CN102788889A - Needle inserting method for atomic force microscope - Google Patents
Needle inserting method for atomic force microscope Download PDFInfo
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- CN102788889A CN102788889A CN2012102655507A CN201210265550A CN102788889A CN 102788889 A CN102788889 A CN 102788889A CN 2012102655507 A CN2012102655507 A CN 2012102655507A CN 201210265550 A CN201210265550 A CN 201210265550A CN 102788889 A CN102788889 A CN 102788889A
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Abstract
The invention relates to a needle inserting method for an atomic force microscope, which comprises the following steps: firstly, stretching a Z direction of a piezoelectric ceramic scanner to the longest position; controlling a stepped motor to quickly drive a sample platform to lift at a speed of 50-100 microns per second; judging whether a sample surface is in contact with a probe or not by utilizing a piezoelectric sensor to detect a facula deflection signal reflected from a probe tip; if the sample surface is in contact with the probe, quickly taking the Z direction of a piezoelectric ceramic scanner to the shortest position while stopping the stepped motor; and finally, adjusting an action force of the probe and the sample surface to a reference point position by finely adjusting the piezoelectric ceramic scanner, thereby finishing final needle inserting. According to the needle inserting method for the atomic force microscope, the system delay and the influence of motion inertia of the stepped motor on the mutual action force of the probe and the sample surface during a quick needle inserting process are effectively avoided, and the damage to the probe and the sample surface during the quick needle inserting process is reduced.
Description
Technical field
The present invention relates to a kind of atomic force microscope (AFM) inserting needle method.
Background technology
Atomic force microscope (AFM) is as a kind of high-resolution three-dimensional appearance detecting instrument; Not only obtained widespread use in field of biology; Great attention (T.Ando, " High-speed atomic force microscopy coming ofage ", the Nanotechnology of semiconductor product industry have been obtained simultaneously; 2012,23:06200-062028.).When AFM scanned at sample surfaces, probe on the micro-cantilever and sample surfaces interacted, and the acting force of generation causes micro-cantilever deflection, and this defection signal is used to characterize the morphology change of sample surfaces, and can reach the atom level high resolving power.Along with the AFM development of technology, AFM can also carry out three-dimensional imaging to sample surfaces friction force, surface stress distribution and Young modulus etc. except carrying out conventional surface topography sign.Along with processing live width in the semi-conductor industry constantly reduce a large amount of uses with high dielectric constant material, optical detection and scanning electron microscope detection method have all run into technology barrier.Advantages such as the high resolving power of AFM, many information measurements, three-dimensional imaging will be in semiconductor detection range performance significant role.
At a high speed, high-throughout detection be a kind of detection technique can be in semi-conductor industry the key of practicability.The speed of detection speed will directly influence the detection efficiency of industry spot, and the slow disadvantage of AFM exactly of measuring speed.Influence the AFM measuring speed and mainly comprise two aspect factors: one of which, the inserting needle time, just probe by away from the sample surfaces position (1 ~ 2mm), approach to the required time of sample surfaces scanning imagery position through feed mechanism (like stepper motor); Its two, imaging time after just inserting needle is accomplished, shows the required time from beginning first spot scan until accomplishing piece image.
At present, the imaging time for shortening AFM has had a lot of research institutions to carry out correlative study work (B.J.Kenton; A.J.Fleming; K.K.Leang, " Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed ", Review of Scientific Instruments; 2011,82 (12): 123703-123711.; C.Richter, M.Burri, T.Sulzbach; C.Penzkofer, B.Irmer, " Ultrashort cantilever probes for high speed atomic force microscopy "; SPIE, 2011.), and have company to develop Related product (Bruker Ltd.; " Dimension fastscan:the world ' s fastest AFM ", 2011.
Http:// www.bruker-axs.com).For the inserting needle time that shortens AFM; The general method that adopts the segmentation inserting needle; Be about to the inserting needle process and be divided into two parts: first is thick inserting needle fast, and from approaching fast to closer locations (20um to 200um) than distant positions (more than the 1mm) from sample surfaces, approximate procedure adopts laser interferometer, laser limit switch, capacitive transducer or passes through the judgement of camera automatic focus completing place stepper motor with probe; Chinese patent 200910220156.X adopts the laser limit switch; United States Patent (USP) U.S.Pat.No.7,770,231B2. adopts the camera auto focusing method; Second portion is thin inserting needle, accomplishes first's inserting needle to after the sample surfaces closer locations, the stepper motor stop motion; High-speed response motor or piezoelectric ceramic tube are as driver, like United States Patent (USP) U.S.Pat.No.5,614; 712 and U.S.Pat.No.2006/0230474A1.; Cooperate certain control method to accomplish the inserting needle process, this process can accurately be controlled the distance of probe and sample surfaces, prevents to damage.
For thick inserting needle part, introduce the risk that laser interferometer or camera automatic focus technology can be avoided probe and sample bump, but its complex structure, cost is high.Capacitive transducer is responsive to electromagnetic signal, operating environment is required high.The horizontal direction laser limit switch of Chinese patent 200910220156.X invention has characteristics such as simple in structure, that cost is low, but its each change limit switch threshold value all needs manual adjustment laser instrument initial position.Though thin inserting needle can at utmost reduce probe and sample damage, control procedure is complicated, and is consuming time longer.
Summary of the invention
The objective of the invention is to overcome the existing slow-footed deficiency of atomic force microscope inserting needle, a kind of novel quick nondestructive inserting needle method is provided.The present invention can easily be applied to all AFM systems, on the basis that does not change the AFM original structure, reduces the influence to probe and sample interaction force of system delay and stepper motor motional inertia, improves inserting needle speed.
The present invention at first reaches the longest position through controller control piezoelectric scanner Z direction; The control step motor drives the sample stage fast rise with 50 ~ 100um/s speed then; Utilize photoelectric sensor to detect the hot spot defection signal that reflects back from probe pinpoint and come whether contact probe of judgement sample surface, when the sample surfaces contact probe, rapidly piezoelectric scanner Z direction is reduced to the shortest position; Stop stepper motor simultaneously; Through the piezoelectric scanner fine setting, probe and sample surfaces acting force are adjusted to reference point locations at last, accomplish final inserting needle.The present invention utilizes the quick variation of piezoelectric scanner Z direction elongation, and the remaining displacement of sample that system delay and stepper motor motional inertia cause in the counteracting AFM quick needle insertion process is to probe and the influence of sample interaction force.
Technical scheme of the present invention is:
1, through controller piezoelectric scanner is applied the full scale input voltage, control piezoelectric scanner Z direction reaches the longest position;
2, drive sample with 50 ~ 100um/s speed inserting needle with stepper motor;
3, when photoelectric sensor detected the laser spot position of coming from probe reflection and deflects, piezoelectric scanner Z direction was reduced to the shortest, simultaneously the stepper motor stop motion;
4, controller is opened piezoelectric scanner Z direction close-loop feedback control, and quick, high-precision fine setting is carried out in displacement to piezoelectric scanner Z direction, and photoelectric sensor hot spot amount of deflection is reached with reference to point value.
Described piezoelectric scanner can be realized X, Y, the motion of Z three direction of principal axis 3-D scannings, and wherein the Z direction is consistent with stepper motor direction of motion, for perpendicular to the sample surfaces direction.Z direction maximum elongation amount is by piezoelectric scanner decision itself, and the piezoelectric scanner Z direction maximum elongation amount of atomic force microscope is generally 1um to 8um.When piezoelectric scanner Z direction driving voltage reached full scale, piezoelectric scanner reached the longest; Otherwise, then the shortest.Step 1) makes the piezoelectric scanner of atomic force microscope reach the longest in the Z direction.
Said 50 ~ 100um/s the inserting needle of step 2 speed, for 1mm probe and sample surfaces spacing, the inserting needle process is accomplished in about 12s ~ 22s.
The deflection threshold value of step 3 photoelectric sensor detection laser hot spot, is carried out follow-up shortening piezoelectric scanner again and is stopped stepper motor when tilt value reaches the RP magnitude of voltage by the magnitude of voltage decision of RP.Controller is influenced by system delay and stepper motor motional inertia after stopping the stepper motor operation, stepper motor still can drive sample and produce certain remaining displacement, and the piezoelectric scanner after shorten this moment will be protected probe and sample to the full extent.
Step 4 is influenced by stepper motor motional inertia displacement uncertainty, need carry out close-loop feedback control to piezoelectric scanner, probe and sample surfaces interaction force is finely tuned, thereby reduce probe and sample damage.
Step 4 close-loop feedback control adopts common ratio-integration (PI) feedback; The difference of photoelectric sensor hot spot defection signal and RP is an error signal; This error signal is as the input of close-loop feedback control, and output is as the drive signal of piezoelectric scanner Z direction after ratio, integral operation.
The present invention has following advantage:
The present invention can through adopting new inserting needle method, prevent further to improve inserting needle speed under the prerequisite that probe and sample damage under the condition that does not change AFM existing hardware system architecture.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
Figure 1A FM schematic diagram;
Fig. 2 the inventive method FB(flow block);
Fig. 3 piezoelectric scanner Z direction maximum elongation amount;
Stepper motor motional inertia and piezoelectric scanner motion synoptic diagram in Fig. 4 inserting needle process;
Among the figure: 1 controller, 2 probes, 3 samples, 4 LASER Light Sources, 5 photoelectric sensors, 6 piezoelectric scanners, 7 stepper motors, 8 RPs.
Embodiment
Be illustrated in figure 1 as existing AFM schematic diagram; Controller 1 control step motor 7 drives sample 3 bottom-up motions; Carry out the inserting needle operation; Photoelectric sensor 5 detects and is emitted to the laser facula that probe 2 back reflections are come from LASER Light Source 4, and photoelectric sensor 5 detected facula deviation voltage signals and RP 8 are delivered to controller 1 after relatively, are used to drive the close-loop feedback control that piezoelectric scanner 6 carries out the Z direction.
Be illustrated in figure 2 as concrete operations step of the present invention:
Step 1: piezoelectric scanner reaches the longest Hmax.Controller 1 imposes on piezoelectric scanner 6 full scale input voltage 220V, and piezoelectric scanner Z direction is reached the longest Hmax, is about 4um, and is as shown in Figure 3;
Step 2: stepper motor approaches.Probe 2 is 1mm with sample 3 surperficial initial distances, and stepper motor 7 drives sample 3 bottom-up motions, with 100um/s speed inserting needle;
Step 3: detect photo-sensor signal will deflection.When photoelectric sensor 5 detects the laser facula offset voltage that reflects back from probe 2 when being preset as the RP 8 of 1V; Controller 1 imposes on piezoelectric scanner 6 minimum input voltage 0V; Piezoelectric scanner Z direction is reduced to the shortest Hmin; Be about 0um, stop the stepper motor motion simultaneously.Influenced by system delay and stepper motor motional inertia, it is Is that stepper motor stops the remaining displacement of back sample, and Is Hmax, as shown in Figure 4; Otherwise, when photoelectric sensor 5 detects the laser facula offset voltage that reflects back from probe 2 less than the voltage of RP 8, return step 2.
Step 4: further finely tune piezoelectric scanner.The Z direction close-loop feedback control that controller 1 is opened piezoelectric scanner 6, quick, high precision fine setting through to piezoelectric scanner Z direction make photoelectric sensor hot spot amount of deflection reach the magnitude of voltage of RP 8.
Above-mentioned inserting needle process is accomplished in 12s.
In the described step 1, the full scale input voltage of piezoelectric scanner is generally 100 ~ 400V, and Z direction maximum displacement is 1 ~ 8um, is determined by the piezoelectric scanner model.
In the described step 3, the magnitude of voltage of RP 8 can be set as required, and magnitude of voltage is big more, and probe and sample surfaces acting force are big more behind the inserting needle, generally are set between the 300mV to 1V.
In the described step 4; Z direction close-loop feedback control adopts common ratio-integration (PI) FEEDBACK CONTROL; The laser facula defection signal that photoelectric sensor 5 collects and the difference of RP 8 are error signal; This error signal is as the input of close-loop feedback control, and output is adjusted laser facula offset voltage value through control piezoelectric scanner 6 at the elongation of Z direction as the Z direction drive signal of piezoelectric scanner 6 after ratio, integral operation; It is stabilized near the RP 8, thereby guarantees the controlled of probe and sample surfaces acting force and stable.
Claims (5)
1. the inserting needle method of an atomic force microscope is characterized in that, described inserting needle method may further comprise the steps:
1) through controller (1) piezoelectric scanner (6) is applied the full scale input voltage, the Z direction of control piezoelectric scanner (6) reaches the longest position;
2) drive the bottom-up motion inserting needle of sample (3) with stepper motor (7);
3) detect from probe (2) laser light reflected facula deviation voltage during when photoelectric sensor (5) more than or equal to the voltage of RP (8); Impose on the minimum input voltage of piezoelectric scanner (6) by controller (1); Piezoelectric scanner (6) Z direction is reduced to the shortest, stops stepper motor (7) motion simultaneously.
2. according to the inserting needle method of the described atomic force microscope of claim 1, it is characterized in that in the described step 1), the full scale input voltage that described controller (1) applies piezoelectric scanner (6) is 100 ~ 400V.
3. according to the inserting needle method of the described atomic force microscope of claim 1, it is characterized in that in the described step 3), the voltage of described RP (8) is 300mV to 1V.
4. according to the inserting needle method of the described atomic force microscope of claim 1, it is characterized in that in the described step 3), it is 0V that controller (1) imposes on the minimum input voltage of piezoelectric scanner (6).
5. according to the inserting needle method of the described atomic force microscope of claim 1, it is characterized in that described step 2) in, the speed that stepper motor (7) drives the bottom-up motion of sample (3) is 50 ~ 100um/s.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106198489A (en) * | 2016-08-10 | 2016-12-07 | 苏州华莱德电子科技有限公司 | A kind of molecule knot optical near-field microscopic system and building method thereof |
| CN107796958A (en) * | 2017-09-18 | 2018-03-13 | 上海理工大学 | A kind of preparation method of AFM colloid probe |
| CN110312939A (en) * | 2017-02-22 | 2019-10-08 | 株式会社岛津制作所 | Scanning type probe microscope |
| CN117699737A (en) * | 2024-02-01 | 2024-03-15 | 微瑞精仪(厦门)科技有限公司 | Large-stroke nanoscale distance adjusting method and system for constructing single-molecule junction |
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| CN101206170A (en) * | 2006-12-22 | 2008-06-25 | 中国科学院沈阳自动化研究所 | Sample nondestructive approach method and implementation device facing to nano collimation and operation |
| US20100122385A1 (en) * | 2008-11-13 | 2010-05-13 | Veeco Instruments Inc. | Method and apparatus of operating a scanning probe microscope |
| CN102072969A (en) * | 2009-11-25 | 2011-05-25 | 中国科学院沈阳自动化研究所 | Device for lossless automatic approximation by facing nano observation and nano operation |
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- 2012-07-27 CN CN2012102655507A patent/CN102788889A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101206170A (en) * | 2006-12-22 | 2008-06-25 | 中国科学院沈阳自动化研究所 | Sample nondestructive approach method and implementation device facing to nano collimation and operation |
| US20100122385A1 (en) * | 2008-11-13 | 2010-05-13 | Veeco Instruments Inc. | Method and apparatus of operating a scanning probe microscope |
| CN102072969A (en) * | 2009-11-25 | 2011-05-25 | 中国科学院沈阳自动化研究所 | Device for lossless automatic approximation by facing nano observation and nano operation |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106198489A (en) * | 2016-08-10 | 2016-12-07 | 苏州华莱德电子科技有限公司 | A kind of molecule knot optical near-field microscopic system and building method thereof |
| CN106198489B (en) * | 2016-08-10 | 2019-04-02 | 苏州华莱德电子科技有限公司 | A kind of molecule knot optical near-field microscopic system and its building method |
| CN110312939A (en) * | 2017-02-22 | 2019-10-08 | 株式会社岛津制作所 | Scanning type probe microscope |
| CN107796958A (en) * | 2017-09-18 | 2018-03-13 | 上海理工大学 | A kind of preparation method of AFM colloid probe |
| CN117699737A (en) * | 2024-02-01 | 2024-03-15 | 微瑞精仪(厦门)科技有限公司 | Large-stroke nanoscale distance adjusting method and system for constructing single-molecule junction |
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Application publication date: 20121121 |