CN102072969A - Device for lossless automatic approximation by facing nano observation and nano operation - Google Patents
Device for lossless automatic approximation by facing nano observation and nano operation Download PDFInfo
- Publication number
- CN102072969A CN102072969A CN2009102201540A CN200910220154A CN102072969A CN 102072969 A CN102072969 A CN 102072969A CN 2009102201540 A CN2009102201540 A CN 2009102201540A CN 200910220154 A CN200910220154 A CN 200910220154A CN 102072969 A CN102072969 A CN 102072969A
- Authority
- CN
- China
- Prior art keywords
- sample
- probe
- nano
- laser
- approximation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention relates to atomic force microscope (AFM)-based atomic force scanning microscope technology and discloses a device for lossless automatic approximation by facing nano observation and nano operation. A method for the lossless automatic approximation comprises the following steps of: driving a sample platform to rise by controlling a stepper motor; judging whether a sample is moved to a preset position or not by using detection signals of a laser receiver so as to finish the initial setting of approximation; and controlling a piezoelectric ceramic driver to approximate upwards, and judging whether the sample is contacted with a probe or not by detecting a photoelectric sensor so as to finish the final approximation. By the method and the device, the problem that the thickness of the sample influences the approximation process in the sample approximation process is effectively solved, and damages to the probe and the surface of the sample are reduced in the approximation process.
Description
Technical field
The present invention relates to adopt AFM (Atomic Force Microscope, the atomic force flying-spot microscope) probe carries out the harmless device that approaches automatically in nano collimation and the operating process, a kind of specifically new continuous approach method and device are used for realizing that nano collimation and operating process sample approach automatically with respect to the harmless of probe.Solve the probe and the sample surfaces feature damage that cause for maloperation owing to the people in traditional AFM approximate procedure.
Technical background
At present, in nano material observation, nano-device manufacturing, have a very important role in nano science research and the nanoprocessing application, become an important directions in the present nano science research based on the nano collimation of AFM and operative technique.Nano collimation and principle of operation based on AFM are, control cantilever beam structure probe produces contact or contactless state effect to sample surfaces, utilize photoelectric sense technology to detect the stress deformation of probe under this state, obtain the operating physical force information of the shape characteristic or the probe of sample, to reach observation of nanoscale pattern and operation to sample, this need apply driving voltage by the kinematic system that piezoelectric ceramic actuator is constituted, the control piezoelectric ceramic actuator drives observation and the operating distance that sample approaches probe, and this distance generally need be controlled at a few to tens of nanometers.Whether usually the control method of approaching that adopts is that control step driven by motor sample stage is approached, and whether the position signalling that detects on the photoelectric sensor via the laser facula place of probe reflection suddenly change, come test sample to reach with probe with this and contact configuration state.There are very high precise and stable control and response speed ability in this direct mode requirement system, the realization difficulty is higher, approach in the contact process and bump easily between the sample and probe, probe is damaged, biological samples such as the Partial Feature of sample surfaces such as DNA are suffered damage.Another utilizes limit switch to realize harmless method of approaching, but the height for sample has higher requirements, the position of limit switch needs position per sample to adjust, so the height to sample has certain limitation, and be not easy to realize that sample continuous in the operating process is harmless approaches automatically.
Summary of the invention
Approach in the probe process destruction for solving little AFM sample stage to probe and sample, sample approaches continuously automatically in realization nano collimation and the operating process, the object of the present invention is to provide a kind of new harmless device that approaches automatically: control the driven by motor sample stage by controller and rise, utilize the laser pickoff detection signal to come judgement sample whether to move to the precalculated position, finish and approach initial adjustment; Control piezoelectric ceramics then and upwards approach, come whether contact probe of judgement sample, finish finally and approach by detecting photoelectric sensor.Approach probe by test sample and produce atomic force and make the Photoelectric Detection information that the time spent produces and carry out FEEDBACK CONTROL, reach the harmless purpose of approaching probe of control sample.
Concrete technical scheme is:
A kind of realization is towards nano collimation and the harmless device that approaches automatically of nano-manipulation, comprise stepper motor, piezoelectric ceramic actuator, generating laser, laser pickoff, controller, probe, LASER Light Source, photoelectric sensor, described controller is electrically connected with each parts, on the described stepper motor piezoelectric ceramic actuator is set, on the described piezoelectric ceramic actuator sample stage is set, directly over the described sample stage probe is set, to photoelectric sensor, generating laser and laser pickoff are placed in the sample stage both sides respectively and are positioned under the probe lasing light emitter emission laser through probe reflection, directly over the sample stage.Described generating laser emitted laser is positioned under the probe, and keeps 10～50 microns distances with needle point.Wherein the controller core control chip adopts embedded system (ARM).Scan-probe adopts the NSC21 series of Estonia MikroMasch company.
Described controller is a control system based on the C8051 single-chip microcomputer, cooperates host computer to finish data communication, instruction control, AD data acquisition, DA output, step motor control and the detection of photoelectrical position sensor information etc.Its hardware general frame is shown in Figure 2.Controller mainly comprises the C8051F120 single-chip microcomputer, serial communication modular, step motor control module, laser pickoff signal detection module, photoelectrical position sensor information detection module, Piezoelectric Ceramic module.Wherein the C8051F120 single-chip microcomputer is the core of control, is used for the control of data processing and system; Serial communication modular is used for and the communicating by letter of host computer, and finishes the control and the data transmission of instruction; The step motor control module is used for Stepping Motor Control, and the micron order of finishing sample stage tentatively approaches; The laser pickoff signal detection module is used for the output signal of detection laser receiver, is used to judge when stepper motor drives sample stage and tentatively approaches whether blocking laser of sample; The piezoelectric ceramics control module is used for the voltage of DA output on the controller is carried out the high pressure amplification, and the control piezoelectric ceramics is finished nanoscale and approached motion; Photoelectrical position sensor information detection module is used to detect the output signal of photoelectrical position sensor, the situation that contacts of scan-probe and sample when judging that piezoelectric ceramic actuator drives the sample platform and finishes nanoscale and approach.
As shown in Figure 3, the principle of the invention is: a branch of horizontal laser light is preset in the precalculated position between probe and sample stage, and laser is produced by generating laser, and is detected by laser pickoff.Laser is positioned under the probe, with probe apart from 10-50uM.When sample begins to approach, risen by the step motor drive sample stage earlier, when sample rising and blocking laser, laser pickoff receives this signal and this signal is reached controller, controller just stops the stepper motor motion, and at this moment sample surfaces height and horizontal laser light are at sustained height; Then beginning to begin to drive the sample stage nanoscale by piezoelectric ceramic actuator rises, when the sample surfaces contact probe, probe produces deformation, and is detected this deformation and signal is reached controller by photoelectric sensor, controller stops the piezoelectric ceramic actuator motion, finishes sample and approaches; When if piezoelectric ceramic actuator moves to ultimate range, photoelectric sensor does not still have the output mutation signal, then controller control piezoelectric ceramic actuator is got back to initial position, reset the precalculated position again, by the stepping of step motor drive initial adjustment platform, promptly drive piezoelectric ceramic actuator by aforementioned manner again and approach, till photoelectric sensor produces jump signal.
The drive principle of piezoelectric ceramics: piezoelectric ceramics (lead zirconate titanate) is with brown lead oxide, lead zirconates, the lead titanates polycrystal that sintering forms under 1200 degree high temperature.Utilize the inverse piezoelectric effect of piezoelectric ceramics, on piezoelectric ceramics the two poles of the earth, apply alternating voltage, cause that piezoelectric ceramics produces mechanical deformation, produce the nanoscale motion thereby drive the AFM sample stage.
The present invention has following advantage: with approached system in the past and compared, because laser and probe relative position are fixed, after so sample stage is initially approached, the distance of sample stage is also fixed with the position of probe, each like this distance that can guarantee sample and probe of approaching, eliminate other factors and disturb, to finally forcing the environment that approaches that into provides good.This harmless system architecture of approaching is simple, the efficient height, and cost is low, for the AFM of developing low-cost provides a kind of feasible technological approaches, and can greatly improve the efficient of approaching of sample, reduces the loss that probe and sample cause because of the approximate procedure misoperation.
Description of drawings
Fig. 1 structure diagram of the present invention;
Fig. 2 controller architecture sketch;
Fig. 3 principle of the invention figure.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further detail.
As shown in Figure 1, the inventive system comprises stepper motor 1, piezoelectric ceramic actuator 2, generating laser 4, laser pickoff 5, probe 6, LASER Light Source 7, photoelectric sensor 8, controller 9, described controller 9 is electrically connected with each parts, on the described stepper motor 1 piezoelectric ceramic actuator 2 is set, sample stage 3 is set on the described piezoelectric ceramic actuator, directly over the described sample stage 3 probe 6 is set, lasing light emitter 7 emission laser reflex to photoelectric sensor 8 through probe 6, and generating laser 4 and laser pickoff 5 are placed in sample stage 3 both sides respectively and are positioned under the probe 6, directly over the sample stage 3.Generating laser 4 emitted laser are positioned under the probe 6, and keep 10～50 microns distances with needle point.
As shown in Figure 2, described controller mainly comprises the C8051F120 single-chip microcomputer, serial communication modular, step motor control module, laser pickoff signal detection module, photoelectrical position sensor information detection module, Piezoelectric Ceramic module.Wherein the C8051F120 single-chip microcomputer is the core of control, is used for the control of data processing and system; Serial communication modular is used for and the communicating by letter of host computer, and finishes the control and the data transmission of instruction; The step motor control module is used for Stepping Motor Control, and the micron order of finishing sample stage tentatively approaches; The laser pickoff signal detection module is used for the output signal of detection laser receiver, is used to judge when stepper motor drives sample stage and tentatively approaches whether blocking laser of sample; The piezoelectric ceramics control module is used for the voltage of DA output on the controller is carried out the high pressure amplification, and the control piezoelectric ceramics is finished nanoscale and approached motion; Photoelectrical position sensor information detection module is used to detect the output signal of photoelectrical position sensor, the situation that contacts of scan-probe and sample when judging that piezoelectric ceramic actuator drives the sample platform and finishes nanoscale and approach.
The using method of apparatus of the present invention is: stepper motor 1 constitutes the initial adjustment motion platform, is used for the micron order adjustment; Generating laser 4 and laser pickoff 5 cellular constructions are positioned at below probe 6 structures, make horizontal laser light be positioned at probe 6 following pre-positions by fine setting, are used for test sample 3 initial adjustments and whether arrive horizontal laser light position, precalculated position.When sample 3 begins to approach, drive sample 3 by stepper motor 1 earlier and rise, when sample 3 risings and blocking laser, laser pickoff 5 receives this signal, just stop stepper motor 1 motion, at this moment sample 3 surface elevations and horizontal laser light be at sustained height, just pre-set position.
Piezoelectric ceramic actuator 2 constitutes precision movement platform, is used for the nanoscale adjustment.Probe 6, whether the cellular construction that lasing light emitter 7 and photoelectric sensor 8 constitute is used for detecting finishes at piezoelectric ceramic actuator 2 approximate procedures.After finishing initial approximation step, control piezoelectric ceramic actuator 2 upwards approach, detect simultaneously on the photoelectric sensor 8 by probe 6 laser light reflected facula position variable signals, if light spot position signal produces sudden change, then interpret sample 3 contact probe 6 stops to approach, and finishes approximate procedure.When if piezoelectric ceramic actuator 2 moves to ultimate range, photoelectric sensor 8 does not still have the output mutation signal, then piezoelectric ceramic actuator 2 is got back to initial position, control step motor 1 drives the stepping of initial adjustment platform again, again driving piezoelectric ceramic actuator 2 by aforementioned manner approaches, till photoelectric sensor 8 produces jump signal, finally finish harmless approaching.
Claims (2)
1. one kind towards the harmless device that approaches automatically of nano collimation and nano-manipulation, it is characterized in that: comprise stepper motor, piezoelectric ceramic actuator, generating laser, laser pickoff, controller, probe, LASER Light Source, photoelectric sensor, described controller is electrically connected with each parts, on the described stepper motor piezoelectric ceramic actuator is set, on the described piezoelectric ceramic actuator sample stage is set, directly over the described sample stage probe is set, to photoelectric sensor, generating laser and laser pickoff are placed in the sample stage both sides respectively and are positioned under the probe lasing light emitter emission laser through probe reflection, directly over the sample stage.
2. approach device by claim 1 is described automatically towards nano collimation and nano-manipulation are harmless, it is characterized in that: the generating laser emitted laser is positioned under the probe, and keeps 10～50 microns distances with needle point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102201540A CN102072969A (en) | 2009-11-25 | 2009-11-25 | Device for lossless automatic approximation by facing nano observation and nano operation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102201540A CN102072969A (en) | 2009-11-25 | 2009-11-25 | Device for lossless automatic approximation by facing nano observation and nano operation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102072969A true CN102072969A (en) | 2011-05-25 |
Family
ID=44031587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009102201540A Pending CN102072969A (en) | 2009-11-25 | 2009-11-25 | Device for lossless automatic approximation by facing nano observation and nano operation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102072969A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102788889A (en) * | 2012-07-27 | 2012-11-21 | 中国科学院电工研究所 | Needle inserting method for atomic force microscope |
| CN103591908A (en) * | 2013-11-28 | 2014-02-19 | 重庆理工大学 | Angular displacement sensor based on atomic force |
| CN104374954A (en) * | 2014-11-24 | 2015-02-25 | 苏州飞时曼精密仪器有限公司 | Probe and sample approaching device and method for scanning probe microscope |
| CN108732387A (en) * | 2017-04-20 | 2018-11-02 | 中国科学院沈阳自动化研究所 | A kind of probe sample distance controlling method and system of SICM |
| CN109963982A (en) * | 2016-07-12 | 2019-07-02 | 法比奥·泼尼股份公司 | Thin paper converts production line and method |
| CN113848349A (en) * | 2021-09-09 | 2021-12-28 | 国仪量子(合肥)技术有限公司 | Automatic probe needle inserting device and automatic probe needle inserting method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1211307A (en) * | 1996-01-05 | 1999-03-17 | 托马斯·J·阿普尔亚德 | Optical safety device for mounting on a moving member |
| CN1652885A (en) * | 2002-03-27 | 2005-08-10 | 拉泽安全有限公司 | Multiple laser safety system |
-
2009
- 2009-11-25 CN CN2009102201540A patent/CN102072969A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1211307A (en) * | 1996-01-05 | 1999-03-17 | 托马斯·J·阿普尔亚德 | Optical safety device for mounting on a moving member |
| CN1652885A (en) * | 2002-03-27 | 2005-08-10 | 拉泽安全有限公司 | Multiple laser safety system |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102788889A (en) * | 2012-07-27 | 2012-11-21 | 中国科学院电工研究所 | Needle inserting method for atomic force microscope |
| CN103591908A (en) * | 2013-11-28 | 2014-02-19 | 重庆理工大学 | Angular displacement sensor based on atomic force |
| CN103591908B (en) * | 2013-11-28 | 2016-09-07 | 重庆理工大学 | Based on atomic angular displacement sensor |
| CN104374954A (en) * | 2014-11-24 | 2015-02-25 | 苏州飞时曼精密仪器有限公司 | Probe and sample approaching device and method for scanning probe microscope |
| CN109963982A (en) * | 2016-07-12 | 2019-07-02 | 法比奥·泼尼股份公司 | Thin paper converts production line and method |
| CN108732387A (en) * | 2017-04-20 | 2018-11-02 | 中国科学院沈阳自动化研究所 | A kind of probe sample distance controlling method and system of SICM |
| CN108732387B (en) * | 2017-04-20 | 2020-04-21 | 中国科学院沈阳自动化研究所 | SICM probe sample distance control method and system |
| CN113848349A (en) * | 2021-09-09 | 2021-12-28 | 国仪量子(合肥)技术有限公司 | Automatic probe needle inserting device and automatic probe needle inserting method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102072969A (en) | Device for lossless automatic approximation by facing nano observation and nano operation | |
| US4954704A (en) | Method to increase the speed of a scanning probe microscope | |
| CN102788888A (en) | Probe inserting device of scanning probe microscope and method thereof | |
| JP6116579B2 (en) | Scanning probe microscope control method and scanning probe microscope apparatus | |
| US7622847B2 (en) | Method and device for precisely resisting and moving high load | |
| CN106841687B (en) | The method that multi-parameter synchro measure is carried out using Kelvin probe force microscopy | |
| CN100461365C (en) | High precision silicon slice bench and uses thereof | |
| CN103264385B (en) | Automatic microoperation device | |
| CN102072970A (en) | Method and device for lossless automatic approximation by facing nano observation and nano operation | |
| US20230019239A1 (en) | Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope | |
| CN102136300A (en) | Three-section combined type ultraprecise positioning table and positioning method thereof | |
| CN201532396U (en) | Nonloss automatic approximation device facing nanometer observation and nanometer operation | |
| US5847383A (en) | Approaching device of scanning probe microscope | |
| CN111026166B (en) | Planar two-degree-of-freedom macro-micro composite positioning system and control method | |
| CN101206170B (en) | Sample nondestructive approach method and implementation device facing to nano collimation and operation | |
| CN103645347B (en) | The single-point tracking measurement method of micro-nano-scale Dynamic Coupling vibration | |
| CN106645803B (en) | A kind of invention provides a double-probe atomic power quickly approaches device and method | |
| CN203380882U (en) | Automatic micro-operation device | |
| CN101408736A (en) | Probe-induced surface plasma resonance lithographic device and method | |
| CN102788889A (en) | Needle inserting method for atomic force microscope | |
| JP2001033373A (en) | Scanning probe microscope | |
| US20200003800A1 (en) | Scanning probe microscope | |
| CN203350529U (en) | Micro-electro-mechanical interference platform with closed-loop control system | |
| KR101218177B1 (en) | atomic force microscope | |
| KR20130024159A (en) | Distance detecting apparatus for mobile robot and method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20110525 |