CN1733595A - Double needle nanometer structure research and development system - Google Patents
Double needle nanometer structure research and development system Download PDFInfo
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- CN1733595A CN1733595A CN 200410060680 CN200410060680A CN1733595A CN 1733595 A CN1733595 A CN 1733595A CN 200410060680 CN200410060680 CN 200410060680 CN 200410060680 A CN200410060680 A CN 200410060680A CN 1733595 A CN1733595 A CN 1733595A
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Abstract
This invention provides a development system for double-needle nano structure study, wherein, the needle is controlled by workstation to realize control of precision in inferior nano space even contact and form nano structure, and is used to force and collect signal and detect quantum effect to achieve dynamic construction online; the needle sample is made from conductor, or semi-conductor, or optical fiber or other material with tip as a bare surface comprised of small surfaces with different nano sizes and structures. The probe and or sample can be same type. The needle sample has a plurality of applications.
Description
Technical field
The present invention relates to one and can realize that the online of nanostructured constructs, and the crosspointer nanostructured that dynamic process and phenomenon, effect, performance, function, structure, mechanism and the control of nanostructured formation are studied, detected and develops is researched and developed system.
Background technology
The field emission microscopy is that human first realized the microtechnic of atomic scale resolution ratio, and forms making, modification and clean method and the microscopic analysis technology of the distinctive needle-shaped specimen of a cover.
Scanning tunnel microscopy (STM) is not only the instrument of searching surface atomic structure, and the accurate control of tip position and the detection of quantum effect are had the unique technique advantage.Though STM has developed into the family that comprises more than ten kind of scanning samples such as atomic force PSTM, but still be limited to the micro-and detection of single probe substantially to the sample surfaces shape.Still lack needle-shaped specimen is studied, do not make probe and needle-shaped specimen collaborative work in same microcell yet, utilizing the tip of specimen surface is the fact by the little surface composition with various nanostructureds and yardstick, closer to each otherly realize that with contacting the online of nanostructured dynamically constructs by them, and formation nanostructured detected, researches and develops, the thinking that the instrument (probe) of research and research object (sample) are united.
Summary of the invention
Field-ion microscopy making, cleaning, modification, research needle-shaped specimen and scanning tunnel microscopy are combined the accurate control of tip position of probe and the advantage of quantum effect detection, promptly PSTM probe and field ion microscope needle-shaped specimen are combined as a whole, thereby the effect of probe and needle-shaped specimen and function are integrated, form the new technology of dynamically constructing and study nanostructured and the system that realizes this technical thought.
The purpose of this invention is to provide a kind of by two needle-shaped specimens, its position is controlled by the system works station, by the research and development requirement its needle point is sent to the spatial dimension of micron to Ya Nami, even contact, construct nanostructured, and simultaneously as the probe that applies and gather signal, detection is the various signals of feature with the quantum effect, the crosspointer nanostructured research and development system that reaches the new technology that the process of dynamically constructing and phenomenon, effect, performance, structure, mechanism and the control of nanostructured are observed, detect, researched and developed and implement research and development.
The crosspointer nanostructured research and development system that realizes purpose of the present invention is (referring to accompanying drawing 1,2), this system comprises two probes or needle-shaped specimen (below be called probe/sample) 1-1,1-2 is or/and sample, probe/sample drive system, bias voltage and excitation signal generator 8, signals collecting amplifier 9, probe/sample position to whole work system, signal takes place, apply and gather, signal is handled, the system works station 10 that coordinating and unifying control is carried out in FEEDBACK CONTROL and output, vibration isolators 5, and probe/sample microscopic observation 11, sample modification on the throne, temperature control, environment control accessory system; Its probe/sample drive system is made up of piezo-electric crystal support 2, stepper drive power supply 6, the piezo-electric crystal driving power 7 of stepper drive system 3 and installation probe/sample; Its described stepper drive system is made up of removable drive, telescopic drive device, rotary driver and the positioning track 4 of needs; The piezo-electric crystal support links to each other with stepper drive power supply 6 with piezo-electric crystal driving power 7 respectively with the stepper drive system; System works station 10 links to each other with stepper drive power supply 6, piezo-electric crystal driving power 7, signal generator 8 and signals collecting amplifier 9, signal generator with gather amplifier with needle-like/sample or/and sample link to each other; The association mode of the interrelated and whole system of each relative section is set up at system works station 10 according to the research and development requirement, under microscopic observation system 11 monitors, system works station 10 is sent instruction according to research purpose to stepper drive power supply 6 provides appointment to drive respectively to relevant step actuator, make two probes/sample tip enter the predetermined space zone, control piezo-electric crystal driving power 7 again and drive piezo-electric crystal supports 2 and two probes/sample point is progressively approached reach predetermined distance element by set angle and/or orientation; System works station 10 command signal generator 8 generation bias voltage signals simultaneously puts on two sample probe/samples or/and between the sample, command signal is gathered amplifier 9 acquisition probe or/and the signal that produces between the sample, and according to detection signal piezo-electric crystal driving power 7 is sent FEEDBACK CONTROL and instruct, driving relevant three-dimensional piezo-electric crystal support 2 makes two probes/tip of specimen do relative fortune misfortune on request, continue approaching, so that contact forms nano dot structure, the scene of realization nano dot structure is dynamically constructed, and various signal records to applying and gathering, handle, show and output, implement research nanostructured, detect and exploitation.
Described needle probes/sample is by conductor, or semiconductor, or optical fiber, or magnetic material, or insulator, or composite makes, and polyhedral exposed surface of being made up of the facet with various nanoscales and structure of its tip end surface.
Described two probe/samples can be identical type, more can make of different materials as required.
Described needle-shaped specimen can be simultaneously as scan-probe, research object or the nano dot structure of research or the part of device.
The function that described two probe/samples are born can be identical, also can be different, or compound.
Described two probe/samples can original position be modified and modification.
Described microscopic system can submicron resolution monitors the working condition of two probes/sample.
The survey region of two probe/samples of this platform can be controlled to the small scale spatial dimension of micron, sub-micron, nanometer, so that progressively approach contact.
Described needle probes/sample drive system can be that two probe/samples one of them or two have piezo-electric crystal simultaneously or/and all or part of stepper drive system.
Described signal generator can produce machinery or electricity, magnetic, light, heat, quantum, particle and mixed activation, and is applied to certain position of probe/sample by specific mode.
Described research and development system can be applicable to the scene of nanostructured and dynamically constructs, and process, phenomenon, effect, performance, the structure and mechanism dynamically constructed are observed, detect, studied, and its function and control are developed.
Described nanostructured comprises the nanostructured in the gap between controlled two probes/sample.
The system works station that probe/sample stepper drive system, stepper drive power supply and control drive constitutes sample stepping navigation system.The stepper drive system comprises definite probe/sample 1-1, the step actuator 3 of 1-2 locus (comprising removable drive, telescopic drive device, rotation step actuator and the positioning guide rail of determining the sample position needs).Detailed process is to be required 6 pairs of relevant mobile step actuators of maneuvering platform stepper drive power supply to provide to specify to drive according to the initial position of probe/sample and research and development by system works station 10, the flexible step actuator of sample length is provided to specify to drive the sample point is arrived require the position; Driving sample spin corner step actuator in case of necessity again makes the respective sample point arrive an azimuth that requires.Above process is all finished under the supervision of microscopic observation system 11.
The formation of probe/sample piezo-electric crystal drive system comprises the three-dimensional piezo-electric crystal support 2 of fixed sample, piezo-electric crystal driving power 7, signal generator 8, the system works station 10 of signals collecting amplifier 9 and control sample exact position.X and Y-axis that command signal generator 8 generation bias voltages in system works station put on the piezo-electric crystal support make the most advanced and sophisticated aligning mutually of two probes/sample, piezo-electric crystal support Z direction is applied certain bias voltage makes two probes approaching, command signal is gathered the tunnel current that amplifier 9 is gathered between two samples/probe simultaneously, and with the research requirement piezo-electric crystal driving power 7 is sent FEEDBACK CONTROL according to the signal of gathering and instruct, adjusting is to the relevant voltage that axially applies of piezo-electric crystal, make probe/sample tip enter predetermined survey region and distance with the smart granularity of Ya Nami, collaborative work reaches the requirement of research and development.
To described probe/sample or by them research object is applied power, heat, electricity, magnetic, light, quantum, the particle that is produced by signal generator 8 and mixes various effects.
Described probe/sample is excited, detect the various signals of gathering various quantum such as exciting the mechanics that produced, heat, light, electricity, magnetic or structural change effect via gathering amplifier 9, and give the system works station and handle, carry out FEEDBACK CONTROL and study.
Crosspointer nanostructured research and development of the present invention system can be used for dynamically or static state is constructed nanostructured, and the process that nanostructured or device are constructed and phenomenon, effect, performance, structure, mechanism, the usefulness of nanostructured or device observes, detects and study, and nano-device and mechanism are developed, controlled and operate.
The existing temperature control technology of utilization, vacuum technique, surface modified technology etc. can make temperature and the environment of this platform at needs---work under the varying environments such as vacuum, gas, liquid.
Description of drawings
Fig. 1 crosspointer nanostructured research and development system block diagram.
Fig. 2 probe/sample piezo-electric crystal drive system schematic diagram.
Fig. 3 two probes/sample forms the nano junction schematic diagram.
Two probe/samples of Fig. 4 and sample form the schematic diagram of three utmost point nanostructureds.
Sign expression among the figure: 1,1-1,1-2 probe/sample, 2,2-1,2-2,2-3 probe/sample and sample platform piezo-electric crystal support, 3,3-1,3-2 and 3-3 are respectively the step actuator of probe/sample and sample platform, 3-1-1 and 3-2-1 are respectively the flexible step actuator of probe/sample 1-1 and 1-2,3-1-2 and 3-2-2 are respectively the latitude step actuator of probe/sample 1-1 and 1-2,3-1-3 and 3-2-3 are respectively the longitude step actuator of probe/sample 1-1 and 1-2,3-3-1 and 3-3-2 are the step actuators of sample platform, 4,4-1,4-2,4-3 is respectively the positioning guide rail of two probes and sample platform, 5, vibration-damped table, 6, the stepper drive power supply, 7, the piezo-electric crystal driving power, 8, signal (comprising bias voltage) generation systems, 9, the signals collecting amplification system, 10, the system works station, 11, microscopic observation system, 12, sample, 13, the sample platform.
Among Fig. 1: two probe/sample 1-1,1-2, probe/sample navigation system (forming) by piezo-electric crystal driver 2, step actuator 3, positioning guide rail 4 etc., vibration isolators 5, stepper drive power supply 6, piezo-electric crystal driving power 7, signal generator 8 is gathered amplifier 9 and unified control probe/sample position, co-ordination, major parts such as the system works station 10 of command signal generation, acquisition process and FEEDBACK CONTROL and microscopic observation system 11 are formed crosspointer nanostructured research and development system.
Among Fig. 2: probe/sample 1 is fixed on the three-dimensional piezo-electric crystal support 2 of X-Y-Z.After system works station 10 makes probe/sample 1 make sample arrival require the orientation under the supervision of microscopic observation system 11 by commander's stepper drive system, instruction bracket signal generation systems 8 produces X and the Y-axis that bias voltage puts on the three-dimensional piezo-electric crystal support of sample/probe, accurately arrive the designated parties position until probe/sample point, again piezo-electric crystal support Z axle being applied certain bias voltage makes probe near target, detection signal between between two probe/samples that the amplifier 9 of command signal collection is simultaneously gathered, according to gathering signal and requiring piezo-electric crystal driving power 7 is sent the FEEDBACK CONTROL instruction, regulate respectively and be applied to sample or/and sample platform piezo-electric crystal support X, Y, the voltage of three axles of Z realizes that the inferior nano-precision of sample tip location is accurately controlled.
Among Fig. 3: along the spatial direction of the driver 3-1-3 that moves on the positioning guide rail 4 and the definite respectively probe of 3-2-3/sample 1-1 and 1-2; Probe/sample driver 3-1-1 and 3-2-1 determine the collapsing length of sample probe/sample 1-1 and 1-2 respectively; Each step actuator sends instruction by system works station 10, and control step driving power 6 provides to specify and drives, and makes each sample arrive orientation and the position that requires.
Probe/sample is fixed on piezo-electric crystal support 2-1 or/and on the 2-2, by system works station 10 control platform piezo-electric crystal driving powers 7, regulate the voltage that its X to piezo-electric crystal support 2, Y, Z three-dimensional apply respectively, control sample tip location reaches the spatial dimension of inferior nano-precision.
Probe/sample and driving navigation system thereof all are placed on the shockproof vibration-damped table 5.
" longitude " step actuator 3-1-3 of 6 pairs of two probes of system works station 10 control step driving powers/sample 1-1,1-2 is on same the straight line two probes/sample or/and 3-2-3 drives in opposite directions; Again to the flexible step actuator 3-1-1 of two probes/sample or/and 3-2-1 drives, make two tips approach to the sub-micron distance; System works station 10 commands 7 pairs two sample piezo-electric crystals of piezo-electric crystal driving power support 2-1 or/and 2-2 provides driving voltage again, command signal generation systems 8 generation bias voltages are added between two probe/samples simultaneously, command signal collection amplification system 9 is gathered the tunnel current between two probes/sample simultaneously, according to the size of detection signal and the variation of moving thereof with probe/sample, piezo-electric crystal driving power 8 is sent the FEEDBACK CONTROL instruction, make two samples point opposite approaching, so that contact forms nano junction.
Among Fig. 4: form three utmost points by two probe/samples and a sample 12 that is placed on the sample platform 13 and research and develop object.System works station 10 drives the longitude step actuator 3-1-3 of probe/sample respectively by commander's stepper drive power supply 6,3-2-3, or/and latitude step actuator 3-1-2,3-2-2, or/and flexible step actuator 3-1-1 is or/and 3-2-1, or/and sample platform step actuator 3-3-1,3-3-2, under microscopic system 11 monitors, make two sample 1-1 and 1-2 point respectively with sample platform 13 on the predetermined position of sample 12 enter sub-micron regions; System works station 10 drives probe/sample piezo-electric crystal support 2-1 respectively by piezo-electric crystal driving power 7 again, 2-2 is or/and sample platform piezo-electric crystal support 2-3, command signal generation systems 8 produces bias voltage simultaneously, make two probes/sample point produce tunnel-effect respectively with sample 12, command signal is gathered amplification system 9 acquisition probe/sample 1-1 simultaneously, tunnel current between 1-2 and the sample 12, according to detection signal piezo-electric crystal driving power 7 and signal generating system 8 are sent the FEEDBACK CONTROL instruction, make two probes/sample 1-1, predetermined position between 1-2 and the sample 12 is further approaching, even contact forms three utmost point nano junction or nanostructureds.
The specific embodiment
Fig. 1 has represented that crosspointer nanostructured research and development of the present invention system makes two probe/sample 1-1 that make of N type and P-type semiconductor respectively, and the needle point of 1-2 is approaching mutually, so that contact, forms an example of 1-dimention nano knot (referring to accompanying drawing 3).
6 pairs of probes of system works station 10 instruction step driving powers/sample 1-1, the step actuator 3-1 of 1-2 make it to be on the straight line, and two needle points approaches to the sub-micron distance under the supervision of microscopic system 11 or/and 3-2 drives; System works station 10 commands 7 pairs of sample piezo-electric crystals of piezo-electric crystal driving power support 2-1 or/and 2-2 provides driving voltage again, command signal generation systems 8 generation bias voltages are applied between two probe/samples simultaneously, command signal is gathered the tunnel current that amplification system 9 is gathered between two probes/sample, according to detecting the tunnel current size piezo-electric crystal driving power 7 and signal generating system 8 are sent the FEEDBACK CONTROL instruction, make two samples point opposite approaching, so that contact forms nano junction.By to the applying and gather, handle, write down, show and export of probe/sample signal, realize research, detection and exploitation to nanostructured.
Adopt precision stepper motor, the VEXTA stepping motor:PXC43-03AA type stepper motor that for example Japanese ORIENTAL MOTOR Co.Ltd. produces is realized the precision control to the sub-micron of probe location.
With operating distance microscope far away, the MX-10C that produces as U.S. HIROX company joins OL-350 type object lens, with the position and the course of work of submicron resolution observation sample point and sample.
1, this example is that to utilize the tip of sample be a polyhedral exposed surface with multiple nano-micro structure, two samples point opposite near so that contact form the structure of one dimension semiconductor nano junction, and study, detect and develop.
2, this example is constructed the 1-dimention nano knot by two probes/sample scene, and experience is dynamically near the overall process down to contact.Can carry out whole process control to the dynamic process that 1-dimention nano knot forms and detect, thereby realization is researched and developed this process and various effect thereof, performance, mechanism, control etc.
3, adopt other different material to make probe/sample, apply different excitation signals, for example microwave or laser, can construct the one-dimensional nano structure of difference in functionality with above-mentioned same method, and to the formed dynamic process of one-dimensional nano structure and phenomenon thereof, effect, performance, structure, mechanism, control, and it and the relation etc. of making material and forming the structure of nano junction contact-making surface are studied, are detected and develop.
Probe and sample each other when 4, the feature of institute's invention research and development system is the work of two needle points, it can realize by existing various PSTMs are carried out suitable transformation, and simplifies and drive navigation system.
Make probe/sample with superconductor, and control two probes/sample near but do not contact, and make two probes/sample enter superconducting state by temperature control system, can realize the dynamic studies of josephson effect.By research, can obtain the information of relevant high-temperature superconductor mechanism to high-temperature superconductor josephson effect etc.
Embodiment 3
Two probe/sample 1-1,1-2 can also construct three utmost point nano junction or structure and it is carried out dynamic and static research with the 3rd sample 12.Fig. 4 i.e. this example schematic.The driving location of scheme middle probe and sample is made up of separately positioning track system, stepper drive system and three parts of piezo-electric crystal drive system respectively.Sample position is determined by the position of the sample platform of placing it.In order to construct three utmost point nano junction in the scene, sample platform 13 has driver 2-1,3-3-1,3-3-2, positioning guide rail 4-3, two probe/sample 1-1,1-2 respectively have longitude positioning guide rail 4-1 and the latitude positioning guide rail 4-2 that determines its orientation, and corresponding piezo-electric crystal driver 2-1,2-2, step actuator 3-1-1,3-1-2,3-1-3 and 3-2-1,3-2-2,3-2-3.
Longitude positioning guide rail 4-1 can be a circle, and latitude positioning guide rail 4-2 can be a circular arc of slightly being longer than quarter turn.Longitude guide rail and sample latitude guide rail and are fixed by concentric requirement on same sphere, place on the vibration-damped table 5.When vertical with latitude positioning guide rail 4-2, its direction is always pointed to the center of circle of rail system in the hope of probe/sample.
The sample location adopts the stepper drive location technology to combine with the piezo-electric crystal location technology in the scheme, realizes that the Subnano-class precision of sample orientation and tip location thereof is accurately controlled:
1) scheme middle probe and sample stepper drive (the VEXTAstepping motor:PXC43-03AA type stepper motor that for example uses Japanese ORIENTAL MOTOR Co.Ltd. to produce) system comprises:
(1) each probe/sample has the accurate control of step actuator 3-n-3 (n=1, the 2) realization of definite its position on its longitude positioning guide rail to probe/sample longitude.
(2) each probe/sample has the step actuator 3-n-2 (n=1,2,3, down together) that determines its position on its latitude or positioning guide rail, realizes the accurate control to probe latitude and sample position.
(3) each probe and sample or the step actuator 3-n-1 of control its elongation and rotation angle is arranged.
(4) determine each sample step actuator 3-n by control step driving power 6 by system works station 10, provide to specify to drive, make its probe of controlling or/and sample arrives and require orientation and position.
2) sample piezo-electric crystal drive system comprises in the scheme:
(1) probe is installed or/and the three-dimensional piezo-electric crystal support 2-n of specimen holder,
(2) the piezo-electric crystal driving power 7,
(3) signal (comprising bias voltage) generation systems 8,
(4) the signals collecting amplification system 9,
(5) the system works station 10.
3) system works station 10 commander's piezo-electric crystal driving powers 7 drive each sample piezo-electric crystal support, maneuvering platform signal generating system 8 generation bias voltages put between probe/sample and the sample simultaneously, and simultaneously between maneuvering platform signals collecting amplifier 9 acquisition probe or/and the detection signal of the effect that produces between probe and the sample, require platform piezo-electric crystal driving power 7 is sent the FEEDBACK CONTROL instruction according to signal of gathering and research, regulate the voltage that sample piezo-electric crystal support X-Y-Z three-dimensional is applied respectively, the small scale spatial dimension that makes the sample point enter Subnano-class realizes sample 1-1 or/and the accurate control of the most advanced and sophisticated relative position of 1-2.
Claims (10)
1, a kind of crosspointer nanostructured is researched and developed system, it is characterized in that this system comprises following two probes or the needle-shaped specimen (1-1 that is called probe/sample, 1-2) or/and sample, probe/sample drive system, bias voltage and excitation signal generator (8), signals collecting amplifier (9), probe/sample position to whole work system, signal takes place, apply and gather, signal is handled, the system works station (10) that coordinating and unifying control is carried out in FEEDBACK CONTROL and output, vibration isolators (5), and probe/sample microscopic observation (11), sample modification on the throne, temperature control, environment control accessory system; Its probe/sample drive system is made up of piezo-electric crystal support (2), stepper drive power supply (6), the piezo-electric crystal driving power (7) of stepper drive system (3) and installation probe/sample; Its described stepper drive system is made up of removable drive, telescopic drive device, rotary driver and the positioning track (4) of needs; The piezo-electric crystal support links to each other with stepper drive power supply (6) with piezo-electric crystal driving power (7) respectively with the stepper drive system; System works station (10) links to each other with stepper drive power supply (6), piezo-electric crystal driving power (7), signal generator (8) and signals collecting amplifier (9), signal generator with gather amplifier with needle-like/sample or/and sample link to each other; The association mode of the interrelated and whole system of each relative section is set up at system works station (10) according to the research and development requirement, under microscopic observation system (11) monitors, system works station (10) is sent instruction according to research purpose to stepper drive power supply (6) provides appointment to drive respectively to relevant step actuator, make two probes/sample tip enter the predetermined space zone, control piezo-electric crystal driving power (7) again and drive piezo-electric crystal support (2) and two probes/sample point is progressively approached reach predetermined distance element by set angle and/or orientation; System works station (10) bias voltage signal of command signal generator (8) generation simultaneously puts on two sample probe/samples or/and between the sample, command signal is gathered amplifier (9) acquisition probe or/and the signal that produces between the sample, and according to detection signal piezo-electric crystal driving power (7) is sent FEEDBACK CONTROL and instruct, driving relevant three-dimensional piezo-electric crystal support (2) makes two probes/tip of specimen do relative fortune misfortune on request, continue approaching, so that contact forms nano dot structure, the scene of realization nano dot structure is dynamically constructed, and various signal records to applying and gathering, handle, show and output, implement research nanostructured, detect and exploitation.
2, research and development as claimed in claim 1 system is characterized in that its needle probes/sample by conductor, or semiconductor, or optical fiber, or magnetic material, or insulator, or composite is made.
3, research and development as claimed in claim 1 system is characterized in that polyhedral exposed surface that its probe/sample tip end surface is made up of the facet with various nanoscales and structure.
4, research and development as claimed in claim 1 system is characterized in that needle-shaped specimen is simultaneously as scan-probe, research object or the nano dot structure of research or the part of device.
5, research and development as claimed in claim 1 system is characterized in that the function that two probe/samples are born can be identical, different, or compound.
6, research and development as claimed in claim 1 system is characterized in that two probe/samples can original position modify and modification.
7, research and development as claimed in claim 1 system is characterized in that described needle probes/sample drive system can be one of them or two stepper drive navigation systems that have piezo-electric crystal and needs simultaneously of two probe/samples.
8, research and development as claimed in claim 1 system is characterized in that described signal generator can produce machinery or electricity, magnetic, light, heat, quantum, particle and mixed activation, and is applied to certain position of probe/sample by specific mode.
9, the application of the described research and development of claim 1 system, it is characterized in that the scene that can be used for nanostructured dynamically constructs, and process, phenomenon, effect, performance, the structure and mechanism dynamically constructed observed, detect, study, its function and control are developed.
10, the application of research and development as claimed in claim 9 system is characterized in that described nanostructured comprises the nanostructured in the gap between controlled two probes/sample.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101206170B (en) * | 2006-12-22 | 2011-02-02 | 中国科学院沈阳自动化研究所 | Sample nondestructive approach method and implementation device facing to nano collimation and operation |
| CN109858167A (en) * | 2019-02-13 | 2019-06-07 | 五邑大学 | A kind of three-dimensional metamaterial structure with zero Poisson's ratio |
| CN115142103A (en) * | 2022-07-01 | 2022-10-04 | 南通大学 | Micro-nano scale rapid reading and writing system and method based on glass microprobe |
-
2004
- 2004-08-03 CN CN 200410060680 patent/CN1733595A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101206170B (en) * | 2006-12-22 | 2011-02-02 | 中国科学院沈阳自动化研究所 | Sample nondestructive approach method and implementation device facing to nano collimation and operation |
| CN109858167A (en) * | 2019-02-13 | 2019-06-07 | 五邑大学 | A kind of three-dimensional metamaterial structure with zero Poisson's ratio |
| CN109858167B (en) * | 2019-02-13 | 2024-05-10 | 五邑大学 | Three-dimensional metamaterial structure with zero poisson ratio |
| CN115142103A (en) * | 2022-07-01 | 2022-10-04 | 南通大学 | Micro-nano scale rapid reading and writing system and method based on glass microprobe |
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