CN113960010B - Dark field confocal Raman polarization spectrum measurement device and method based on vortex beam - Google Patents
Dark field confocal Raman polarization spectrum measurement device and method based on vortex beam Download PDFInfo
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Abstract
Dark field confocal Raman polarization spectrum measuring device and method based on vortex light beams, and belongs to the technical field of optical precision measurement. The device comprises an optical fiber dual-wavelength light illumination module, a bright field copolymerization Jiao Mokuai and a dark field polarization confocal Raman spectrum analysis module; the annular illumination light beam and the complementary aperture are generated through the optical fiber to shield and detect, so that a sample surface reflection signal and a subsurface scattering signal are effectively separated, and three-dimensional distribution information of defects such as scratches, abrasion, subsurface cracks and bubbles on the micron-sized surface and subsurface can be obtained simultaneously; the confocal Raman spectrum measurement can be used for carrying out three-dimensional detection analysis on properties such as chemical molecular components of a sample; by introducing a polarization information measurement, the polarity of the substance can be analyzed.
Description
Technical Field
The invention belongs to the technical field of optical precision measurement, and mainly relates to a dark field confocal Raman polarization spectrum measurement device and method based on vortex beams. The annular illumination light beam and the complementary aperture are generated through the optical fiber to shield and detect, so that a sample surface reflection signal and a subsurface scattering signal are effectively separated, and three-dimensional distribution information of defects such as nano-scale surface scratches, abrasion, subsurface cracks, bubbles and the like can be obtained at the same time; copolymerization Jiao Pianzhen Raman spectroscopy analysis can detect the chemical molecular composition of the sample.
Background
The high-performance optical element and the optical material have wide application in precision instrument manufacture and major optical engineering research, are the root of the performance of an optical system, and play an important role in high-resolution precision detection of mechanical structures, chemical components and lattice structure defects of the optical element and the optical material in surfaces and subsurface.
Confocal microscopy has become an important means for nondestructive testing of optical elements due to its good optical chromatographic capability and high resolution imaging advantages. The dark field confocal measurement technology is used as an important branch of the confocal microscopic measurement technology, and the scattered signals of the light source in the sample are collected under the dark field background condition, so that microscopic imaging with no fluorescent mark, high contrast and high resolution is realized. The dark field confocal microscopy technology can effectively inhibit the reflected light of the surface, so that a new approach is provided for the surface and subsurface detection of the optical element.
However, the measurement of the common optical dark field confocal microscopic measurement technology needs to introduce a space annular light generating component such as a conical lens pair, a space light modulator and the like, so that the debugging difficulty of the system is greatly increased; on the other hand, the common optical dark field or bright field range is limited to detection of geometric defects, such as scratches, bending, step, abrasion and the like, other chemical characteristics of the sample cannot be obtained, and the comprehensiveness of detection and analysis of the optical element is limited to a certain extent. The invention discloses a dark field confocal Raman polarization spectrum measuring device based on vortex beams, which can detect chemical properties of a sample surface and a subsurface, such as molecular composition, molecular concentration and the like, and has the integrated detection function of the surface and subsurface defects through Raman spectrum measurement while acquiring geometric three-dimensional distribution information of the defects of surface scratches, abrasion, subsurface cracks, bubbles and the like; the technology utilizes the optical fiber to generate annular light, reduces the debugging difficulty of the system while compressing the whole volume of the imaging system, and can effectively fill the requirements.
Disclosure of Invention
The following presents a simplified summary of the invention in order to provide a basic understanding of some aspects of the invention. It should be understood that this summary is not an exhaustive overview of the invention. It is not intended to identify key or critical elements of the invention or to delineate the scope of the invention. Its purpose is to present some concepts in a simplified form as a prelude to the more detailed description that is discussed later.
Compared with the prior art, the device and the method solve the defect that the common dark field confocal technology cannot detect physical properties such as sample chemistry, polarization property and the like, ensure high contrast, high resolution and high signal to noise ratio, and simultaneously effectively compress the volume of the whole microscopic measurement system.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
The invention provides a dark field confocal Raman polarization spectrum measuring device based on vortex beams, which comprises a dual-wavelength illumination module, a bright field confocal detection module and a dark field confocal Jiao Pianzhen Raman spectrum analysis module, wherein the dual-wavelength illumination module is used for measuring the light intensity of a light beam;
The dual-wavelength lighting module sequentially comprises the following components according to the light propagation direction: the device comprises a first laser, a first single-mode fiber, a dual-mode fiber, a second laser, a second single-mode fiber, a wavelength division multiplexer, a fiber collimator, a beam expander, a half-wave plate, a first aperture diaphragm, a half-reflecting and half-transmitting membrane, an objective lens and a sample to be tested;
The bright field confocal detection module sequentially comprises the following components according to the light propagation direction: a dichroic mirror, a focusing lens I, a pinhole I, and a PMT detector;
the dark field copolymerization Jiao Pianzhen Raman spectrum analysis module sequentially comprises the following steps according to the light propagation direction: the device comprises an aperture diaphragm II, a focusing lens II, a pinhole II, a collimating lens, a polarization grating, a focusing lens III, a focusing lens IV, a linear array PMT detector I and a linear array PMT detector II.
Further: the single-mode optical fiber has a cut-off wavelength of 400nm-500nm and a fiber core diameter of 3 μm-3.5 μm; the cut-off wavelength of the dual-mode optical fiber is 550nm-600nm, and the diameter of the fiber core is 3.5 mu m-4 mu m.
Further: the single mode optical fiber I and the double mode optical fiber are in dislocation fusion connection, and parallel light beams are generated through a collimator and a beam expander.
Further: the dual-mode optical fiber outputs annular light with the wavelength of 500nm-550nm, and the single-mode optical fiber outputs solid light with the wavelength of 600nm-650 nm; the dual-mode optical fiber and the second output end of the single-mode optical fiber are connected with the wavelength division multiplexer to output dual-wavelength illumination light.
Further: the optical field distribution can be changed to a standard annular beam by winding a dual mode fiber and rotating the half wave plate.
Further: the first aperture diaphragm filters out annular light spots matched with the incident aperture of the objective lens.
Further: the aperture of the second aperture diaphragm is strictly complementary matched with the aperture of the annular light, and is regulated to be 1.5mm-2mm.
Further: the signal of the reflected light filtered by the second aperture diaphragm is focused by the second focusing lens, and a second pinhole is arranged at the focus.
Further: the polarization grating period is 4-6 μm, and the focusing lens III and the focusing lens IV are arranged behind the + -1-level diffraction signals.
The dark field confocal Raman polarization spectrum measuring method based on vortex beams is realized based on the dark field confocal Raman polarization spectrum measuring device based on vortex beams, and comprises the following specific steps:
Step a, a laser beam emitted by a first laser device is coupled into a dual-mode optical fiber through a first single-mode optical fiber and then becomes partial annular light, a second laser beam emitted by the second laser device is injected into the second single-mode optical fiber to output solid light, the dual-mode optical fiber and the second single-mode optical fiber are connected with a wavelength division multiplexer, the output end of the dual-mode optical fiber is collimated and amplified into a large-aperture parallel beam through a collimator and a beam expander and then is incident into a half-wave plate, the half-wave plate is rotated to the first laser device, the incident beam is shaped into the annular beam, and the parallel beam is incident into an objective lens through an aperture diaphragm I and a semi-reflective semi-transparent film to form a focusing light spot on a sample to be tested, so that dual-wavelength illumination of the sample to be tested is realized;
B, moving the sample to be detected in the three-dimensional direction to realize three-dimensional microscopic measurement of the sample to be detected;
Step c, the dichroic mirror divides the objective lens collecting light beam into two paths: the light source comprises a bright-field confocal detection light path and a dark-field confocal Raman scattering detection light path, wherein the reflection light path is a bright-field confocal detection light path, solid light is focused to a first pinhole through a first focusing lens, and a PMT detector collects signals;
And d, transmitting annular light through a light path by a dichroic mirror, filtering reflected light components by a light beam incident to an aperture diaphragm II, focusing the scattered light beam through a focusing lens II, placing a pinhole II at a focus, collimating the light beam by a collimating lens, then splitting the Raman scattered signal by an incident polarization grating, respectively placing a focusing lens III and a focusing lens IV after the diffraction signal of + -1 level, and recording Raman spectrum information of different polarization states by a linear array PMT detector I and a linear array PMT detector II respectively.
Further: the wavelength of the laser beam emitted by the first laser is 500-550 nm, and the wavelength of the laser beam emitted by the second laser is 600-650 nm.
The beneficial effects are that:
Firstly, generating an annular light beam by using mode coupling in an optical fiber, shielding reflected light by using an annular light complementary aperture, effectively isolating reflected signals on the surface of a sample, and simultaneously reserving scattered signals on the surface and subsurface to realize surface and subsurface defect detection of a high-contrast optical device;
Secondly, the device adopts a dark field polarization Raman spectrum analysis module, can sense the three-dimensional chemistry and polarization properties of the sample in a label-free mode, and can quantitatively measure and position chemical impurities on the surface and subsurface of the sample.
Drawings
Fig. 1 is a schematic structural diagram of a dark field confocal raman polarization spectrum measurement device based on vortex beams.
In the figure: 1a laser I, 2a single-mode optical fiber I, 3a dual-mode optical fiber, 4a laser II, 5a single-mode optical fiber II, 6 a wavelength division multiplexer, 7a collimator, 8a beam expander, 9 a half-wave plate, 10 an aperture diaphragm I, 11a half-reflection and half-transmission membrane, 12 an objective lens, 13 a sample to be detected, 14 a dichroic mirror, 15a focusing lens I, 16 a pinhole I, a 17PMT detector, 18 an aperture diaphragm II, 19 a focusing lens II, 20 a pinhole II, 21 a collimating lens, 22 a polarization grating, 23 a focusing lens III, 24 a focusing lens IV, 25 a linear array PMT detector I and 26 a linear array PMT detector II;
Detailed Description
Exemplary embodiments of the present invention will be described hereinafter with reference to the accompanying drawings. In the interest of clarity and conciseness, not all features of an actual implementation are described in this specification. It will of course be appreciated that in the development of any such actual embodiment, numerous implementation-specific decisions must be made in order to achieve the developer's specific goals, such as compliance with system-and business-related constraints, and that these constraints will vary from one implementation to another. Moreover, it will be appreciated that such a development effort might be complex and time-consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure.
It should be noted here that, in order to avoid obscuring the present invention due to unnecessary details, only the device structures and/or processing steps closely related to the solution according to the present invention are shown in the drawings, while other details not greatly related to the present invention are omitted.
Example 1: the embodiment shown in fig. 1 provides a dark field confocal raman polarization spectrum measuring device based on vortex beams, which is used for realizing the integrated detection function of bright field confocal and dark field raman spectrum of a sample.
The system comprises a dual-wavelength illumination module, a bright-field confocal detection module and a dark-field copolymerization Jiao Pianzhen Raman spectrum analysis module;
The dual-wavelength lighting module sequentially comprises the following components according to the light propagation direction: the device comprises a first laser 1, a first single-mode optical fiber 2, a dual-mode optical fiber 3, a second laser 4, a second single-mode optical fiber 5, a wavelength division multiplexer 6, an optical fiber collimator 7, a beam expander 8, a half-wave plate 9, an aperture diaphragm 10, a semi-reflective semi-permeable membrane 11, an objective lens 12 and a sample 13 to be detected;
the laser beam emitted by the first laser device 1 is coupled into the dual-mode optical fiber 3 through the single-mode optical fiber 2 and then becomes partial annular light, the laser beam emitted by the second laser device 4 is injected into the single-mode optical fiber 5 to output solid light, the dual-mode optical fiber 3 and the single-mode optical fiber 5 are connected with the wavelength division multiplexer 6, the output end is collimated and amplified into a large-aperture parallel beam through the collimator 7 and the beam expander 8 and is incident into the half-wave plate 9, the incident beam emitted by the first laser device 1 is shaped into the annular beam by rotating the half-wave plate 9, the parallel beam is incident into the objective lens 12 through the aperture diaphragm 10 and the semi-reflective semi-transparent film 11, a focusing light spot is formed on the sample 13 to be tested, and the dual-wavelength illumination of the sample 13 to be tested is realized;
the bright field confocal detection module sequentially comprises the following components according to the light propagation direction: dichroic mirror 14, focusing lens one 15, pinhole one 16, PMT detector 17;
The dichroic mirror 14 divides the optical path into two probe beams: a bright-field confocal detection light path and a dark-field confocal Raman scattering detection light path; the reflection light path is a bright-field confocal detection light path, solid light is focused to a first pinhole 16 through a first focusing lens 15, and a PMT detector 17 collects signals;
The dark field copolymerization Jiao Pianzhen Raman spectrum analysis module sequentially comprises the following steps according to the light propagation direction: the second aperture diaphragm 18, the second focusing lens 19, the second pinhole 20, the collimating lens 21, the polarization grating 22, the third focusing lens 23, the fourth focusing lens 24, the first linear array PMT detector 25 and the second linear array PMT detector 26;
The annular light is focused by a focusing lens II 19 through a signal of filtering reflected light by an aperture diaphragm II 18, a pinhole II 20 is arranged at a focal point, a collimating lens 21 collects light beams passing through the pinhole II 20, a polarization grating 22 splits Raman scattering signals, a focusing lens III 23 and a focusing lens IV 24 focus the light beams, and a linear array PMT detector I25 and a linear array PMT detector II 26 record Raman spectrum information of different polarization states.
More specifically: the single mode fiber-2 cut-off wavelength is 400nm-500nm, the fiber core diameter is 3 μm-3.5 μm, the dual mode fiber-3 cut-off wavelength is 550nm-600nm, and the fiber core diameter is 3.5 μm-4 μm.
More specifically: the single-mode optical fiber I2 and the double-mode optical fiber 3 are in dislocation fusion, the dislocation amount is 4-4.5 mu m, parallel light beams are generated through the collimator 7 and the beam expander 8, and the diameter of an annular light beam dark spot output by the double-mode optical fiber is 1.5-2 mm.
More specifically: the dual-mode optical fiber 3 outputs annular light with the wavelength of 500nm-550nm, and the single-mode optical fiber II 5 outputs solid light with the wavelength of 600nm-650 nm; the output ends of the dual-mode optical fiber 3 and the single-mode optical fiber 5 are connected with a wavelength division multiplexer 6 to output dual-wavelength illumination light.
More specifically: the optical field distribution can be tuned to a standard annular beam by winding the dual mode fiber 3 and rotating the half wave plate 9.
More specifically: the first aperture stop 10 filters out the annular light spot passing through the entrance aperture of the matching objective lens 13.
More specifically: the aperture of the second aperture diaphragm 18 is strictly complementary matched with the annular light aperture, and only scattered light carrying information of the sample 13 to be detected is allowed to enter a subsequent detection light path, so that a reflected signal and a scattered signal from the sample 13 to be detected are effectively separated.
More specifically: the signal filtered by the second aperture diaphragm 18 is focused by the second focusing lens 19, the second pinhole 20 is arranged at the focus, the aperture is 10-50 μm, and the aperture of the first pinhole is equal to the aperture of the second pinhole.
More specifically: the grating period of the polarization grating 22 is 4-6 mu m, and the focusing lens III 23 and the focusing lens IV 24 are arranged behind the + -1-order diffraction signals.
Example 2: the embodiment provides a dark field confocal Raman polarization spectrum measurement method based on vortex beams, which is used for realizing the bright field confocal and Raman spectrum integrated detection function of a sample. The method comprises the following specific steps:
Step a, a laser beam emitted by a first laser device 1 is coupled into a dual-mode optical fiber 3 through a first single-mode optical fiber 2 and then becomes partial annular light, a laser beam emitted by a second laser device 4 is injected into a second single-mode optical fiber 5 to output solid light, the dual-mode optical fiber 3 and the second single-mode optical fiber 5 are connected with a wavelength division multiplexer 6, the output end of the dual-mode optical fiber is collimated and amplified into a large-aperture parallel beam through a collimator 7 and a beam expander 8 and then is incident into a half-wave plate 9, the half-wave plate 9 is rotated to the first laser device 1, the incident beam is shaped into an annular beam, the dual-wavelength parallel beam passes through an aperture diaphragm 10 and a half-reflection semi-transparent film 11 and enters an objective lens 12, a focusing light spot is formed on a sample 13 to be detected, and dual-wavelength illumination of the sample 13 is realized;
Step b, moving the sample 13 to be measured in a three-dimensional direction to realize three-dimensional microscopic measurement of the sample 13 to be measured;
Step c, the dichroic mirror 14 divides the objective lens collection beam into two paths: the light-field confocal detection light path and the dark-field confocal Raman scattering detection light path, wherein the reflection light path is the light-field confocal detection light path, solid light is focused to a first pinhole 16 through a first focusing lens 15, and a PMT detector 17 collects signals;
Step d, the dichroic mirror 14 transmits an annular light beam through a transmission light path, the light beam incident to the second aperture diaphragm 18 is filtered out of a reflected light component, only a scattered light signal is left, the scattered light beam is focused through the second focusing lens 19, a second pinhole 20 is arranged at a focal point, the collimating lens 21 collimates the light beam and then irradiates the polarization grating 22 to split the Raman scattered signal, the third focusing lens 23 and the fourth focusing lens 24 focus light beams with different polarization states after + -1-level diffraction signals are respectively arranged, and Raman spectrum information with different polarization states is recorded by the first linear array PMT detector 25 and the second linear array PMT detector 26.
Although the embodiments of the present invention are described above, the present invention is not limited to the embodiments adopted for the purpose of facilitating understanding of the technical aspects of the present invention. Any person skilled in the art can make any modification and variation in form and detail without departing from the core technical solution disclosed in the present invention, but the scope of protection defined by the present invention is still subject to the scope defined by the appended claims.
Claims (10)
1. Dark field confocal Raman polarization spectrum measuring device based on vortex light beam, its characterized in that: the system comprises a dual-wavelength illumination module, a bright-field confocal detection module and a dark-field copolymerization Jiao Pianzhen Raman spectrum analysis module;
The dual-wavelength lighting module sequentially comprises the following components according to the light propagation direction: the device comprises a first laser (1), a first single-mode optical fiber (2), a dual-mode optical fiber (3), a second laser (4), a second single-mode optical fiber (5), a wavelength division multiplexer (6), an optical fiber collimator (7), a beam expander (8), a half-wave plate (9), a first aperture diaphragm (10), a semi-reflective and semi-permeable membrane (11), an objective lens (12) and a sample (13) to be detected;
The laser beam emitted by the first laser (1) is coupled into the dual-mode optical fiber (3) through the first single-mode optical fiber (2) and then becomes partial annular light, the laser beam emitted by the second laser (4) is injected into the second single-mode optical fiber (5) to output solid light, the dual-mode optical fiber (3) and the second single-mode optical fiber (5) are connected with the wavelength division multiplexer (6), the output end is collimated and amplified into a large-aperture parallel beam through the collimator (7) and the beam expander (8) and is incident into the half-wave plate (9), the incident beam emitted by the first laser (1) is shaped into the annular beam, the parallel beam is incident into the objective lens (12) through the first aperture diaphragm (10) and the semi-reflective semi-transparent film (11), a focusing light spot is formed on the sample (13) to be measured, the dual-wavelength illumination of the sample (13) to be measured is realized, and the sample (13) to be measured is moved in the three-dimensional direction, and the three-dimensional microscopic measurement of the sample to be measured is realized;
the bright field confocal detection module sequentially comprises the following components according to the light propagation direction: a dichroic mirror (14), a focusing lens I (15), a pinhole I (16), and a PMT detector (17);
The dichroic mirror (14) splits the objective collection beam into two paths: the light source comprises a bright-field confocal detection light path and a dark-field confocal Raman scattering detection light path, wherein the reflection light path is a bright-field confocal detection light path, solid light is focused to a first pinhole (16) through a first focusing lens (15), and a PMT detector (17) collects signals;
The dark field copolymerization Jiao Pianzhen Raman spectrum analysis module sequentially comprises the following steps according to the light propagation direction: the device comprises an aperture diaphragm II (18), a focusing lens II (19), a pinhole II (20), a collimating lens (21), a polarization grating (22), a focusing lens III (23), a focusing lens IV (24), a linear array PMT detector I (25) and a linear array PMT detector II (26);
The dichroic mirror (14) transmits annular light through a transmission light path, light beams entering the second aperture diaphragm (18) are filtered out of reflected light components, only scattered light signals are left, the scattered light beams are focused through the second focusing lens (19), a second pinhole (20) is arranged at a focus, the collimating lens (21) collimates the light beams and then enters the polarization grating (22) to split Raman scattered signals, the third focusing lens (23) and the fourth focusing lens (24) focus light beams with different polarization states after + -1-level diffraction signals are respectively arranged, and Raman spectrum information with different polarization states is recorded by the first linear array PMT detector (25) and the second linear array PMT detector (26) respectively.
2. The vortex beam-based dark field confocal raman polarization spectrometry apparatus of claim 1 wherein: the cut-off wavelength of the single-mode fiber I (2) is 400nm-500nm, and the fiber core diameter is 3 mu m-3.5 mu m; the cut-off wavelength of the dual-mode optical fiber (3) is 550nm-600nm, and the diameter of the fiber core is 3.5 mu m-4 mu m.
3. The vortex beam-based dark field confocal raman polarization spectrometry apparatus of claim 1 wherein: the single-mode optical fiber I (2) and the dual-mode optical fiber (3) are in dislocation fusion connection, and parallel light beams are generated through a collimator (7) and a beam expander (8).
4. The vortex beam-based dark field confocal raman polarization spectrometry apparatus of claim 1 wherein: the dual-mode optical fiber (3) outputs annular light with the wavelength of 500nm-550nm, and the single-mode optical fiber II (5) outputs solid light with the wavelength of 600nm-650 nm; the output ends of the dual-mode optical fiber (3) and the single-mode optical fiber II (5) are connected with a wavelength division multiplexer (6) to output dual-wavelength illumination light.
5. The vortex beam-based dark field confocal raman polarization spectrometry apparatus of claim 1 wherein: the optical field distribution to the annular light can be adjusted by winding the dual-mode optical fiber (3) and rotating the half-wave plate (9).
6. The vortex beam-based dark field confocal raman polarization spectrometry apparatus of claim 1 wherein: the first aperture diaphragm (10) filters out annular light spots matched with the incident aperture of the objective lens (12).
7. The vortex beam-based dark field confocal raman polarization spectrometry apparatus of claim 1 wherein: the aperture of the second aperture diaphragm (18) is complementarily matched with the annular light aperture and is adjusted to be 1.5mm-2mm.
8. The vortex beam-based dark field confocal raman polarization spectrometry apparatus of claim 1 wherein: the polarization grating (22) has a grating period of 4-6 μm, and the focusing lens III (23) and the focusing lens IV (24) are arranged behind the + -1-order diffraction signals.
9. The dark field confocal Raman polarization spectrum measurement method based on vortex beams is realized based on the dark field confocal Raman polarization spectrum measurement device based on vortex beams, and is characterized in that: the method comprises the following specific steps:
Step a, a laser beam emitted by a first laser (1) is coupled into a dual-mode optical fiber (3) through a first single-mode optical fiber (2) and then becomes partial annular light, a laser beam emitted by a second laser (4) is injected into a second single-mode optical fiber (5) to output solid light, the dual-mode optical fiber (3) and the second single-mode optical fiber (5) are connected with a wavelength division multiplexer (6), the output end is collimated and amplified into a large-aperture parallel beam through a collimator (7) and a beam expander (8) and is incident into a half-wave plate (9), the half-wave plate (9) is rotated to enable the incident beam emitted by the first laser (1) to be shaped into an annular beam, and the parallel beam is incident into an objective lens (12) through an aperture diaphragm (10) and a half-reflecting and half-transmitting film (11), so that a focusing light spot is formed on a sample (13) to be tested, and dual-wavelength illumination of the sample (13) to be tested is realized;
B, moving the sample (13) to be detected in the three-dimensional direction to realize three-dimensional microscopic measurement of the sample (13) to be detected;
Step c, the dichroic mirror (14) divides the objective lens collecting light beam into two paths: the light source comprises a bright-field confocal detection light path and a dark-field confocal Raman scattering detection light path, wherein the reflection light path is a bright-field confocal detection light path, solid light is focused to a first pinhole (16) through a first focusing lens (15), and a PMT detector (17) collects signals;
Step d, a dichroic mirror (14) transmits annular light through a transmission light path, a light beam incident to an aperture diaphragm II (18) is filtered out of reflected light components, only scattered light signals are left, the scattered light beam is focused through a focusing lens II (19), a pinhole II (20) is arranged at a focus, a collimating lens (21) collimates the light beam and then enters a polarization grating (22) to split Raman scattered signals, a focusing lens III (23) and a focusing lens IV (24) are respectively arranged after + -1-level diffraction signals are respectively diffracted to focus light beams with different polarization states, and Raman spectrum information with different polarization states is recorded by a linear array PMT detector I (25) and a linear array PMT detector II (26).
10. The dark field confocal raman polarization spectrometry method based on vortex beams according to claim 9, wherein the wavelength of the laser beam emitted by the first laser (1) is 500-550 nm, and the wavelength of the laser beam emitted by the second laser (4) is 600-650 nm.
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