CN103645558A - Deformable mirror - Google Patents
Deformable mirror Download PDFInfo
- Publication number
- CN103645558A CN103645558A CN201310701623.7A CN201310701623A CN103645558A CN 103645558 A CN103645558 A CN 103645558A CN 201310701623 A CN201310701623 A CN 201310701623A CN 103645558 A CN103645558 A CN 103645558A
- Authority
- CN
- China
- Prior art keywords
- piezoelectric actuator
- actuation channel
- distorting lens
- metal shell
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention provides a deformable mirror. The deformable mirror comprises a base, a piezoelectric actuator, an actuating channel sealing piece and a mirror body, wherein the base is provided with an actuating channel which passes through the base in the vertical direction; the piezoelectric actuator is installed in the actuating channel, and a propulsion head of the piezoelectric actuator is protruded out of the upper surface of the base; the actuating channel sealing piece is connected with the base so as to enable the piezoelectric actuator to be sealed in the actuating channel; and the mirror body is connected with the propulsion head of the piezoelectric actuator. The piezoelectric actuator is adopted to provide pretightening force so that the deformable mirror is deformed, the surface shape of an active optics optical component can be changed, and high adjustment precision can be achieved.
Description
Technical field
The present invention relates to a kind of distorting lens, can be applicable to the accurate micro-displacement that transmits, and can be for changing the optical component surface shape of active optics.
Background technology
Distorting lens, claim again deformation reflection mirror, mainly apply among various ADAPTIVE OPTICS SYSTEMS, as wavefront correction device, proofread and correct wavefront error, in ADAPTIVE OPTICS SYSTEMS, play an important role, be one of vitals in ADAPTIVE OPTICS SYSTEMS, the research and development of distorting lens is related to calibration capability and the correction accuracy of whole ADAPTIVE OPTICS SYSTEMS.
Deformation reflection mirror is to carry out phase distortion before compensated wave by changing own surperficial face shape, can be divided into two types of continuous surface shape and discrete surface.
Continuous surface deformable mirror, its advantage is to obtain continuous face shape, and correction accuracy is high, and its shortcoming is that the deflection of face shape is smaller.The deformation reflection mirror of continuous surface can be divided into again whole actuating and two kinds of discrete actuatings.Whole actuating mainly contains two piezoelectric deforming mirrors and Bao Mo distorting lens, be characterized in when control voltage acts on a certain actuating unit, whole mirror surface all will produce distortion, and this class distorting lens is mainly used in coordinating with curvature Wavefront sensor the low step mode part of proofreading and correct wavefront distortion.
A feature of discrete actuating distorting lens is when control voltage acts on an actuator, only has this actuator adjacent area to produce local deformation.When wherein direction of actuation is parallel to minute surface, actuator acts on catoptron edge, can only be for proofreading and correct the particular aberration such as defocus and astigmatism, and therefore the application in ADAPTIVE OPTICS SYSTEMS has been subject to limitation.Direction of actuation can be proofreaied and correct each rank aberration perpendicular to the continuous surface deformable mirror of minute surface, and can reach very high correction accuracy, therefore becomes a kind of wave-front corrector most widely used in ADAPTIVE OPTICS SYSTEMS.
The research of the domestic deformable mirror system aspects in high degree of regulation early, in 1986, set up first set laser corrugated corrective system and (referred to academic report document, Jiang Wenhan, adaptive optical technique, < < Chinese Academy of Engineering academician's conference for the second time academic report compilation > >, July nineteen ninety-five), its adjusting bore is 70mm*70mm.From application, up to the present, application is exactly the most successfully the laser nuclear fusion system of U.S. Lao Lunsilifei More National Laboratory in this respect.They adopt the deformable mirror system by the 400mm*400mm of Beamlet Developed.This system adopts the mode of electromagnetic brake braking, and actuator adopts hexagonal arrangement mode, has realized the performance of heavy caliber (400mm*400mm) and higher degree of regulation.The mode that its displacement transmission system adopts is, the direct contact resilient reed of actuator, and elastic spring and active optics minute surface are sticked together.The positive movement displacement of actuator is reacted directly on optical mirror plane like this, and its negative sense displacement is because the restoring force of elastic spring is realized.
Summary of the invention
The present invention is intended to one of solve the problems of the technologies described above at least to a certain extent.
For this reason, one object of the present invention is to propose a kind of optical component surface shape that can change active optics, and can reach the distorting lens of higher degree of regulation.
Distorting lens according to the embodiment of the present invention, comprising: pedestal, has the actuation channel that connects along the vertical direction described pedestal on described pedestal; Piezoelectric actuator, described piezoelectric actuator be arranged in described actuation channel and the propelling head process of described piezoelectric actuator for the upper surface of described pedestal; Actuation channel closure plate, described actuation channel closure plate is connected that with described pedestal described piezoelectric actuator is enclosed in described actuation channel; With mirror body, described mirror body is connected with the propelling head of described piezoelectric actuator.
According to the distorting lens of the embodiment of the present invention, adopt piezoelectric actuator that pretightning force is provided, make distorting lens produce deformation, the optical component surface shape of active optics can be changed, and higher degree of regulation can be reached.
In addition, distorting lens according to the above embodiment of the present invention can also have following additional technical characterictic:
According to an example of the present invention, described piezoelectric actuator comprises metal shell and is located at the piezoelectric ceramics in described metal shell.
According to an example of the present invention, described metal shell is configured to spring-like.
According to an example of the present invention, described piezoelectric ceramics and described metal shell interference fit.
According to an example of the present invention, described distorting lens also comprises vernier adjustment knob, on described actuation channel closure plate, have the through hole suitable with described vernier adjustment knob, described vernier adjustment knob is located on described actuation channel closure plate and with the lower end of described piezoelectric actuator and is connected.
According to an example of the present invention, described distorting lens also comprises dish spring, and described dish spring is located in described actuation channel, and the propelling head of described piezoelectric actuator is through described dish spring.
Additional aspect of the present invention and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage accompanying drawing below combination obviously and is easily understood becoming the description of embodiment, wherein:
Fig. 1 is the schematic diagram of distorting lens according to an embodiment of the invention; With
Fig. 2 is the schematic diagram of the piezoelectric actuator of distorting lens according to an embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, be intended to for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center ", " longitudinally ", " laterally ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", orientation or the position relationship of indications such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.
In addition, term " first ", " second " be only for describing object, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the invention, the implication of " a plurality of " is two or more, unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, the terms such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can understand as the case may be above-mentioned term concrete meaning in the present invention.
In the present invention, unless otherwise clearly defined and limited, First Characteristic Second Characteristic it " on " or D score can comprise that the first and second features directly contact, also can comprise that the first and second features are not directly contacts but contact by the other feature between them.And, First Characteristic Second Characteristic " on ", " top " and " above " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that First Characteristic level height is higher than Second Characteristic.First Characteristic Second Characteristic " under ", " below " and " below " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that First Characteristic level height is less than Second Characteristic.
Below with reference to accompanying drawing, describe the distorting lens according to the embodiment of the present invention in detail.
As depicted in figs. 1 and 2, the distorting lens according to the embodiment of the present invention, comprising: pedestal 1, piezoelectric actuator 2, actuation channel closure plate 3 and mirror body 4.
Specifically, on pedestal 1, there is the actuation channel 11 that connects along the vertical direction pedestal 1.
Actuation channel closure plate 3 is connected that with pedestal 1 piezoelectric actuator 2 is enclosed in actuation channel 11.
The propelling of mirror body 4 and piezoelectric actuator 2 21 is connected.
More specifically, according to an example of the present invention, piezoelectric actuator 2 comprises metal shell 22 and is located at the piezoelectric ceramics 20 in metal shell 22.Advantageously, metal shell 22 is configured to spring-like.Further, piezoelectric ceramics 20 and metal shell 22 interference fit.
When piezo-activator 2 extends, piezo-activator 2 provides positive displacement upwards, when piezo-activator 2 shrinks, because previous metal shell 22 inside compress piezoelectric ceramics 20 in advance, so that pretightning force to be provided, when piezoelectric ceramics 20 shrinks, metal shell 22 also produces contraction, produces downward negative displacement; The positive negative sense displacement of piezoelectric actuator 2, for mirror body 4 provides positive negative sense displacement, makes to produce deformation according to the distorting lens of the embodiment of the present invention.
According to the distorting lens of the embodiment of the present invention, adopt piezoelectric actuator that pretightning force is provided, make distorting lens produce deformation, the optical component surface shape of active optics can be changed, and higher degree of regulation can be reached.
According to an example of the present invention, described distorting lens also comprises vernier adjustment knob 5.On actuation channel closure plate 3, there is the through hole suitable with vernier adjustment knob 5.Vernier adjustment knob 5 is located on actuation channel closure plate 3 and with the lower end of piezoelectric actuator 2 and is connected.
According to an example of the present invention, described distorting lens also comprises dish spring 6.Dish spring 6 is located in actuation channel 11, and the propelling of piezoelectric actuator 22 is through dish spring 6.
In other words, according to the distorting lens of the embodiment of the present invention, pedestal 1 is the matrix that distorting lens accessory is installed.Dish spring 6 is packed in actuation channel 11, then piezo-activator 2 is put into pedestal 1 inside, at pedestal 1 afterbody, actuation channel closure plate 3 is installed, then vernier adjustment knob 5 is screwed in actuation channel closure plate 3, rotary fine adjustment knob 5 changes pretightning force size.The propelling of mirror body 4 and piezoelectric actuator 2 21 is connected.
The power resources of piezo-activator 2 are the piezoelectric ceramics 20 at center, are that metal shell 22 surrounds in piezoelectric ceramics 20 peripheries.22 one-tenth spring-like of metal shell, and three bread confined pressure electroceramics 20.Piezoelectric ceramics 20 adopts the mode of interference fit to be integrated with metal shell 22.When piezoelectric ceramics 20 shrinks, metal shell 22 also together shrinks, and when piezoelectric ceramics 20 extends, pushes metal shell 22, because metal shell 22 had previously been made into spring-like, under inner piezoelectric ceramics 20 elongation effects, produces and extends.The employing of piezoelectric actuator 2 has reduced the number of fitting parts in actuation channel 11, make that mechanism is more succinct, assembling rapidly.The destruction of the shearing force that metal shell 22 outside piezoelectric ceramics 20 produces while making setter need not prevent vernier adjustment knob 5 to regulate to driver.This design is simplified the interior accessory of actuation channel 11, convenient installation.
In the description of this instructions, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, the schematic statement of above-mentioned term is not necessarily referred to identical embodiment or example.And the specific features of description, structure, material or feature can be with suitable mode combinations in any one or more embodiment or example.
Although illustrated and described embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, those of ordinary skill in the art can change above-described embodiment within the scope of the invention in the situation that not departing from principle of the present invention and aim, modification, replacement and modification.
Claims (6)
1. a distorting lens, is characterized in that, comprising:
Pedestal, has the actuation channel that connects along the vertical direction described pedestal on described pedestal;
Piezoelectric actuator, described piezoelectric actuator be arranged in described actuation channel and the propelling head process of described piezoelectric actuator for the upper surface of described pedestal;
Actuation channel closure plate, described actuation channel closure plate is connected that with described pedestal described piezoelectric actuator is enclosed in described actuation channel; With
Mirror body, described mirror body is connected with the propelling head of described piezoelectric actuator.
2. distorting lens according to claim 1, is characterized in that, described piezoelectric actuator comprises metal shell and is located at the piezoelectric ceramics in described metal shell.
3. distorting lens according to claim 2, is characterized in that, described metal shell is configured to spring-like.
4. according to the distorting lens described in claim 2 or 3, it is characterized in that described piezoelectric ceramics and described metal shell interference fit.
5. distorting lens according to claim 1, it is characterized in that, also comprise vernier adjustment knob, on described actuation channel closure plate, have the through hole suitable with described vernier adjustment knob, described vernier adjustment knob is located on described actuation channel closure plate and with the lower end of described piezoelectric actuator and is connected.
6. distorting lens according to claim 1, is characterized in that, also comprises dish spring, and described dish spring is located in described actuation channel, and the propelling head of described piezoelectric actuator is through described dish spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310701623.7A CN103645558B (en) | 2012-12-28 | 2013-12-19 | Distorting lens |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210586363 | 2012-12-28 | ||
| CN2012105863639 | 2012-12-28 | ||
| CN201210586363.9 | 2012-12-28 | ||
| CN201310701623.7A CN103645558B (en) | 2012-12-28 | 2013-12-19 | Distorting lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103645558A true CN103645558A (en) | 2014-03-19 |
| CN103645558B CN103645558B (en) | 2016-08-17 |
Family
ID=50250802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310701623.7A Active CN103645558B (en) | 2012-12-28 | 2013-12-19 | Distorting lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103645558B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104539188A (en) * | 2015-01-04 | 2015-04-22 | 中国科学院光电技术研究所 | High-precision pressure driving device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5208506A (en) * | 1990-11-14 | 1993-05-04 | Nec Corporation | Laminated piezoelectric actuator |
| CN1586828A (en) * | 2004-07-15 | 2005-03-02 | 清华大学 | Plane movement mechanism and its device for micro robot |
| US20070295832A1 (en) * | 2006-06-23 | 2007-12-27 | Caterpillar Inc. | Fuel injector having encased piezo electric actuator |
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
| CN102709463A (en) * | 2012-06-28 | 2012-10-03 | 陈�峰 | Device and manufacturing method for packing piezoelectric ceramic |
| CN202527351U (en) * | 2012-04-17 | 2012-11-14 | 苏州工业园区海纳科技有限公司 | Round tube type energy transducer |
-
2013
- 2013-12-19 CN CN201310701623.7A patent/CN103645558B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5208506A (en) * | 1990-11-14 | 1993-05-04 | Nec Corporation | Laminated piezoelectric actuator |
| CN1586828A (en) * | 2004-07-15 | 2005-03-02 | 清华大学 | Plane movement mechanism and its device for micro robot |
| US20070295832A1 (en) * | 2006-06-23 | 2007-12-27 | Caterpillar Inc. | Fuel injector having encased piezo electric actuator |
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
| CN202527351U (en) * | 2012-04-17 | 2012-11-14 | 苏州工业园区海纳科技有限公司 | Round tube type energy transducer |
| CN102709463A (en) * | 2012-06-28 | 2012-10-03 | 陈�峰 | Device and manufacturing method for packing piezoelectric ceramic |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104539188A (en) * | 2015-01-04 | 2015-04-22 | 中国科学院光电技术研究所 | High-precision pressure driving device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103645558B (en) | 2016-08-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7026746B2 (en) | Valve control device | |
| US8000022B2 (en) | Liquid lens system | |
| CN103293662A (en) | Reflecting mirror surface shape control device | |
| US10139529B2 (en) | Deformable lens structure for adaptive optics devices | |
| JP5362587B2 (en) | Flexible lens assembly with variable focal length | |
| CN110546543B (en) | Liquid lens | |
| WO2008082957A3 (en) | Accommodating intraocular lens system having spherical aberration compensation and method | |
| JP2010521708A (en) | Optical mount and optical element with this type of mount | |
| CN103645556A (en) | Deformable mirror | |
| CN103728722B (en) | Distorting lens and actuator thereof | |
| CN103645558A (en) | Deformable mirror | |
| CN102522685A (en) | Compensation device for thermal lens effect of laser | |
| US7663822B2 (en) | Actuating device comprising bimetal disks | |
| CN103119492B (en) | Optical instrument having a stabilization element for mounting and adjusting an optical assembly in a holder, and mounting method for the stabilization element | |
| CN109387917A (en) | Equipment for can alternatively influence the wavefront of beam | |
| US20220035079A1 (en) | Variable volume liquid lenses | |
| EP3100080B1 (en) | Deformable lens structure for adaptive optics devices | |
| CN103278924A (en) | Driving device and displacement transmitting component | |
| CN102684055A (en) | Device for adjusting curvature radius of reflector | |
| CN103676141B (en) | Distorting lens and actuator thereof | |
| CN102684042A (en) | Compensation device for thermal lens effect of slab laser | |
| JP4210487B2 (en) | Displacement magnification mechanism | |
| EP3988972A1 (en) | Tunable liquid lens | |
| US20210263199A1 (en) | Optical device comprising a motor and a cam for adjusting the optical device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |