CN101206170A - Sample nondestructive approach method and implementation device facing to nano collimation and operation - Google Patents
Sample nondestructive approach method and implementation device facing to nano collimation and operation Download PDFInfo
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- CN101206170A CN101206170A CNA2006101349778A CN200610134977A CN101206170A CN 101206170 A CN101206170 A CN 101206170A CN A2006101349778 A CNA2006101349778 A CN A2006101349778A CN 200610134977 A CN200610134977 A CN 200610134977A CN 101206170 A CN101206170 A CN 101206170A
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Abstract
The invention discloses a sample nondestructive approximation method regarding nanometer observation and operation. A sample is controlled to do nanometer level initial adjustment movement relative to a probe and to do nanometer level precise movement. After undergoing the feedback control step of checking position variation signal of a reflected laser spot, the aim of controlling the sample to approach the probe without damage is achieved through carrying out feedback control of checking the photoelectric detection signal produced when the sample approaches the probe and generates an atomic force action. The invention can avoid probe or sample damage caused by collision approximation.
Description
Technical field
The present invention relates to adopt atomic force microscope (AFM) probe to carry out a kind of sample nondestructive approach method and implement device in nano collimation and the operating process, this method can realize that the harmless of sample and probe approaches.
Background technology
Nano collimation and operative technique are in nano material observation, nano-device manufacturing, nano science research and nanoprocessing have a very important role in using, and adopt the nano collimation of AFM probe patterns and the important directions that operation has become present nano science research.The AFM probe patterns is carried out nano collimation and principle of operation is, control fine cantilever beam structure probe sample surfaces is produced contact or contactless state (nanoscale), utilize photoelectric sense technology to detect the stress deformation of probe under this state, obtain the operating physical force information of the shape characteristic or the probe of sample, to reach observation of nanoscale pattern and operation to sample.This need apply driving voltage by the kinematic system that PZT (piezoelectric can produce the micromotion of hundreds of micron stroke) is constituted, and control PZT drives observation and the operating distance that sample approaches probe, and this distance generally need be controlled at a few to tens of nanometers.Whether usually the control method of approaching that adopts is that control step driven by motor sample stage is approached, and whether the position signalling that detects on the photoelectrical position sensor via the laser facula place of probe reflection suddenly change, come test sample to reach with probe with this and contact configuration state.Because probe (usually by made such as antimony platinum, chromium gold, silicon nitrides) typically has a diameter from several to tens nanometers, there are very high precise and stable control and response speed ability in this direct mode requirement system, the realization difficulty is higher, approach the collision that also forms easily in the contact process between sample and the probe, this collision may cause that promptly probe damages, also easily to soft sample for example biological sample such as DNA produce injury.Typical silicon materials probe is referring to Fig. 1-1 (silicon probe), and Fig. 1-2 (tip portion).
Summary of the invention
For the sample that solves based on the AFM probe patterns approaches the rapid wear problem, the present invention proposes that a kind of sample is harmless to approach control method and implement device, can realize that by the present invention the not damaged of sample and probe approaches.
To achieve these goals, technical solution of the present invention:
Approach control method: carry out micron-sized initial adjustment campaign and nano level precise motion with respect to probe by the control sample, the FEEDBACK CONTROL step of the position variation signal of reflected laser light spot after testing, approach probe by test sample and produce atomic force and make the Photoelectric Detection information that the time spent produces and carry out FEEDBACK CONTROL, reach the harmless purpose of approaching probe of control sample; Specifically:
Make sample approach motion by driving governor control step motor-driven initial adjustment platform, and, finish initial approximation step by the signal of driving governor reception from photoelectric limit switch to probe direction; Approach the direction driving voltage by driving governor to progressively adding on the PZT driver again, detect the laser spot position variable signal on the photoelectrical position sensor simultaneously by probe reflection, if light spot position signal produces sudden change, interpret sample contact probe then, stop to approach, finish approximate procedure; When if the driving voltage of PZT driver is added to maximum rating, photoelectric sensor does not still have the output mutation signal, then cancels the driving voltage that approaches of PZT driver; Control step motor-driven initial adjustment platform stepping again drives PZT by aforementioned manner again and approaches, till photoelectric sensor produces jump signal;
The stepping yardstick of control step motor-driven initial adjustment platform is controlled in the specified maximum elongation amount of PZT driver; The FEEDBACK CONTROL step is specially: the distortion that is caused by atomic force effect between sample and probe tip that cantilever beam structure on the detector probe produces, and then cause that reflector laser penetrates the variation of facula position on photoelectric sensor, realize the FEEDBACK CONTROL of approaching of sample and probe; Explain that the signal that described facula position changes has two modes: the one, the sample topography of nanoscale is described, the 2nd, the signal interpretation of probe stress and deformation is become the size and Orientation of operating physical force, the motion of probe and direction during in order to control operation; Approaching direction is probe place direction;
The implement device of described sample nondestructive approach method towards nano collimation and operation comprises:
The initial adjustment motion platform is made up of stepper motor, reducing gear, motion in one dimension platform, and wherein stepper motor is installed on the base, and output shaft links to each other with reducing gear; The terminal motion in one dimension platform that connects of reducing gear;
Precision movement platform is made of the PZT driver, and the bottom is fixedly mounted on initial adjustment motion platform free end, and promptly an end is fixed in the motion in one dimension platform, and the top is provided with the sample stage that is used for placing sample;
Feedback control unit is made of laser instrument, photoelectric sensor, probe and driving governor, and probe is positioned at sample top, on laser optical path, and the reflector laser of its generation is to photoelectric sensor; The installation site of photoelectric sensor is on the light path position that can receive by the probe reflection laser beam;
Driving governor, respectively be installed in substructure member on photoelectric sensor be electrically connected; And with stepper motor and the communication of PZT driver, by output encoder/voltage signal control step motor and PZT driver;
Photoelectric limit switch is fixed on base side wall and the motion in one dimension platform, and its measuring point is positioned at slide block one side;
Driving governor is a core with the single-chip microcomputer, has serial communication and pre-programmed ability, with host computer communication switch system state and control parameter information;
Described probe constitutes and can make time spent generation deformed configurations in atomic force for installing a needle point on the at one end fixing semi-girder tip additional; Described motion in one dimension platform comprises leading screw, and slide block and feed rod, slide block are installed on the leading screw, is located on the slide block side by side with feed rod; Described precision movement platform adopts one dimension, two dimension or three-dimensional type.
The present invention has following advantage:
1. the present invention adopts the spacing technology of optoelectronic switch, finishes the relative positioning between sample and the operation probe, can finish once protection to sample.
2. because the present invention adopts the PZT driver to realize the nanoscale displacement in the continuous change condition of driving voltage, then can avoid colliding with being used of stepper motor and approach probe or the sample damage that is caused.
Description of drawings
Fig. 1-1 is for being used for the harmless silicon materials probe synoptic diagram that approaches of nano collimation operation A FM device.
Fig. 1-2 is the harmless silicon materials probe tip part synoptic diagram that approaches that is used for nano collimation operation A FM device.
Fig. 2 forces the into implement device structure diagram of method for the present invention.
Fig. 3 is an approach method process flow diagram of the present invention.
Fig. 4 is used for the implement device structural representation of the nondestructive approach method of nano collimation operation A FM device.
Fig. 5 is the AFM schematic diagram.
Embodiment
Below in conjunction with embodiment and accompanying drawing the present invention is described in further detail.
Shown in Fig. 2,4, apparatus of the present invention comprise:
The initial adjustment motion platform is used for the micron order adjustment, comprises stepper motor 1, reducing gear 2, motion in one dimension platform, and wherein stepper motor 1 is installed on the fixing base, and output shaft links to each other with reducing gear 2; The terminal motion in one dimension platform that connects of reducing gear; The motion in one dimension platform comprises leading screw 3, and slide block 4 and feed rod 5, slide block 4 are installed on the leading screw 3, is located at side by side on the slide block 4 with feed rod 5;
Precision movement platform (nanoscale adjustment; Can adopt one dimension, two dimension or three-dimensional type, present embodiment adopts three-dimensional type), constitute by PZT driver 12, the bottom is fixedly mounted on initial adjustment motion platform free end, and promptly an end is fixed in the slide block 4, and the top is provided with the sample stage 11 that is used for placing sample 10;
Feedback control unit is made of laser instrument 7, photoelectric sensor 8, probe 9 and driving governor, and probe 9 is positioned at sample 10 tops, on laser optical path, and the reflector laser of its generation is to photoelectric sensor 8; The installation site of photoelectric sensor 8 is on the position light path that can receive by probe 9 flares;
Driving governor 14, respectively be installed in substructure member on photoelectric sensor 8 be electrically connected; And can communicate by letter with PZT driver 12 with stepper motor 1, by output encoder/voltage signal control step motor 1 and PZT driver 12;
Wherein driving governor 14 is a core with the single-chip microcomputer, has serial communication and pre-programmed ability, can with host computer communication switch system state and control parameter information, and can carry out data, state (as reference quantity such as whether putting in place) and graphic presentation by host computer.
Its middle probe is: at one end most advanced and sophisticated processing one needle point (Tip) of going up of Gu Ding semi-girder (Cantilever) freedom constitutes and can make time spent generation deformed configurations (existing product) in atomic force.When beam of laser (Laser Beam) but when being radiated on this semi-girder this laser beam design reflectivity on photoelectric sensor (Photodetector).When needle point and sample surfaces distance is very near (＜several-tens nanometers), the microcosmic acting force that needle point is subjected to will cause the semi-girder distortion, thereby causes that laser penetrates the variation of facula position on photoelectric sensor, obtains semi-girder stress deformation signal.Photoelectric sensor facula position variable signal has two kinds of interpretive modes: the one, the sample topography of nanoscale is described, and the 2nd, the signal interpretation of probe stress and deformation is become the size and Orientation of operating physical force, the motion of probe and direction during in order to control operation.(wherein: 6 is laser, and 91 is probe tip, and 92 is that (probe tip is installed in this semi-girder one end to semi-girder as shown in Figure 5 with principle of operation in observation, the other end is to be fixed on the supporting mechanism), 16 is the probe scanning path, 17 needle points for amplification, 18 sample surfaces for amplification).
Referring to Fig. 3, nondestructive approach method of the present invention is as follows:
Carry out micron-sized initial adjustment campaign and nano level precise motion by the control sample with respect to probe, the FEEDBACK CONTROL step of the position variation signal of reflected laser light spot after testing, approach probe by test sample and produce atomic force and make the Photoelectric Detection information that the time spent produces and carry out FEEDBACK CONTROL, reach the harmless purpose of approaching probe of control sample;
Described FEEDBACK CONTROL step refers to: cantilever beam structure can produce the distortion that is caused by atomic force effect between sample and needle point, and then cause that reflector laser penetrates the variation of facula position on photoelectric sensor, this facula position change reflected probe tip and sample interval from the variation of atomic interaction power; Institute thinks realization based on atomic nano collimation and operation, sample need be approached the very near distance of distance probes last (nanoscale), and keeps or change this distance by FEEDBACK CONTROL.
Specifically:
When initially approaching, stepper motor 1 drives the initial adjustment motion platform and approaches motion to probe 9 directions, finish the initial alignment of sample (the relative probes distance of sample 11 is controlled at 1mm ± 0.01mm by being installed in initial adjustment motion platform (being slide block) upper side or top limiting photoelectric switch 13, can determine by the installation site and the precision movement platform of optoelectronic switch 13), and start laser 7 and photoelectrical position sensor 8.
Approach the direction driving voltage by progressively adding on 14 pairs of PZT drivers 12 of driving governor, detect on the photoelectrical position sensor 8 by probe 9 laser light reflected facula position variable signals, if light spot position signal produces sudden change, interpret sample 11 contact probe then, finish approximate procedure, the output mutation signal stops to approach action.
When if the driving voltage of PZT driver 12 is added to maximum rating, photoelectric sensor 8 does not still have the output mutation signal, then cancels the driving voltage that approaches of PZT driver 12.
Claims (9)
1. sample nondestructive approach method towards nano collimation and operation is characterized in that:
Carry out micron-sized initial adjustment campaign and nano level precise motion by the control sample with respect to probe, the FEEDBACK CONTROL step of the position variation signal of reflected laser light spot after testing, approach probe by test sample and produce atomic force and make the Photoelectric Detection information that the time spent produces and carry out FEEDBACK CONTROL, reach the harmless purpose of approaching probe of control sample; Specifically:
Make sample approach motion by driving governor control step motor-driven initial adjustment platform, and, finish initial approximation step by the signal of driving governor reception from photoelectric limit switch to probe direction; Approach the direction driving voltage by driving governor to progressively adding on the PZT driver again, detect the laser spot position variable signal on the photoelectrical position sensor simultaneously by probe reflection, if light spot position signal produces sudden change, interpret sample contact probe then, stop to approach, finish approximate procedure; When if the driving voltage of PZT driver is added to maximum rating, photoelectric sensor does not still have the output mutation signal, then cancels the driving voltage that approaches of PZT driver; Control step motor-driven initial adjustment platform stepping again drives PZT by aforementioned manner again and approaches, till photoelectric sensor produces jump signal.
2. by the described sample nondestructive approach method towards nano collimation and operation of claim 1, it is characterized in that: the stepping yardstick of control step motor-driven initial adjustment platform is controlled in the specified maximum elongation amount of PZT driver.
3. by the described sample nondestructive approach method of claim 1 towards nano collimation and operation, it is characterized in that: the FEEDBACK CONTROL step is specially: the distortion that is caused by atomic force effect between sample and probe tip that cantilever beam structure on the detector probe produces, and then cause that reflector laser penetrates the variation of facula position on photoelectric sensor, realize the FEEDBACK CONTROL of approaching of sample and probe.
4. by the described sample nondestructive approach method of claim 3 towards nano collimation and operation, it is characterized in that: explain that the signal that described facula position changes has two modes: the one, the sample topography of description nanoscale, the 2nd, the signal interpretation of probe stress and deformation is become the size and Orientation of operating physical force, the motion of probe and direction during in order to control operation.
5. by the described sample nondestructive approach method towards nano collimation and operation of claim 1, it is characterized in that: approaching direction is probe place direction.
6. implement device by the described sample nondestructive approach method towards nano collimation and operation of claim 1 is characterized in that comprising:
The initial adjustment motion platform is made up of stepper motor (1), reducing gear (2), motion in one dimension platform, and wherein stepper motor (1) is installed on the base, and output shaft links to each other with reducing gear (2); The terminal motion in one dimension platform that connects of reducing gear (2);
Precision movement platform is made of PZT driver (12), and the bottom is fixedly mounted on initial adjustment motion platform free end, and promptly an end is fixed in the motion in one dimension platform, and the top is provided with the sample stage (11) that is used for placing sample (10);
Feedback control unit is made of laser instrument (7), photoelectric sensor (8), probe (9) and driving governor, and probe (9) is positioned at sample (10) top, on laser optical path, and the reflector laser of its generation is to photoelectric sensor (8); The installation site of photoelectric sensor (8) is on the light path position that can receive by probe (9) reflection lasering beam;
Driving governor (14), respectively be installed in substructure member on photoelectric sensor (8) be electrically connected; And with stepper motor (1) and PZT driver (12) communication, by output encoder/voltage signal control step motor (1) and PZT driver (12);
Photoelectric limit switch (13) is fixed on base side wall and the motion in one dimension platform, and its measuring point is positioned at slide block (4) one sides;
Driving governor (14) is a core with the single-chip microcomputer, has serial communication and pre-programmed ability, with host computer communication switch system state and control parameter information.
7. by the described implement device of claim 6, it is characterized in that: described probe is: at one end install a needle point on the Gu Ding semi-girder tip additional and constitute and can make time spent generation deformed configurations in atomic force.
8. by the described implement device of claim 6, it is characterized in that: described motion in one dimension platform, comprise leading screw (3), slide block (4) and feed rod (5), slide block (4) are installed on the leading screw (3), are located at side by side on the slide block (4) with feed rod (5).
9. by the described implement device of claim 6, it is characterized in that: described precision movement platform adopts one dimension, two dimension or three-dimensional type.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2006101349778A CN101206170B (en) | 2006-12-22 | 2006-12-22 | Sample nondestructive approach method and implementation device facing to nano collimation and operation |
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| CN2006101349778A CN101206170B (en) | 2006-12-22 | 2006-12-22 | Sample nondestructive approach method and implementation device facing to nano collimation and operation |
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| CN101206170A true CN101206170A (en) | 2008-06-25 |
| CN101206170B CN101206170B (en) | 2011-02-02 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102788889A (en) * | 2012-07-27 | 2012-11-21 | 中国科学院电工研究所 | Needle inserting method for atomic force microscope |
| CN104374954A (en) * | 2014-11-24 | 2015-02-25 | 苏州飞时曼精密仪器有限公司 | Probe and sample approaching device and method for scanning probe microscope |
| CN105301293A (en) * | 2015-11-27 | 2016-02-03 | 宁波英飞迈材料科技有限公司 | Sample stage |
| CN108414519A (en) * | 2018-02-11 | 2018-08-17 | 常熟理工学院 | A kind of slide cam selector selects the detection device of needle position |
| CN108445261A (en) * | 2018-03-13 | 2018-08-24 | 苏州显纳精密仪器有限公司 | A kind of microsphere lens super resolution optical scanning imaging system and its imaging method based on optical position sensitive sensors feedback |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3229914B2 (en) * | 1994-12-12 | 2001-11-19 | 日本電子株式会社 | Scanning probe microscope |
| CN1710403A (en) * | 2004-06-19 | 2005-12-21 | 鸿富锦精密工业（深圳）有限公司 | Atomic-force microscope and its operation method |
| CN1733595A (en) * | 2004-08-03 | 2006-02-15 | 华中师范大学 | Double needle nanometer structure research and development system |
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2006
- 2006-12-22 CN CN2006101349778A patent/CN101206170B/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102788889A (en) * | 2012-07-27 | 2012-11-21 | 中国科学院电工研究所 | Needle inserting method for atomic force microscope |
| CN104374954A (en) * | 2014-11-24 | 2015-02-25 | 苏州飞时曼精密仪器有限公司 | Probe and sample approaching device and method for scanning probe microscope |
| CN105301293A (en) * | 2015-11-27 | 2016-02-03 | 宁波英飞迈材料科技有限公司 | Sample stage |
| CN105301293B (en) * | 2015-11-27 | 2018-06-01 | 宁波英飞迈材料科技有限公司 | A kind of sample stage |
| CN108414519A (en) * | 2018-02-11 | 2018-08-17 | 常熟理工学院 | A kind of slide cam selector selects the detection device of needle position |
| CN108445261A (en) * | 2018-03-13 | 2018-08-24 | 苏州显纳精密仪器有限公司 | A kind of microsphere lens super resolution optical scanning imaging system and its imaging method based on optical position sensitive sensors feedback |
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