106444014 B CN 106444014B CN 201610838251 A CN201610838251 A CN 201610838251A CN 106444014 B CN106444014 B CN 106444014B
- Authority
- CN
- China
- Prior art keywords
- reflecting mirror
- annular
- driver
- thrust ring
- ontology
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention belongs to optical fields, are related to a kind of curvature mirrors device, including reflecting mirror, thrust ring, driver, lens barrel and support chassis.Reflecting mirror, thrust ring, driver and support chassis are coaxially disposed with lens barrel；Reflecting mirror includes reflecting mirror ontology, annular support wall and annular hollow pedestal, and reflecting mirror is processed by integrated molding using same material and constitutes an entirety.Reflecting mirror in the present invention uses the thickness distribution form of gradual change, i.e. center thick rim is thin, and is gradually reduced from center to edge.At this point, reflecting mirror can carry out differentiation response to the non-uniform compression that thrust collar generates, keep the average microdeformation of reflecting mirror working surface smaller, to provide guarantee for surface figure accuracy with higher after deformation.
Description
Technical field
The invention belongs to optical fields, are related to a kind of curvature mirrors device.
Background technique
Curvature mirrors belong to a kind of powered optical element, and it is uncommon that blank can trace back to Jerusalem in 1973 earliest
The research achievement of Bai Lai university.Hereafter, the former Soviet Union, Germany, the U.S., France etc. have carried out greatly around curvature mirrors technology
The development work of quantifier elimination and prototype plant, Chinese scientific research personnel were also added in recent years in the research in the field.
There are two the application fields of mainstream for curvature mirrors.One is promoting the output beam quality of high-energy laser；
The second is realizing movement-less part optical zoom.High power when high-energy laser works can generate high temperature in resonant cavity
Degree to make resonant cavity window glass that thermal deformation occur and introduce spherical aberration and defocus, and then deteriorates the quality of output beam.Become bent
Rate reflecting mirror can carry out effective compensation to spherical aberration caused by thermal lensing effect and defocus by changing the radius of curvature of itself, from
And achieve the purpose that improving laser device beam quality.Traditional zoom technology, either mechanical compensation formula or optical compensation formula are all
The relative motion between eyeglass or microscope group is relied on, limits it to a certain extent to the side such as space, power consumption and stability
Face requires the application in harsh field.The appearance of curvature mirrors provides technical for realization movement-less part zoom
Possibility, in short, the variation of mirror curvature corresponds to the change of focal power, and the minor change of local element focal power is then
Significantly alterring for system focal length can be enlarged by optical lever effect optical design.
The mechanism of mirror curvature variation has its source in thin plate elastic theory.Pertinent literature shows there is following two at present
It can be realized the mode of Curvature varying.First, single driving point directly acts on (area on the region of the limited size of mirror center
Domain equivalent redius is much smaller than reflecting mirror radius).According to thin plate elastic theory, this driving method total reflection mirror diameter range it
It is interior to generate spherical deformation, paraboloid deformation can not be also generated, and driving force is bigger, with ideal required by Curvature varying
It is remoter that face shape changes difference, therefore is rarely employed in practice.Second, using thrust ring and two ring structure of support ring, pass through ring
The variation of curvature is realized in the driving of shape line contact load.As shown in Figure 1, one end of thrust ring is solid object surface, other end is then
Hollow, the central area of solid object surface one end is directly acted on using single-point driving, passes through solid object surface end and drive ring ring
Wall realizes the variation of mirror curvature to the conduction of driving force.According to thin plate elastic theory, since the driving of annular linear load exists
Can be realized perfect paraboloid surface shape within the region of thrust ring cover, thus with single point central driving compared with practicability more
By force.
If the Hebrew University of Jerusalem represents the starting point of curvature mirrors research, then the U.S. then becomes
The leader of the current area research.Sandia National Laboratory, the U.S. exactly realizes reflection using above-mentioned annular linear load driving
Mirror curvature variation.Later, Chinese multiple scientific research institutions all imitate similar mechanism to carry out the development of prototype plant, still
There are the Railway Project of general character so that existing annular linear load driving design be difficult to combine biggish center deformation and
Surface figure accuracy in deformation process is kept:
1) annular linear load driving still belongs to direct contact type power drive, inevitable to cause stress tired on the surface of reflecting mirror
Product.When the diameter of reflecting mirror and smaller radius-thickness ratio, this cumulative stress is not enough to destroy surface figure accuracy；And work as the straight of reflecting mirror
When diameter and larger radius-thickness ratio, the accumulation of mirror surface stress will form serious obstruction to the holding of surface figure accuracy.
2) in annular linear load driving model, the radius of drive ring is not any selection.Studies have shown that too small drive
Rotating ring radius can be such that Curvature varying model gradually changes to single-point direct contact type driving model, be unfavorable for desired curvature variation institute
Need the generation of face shape；And excessive drive ring radius then requires drive ring to generate bigger driving force, bigger driving force can add
The accumulation of acute mirror surface stress, is unfavorable for the holding of surface figure accuracy.Therefore the radius of drive ring should be optimized.
3) annular Model of wire load requires the edge of reflecting mirror to be in simply-supported state (limiting displacement does not limit rotation),
And the simplest method for realizing freely-supported is exactly to enable between reflecting mirror and support construction independently of each other, to allow reflecting mirror along it
With the contact position free extension of support construction.However, this mode requires the central axis of reflecting mirror, driving unit and lens barrel high
Degree is conllinear, and otherwise when mirror curvature changes, gap, collinearly can not between three axis will be generated between reflecting mirror and lens barrel
Make reflecting mirror along the plane lateral sliding with central axis, to introduce asymmetrical driving, and then destroys the face of reflecting mirror
Shape precision.In addition, if lateral sliding occurs, it is meant that reflecting mirror also suffers from some positions from lens barrel structure
It squeezes, can more deteriorate the surface figure accuracy of reflecting mirror.Therefore, under the premise of meeting freely-supported approximation unconfined condition, it should solve
The certainly spatial position stability problem in reflecting mirror deformation process.
The U.S. (Appl.Phys.B 82,275-281 (2006)), Chinese (CN201010108376.6), China's (optics essence
Close engineering, 18 (8): 1781-1787,2010) etc. uses be all single annular linear load curvature of driving point as Figure 1 shows becomes
Change structure, Railway Project mentioned above can not be solved, while is also (not outstanding to annular linear load driving Curvature varying structure
It is the radius of drive ring) it optimizes.
Summary of the invention
It cannot be considered in terms of in biggish center deformation and deformation process to solve existing curvature mirrors device
The technical issues of surface figure accuracy is kept, the present invention provides a kind of novel curvature mirrors device, is not only able to realize biggish
Center deformation, and higher surface figure accuracy can be remained during deformation.
The technical solution of the invention is as follows: a kind of curvature mirrors device, including reflecting mirror, thrust ring, driver,
Lens barrel and support chassis, are characterized in that
The reflecting mirror, thrust ring, driver and support chassis are coaxially disposed with lens barrel；The reflecting mirror includes reflection
Mirror ontology, annular support wall and annular hollow pedestal, reflecting mirror constitute one by integrated molding processing using same material
It is whole；The reflecting mirror ontology is the progressive thickness mirror structure of thick middle thin edge, and the annular support wall is to be located at instead
To penetrate columnar structured between mirror ontology and annular hollow pedestal, the outer diameter of annular support wall is identical as reflecting mirror ontology diameter,
The internal diameter of annular support wall is identical as the internal diameter of annular hollow pedestal；The annular hollow pedestal is fixedly connected with lens barrel one end；
One end of the thrust ring is annular hollow structure and the back contact with reflecting mirror, the other end and driver one end of thrust ring
It is connected；The other end of driver is connected with support chassis.
The thickness distribution equation of above-mentioned reflecting mirror ontology are as follows:
Y=t0·exp[-k·(2r/D)m]
Wherein, t0It is the center thickness of reflecting mirror ontology, r is the polar coordinates radius of reflecting mirror ontology spherical surface, and D is reflecting mirror
The diameter of ontology, k and m are the constants for controlling reflecting mirror body thickness distribution form.
The outer diameter of above-mentioned thrust ring is the 1/2 of reflecting mirror ontology diameter.
Adjustable contact gap is provided between above-mentioned driver and support chassis, for realizing thrust ring and reflecting mirror
It pre-tightens.
Above-mentioned reflecting mirror is made with thrust ring of identical material；The strength of materials of the lens barrel and support chassis is high
In the strength of materials of reflecting mirror.
The beneficial effects of the present invention are:
(1) reflecting mirror in the present invention uses the thickness distribution form of gradual change, i.e. center thick rim is thin, and from center to side
Edge is gradually reduced.At this point, reflecting mirror can carry out differentiation response to the non-uniform compression that thrust collar generates, make to reflect
The average microdeformation of mirror working surface is smaller, to provide guarantee for surface figure accuracy with higher after deformation.
(2) reflecting mirror in the present invention and support construction no longer meet freely-supported condition by mutually independent mode, but
The edge of progressive thickness reflecting mirror and the ultra-thin wall construction of annular are processed by integrated molding and constitute an entirety, very thin side
Edge both can satisfy the approximate unconfined condition of freely-supported support, and the spatial position of reflecting mirror ontology when deformation can also stablized, from
And eliminate the existing Non-symmetric Extrusion phenomenon as caused by reflecting mirror lateral sliding of traditional endless linear load driving.In addition,
When reflecting mirror deformation, the compression more concentrated from the zone-transfer of original thrust ring cover to progressive thickness reflecting mirror
It is also shape to eliminate destruction of the concentrated stress to reflecting mirror surface shape precision significantly above the annular ultra-thin-wall of edge connection
Reflecting mirror after change keeps higher surface figure accuracy to provide guarantee.
Detailed description of the invention
Fig. 1 is the way of realization signal that classical toroid contact load drives Curvature varying mechanism.
Fig. 2 is the curvature mirrors apparatus structure schematic diagram of present pre-ferred embodiments.
Fig. 3 is present pre-ferred embodiments mirror structure schematic diagram.
Fig. 4 is the driving force size and driving radius corresponding relationship of monocrystalline silicon material reflecting mirror.
Fig. 5 is the driving force size and driving radius corresponding relationship of K9 glass material reflecting mirror.
Fig. 6 is the driving force size and driving radius corresponding relationship of AISI420 stainless steel material reflecting mirror.
Specific embodiment
Referring to fig. 2, the curvature mirrors device of present pre-ferred embodiments is by mirror assembly 1, thrust ring 2, driving
Device 3 (can use piezoelectric ceramic actuator), the support chassis 4 for connecting driver and lens barrel 5 are constituted.Reflecting mirror 1, thrust ring
2, the support chassis 4 of driver 3 and connection driver is coaxial with 5 high-precision of lens barrel.Reflecting mirror 1 and 2 material phase of thrust ring
Together, and the intensity of lens barrel 5 and the used material of support chassis 4 be higher than reflecting mirror material intensity.
Wherein, it is connected through a screw thread between mirror assembly 1 and lens barrel 5；As shown in figure 3, mirror assembly 1 is by gradual change thickness
It spends ultra-thin mirror 11, the ultra-thin supporting walls 12 of annular and 13 three parts of annular hollow pedestal composition, three and passes through integrated molding
Processing constitutes a complete entirety.One end of thrust ring 2 be annular hollow structure and the back contact with mirror assembly 1,
Other end then centered on a threaded hole solid base plate be used for driver 3 head connect.The head of driver 3
It is connected through a screw thread with the center of the solid base plate of cyclic annular thrust ring 2, and its tail portion is equally connected with support chassis 4 by screw
It connects, is provided with adjustable contact gap between driver 3 and support chassis 4 at the same time, for realizing thrust ring and reflecting mirror
Preload.The head of lens barrel 5 has the bottom plate of a similar washer with one end that mirror assembly 1 is connected through a screw thread, and bottom
Plate center is provided with a bore and the cyclic annular consistent circular hole of 2 outer diameter of thrust ring, is used to support and guides the head of thrust ring 2 and anti-
It penetrates mirror back and carries out contact preload, the transmitting of driving force is realized with this.
It is different from the design of the structure of conventional uniform thickness reflecting mirror, in the structure of present pre-ferred embodiments, the thickness of reflecting mirror
Degree is not constant, and center thick rim is thin and is gradually reduced from center to edge, corresponding thickness distribution equation are as follows:
Y=t0·exp[-k·(2r/D)m]；
Wherein, t0It is the center thickness of reflecting mirror, r is the polar coordinates radius of reflecting mirror spherical surface, and D is the diameter of reflecting mirror, k
With the constant that m is for controlling reflecting mirror thickness distribution form.At the same time, the edge of reflecting mirror is no longer only with support construction
It is vertical, but an organic whole is connected as by the ultra-thin wall construction of annular and lens barrel, and this entirety is by integrated chemical conversion
Type processing directly obtains, without the connecting component of any auxiliary.Change in this structure design directly brings following two
A significant benefit:
First, studies have shown that traditional annular linear load driving Curvature varying structure can generate distribution in mirror surface
Very non-uniform compression, wherein stress focuses primarily upon the region that thrust ring is covered, and the reflecting mirror of uniform thickness means
Constant rigidity at each position of reflecting mirror, so the microdeformation of thrust ring overlay area is caused to be significantly larger than other areas naturally
Domain, to make surface figure accuracy sharp degradation.The thickness distribution of gradual change then allows reflecting mirror to uneven caused by thrust collar
Compression carry out differentiation response, keep the average microdeformation of reflecting mirror working surface smaller, thus for have after deformation compared with
High surface figure accuracy provides guarantee.
Second, the edge of reflecting mirror and the ultra-thin wall construction of annular are processed by integrated molding and constitute an entirety, it is very thin
Edge both can satisfy the approximate unconfined condition of freely-supported support, the spatial position of reflecting mirror ontology is steady when can also make deformation
It is fixed, to eliminate the existing Non-symmetric Extrusion phenomenon as caused by reflecting mirror lateral sliding of traditional endless linear load driving.
Under typical condition, annular linear load provided by the invention drives distribution of the compressive stress situation when curvature mirrors structural deformation aobvious
Show, in the region that thrust ring directly acts on, compression is apparently higher than other regions.But the maximum region of stress is not and pushes away
The region that power ring directly contacts, but be located on the ultra-thin wall construction of annular.It follows that the transfer of concentrated stress is reflecting mirror shape
Surface figure accuracy still keeps the essential reason of higher level when change.
The design of progressive thickness mirror structure and connect integrated with the ultra-thin wall construction of annular of mirror edge can be with
To play the role of shifting concentrated stress, the region that thrust ring acts on reflecting mirror still has significant stress, and compression
Size is directly related with the size of driving force, therefore under the premise of center deformation can be compared by realizing, appropriate to reduce required driving
Power has positive meaning to holding surface figure accuracy, and according to thin plate elastic theory, required driving force size and thrust ring outer diameter
Between there are nonlinear relationships.Become constraint condition to generate specific center shape, different mirror plane materiels can be obtained
Expect the numerical relation between corresponding required driving force and thrust ring outer diameter.As Figure 4-Figure 6, three kinds of different reflecting mirror materials
Respectively K9 glass (E=88GPa, v=0.215), monocrystalline silicon (E=160GPa, ν=0.23) and AISI420 stainless steel (E
=215GPa, v=0.305), in addition the effective diameter of reflecting mirror and thickness are 88mm and 3mm respectively.It is assumed that required center deformation
Respectively equal to 3um, 5um, 10um, 15um and 20um.Can be seen that either which kind of reflection from the curve comparison in Fig. 4-6
Mirror material, after thrust ring outer diameter is more than 1/2 reflecting mirror effective diameter, driving force required for deformation will all be sharply increased,
And when thrust outer diameter is less than 1/2 mirror diameter, there is no too big variations for driving force needed for reaching identical central deformation.When
When desired deformation quantity increases, this critical effect just becomes more significant.For Silicon Mirror, if with center
For deformation quantity 20um, when thrust ring outer diameter increases to 22mm from 8.8mm, the size of total driving force W increases to 100N from 70N
Left and right, when only changing 30N, and increasing to 35.2mm from 22mm, the size of total driving force W increases the left side 260N from 100N
The right side changes nearly 160N.Although thrust ring outer diameter is smaller, required driving force with regard to smaller, due to too small thrust ring outside
Diameter is unfavorable for generating ideal Curvature varying, therefore it is reasonable that: when thrust ring outer diameter is taken as the numerical value of mirror diameter 1/2
When, so that it may lesser driving force realizes biggish center deformation.By to other materials reflecting mirror, as stainless steel reflecting mirror with
And after K9 glass reflector carries out similar analysis, it is presently believed that the optimal value of thrust ring outer diameter should be reflecting mirror
The half of diameter.At this point, be not only able to realize biggish center deformation with lesser driving force, and this is for reducing reflecting mirror table
The accumulation of face stress and the face shape after deformation keep all being beneficial.
Claims (5)
1. a kind of curvature mirrors device, including reflecting mirror, thrust ring, driver, lens barrel and support chassis, feature exist
In:
The reflecting mirror, thrust ring, driver and support chassis are coaxially disposed with lens barrel；The reflecting mirror includes reflecting mirror sheet
Body, annular support wall and annular hollow pedestal, reflecting mirror are processed by integrated molding using same material and constitute an entirety；
The reflecting mirror ontology is the progressive thickness mirror structure of thick middle thin edge, and the annular support wall is to be located at reflecting mirror sheet
Columnar structured between body and annular hollow pedestal, the outer diameter of annular support wall is identical as reflecting mirror ontology diameter, annular branch
The internal diameter for supportting wall is identical as the internal diameter of annular hollow pedestal；The annular hollow pedestal is fixedly connected with lens barrel one end；It is described to push away
One end of power ring is annular hollow structure and the back contact with reflecting mirror, and the other end of thrust ring is connected with driver one end；
The other end of driver is connected with support chassis；
The thickness distribution equation of the reflecting mirror ontology are as follows:
Y=t0·exp[-k·(2r/D)m]
Wherein, t0It is the center thickness of reflecting mirror ontology, r is the polar coordinates radius of reflecting mirror ontology spherical surface, and D is reflecting mirror ontology
Diameter, k and m are the constants for controlling reflecting mirror body thickness distribution form.
2. curvature mirrors device according to claim 1, it is characterised in that: the outer diameter of the thrust ring is reflecting mirror
The 1/2 of ontology diameter.
3. curvature mirrors device according to claim 1, it is characterised in that: between the driver and support chassis
It is provided with adjustable contact gap.
4. curvature mirrors device according to claim 1, it is characterised in that: the reflecting mirror uses phase with thrust ring
Same material is made；The strength of materials of the lens barrel and support chassis is higher than the strength of materials of reflecting mirror.
5. curvature mirrors device according to claim 1, it is characterised in that: the driver is Piezoelectric Ceramic
Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610838251.6A CN106444014B (en) | 2016-09-21 | 2016-09-21 | Curvature mirrors device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610838251.6A CN106444014B (en) | 2016-09-21 | 2016-09-21 | Curvature mirrors device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106444014A CN106444014A (en) | 2017-02-22 |
| CN106444014B true CN106444014B (en) | 2019-06-28 |
Family
ID=58166775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610838251.6A Active CN106444014B (en) | 2016-09-21 | 2016-09-21 | Curvature mirrors device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106444014B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115079390B (en) * | 2022-06-24 | 2023-05-02 | 中国科学院西安光学精密机械研究所 | Structural parameter optimization method for large-deformation high-surface-shape precision variable-curvature reflector |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080004952A (en) * | 2006-07-07 | 2008-01-10 | 이영득 | Surface curvature variable mirror |
| CN102147524A (en) * | 2010-02-10 | 2011-08-10 | 中国科学院大连化学物理研究所 | Curvature-variable reflector device |
| CN105068213A (en) * | 2015-08-18 | 2015-11-18 | 中国科学院西安光学精密机械研究所 | Variable-camber reflector device |
| CN206133114U (en) * | 2016-09-21 | 2017-04-26 | 中国科学院西安光学精密机械研究所 | Become camber reflecting mirror device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010230867A (en) * | 2009-03-26 | 2010-10-14 | Olympus Corp | Variable shape mirror system |
-
2016
- 2016-09-21 CN CN201610838251.6A patent/CN106444014B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080004952A (en) * | 2006-07-07 | 2008-01-10 | 이영득 | Surface curvature variable mirror |
| CN102147524A (en) * | 2010-02-10 | 2011-08-10 | 中国科学院大连化学物理研究所 | Curvature-variable reflector device |
| CN105068213A (en) * | 2015-08-18 | 2015-11-18 | 中国科学院西安光学精密机械研究所 | Variable-camber reflector device |
| CN206133114U (en) * | 2016-09-21 | 2017-04-26 | 中国科学院西安光学精密机械研究所 | Become camber reflecting mirror device |
Non-Patent Citations (1)
| Title |
|---|
| "Development of a variable curvature mirror for the delay lines of the VLT interferometer";M. Ferrari;《Astron. Astrphys. Suppl. Ser.》;19980211;第4页右栏第3段 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106444014A (en) | 2017-02-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106444014B (en) | Curvature mirrors device | |
| CN113649595B (en) | Annular light spot optical system for metal SLM printing and printing method | |
| CN100530864C (en) | Hollow beam gas laser | |
| CN101434005B (en) | Multichannel amorphous silicon solar energy plate laser film-engraving machine | |
| CN103823275B (en) | Based on the adaptive optic fiber collimating apparatus of flexible hinge | |
| CN102522685A (en) | Compensation device for thermal lens effect of laser | |
| CN206133114U (en) | Become camber reflecting mirror device | |
| CN104611515A (en) | Adjustable wide-light-spot reflective-focusing laser inner hole quenching working head | |
| CN105068213B (en) | Curvature mirrors device | |
| CN205193335U (en) | Become camber reflecting mirror device | |
| CN107911043B (en) | Two-stage displacement adjusting mechanism for magnetostriction type spliced multi-mirror-surface | |
| CN108493764A (en) | Laser output power stablizes output facula tunable arrangement and its laser | |
| US20120275043A1 (en) | Laser projection module with conical reflector supported by thin walls | |
| Xie et al. | A VCSEL end-pumped high-energy Q-switched Nd: YAG laser | |
| CN106094161B (en) | A kind of curvature mirrors device | |
| CN102684042B (en) | Compensation device for thermal lens effect of slab laser | |
| CN111871967A (en) | Laser cleaning equipment | |
| CN2904397Y (en) | Optical fiber output laser for parallel machine tool | |
| CN1286229C (en) | Vertical laser with external cavity of transmitting semiconductor with telescopic resonant cavity | |
| CN104218442A (en) | 1064nm and 532nm wavelength free switching output laser based on polarization compensator | |
| CN114505595A (en) | Laser cutting device | |
| CN112705839A (en) | Water-guided laser device based on positioning coupling | |
| CN102684060B (en) | Device for adjusting curvature radius of cylindrical mirror | |
| CN102684055A (en) | Device for adjusting curvature radius of reflector | |
| CN207457618U (en) | A kind of laser lighting expands varifocal optical system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |