CN202008492U - Imaging device with optical microscopic probe and atomic force microscopic probe - Google Patents
Imaging device with optical microscopic probe and atomic force microscopic probe Download PDFInfo
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- CN202008492U CN202008492U CN2011200183786U CN201120018378U CN202008492U CN 202008492 U CN202008492 U CN 202008492U CN 2011200183786 U CN2011200183786 U CN 2011200183786U CN 201120018378 U CN201120018378 U CN 201120018378U CN 202008492 U CN202008492 U CN 202008492U
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- 238000000879 optical micrograph Methods 0.000 claims description 44
- 238000012545 processing Methods 0.000 claims description 14
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- 238000000399 optical microscopy Methods 0.000 description 2
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Abstract
The utility model discloses an imaging device with an optical microscopic probe and an atomic force microscopic probe, which comprises the atomic force microscopic probe, the optical microscopic probe, a first slider, a second slider, an optical platform, a Y-direction stepping motor electric-control translation stage, a sample table, a sample to be tested, a first fixed block, a second fixed block, a first supporting column, a second supporting column, a supporting beam and an X-direction stepping motor electric-control translation stage. The atomic force microscopic probe and the optical microscopic probe are respectively fixed on the first slider and the second slider and are mounted on the X-direction stepping electric-control translation stage, the X-direction stepping motor electric-control translation stage is fixed on the supporting beams, and the Y-direction stepping motor translation stage, the sample stage and a support consisting of the first fixed block, the second fixed block, the first supporting column, the second supporting column and the supporting beam are sequentially mounted on an optical platform. The imaging device with the optical microscopic probe and the atomic force microscopic probe realizes large-scope real-time optical microscopic observation and observation and measurement for local high-resolution nano structure and performance simultaneously.
Description
Technical field
The utility model relates to micro-pair of probe imaging device of a kind of optical microphotograph-atomic force.Be used for sample is carried out simultaneously the observation and the measurement of the high-resolution nanostructured of large-scale real-time optical microexamination and regional area.
Background technology
An important trend of science and technology is that the mankind are extended to nanometer technology by micron technology gradually to the exploration of microworld, have promoted the progress of national economy and human society thus towards small size, high capacity, high-speed and low energy consumption direction fast development.Micro-nano technology is the core science and technology of each preferential planning and development of major country of new century, and is along with the develop rapidly of micro-nano technology, also more and more higher to the requirement of micro-nano micro measurement.Because optical microscope has the characteristics of noncontact, not damaged, detectable sample interior, all be to be unable to do without optical microscope in many scientific domains, in fact, to the biological structure of fixed sample and live body sample and the observation of process, make optical microscope become the indispensable instrument of most life sciences.But owing to be subjected to the restriction of optical wavelength and diffraction limit, the microscopical resolution of traditional far-field optics only can reach the half-wavelength order of magnitude of visible light (380～780 nm), promptly about 0.2 mm.What grow up nearly decades serves as the micro-nano detection technique of main representative with atomic force microscope (AFM), scanning tunnel microscope scanning probe microscopy (SPM) technology such as (STM), resolution is all considerably beyond optical microscope, but what they obtained is the sample image that detects and rebuild through overscanning, can't realize direct and real-time observation and Image Acquisition as the optical microscope.In order to solve these limitation, the utility model adopts the micro-two probe formation methods of a kind of optical microphotograph-atomic force, sample is carried out microexamination on a large scale in real time simultaneously, and the observation of the high-resolution micro nano structure of regional area and detection, satisfy the national demand in fields such as Chinese national economy and social development, science and technology and national defence.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, provides a kind of optical microphotograph-atomic force micro-pair of probe imaging device.
Micro-pair of probe imaging device of optical microphotograph-atomic force comprise the micro-probe of atomic force, optical microphotograph probe, first sliding shoe, the second sliding shoe, optical table, Y to stepping electronic control translation stage, sample stage, testing sample, first fixed block, the 2nd fixed block, first support column, second support column, brace summer, X to the stepping electronic control translation stage; Micro-probe of atomic force and optical microphotograph probe are separately fixed on first sliding shoe and the second sliding shoe, be installed in X then on the stepping electronic control translation stage, X is fixed on the brace summer to the stepping electronic control translation stage, Y is installed successively to stepping electronic control translation stage and sample stage on the optical table, and the bracing frame that constitutes by first fixed block, the 2nd fixed block, first support column, second support column, brace summer.
The micro-probe of atomic force comprises that a L type fixed block, a Z are to moving track, the first triangle fixed block, the micro-probe crossbeam of atomic force, single tube piezoelectric scanner, laser instrument, photodetection tube, the 3rd fixed block, the 4th fixed block, micro-cantilever probe, first lenslet, second lenslet, photodetector, prime amplifier, signal Processing and control amplification module, A/D﹠amp; D/A interface card, computing machine, image display panel; The one Z is installed successively to moving track, the first triangle fixed block, the micro-probe crossbeam of atomic force on the one L type fixed block, on the micro-probe crossbeam of atomic force single tube piezoelectric scanner, laser instrument, photodetection tube are installed successively, the 3rd fixed block, the 4th fixed block, micro-cantilever probe are installed on the single tube piezoelectric scanner successively, first lenslet is installed on the 3rd fixed block right side, second lenslet and photodetector are installed in the photodetection tube successively, photodetector connects prime amplifier, signal Processing and control amplification module, A/D﹠amp successively; D/A interface card, computing machine and image display panel, single tube piezoelectric scanner link to each other with the control amplification module with signal Processing by lead simultaneously, and the scanner control signal is produced by computing machine, passes through A/D﹠amp; The D/A interface card arrives signal Processing and control amplification module again.
Described optical microphotograph probe comprises that the 2nd L type fixed block, the 2nd Z are to moving track, second triangle fixed block, optical microphotograph probe crossbeam, optical microphotograph objective tube, object lens, catoptron, optical microphotograph eyepiece stalk, eyepiece group, CCD detecting head, image collection card, computing machine, image display panel; The 2nd Z is installed successively to moving track, second triangle fixed block and optical microphotograph probe crossbeam on the 2nd L type fixed block, optical microphotograph probe crossbeam below is installed optical microphotograph objective tube and object lens successively, optical microphotograph probe crossbeam top is installed catoptron, optical microphotograph eyepiece stalk, eyepiece group and CCD detecting head successively, the CCD detecting head links to each other with computing machine by image collection card, finally shows by image display panel.
Micro-pair of probe imaging device of optical microphotograph-atomic force of the present utility model, its advantage is simple for structure, technical conditions are easy to realize.Having overcome low, the conventional sample scan-type of single optical microscope resolution AFM can't Real Time Observation and survey sample interior and be only applicable to the limitation that detects among a small circle of small sample.Be expected to be used widely in micro-nano detection, micro-nano processing and preparing and micro-nano field such as control.
Description of drawings
Fig. 1 is micro-pair of probe imaging device of an optical microphotograph-atomic force synoptic diagram;
Fig. 2 is the cross sectional view and the work block diagram thereof of the micro-probe of atomic force;
Fig. 3 is the cross sectional view and the work block diagram thereof of optical microphotograph probe;
Among the figure: the micro-probe 1 of atomic force, optical microphotograph probe 2, first sliding shoe 3, the second sliding shoe 4, optical table 5, Y is to stepping electronic control translation stage 6, sample stage 7, testing sample 8, the 1st fixed block 9, the 2nd fixed block 10, first support column 11, second support column 12, brace summer 13, X is to stepping electronic control translation stage 14, the one L type fixed block 15, the one Z is to moving track 16, the first triangle fixed block 17, the micro-probe crossbeam 18 of atomic force, single tube piezoelectric scanner 19, laser instrument 20, photodetection tube 21, the 3rd fixed block 22, the 4th fixed block 23, micro-cantilever probe 24, first lenslet 25, second lenslet 26, photodetector 27, prime amplifier 28, signal Processing and control amplification module 29, A/D﹠amp; D/A interface card 30, computing machine 31, image display panel 32, the 2nd L type fixed block 33, the 2nd Z are to moving track 34, second triangle fixed block 35, optical microphotograph probe crossbeam 36, optical microphotograph objective tube 37, object lens 38, catoptron 39, optical microphotograph eyepiece stalk 40, eyepiece group 41, CCD detecting head 42, image collection card 43.
Embodiment
Regional area at sample when the utility model adopts the micro-two probe formation methods of optical microphotograph-atomic force that sample is carried out in real time optical microscope on a large scale carries out high-resolution micro-nano performance measurement.
As shown in Figure 1, micro-pair of probe imaging device of optical microphotograph-atomic force comprise the micro-probe 1 of atomic force, optical microphotograph probe 2, first sliding shoe 3, the second sliding shoe 4, optical table 5, Y to stepping electronic control translation stage 6, sample stage 7, testing sample the 8, the 1st fixed block the 9, the 2nd fixed block 10, first support column 11, second support column 12, brace summer 13, X to stepping electronic control translation stage 14; Micro-probe 1 of atomic force and optical microphotograph probe 2, be separately fixed on first sliding shoe 3 and the second sliding shoe 4, be installed in X then on stepping electronic control translation stage 14, X is fixed on the brace summer 13 to stepping electronic control translation stage 14, Y is installed successively to stepping electronic control translation stage 6, sample stage 7 and the bracing frame that is made of first fixed block the 9, the 2nd fixed block 10, first support column 11, second support column 12, brace summer 13 on the optical table 5.
As shown in Figure 2, the micro-probe 1 of described atomic force comprises that a L type fixed block 15, a Z are to moving track 16, the first triangle fixed block 17, the micro-probe crossbeam 18 of atomic force, single tube piezoelectric scanner 19, laser instrument 20, photodetection tube 21, the 3rd fixed block 22, the 4th fixed block 23, micro-cantilever probe 24, first lenslet 25, second lenslet 26, photodetector 27, prime amplifier 28, signal Processing and control amplification module 29, A/D﹠amp; D/A interface card 30, computing machine 31, image display panel 32; A Z is installed successively to moving track 16 on the one L type fixed block 15, the first triangle fixed block 17, the micro-probe crossbeam 18 of atomic force, on the micro-probe crossbeam 18 of atomic force single tube piezoelectric scanner 19 is installed successively, laser instrument 20, photodetection tube 21, the 3rd fixed block 22 is installed on the single tube piezoelectric scanner 19 successively, the 4th fixed block 23, micro-cantilever probe 24, first lenslet 25 is installed on the 3rd fixed block 22 right sides, second lenslet 26 and photodetector 27 are installed in the photodetection tube 21 successively, photodetector 27 connects prime amplifier 28 successively, signal Processing and control amplification module 29, A/D﹠amp; D/A interface card 30, computing machine 31 and image display panel 32, single tube piezoelectric scanner 19 link to each other with control amplification module 29 with signal Processing by lead simultaneously, and the scanner control signal is produced by computing machine 31, passes through A/D﹠amp; D/A interface card 30 arrives signal Processing and control amplification module 29 again.
As shown in Figure 3, described optical microphotograph probe 2 comprises that the 2nd L type fixed block 33, the 2nd Z are to moving track 34, second triangle fixed block 35, optical microphotograph probe crossbeam 36, optical microphotograph objective tube 37, object lens 38, catoptron 39, optical microphotograph eyepiece stalk 40, eyepiece group 41, CCD detecting head 42, image collection card 43, computing machine 31 and image display panel 32; The 2nd Z is installed successively to moving track 34, second triangle fixed block 35 and optical microphotograph probe crossbeam 36 on the 2nd L type fixed block 33, optical microphotograph probe crossbeam 36 belows are installed optical microphotograph objective tube 37 and object lens 38 successively, optical microphotograph probe crossbeam 36 tops are installed catoptron 39, optical microphotograph eyepiece stalk 40, eyepiece group 41 and CCD detecting head 42 successively, CCD detecting head 42 links to each other with computing machine 31 by image collection card 43, finally by image display panel 32 real-time display images.
The micro-two probe formation methods of optical microphotograph-atomic force are to adopt optical microphotograph and atomic force micro measurement method simultaneously, same sample are carried out the observation and the measurement of the high-resolution micro nano structure of large-scale real-time optical microexamination and regional area; Regulate the enlargement factor of the Z of optical microphotograph probe, the optical microscopy map that captures by the collection of CCD detecting head, imported computing machine through image pick-up card again to moving track and object lens, after image display panel show in real time; Under the monitoring of optical microphotograph probe, the micro-desired zone of popping one's head in of moving atomic force carries out the micro-nano detection of high-resolution simultaneously.The micro-probe of atomic force adopts sample to fix, the method of microprobe scane, introduce a lenslet that scans with scanner, its XY scanning amount of movement is the same all the time with microprobe, realize the tracking of light path, another lenslet before photodetector, realize that high-precision Z is to FEEDBACK CONTROL and high-resolution XY scanning imagery, utilize the faint atomic force between needle point and the sample, make micro-cantilever produce deflection, detect the size of amount of deflection by photoelectric detecting method, thereby in needle point and sample are made the process of relative scanning, obtain the three-dimensional high definition nanostructured pattern of sample surfaces.
The utility model adopts the optical microphotograph probe that sample is carried out optical microscope, the especially observation of the biological structure of live body sample and process on a large scale in real time.The Z of adjusting optical microphotograph probe by the collection of CCD detecting head, imports computing machine to the optical microscopy map that captures through image pick-up card, after the image display panel demonstration again to the enlargement factor of moving track and object lens.Simultaneously under the monitoring of optical microphotograph probe, the micro-desired zone of popping one's head in of moving atomic force carries out high-resolution, sweep limit micro nano structure and the performance detection at 4um * 4 um ~ 100 um * 100 um.The micro-probe of atomic force adopts sample to fix, the method of microprobe scane, introduce a lenslet that scans with scanner, its XY scanning amount of movement is the same all the time with microprobe, it is the focus place that microprobe is positioned at lenslet all the time, in (as 100 um * 100 um) scanning process in a big way, focus on the laser facula that forms by lenslet and aim at micro-cantilever all the time, thereby realized the tracking of light path effectively, another lenslet before photodetector, the systematic error of both having avoided Z to cause to feedback, the high sensitivity and the high resolving power that have kept the beam deflection method again simultaneously, thereby realize that high-precision in a big way Z is to FEEDBACK CONTROL and high-resolution XY scanning imagery, utilize the faint atomic force between needle point and the sample, make micro-cantilever produce deflection, detect the size of amount of deflection by photoelectric detecting method, thereby in needle point and sample are made the process of relative scanning, obtain the three-dimensional high definition nanostructured pattern of sample surfaces; Adopt open sample stage and X, Y stepping mobile platform, realize that micro-nano scanning is carried out on large scale, big weight sample arbitrary region surface to be detected.
Claims (3)
1. micro-pair of probe imaging device of an optical microphotograph-atomic force, it is characterized in that comprising the micro-probe of atomic force (1), optical microphotograph probe (2), first sliding shoe (3), the second sliding shoe (4), optical table (5), Y to stepping electronic control translation stage (6), sample stage (7), testing sample (8), first fixed block (9), the 2nd fixed block (10), first support column (11), second support column (12), brace summer (13), X to stepping electronic control translation stage (14); Micro-probe of atomic force (1) and optical microphotograph probe (2) are separately fixed on first sliding shoe (3) and the second sliding shoe (4), be installed in X then on stepping electronic control translation stage (14), X is fixed on the brace summer (13) to stepping electronic control translation stage (14), Y is installed successively to stepping electronic control translation stage (6) and sample stage (7) on the optical table (5), and the bracing frame that constitutes by first fixed block (9), the 2nd fixed block (10), first support column (11), second support column (12), brace summer (13).
2. micro-pair of probe imaging device of a kind of optical microphotograph-atomic force according to claim 1 is characterized in that the micro-probe of described atomic force (1) comprises a L type fixed block (15), the one Z is to moving track (16), the first triangle fixed block (17), the micro-probe crossbeam of atomic force (18), single tube piezoelectric scanner (19), laser instrument (20), photodetection tube (21), the 3rd fixed block (22), the 4th fixed block (23), micro-cantilever probe (24), first lenslet (25), second lenslet (26), photodetector (27), prime amplifier (28), signal Processing and control amplification module (29), A/D﹠amp; D/A interface card (30), computing machine (31), image display panel (32); A Z is installed successively to moving track (16) on the one L type fixed block (15), the first triangle fixed block (17), the micro-probe crossbeam of atomic force (18), single tube piezoelectric scanner (19) is installed on the micro-probe crossbeam of atomic force (18) successively, laser instrument (20), photodetection tube (21), the 3rd fixed block (22) is installed on the single tube piezoelectric scanner (19) successively, the 4th fixed block (23), micro-cantilever probe (24), first lenslet (25) is installed on the 3rd fixed block (22) right side, second lenslet (26) and photodetector (27) are installed in the photodetection tube (21) successively, photodetector (27) connects prime amplifier (28) successively, signal Processing and control amplification module (29), A/D﹠amp; D/A interface card (30), computing machine (31) and image display panel (32), single tube piezoelectric scanner (19) link to each other with control amplification module (29) with signal Processing by lead simultaneously, and the scanner control signal is produced by computing machine (31), passes through A/D﹠amp; D/A interface card (30) arrives signal Processing and control amplification module (29) again.
3. micro-pair of probe imaging device of a kind of optical microphotograph-atomic force according to claim 2 is characterized in that described optical microphotograph probe (2) comprises that the 2nd L type fixed block (33), the 2nd Z are to moving track (34), second triangle fixed block (35), optical microphotograph probe crossbeam (36), optical microphotograph objective tube (37), object lens (38), catoptron (39), optical microphotograph eyepiece stalk (40), eyepiece group (41), CCD detecting head (42), image collection card (43), computing machine (31), image display panel (32); The 2nd Z is installed successively to moving track (34), second triangle fixed block (35) and optical microphotograph probe crossbeam (36) on the 2nd L type fixed block (33), optical microphotograph probe crossbeam (36) below is installed optical microphotograph objective tube (37) and object lens (38) successively, optical microphotograph probe crossbeam (36) top is installed catoptron (39), optical microphotograph eyepiece stalk (40), eyepiece group (41) and CCD detecting head (42) successively, CCD detecting head (42) links to each other with computing machine (31) by image collection card (43), shows by image display panel (32).
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| CN2011200183786U CN202008492U (en) | 2011-01-20 | 2011-01-20 | Imaging device with optical microscopic probe and atomic force microscopic probe |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095898A (en) * | 2011-01-20 | 2011-06-15 | 浙江大学 | Optical microscopy-atomic force microscopy double-probe imaging method and device |
| CN106443997A (en) * | 2016-11-30 | 2017-02-22 | 东莞市天合机电开发有限公司 | Moving mechanism for photoelectric microscope |
| CN107402214A (en) * | 2017-09-06 | 2017-11-28 | 成都圭目机器人有限公司 | A kind of dysnusia detecting system |
| CN112710660A (en) * | 2020-12-23 | 2021-04-27 | 长安大学 | Macro-micro texture separate acquisition device based on pavement texture frequency spectrum analysis |
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2011
- 2011-01-20 CN CN2011200183786U patent/CN202008492U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095898A (en) * | 2011-01-20 | 2011-06-15 | 浙江大学 | Optical microscopy-atomic force microscopy double-probe imaging method and device |
| CN106443997A (en) * | 2016-11-30 | 2017-02-22 | 东莞市天合机电开发有限公司 | Moving mechanism for photoelectric microscope |
| CN106443997B (en) * | 2016-11-30 | 2019-03-29 | 金鹏飞 | A kind of photoelectric microscope mobile mechanism |
| CN107402214A (en) * | 2017-09-06 | 2017-11-28 | 成都圭目机器人有限公司 | A kind of dysnusia detecting system |
| CN112710660A (en) * | 2020-12-23 | 2021-04-27 | 长安大学 | Macro-micro texture separate acquisition device based on pavement texture frequency spectrum analysis |
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