CN107101941B - A kind of Terahertz near field micro-imaging detector - Google Patents
A kind of Terahertz near field micro-imaging detector Download PDFInfo
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- CN107101941B CN107101941B CN201710206659.6A CN201710206659A CN107101941B CN 107101941 B CN107101941 B CN 107101941B CN 201710206659 A CN201710206659 A CN 201710206659A CN 107101941 B CN107101941 B CN 107101941B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
Abstract
The invention discloses a kind of Terahertz micro-imaging detectors, including plate and cuboid paraboloidal mirror, incident parabolic microscope group, plane of reflection microscope group and the transmission paraboloid microscope group in input path and the poly- popin face microscope group on reflected light path, exit plane microscope group and outgoing paraboloidal mirror are disposed on the plate, paraboloidal mirror is provided in the incident parabolic microscope group, it is provided with transmission paraboloidal mirror in the transmission paraboloid microscope group, is provided with metallic nano detecting probe in front of the cuboid paraboloidal mirror；The present invention uses bilinear guide rail mobile ellipse shape plane mirror, realize that two kinds of measurement methods switch rapidly, THz wave can converge between needle point and sample, to realize the combination of two kinds of measurement methods, the measurement accuracy that ensure that the reflective near field micro-imaging of Terahertz, Terahertz transmission-type near field micro-imaging with this solves the combinatorial problem of different measurement methods in the case of different samples.
Description
Technical field
The present invention, which relates to, belongs to precision instrument technical field, is a kind of THz wave by elliptic plane microscope group mobile handoff
Form the device of two kinds of measurement in a closed series modes of reflection and transmission.
Background technique
It is limited by diffraction limit, the resolution ratio of traditional terahertz imaging is only in submillimeter magnitude, it is difficult to meet semiconductor
Requirements at the higher level of the fields such as material, biological cell detection to terahertz imaging resolution ratio.In order to break through diffraction limit, obtain higher
Resolution ratio, it is necessary to use Terahertz near field micro-imaging technique.
The Terahertz near field micro-imaging scheme reported earliest is based on physical pore size method, by AT&T Labs in 1998
It proposes, is developed so far, optimum resolution reaches 3 μm.For defects, the U.S. Rensselaer reason such as cut-off effect and aperture transmitance be low
Engineering college's pioneering dynamic aperture shot in 2000, obtains 3 μm of resolution ratio.2003, the institute was using metal nano needle tip as scattered
Probe is penetrated, nanoscale imaging resolution is realized.TU Delft Polytechnics is micro- using electro-optic sampling method progress near field
10 μm of resolution ratio is realized in imaging in 0.1-2.5THz range.It is straight that German Protemics company using micro photo electric leads probe
Detection is connect, 3 μm of resolution ratio are obtained.2010, Rice Univ USA was micro- using slab waveguide structures progress Terahertz near field
Imaging, and obtained resolution ratio.But the problem of being limited to manufacture craft, both near field micro-imaging schemes are not broken through so far
To nanoscale.2008, Pohang University, South Korea was visited in terahertz time-domain spectroscopy system-based using atomic force microscope
Needle, which is realized, is imaged the nanoscale of biological cell.The same year, in German biochemistry Marx Planck research institute and nano science
Heart R.Hillenbran and H.-G. von Ribbeck et al. is utilized respectively Michael's interferometer system and terahertz time-domain spectroscopy
System realizes nanoscale imaging in conjunction with atomic force microscope probe, in terahertz wave band.
Different measuring mechanisms, which is used separately, in some Terahertz near field micro-imaging detectors realizes different measurement sides
Formula, the disadvantage is that it is at high cost, inconvenient to use, measurement efficiency is low.There are also the uses of Terahertz near field micro-imaging detector
The advantages of mode of three-dimensional trim holder and test platform realizes three kinds of measurements, this mode is easy for group in laboratory conditions
Dress, measurement accuracy are very high.It is that laboratory environment is lower mostly for this mechanism is current to be used, and because adjustment link is more,
When actual measurement, this mechanism measurement efficiency is lower.
Summary of the invention
It is an object of the present invention to, the shortcomings that overcoming the above-mentioned prior art, provide it is a kind of can be by combining come very fast
Realize that plane of incidence microscope group mobile handoff forms the detector of two kinds of measurement in a closed series modes of reflection and transmission, using linear guide and
Slider guide mode ensures the accuracy measured, so that it is guaranteed that the rapidity of two kinds of measurement methods and accurate in identical platform
Property.
The technical solution adopted by the present invention to solve the technical problems is: a kind of Terahertz micro-imaging detector, including
Plate and cuboid paraboloidal mirror, be disposed on the plate incident parabolic microscope group in input path,
Plane of reflection microscope group and transmission paraboloid microscope group and poly- popin face microscope group on reflected light path, exit plane microscope group and go out
Paraboloidal mirror is penetrated, paraboloidal mirror is provided in the incident parabolic microscope group, is provided in the plane of reflection microscope group anti-
Plane mirror is penetrated, transmission paraboloidal mirror is provided in the transmission paraboloid microscope group, is set in front of the cuboid paraboloidal mirror
It is equipped with metallic nano detecting probe, the poly- wave plane mirror, the exit plane mirror are provided in the poly- popin face microscope group
It is provided with the exit plane mirror in group, the straight line being located in front of transmission paraboloid microscope group is installed on the plate and is led
Rail is equipped with plane of incidence microscope group in the linear guide, is provided with plane of incidence mirror in the plane of incidence microscope group.
A kind of Terahertz micro-imaging detector, plate include lower layer's plate and by left support frame and the right side
Support frame is fixed on the upper panel on lower layer's plate, the cuboid paraboloidal mirror, plane of reflection microscope group, poly- wave plane mirror
Group and exit plane microscope group are mounted in upper panel, and the outgoing paraboloidal mirror, transmission paraboloid microscope group, metal nano are visited
Needle, incident parabolic microscope group and linear guide are mounted on lower layer's plate.
A kind of Terahertz near field micro-imaging detector, plane of reflection microscope group include plane of reflection mirror fixed plate
And the plane of reflection mirror support plate in plane of reflection mirror fixed plate, the plane of reflection mirror are mounted on by T-type spring leaf
Several holding screws are installed in support plate, are fixed with steel ball between the holding screw and plane of reflection mirror fixed plate.
A kind of Terahertz near field micro-imaging detector, poly- popin face microscope group include poly- wave plane mirror support plate
And the poly- wave plane mirror fixed plate in poly- wave plane mirror support plate, the poly- wave plane mirror are mounted on by T-type spring leaf
Several holding screws are installed in support plate, are fixed with steel ball between the holding screw and poly- wave plane mirror fixed plate.
A kind of Terahertz near field micro-imaging detector, exit plane microscope group include exit plane mirror support plate
And the exit plane mirror fixed plate in exit plane mirror support plate, the exit plane mirror are mounted on by T-type spring leaf
Several holding screws are installed in support plate, are fixed with steel ball between the holding screw and exit plane mirror fixed plate.
A kind of Terahertz near field micro-imaging detector, transmission paraboloid microscope group include transmission paraboloidal mirror branch
Fagging and by T-type spring leaf be mounted on transmission paraboloidal mirror support plate on transmission paraboloidal mirror fixed plate, described is saturating
It penetrates in paraboloidal mirror support plate and several holding screws is installed, it is solid between the holding screw and transmission paraboloidal mirror fixed plate
Surely there is steel ball.
A kind of Terahertz near field micro-imaging detector, plane of incidence microscope group include plane of incidence mirror support plate
And the plane of incidence mirror fixed plate in plane of incidence mirror support plate, the plane of incidence mirror are mounted on by T-type spring leaf
Several holding screws are installed in support plate, are fixed with steel ball between the holding screw and plane of incidence mirror fixed plate.
A kind of Terahertz near field micro-imaging detector, linear guide include fixed plate, are fixed by screw
Guide pad at left and right sides of fixed plate and the sliding block being arranged between guide pad.
A kind of Terahertz near field micro-imaging detector, incident parabolic microscope group include that incident parabolic mirror is solid
Fixed board and the paraboloidal mirror and incident parabolic mirror support plate for being mounted on incident parabolic mirror fixed plate tow sides, it is described
T-type spring leaf, the incident parabolic mirror are connected between incident parabolic mirror support plate and incident parabolic mirror fixed plate
Several holding screws are installed in support plate, are fixed with steel ball between the holding screw and incident parabolic mirror fixed plate.
The beneficial effects of the present invention are: the reflective near field micro-imaging of Terahertz and Terahertz transmission-type can be achieved in the present invention
The combinations of two kinds of measurement methods of near field micro-imaging ensure that the rigidity and optical path of overall mechanism using double-layer plate
Stability；Using double guide rail mobile ellipse shape plane mirrors, realize that two kinds of measurement methods switch rapidly, THz wave can converge to
Between needle point and sample, thus realize two kinds of measurement methods combination, with this ensure that the reflective near field micro-imaging of Terahertz,
The measurement accuracy of Terahertz transmission-type near field micro-imaging, the combination for solving different measurement methods in the case of different samples are asked
Topic.
Detailed description of the invention
Fig. 1 is reflective instrumentation plan of the invention；
Fig. 2 is transmission-type instrumentation plan of the invention；
Fig. 3 is the schematic three dimensional views of plane of reflection microscope group of the present invention；
Fig. 4 is the schematic three dimensional views of poly- popin face of the invention microscope group；
Fig. 5 is the schematic three dimensional views of exit plane microscope group of the present invention；
Fig. 6 is the schematic three dimensional views of present invention transmission paraboloid microscope group；
Fig. 7 is the schematic three dimensional views of plane of incidence microscope group of the present invention；
Fig. 8 is the schematic three dimensional views of linear guide of the present invention；
Fig. 9 is the schematic three dimensional views of incident parabolic microscope group of the present invention.
Each appended drawing reference are as follows: 1-upper panel, 2-cuboid paraboloidal mirrors, 3-plane of reflection microscope groups, 3.1-reflections
Plane mirror supporting plate, 3.2-holding screws, 3.3-screws, 3.4-steel balls, 3.5-plane of reflection mirror fixed plates, 3.6-is anti-
Penetrate plane mirror, 3.7-screws, 3.8-T-type spring leafs, 4-poly- popin face microscope groups, 4.1-holding screws, 4.2-poly- popin faces
Mirror support plate, 4.3-screws, 4.4-T-type spring leafs, 4.5-screws, 4.6-poly- wave plane mirror fixed plates, 4.7-steel balls,
4.8-poly- wave plane mirrors, 5-exit plane microscope groups, 5.1-screws, 5.2-screws, 5.3-T-type spring leafs, 5.4-tightenings
Screw, 5.5-exit plane mirror support plates, 5.6-exit plane mirrors, 5.7-steel balls, 5.8-exit plane mirror fixed plates,
6-screws, 7-right support frames, 8-outgoing paraboloidal mirrors, 9-lower layer's plates, 10-transmission paraboloid microscope groups, 10.1-transmissions
Paraboloidal mirror, 10.2-sunk screws, 10.3-transmission paraboloidal mirror fixed plates, 10.4-steel balls, 10.5-screws, 10.6-
T-type spring leaf, 10.7-screws, 10.8-transmission paraboloidal mirror support plates, 10.9-holding screws, 11-metal nanos are visited
Needle, 12-samples, 13-plane of incidence microscope groups, 13.1-steel balls, 13.2-plane of incidence mirrors, 13.3-plane of incidence mirrors are fixed
Plate, 13.4-screws, 13.5-plane of incidence mirror support plates, 13.6-holding screws, 13.7-screws, 13.8-T-type springs
Piece, 14-linear guides, 14.1-sliding blocks, 14.2-guide pads, 14.3-screws, 14.4-fixed plates, 15-screws,
16-screws, 17-left support frames, 18-incident parabolic microscope groups, 18.1-holding screws, 18.2-incident parabolic mirror branch
Fagging, 18.3-screws, 18.4-sunk screws, 18.5-steel balls, 18.6-paraboloidal mirrors, 18.7-incident parabolic mirrors are solid
Fixed board, 18.8-screws, 18.9-T-type spring leafs.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing and specific implementation
Example is described in further details the present invention.
It is shown in reference picture 1, Fig. 2, the invention discloses the Terahertz near field of a kind of reflective and transmission-type combination it is micro- at
As detector, solves previous non-focus optical system and participate in entire optical system imaging, the problem being but unable to test, it includes one
Terahertz micro-imaging detector, including plate and cuboid paraboloidal mirror 2 are planted, is disposed with and is located on the plate
Incident parabolic microscope group 18, plane of reflection microscope group 3 in input path and transmission paraboloid microscope group 10 and it is located at reflected light path
On poly- popin face microscope group 4, exit plane microscope group 5 and outgoing paraboloidal mirror 8, be provided in the incident parabolic microscope group 18
Paraboloidal mirror 18.6 is provided with plane of reflection mirror 3.6, the transmission paraboloid microscope group 10 in the plane of reflection microscope group 3
On be provided with transmission paraboloidal mirror 10.1, be provided with metallic nano detecting probe 11 and sample in front of the cuboid paraboloidal mirror 2
12, it is provided with the poly- wave plane mirror 4.8 in the poly- popin face microscope group 4, is provided in the exit plane microscope group 5
The exit plane mirror 5.6 is equipped on the plate by screw 15 and screw 16 and is located at transmission paraboloid microscope group 10
The linear guide 14 in front is equipped with plane of incidence microscope group 13, the plane of incidence microscope group 13 in the linear guide 14
On be provided with plane of incidence mirror 13.2.
Wherein plate includes lower layer's plate 9 and is fixed on lower layer's plate 9 by left support frame 17 and right support frame 7
Upper panel 1, the left support frame 17, right support frame 7 are fastenedly connected with lower layer plate 9, upper panel 1 by screw 6, institute
Cuboid paraboloidal mirror 2, plane of reflection microscope group 3, poly- popin face microscope group 4 and the exit plane microscope group 5 stated are mounted on upper panel 1
On, the outgoing paraboloidal mirror 8, transmission paraboloid microscope group 10, metallic nano detecting probe 11, incident parabolic microscope group 18 and straight line
Guide rail 14 is mounted on lower layer's plate 9.
Plane of incidence microscope group 13 is moved to by proximal end by linear guide 14 when use and cuts THz wave optical path, Terahertz
Wave successively passes through incident parabolic microscope group 18, plane of incidence microscope group 13, plane of reflection microscope group 3 and cuboid paraboloidal mirror 2, focuses
To between metallic nano detecting probe 11 and sample 12, then passing through cuboid paraboloidal mirror 2, poly- popin face microscope group 4, exit plane mirror
Group 5 and outgoing paraboloidal mirror 8 reflect, and the reflective near field micro-imaging measurement of Terahertz can be completed.
THz wave optical path is cut out by the way that plane of incidence microscope group 13 is moved to distal end, THz wave is successively thrown by incident
Object plane microscope group 18 and transmission paraboloid microscope group 10, focus between metallic nano detecting probe 11 and sample 12, then pass through cuboid
Paraboloidal mirror 2, poly- popin face microscope group 4, exit plane microscope group 5 and outgoing paraboloidal mirror 8 reflect, Terahertz transmission-type near field
Micro-imaging measurement.
Plane of reflection microscope group 3 is fixed on 1 in upper panel, when plane of incidence microscope group 13 is moved to proximal end incision THz wave
When optical path, THz wave is reflected into plane of incidence microscope group 13 by incident parabolic microscope group 18, and then plane of incidence microscope group 13 will too
Hertz wave is reflected up to plane of reflection microscope group 3, and THz wave is reflected into cuboid paraboloid by further plane of reflection microscope group 3
On the paraboloid of mirror 2, THz wave is by the parabolic reflective focusing of cuboid paraboloidal mirror 2 to metallic nano detecting probe 11 and sample
Between 12, reflection type optical path is formd at this time；When plane of incidence microscope group 13, which is moved to distal end, cuts out THz wave optical path, terahertz
Hereby wave is reflected into transmission paraboloid microscope group 10 by incident parabolic microscope group 18, and THz wave needs not move through plane of reflection microscope group 3, and
It is directly to be penetrated sample 12 by the reflection of transmission paraboloid microscope group 10 and focused between metallic nano detecting probe 11 and sample 12, shape at this time
At transmission-type optical path.
Plane of incidence microscope group 13 of the present invention is fixed on the sliding block 14.1 of linear guide 14, is moved by sliding block 14.1
The dynamic incision of plane of incidence microscope group 13 cuts out THz wave optical path, uses the mobile combination gear of linear guide to sliding block in this example
Plate fixed form, that is, the reliability and accuracy of optical path when guaranteeing incision and removing THz wave optical path.
As shown in figure 3, the plane of reflection microscope group 3 is including plane of reflection mirror fixed plate 3.5 and passes through T-type spring leaf
3.8 are mounted on the plane of reflection mirror support plate 3.1 in plane of reflection mirror fixed plate 3.5, and the plane of reflection mirror 3.6 passes through viscous
Glue and plane of reflection mirror fixed plate 3.5 are fixed, and 3.8 one side of T-type spring leaf is fixed by two screws 3.3 with plane of reflection mirror
Plate 3.5 connects, and is on the other hand connect by two screws 3.7 with plane of reflection mirror support plate 3.1, makes plane of reflection mirror fixed plate
Elastic connection is formed between 3.5 and plane of reflection mirror support plate 3.1, if being equipped in the plane of reflection mirror support plate 3.1
Dry holding screw 3.2 is fixed with steel ball 3.4 between the holding screw 3.2 and plane of reflection mirror fixed plate 3.5, three tight
Determine screw 3.2 and is fixed on by being threadably mounted at three angles of plane of reflection mirror support plate 3.1, three steel balls 3.4 by viscose glue
In plane of reflection mirror fixed plate 3.5, three holding screws 3.2 lean with corresponding three steel balls 3.4, turn three with spanner
Holding screw 3.2 is to different depth and jacks up steel ball 3.4, realizes that the pitch angle of plane of reflection mirror 3.6 is adjusted.
As shown in figure 4, the poly- popin face microscope group 4 is including poly- wave plane mirror support plate 4.2 and passes through T-type spring leaf
4.4 are mounted on the poly- wave plane mirror fixed plate 4.6 in poly- wave plane mirror support plate 4.2, and the poly- wave plane mirror 4.8 passes through viscous
Glue and poly- wave plane mirror fixed plate 4.6 are fixed, and 4.4 one side of T-type spring leaf is fixed by two screws 4.5 and poly- wave plane mirror
Plate 4.6 connects, and is on the other hand connect by two screws 4.3 with poly- wave plane mirror support plate 4.2, makes poly- wave plane mirror fixed plate
Elastic connection is formed between 4.6 and poly- wave plane mirror support plate 4.2, if being equipped in the poly- wave plane mirror support plate 4.2
Dry holding screw 4.1 is fixed with steel ball 4.7 between the holding screw 4.1 and poly- wave plane mirror fixed plate 4.6, three tight
Determine screw 4.1 and is fixed on by being threadably mounted at three angles of poly- wave plane mirror support plate 4.2, three steel balls 4.7 by viscose glue
In poly- wave plane mirror fixed plate 4.6, three holding screws 4.1 lean with corresponding three steel balls 4.7, turn three with spanner
Holding screw 4.1 is to different depth and jacks up steel ball 4.7, realizes that the pitch angle of poly- wave plane mirror 4.8 is adjusted.
As shown in figure 5, the exit plane microscope group 5 is including exit plane mirror support plate 5.5 and passes through T-type spring leaf
5.3 are mounted on the exit plane mirror fixed plate 5.8 in exit plane mirror support plate 5.5, and the exit plane mirror 5.6 passes through viscous
Glue and exit plane mirror fixed plate 5.8 are fixed, and 5.3 one side of T-type spring leaf is fixed by two screws 5.1 with exit plane mirror
Plate 5.8 connects, and is on the other hand connect by two screws 5.2 with exit plane mirror support plate 5.5, makes to be emitted plane mirror fixed plate
Elastic connection is formed between 5.8 and exit plane mirror support plate 5.5, if being equipped in the exit plane mirror support plate 5.5
Dry holding screw 5.4 is fixed with steel ball 5.7 between the holding screw 5.4 and exit plane mirror fixed plate 5.8, three tight
Determine screw 5.4 and is fixed on by being threadably mounted at three angles of exit plane mirror support plate 5.5, three steel balls 5.7 by viscose glue
In exit plane mirror fixed plate 5.8, three holding screws 5.4 lean with corresponding three steel balls 5.7, turn three with spanner
Holding screw 5.4 is to different depth and jacks up steel ball 5.7, realizes that the pitch angle of exit plane mirror 5.6 is adjusted.
As shown in fig. 6, the transmission paraboloid microscope group 10 is including transmission paraboloidal mirror support plate 10.8 and passes through T-type
Spring leaf 10.6 is mounted on the transmission paraboloidal mirror fixed plate 10.3 in transmission paraboloidal mirror support plate 10.8, and the transmission is thrown
Object plane mirror 10.1 is fixed by sunk screw 10.2 and transmission paraboloidal mirror fixed plate 10.3, on the one hand T-type spring leaf 10.6 leads to
It crosses two screws 10.5 to connect with transmission paraboloidal mirror fixed plate 10.3, on the other hand passes through two screws 10.7 and transmission parabolic
Face mirror support plate 10.8 connects, and makes to transmit paraboloidal mirror fixed plate 10.3 and transmit to form bullet between paraboloidal mirror support plate 10.8
Property connection, several holding screws 10.9, the holding screw are installed in the transmission paraboloidal mirror support plate 10.8
Steel ball 10.4 is fixed between 10.9 and transmission paraboloidal mirror fixed plate 10.3, three holding screws 10.9 are by being threadably mounted at
Three angles of paraboloidal mirror support plate 10.8 are transmitted, three steel balls 10.4 are fixed on plane of incidence mirror fixed plate 13.3 by viscose glue
On, three holding screws 10.9 lean with corresponding three steel balls 10.4, turn three holding screws 10.9 to not with spanner
Same depth simultaneously jacks up steel ball 10.4, realizes that the pitch angle of transmission paraboloidal mirror 10.1 is adjusted.
As shown in fig. 7, the plane of incidence microscope group 13 is including plane of incidence mirror support plate 13.5 and passes through T-type spring
Piece 13.8 is mounted on the plane of incidence mirror fixed plate 13.3 in plane of incidence mirror support plate 13.5, the plane of incidence mirror 13.2
Fixed by viscose glue and plane of incidence mirror fixed plate 13.3,13.8 one side of T-type spring leaf passes through two screws 13.4 and incidence
Plane mirror fixed plate 13.3 connects, and is on the other hand connect with plane of incidence mirror support plate 13.5 by two screws 13.7, make into
It penetrates between plane mirror fixed plate 13.3 and plane of incidence mirror support plate 13.5 and forms elastic connection, the plane of incidence mirror support
Several holding screws 13.6 are installed on plate 13.5, it is solid between the holding screw 13.6 and plane of incidence mirror fixed plate 13.3
Surely there is a steel ball 13.1, three holding screws 13.6 are by being threadably mounted at three angles of plane of incidence mirror support plate 13.5, and three
Steel ball 13.1 is fixed in plane of incidence mirror fixed plate 13.3 by viscose glue, three holding screws 13.6 and corresponding three steel balls
13.1 lean, and turn three holding screws 13.6 to different depth with spanner and jack up steel ball 13.1, realize plane of incidence
The pitch angle of mirror 13.2 is adjusted.
As shown in figure 8, the linear guide 14 is fixed on fixed plate 14.4 including fixed plate 14.4, by screw 14.3
The guide pad 14.2 of the left and right sides and the sliding block 14.1 being arranged between guide pad 14.2, sliding block 14.1 is in fixed plate 14.4
The guide groove that can be formed along two guide pads 14.2 slides.
As shown in figure 9, the incident parabolic microscope group 18 includes incident parabolic mirror fixed plate 18.7 and is mounted on
The paraboloidal mirror 18.6 and incident parabolic mirror support plate 18.2 of 18.7 tow sides of incident parabolic mirror fixed plate, the throwing
Object plane mirror 18.6 is fixed by sunk screw 18.4 and incident parabolic mirror fixed plate 18.7, the incident parabolic mirror support
T-type spring leaf 18.9,18.9 1 side of T-type spring leaf are connected between plate 18.2 and incident parabolic mirror fixed plate 18.7
Face is connect by two screws 18.8 with incident parabolic mirror fixed plate 18.7, and two screws 18.3 and incidence are on the other hand passed through
Paraboloidal mirror support plate 18.2 connects, and makes shape between incident parabolic mirror fixed plate 18.7 and incident parabolic mirror support plate 18.2
At elastic connection, several holding screws 18.1, the clamp screw are installed in the incident parabolic mirror support plate 18.2
Steel ball 18.5 is fixed between nail 18.1 and incident parabolic mirror fixed plate 18.7, three holding screws 18.1 are installed by screw thread
At three angles of incident parabolic mirror support plate 18.2, three steel balls 18.5 are fixed on incident parabolic mirror fixed plate by viscose glue
On 18.7, three holding screws 18.1 lean with corresponding three steel balls 18.5, turn three holding screws 18.1 with spanner
To different depth and steel ball 18.5 is jacked up, it can be achieved that the pitch angle of paraboloidal mirror 18.6 is adjusted.
The present invention is by incident parabolic microscope group 18, plane of incidence microscope group 13, plane of reflection microscope group 3, cuboid paraboloidal mirror
2, poly- popin face microscope group 4, exit plane microscope group 5, transmission paraboloid microscope group 10 and outgoing paraboloidal mirror 8 are mounted on whole by screw
On the upper layer and lower layer plate of body structure, it is ensured that whole rigidity, and auxiliary straight line guide rail and sliding block are guaranteeing as director element
The pitch angle of each plane mirror and each paraboloidal mirror is adjusted while light axis consistency also by T-type spring leaf combination holding screw
Degree, ensure that measurement accuracy；Two kinds of measurement methods can be achieved at the same time on same structure, improve the agility of overall measurement；Together
The integrated guide rail base of two layers of plate of Shi Caiyong is also beneficial to the machining accuracy of component, reduces resetting difficulty, improves adjustment
Precision.
The claims in the present invention protection scope is not limited to the above embodiments.
Claims (8)
1. a kind of Terahertz near field micro-imaging detector, it is characterised in that: including plate and cuboid paraboloidal mirror (2),
Incident parabolic microscope group (18) in input path, plane of reflection microscope group (3) and thoroughly are disposed on the plate
Penetrate paraboloid microscope group (10) and poly- popin face microscope group (4), exit plane microscope group (5) and outgoing parabolic on reflected light path
Face mirror (8) is provided with paraboloidal mirror (18.6) in the incident parabolic microscope group (18), the plane of reflection microscope group (3)
On be provided with plane of reflection mirror (3.6), be provided in the transmission paraboloid microscope group (10) transmission paraboloidal mirror (10.1), institute
It is provided with metallic nano detecting probe (11) in front of the cuboid paraboloidal mirror (2) stated, is provided in the poly- popin face microscope group (4)
The poly- wave plane mirror (4.8) is provided with the exit plane mirror (5.6) in the exit plane microscope group (5), described
Plate on the linear guide (14) being located in front of transmission paraboloid microscope group (10) is installed, the linear guide pacifies on (14)
Equipped with plane of incidence microscope group (13), plane of incidence mirror (13.2) are provided in the plane of incidence microscope group (13)；Described is flat
Plate includes that lower layer's plate (9) and the upper layer being fixed on lower layer's plate (9) by left support frame (17) and right support frame (7) are flat
Plate (1), the cuboid paraboloidal mirror (2), plane of reflection microscope group (3), poly- popin face microscope group (4) and exit plane microscope group
(5) it is mounted on upper panel (1), the outgoing paraboloidal mirror (8), transmission paraboloid microscope group (10), metallic nano detecting probe
(11), incident parabolic microscope group (18) and linear guide (14) are mounted on lower layer's plate (9).
2. a kind of Terahertz near field micro-imaging detector according to claim 1, which is characterized in that the reflection is flat
Face microscope group (3) includes plane of reflection mirror fixed plate (3.5) and is mounted on plane of reflection mirror by T-type spring leaf (3.8) and fixes
Plane of reflection mirror support plate (3.1) on plate (3.5) is equipped with several tightenings in the plane of reflection mirror support plate (3.1)
Screw (3.2) is fixed with steel ball (3.4) between the holding screw (3.2) and plane of reflection mirror fixed plate (3.5).
3. a kind of Terahertz near field micro-imaging detector according to claim 1, which is characterized in that the poly- popin
Face microscope group (4) includes poly- wave plane mirror support plate (4.2) and is mounted on poly- wave plane mirror supporting by T-type spring leaf (4.4)
Poly- wave plane mirror fixed plate (4.6) on plate (4.2) is equipped with several tightenings on the poly- wave plane mirror support plate (4.2)
Screw (4.1) is fixed with steel ball (4.7) between the holding screw (4.1) and poly- wave plane mirror fixed plate (4.6).
4. a kind of Terahertz near field micro-imaging detector according to claim 1, which is characterized in that the outgoing is flat
Face microscope group (5) includes exit plane mirror support plate (5.5) and is mounted on the support of exit plane mirror by T-type spring leaf (5.3)
Exit plane mirror fixed plate (5.8) on plate (5.5) is equipped with several tightenings in the exit plane mirror support plate (5.5)
Screw (5.4) is fixed with steel ball (5.7) between the holding screw (5.4) and exit plane mirror fixed plate (5.8).
5. a kind of Terahertz near field micro-imaging detector according to claim 1, which is characterized in that the transmission is thrown
Object plane microscope group (10) includes transmission paraboloidal mirror support plate (10.8) and is mounted on transmission parabolic by T-type spring leaf (10.6)
Transmission paraboloidal mirror fixed plate (10.3) in face mirror support plate (10.8), in the transmission paraboloidal mirror support plate (10.8)
It is equipped with several holding screws (10.9), it is solid between the holding screw (10.9) and transmission paraboloidal mirror fixed plate (10.3)
Surely there are steel ball (10.4).
6. a kind of Terahertz near field micro-imaging detector according to claim 1, which is characterized in that the incidence is flat
Face microscope group (13) includes plane of incidence mirror support plate (13.5) and is mounted on plane of incidence mirror branch by T-type spring leaf (13.8)
Plane of incidence mirror fixed plate (13.3) on fagging (13.5) is equipped in the plane of incidence mirror support plate (13.5) several
Holding screw (13.6) is fixed with steel ball between the holding screw (13.6) and plane of incidence mirror fixed plate (13.3)
(13.1).
7. a kind of Terahertz near field micro-imaging detector according to claim 1, which is characterized in that the straight line is led
Rail (14) includes fixed plate (14.4), passes through the guide pad (14.2) that screw (14.3) are fixed at left and right sides of fixed plate (14.4)
And the sliding block (14.1) being arranged between guide pad (14.2).
8. a kind of Terahertz near field micro-imaging detector according to claim 1, which is characterized in that the incident throwing
Object plane microscope group (18) includes incident parabolic mirror fixed plate (18.7) and is mounted on incident parabolic mirror fixed plate (18.7) just
The paraboloidal mirror (18.6) and incident parabolic mirror support plate (18.2) on anti-two sides, the incident parabolic mirror support plate
(18.2) it is connected between incident parabolic mirror fixed plate (18.7) T-type spring leaf (18.9), the incident parabolic mirror
It is equipped in support plate (18.2) several holding screws (18.1), the holding screw (18.1) is fixed with incident parabolic mirror
Steel ball (18.5) are fixed between plate (18.7).
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| CN109520620A (en) * | 2018-12-28 | 2019-03-26 | 深圳市太赫兹科技创新研究院有限公司 | Terahertz time-domain spectroscopy instrument |
| CN112557762B (en) * | 2019-09-25 | 2022-09-02 | 天津大学 | High-precision terahertz near field imaging array unit |
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