CN116399222A - Dark field nonlinear thermal wave confocal microscopic measurement device and method based on circular dichroism - Google Patents
Dark field nonlinear thermal wave confocal microscopic measurement device and method based on circular dichroism Download PDFInfo
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Abstract
The invention relates to a dark field nonlinear thermal wave confocal microscopic measurement device and method based on circular dichroism, wherein the device comprises the following components: the time division multiplexing circular polarization generating module is used for dividing polarized laser into left-right circular polarization, modulating and coupling; the thermal wave detection light shaping module is used for shaping the coupled light beam into annular light; the heat wave pump light generating module is used for generating heat wave pump light; the beam illumination module is used for scanning the sample to be detected by utilizing the annular light and the light beam after the heat wave pumping light beam combination; and the dark field nonlinear thermal wave detection module is used for filtering out thermal wave scattered light in the scanning light beam, obtaining a dark field thermal wave signal according to the thermal wave scattered light, and demodulating the dark field thermal wave signal to obtain a circular dichroism dark field thermal wave imaging result. The invention can obtain three-dimensional distribution information of various geometric defects and chiral detection of the defects.
Description
Technical Field
The invention relates to the technical field of optical precision measurement, more particularly, to a device and a method for measuring a circular dichroism-based dark field nonlinear thermal wave confocal microscope.
Background
The high-performance optical element and the optical material have wide application in precision instrument manufacture and major optical engineering research, are the root of the performance of an optical system, and the mechanical structure, chemical components and lattice structure defects in the surface and subsurface of the optical element and the optical material play an important role in high-resolution precision detection, wherein the chiral structure defects of the optical element have prominent influence, mainly appear to seriously influence the light field distribution of an incident light beam and reduce the light spot quality.
At present, the dark-field confocal microscopic measurement technology is an important means for nondestructive three-dimensional detection of an optical element, has the advantages of good optical chromatography capability, higher imaging resolution, higher imaging contrast brought by a dark background and the like, but the common optical dark-field confocal microscopic measurement technology can only realize geometric defect detection of a sample, such as scratches, bubbles and the like, and cannot acquire chiral detection of the defect.
Therefore, it is a urgent need for those skilled in the art to provide a dark-field confocal microscopic measuring device and method for more accurately identifying and classifying defects and more comprehensively characterizing the defect characteristics of optical elements and materials.
Disclosure of Invention
In view of the above, the present invention provides a device and a method for measuring a nonlinear thermal wave confocal microscope based on a circular dichroism dark field, wherein three-dimensional distribution information of subsurface scratches, abrasion, subsurface cracks, bubbles and other geometric defects is extracted by directly analyzing thermal wave scattering signals under the excitation of a single circular polarized pump light; and obtaining chiral information of the micro-nano structure by analyzing a thermal wave scattering signal difference value under the excitation of the left-right circular polarized pump light. The measuring device and the measuring method solve the problem of single imaging mode of the common dark field confocal technology, and break through the application bottleneck of failing to acquire various physical properties of the defect.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
on one hand, the invention discloses a dark field nonlinear thermal wave confocal microscopic measuring device based on circular dichroism, which comprises a time division multiplexing circular polarized light generating module, a thermal wave detection light shaping module, a thermal wave pump light generating module, a beam lighting module and a dark field nonlinear thermal wave detection module;
the time division multiplexing circular polarization generating module divides polarized laser into left-hand circular polarization and right-hand circular polarization through the polarization grating, and the left-hand circular polarization and the right-hand circular polarization are respectively modulated by the acousto-optic modulator and then enter the optical fiber coupler for coupling to obtain coupled light beams;
the thermal wave detection light shaping module is used for shaping the coupled light beam into annular light;
the heat wave pump light generation module is used for generating heat wave pump light, and the heat wave pump light has components with the same intensity as the left-hand circularly polarized light and the right-hand circularly polarized light;
the beam illumination module scans a sample to be detected by utilizing the annular light and the beam after the heat wave pumping light beam combination to obtain a scanned beam;
the dark field nonlinear thermal wave detection module is used for filtering out thermal wave scattered light in the scanned light beam, the thermal wave scattered light is detected by the lock-in amplifier to obtain a dark field thermal wave signal, and the dark field thermal wave signal is demodulated to obtain a circular dichroism dark field thermal wave imaging result.
Preferably, the time division multiplexing circular polarization generating module sequentially includes: the laser device I1, the half-wave plate I2, the polarization grating 3 is used for the beam split to produce left-hand circular polarized light and right-hand circular polarized light, the light path of left-hand circular polarized light includes in proper order: the optical path of the right-handed circularly polarized light sequentially comprises a reflecting mirror II 5, an acousto-optic modulator II 7 and an optical fiber collimating mirror II 9; and the light beams output by the left-hand circularly polarized light path and the right-hand circularly polarized light path are coupled by the optical fiber coupler 10 and then are transmitted to the thermal wave detection light shaping module by the optical fiber collimating mirror three 11.
Preferably, the first and second acousto-optic modulators 6 and 7 are configured to modulate the left-hand circularly polarized light and the right-hand circularly polarized light into pulse forms with a period of t, where the time delay between the left-hand circularly polarized light and the right-hand circularly polarized light is t/2, and t is greater than the integral time of the lock-in amplifier.
Preferably, the thermal wave detection light shaping module sequentially includes: a third mirror 12, a beam expander 13, an aperture stop 14 and a conic lens group 15.
Preferably, the cone lens assembly 15 is comprised of two cone lenses mounted in a back-to-back fashion.
Preferably, the thermal wave pump light generating module sequentially includes: a second laser 16, a chopper 17, a second half-wave plate 18, a polarizing plate 19 and a dichroic mirror 20; the chopper 17 is configured to modulate the thermal wave pump light emitted by the second laser 16, where the modulation frequency is f, and the dichroic mirror 20 propagates the modulated thermal wave pump light and the annular light beam to the beam illumination module.
Preferably, the beam lighting module sequentially includes, according to a light propagation direction: the second aperture diaphragm 21, the non-polarizing beam splitter 22, the objective lens 23, the sample 24 to be tested and the three-dimensional objective table 25; the scanned light beam reflected by the sample to be measured is reversely transmitted to the dark field nonlinear thermal wave detection module through the objective lens 23 and the non-polarizing beam splitter 22 in sequence.
Preferably, the dark field nonlinear thermal wave detection module sequentially comprises: the optical filter 26, the aperture diaphragm III 27, the collecting lens 28, the single-mode optical fiber 29, the photodetector 30 and the lock-in amplifier 31, wherein the detection frequency of the lock-in amplifier 31 is 2f, and the integration time is T, wherein T >2/f.
Preferably, the demodulation process is to extract thermal wave dark field data of the left-hand circularly polarized light and the right-hand circularly polarized light in the thermal wave scattered light according to duty ratios of the left-hand circularly polarized light and the right-hand circularly polarized light, and obtain a circular dichroism dark field thermal wave imaging result after difference.
On the other hand, the invention also discloses a dark field nonlinear thermal wave confocal microscopic measuring method based on the circular dichroism, which is based on any dark field nonlinear thermal wave confocal microscopic measuring device based on the circular dichroism, and comprises the following specific steps:
s1, dividing polarized laser into left-handed circular polarized light and right-handed circular polarized light through the time division multiplexing circular polarized light generating module, modulating the polarized laser into pulse waves, and coupling the pulse waves;
s2, the thermal wave detection light shaping module shapes the coupled light beam into annular light;
s3, generating a heat wave pump light through the heat wave pump light generating module, wherein the heat wave pump light has a component with the same intensity as the left-hand circularly polarized light and the right-hand circularly polarized light;
s4, after the annular light and the wave pumping light are combined, scanning a sample to be detected through the light beam illumination module to obtain a scanned light beam;
s5, filtering the scanned light beam through the dark field nonlinear thermal wave detection module to obtain thermal wave scattered light, obtaining a dark field thermal wave signal according to the thermal wave scattered light, and demodulating the dark field thermal wave signal to obtain a circular dichroism dark field thermal wave imaging result.
According to the technical scheme, the invention discloses a circular dichroism dark field-based nonlinear thermal wave confocal microscopic measuring device and a circular dichroism dark field-based nonlinear thermal wave confocal microscopic measuring method, and compared with the prior art, the circular dichroism dark field-based nonlinear thermal wave confocal microscopic measuring device and the circular dichroism dark field-based nonlinear thermal wave microscopic measuring method have the following advantages:
the three-dimensional distribution information of subsurface scratches, abrasion, subsurface cracks, bubbles and other geometric defects can be extracted by directly analyzing the thermal wave scattering signal under the excitation of single circularly polarized pump light; the chiral detection of the absorption type defect can be realized by left-right circular polarized illumination and circular dichroism analysis of a thermal wave scattering signal;
the invention has the following beneficial effects: and the thermal wave imaging is carried out by adopting a dark field detection mode, so that the imaging sensitivity of the absorption defect is improved, and meanwhile, the resolution of imaging is improved by adopting nonlinear thermal wave detection.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a circular dichroism dark field nonlinear thermal wave confocal microscopic measuring device provided by the invention.
FIG. 2 is a flow chart of a dark field nonlinear thermal wave confocal microscopic measurement method based on circular dichroism.
Reference numerals illustrate:
a first laser, a first 2 half-wave plate, a 3 polarization grating, a first 4 reflecting mirror, a second 5 reflecting mirror, a first 6 acousto-optic modulator, a second 7 acousto-optic modulator, a first 8 optical fiber collimator, a second 9 optical fiber collimator, a 10 optical fiber coupler, a third 11 optical fiber collimator, a third 12 reflecting mirror, a 13 beam expander, a first 14 aperture diaphragm, a 15 cone lens group, a second 16 laser, a second 17 chopper, a second 18 half-wave plate, a second 19 polarizing plate, a 20 dichroic mirror, a second 21 aperture diaphragm, a 22 non-polarizing beam splitter, a 23 objective lens, a 24 sample to be measured, a 25 three-dimensional objective table, a 26 optical filter, a third 27 aperture diaphragm, a 28 focusing lens, a 29 single mode optical fiber, a 30 photoelectric detector and a 31 lock-in amplifier.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
According to the dark field nonlinear thermal wave confocal microscopic measuring device and method based on circular dichroism, the sensitivity of dark field detection is improved to a certain extent, the absorption type defects of a sample can be detected in a nonlinear thermal wave imaging mode, chiral information of a micro-nano structure can be further obtained through circular dichroism analysis of thermal wave signals, and a new approach is provided for micro-nano structure detection.
The embodiment of the invention firstly discloses a dark field nonlinear thermal wave confocal microscopic measuring device based on circular dichroism, which mainly comprises a time division multiplexing circular polarized light generating module, a thermal wave detection light shaping module, a thermal wave pump light generating module, a beam lighting module and a dark field nonlinear thermal wave detection module;
the time division multiplexing circular polarization generating module divides polarized laser into left-hand circular polarization and right-hand circular polarization through the polarization grating, and the left-hand circular polarization and the right-hand circular polarization are respectively modulated by the acousto-optic modulator and then enter the optical fiber coupler for coupling to obtain coupled light beams;
the thermal wave detection light shaping module is used for shaping the coupled light beam into annular light;
the heat wave pump light generation module is used for generating heat wave pump light, wherein the heat wave pump light has components with the same intensity as the left-hand circularly polarized light and the right-hand circularly polarized light;
the beam illumination module scans the sample to be detected by utilizing the annular light and the light beam after the heat wave pumping light beam combination to obtain the scanned light beam;
further, the dark field nonlinear thermal wave detection module is used for filtering out thermal wave scattered light in the scanned light beam, obtaining a dark field thermal wave signal according to the thermal wave scattered light, and demodulating the dark field thermal wave signal to obtain a circular dichroism dark field thermal wave imaging result.
In order that the above objects, features and advantages of the present invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended fig. 1.
First, the time division multiplexing circular polarization generating module sequentially includes: the device comprises a laser I1, a half-wave plate I2, a polarization grating 3, a reflector I4, a reflector II 5, an acousto-optic modulator I6, an acousto-optic modulator II 7, an optical fiber collimating mirror I8, an optical fiber collimating mirror II 9, an optical fiber coupler 10 and an optical fiber collimating mirror III 11;
specifically, the polarized laser emitted by the first laser 1 is used as a thermal wave detection light, in one embodiment, the wavelength of the emitted laser beam is 488nm-532nm, then the polarization grating 3 is utilized to split the beam, the upper path and the lower path are respectively left-right circular polarized light, and the polarization state direction of the incident beam is controlled through the first half-wave plate 2, so that the left-right circular polarized light and the right-hand circular polarized light generated by the split beam keep the same intensity on components; and then, after the propagation directions of the two paths of light beams are regulated to be parallel to the main optical axis through the first reflecting mirror 4 and the second reflecting mirror 5, the period of the light beam modulation pulse form is t through the first acousto-optic modulator (6) and the second acousto-optic modulator (7), wherein the time delay t/2 between the left-hand circularly polarized light and the right-hand circularly polarized light is larger than the integration time of the phase-locked amplifier 31, so that the phase-locked amplifier alternately illuminates the left-hand circularly polarized light and the right-hand circularly polarized light in the same integration period, and only the left-hand circularly polarized light or the right-hand circularly polarized light exists in the light path at the same moment.
In one embodiment, the beam is modulated as a square wave with a duty cycle of 50% and a time delay of 0.5T for both the upper and lower paths.
The modulated left-right circular polarized light is respectively connected with two input ends of an optical fiber coupler 10 through an optical fiber collimating lens I8 and an optical fiber collimating lens II 9, and parallel light is output through an optical fiber collimating lens III 11.
Then, the parallel light enters a thermal wave detection light shaping module;
the thermal wave detection light shaping module sequentially comprises: a third reflector 12, a beam expander 13, an aperture diaphragm 14 and a cone lens group 15;
the first aperture stop 14 is used to re-modulate the beam expanded by the beam expander 13 to a desired inner diameter, and in one embodiment, the inner diameter is adjusted to be smaller than the clear aperture of the objective lens 23 by about 1mm; the cone lens group (15) consists of two cone lenses which are arranged in a back-to-back mode and shape the light beam into annular light;
at this time, the thermal wave pump light is generated by the thermal wave pump light generating module, and in the sample, the pump light periodically modulates the refractive index, namely, the thermal wave signal, and phase modulates the thermal wave detection light, so that the thermal wave detection light periodically changes in intensity, and then the sensitivity of defect detection is improved by detecting by the lock-in amplifier.
The heat wave pump light generating module sequentially comprises: a second laser 16, a chopper 17, a second half-wave plate 18, a polarizing plate 19 and a dichroic mirror 20;
the polarized laser emitted by the second laser 16 is used as a heat wave pump light, in one embodiment, the wavelength of the emitted laser beam is 405nm, the chopper second 17 modulates the intensity of the heat wave pump light, and in one embodiment, the modulation frequency is f; further, the polarization state of the modulated heat wave pump light is adjusted to be the same as the intensity on the left-right circular polarized light component by the half-wave plate two 18 and the polarizing plate 19.
Finally, the ring light output by the thermal wave detection light shaping module and the thermal wave pump light after adjustment are combined by the dichroic mirror 20, and the combined beam enters the beam illumination module.
For a beam illumination module, the beam illumination module comprises, in order according to the light propagation direction: the second aperture diaphragm 21, the non-polarizing beam splitter 22, the objective lens 23, the sample 24 to be tested and the three-dimensional objective table 25;
the second aperture diaphragm 21 adjusts the beam size to be matched with the clear aperture of the objective lens, the beam scans the sample 24 to be measured placed on the three-dimensional objective table 25 through the objective lens 23, and the beam collected by the objective lens enters the dark field nonlinear thermal wave detection module;
the dark field nonlinear thermal wave detection module sequentially comprises: filter 26, aperture stop three 27 and collection lens 28, single mode fiber 29, photodetector 30 and lock-in amplifier 31.
After the light beam collected by the objective lens is reflected by the second unpolarized beam splitter 22, the second filter 26 filters the heat wave pump light, and the heat wave detection light is reserved; then, the reflected thermal wave detection light is isolated by an aperture diaphragm III 27 with the aperture complementary with the thermal wave detection annular light, only thermal wave scattered light carrying the information of the sample 24 to be detected is allowed to pass through, and the thermal wave scattered light enters a single-mode optical fiber 29 after being focused by a focusing lens 28; the output signal of the single-mode fiber 29 is collected and detected by the photo detector 30 to obtain a thermal wave signal, and further, the output signal of the photo detector 30 is connected to the lock-in amplifier 31, the thermal wave signal is detected by the lock-in amplifier 31 to obtain a dark field thermal wave signal, and the detection frequency of the lock-in amplifier 31 is set to 2f, and meanwhile, the integration time is set to T, wherein T is more than 2/f, so that the lock-in amplifier 31 is guaranteed to receive the signal of the whole period, and the intensity of the extracted periodic signal is prevented from being distorted.
And finally, demodulating the dark field thermal wave signal to obtain a circular dichroism dark field thermal wave imaging result. The specific demodulation process is to extract the heat wave dark field data under the illumination of the left-hand circular polarized light and the right-hand circular polarized light in the heat wave scattered light according to the duty ratio of the left-hand circular polarized light and the right-hand circular polarized light, and obtain a circular dichroism dark field heat wave imaging result after difference.
In one embodiment, the number of scanning points of the three-dimensional stage 25 is n×n, the residence time of each point is T, and the duty ratio of the left-right circular polarized light is 50% as described above, at this time, the lock-in amplifier 31 at the time of 0.5T, 1.5T, …, (N2-0.5) T is output as the thermal wave dark field data under the left-hand illumination, the lock-in amplifier 31 at the time of 0, T, 2T, …, (N2-1) T is output as the thermal wave dark field data under the right-hand illumination, and the two are arranged in a two-dimensional array of n×n after the difference, that is, the circular dichroism dark field thermal wave imaging result.
On the other hand, the invention also provides a measuring method based on the dark field nonlinear thermal wave confocal microscopic measuring device based on circular dichroism, which mainly comprises the following steps of:
s1, dividing polarized laser into left-handed circular polarization and right-handed circular polarization by a time division multiplexing circular polarization generating module, modulating the polarized laser into pulse waves, and coupling the pulse waves;
s2, a thermal wave detection light shaping module shapes the coupled light beam into annular light;
s3, generating a thermal wave pump light through a thermal wave pump light generating module, wherein the thermal wave pump light has components with the same intensity as the left-hand circularly polarized light and the right-hand circularly polarized light;
s4, after the annular light and the thermal wave pump are combined into beams, scanning the sample to be detected through a light beam illumination module to obtain scanned light beams;
s5, filtering the scanned light beam through a dark field nonlinear thermal wave detection module to obtain thermal wave scattered light, obtaining a dark field thermal wave signal according to the thermal wave scattered light, and demodulating the dark field thermal wave signal to obtain a circular dichroism dark field thermal wave imaging result.
In one embodiment, referring to fig. 1, the detection step may be specifically as follows:
step a, a laser I emits a thermal wave detection light beam, the thermal wave detection light beam is split by a polarization grating 3, an upper path and a lower path are respectively left-right circular polarized light, and a half-wave plate I2 adjusts the left-right circular polarized light so that the light intensity is the same;
b, the first reflecting mirror 4 and the second reflecting mirror 5 are used for adjusting the propagation directions of two paths of light beams to be parallel to a main optical axis, an acousto-optic modulator I6 and an acousto-optic modulator II 7 are used for modulating light waves in two paths to form square waves in a time domain respectively, the period is T, and the time delay between the square waves is 0.5T;
step c, the upper and lower light beams are respectively coupled into two input ends of an optical fiber coupler 10 by an optical fiber collimating lens I8 and an optical fiber collimating lens II 9, and the output ends of the light beams are connected with an optical fiber collimating lens III 11 to output parallel light;
step d, the beam is modulated into annular light by an aperture diaphragm I14, and then enters a cone lens group 15 formed by back-to-back placement of two cone lenses;
step e, outputting heat wave pump light by a second laser 16, performing intensity modulation by a second chopper 17, and modulating the frequency f;
step f, the second half-wave plate 18 and the polarizing plate 19 adjust the intensity of the heat wave pump light and the left-hand circularly polarized light component to be the same;
step g, strictly combining the heat wave pump light and the heat wave detection light by a dichroic mirror 20, inputting a subsequent light path, and adjusting the outer diameter of a light spot by an aperture diaphragm II 21 to be matched with the clear aperture of an objective lens 23;
in the signal path of the dark field balance detection module, the reflected heat wave detection light and the heat wave scattered light collected by the objective lens 23 are filtered out by the optical filter 26 after being reflected by the non-polarizing beam splitter 22, the annular reflected light is isolated by the aperture diaphragm III 27, the central heat wave scattered light is reserved, and the central heat wave scattered light is focused into the single-mode optical fiber 29 by the focusing lens 28;
step i, connecting the single-mode fiber 29 to a photoelectric detector 30 for dark field thermal wave signal detection;
step g, inputting a detection signal of the photodetector 30 into a phase-locked amplifier 31, wherein the working frequency of the phase-locked amplifier 31 is set to be 2f, and the phase-locked amplifier is used for detecting nonlinear thermal wave dark field signals excited by the left-right circularly polarized thermal wave pump light;
and k, demodulating the nonlinear chiral thermal wave dark field signal according to the time sequence to obtain a circular dichroism dark field thermal wave imaging result.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. The device is characterized by comprising a time division multiplexing circular polarization generating module, a thermal wave detection light shaping module, a thermal wave pump light generating module, a beam lighting module and a dark field nonlinear thermal wave detection module,
the time division multiplexing circular polarization generating module divides polarized laser into left-hand circular polarization and right-hand circular polarization through the polarization grating, and the left-hand circular polarization and the right-hand circular polarization are respectively modulated by the acousto-optic modulator and then enter the optical fiber coupler for coupling to obtain coupled light beams;
the thermal wave detection light shaping module is used for shaping the coupled light beam into annular light;
the heat wave pump light generation module is used for generating heat wave pump light, and the heat wave pump light has components with the same intensity as the left-hand circularly polarized light and the right-hand circularly polarized light;
the beam illumination module scans a sample to be detected by utilizing the annular light and the beam after the heat wave pumping light beam combination to obtain a scanned beam;
the dark field nonlinear thermal wave detection module is used for filtering out thermal wave scattered light in the scanned light beam, a dark field thermal wave signal is obtained after the thermal wave scattered light is detected, and the dark field thermal wave signal is demodulated to obtain a circular dichroism dark field thermal wave imaging result.
2. The device for confocal microscopic measurement of thermal waves based on circular dichroism dark field nonlinearity according to claim 1, wherein the time division multiplexing circular polarization generating module sequentially comprises: the laser device comprises a laser device I (1), a half-wave plate I (2) and a polarization grating (3), wherein the polarization grating (3) is used for generating left-handed circularly polarized light and right-handed circularly polarized light through light splitting, and a light path of the left-handed circularly polarized light sequentially comprises: the optical path of the right-handed circularly polarized light comprises a first reflecting mirror (4), an acousto-optic modulator (6) and an optical fiber collimating mirror (8), and the optical path of the right-handed circularly polarized light comprises a second reflecting mirror (5), an acousto-optic modulator (7) and an optical fiber collimating mirror (9) in sequence; and after the light beams output by the left-hand circularly polarized light path and the right-hand circularly polarized light path are coupled by an optical fiber coupler (10), the light beams are transmitted to the thermal wave detection light shaping module by an optical fiber collimating mirror III (11).
3. A circular dichroism dark field nonlinear thermal wave based confocal microscopy measurement apparatus according to claim 2, wherein the first (6) and second (7) acousto-optic modulators are configured to modulate the left-hand circular polarized light and the right-hand circular polarized light into pulse form with a period of t, wherein the left-hand circular polarized light and the right-hand circular polarized light are delayed by t/2.
4. The circular dichroism dark field nonlinear thermal wave confocal microscopic measuring device according to claim 1, wherein the thermal wave detection light shaping module sequentially comprises: a third reflecting mirror (12), a beam expander (13), an aperture diaphragm I (14) and a cone lens group (15).
5. A round dichroism dark field non-linear thermal wave confocal microscopy measurement apparatus according to claim 4 wherein said cone lens set (15) is comprised of two cone lenses mounted in back-to-back fashion.
6. The circular dichroism dark field nonlinear thermal wave confocal microscopic measuring device according to claim 1, wherein the thermal wave pump light generating module sequentially comprises: a second laser (16), a chopper (17), a second half-wave plate (18), a polarizing plate (19) and a dichroic mirror (20); the chopper (17) is used for modulating the thermal wave pump light emitted by the second laser (16), the modulation frequency is f, and the dichroic mirror (20) propagates the modulated thermal wave pump light and the annular light beam to the beam illumination module.
7. The circular dichroism dark field nonlinear thermal wave confocal microscopic measuring device according to claim 1, wherein the beam illumination module sequentially comprises, according to the light propagation direction: the device comprises an aperture diaphragm II (21), a non-polarizing beam splitter (22), an objective lens (23), a sample to be tested (24) and a three-dimensional objective table (25); the scanned light beam reflected by the sample to be detected is reversely transmitted to the dark field nonlinear thermal wave detection module through the objective lens (23) and the non-polarizing beam splitter (22) in sequence.
8. The circular dichroism-based dark field nonlinear thermal wave confocal microscopic measuring device according to claim 1, wherein the dark field nonlinear thermal wave detection module sequentially comprises: the optical filter (26), an aperture diaphragm III (27), a collecting lens (28), a single-mode optical fiber (29), a photoelectric detector (30) and a phase-locked amplifier (31), wherein the detection frequency of the phase-locked amplifier (31) is 2f, and the integration time is T, wherein T is more than 2/f.
9. The device for measuring the thermal wave confocal microscopy based on the circular dichroism dark field nonlinear according to claim 1, wherein the demodulation process is to extract thermal wave dark field data of the left-hand circular polarized light and the right-hand circular polarized light in the thermal wave scattered light respectively according to the duty ratios of the left-hand circular polarized light and the right-hand circular polarized light, and obtain a circular dichroism dark field thermal wave imaging result after difference.
10. The circular dichroism dark field-based nonlinear thermal wave confocal microscopic measuring method is characterized by comprising the following specific steps of:
s1, dividing polarized laser into left-handed circular polarized light and right-handed circular polarized light through the time division multiplexing circular polarized light generating module, modulating the polarized laser into pulse waves, and coupling the pulse waves;
s2, the thermal wave detection light shaping module shapes the coupled light beam into annular light;
s3, generating a heat wave pump light through the heat wave pump light generating module, wherein the heat wave pump light has a component with the same intensity as the left-hand circularly polarized light and the right-hand circularly polarized light;
s4, after the annular light and the wave pumping light are combined, scanning a sample to be detected through the light beam illumination module to obtain a scanned light beam;
s5, filtering the scanned light beam through the dark field nonlinear thermal wave detection module to obtain thermal wave scattered light, obtaining a dark field thermal wave signal according to the thermal wave scattered light, and demodulating the dark field thermal wave signal to obtain a circular dichroism dark field thermal wave imaging result.
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