CN101799482A - Nano operating device with near-field optical tweezers and AFM probe - Google Patents
Nano operating device with near-field optical tweezers and AFM probe Download PDFInfo
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Abstract
The invention discloses a nano operating device with a pair of near-field optical tweezers and an AFM probe. The nano operating device comprises a microoperation microscope and a pair of optical-fiber probe type near-field optical tweezers. After the pair of optical-fiber probe type near-field optical tweezers is led into a sample chamber through a microoperation microscope sample chamber and an outside interface, the particles of the sample is subjected to the nano operation by using the coupling force effect generated by compounding. Integrating the advantages of both the laser near-field optical tweezers and the AFM system, the nano operating device can ensure that devices can be coupled and connected more easily, the system can be operated efficiently and flexibly and compounded easily to have higher resolution ratio and higher reliability, and the nano particles can be effectively caught for characteristic study. The nano operating device is a higher-precision operating tool used in the field of the nanotechnology.
Description
Technical field
The present invention relates to a kind of nano-manipulation device that utilizes optical instrument, the nano operating device of particularly a kind of near-field optical tweezers and AFM probe.
Background technology
In recent years, an important trend of natural science and engineering development is to stride forward towards microminiaturization, and corresponding is that the operative technique on the micro-nano-scale becomes more and more important therewith.In the research of biological field, when using the microscopic examination biological sample, because variation of temperature cell or molecule can be jumped out the microscopical visual field, the operator must regulate microscope continually to correct the visual field, if but adopt the light tweezer to fix biological sample, it will vise biological cell or molecule, make operator observation of cell and molecule better, thereby reduce the influence that environmental change brings, make observed result more reliable.In the research of nano particle, people also fix and mobile nano particle with the light tweezer, and two nano particles near to observe intergranular interaction process, are perhaps made nano particle arrangement on the function to constitute new nano-device.
The light tweezer is as a kind of important micro-nano operative technique, utilizes the momentum of light to change contactless, the not damaged of realizing particulate and catches and operate, and obtained in fields such as biology and Surface Sciences using widely.It utilizes large-numerical aperture micro objective to form strong convergent beam, laser is coupled to when carrying out particle manipulating in the microscope optical system by additional optical accessories, it is motionless that sample keeps under the catching of ligh trap, drives the relative motion that sample cell is realized particulate by mobile article carrying platform.This conventional light tweezer instrument is bulky, cost an arm and a leg, the sample one-movement-freedom-degree is little, and the restriction of operating distance makes it be difficult to the particulate that operation is positioned at narrow location, also be difficult for to realize the multiple light forceps operation, the drawbacks limit that these are intrinsic the application of conventional light tweezer as the biomone micro manipulator tool.Utilize optical fibre microlens to form the characteristic of optics potential well, people replace microcobjective to form convergent beam the optical fiber optical optical tweezers system that induces one, catch and draw the motion of particle movement replacement sample cell simultaneously, the degree of freedom and the flexibility ratio of operation have been improved greatly, but also there are some shortcomings in optical fiber optical tweezers, such as the dark human sample of optical fiber pond sometimes sample cell is disturbed, also there is influence in the surface tension of liquid to moving of optical fiber.
Conventional light tweezer and optical fiber optical tweezers all belong to far field light tweezer, and the particle size that far field light tweezer can be caught is relevant with the formed waist size of convergent beam.The waist size is more little, and the particle size that can catch is also more little, but is subjected to the restriction of optical diffraction limit, and far field light tweezer all can not be caught littler particulate.The near-field optical tweezers that latest developments are got up is broken through diffraction limit, and the local that utilizes near the evanescent field of probe pinpoint to form strengthens the strong gradient force of place generation and catches nanoparticle, might realize tens nanometers catching to several nanoparticles.Be in nano particle in the inhomogeneous light field except that being subjected to the gradient force effect, also be subjected to the influence of external interference power (as gravity and Brownian movement power), the gradient force that forms when probe pinpoint outgoing light field is during greater than external interference power, to the active gradient force of nanoparticle with particle capture near the light intensity limit, form the ligh trap that produces by the optical gradient field at the needle point place.This method is more flexible than traditional light tweezer, increased the opereating specification of particle in the dark human sample of the optical fiber probe pond, performance accuracy also is developed to nanoscale from micron order, but this method also only limits to theoretic numerical simulation at present, the logical optical efficiency that field optical fibre probe is extremely low has hindered its development, it is very difficult that evanescent field on the weak side causes near-field optical tweezers to be caught in liquid, more is difficult to operate selectively in vacuum or air nano particle.In addition, near-field optical tweezers mainly is at present to change by the power of measuring scattered light to judge whether particle is hunted down to the observation and the location of single nanoparticle, this method often can only be judged the situation of a group nano particle, and is not suitable for single nano particle is observed and located.Because can't Direct observation, seek and direct location nano particle difficulty relatively just, therefore want to realize the operation of near-field optical tweezers, accurate surveying and orientation problem that just must the single nano particle of solution to single nano particle.
Along with the development of science and technology near-field optical tweezers certainly will combine with other means of testing, so that more fully carry out nano-manipulation.For realizing the stable operation of nanoparticle, optical fiber probe type near-field optical tweezers must obtain enough strong gradient force overcoming external interference power (as gravity and Brownian movement power) by the external world is auxiliary, and the most advanced and sophisticated near field enhancement effect of utilizing evanescent field illumination metal probe to cause can overcome that its evanescent field is on the weak side, the hypodynamic problem of gradient.In the nano-manipulation method, the microoperation that constitutes by AFM with the integrated picture of microscope, force feedback and functipnal capability in one, this system can carry out mechanically actuated to the nanometer object on the plane, also can be used for biological object is operated, but single probe can only be finished the simple two-dimensional operation, can not implement to grasp and carry out correlative study to object, more complicated task still fails to solve as pick up and putting etc., has greatly limited its flexible working ability.
Summary of the invention
The object of the present invention is to provide a kind of rational in infrastructure, integrated laser near-field optical tweezers and AFM probe operation be the nanometer operating system of advantage separately, make this system not only have sufficiently high resolution but also can realize the Efficient and Flexible operation, can carry out effectively, catch accurately and operate nanoparticle.According to the difference that nano-manipulation requires, can realize more complicated nano-manipulation after in time changing and make up corresponding component, meticulous structural change can be reached and dynamic operation and functional study can be realized again.
The object of the present invention is achieved like this: the nano operating device of a kind of near-field optical tweezers and AFM probe comprises optical fiber probe type near-field optical tweezers, microoperation microscope.Described optical fiber probe type near-field optical tweezers includes laser instrument, half-wave plate, light beam shunt, light beam shunt, emission luminous power detection Joulemeter, object lens and fiber coupler, laser instrument and uses optical fiber, three-dimensional platform and the spacing controller adjusted of XYZ.Wherein, described laser instrument is the He-Ne continuous wave laser; Input to the light beam shunt after the described half-wave plate filtering; Described light beam shunt links to each other with described light beam shunt output terminal, and the one output terminal is connected to the emission luminous power and detects Joulemeter, and its two output terminal is connected with fiber coupler with described object lens; The output terminal of described object lens and fiber coupler uses optical fiber to be connected with described laser instrument; Described laser instrument uses optical fiber to be connected to the three-dimensional platform of adjusting of described XYZ, introduces microoperation by described spacing controller and uses the microscope example chamber.Described microoperation comprises main frame, control circuit, piezoelectric ceramic scanatron, sample chamber, probe, semiconductor laser and the four-quadrant position detector of being with display with microscope.Wherein, described main frame contains information Control acquisition module, operation pattern process module, operation image analysis module, nano particle statistical module and observes display module; Described control circuit comprise the stressed variable signal of needle point data acquisition system (DAS), make sample carry out the driver circuit for piezoelectric ceramics, the feedback control system of needle point stressed variation of XY, comprising signal amplification, comparator circuit, gain amplifying circuit and integrating circuit etc., Z axial compression electroceramics driving circuit to scanning; Described piezoelectric ceramic scanatron is connected with described sample chamber; Described probe comprises semi-girder and needle point, and semi-girder is made by the micro-force spring sheet, and needle point is made by tungsten, silicon, silver, gold, platinum etc.; Described semiconductor laser sends the laser radiation micro-cantilever back side, and reflector laser produces the skew back and detected by described four-quadrant position detector.
Purpose of the present invention can also reach by following measure: adopt the semiconductor laser irradiation micro-cantilever back side, side-play amount by the generation of four-quadrant position detector detection of reflected laser, control needle point Z to moving through stressed variation feedback system of needle point and Z axial compression electroceramics drive system, make needle point make XY to scanning by driver circuit for piezoelectric ceramics.With half-wave plate, light beam shunt and light beam shunt laser is carried out shunt, utilize object lens and fiber coupler that the shunt laser coupled is advanced optical fiber, the three-dimensional platform of adjusting of the feedback information control XYZ that relies on the spacing controller to produce drives optical fiber probe moving that XYZ makes progress, control the sample chamber of laying nanoparticle by XYZ to the micrometric displacement piezoelectric ceramic scanatron, the bonding force effect of utilizing the compound back of optical fiber probe and afm tip to produce is carried out the nano-manipulation of sample particulate.Adopt microoperation to set sweep limit, direction of scanning, acquisition speed and mode of operation, carry out image scanning and data acquisition, show and analysis operation process and result by image processing program and display system with microscopical microcomputer signal processing system.
The nano operating device of above-mentioned near-field optical tweezers and AFM probe, comprise the microoperation microscope, optical fiber probe type near-field optical tweezers, it is characterized in that: with microscope example chamber and outside interface optical fiber probe type near-field optical tweezers is introduced the sample chamber through microoperation, by the three-dimensional platform of adjusting of XYZ the angle that the latent loss of gloss of optical fiber probe outgoing is incident to afm tip is proofreaied and correct adjustment, by computer program control piezoelectric ceramic scanatron the sample chamber is moved on plane X axle and Y direction, utilize microoperation the nano-manipulation process to be monitored in real time simultaneously with microscopical microcomputer signal Processing and display system.
The present invention has following advantage compared to existing technology:
1, the advantage of integrated laser near-field optical tweezers and AFM probe operation, be combined into the combined type nanometer operating system, can finish complex operations, greatly improved its flexible working ability, and can carry out precision, XYZ at a high speed to control, greatly strengthened its performance accuracy.
2, remedy that microoperation can realize the operation of small scale more with microscope but selectivity not as the shortcoming of laser near-field optical tweezers, easy to operate, technical requirement is not high, can obtain through microoperation with microscope work after more meticulous structural information, the not only meticulous structural change of tool but also can realize dynamic operation and functional study.
3, can avoid sample and the microoperation damage with the microscope device in the operating process, rational in infrastructure, operation is composited by existing nanometer operating system with control gear, and technical requirement is not high, and cost is lower, and is easy to maintenance.And can in time change and make up corresponding component according to the difference of nano-manipulation requirement, realize more complicated nano-manipulation.
Description of drawings
Fig. 1 is the structural representation of the nano operating device of near-field optical tweezers of the present invention and AFM probe: the 1-laser instrument; The 2-half-wave plate; 3-light beam shunt; 4-light beam shunt; 5-emission luminous power detects Joulemeter; 6-object lens and fiber coupler; The 7-laser instrument uses optical fiber; 8-XYZ three-dimensional manipulating platform; The main frame of 9-band display; The 10-control circuit; The 11-piezoelectric ceramic scanatron; The 12-sample chamber; The 13-probe; The 14-semiconductor laser; 15-four-quadrant position detector; 33-spacing controller;
Fig. 2 is microoperation microscope overall system theory diagram: 16-information Control acquisition module; 17-operates pattern process module; 18-operates image analysis module; 19-nano particle statistical module; 20-observes display module; The 21-data acquisition system (DAS); The 22-driver circuit for piezoelectric ceramics; The 23-feedback control system; 24-Z axial compression electroceramics driving circuit; The 31-oscillograph;
Fig. 3 is 30 ° of incident afm tip synoptic diagram: the 25-semi-girder supports; The 26-piezoelectric ceramic tube; The 27-semi-girder; The 28-needle point;
Fig. 4 is many near fields probe combined type nano-manipulation synoptic diagram: 32-adjustment mirror;
Fig. 5 is a metal-coated membrane optical fiber probe synoptic diagram: 29-aluminum metal film; 30-silicon dioxide fibre core.
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing:
With reference to shown in Figure 1, be the structural representation of the nano operating device of near-field optical tweezers of the present invention and AFM probe, it includes optical fiber probe type near-field optical tweezers and microoperation microscope.Optical fiber probe type near-field optical tweezers includes laser instrument 1, half-wave plate 2, light beam shunt 3, light beam shunt 4, emission luminous power detection Joulemeter 5, object lens and fiber coupler 6, laser instrument and uses optical fiber 7, XYZ three-dimensional manipulating platform 8 and spacing controller 33.Microoperation comprises main frame 9, control circuit 10, piezoelectric ceramic scanatron 11, sample chamber 12, probe 13, semiconductor laser 14, adjustment mirror 32 and the four-quadrant position detector 15 of being with display with microscope.Wherein, laser instrument 1 is the He-Ne continuous wave laser, via inputing to light beam shunt 3 after half-wave plate 2 filtering, light beam shunt 4 links to each other with light beam shunt 3 output terminals, the one output terminal is connected to the emission luminous power and detects Joulemeter 5, and its two output terminal is connected with fiber coupler 6 with object lens.The output terminal of object lens and fiber coupler 6 and laser instrument use optical fiber 7 to be connected, after laser instrument is used optical fiber 7 to be connected to that XYZ is three-dimensional to adjust platform 8, introduce microoperations by spacing controller 33 and use microscope example chamber 12.Wherein, main frame 9 contains information Control acquisition module, operation pattern process module, operation image analysis module, nano particle statistical module and observes display module, control circuit 10 comprise the stressed variable signal of needle point data acquisition system (DAS), make sample carry out the driver circuit for piezoelectric ceramics, the feedback control system of needle point stressed variation of XY, comprising signal amplification, comparator circuit, gain amplifying circuit and integrating circuit etc., Z axial compression electroceramics driving circuit to scanning.Piezoelectric ceramic scanatron 11 is connected with sample chamber 12, and control sample chamber 12 makes it make two dimension in the XY plane and moves.With reference to Fig. 4, the laser that semiconductor laser 14 sends is after adjustment mirror 32 exposes to the micro-cantilever back side, and skew that reflector laser produces is detected by four-quadrant position detector 15.In needle point 28-semi-girder 27 stress deformation measuring systems, semiconductor laser 14 gives off laser beam to reflect and enters in the four-quadrant position detector 15, be converted into behind the electric signal and give feedback circuit after amplifying by prime amplifier, computing machine is converted into simulating signal with digital signal, amplifies rear drive piezoelectric ceramic scanatron 11 through high pressure and scans at two dimensional surface.AFM probe utilizes a kind of elasticity micro-cantilever 27 as sensor, and the one end is fixed, and the other end has needle point 28.Afm tip 28 minimum radius-of-curvature can improve the nano-manipulation lateral resolution, and semi-girder 27 is made by the micro-force spring sheet, and lower longitudinal elastic coefficient is improved dynamometry sensitivity, and high lateral stiffness then can be avoided the lateral deformation of cantilever.
With reference to Fig. 2, Fig. 3 and Fig. 5, microoperation contains information Control acquisition module 16, operation pattern process module 17, operation image analysis module 18, nano particle statistical module 19 and observes display module 20 with microscopical main frame; Control circuit comprise the stressed variable signal of needle point data acquisition system (DAS) 21, make sample carry out the driver circuit for piezoelectric ceramics 22, the feedback control system 23 of needle point stressed variation of XY, comprising signal amplification, comparator circuit, gain amplifying circuit and integrating circuit etc., Z axial compression electroceramics driving circuit 24 and oscillograph 31 to scanning; Probe comprises semi-girder support 25, piezoelectric ceramic tube 26, semi-girder 27 and needle point 28; Optical fiber probe is made up of aluminum metal film 29 and silicon dioxide fibre core 30.Microoperation also possesses microcomputer signal Processing and display system with microscope, comprises that control, collection and the processing of sample operation image scanning and data acquisition, power related function and result's image show.
From above-mentioned embodiment of the present invention as can be known, optical device of the present invention adopts full fiberize device, changed traditional optical optical tweezers system because of coupling between each device that adopts complicated Free Space Optics device and brought with is connected comparatively complexity, it is bigger that accurate adjustment and collimation are adjusted difficulty, system reliability reduces, system operation with safeguard comparatively shortcoming such as trouble, make between each optical device coupling be connected comparatively simple, system is easy to compoundization, also strengthened simultaneously the reliability of system, in addition, optical fiber probe type near-field optical tweezers in the nano operating device disclosed in this invention can not take the microscopical light inlet of microoperation, thereby the configuration of being convenient to the researchist is used.
With reference to Fig. 1, Fig. 4, the nano operating device of analyzing near-field optical tweezers of the present invention and AFM probe carries out another example of multiprobe nano-manipulation.With reference to Fig. 5, laser coupled goes into to have in the optical fiber probe of nanoscale, for preventing that light wave from leaking and guaranteeing to produce the aperture of nanoscale, need outside optical fiber probe, to aluminize metal film 29, evanescent wave through the outgoing of nanometer aperture has intensity gradient, and the gradient force of generation can be realized the operation of nanometer near-field optics.According to waveguide theory, reduce gradually with the probe aperture, various mode waves are cut off one by one, when aperture diameter is reduced to TE
11During the cut-off diameter of mould, light vector becomes imaginary number, this moment, light intensity reached maximal value, part light reflects in cut-off plane, this segment distance from the cut-off diameter to the perforation hole is because the absorption of 29 pairs of light waves of aluminum metal film significantly weakens light wave, decays rapidly with exponential form along incident direction after causing another part light to pass cut-off plane.With reference to Fig. 3, after the latent loss of gloss of optical fiber probe outgoing is with 30 ° angle directive afm tip 28, utilize the field enhancement effect of AFM probe 28 can overcome the problem that the optical fiber probe emergent power is low in the near-field optical tweezers, evanescent field is on the weak side, the bonding force effect of utilizing two compound backs of near field probe to produce can be operated nanoparticle efficiently.To the situation of AFM probe, this incident mode easily causes the damage of device to the block representation laser beam of inserting among the figure through lens focus, and when utilizing optical fiber probe irradiation afm tip, can avoid the damage of microoperation with the microscope device.
When compound many near fields probe carries out nano-manipulation, at first adopt the three-dimensional micrometric displacement system of AFM that AFM probe 28 is approached sample, single nanoparticle is accurately located, after this three-dimensional platform 8 of adjusting of the feedback information control that relies on spacing controller 33 to produce drives optical fiber probe 7, makes it approach AFM probe 28 and also distance is between the two remained on nanometer scale.Then adjust the output power of laser instrument 1, make the optical fiber probe 7 and the gradient force of the coupling enhanced field generation of AFM probe 28 be suitable for operating sample, the position of adjusting optical fiber probe 7 subsequently makes it to be convenient to realize catching.Adjust the specific nano-manipulation of AFM probe 28 realizations after successfully catching nanoparticle, adjust platform 8 by three-dimensional and can proofread and correct adjustment, to make it making same moved further with AFM probe 28 to optical fiber probe 7.In the nano-manipulation process, the needle point 28 of AFM probe maintains static, by computer program control sample chamber 12 is moved by piezoelectric ceramic scanatron 11 on plane X axle and Y direction, utilize microoperation to monitor in real time with microscopical microcomputer signal display system.When needle point 28 and sample effect, the acting force of needle point 28 and sample room causes silicon cantilever 27 distortion, cause that the position of light reflection lasering beam in detecting device 15 changes, under the effect of feedback circuit, micro-cantilever deformation compensates and then controls the Z of AFM probe 28 to moving by piezoelectric ceramic tube is flexible.
Claims (4)
1. the nano operating device of near-field optical tweezers and AFM probe, comprise optical fiber probe type near-field optical tweezers, microoperation microscope, it is characterized in that: described optical fiber probe type near-field optical tweezers includes laser instrument, half-wave plate, light beam shunt, light beam shunt, emission luminous power detection Joulemeter, object lens and fiber coupler, laser instrument and uses optical fiber, three-dimensional platform and the spacing controller adjusted of XYZ, wherein, described laser instrument is the He-Ne continuous wave laser; Input to the light beam shunt after the described half-wave plate filtering; Described light beam shunt links to each other with described light beam shunt output terminal, and the one output terminal is connected to the emission luminous power and detects Joulemeter, and its two output terminal is connected with fiber coupler with described object lens; The output terminal of described object lens and fiber coupler uses optical fiber to be connected with described laser instrument; Described laser instrument uses optical fiber to be connected to the three-dimensional platform of adjusting of described XYZ, introduce microoperation by described spacing controller and use the microscope example chamber, described microoperation comprises main frame, control circuit, piezoelectric ceramic scanatron, sample chamber, probe, semiconductor laser and the four-quadrant position detector of being with display with microscope, wherein, described main frame contains information Control acquisition module, operation pattern process module, operation image analysis module, nano particle statistical module and observes display module; Described control circuit comprise the stressed variable signal of needle point data acquisition system (DAS), make sample carry out the driver circuit for piezoelectric ceramics, the feedback control system of needle point stressed variation of XY, comprising signal amplification, comparator circuit, gain amplifying circuit and integrating circuit, Z axial compression electroceramics driving circuit to scanning; Described piezoelectric ceramic scanatron is connected with described sample chamber; Described probe comprises semi-girder and needle point, and semi-girder is made by the micro-force spring sheet; Described semiconductor laser sends the laser radiation micro-cantilever back side, and reflector laser produces the skew back and detected by described four-quadrant position detector.
2. the nano operating device of near-field optical tweezers according to claim 1 and AFM probe is characterized in that: described probe also comprises semi-girder support, piezoelectric ceramic tube; The described outer fiber metal film of aluminizing, optical fiber one end is the tapered optical fiber point that fused biconical taper and sintering form, the tapered optical fiber point has the nanoscale aperture; Described probe is the gold-plated AFM silicon of a contact probe.
3. the nano operating device of near-field optical tweezers according to claim 1 and AFM probe is characterized in that: shunt is installed in laser exit the place ahead of described continuous wave laser, and object lens and fiber coupler and fibre system are installed behind shunt; The three-dimensional adjustment of XYZ platform is installed in the back of fibre system, and optical fiber is fixed on three-dimensional the adjustment on the support, and the latent loss of gloss of optical fiber probe outgoing is incident on the afm tip under the effect of the three-dimensional adjustment of XYZ platform.
4. the nano operating device of near-field optical tweezers according to claim 1 and AFM probe, it is characterized in that: the three-dimensional platform of adjusting of described XYZ links to each other with the main frame of microoperation with microscopic system respectively by control circuit with described piezoelectric ceramic scanatron, described main frame links to each other by feedback line with data acquisition system (DAS) with computer control, and main frame is controlled described Z axial compression electroceramics driving circuit by control circuit via feedback line.
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| CN102662087B (en) * | 2012-05-11 | 2014-01-08 | 中国科学院长春应用化学研究所 | Force tracing method for atomic force microscope (AFM) |
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