WO2022246933A1

WO2022246933A1 - Multi-mode measurement method and measurement system based on near-field non-porous probe

Info

Publication number: WO2022246933A1
Application number: PCT/CN2021/100992
Authority: WO
Inventors: 杨树明; 王飞; 李少博; 程碧瑶; 刘强
Original assignee: 西安交通大学
Priority date: 2021-05-24
Filing date: 2021-06-18
Publication date: 2022-12-01
Also published as: CN113341180A; CN113341180B

Abstract

A multi-mode measurement method and measurement system based on a near-field non-porous probe. First and second optical fibers (5, 6) are coupled to a probe optical fiber (11) by means of a first optical fiber coupler (9), the first optical fiber (5) is connected to a first laser (1), and the second optical fiber (6) is connected to a first detector (2). Third and fourth optical fibers (7, 8) are coupled to a fifth optical fiber (15) by means of a second optical fiber coupler (10), the third optical fiber (7) is connected to a second laser (3), the fourth optical fiber (8) is connected to a second detector (4), and the fifth optical fiber (15) is connected to a focusing lens group (18). Light that is output from the first optical fiber (5) can only enter the probe optical fiber (11), light that is output from the probe optical fiber (11) can only enter the second optical fiber (6), light that is output from the third optical fiber (7) can only enter the fifth optical fiber (15), and light that is output from the fifth optical fiber (15) can only enter the fourth optical fiber (8). An axis of a probe tip (16) of the probe optical fiber (11) is coaxial with an axis of the focusing lens group (18). By means of the measurement method, different measurement modes can be realized, and for a measurement system, optical fibers are used as carriers for optical propagation, which makes the entire optical path flexible, thereby facilitating optical path debugging during a measurement process.

Description

A multi-mode measurement method and measurement system based on a near-field non-porous probe

technical field

The invention belongs to the field of near-field optical imaging of micro-nano structure, shape measurement and optical fiber waveguide, and relates to a multi-mode measurement method and a measurement system based on a near-field non-porous probe.

Background technique

The emergence of near-field optical technology has broken the bottleneck of the optical diffraction limit and realized optical high-resolution measurement. The researchers successfully detected the near-field evanescent wave of the sample by placing the probe within a hundred nanometers of the sample surface, and using a suitable probe is the key to the near-field measurement. According to the structure of the probe, it is mainly divided into hole-type and non-hole-type probes. Since the non-hole-type probe can achieve higher measurement resolution, it has been widely studied and applied.

At present, the commonly used measurement method based on the non-porous probe is the scattering measurement optical path. Usually, a beam of spatial light is irradiated at the point where the probe tip interacts with the sample, and then the light scattered by the near-field of the tip is collected at a distance, and finally used for optical imaging. Although this method is suitable for the measurement of most samples, there is only one method for excitation and collection of optical signals, which has great limitations, which limits the measurement of optical properties of various types of samples, and is not conducive to the field of near-field optical measurement. develop. Scattering measurement optical path is more complex, difficult to adjust and difficult to integrate. If the above measurement problems can be solved, it will bring great convenience to scientific research and promote the development of measuring instruments.

Contents of the invention

In order to solve the problems existing in the prior art, the purpose of the present invention is to propose a multi-mode measurement method and measurement system based on a near-field non-porous probe. The present invention can realize a variety of different measurement modes, and the measurement system uses optical fiber As the carrier of light propagation, the entire optical path is very flexible, which is convenient for optical path debugging during the measurement process.

The technical scheme that the present invention adopts is as follows:

A multi-mode measurement system based on a near-field non-porous probe, including a first laser, a first detector, a second laser, a second detector, a first fiber coupler, a second fiber coupler, and a probe fiber , focusing lens group, first optical fiber, second optical fiber, third optical fiber, fourth optical fiber and fifth optical fiber;

Both the first fiber coupler and the second fiber coupler include an input port, a first output port, a second output port, a first reflector, a beam splitter, a second reflector and a third reflector, and the first reflector is set On the optical path of the incident light at the input end, the beam splitter and the first output end are both located on the optical path of the reflected light of the first reflector, the coated side of the beam splitter faces the first output end, and the second reflector is located at the beam splitter The optical path of the reflected light on the side of the mirror with coating, the third reflector is located on the optical path of the reflected light of the second reflector, the second output end is located on the optical path of the reflected light of the third reflector, and the transmittance ratio of the beam splitter is different. less than 1;

The first optical fiber, the second optical fiber, and the probe optical fiber are respectively connected to the input end, the second output end, and the first output end of the first optical fiber coupler, the first optical fiber of the first optical fiber coupler is connected to the first laser, and the first optical fiber is connected to the first laser. Two optical fibers are connected to the first detector;

The third optical fiber, the fourth optical fiber, and the fifth optical fiber are respectively connected to the input end, the second output end, and the first output end of the second fiber coupler, the third optical fiber is connected to the second laser, and the fourth optical fiber is connected to the second detector. , the fifth optical fiber is connected to the focusing lens group;

The axis of the probe tip of the probe fiber is coaxial with the axis of the focusing lens group.

Preferably, the probe tip of the probe fiber is located at the focal point of the focusing lens group.

Preferably, the first laser and the second laser are identical.

Preferably, the first detector and the second detector are identical.

Preferably, the probe tip of the probe fiber is a tapered tip structure.

Preferably, the multi-mode measurement system based on the near-field non-porous probe of the present invention also includes a three-dimensional mobile platform, a clamping mechanism capable of three-dimensional movement is provided on the three-dimensional mobile platform, and one end of the probe fiber with a probe tip is installed on the clamping mechanism.

The present invention also provides a multi-mode measurement method based on a near-field non-porous probe, which is carried out by using the multi-mode measurement system based on the near-field non-porous probe of the present invention as described above, including:

Set the sample to be tested between the probe tip and the focusing lens group;

And take measurements using at least one of the following measurement modes:

Measurement mode 1: the first laser emits laser light, the laser light emitted by the first laser emits on the surface of the sample to be tested through the first optical fiber, the first optical fiber coupler, and the probe tip of the probe fiber, and the probe tip of the probe fiber receives the The reflected light reflected by the surface of the sample to be tested enters the first detector through the probe fiber, the first fiber coupler and the second fiber;

Measurement mode two: the first laser emits laser light, the laser light emitted by the first laser emits on the surface of the sample to be tested through the first optical fiber, the first optical fiber coupler, and the probe tip of the probe optical fiber, and the fifth optical fiber receives it through the focusing lens group Measure the transmitted light of the sample, and the transmitted light enters the second detector through the fifth optical fiber, the second optical fiber coupler and the fourth optical fiber;

Measurement mode three: the second laser emits laser light, and the laser emitted by the second laser emits on the surface of the sample to be measured through the third optical fiber, the second optical fiber coupler, the fifth optical fiber, and the focusing lens group, and the focusing lens group receives the laser light passing through the surface of the sample to be measured The reflected reflected light enters the second detector through the fifth optical fiber, the second optical fiber coupler, and the fourth optical fiber;

Measurement mode four: the second laser emits laser light, and the laser light emitted by the second laser emits on the surface of the sample to be measured through the third optical fiber, the second optical fiber coupler, the fifth optical fiber, and the focusing lens group, and the probe tip of the probe optical fiber receives the laser light to be tested. The transmitted light of the sample is measured, and the transmitted light enters the first detector through the probe fiber, the first fiber coupler and the second fiber.

Preferably, when the sample to be measured is a light-transmitting sample, measurement mode 1, measurement mode 2, measurement mode 3, measurement mode 4, measurement mode 1 and measurement mode 2 are carried out simultaneously, or measurement mode 3 and measurement mode 4 are carried out simultaneously. way to measure.

Preferably: when the measurement mode 2 is used for measurement, the probe tip of the probe fiber is located at the focal point of the focusing lens group;

When measuring with measurement mode 4, the probe tip of the probe fiber is located at the focal point of the focusing lens group.

Preferably, when the sample to be tested is a non-transparent sample, measurement mode 1 is used for measurement.

The present invention has following beneficial effect:

The multi-mode measurement system based on the near-field non-porous probe of the present invention can realize multiple different measurement modes, and study the physical and optical properties of the sample to be measured from different aspects. The multiple different measurement modes include: 1) using the first laser and the first detector. At this time, the near-field light on the surface of the sample to be measured is emitted by the probe tip, and the collected light is returned by the needle tip; 2) the first laser and the second detector are used. The needle tip is emitted, and the collected light is collected by the optical fiber under the sample to be tested; 3) Using the second laser and the first detector, the near-field light on the surface of the sample to be tested is incident on the probe tip from the bottom of the sample to be tested and interacts with the sample to be tested , the collected light is collected by the probe tip; 4) using the second laser and the second detector, the near-field light on the surface of the sample to be tested is incident on the probe tip and the sample to be tested from the bottom of the sample to be tested, and the collected light It is collected by the optical fiber below the sample to be tested. The measurement system of the present invention uses the first, second, third and fourth optical fibers as carriers for light propagation, which makes the entire optical path very flexible and facilitates the adjustment of the optical path during the measurement process.

Description of drawings

Fig. 1 is a schematic structural diagram of a multi-mode measurement system based on a near-field non-porous probe according to the present invention;

Fig. 2 is a schematic diagram of the working principle of the optical fiber coupler of the present invention, wherein the light entered by a can only exit through port b, and the light entered by b can only exit through port c;

Fig. 3 is a partially enlarged schematic diagram of the tip of the fiber optic probe needle of the present invention;

Fig. 4 is a schematic structural view of the lens group connected to the end of the optical fiber according to the present invention. After the light passes through the lens group, the outgoing light energy converges at one point;

Fig. 5 is a near-field optical image of grid scattering measured by a first laser and a first detector in an embodiment of the present invention;

Fig. 6 is a grid transmission near-field optical image measured by a first laser and a second detector;

Fig. 7 is a schematic diagram of the optical path structure of the fiber coupler used in the present invention.

In the figure: 1 the first laser, 2 the first detector, 3 the second laser, 4 the second detector, 5 the first fiber, 6 the second fiber, 7 the third fiber, 8 the fourth fiber, 9 the first fiber coupling Device, 10 second fiber coupler, 11 probe fiber, 12 clamping mechanism, 13 sample to be tested, 14 lens group, 15 fifth fiber, 16 probe tip, 17 fiber tail, 18 focusing lens group, 19 fiber Coupler, 20 beam splitter, 21 first reflector, 22 second reflector, 23 third reflector, 24 input end, 25 first output end, 26 second output end.

Detailed ways

The present invention will be clearly and specifically described below in conjunction with the accompanying drawings and specific implementation methods.

Referring to Fig. 1, Fig. 2 and Fig. 7, the multi-mode measurement system based on the near-field non-porous probe of the present invention includes a first laser 1, a first detector 2, a second laser 3, a second detector 4, a first A fiber coupler 9, a second fiber coupler 10, a probe fiber 11, a focusing lens group 18, a first fiber 5, a second fiber 6, a third fiber 7, a fourth fiber 8 and a fifth fiber 15; the first Both the fiber coupler 9 and the second fiber coupler 10 include an input port 24, a first output port 25, a second output port 26, a first reflector 21, a beam splitter 20, a second reflector 22 and a third reflector 23. The first reflector 21 is set on the optical path of the incident light at the input end 24, the beam splitter 20 and the first output end 25 are both located on the optical path of the light reflected by the first reflector 21, and the side of the beam splitter 20 is coated Towards the first output end 25, the second reflector 22 is located on the optical path of the reflected light on the coated side of the beam splitter 20, the third reflector 23 is located on the optical path of the reflected light from the second reflector 22, and the second output end 26 is located on the optical path of the light reflected by the third reflector 23, and the transmittance-reflectance ratio of the beam splitter 20 is not less than 1, that is, the amount of light transmitted by the beam splitter 20 is not less than the amount of reflected light. Referring to Fig. 1, Fig. 2 and Fig. 7, the arrow Indicates the direction of the optical path, the incident from port a (ie input port) can be emitted to port b (ie the first output port 25), and the incident from port b (ie the first output port 25) is incident from port c (ie the second output port 26) At this time, a small amount of light will also be emitted from the a port. This light is useless light. Regardless, the transmittance ratio of the beam splitter can be 1:1, 3:1, 9:1, 99:1, 99.9:1. Generally, 9:1 can be used to meet the requirements; the first optical fiber 5, the second optical fiber 6, and the probe optical fiber 11 are respectively connected to the input end, the second output end, and the first output end of the first optical fiber coupler 9, and the first For the fiber coupler 9, the first fiber 5 is connected to the first laser 1, and the second fiber 6 is connected to the first detector 2; the third fiber 7, the fourth fiber 8 and the fifth fiber 15 are respectively connected to the second fiber coupler The connection between the input end, the second output end and the first output end of 10, the third optical fiber 7 is connected with the second laser 3, the fourth optical fiber 8 is connected with the second detector 4, and the fifth optical fiber 15 is connected with the focusing lens group 18; Referring to FIG. 1 , the axis of the probe tip 16 of the probe fiber 11 is coaxial with the axis of the focusing lens group 18 .

As a preferred embodiment of the present invention, referring to FIG. 1 , FIG. 3 and FIG. 4 , the probe tip 16 of the probe fiber 11 is located at the focal point of the focusing lens group 18 .

As a preferred embodiment of the invention, the first laser 1 and the second laser 3 are identical.

As a preferred embodiment of the present invention, the first detector 2 and the second detector 4 are identical.

As a preferred embodiment of the present invention, referring to FIG. 3 , the probe tip 16 of the probe fiber 11 is a tapered tip structure.

As a preferred embodiment of the present invention, the multi-mode measurement system based on the near-field non-porous probe of the present invention also includes a three-dimensional mobile platform. A clamping mechanism 12 capable of three-dimensional movement is provided on the three-dimensional mobile platform. On the probe optical fiber 11 One end with a probe tip 16 is mounted on the clamping mechanism 12 . The focusing lens group 18 is clamped by a conventional fixed bracket and fixed on the other side of the sample. The clamping mechanism 12 moves the adjustable needle point with the probe tip 16 to the focus of the focusing lens group 18 , and then the clamping mechanism 12 does not move, and the focusing lens group 18 does not move all the time. When measuring a sample, both the probe 16 and the lens group 18 are stationary, and the sample stage carries the sample for three-dimensional movement for measurement.

Referring to Fig. 1, the sample 13 to be tested is arranged between the probe tip 16 and the focusing lens group 18;

Take measurements using at least one of the following measurement modes:

Measurement mode one: the first laser 1 emits laser light, and the laser light emitted by the first laser 1 hits the surface of the sample 13 to be tested through the first optical fiber 5, the first optical fiber coupler 9, and the probe tip of the probe optical fiber 11, and the probe optical fiber The probe tip of 11 receives the reflected light reflected by the surface of the sample 13 to be tested, and the reflected light enters the first detector 2 through the probe optical fiber 11, the first optical fiber coupler 9, and the second optical fiber 6;

Measurement mode two: the first laser 1 emits laser light, and the laser light emitted by the first laser 1 hits the surface of the sample 13 to be tested through the first optical fiber 5, the first optical fiber coupler 9, and the probe tip of the probe optical fiber 11, and the fifth optical fiber 15 Receive the transmitted light of the sample 13 to be measured through the focusing lens group 18, and the transmitted light enters the second detector 4 through the fifth optical fiber 15, the second optical fiber coupler 10 and the fourth optical fiber 8;

Measurement mode three: the second laser 3 emits laser light, and the laser light emitted by the second laser 3 passes through the third optical fiber 7, the second optical fiber coupler 10, the fifth optical fiber 15, and the focusing lens group 18 on the surface of the sample 13 to be measured, and the focusing lens The group 18 receives the reflected light reflected by the surface of the sample 13 to be tested, and the reflected light enters the second detector 4 through the fifth optical fiber 15, the second optical fiber coupler 10, and the fourth optical fiber 8;

Measurement mode four: the second laser 3 emits laser light, and the laser light emitted by the second laser 3 passes through the third optical fiber 7, the second optical fiber coupler 10, the fifth optical fiber 15, and the focusing lens group 18 on the surface of the sample 13 to be measured. The probe tip of the optical fiber 11 receives the transmitted light of the sample 13 to be tested, and the transmitted light enters the first detector 2 through the probe optical fiber 11 , the first optical fiber coupler 9 and the second optical fiber 6 .

As a preferred embodiment of the present invention, when the sample 13 to be tested is a light-transmitting sample, measurement mode one, measurement mode two, measurement mode three, measurement mode four, measurement mode one and measurement mode two are carried out simultaneously or measurement mode three and Measuring Mode Four Simultaneous measurement is carried out.

As a preferred embodiment of the present invention: when using measurement mode two to measure, the probe tip 16 of the probe fiber 11 is located at the focus of the focusing lens group 18; when using measurement mode four to measure, the probe tip 16 of the probe fiber 11 The needle tip 16 is located at the focal point of a focusing lens group 18 .

As a preferred embodiment of the present invention, when the sample 13 to be tested is a non-transparent sample, measurement mode 1 is used for measurement.

The probe used in the present invention is a non-porous fiber optic probe, and four different measurement modes can be realized by selectively adopting the method of emitting laser light or collecting laser light on the upper and lower surfaces of the sample to be measured. The measurement system uses optical fiber as the carrier of light propagation, which makes the entire optical path very flexible and facilitates optical path debugging during the measurement process.

The technical solution of the present invention is to provide two identical lasers and detectors respectively. The emitted light of the laser and the collected light of the detector can be emitted or collected by the upper surface or the lower surface of the sample, so four different measurement modes can be obtained. , where the fiber with the probe tip is always on the upper surface of the sample, and the fiber with the tail lens set is always on the lower surface of the sample. When the optical path of the selected laser and detector is located on the side of the upper surface of the sample, the near-field light on the sample surface is emitted by the probe tip, and the collected light is also returned by the needle tip; when the selected optical path of the laser is located on the upper surface of the sample and the optical path of the detector is located under the sample When the surface is on the surface, the near-field light on the sample surface is emitted by the probe tip, and the collected light is collected by the optical fiber under the sample; when the selected laser optical path is located on the lower surface of the sample and the detector optical path is located on the upper surface of the sample, the near-field light on the sample surface is incident from below the sample When the probe tip and the sample interact, the collected light is collected by the probe tip; when the selected laser and detector optical path are located on the side of the lower surface of the sample, the near-field light on the sample surface is incident from the bottom of the sample to the probe tip and the sample interaction , the collected light is collected by the optical fiber below the sample.

The present invention provides two methods for forming focused light spots at the probe tip in near-field optical measurement, and provides two methods for collecting near-field scattering signals, so four different measurement modes can be realized. The light-transmitting sample to be tested can realize the measurement and imaging of near-field scattered light and transmitted light at the same time on the upper and lower detectors, and can improve the signal-to-noise ratio of near-field signals. The measurement system uses optical fiber as the carrier of light propagation, which is flexible in operation, easy to adjust and integrate.

Example

As shown in Figure 1, the multi-mode measurement system based on the near-field non-porous probe in this embodiment uses two identical lasers, namely the first laser 1 and the second laser 3, and two identical detectors, namely the first For the detector 2 and the first detector 4, both the laser and the detector are selected during operation, and only one is selected for use. Both the laser and the detector are connected with optical fibers (5, 6, 7, 8), and the first optical fiber coupler 9 couples one end of the first optical fiber 5, the second optical fiber 6 and the probe optical fiber 11 together, and the second optical fiber coupler The device 10 couples and connects one end of the third optical fiber 7, the fourth optical fiber 8 and the fifth optical fiber 15 together. The needle tip at the tail end of the probe fiber 11 can move three-dimensionally under the drive of the clamping mechanism 12. The fiber tail 17 of the fifth fiber 15 is connected to the lens group 14, and the lens group 14 can converge the light at one point. The center between the needle point at the end of the probe fiber 11 and the lens group 14 is the placement area for the sample 13 to be tested, and the sample also divides the optical path into upper and lower sides. Referring to Fig. 2, the first optical fiber coupler 9 needs to satisfy that the light output by the first optical fiber 5 can only enter the probe optical fiber 11, and the light output by the probe optical fiber 11 can only enter the second optical fiber 6; the second optical fiber coupler 10 needs to The light output by the third optical fiber 7 can only enter the fifth optical fiber 15 , and the light output by the fifth optical fiber 15 can only enter the second optical fiber 8 .

According to the choice of laser and detector, there are four measurement modes, and each mode also fixes the measurement optical path used. The first is to use the first laser 1 and the first detector 2; the second is to use the first A laser 1 and a second detector 4; the third is to use the second laser 3 and the first detector 2; the first is to use the second laser 3 and the second detector 4. The specific measurement methods for each mode are:

1) Use the first laser 1 and the first detector 2. At this time, the near-field light on the sample surface is emitted by the probe tip, and the collected light is also returned by the needle tip;

2) Using the first laser 1 and the second detector 4, at this time, the near-field light on the sample surface is emitted by the probe tip, and the collected light is collected by the optical fiber under the sample;

3) Using the second laser 3 and the first detector 2, at this time, the near-field light on the sample surface is incident on the probe tip and the sample from below the sample, and the collected light is collected by the probe tip;

4) The second laser 3 and the second detector 4 are used. At this time, the near-field light on the sample surface is incident on the probe tip and the sample from below the sample, and the collected light is collected by the optical fiber below the sample.

Wherein, under the second and third modes, the probe fiber 11 is used in conjunction with the fifth fiber 15, the central axes of the two fibers should coincide and the needle tip at the tail end of the probe fiber 11 should be adjusted to the upper focal point of the lens group 14. Time signal collection is the highest.

If the sample 13 to be tested is a light-transmitting sample, four different modes can be used for near-field optical measurement. The first is to use the first laser 1 and the first detector 2; the second is to use the first laser 1 and the second detector 4; the third is to use the second laser 3 and the first detector 2; the fourth One is to use a second laser 3 and a second detector 4 . Among them, the first and the second can be used at the same time to measure scattered light and transmitted light, that is, the first laser 1 and the second detector 2 and the second detector 4; the third and the fourth can be used at the same time to measure Scattered light and transmitted light, that is, the second laser 3 and the first detector 2 and the second detector 4 . The difference between the two is that the incident light is irradiated from the upper surface or the lower surface of the sample.

If the sample 13 to be tested is a non-transparent sample, then select the first laser 1 and the first detector 2 to be used together.

The present invention carries out the near-field optical imaging test of the first and second modes simultaneously for a grid structure, the central axes of the probe fiber 11 and the fifth fiber 15 are coincident and the tip of the probe fiber 11 tail end is adjusted to At the focal point above the lens group 14, the scattering near-field optical image (as shown in FIG. 5 ) and the transmission near-field optical image (as shown in FIG. 6 ) of the sample are simultaneously obtained. As can be seen from the results, the signal of the two images is The noise ratios are all high, and can be compared with each other to confirm the accuracy of the results.

To sum up, compared with the current near-field measurement optical path, the multi-mode measurement method and measurement system based on the near-field non-porous probe involved in the present invention has very prominent features and advantages, including the following points:

1) Four different measurement modes can be realized, and the physical optical properties of the sample to be tested can be studied from four different aspects.

2) The measurement resolution of each mode can reach the highest resolution of current near-field optical measurement.

3) The optical fiber optical path is used together with the optical fiber probe, the optical path is very flexible, which provides great convenience for the experimental operation.

Claims

A multi-mode measurement system based on a near-field non-porous probe, characterized in that it includes a first laser (1), a first detector (2), a second laser (3), and a second detector (4) , the first fiber coupler (9), the second fiber coupler (10), the probe fiber (11), the focusing lens group (18), the first fiber (5), the second fiber (6), the third fiber (7), the fourth optical fiber (8) and the fifth optical fiber (15);

Both the first fiber coupler (9) and the second fiber coupler (10) include an input port (24), a first output port (25), a second output port (26), a first reflector (21), a splitter The beam mirror (20), the second reflector (22) and the third reflector (23), the first reflector (21) is arranged on the optical path of the input end (24) incident light, the beam splitter (20) and the third One output end (25) is located on the optical path of the reflected light of the first reflector (21), the coated side of the beam splitter (20) faces the first output end (25), and the second reflector (22) is located at the splitter On the optical path of the reflected light on the side of the beam mirror (20) with coating, the third reflector (23) is located on the optical path of the reflected light of the second reflector (22), and the second output terminal (26) is located on the third reflector (23) On the optical path of the reflected light, the transmittance ratio of the beam splitter (20) is not less than 1;

The first optical fiber (5), the second optical fiber (6) and the probe optical fiber (11) are respectively connected with the input end, the second output end and the first output end of the first optical fiber coupler (9), and the first optical fiber coupler (9), the first optical fiber (5) is connected to the first laser (1), and the second optical fiber (6) is connected to the first detector (2);

The third optical fiber (7), the fourth optical fiber (8) and the fifth optical fiber (15) are respectively connected with the input end, the second output end and the first output end of the second optical fiber coupler (10), and the third optical fiber (7) ) is connected with the second laser (3), the fourth optical fiber (8) is connected with the second detector (4), and the fifth optical fiber (15) is connected with the focusing lens group (18);

The axis of the probe tip (16) of the probe fiber (11) is coaxial with the axis of the focusing lens group (18).
The multi-mode measurement system based on a near-field non-porous probe according to claim 1, wherein the probe tip (16) of the probe fiber (11) is located at the focal point of the focusing lens group (18) .
The multi-mode measurement system based on near-field non-porous probe according to claim 1, characterized in that the first laser (1) and the second laser (3) are the same.
The multi-mode measurement system based on near-field non-porous probe according to claim 1, characterized in that the first detector (2) and the second detector (4) are the same.
The multi-mode measurement system based on a near-field non-porous probe according to claim 1, characterized in that the probe tip (16) of the probe fiber (11) is a tapered tip structure.
A multi-mode measurement system based on a near-field non-porous probe according to any one of claims 1-5, characterized in that it also includes a three-dimensional mobile platform, and a clamp capable of three-dimensional movement is provided on the three-dimensional mobile platform. A holding mechanism (12), one end of the probe fiber (11) having a probe tip (16) is installed on the holding mechanism (12).
A multi-mode measurement method based on a near-field non-porous probe, characterized in that the multi-mode measurement system based on a near-field non-porous probe according to any one of claims 1-6 is used, including:

The sample to be measured (13) is arranged between the probe tip (16) and the focusing lens group (18);

Take measurements using at least one of the following measurement modes:

Measurement mode 1: the first laser (1) emits laser light, and the laser light emitted by the first laser (1) is emitted through the probe tip of the first optical fiber (5), the first optical fiber coupler (9), and the probe optical fiber (11). On the surface of the sample to be measured (13), the probe tip of the probe fiber (11) receives the reflected light reflected from the surface of the sample to be measured (13), and the reflected light passes through the probe fiber (11), the first fiber coupler ( 9), the second optical fiber (6) enters the first detector (2);

Measurement mode 2: the first laser (1) emits laser light, and the laser light emitted by the first laser (1) is emitted through the probe tip of the first optical fiber (5), the first optical fiber coupler (9), and the probe optical fiber (11). On the surface of the sample to be measured (13), the fifth optical fiber (15) receives the transmitted light of the sample to be measured (13) through the focusing lens group (18), and the transmitted light passes through the fifth optical fiber (15), the second fiber coupler ( 10) and the fourth optical fiber (8) enter the second detector (4);

Measurement mode three: the second laser (3) emits laser light, and the laser light emitted by the second laser (3) passes through the third optical fiber (7), the second optical fiber coupler (10), the fifth optical fiber (15), and the focusing lens group ( 18) emit on the surface of the sample to be measured (13), the focusing lens group (18) receives the reflected light reflected by the surface of the sample to be measured (13), and the reflected light passes through the fifth optical fiber (15), the second optical fiber coupler (10 ), the fourth optical fiber (8) enters the second detector (4);

Measurement mode four: the second laser (3) emits laser light, and the laser light emitted by the second laser (3) passes through the third optical fiber (7), the second optical fiber coupler (10), the fifth optical fiber (15), and the focusing lens group ( 18) shoot on the surface of the sample to be measured (13), the probe tip of the probe fiber (11) receives the transmitted light of the sample to be measured (13), and the transmitted light passes through the probe fiber (11), the first fiber coupler ( 9), the second optical fiber (6) enters the first detector (2).
The multi-mode measurement method based on a near-field non-porous probe according to claim 7, wherein when the sample to be measured (13) is a light-transmitting sample, measurement mode one, measurement mode two, measurement mode Mode 3, measurement mode 4, measurement mode 1 and measurement mode 2 at the same time, or measurement mode 3 and measurement mode 4 at the same time.
A kind of multi-mode measurement method based on near-field non-porous probe according to claim 7 or 8, characterized in that:

When using measurement mode two to measure, the probe tip (16) of the probe fiber (11) is located at the focal point of the focusing lens group (18);

When measurement is carried out in measurement mode four, the probe tip (16) of the probe fiber (11) is located at the focal point of the focusing lens group (18).
The multi-mode measurement method based on near-field non-porous probe according to claim 7, characterized in that, when the sample to be measured (13) is a non-transparent sample, measurement mode 1 is used for measurement.