CN113341180A - Multi-mode measuring method and system based on near-field non-hole type probe - Google Patents
Multi-mode measuring method and system based on near-field non-hole type probe Download PDFInfo
- Publication number
- CN113341180A CN113341180A CN202110567943.2A CN202110567943A CN113341180A CN 113341180 A CN113341180 A CN 113341180A CN 202110567943 A CN202110567943 A CN 202110567943A CN 113341180 A CN113341180 A CN 113341180A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- probe
- laser
- measurement
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a multi-mode measuring method and a multi-mode measuring system based on a near-field holeless probe.A first optical fiber, a second optical fiber and a probe optical fiber are coupled and connected through a first optical fiber coupler, the first optical fiber is connected with a first laser, and the second optical fiber is connected with a first detector; the third optical fiber, the fourth optical fiber and the fifth optical fiber are coupled and connected through a second optical fiber coupler, the third optical fiber is connected with a second laser, the fourth optical fiber is connected with a second detector, and the fifth optical fiber is connected with a focusing lens group; the light output by the first optical fiber can only enter the probe optical fiber, and the light output by the probe optical fiber can only enter the second optical fiber; the light output by the third optical fiber can only enter the fifth optical fiber, and the light output by the fifth optical fiber can only enter the fourth optical fiber; the axis of the probe tip of the probe optical fiber is coaxial with the axis of the focusing lens group. The invention can realize various different measurement modes, and the measurement system uses the optical fiber as a carrier for light propagation, so that the whole light path is very flexible, and the light path debugging in the measurement process is convenient.
Description
Technical Field
The invention belongs to the field of micro-nano structure near-field optical imaging, morphology measurement and optical fiber waveguide circuits, and relates to a multi-mode measurement method and a multi-mode measurement system based on a near-field holeless probe.
Background
The appearance of the near-field optical technology breaks the bottleneck of the optical diffraction limit, and optical high-resolution measurement is realized. Researchers have successfully detected near-field evanescent waves of a sample by placing a probe within a hundred nanometer area of the sample surface, where the use of a suitable probe is critical to near-field measurements. According to different structures of the probe, the probe is mainly divided into a probe with a hole type and a probe without a hole type, wherein the probe without a hole type can realize higher measurement resolution, so that the probe is widely researched and applied.
At present, a common measurement method based on a non-hole type probe is a scattering type measurement optical path, generally, a beam of space light is irradiated on the probe tip and the sample, and then light scattered by the near field of the probe tip is collected at a far position and finally used for optical imaging. Although the method is suitable for measuring most samples, only one mode is available for exciting and collecting optical signals, so that the method has great limitation, limits the measurement of the optical properties of various samples and is not beneficial to the development of the field of near-field optical measurement. The scattering type measuring optical path is complex, the adjusting difficulty is high, and the integration is difficult. If the measurement problem can be solved, great scientific research convenience is brought, and the development of the measuring instrument is promoted.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides a multi-mode measuring method and a multi-mode measuring system based on a near-field non-hole type probe.
The technical scheme adopted by the invention is as follows:
a multi-mode measuring system based on a near-field holeless probe comprises a first laser, a first detector, a second laser, a second detector, a first optical fiber coupler, a second optical fiber coupler, a probe optical fiber, a focusing lens group, a first optical fiber, a second optical fiber, a third optical fiber, a fourth optical fiber and a fifth optical fiber;
the first optical fiber coupler and the second optical fiber coupler respectively comprise an input end, a first output end, a second output end, a first reflector, a beam splitter, a second reflector and a third reflector, the first reflector is arranged on a light path of incident light of the input end, the beam splitter and the first output end are both positioned on the light path of reflected light of the first reflector, one side of the beam splitter with a coating faces the first output end, the second reflector is positioned on the light path of reflected light of one side of the beam splitter with the coating, the third reflector is positioned on the light path of reflected light of the second reflector, the second output end is positioned on the light path of reflected light of the third reflector, and the inverse transmission ratio of the beam splitter is not less than 1;
the first optical fiber, the second optical fiber and the probe optical fiber are respectively connected with the input end, the second output end and the first output end of the first optical fiber coupler, the first optical fiber of the first optical fiber coupler is connected with the first laser, and the second optical fiber of the first optical fiber coupler is connected with the first detector;
the third optical fiber, the fourth optical fiber and the fifth optical fiber are respectively connected with the input end, the second output end and the first output end of the second optical fiber coupler, the third optical fiber is connected with the second laser, the fourth optical fiber is connected with the second detector, and the fifth optical fiber is connected with the focusing lens group;
the axis of the probe tip of the probe optical fiber is coaxial with the axis of the focusing lens group.
Preferably, the probe tip of the probe optical fiber is located at the focal point of the focusing lens group.
Preferably, the first laser and the second laser are identical.
Preferably, the first detector and the second detector are identical.
Preferably, the probe tip of the probe optical fiber has a tapered tip structure.
Preferably, the multi-mode measuring system based on the near-field holeless probe further comprises a three-dimensional moving platform, wherein the three-dimensional moving platform is provided with a clamping mechanism capable of moving in three dimensions, and one end of the probe optical fiber, which is provided with the probe tip, is installed on the clamping mechanism.
The invention also provides a multi-mode measuring method based on the near-field holeless probe, which is carried out by adopting the multi-mode measuring system based on the near-field holeless probe, and comprises the following steps:
arranging a sample to be detected between the probe tip and the focusing lens group;
and performing measurement by using at least one of the following measurement modes:
the first measurement mode is as follows: the first laser emits laser, the laser emitted by the first laser is emitted to the surface of a sample to be detected through the first optical fiber, the first optical fiber coupler and the probe needle point of the probe optical fiber, the probe needle point of the probe optical fiber receives reflected light reflected by the surface of the sample to be detected, and the reflected light enters the first detector through the probe optical fiber, the first optical fiber coupler and the second optical fiber;
and a second measurement mode: the first laser emits laser, the laser emitted by the first laser is emitted to the surface of a sample to be detected through the first optical fiber, the first optical fiber coupler and the probe needle point of the probe optical fiber, the fifth optical fiber receives transmission light of the sample to be detected through the focusing lens group, and the transmission light enters the second detector through the fifth optical fiber, the second optical fiber coupler and the fourth optical fiber;
and a third measurement mode: the second laser emits laser, the laser emitted by the second laser is emitted to the surface of the sample to be detected through the third optical fiber, the second optical fiber coupler, the fifth optical fiber and the focusing lens group, the focusing lens group receives reflected light reflected by the surface of the sample to be detected, and the reflected light enters the second detector through the fifth optical fiber, the second optical fiber coupler and the fourth optical fiber;
and a fourth measurement mode: the second laser emits laser, the laser emitted by the second laser is emitted to the surface of the sample to be detected through the third optical fiber, the second optical fiber coupler, the fifth optical fiber and the focusing lens group, the probe tip of the probe optical fiber receives the transmission light of the sample to be detected, and the transmission light enters the first detector through the probe optical fiber, the first optical fiber coupler and the second optical fiber.
Preferably, when the sample to be measured is a light-transmitting sample, the measurement is performed in a mode of performing a measurement mode one, a measurement mode two, a measurement mode three, a measurement mode four, a measurement mode one and a measurement mode two at the same time, or a measurement mode three and a measurement mode four at the same time.
Preferably: when the measurement mode II is adopted for measurement, the probe tip of the probe optical fiber is positioned on the focus of the focusing lens group;
when the measurement mode four is adopted for measurement, the probe tip of the probe optical fiber is positioned on the focal point of the focusing lens group.
Preferably, when the sample to be measured is a non-light-transmitting sample, the measurement is performed in the first measurement mode.
The invention has the following beneficial effects:
the multi-mode measuring system based on the near-field hole-free probe can realize various different measuring modes, and the physical and optical properties of a sample to be measured are researched from different aspects, wherein the various different measuring modes comprise: 1) using a first laser and a first detector, wherein near-field light on the surface of a sample to be detected is emitted from the probe tip, and collected light returns from the probe tip; 2) using a first laser and a second detector, wherein near-field light on the surface of the sample to be detected is emitted from the probe tip, and collected light is collected by an optical fiber below the sample to be detected; 3) using a second laser and a first detector, wherein near-field light on the surface of the sample to be detected enters the probe tip and the working position of the sample to be detected from the lower part of the sample to be detected, and collected light is collected by the probe tip; 4) and a second laser and a second detector are used, at the moment, near-field light on the surface of the sample to be detected enters the probe tip and the sample to be detected from the lower part of the sample to be detected, and collected light is collected by an optical fiber below the sample to be detected. The measuring system of the invention uses the first, second, third and fourth optical fibers as carriers of light propagation, so that the whole light path is very flexible, and the light path debugging in the measuring process is convenient.
Drawings
FIG. 1 is a schematic structural diagram of a near-field aperture-free probe-based multi-mode measurement system according to the present invention;
FIG. 2 is a schematic diagram of the operation of the fiber coupler of the present invention, in which the light entering from a can only exit from b, and the light entering from b can only exit from c;
FIG. 3 is a partially enlarged schematic view of the tip of the fiber optic probe according to the present invention;
FIG. 4 is a schematic structural diagram of a fiber pigtail connection lens assembly according to the present invention, in which light passes through the lens assembly and then emitted light energy converges at a point;
FIG. 5 is a near field optical image of grid scattering measured using a first laser and a first detector in an embodiment of the present invention;
FIG. 6 is a near field optical image of the grid transmission measured using a first laser and a second detector;
fig. 7 is a schematic diagram of an optical path structure of the optical fiber coupler used in the present invention.
In the figure: the optical fiber detection device comprises a first laser 1, a first detector 2, a second laser 3, a second detector 4, a first optical fiber 5, a second optical fiber 6, a third optical fiber 7, a fourth optical fiber 8, a first optical fiber coupler 9, a second optical fiber coupler 10, a probe optical fiber 11, a clamping mechanism 12, a sample to be detected 13, a lens group 14, a fifth optical fiber 15, a probe needle point 16, an optical fiber tail end 17, a focusing lens group 18, an optical fiber coupler 19, a beam splitter 20, a first reflector 21, a second reflector 22, a third reflector 23, an input end 24, a first output end 25 and a second output end 26.
Detailed Description
The invention will be described in detail and clearly with reference to the accompanying drawings and specific implementation methods.
Referring to fig. 1, 2 and 7, the multi-mode measuring system based on a near-field holeless probe of the present invention includes a first laser 1, a first detector 2, a second laser 3, a second detector 4, a first fiber coupler 9, a second fiber coupler 10, a probe fiber 11, a focusing lens group 18, a first fiber 5, a second fiber 6, a third fiber 7, a fourth fiber 8 and a fifth fiber 15; the first optical fiber coupler 9 and the second optical fiber coupler 10 each include an input end 24, a first output end 25, a second output end 26, a first reflecting mirror 21, a beam splitter 20, a second reflecting mirror 22, and a third reflecting mirror 23, the first reflecting mirror 21 is disposed on the light path of the light incident on the input end 24, the beam splitter 20 and the first output end 25 are both disposed on the light path of the light reflected by the first reflecting mirror 21, the side of the beam splitter 20 having a coating film faces the first output end 25, the second reflecting mirror 22 is disposed on the light path of the light reflected by the beam splitter 20, the third reflecting mirror 23 is disposed on the light path of the light reflected by the second reflecting mirror 22, the second output end 26 is disposed on the light path of the light reflected by the third reflecting mirror 23, the transmittance of the beam splitter 20 is not less than 1, that the transmittance of the beam splitter 20 is not less than the reflected light amount thereof, referring to fig. 1, 2, and 7, the arrow indicates the light path direction, the light incident from the a port (i.e. the input end) can be emitted to the b port (i.e. the first output end 25), the incident light from the b port (i.e. the first output end 25) exits from the c port (i.e. the second output end 26), and at this time, a small amount of light exits from the a port, which is useless light, and regardless of the inverse ratio of the beam splitter, 1:1, 3:1, 9:1, 99:1, 99.9:1, generally 9:1, the use requirement can be met; the first optical fiber 5, the second optical fiber 6 and the probe optical fiber 11 are respectively connected with the input end, the second output end and the first output end of the first optical fiber coupler 9, the first optical fiber 5 of the first optical fiber coupler 9 is connected with the first laser 1, and the second optical fiber 6 is connected with the first detector 2; a third optical fiber 7, a fourth optical fiber 8 and a fifth optical fiber 15 are respectively connected with the input end, the second output end and the first output end of the second optical fiber coupler 10, the third optical fiber 7 is connected with the second laser 3, the fourth optical fiber 8 is connected with the second detector 4, and the fifth optical fiber 15 is connected with the focusing lens group 18; (ii) a Referring to fig. 1, the axis of the probe tip 16 of the probe optical fiber 11 is coaxial with the axis of the focusing lens group 18.
Referring to fig. 1, 3 and 4, as a preferred embodiment of the present invention, a probe tip 16 of a probe optical fiber 11 is located at a focal point of a focusing lens group 18.
As a preferred embodiment of the invention, the first laser 1 and the second laser 3 are identical.
As a preferred embodiment of the invention, the first detector 2 and the second detector 4 are identical.
Referring to fig. 3, as a preferred embodiment of the present invention, the probe tip 16 of the probe optical fiber 11 has a tapered tip structure.
As a preferred embodiment of the present invention, the multi-mode measurement system based on the near-field holeless probe further includes a three-dimensional moving platform, the three-dimensional moving platform is provided with a clamping mechanism 12 capable of moving in three dimensions, and one end of the probe optical fiber 11 having the probe tip 16 is mounted on the clamping mechanism 12. The focusing lens group 18 is held stationary by a conventional fixture and mounted on the other side of the sample. The fixture 12 moves the adjustable tip with the probe tip 16 to the focus of the focusing lens assembly 18, and then the fixture 12 does not move and the focusing lens assembly 18 remains stationary. In a specific measurement of a sample, the probe 16 and the lens assembly 18 are stationary and the sample stage carries the sample for three-dimensional movement for measurement.
The invention also provides a multi-mode measuring method based on the near-field holeless probe, which is carried out by adopting the multi-mode measuring system based on the near-field holeless probe, and comprises the following steps:
referring to fig. 1, a sample to be measured 13 is disposed between a probe tip 16 and a focusing lens group 18;
the measurement is carried out by adopting at least one of the following measurement modes:
the first measurement mode is as follows: the first laser 1 emits laser, the laser emitted by the first laser 1 is emitted to the surface of a sample to be detected 13 through a first optical fiber 5, a first optical fiber coupler 9 and a probe needle point of a probe optical fiber 11, the probe needle point of the probe optical fiber 11 receives reflected light reflected by the surface of the sample to be detected 13, and the reflected light enters the first detector 2 through the probe optical fiber 11, the first optical fiber coupler 9 and the second optical fiber 6;
and a second measurement mode: the first laser 1 emits laser, the laser emitted by the first laser 1 is emitted to the surface of a sample to be detected 13 through a first optical fiber 5, a first optical fiber coupler 9 and a probe needle point of a probe optical fiber 11, a fifth optical fiber 15 receives transmission light of the sample to be detected 13 through a focusing lens group 18, and the transmission light enters a second detector 4 through the fifth optical fiber 15, a second optical fiber coupler 10 and a fourth optical fiber 8;
and a third measurement mode: the second laser 3 emits laser, the laser emitted by the second laser 3 is emitted to the surface of the sample to be detected 13 through the third optical fiber 7, the second optical fiber coupler 10, the fifth optical fiber 15 and the focusing lens group 18, the focusing lens group 18 receives reflected light reflected by the surface of the sample to be detected 13, and the reflected light enters the second detector 4 through the fifth optical fiber 15, the second optical fiber coupler 10 and the fourth optical fiber 8;
and a fourth measurement mode: the second laser 3 emits laser, the laser emitted by the second laser 3 is emitted onto the surface of the sample 13 to be detected through the third optical fiber 7, the second optical fiber coupler 10, the fifth optical fiber 15 and the focusing lens group 18, the probe tip of the probe optical fiber 11 receives the transmission light of the sample 13 to be detected, and the transmission light enters the first detector 2 through the probe optical fiber 11, the first optical fiber coupler 9 and the second optical fiber 6.
As a preferred embodiment of the present invention, when the sample 13 to be measured is a light-transmitting sample, the measurement is performed in a manner of performing the measurement in the first measurement mode, the second measurement mode, the third measurement mode, the fourth measurement mode, the first measurement mode and the second measurement mode simultaneously, or performing the measurement in the third measurement mode and the fourth measurement mode simultaneously.
As preferred embodiments of the present invention: when the measurement mode two is adopted for measurement, the probe tip 16 of the probe optical fiber 11 is positioned on the focus of the focusing lens group 18; when the measurement is performed in the measurement mode four, the probe tip 16 of the probe optical fiber 11 is located at the focal point of the focusing lens group 18.
As a preferred embodiment of the present invention, when the sample 13 to be measured is a non-light-transmitting sample, the measurement is performed in the first measurement mode.
The probe used by the invention is a non-hole type optical fiber probe, and four different measurement modes can be realized by selectively adopting a mode of emitting laser or collecting laser on the upper surface and the lower surface of a sample to be measured. The measuring system uses the optical fiber as a carrier for light propagation, so that the whole light path is very flexible, and the light path debugging in the measuring process is facilitated.
The technical scheme of the invention is that two identical lasers and detectors are respectively provided, emergent light of the lasers and collected light of the detectors can be emitted or collected from the upper surface or the lower surface of a sample, so that four different measurement modes can be obtained, wherein an optical fiber with a probe tip is always positioned on the upper surface of the sample, and an optical fiber with a tail end lens group is always positioned on the lower surface of the sample. When the selected laser and detector light paths are positioned on one side of the upper surface of the sample, near-field light on the surface of the sample is emitted from the probe tip, and collected light also returns from the probe tip; when the selected laser light path is positioned on the upper surface of the sample and the detector light path is positioned on the lower surface of the sample, the near-field light on the surface of the sample is emitted from the probe tip, and the collected light is collected by the optical fiber below the sample; when the selected laser light path is positioned on the lower surface of the sample and the detector light path is positioned on the upper surface of the sample, near-field light on the surface of the sample enters the probe tip and the sample from the lower part of the sample, and collected light is collected by the probe tip; when the selected optical paths of the laser and the detector are positioned on one side of the lower surface of the sample, the near-field light on the surface of the sample enters from the lower part of the sample to the probe tip and the sample, and the collected light is collected by the optical fiber below the sample.
The invention provides two methods for forming a focusing light spot at the probe tip in near-field optical measurement, and provides two ways for collecting near-field scattering signals, thereby realizing four different measurement modes. The light-transmitting sample to be measured can realize measurement imaging of near-field scattered light and transmitted light at the same time by the upper detector and the lower detector, and the signal-to-noise ratio of near-field signals can be improved. The measuring system adopts the optical fiber as a carrier for light propagation, is flexible to operate and is convenient to adjust and integrate.
Examples
As shown in fig. 1, the multi-mode measuring system based on the near-field holeless probe in this embodiment uses two identical lasers, i.e., a first laser 1 and a second laser 3, and two identical detectors, i.e., a first detector 2 and a first detector 4, and both the lasers and the detectors are selected and only one of the lasers and the detector is selected for use during operation. The laser and the detector are connected with optical fibers (5, 6, 7, 8), a first optical fiber coupler 9 couples and connects one ends of the first optical fiber 5, the second optical fiber 6 and the probe optical fiber 11 together, and a second optical fiber coupler 10 couples and connects one ends of a fourth optical fiber 8 and a fifth optical fiber 15 of the third optical fiber 7 together. The needle point of the tail end of the probe optical fiber 11 can realize three-dimensional movement under the driving of the clamping mechanism 12, the optical fiber tail end 17 of the fifth optical fiber 15 is connected with the lens group 14, and the lens group 14 can converge light at one point. The middle of the probe fiber 11 tail end tip and the lens group 14 is the placing area of the sample 13 to be measured, and the sample also divides the light path into the upper side and the lower side. Referring to fig. 2, the first fiber coupler 9 is required to ensure that light output from the first fiber 5 can only enter the probe fiber 11, and light output from the probe fiber 11 can only enter the second fiber 6; the second fiber coupler 10 is required to ensure that the light output from the third fiber 7 can only enter the fifth fiber 15 and the light output from the fifth fiber 15 can only enter the second fiber 8.
According to the difference of the selected laser and the detector, four measurement modes are provided, each mode fixes the used measurement light path, and the first mode is to use a first laser 1 and a first detector 2; the second is to use a first laser 1 and a second detector 4; the third is to use a second laser 3 and a first detector 2; the first is to use a second laser 3 and a second detector 4. The specific measurement mode of each mode is as follows:
1) using a first laser 1 and a first detector 2, wherein near-field light on the surface of the sample is emitted from the probe tip, and collected light also returns from the probe tip;
2) using a first laser 1 and a second detector 4, wherein near-field light on the surface of the sample is emitted from the probe tip, and collected light is collected by an optical fiber below the sample;
3) using a second laser 3 and a first detector 2, wherein near-field light on the surface of the sample enters from the lower part of the sample to the probe tip and the sample action position, and collecting light is collected by the probe tip;
4) a second laser 3 and a second detector 4 are used, near-field light on the surface of the sample enters from the lower part of the sample to the probe tip and the working position of the sample, and collected light is collected by an optical fiber below the sample.
In the second and third modes, the probe fiber 11 is used in conjunction with the fifth fiber 15, the central axes of the two fibers are coincident, and the tip of the tail end of the probe fiber 11 is adjusted to the upper focal point of the lens group 14, at which time the collection amount of the optical signal is the highest.
If the sample to be measured 13 is a light-transmitting sample, four different modes can be used for near-field optical measurement. The first is to use a first laser 1 and a first detector 2; the second is to use a first laser 1 and a second detector 4; the third is to use a second laser 3 and a first detector 2; the fourth is the use of a second laser 3 and a second detector 4. Wherein the first and second can be used simultaneously to measure both scattered and transmitted light, i.e. the first laser 1 and the second detector 2, 4; the third and fourth can be used simultaneously to measure both scattered and transmitted light, i.e. the second laser 3 and the first and second detectors 2, 4. The difference is that the incident light is irradiated from the upper or lower surface of the sample.
If the sample 13 to be measured is a non-light-transmitting sample, the first laser 1 and the first detector 2 are selected to be used together.
The invention aims at a grid structure, simultaneously carries out the near-field optical imaging tests of the first mode and the second mode, the central axes of the probe optical fiber 11 and the fifth optical fiber 15 are superposed, the tip of the tail end of the probe optical fiber 11 is adjusted to the upper focal point of the lens group 14, and a scattering near-field optical image (shown in figure 5) and a transmission near-field optical image (shown in figure 6) of a sample are obtained at the same time.
In summary, compared with the current near-field measurement optical path, the multi-mode measurement method and the multi-mode measurement system based on the near-field holeless probe according to the present invention have the following characteristics and advantages:
1) four different measurement modes can be realized, and the physical and optical properties of the sample to be measured can be researched from four different aspects.
2) The measurement resolution of each mode can reach the highest resolution of the current near-field optical measurement.
3) The optical fiber light path is adopted and matched with the optical fiber probe, so that the light path is very flexible, and great convenience is provided for experimental operation.
Claims (10)
1. A multi-mode measuring system based on a near-field holeless probe is characterized by comprising a first laser (1), a first detector (2), a second laser (3), a second detector (4), a first optical fiber coupler (9), a second optical fiber coupler (10), a probe optical fiber (11), a focusing lens group (18), a first optical fiber (5), a second optical fiber (6), a third optical fiber (7), a fourth optical fiber (8) and a fifth optical fiber (15);
the first optical fiber coupler (9) and the second optical fiber coupler (10) respectively comprise an input end (24), a first output end (25), a second output end (26), a first reflector (21), a beam splitter (20), a second reflector (22) and a third reflector (23), the first reflector (21) is arranged on a light path of incident light of the input end (24), the beam splitter (20) and the first output end (25) are both positioned on the light path of reflected light of the first reflector (21), one side of the beam splitter (20) with a coated film faces the first output end (25), the second reflector (22) is positioned on the light path of reflected light of one side of the beam splitter (20) with a coated film, the third reflector (23) is positioned on the light path of reflected light of the second reflector (22), the second output end (26) is positioned on the light path of reflected light of the third reflector (23), and the inverse transmission ratio of the beam splitter (20) is not less than 1;
the first optical fiber (5), the second optical fiber (6) and the probe optical fiber (11) are respectively connected with the input end, the second output end and the first output end of a first optical fiber coupler (9), the first optical fiber (5) of the first optical fiber coupler (9) is connected with a first laser (1), and the second optical fiber (6) is connected with a first detector (2);
a third optical fiber (7), a fourth optical fiber (8) and a fifth optical fiber (15) are respectively connected with the input end, the second output end and the first output end of the second optical fiber coupler (10), the third optical fiber (7) is connected with the second laser (3), the fourth optical fiber (8) is connected with the second detector (4), and the fifth optical fiber (15) is connected with the focusing lens group (18);
the axis of the probe tip (16) of the probe optical fiber (11) is coaxial with the axis of the focusing lens group (18).
2. A multi-mode measurement system based on a near-field holeless probe according to claim 1, characterized in that the probe tip (16) of the probe fiber (11) is located at the focus of the focusing lens group (18).
3. A multi-mode near-field holeless probe-based measurement system according to claim 1, characterized in that the first laser (1) and the second laser (3) are identical.
4. A multi-mode near-field holeless probe-based measurement system according to claim 1, characterized in that the first probe (2) and the second probe (4) are identical.
5. A multi-mode measurement system based on a near-field holeless probe according to claim 1, characterized in that the probe tip (16) of the probe fiber (11) is a tapered tip structure.
6. A multi-mode measuring system based on a near-field holeless probe according to any one of claims 1 to 5, characterized by further comprising a three-dimensional moving platform, wherein the three-dimensional moving platform is provided with a clamping mechanism (12) capable of moving in three dimensions, and one end of the probe optical fiber (11) with the probe tip (16) is mounted on the clamping mechanism (12).
7. A multi-mode measurement method based on a near-field holeless probe, which is performed by using the multi-mode measurement system based on the near-field holeless probe according to any one of claims 1 to 6, and comprises the following steps:
arranging a sample (13) to be detected between a probe tip (16) and a focusing lens group (18);
the measurement is carried out by adopting at least one of the following measurement modes:
the first measurement mode is as follows: the method comprises the following steps that a first laser (1) emits laser, the laser emitted by the first laser (1) is emitted to the surface of a sample (13) to be detected through a probe needle point of a first optical fiber (5), a first optical fiber coupler (9) and a probe optical fiber (11), the probe needle point of the probe optical fiber (11) receives reflected light reflected by the surface of the sample (13) to be detected, and the reflected light enters a first detector (2) through the probe optical fiber (11), the first optical fiber coupler (9) and a second optical fiber (6);
and a second measurement mode: the laser device comprises a first laser (1), a fifth optical fiber (15), a focusing lens group (18), a second optical fiber coupler (10), a fourth optical fiber (8), a third optical fiber and a fourth optical fiber, wherein the first laser (1) emits laser, the laser emitted by the first laser (1) is emitted to the surface of a sample (13) to be detected through a probe needle point of the first optical fiber (5), the first optical fiber coupler (9) and the probe optical fiber (11), the fifth optical fiber (15) receives transmission light of the sample (13) to be detected, and the transmission light enters a second detector (4) through the fifth optical fiber (15), the second optical fiber coupler (10) and the fourth optical fiber (8);
and a third measurement mode: the second laser (3) emits laser, the laser emitted by the second laser (3) is emitted to the surface of the sample to be detected (13) through the third optical fiber (7), the second optical fiber coupler (10), the fifth optical fiber (15) and the focusing lens group (18), the focusing lens group (18) receives reflected light reflected by the surface of the sample to be detected (13), and the reflected light enters the second detector (4) through the fifth optical fiber (15), the second optical fiber coupler (10) and the fourth optical fiber (8);
and a fourth measurement mode: the second laser (3) emits laser, the laser emitted by the second laser (3) is emitted to the surface of a sample to be detected (13) through the third optical fiber (7), the second optical fiber coupler (10), the fifth optical fiber (15) and the focusing lens group (18), the probe tip of the probe optical fiber (11) receives the transmission light of the sample to be detected (13), and the transmission light enters the first detector (2) through the probe optical fiber (11), the first optical fiber coupler (9) and the second optical fiber (6).
8. The multi-mode measurement method based on the near-field holeless probe according to claim 7, wherein when the sample (13) to be measured is a transparent sample, the measurement is performed in a manner that a first measurement mode, a second measurement mode, a third measurement mode, a fourth measurement mode, a first measurement mode and a second measurement mode are performed simultaneously, or a third measurement mode and a fourth measurement mode are performed simultaneously.
9. A multi-mode measurement method based on a near-field holeless probe according to claim 7 or 8, characterized in that:
when the measurement mode II is adopted for measurement, the probe tip (16) of the probe optical fiber (11) is positioned on the focus of the focusing lens group (18);
when the measurement is performed in the fourth measurement mode, the probe tip (16) of the probe optical fiber (11) is located at the focal point of the focusing lens group (18).
10. The multi-mode measurement method based on a near-field holeless probe according to claim 7, characterized in that when the sample (13) to be measured is a non-transparent sample, the measurement is performed in the first measurement mode.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110567943.2A CN113341180B (en) | 2021-05-24 | 2021-05-24 | Multi-mode measurement method and measurement system based on near-field non-hole probe |
| PCT/CN2021/100992 WO2022246933A1 (en) | 2021-05-24 | 2021-06-18 | Multi-mode measurement method and measurement system based on near-field non-porous probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110567943.2A CN113341180B (en) | 2021-05-24 | 2021-05-24 | Multi-mode measurement method and measurement system based on near-field non-hole probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113341180A true CN113341180A (en) | 2021-09-03 |
| CN113341180B CN113341180B (en) | 2023-07-18 |
Family
ID=77471216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110567943.2A Active CN113341180B (en) | 2021-05-24 | 2021-05-24 | Multi-mode measurement method and measurement system based on near-field non-hole probe |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN113341180B (en) |
| WO (1) | WO2022246933A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115718205A (en) * | 2022-11-24 | 2023-02-28 | 南开大学 | Method for realizing molecular junction conductivity measurement by using coated tapered optical fiber |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201224460A (en) * | 2010-12-15 | 2012-06-16 | Nat Applied Res Laboratoires | Near-field scanning optical microscope |
| CN107589278A (en) * | 2016-07-08 | 2018-01-16 | 中国科学院理化技术研究所 | Reflective polarization-modulator near-field scanning optical microscope system based on optical fiber probe |
| JP2018054353A (en) * | 2016-09-27 | 2018-04-05 | 日本分光株式会社 | Near-field microscope |
| CN108873283A (en) * | 2018-05-04 | 2018-11-23 | 中国科学院上海应用物理研究所 | A kind of full spectrum dark field microscope of multi-mode and its application based on the building of super continuous wave laser |
| CN109239404A (en) * | 2018-08-23 | 2019-01-18 | 中国科学院物理研究所 | The holeless near field optic micro imaging method of optical path reflecting interferometer is total to based on all -fiber |
| CN209542447U (en) * | 2018-12-31 | 2019-10-25 | 华中光电技术研究所（中国船舶重工集团有限公司第七一七研究所） | A kind of scattering formula near field micro optical system based on transmission method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3249419B2 (en) * | 1997-03-12 | 2002-01-21 | セイコーインスツルメンツ株式会社 | Scanning near-field optical microscope |
| JP2004024888A (en) * | 2003-07-30 | 2004-01-29 | Olympus Corp | Optical scanning probe apparatus |
| CN101799482A (en) * | 2010-01-28 | 2010-08-11 | 哈尔滨工业大学 | Nano operating device with near-field optical tweezers and AFM probe |
| JP6014502B2 (en) * | 2013-01-25 | 2016-10-25 | 株式会社日立製作所 | Scanning probe microscope and sample observation method using the same |
| CN109387903B (en) * | 2017-08-09 | 2020-11-27 | 中芯国际集成电路制造（天津）有限公司 | Optical path coupling system and optical measurement system |
| CN110568224A (en) * | 2018-06-05 | 2019-12-13 | 中国科学院长春应用化学研究所 | Composite near-field optical probe capable of simultaneously realizing high optical signal flux and high resolution and preparation method thereof |
-
2021
- 2021-05-24 CN CN202110567943.2A patent/CN113341180B/en active Active
- 2021-06-18 WO PCT/CN2021/100992 patent/WO2022246933A1/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201224460A (en) * | 2010-12-15 | 2012-06-16 | Nat Applied Res Laboratoires | Near-field scanning optical microscope |
| US20120159677A1 (en) * | 2010-12-15 | 2012-06-21 | National Applied Research Laboratories | Near-field scanning optical microscope |
| CN107589278A (en) * | 2016-07-08 | 2018-01-16 | 中国科学院理化技术研究所 | Reflective polarization-modulator near-field scanning optical microscope system based on optical fiber probe |
| JP2018054353A (en) * | 2016-09-27 | 2018-04-05 | 日本分光株式会社 | Near-field microscope |
| CN108873283A (en) * | 2018-05-04 | 2018-11-23 | 中国科学院上海应用物理研究所 | A kind of full spectrum dark field microscope of multi-mode and its application based on the building of super continuous wave laser |
| CN109239404A (en) * | 2018-08-23 | 2019-01-18 | 中国科学院物理研究所 | The holeless near field optic micro imaging method of optical path reflecting interferometer is total to based on all -fiber |
| CN209542447U (en) * | 2018-12-31 | 2019-10-25 | 华中光电技术研究所（中国船舶重工集团有限公司第七一七研究所） | A kind of scattering formula near field micro optical system based on transmission method |
Non-Patent Citations (1)
| Title |
|---|
| 祝生祥: "传统光学显微镜与近场光学显微镜", 光学仪器 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115718205A (en) * | 2022-11-24 | 2023-02-28 | 南开大学 | Method for realizing molecular junction conductivity measurement by using coated tapered optical fiber |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022246933A1 (en) | 2022-12-01 |
| CN113341180B (en) | 2023-07-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104006891B (en) | Nanoscale light field phase distribution measuring instrument | |
| JP2911877B2 (en) | Fiber detector for detecting scattered light or fluorescence of suspension | |
| KR100853739B1 (en) | Optical fiber probe, optical detection device, and optical detection method | |
| KR100262878B1 (en) | Near-field optical microscope and the measuring method | |
| WO2017000364A1 (en) | Probe sensing method and apparatus based on optical beam scanning confocal detection technique | |
| CN103940796A (en) | Novel multi-angle and multi-mode quick switching circular optical illumination microscopic imaging system | |
| CN101398294B (en) | Compact all optical fiber displacement interferometer | |
| CN100337088C (en) | All-fiber displacement interference instrument | |
| CN113341180B (en) | Multi-mode measurement method and measurement system based on near-field non-hole probe | |
| CN104990499A (en) | Probe sensing apparatus based on conjugation focus tracking detection technology | |
| CN113916891B (en) | Dark field confocal Brillouin microscopic measurement device and method based on optical fiber annular light beam | |
| CN112577418A (en) | Orthogonal polarization sorting optical acquisition device and application thereof | |
| CN208126029U (en) | A kind of OCT optics 4f beam-expanding system based on gradual index lens | |
| US9080937B2 (en) | Apparatus and a method for investigating a sample by means of several investigation methods | |
| JPH0712826A (en) | Interferometer, optical scanning tunnel microscope, and optical probe | |
| CN112595860A (en) | Low-temperature near-field optical microscope based on optical fiber | |
| CN108388016A (en) | A kind of OCT optics 4f beam-expanding systems based on gradual index lens | |
| CN109799368B (en) | Double-probe atomic force microscope | |
| CN203299123U (en) | Fourier spectrometer based on micro electro mechanical system | |
| CN112857262A (en) | Improved oblique illumination type color confocal measurement system and detection method | |
| CN209132156U (en) | Optical coherence tomography based on digital micromirror device | |
| CN102261954A (en) | Method for measuring light intensity distribution of near field by using nanoparticle arrangement shape | |
| CN214427470U (en) | Low-temperature near-field optical microscope based on optical fiber | |
| CN107101941B (en) | A kind of Terahertz near field micro-imaging detector | |
| CN104849237A (en) | Refractive index measuring device based on wavelength modulation SPR (surface plasmon resonance) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |