CN110470639A - A kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect - Google Patents
A kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect Download PDFInfo
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- CN110470639A CN110470639A CN201910777138.5A CN201910777138A CN110470639A CN 110470639 A CN110470639 A CN 110470639A CN 201910777138 A CN201910777138 A CN 201910777138A CN 110470639 A CN110470639 A CN 110470639A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 51
- 230000000694 effects Effects 0.000 title claims abstract description 17
- 238000004621 scanning probe microscopy Methods 0.000 title claims abstract description 12
- 239000000523 sample Substances 0.000 claims abstract description 59
- 238000001514 detection method Methods 0.000 claims abstract description 45
- 238000002310 reflectometry Methods 0.000 claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims abstract description 14
- 238000005086 pumping Methods 0.000 claims abstract description 13
- 238000001914 filtration Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 abstract description 5
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- 230000000704 physical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000007707 calorimetry Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
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- 238000005259 measurement Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N2021/559—Determining variation of specular reflection within diffusively reflecting sample
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Abstract
The invention discloses a kind of multiple mode scanning microscopy imaging systems based on induced with laser photo-thermal effect, including be sequentially arranged from front to back pump light source, pumping optic modulating device, the first beam splitter/combiner, second beam splitter/combiner, micro-imaging lens, the Sample Scan telecontrol equipment for driving sample to be tested mobile, it is set to the probe source of the first beam splitter/combiner front end, the detection light spatial light filter being fixed on switching mechanism, and the photodetector positioned at detection light spatial light filter rear end；Switching mechanism drives detection light spatial light filter into and out between the second beam splitter/combiner and photodetector.The present invention contains two kinds of observing patterns of induced with laser reflectivity micro-imaging and laser induced surface thermal lens micro-imaging, the multiple parameters such as the absorption distribution of different samples, thermal conductivity, doping concentration, doping depth are tested and analyzed, have widened the application range of photo-thermal micro imaging system significantly.
Description
Technical field
The present invention relates to micro-imaging detection field, specifically a kind of multiple mode scanning based on induced with laser photo-thermal effect
Microscopy imaging system.
Background technique
The basic principle of induced with laser photo-thermal effect is: when a branch of pumping laser is irradiated on material, material can absorb sharp
Light energy changes so as to cause its physical characteristic, including refraction index changing, generation surface deformation, reflectivity changes etc..This
The relating to parameters such as absorption, thermal conductivity, carrier concentration of the variation of physical characteristics and material a bit.By to these physical characteristics
Variation is tested and analyzed, so that it may obtain the parameters such as material absorption, thermal conductivity, carrier concentration.This Opto-thertnal detection technology
Have many advantages, such as high sensitivity, high-resolution micrometering can be achieved.The change in physical properties due to caused by photo-thermal effect is relatively more,
Different change in physical properties is detected and has just derived different Opto-thertnal detection methods, including laser calorimetry, laser
Deflecting method, induced with laser reflectivity method, induced with laser thermal lens method etc..These methods respectively have advantage and disadvantage.In practical applications, past
Toward only with single measurement method.Therefore, traditional Opto-thertnal detection system there is a problem of having a single function, application surface it is narrow.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of multiple mode scanning based on induced with laser photo-thermal effect is micro-
Mirror imaging system contains two kinds of observation moulds of induced with laser reflectivity micro-imaging and laser induced surface thermal lens micro-imaging
Formula tests and analyzes the multiple parameters such as the absorption distribution of different samples, thermal conductivity, doping concentration, doping depth, opens up significantly
The wide application range of photo-thermal micro imaging system.
The technical solution of the present invention is as follows:
A kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect, including what is be sequentially arranged from front to back
Pump light source and pumping optic modulating device and probe source, the first beam splitter/combiner, the second beam splitter/combiner, micro-imaging
Lens, the detection light spatial light filter being fixed on switching mechanism, photodetector and the sample for driving sample to be tested mobile
Product scanning motion device；The pump beam of the pumping optic modulating device outgoing is transmitted through the first beam splitter/combiner, described
Probe source outgoing detection light beam reflected through the first beam splitter/combiner, the pump beam that the first beam splitter/combiner transmits
It is transmitted through the second beam splitter/combiner with the detection light beam reflected, the pump beam and spy that the second beam splitter/combiner transmits
Light beam is surveyed through the sample to be tested surface on micro-imaging lens focus to Sample Scan telecontrol equipment, sample to be tested surface reflection
Detection light beam successively reflected through micro-imaging lens, the second beam splitter/combiner, the switching mechanism be driving mechanism, band
For dynamic detection light spatial light filter into and out between the second beam splitter/combiner and photodetector, beam is closed in second beam splitting
The detection light beam that device reflects enters photodetector and realizes induced with laser reflectivity micro-imaging, the reflection of the second beam splitter/combiner
Detection light beam out is detected light spatial light filter and enters photodetector realization laser induced surface thermal lens imaging.
The pump light source and probe source is monochromatic source.
The pump light source and probe source is laser light source.
The Sample Scan telecontrol equipment is transverse and longitudinal horizontal mobile mechanism, and Sample Scan telecontrol equipment drives to test sample
Product carry out moving horizontally laterally or longitudinally, and pump light source and the exposure spots of probe source is allowed to carry out two dimension on sample to be tested surface
Point by point scanning.
Wavelength selection filtering apparatus is provided with before the photodetector.
The rear end of the pumping optic modulating device is provided with pump light expand device, and the pump light expand device goes out
The pump beam penetrated is transmitted through the first beam splitter/combiner.
The rear end of the probe source is provided with detection light expand device, the spy of the detection light expand device outgoing
Light beam is surveyed to reflect through the first beam splitter/combiner.
Advantages of the present invention:
The present invention is two kinds of observing pattern phases of induced with laser reflectivity micro-imaging and laser induced surface thermal lens micro-imaging
In conjunction with the high-resolution imaging that can be not only used for the native defect of multiple material detects, and can be also used for material thermal conductivity, thermal expansion
The detection and analysis of multiple physical parameters such as coefficient, ion doping concentration are dissipated, application range includes but is not limited to optical material and member
Part, semiconductor crystal wafer etc., the present invention solve the problems, such as tradition scanning photo-thermal micro imaging system have a single function, application surface it is narrow.
Detailed description of the invention
Fig. 1 is working principle diagram of the present invention under induced with laser reflectivity micro-imaging observing pattern.
Fig. 2 is working principle diagram of the present invention under laser induced surface thermal lens micro-imaging observing pattern.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
See Fig. 1 and Fig. 2, a kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect, including from
Pump light source 1, pumping optic modulating device 2 and the pump light expand device 3 being sequentially arranged after going to, are sequentially arranged from front to back
Probe source 9 and detection light expand device 10 and the first beam splitter/combiner 4, the second beam splitter/combiner 5, micro-imaging lens
6, the detection light spatial light filter 11 being fixed on switching mechanism 12, wavelength selection filtering apparatus 13, photodetector 14 and use
In the mobile Sample Scan telecontrol equipment 8 of driving sample to be tested 7；
The pump beam issued by pump light source 1 is modulated after pump beam modulating device 2, expands dress using pump light
Set 3 expand adjustment after, pump light expand device 3 be emitted pump beam transmitted through the first beam splitter/combiner 4, the first beam splitting close
The pump beam that beam device 4 transmits is transmitted through the second beam splitter/combiner 5, then is focused on sample after micro-imaging lens 6 and swept
Retouch 7 surface of sample to be tested on telecontrol equipment 8；
For the detection light beam issued by probe source 9 successively after detection light expand device 10 expands adjustment, detection light expands dress
The detection light beam for setting 10 outgoing is reflected through the first beam splitter/combiner 4, and the detection light beam that the first beam splitter/combiner 4 reflects is through
Two beam splitter/combiners 5 transmit, and the detection light beam that the second beam splitter/combiner 5 transmits focuses on sample through micro-imaging lens 6
7 surface of sample to be tested on scanning motion device 8, the detection light beam of 7 surface reflection of sample to be tested is successively through micro-imaging lens
6, the second beam splitter/combiner 5 reflects, switching mechanism 12 be driving mechanism, drive detection light spatial light filter 11 into and out
Between second beam splitter/combiner 5 and wavelength selection filtering apparatus 13, the detection light beam that the second beam splitter/combiner 5 reflects is through wavelength
It selects filtering apparatus 13 to enter photodetector 14 and realizes induced with laser reflectivity micro-imaging (see figure 1), beam is closed in the second beam splitting
It is real that the light that device 5 reflects successively enters photodetector 14 through detection light spatial light filter 11 and wavelength selection filtering apparatus 13
(see figure 2) is imaged in existing laser induced surface thermal lens.
Wherein, pump light source 1 and probe source 9 are monochromatic source, preferably laser light source.
Sample Scan telecontrol equipment 8 is transverse and longitudinal horizontal mobile mechanism, and Sample Scan telecontrol equipment 8 drives sample to be tested 7
Moving horizontally laterally or longitudinally is carried out, pump light source 1 and the exposure spots of probe source 9 is allowed to carry out two on 7 surface of sample to be tested
Point by point scanning is tieed up, to obtain the reflectivity changes distributed image and deformation map picture on entire 1 surface of sample to be tested.
The output signal of photodetector 14 is detected using phase lock-in detecting technology, at this point, with the pump beam modulated
Reference signal of the identical AC signal of modulating frequency as phase lock-in detecting, only pump beam induction generates Photothermal Signals energy
It is enough phase locked amplifier to measure, other external noises are all filtered.
Wherein, the process of induced with laser reflectivity micro-imaging is: when a branch of pumping laser modulated irradiates material table
Face interacts with material, can cause the variation of surface reflectivity.The variation of this reflectivity is because material absorbs laser energy
Amount causes temperature to increase or generate caused by photo-generated carrier.Using a branch of exploring laser light to this induced with laser reflectivity
Variation is detected.Exploring laser light passes through pumping laser irradiation zone, can be changed by the detection luminous intensity that sample surfaces reflect
Become, the Strength Changes of the detection light of reflection is measured, so that it may obtain the induced with laser reflectivity changes amount of irradiation zone.
Laser irradiation point is allowed to carry out two-dimentional point by point scanning on sample to be tested surface, so that it may obtain the reflectivity on entire sample to be tested surface
Change profile image.The spatial resolution of this imaging mode is determined by sample surfaces pump spot size.Work as pump beam
Converge to the size of very little, such as micron order even sub-micron, so that it may realize induced with laser reflectivity micro-imaging.Laser lures
The information such as the photoproduction carrier concentration distribution of the available sample of reflectivity micro-imaging mode are led, can be used to detect semiconductor
Doping concentration, doping depth of the materials such as wafer etc..
The process of laser induced surface thermal lens micro-imaging is: the pumping laser irradiation material surface modulated, material
Absorbing laser energy causes temperature to increase so as to cause surface thermal deformation.Using a branch of exploring laser light to this laser induced surface
Thermal deformation is detected.Exploring laser light passes through pumping laser irradiation zone, special by the detection light propagation of sample to be tested surface reflection
Property can change, be equivalent to and newly increase one " lens ", due to surface heat " lens " effect, detect light and pass through a spatial filter
After when entering back into photodetector, detection luminous intensity can change.By the variation of measurement detection luminous intensity, irradiated site can be obtained
The laser induced surface deformation quantity in domain.Laser irradiation point is allowed to carry out two-dimentional point by point scanning on sample to be tested surface, so that it may obtain
Entire sample to be tested surface deformation distributed image.The spatial resolution of this imaging mode is also by sample to be tested surface pump light
Spot size determines.When pump beam converges to the size of very little, such as micron order even sub-micron, so that it may realize induced with laser
Surface thermal lens micro-imaging.The Surface absorption distribution of the available sample of laser induced surface thermal lens micro-imaging mode,
The information such as thermal conductivity distribution.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (7)
1. a kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect, it is characterised in that: including in the past
The pump light source and pumping optic modulating device and probe source being sequentially arranged backward, the first beam splitter/combiner, the second beam splitting are closed
Beam device, micro-imaging lens, the detection light spatial light filter being fixed on switching mechanism, photodetector and to be measured for driving
The mobile Sample Scan telecontrol equipment of sample；The pump beam of the pumping optic modulating device outgoing is through the first beam splitter/combiner
It transmits, the detection light beam of the probe source outgoing is reflected through the first beam splitter/combiner, the transmission of the first beam splitter/combiner
Pump beam out is transmitted through the second beam splitter/combiner with the detection light beam reflected, what the second beam splitter/combiner transmitted
Pump beam and detection light beam are to be measured through the sample to be tested surface on micro-imaging lens focus to Sample Scan telecontrol equipment
The detection light beam of sample surfaces reflection is successively reflected through micro-imaging lens, the second beam splitter/combiner, the switching mechanism
For driving mechanism, drive detection light spatial light filter into and out between the second beam splitter/combiner and photodetector, it is described
The detection light beam that reflects of the second beam splitter/combiner enter photodetector and realize induced with laser reflectivity micro-imaging, second
The detection light beam that beam splitter/combiner reflects is detected light spatial light filter and enters photodetector realization laser induced surface heat
Lens imaging.
2. a kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect according to claim 1,
It is characterized by: the pump light source and probe source is monochromatic source.
3. a kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect according to claim 2,
It is characterized by: the pump light source and probe source is laser light source.
4. a kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect according to claim 1,
It is characterized by: the Sample Scan telecontrol equipment be transverse and longitudinal horizontal mobile mechanism, Sample Scan telecontrol equipment drive to
Sample carries out moving horizontally laterally or longitudinally, and pump light source and the exposure spots of probe source is allowed to carry out on sample to be tested surface
Two-dimentional point by point scanning.
5. a kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect according to claim 1,
It is characterized by: being provided with wavelength selection filtering apparatus before the photodetector.
6. a kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect according to claim 1,
It is characterized by: the rear end of the pumping optic modulating device is provided with pump light expand device, the pump light expands dress
The pump beam for setting outgoing is transmitted through the first beam splitter/combiner.
7. a kind of multiple mode scanning microscopy imaging system based on induced with laser photo-thermal effect according to claim 1,
It is characterized by: the rear end of the probe source is provided with detection light expand device, the detection light expand device outgoing
Detection light beam reflected through the first beam splitter/combiner.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117607058A (en) * | 2023-11-22 | 2024-02-27 | 重庆师范大学 | Near infrared double light source photo-thermal analysis sensing imaging device |
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| CN110470639B (en) | 2024-05-28 |
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