CN1445525A - Detector head of doublet atomic force microscope - Google Patents
Detector head of doublet atomic force microscope Download PDFInfo
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- CN1445525A CN1445525A CN03116770A CN03116770A CN1445525A CN 1445525 A CN1445525 A CN 1445525A CN 03116770 A CN03116770 A CN 03116770A CN 03116770 A CN03116770 A CN 03116770A CN 1445525 A CN1445525 A CN 1445525A
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- 239000000523 sample Substances 0.000 claims abstract description 76
- 239000000919 ceramic Substances 0.000 claims abstract description 36
- 238000001514 detection method Methods 0.000 claims description 43
- 238000012360 testing method Methods 0.000 claims description 19
- 239000013074 reference sample Substances 0.000 claims description 16
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 10
- 238000011160 research Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 239000004744 fabric Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004621 scanning probe microscopy Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 230000002459 sustained effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/06—Probe tip arrays
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- Physics & Mathematics (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
A detecting head of dual-element atomic microscope is composed of a photoelectric detecting and feed-back reference unit which consists of laser, position sensitive device, half-transmitting mirror, microcantilever probe and Z-direction piezoelectric ceramics, measuring unit, and the scan control system consisting of XY piezoelectric ceramics, sample carrier, reference specimen and the sample to be detected. Its advantages are high precision (nano and submicron in length), and wide measuring range (5 microns).
Description
Technical field
The present invention relates to a kind of atomic force microscope detection head, be used for the nanometer detection and the metering of micro-/ nano material and device, relate in particular to a kind of double base atomic force microscope detection head.
Background technology
Along with the invention of scanning tunnel microscope, in human sciences's research field, be born one be the frontier science and technology of research object with 0.1～100 nanometer length, nanosecond science and technology that Here it is.At present, a lot of countries in the world are all in the research of rising nanometer technology.Is scanning probe microscopy (SPM) technology and the nanometer detection technology of representative with scanning tunnel microscope (STM) with atomic force microscope (AFM), with unprecedented resolution is that the mankind have disclosed a visible atom, branch subworld, for important foundation has been established in the development of nanometer technology.And in SPM family, the application with AFM is more extensive again, because most of nano material is the nonconductor sample.Now, the application of AFM instrument is comparatively universal in the world, but great majority can only be used for qualitative analysis, and the use that can be used to measure the double base STM (DIU-STM) of usefulness is subject to the conductivity of sample greatly, and because of the expensive price of this quasi-instrument, strict operation requirement, and to the dependence of some crucial imported equipments and parts, the development that has restricted China's nanosecond science and technology is to a great extent popularized.We have developed double base atomic force microscope (DIU-AFM) for this reason, addressing this problem, and improve the P/C ratio of instrument as far as possible according to national conditions.In recent years, we are doing a large amount of work aspect the development of STM and AFM and the practicability.Particularly in the research of AFM, formed the characteristic of self, horizontal, liquid phase and double base atomic force microscope have successively been developed, the P/C ratio of instrument has remarkable advantages, be used widely in fields such as the physics of scientific research institutions, chemistry, materialogy, biology, microelectronics, micromachine and optoelectronics at home, is development and universal the contributing that promotes China's nanometer technology.
Summary of the invention
The purpose of this invention is to provide a kind of double base atomic force microscope detection head.
The scanning control system that it has Photoelectric Detection that laser instrument, position sensor (PSD), semi-permeable and semi-reflecting mirror, micro-cantilever probe and Z form to piezoelectric ceramics and feedback reference unit and measuring unit and is made up of XY piezoelectric ceramics, sample stage, reference sample and testing sample.
Double base atomic force microscope detection head of the present invention has made up two Photoelectric Detection and feedback unit, and one of them is as the reference unit, and another is as measuring unit.Stationary probe respectively on the piezoelectric ceramics of the Z direction of two unit, ceramic level and the parallel sustained height that places are to reduce Abbe error.Reference sample and testing sample are fixed on the same XY scan table, utilize the faint atomic force between needle point and the sample, make micro-cantilever produce deflection, detect the size of amount of deflection by photoelectric detecting method, thereby in needle point and sample are made the process of relative scanning, obtain the 3-D nano, structure pattern on reference sample and testing sample surface.Two width of cloth figure that obtain like this have identical breadth wise dimension, and therefore, any 2 distance among the testing sample figure can the periodicity of corresponding reference sample obtains by calculating with it.The double base atomic force microscope of our design can well be eliminated scanning errors that the non-linear and lag-effect of piezoelectric ceramics brings and the influence that is not subjected to the sample electric conductivity, and maximum measurement range reaches 5 μ m.Use different reference samples, the double base atomic force microscope can be realized the length metering to the nanometer and the sub-micrometer precision of any conductivity sample, is expected to be used widely in numerous science and technology and industrial circle.
Description of drawings
Fig. 1 is the principle of work synoptic diagram of double base atomic force microscope;
Fig. 2 is the metering synoptic diagram of double base atomic force microscope;
Fig. 3 is the structural representation of I type double base atomic force microscope detection head;
Fig. 4 is the structural representation of II type double base atomic force microscope detection head.
Embodiment
The probe that the core component of atomic force microscope is made up of scanning and feedback controller and photodetector system, it directly influences the performances such as detection resolution, accuracy of detection, sweep limit and signal to noise ratio (S/N ratio) of atomic force microscope.Purpose of the present invention is to invent a kind of double base atomic force microscope detection head, makes the atomic force microscope system obtain better nanometer metering and detection performance.
As shown in Figure 1, double base atomic force microscope detection head of the present invention comprises the Photoelectric Detection be made up of to piezoelectric ceramics laser instrument, position sensor (PSD), semi-permeable and semi-reflecting mirror, micro-cantilever probe and Z and feedback reference unit 1 and measuring unit 2 and scanning control system 3 three parts of being made up of XY piezoelectric ceramics, sample stage, reference sample and testing sample.Reference unit is the same with the principle of work of measuring unit, all adopts the extremely responsive micro-cantilever of faint power as force transducer---microprobe.Micro-cantilever one end is fixed, and the other end is equipped with a pyramid shape micro needlepoint vertical with the micro-cantilever plane.When the distance between needle point and the sample is approached to a certain degree, will produce interactional atomic force between the two, promote micro-cantilever deflection.The amount of deflection of micro-cantilever is very small, can't directly detect, and needs to adopt the beam deflection method to measure indirectly.Its principle is, beam of laser is reflected after projecting the outer end of micro-cantilever, and folded light beam is received by position sensor.Obviously, the yaw displacement amount of the hot spot on the position sensor photosurface, be directly proportional with the amount of deflection of micro-cantilever, but the former has amplified 1,000 to thousands of times than the latter, the displacement after the amplification can be directly accurately measured by the size of the output photocurrent of detection position sensitive element.Because atomic size becomes certain corresponding relation with needle point-sample spacing, i.e. fluctuating with sample surfaces has corresponding relation.When sample is done transversal scanning with respect to needle point, the atomic force that acts on the needle point changes with the fluctuating of sample surfaces, the size of detection position sensitive element output photocurrent, can know the size of micro-cantilever amount of deflection (corresponding to atomic force) by inference, finally obtain the nanoscale microscopic appearance of sample surfaces.
Sample is realized by X and Y-axis piezoelectric ceramics with respect to the transversal scanning of needle point.When applying generating positive and negative voltage on the electrode at piezoelectric ceramics, piezoelectric ceramics will axially stretch.Scanning voltage signal by the computing machine generation with certain frequency, amplitude and waveform, through computer interface output, and after the XY sweep circuit amplifies, be applied on X and the Y-axis piezoelectric ceramics, make piezoelectric ceramics make stretching motion, thereby make sample laterally do scanning motion with sample stage.
On the other hand, also need to maintain a certain distance to (horizontal direction among the figure) at Z between needle point and the sample.When distance is too far away, there is not the atomic force effect between needle point and the sample; When distance was too near, needle point may be fractureed.Adopted Z to make and kept suitable distance between needle point and the sample to feedback control circuit.Z adjusts the voltage swing that is applied on the Z axial compression electroceramics to the size of feedback control circuit according to the micro-cantilever amount of deflection.When needle point and sample interval when far away, apply positive voltage and make this piezoelectric ceramics elongation, promptly allow sample suitably near needle point, otherwise piezoelectric ceramics shunk, thereby all the time needle point and sample are controlled at suitable distance.
As shown in Figure 2, the photo-signal (corresponding to the surface topography information of sample) of position sensor output, after the processing and amplifying through input and treatment circuit, be input to computing machine, draw out the three-dimensional micro-morphology of sample surfaces thus by computer interface.Two width of cloth figure that obtain like this have identical breadth wise dimension, and therefore, the distance among the testing sample figure between any 2 a, the b (Fig. 2 (b)) can the periodicity of corresponding reference sample obtains (Fig. 2 (a)) by calculating with it.
As shown in Figure 3, the Photoelectric Detection formed to piezoelectric ceramics by laser instrument, position sensor (PSD), semi-permeable and semi-reflecting mirror, micro-cantilever probe and Z of double base detection head and feedback reference unit 1 and measuring unit 2 and form by scanning control system 3 three parts that XY piezoelectric ceramics, sample stage, reference sample and testing sample are formed.Photoelectric Detection and feedback reference unit 1 comprise mobile platform 4, laser instrument 5, and position sensor 6, semi-permeable and semi-reflecting mirror 7 contains needle point micro-cantilever 8, probe base 9, fixed block 10 and Z are to piezoelectric ceramics 11.Photoelectric Detection and feedback test unit 2 comprise mobile platform 12 equally, laser instrument 13, and position sensor 14, semi-permeable and semi-reflecting mirror 15 contains needle point micro-cantilever 16, probe base 17, fixed block 18 and Z are to piezoelectric ceramics 19.More than these components and parts be fixedly mounted on respectively on two mobile platforms.Scanning control system 3 comprises X-axis piezoelectric ceramics 20, Y-axis piezoelectric ceramics 21, sample stage 22, reference sample 23 and testing sample 24.The two is orthogonal for X, Y-axis piezoelectric ceramics, and their end is all bonding with sample stage, and the other end is fixing respectively, and reference sample and testing sample are adhesively fixed on sample stage.Laser instrument emitted laser bundle projects on the photosurface of position sensor after the reflection of the outer end of micro-cantilever, one of position sensor output and the corresponding photo-signal in the position of flare on photosurface.Regulate mobile platform 4,12 Photoelectric Detection and feedback unit 1,2 are moved to scanning control system 3, micro-cantilever and needle point are approached to sample surfaces.When micro-cantilever and needle point when sample surfaces approaches certain distance, will produce faint atomic force (along horizontal direction among Fig. 3) between the two, promote micro-cantilever and do micro-deflection.Because the optical path length (about 7.5 centimetres) from micro-cantilever to the position sensitive element is far longer than the length (100 μ m or 200 μ m) of micro-cantilever, according to lever principle, facula deviation amount on the photosurface of position sensor will be thousands of times of micro-cantilever amount of deflection, therefore can detect considerable output photocurrent variations.Make stretching motion when controlling X and Y-axis piezoelectric ceramics, when promptly controlling sample and doing the XY scanning motion with respect to needle point, the output photocurrent size of position sensor changes with the fluctuating of sample surfaces, utilize the variation of input shown in Figure 1 and treatment circuit detection record photocurrent, can draw out the 3-D nano, structure pattern on reference sample surface and testing sample surface by computer system respectively.Because of two width of cloth figure have identical breadth wise dimension, therefore, the distance among the testing sample figure between any 2 can the periodicity of corresponding reference sample obtains by calculating with it, thereby reaches the purpose of nanometer metering.
The I type double base detection head of atomic force microscope, scanning monitor and Photoelectric Detection and feedback system are designed to horizontal type structure, make the atomic force direction vertical with the gravity direction of micro-cantilever and needle point, thereby avoided the phase mutual interference between two kinds of faint power, improved atomic functioning efficiency and precision.Simultaneously, in this type detection head, difference stationary probe on the piezoelectric ceramics of the Z direction of two unit, two ceramic levels also place sustained height abreast, Abbe error is little, and cantilever and needle point, photodetector system etc. are presented in the operator at the moment in horizontal mode, the operation that is easy to pop one's head in, particularly being easy to needle point---therefore the monitoring of sample interval has better operability.
As shown in Figure 4, Photoelectric Detection and feedback reference unit 1 comprise mobile platform 4, laser instrument 5, and position sensor 6, semi-permeable and semi-reflecting mirror 7 contains needle point micro-cantilever 8, probe base 9, fixed block 10 and Z are to piezoelectric ceramics 11.Photoelectric Detection and feedback test unit 2 comprise mobile platform 12 equally, laser instrument 13, and position sensor 14, semi-permeable and semi-reflecting mirror 15 contains needle point micro-cantilever 16, probe base 17, fixed block 18 and Z are to piezoelectric ceramics 19.Scanning monitor 3 is by tubular piezo-electric pottery 25, fixed block 26, and pedestal 27, sample stage 22, reference sample 23 and testing sample 24 are formed.Tubular piezo-electric pottery outside surface and inside surface all are coated with metal electrode, and outside surface is evenly divided into the quartern along its length, and each is divided into an electrode, is followed successively by X
+, Y
+, X
-, Y
-Electrode.At X
+And X
-Apply positive voltage and negative voltage on the electrode respectively, can make sample do scanning motion along the X-axis positive dirction, otherwise, at X
+And X
-Apply negative voltage and positive voltage on the electrode respectively, then make sample do scanning motion along the X-axis negative direction; Equally, at Y
+And Y
-Apply positive voltage and negative voltage on the electrode respectively, can make sample do scanning motion, otherwise then make sample do scanning motion along the Y-axis negative direction along the Y-axis positive dirction.The II type double base detection head of atomic force microscope shown in Figure 3, its principle of work is identical with I type double base detection head, realizes that just the piezoelectric ceramics of XY scanning adopts the tubular piezo-electric pottery.The horizontal detection head of II type also possesses the principal feature of I type double base detection head, and, owing to adopted the tubular piezo-electric pottery, make the scanning monitor structure more succinct, be easy to the detection head miniaturization.
Claims (5)
1. double base atomic force microscope detection head is characterized in that the scanning control system (3) that it has Photoelectric Detection that laser instrument, position sensor (PSD), semi-permeable and semi-reflecting mirror, micro-cantilever probe and Z form to piezoelectric ceramics and feedback reference unit (1) and measuring unit (2) and is made up of XY piezoelectric ceramics, sample stage, reference sample and testing sample.
2. a kind of double base atomic force microscope detection head according to claim 1 is characterized in that said Photoelectric Detection and feedback reference unit (1) have mobile platform (4), laser instrument (5), position sensor (6), semi-permeable and semi-reflecting mirror (7), contain needle point micro-cantilever (8), probe base (9), fixed block (10) and Z to piezoelectric ceramics (11).
3. a kind of double base atomic force microscope detection head according to claim 1 is characterized in that said Photoelectric Detection and feedback test unit (2) have mobile platform (12), laser instrument (13), position sensor (14), semi-permeable and semi-reflecting mirror (15), contain needle point micro-cantilever (16), probe base (17), fixed block (18) and Z to piezoelectric ceramics (19).
4. a kind of double base atomic force microscope detection head according to claim 1, it is characterized in that said scanning control system (3) has X-axis piezoelectric ceramics (20), Y-axis piezoelectric ceramics (21), sample stage (22), reference sample (23) and testing sample (24), the two is orthogonal for X, Y-axis piezoelectric ceramics, their end is all bonding with sample stage, the other end is fixing respectively, and reference sample and testing sample are adhesively fixed on sample stage.
5. a kind of double base atomic force microscope detection head according to claim 1, it is characterized in that said scanning control system (3) have tubular piezo-electric pottery (25), fixed block (26), pedestal (27), sample stage (22),, reference sample (23) and testing sample (24).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031167705A CN1187597C (en) | 2003-04-29 | 2003-04-29 | Detector head of doublet atomic force microscope |
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| CNB031167705A CN1187597C (en) | 2003-04-29 | 2003-04-29 | Detector head of doublet atomic force microscope |
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| CN1445525A true CN1445525A (en) | 2003-10-01 |
| CN1187597C CN1187597C (en) | 2005-02-02 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1322322C (en) * | 2004-12-02 | 2007-06-20 | 中国科学院上海光学精密机械研究所 | Quantum coherent micro-detection device |
| CN100552828C (en) * | 2007-12-10 | 2009-10-21 | 中国科学技术大学 | Comprehensive cancellation temperature drift resistance scanning probe microscope probe and manufacturing method thereof |
| CN102707094A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and device for detecting atomic force microscopic scanning of tri-scanner atomic |
| CN102707093A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and system for double-tube scanner linkage tracking type atomic force microscopic detection |
| CN102721833A (en) * | 2012-06-12 | 2012-10-10 | 浙江大学 | Atomic force microscope imaging method and device of microscopic monitoring type selectable region |
| CN103395058A (en) * | 2013-07-12 | 2013-11-20 | 兰州大学 | Nanometer robot control device |
| CN113125808A (en) * | 2020-01-10 | 2021-07-16 | 精浚科技股份有限公司 | Focusing atomic force microscope |
-
2003
- 2003-04-29 CN CNB031167705A patent/CN1187597C/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1322322C (en) * | 2004-12-02 | 2007-06-20 | 中国科学院上海光学精密机械研究所 | Quantum coherent micro-detection device |
| CN100552828C (en) * | 2007-12-10 | 2009-10-21 | 中国科学技术大学 | Comprehensive cancellation temperature drift resistance scanning probe microscope probe and manufacturing method thereof |
| CN102707094A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and device for detecting atomic force microscopic scanning of tri-scanner atomic |
| CN102707093A (en) * | 2012-06-12 | 2012-10-03 | 浙江大学 | Method and system for double-tube scanner linkage tracking type atomic force microscopic detection |
| CN102721833A (en) * | 2012-06-12 | 2012-10-10 | 浙江大学 | Atomic force microscope imaging method and device of microscopic monitoring type selectable region |
| CN102707093B (en) * | 2012-06-12 | 2013-12-04 | 浙江大学 | Method and system for double-tube scanner linkage tracking type atomic force microscopic detection |
| CN102707094B (en) * | 2012-06-12 | 2014-05-21 | 浙江大学 | Method and device for detecting atomic force microscopic scanning of tri-scanner atomic |
| CN103395058A (en) * | 2013-07-12 | 2013-11-20 | 兰州大学 | Nanometer robot control device |
| CN103395058B (en) * | 2013-07-12 | 2016-04-20 | 兰州大学 | A kind of Nanometer robot control device |
| CN113125808A (en) * | 2020-01-10 | 2021-07-16 | 精浚科技股份有限公司 | Focusing atomic force microscope |
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| Publication number | Publication date |
|---|---|
| CN1187597C (en) | 2005-02-02 |
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