CN206277369U - A kind of motion platform for OLED testing equipments - Google Patents

A kind of motion platform for OLED testing equipments Download PDF

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Publication number
CN206277369U
CN206277369U CN201621405868.0U CN201621405868U CN206277369U CN 206277369 U CN206277369 U CN 206277369U CN 201621405868 U CN201621405868 U CN 201621405868U CN 206277369 U CN206277369 U CN 206277369U
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permanent
magnetism linear
platform
testing equipments
motion
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CN201621405868.0U
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陆敏杰
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Wuxi Star Micro Technology Co Ltd
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Wuxi Star Micro Technology Co Ltd
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Abstract

The utility model is related to motion platform technical field, especially a kind of motion platform for OLED testing equipments, and from top to bottom mechanism includes the platform successively:Vacuum cup, Z-direction fine setting platform, XY directions mobile station, marble pedestal, the Y1 permanent-magnetism linear motors are provided with Y-direction mechanical buffer unit with Y2 permanent-magnetism linear motors side, the X permanent-magnetism linear motors side is provided with X to mechanical buffer unit, wherein Z-direction fine setting platform includes Z-direction permanent-magnetism linear motor, Z-direction mechanism, Z-direction balancing spring and Z-direction objective table, the Z-direction objective table side is provided with wedge, the Z-direction fine setting platform is provided with flexible shell fragment, vertical mechanism's design is simplified, the straightness error in Z axis motion process is reduced.This hair bright can ensure vertical accuracy of the loading table top in the whole movement travel of XY, and the flatness error of its objective table in detection stroke range is less than 1um, and the characteristics of with compact, accurate, response high.

Description

A kind of motion platform for OLED testing equipments
Technical field
The utility model is related to motion platform technical field, more particularly to a kind of motion for OLED testing equipments to put down Platform.
Background technology
Testing equipment motion platform belongs to big stroke, high-accuracy platform, and the series platform is collection precision optical machinery, high-accuracy survey Can be decomposed into for the thing to be detected of a large area in the complication system of one, motion platform by the multinomial technology such as amount, motion control The cumulative detection in multiple visual fields, the detection of large area, the positioning precision of platform, plane are completed to oled panel by controlling sports platform Degree error and the at the uniform velocity property of operation determine the yield of the accuracy of detection of equipment, stepping and speed of service decision device.
Prior art uses a kind of XY directions using mechanical guide plus the type of drive of permanent-magnetism linear motor, Y-direction Two sets of drive devices are installed on marble pedestal both sides, and X is to stage+module on Y1 and the Y2 motion of Y-direction.Existing platform Flatness error in total travel typically can only all accomplish 5-10um, and need high-precision machined piece, and cumbersome Installation ensure.Therefore, it is necessary to design a installation, simply and in the range of platform effective travel flatness reaches 1um or so High-precision motion platform.
The Z-direction adjustment platform of prior art uses the vertical X/Y plane installation servomotor on gantry beam to add ball screw to put down Platform come realize fine setting.The drive form volume is larger, and Adjustment precision is low, and dynamic response is slow, characteristic is poor.Therefore, it is necessary to set The Z-direction adjustment platform of a features of response compact, accurate, high for meeting device requirement of meter.
Utility model content
The purpose of this utility model be in order to solve to have the shortcomings that in the prior art that dynamic response is slow, characteristic is poor, and A kind of motion platform for OLED testing equipments for proposing.
To achieve these goals, the utility model employs following technical scheme:
A kind of motion platform for OLED testing equipments is designed, from top to bottom mechanism includes the platform successively:Vacuum is inhaled Disk, Z-direction fine setting platform, XY directions mobile station, marble pedestal, XY directions mobile station is by parallel in three sets of separate Y-directions Y1 permanent-magnetism linear motors, Y2 permanent-magnetism linear motors and X permanent-magnetism linear motors, the Y1 permanent-magnetism linear motors and Y2 permanent-magnet linears Motor side is provided with Y-direction mechanical buffer unit, and the X permanent-magnetism linear motors side is provided with X to mechanical buffer unit, wherein Z Include Z-direction permanent-magnetism linear motor, Z-direction mechanism, Z-direction balancing spring and Z-direction objective table, the Z-direction objective table side to fine setting platform Wedge is provided with, the Z-direction fine setting platform is provided with flexible shell fragment, simplifies vertical mechanism's design, reduces Z axis and is moved through Straightness error in journey.
Preferably, the Z-direction mechanism is provided with two groups of mechanical guide units, and the mechanical guide unit includes Z1 to machinery With Z2 to mechanical guide, wherein Z1 is connected guide rail for wedge to mechanical guide with base plate, and another set Z2 is to mechanical guide It is connected with Z-direction objective table for wedge.
Preferably, the Z-direction objective table is connected by flexible shell fragment with the base plate of Z-direction mechanism.
Preferably, Z-direction permanent-magnetism linear motor stator, and Z-direction permanent-magnetism linear motor are installed on the base plate of Z-direction mechanism Stator is arranged on Z-direction permanent-magnetism linear motor, and Z-direction permanent-magnetism linear motor mover is provided with wedge.
Preferably, Z-direction balancing spring is installed between the Z-direction objective table lower surface and the base plate of Z-direction mechanism, this Z-direction Balancing spring can compensate for the weight of Z-direction objective table and the vacuum cup.
Preferably, grating scale is provided with the Z-direction mechanism, the grating scale in the Z-direction mechanism is installed on Z-direction mechanism On wedge, reading head is additionally provided with the base plate.
Preferably, the guiding mechanism of Y-direction is two sets of high-accuracy roller guides, and roller guide is respectively arranged in marble The both sides of pedestal Y-direction.
Preferably, the both sides of XY directions sports platform are the Y-direction direction of motion, wherein the stator peace of Y1 permanent-magnetism linear motors Loaded on marble pedestal, the mover of Y1 permanent-magnetism linear motors connects with the Y1 permanent-magnetism linear motors mover on the Y1 mechanical guides of the side Fitting is connected, and the stator of wherein Y2 permanent-magnetism linear motors is installed on marble pedestal, the mover of Y2 permanent-magnetism linear motors with should Y2 permanent-magnetism linear motor movers connector connection on the Y2 mechanical guides of side, the reading head of Y1, Y2 in is separately fixed at Y1 forever On magnetic linear motor rotor connector and Y2 permanent-magnetism linear motor mover connectors.
Preferably, also include that Y-direction feeds back grating scale, and Y-direction feedback grating on the Y1 mechanical guides and Y2 mechanical guides Chi is installed on marble pedestal.
Preferably, it is X between Y1 mechanical guides, Y2 mechanical guides to air-float guide rail, the X is installed in the middle of air-float guide rail There are Z permanent-magnetism linear motor stators, and X to feedback grating scale.
Preferably, X is air supporting plate to air supporting base plate under aerostatic slide to the air-float guide rail left and right sides and X, and upper cover plate is fixed The upper end of both sides air supporting plate is connected to, and upper cover plate is used to carry vacuum cup, forms an aerostatic slide of " mouth " font.
Preferably, the X of the aerostatic slide part is to air supporting base plate under aerostatic slide and the marble pedestal upper surface The air film of 10um or so is formed, the X is air supporting region to air supporting base plate corner under aerostatic slide.
Preferably, the X is connected to the mover of permanent-magnetism linear motor with the upper cover plate of aerostatic slide.
Preferably, the X is provided with the steel bar that magnetic is preloaded to the both sides of air-float guide rail upper surface, the aerostatic slide Permanent magnet is installed, composition X is preloaded to the magnetic of aerostatic slide, with X to air supporting base plate air supporting group under aerostatic slide inside upper cover plate Close to use and reach high rigidity performances of the X to aerostatic slide.
The utility model proposes a kind of motion platform for OLED testing equipments, beneficial effect is:This is used for OLED testing equipment motion platforms need to do high-precision X Y planes motion and have high speed, high-precision fine setting in Z-direction Function, and air supporting slide unit ensures vertical standard of the loading table top in the whole movement travel of XY by the way of magnetic is preloaded True property, the flatness error of its objective table in detection stroke range is less than 1um, and equipment has response compact, accurate, high The characteristics of.
Brief description of the drawings
Fig. 1 be the utility model proposes a kind of motion platform for OLED testing equipments structural representation;
Fig. 2 be the utility model proposes a kind of motion platform for OLED testing equipments Z-direction finely tune platform main view knot Structure schematic diagram;
Fig. 3 be the utility model proposes a kind of motion platform for OLED testing equipments Z-direction finely tune platform side-looking knot Structure schematic diagram;
Fig. 4 be the utility model proposes a kind of motion platform for OLED testing equipments structural representation.
In figure:1 marble pedestal, 2 Y1 mechanical guides, 3 Y1 permanent-magnetism linear motors, 4 Y2 mechanical guides, 5 X are to air supporting Guide rail, 6 X permanent-magnetism linear motors, 7 steel bars, 8 Y-direction mechanical buffer units, 9 X to mechanical buffer unit, 10 Y2 permanent-magnetism linear motors, 101 Y2 permanent-magnetism linear motor mover connectors, 11 Y-directions feedback grating scale, 12 X are to feedback grating scale, 13 reading heads, 14 X To air supporting base plate under aerostatic slide, 15 air supporting plates, 16 aerostatic slides, 17Z is to fine setting platform, 18 vacuum cups, 19 permanent magnets, 20 Z To objective table, 21 Z-direction balancing springs, 22 grating scales, 23 wedges, 24Z to permanent-magnetism linear motor, 25 base plates, 26 flexible pellets Piece.
Specific embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole Embodiment.
Reference picture 1-4, a kind of motion platform for OLED testing equipments, from top to bottom mechanism includes the platform successively: Vacuum cup 18, Z-direction fine setting platform, XY directions mobile station, marble pedestal 1, XY directions mobile station is by three sets of separate Y sides Upward parallel Y1 permanent-magnetism linear motors 3, Y2 permanent-magnetism linear motors 10 and X permanent-magnetism linear motors 6, the both sides of XY directions sports platform It is the Y-direction direction of motion, the stator of wherein Y1 permanent-magnetism linear motors 3 is installed on marble pedestal 1, Y1 permanent-magnetism linear motors 3 Mover is connected with the Y1 permanent-magnetism linear motor mover connectors on side Y1 mechanical guide 2, wherein Y2 permanent-magnetism linear motors 10 Stator is installed on marble pedestal 1, the Y2 permanent-magnet linears on the mover of Y2 permanent-magnetism linear motors 10 and side Y2 mechanical guide 4 Electric mover connector 101 is connected, Y1, reading heads 13 of the Y2 in be separately fixed at Y1 permanent-magnetism linear motor mover connectors with On Y2 permanent-magnetism linear motor movers connector 101.
Y1 permanent-magnetism linear motors 3 are provided with Y-direction mechanical buffer unit 8, the guiding of Y-direction with the side of Y2 permanent-magnetism linear motors 10 Mechanism is two sets of high-accuracy roller guides, and roller guide be respectively arranged in marble pedestal 1Y to both sides.
The side of X permanent-magnetism linear motors 6 is provided with X to mechanical buffer unit 9, and wherein Z-direction fine setting platform 17 includes Z-direction permanent-magnet linear Motor 24, Z-direction mechanism, Z-direction balancing spring 21 and Z-direction objective table 20, the side of Z-direction objective table 20 are provided with wedge 23, and Z-direction is micro- Adjust platform 17 that flexible shell fragment 26 is installed, Z-direction objective table 20 passes through flexible shell fragment 26 and is connected with the base plate 25 of Z-direction mechanism, simplifies Vertical mechanism's design, reduces the straightness error in Z axis motion process, and Z-direction permanent magnetism is provided with the base plate 25 of Z-direction mechanism Linear motor stator electric, and Z-direction permanent-magnetism linear motor stator is arranged on Z-direction permanent-magnetism linear motor 24, and Z is provided with wedge 23 To permanent-magnetism linear motor mover.
Z-direction mechanism is provided with two groups of mechanical guide units, and mechanical guide unit includes Z1 to mechanical guide and Z2 to machinery Guide rail, wherein Z1 are connected for wedge to mechanical guide with base plate 25, and another set Z2 is used for wedge 23 to mechanical guide It is connected with Z-direction objective table 20, Z-direction balancing spring 21 is installed between the base plate 25 of the lower surface of Z-direction objective table 20 and Z-direction mechanism, This Z-direction balancing spring 21 can compensate for the weight of Z-direction objective table 20 and vacuum cup 18, and the quantity of Z-direction balancing spring 21 is 3, And between be triangularly arranged, its barycenter is close to objective table geometric center, the quality for balancing objective table and vacuum cup, machine Tool guide track system can make one-movement-freedom-degree of the Z-direction objective table 20 with Y and Z-direction, then by flexible shell fragment 26 to Z-direction loading The constraint of the Y-direction free degree of platform 20, can make Z-direction objective table 20 only possess the one-movement-freedom-degree of Z-direction, whole fine setting platform be by What linear electric motors drove.
Grating scale 22 is provided with Z-direction mechanism, the grating scale 22 in Z-direction mechanism is installed on the wedge 23 of Z-direction mechanism, Reading head 13 is additionally provided with base plate 25, also includes that Y-direction feeds back grating scale 11, and Y on Y1 mechanical guides 2 and Y2 mechanical guides 4 It is installed on marble pedestal 1 to feedback grating scale 11.
It is X between Y1 mechanical guides 2, Y2 mechanical guides 4 to air-float guide rail 5, X in the middle of air-float guide rail 5 to being provided with Z permanent magnetism Linear motor stator electric 13, and X, to feedback grating scale 12, X is to the left and right sides of air-float guide rail 5 and X to air supporting bottom under aerostatic slide Plate 14 is air supporting plate 15, and upper cover plate is fixedly connected on the upper end of both sides air supporting plate 15, and upper cover plate is used to carry vacuum cup 18, An aerostatic slide 16 of " mouth " font is formed, the X of the part of aerostatic slide 16 is to air supporting base plate 14 and marble under aerostatic slide The upper surface of pedestal 1 forms the air film of 10um or so, and 14 4 jiaos to air supporting base plate under aerostatic slide of X is air supporting region, and X is straight to permanent magnetism The mover of line motor 6 is connected with the upper cover plate of aerostatic slide 16, and the both sides of the upper surface of air-float guide rail 16 are provided with what magnetic was preloaded Steel bar 7, is provided with permanent magnet 19 inside the upper cover plate of aerostatic slide 16, the magnetic for constituting aerostatic slide 16 is preloaded, and is slided to air supporting with X The air supporting of air supporting base plate 14 is applied in combination the high rigidity performance for reaching aerostatic slide 16 under block, and the steel bar on air-float guide rail can make air supporting The permanent magnet vertical suction of generation on sliding block upper connector, vertical suction makes aerostatic slide be provided with the rigidity of Z-direction, and vertical The lift of gas and carrying that suction is produced with air supporting base plate reach balance, make X have Z-direction two-way just to the three-back-shaped aerostatic slide of air supporting Degree.
More than, only the utility model preferably specific embodiment, but protection domain of the present utility model is not limited to In this, any one skilled in the art in the technical scope that the utility model is disclosed, according to the utility model Technical scheme and its utility model design be subject to equivalent or change, should all cover protection domain of the present utility model it It is interior.

Claims (14)

1. a kind of motion platform for OLED testing equipments, from top to bottom mechanism includes the platform successively:Vacuum cup (18), Z-direction fine setting platform, XY directions mobile station, marble pedestal (1), XY directions mobile station is by parallel in three sets of separate Y-directions Y1 permanent-magnetism linear motors (3), Y2 permanent-magnetism linear motors (10) and X permanent-magnetism linear motors (6), the Y1 permanent-magnetism linear motors (3) Y-direction mechanical buffer unit (8), X permanent-magnetism linear motors (6) side are provided with Y2 permanent-magnetism linear motors (10) side X is provided with to mechanical buffer unit (9), it is characterised in that wherein Z-direction finely tunes platform (17) includes Z-direction permanent-magnetism linear motor (24), Z To mechanism, Z-direction balancing spring (21) and Z-direction objective table (20), Z-direction objective table (20) side is provided with wedge (23), The Z-direction is finely tuned platform (17) and is provided with flexible shell fragment (26), simplifies vertical mechanism's design, in reducing Z axis motion process Straightness error.
2. a kind of motion platform for OLED testing equipments according to claim 1, it is characterised in that the Z-direction machine Structure is provided with two groups of mechanical guide units, the mechanical guide unit include Z1 to mechanical guide and Z2 to mechanical guide, wherein Z1 is connected for wedge to mechanical guide with base plate (25), and another set Z2 is used for wedge (23) and Z-direction to mechanical guide Objective table (20) is connected.
3. a kind of motion platform for OLED testing equipments according to claim 2, it is characterised in that the Z-direction is carried Thing platform (20) is connected by flexible shell fragment (26) with the base plate (25) of Z-direction mechanism.
4. a kind of motion platform for OLED testing equipments according to claim 2, it is characterised in that Z-direction mechanism Z-direction permanent-magnetism linear motor stator is installed on the base plate (25), and Z-direction permanent-magnetism linear motor stator to be arranged on Z-direction permanent magnetism straight On line motor (24), Z-direction permanent-magnetism linear motor mover is installed on wedge (23).
5. a kind of motion platform for OLED testing equipments according to claim 2, it is characterised in that the Z-direction is carried Z-direction balancing spring (21) is installed between thing platform (20) lower surface and the base plate (25) of Z-direction mechanism, this Z-direction balancing spring (21) Can compensate for the weight of Z-direction objective table (20) and the vacuum cup (18).
6. a kind of motion platform for OLED testing equipments according to claim 2, it is characterised in that the Z-direction machine Grating scale (22) is provided with structure, the grating scale (22) in the Z-direction mechanism is installed on the wedge of Z-direction mechanism (23), institute State and reading head (13) is additionally provided with base plate (25).
7. a kind of motion platform for OLED testing equipments according to claim 1, it is characterised in that the guiding of Y-direction Mechanism is two sets of high-accuracy roller guides, and roller guide is respectively arranged in the both sides of marble pedestal (1) Y-direction.
8. a kind of motion platform for OLED testing equipments according to claim 1, it is characterised in that the XY directions The both sides of sports platform are the Y-direction direction of motion, and the stator of wherein Y1 permanent-magnetism linear motors (3) is installed on marble pedestal (1), Y1 The mover of permanent-magnetism linear motor (3) is connected with the Y1 permanent-magnetism linear motor mover connectors on side Y1 mechanical guides (2), wherein The stator of Y2 permanent-magnetism linear motors (10) is installed on marble pedestal (1), mover and the side of Y2 permanent-magnetism linear motors (10) Y2 permanent-magnetism linear motor movers connector (101) connections on Y2 mechanical guides (4), the reading head (13) of Y1, Y2 in is respectively It is fixed on Y1 permanent-magnetism linear motor mover connectors and Y2 permanent-magnetism linear motor movers connector (101).
9. a kind of motion platform for OLED testing equipments according to claim 1, it is characterised in that the Y1 machineries Also include that Y-direction feeds back grating scale (11) on guide rail (2) and Y2 mechanical guides (4), and Y-direction feeds back grating scale (11) and is installed on Dali On ground mass seat (1).
10. a kind of motion platform for OLED testing equipments according to claim 1, it is characterised in that Y1 machineries are led It is X between rail (2), Y2 mechanical guides (4) to air-float guide rail (5), the X in the middle of air-float guide rail (5) to being provided with Z permanent-magnet linears Motor stator, and X is to feedback grating scale (12).
11. a kind of motion platforms for OLED testing equipments according to claim 10, it is characterised in that X is to air supporting Guide rail (5) left and right sides and X are air supporting plate (15) to air supporting base plate (14) under aerostatic slide, and upper cover plate is fixedly connected on both sides gas The upper end of kickboard (15), and upper cover plate forms an aerostatic slide (16) of " mouth " font for carrying vacuum cup (18).
A kind of 12. motion platforms for OLED testing equipments according to claim 10, it is characterised in that the air supporting The X of sliding block (16) part forms 10um or so to air supporting base plate (14) under aerostatic slide with the marble pedestal (1) upper surface Air film, the X to air supporting base plate (14) corner under aerostatic slide be air supporting region.
A kind of 13. motion platforms for OLED testing equipments according to claim 10, it is characterised in that the X to The mover of permanent-magnetism linear motor (6) is connected with the upper cover plate of aerostatic slide (16).
A kind of 14. motion platforms for OLED testing equipments according to claim 10, it is characterised in that the X to The both sides of air-float guide rail (5) upper surface are provided with the steel bar (7) that magnetic is preloaded, the upper cover plate inside peace of the aerostatic slide (16) Equipped with permanent magnet (19), the magnetic of composition aerostatic slide (16) is preloaded, and to air supporting base plate (14) under aerostatic slide, air supporting is combined makes with X With the high rigidity performance for reaching aerostatic slide (16).
CN201621405868.0U 2016-12-21 2016-12-21 A kind of motion platform for OLED testing equipments Active CN206277369U (en)

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CN201621405868.0U CN206277369U (en) 2016-12-21 2016-12-21 A kind of motion platform for OLED testing equipments

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621405868.0U CN206277369U (en) 2016-12-21 2016-12-21 A kind of motion platform for OLED testing equipments

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CN206277369U true CN206277369U (en) 2017-06-27

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108107532A (en) * 2017-11-24 2018-06-01 哈工大机器人集团(哈尔滨)华粹智能装备有限公司 A kind of three axis adjustment device of ultraprecise for quick frequent start-stop

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108107532A (en) * 2017-11-24 2018-06-01 哈工大机器人集团(哈尔滨)华粹智能装备有限公司 A kind of three axis adjustment device of ultraprecise for quick frequent start-stop

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