CN107101941A - A kind of Terahertz near field micro-imaging detector - Google Patents
A kind of Terahertz near field micro-imaging detector Download PDFInfo
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- CN107101941A CN107101941A CN201710206659.6A CN201710206659A CN107101941A CN 107101941 A CN107101941 A CN 107101941A CN 201710206659 A CN201710206659 A CN 201710206659A CN 107101941 A CN107101941 A CN 107101941A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
Abstract
The invention discloses a kind of Terahertz micro-imaging detector, including flat board and cuboid paraboloidal mirror, the incident parabolic microscope group in input path, plane of reflection microscope group are disposed with described flat board and parabola microscope group and poly- popin face microscope group, exit plane microscope group and outgoing paraboloidal mirror on reflected light path is transmitted, paraboloidal mirror is provided with described incident parabolic microscope group, it is provided with described transmission parabola microscope group in front of transmission paraboloidal mirror, described cuboid paraboloidal mirror and is provided with metallic nano detecting probe；The present invention uses bilinear guide rail mobile ellipse shape level crossing, realize that two kinds of metering systems switch rapidly, THz wave can be converged between needle point and sample, so as to realize the combination of two kinds of metering systems, the measurement accuracy of the reflective near field micro-imaging of Terahertz, Terahertz transmission-type near field micro-imaging is ensure that with this, the combinatorial problem of different metering systems in the case of different samples is solved.
Description
Technical field
The present invention, which is related to, belongs to precision instrument technical field, is that a kind of THz wave passes through elliptic plane microscope group mobile handoff
Form the device of two kinds of measurement in a closed series modes of reflection and transmission.
Background technology
Limited by diffraction limit, the resolution ratio of traditional terahertz imaging is only in submillimeter magnitude, it is difficult to meet semiconductor
Requirements at the higher level of the fields such as material, biological cell detection to terahertz imaging resolution ratio.In order to break through diffraction limit, obtain higher
Resolution ratio, it is necessary to using Terahertz near field micro-imaging technique.
The Terahertz near field micro-imaging scheme reported earliest is based on physical pore size method, by AT＆T Labs in 1998
Propose, be developed so far, optimum resolution reaches 3 μm.For cut-off effect and the low defect of aperture transmitance, U.S. Rensselaer reason
Engineering college's pioneering dynamic aperture shot in 2000, obtains 3 μm of resolution ratio.2003, the institute using metal nano needle tip as dissipate
Probe is penetrated, nanoscale imaging resolution is realized.It is micro- that TU Delft Polytechnics carries out near field using electro-optic sampling method
It is imaged, 10 μm of resolution ratio is realized in the range of 0.1-2.5THz.It is straight that German Protemics companies lead probe using micro photo electric
Detection is connect, 3 μm of resolution ratio are obtained.2010, it is micro- that Rice Univ USA carries out Terahertz near field using slab waveguide structures
Imaging, and obtained resolution ratio.But the problem of being limited to manufacture craft, both near field micro-imaging schemes do not break through so far
To nanoscale.2008, Pohang University of South Korea was visited in terahertz time-domain spectroscopy system-based using AFM
Pin is realized to be imaged to the nanoscale of biological cell.In the same year, German biochemistry Marx Planck research institute and nano science
Heart R.Hillenbran and H.-G. von Ribbeck et al. are utilized respectively Michael's interferometer system and terahertz time-domain spectroscopy
System is combined with atomic force microscope probe, and nanoscale imaging is realized in terahertz wave band.
Different measuring mechanisms, which are used separately, in some Terahertz near field micro-imaging detectors realizes different measurement sides
Formula, its have the disadvantage cost it is high, in-convenience in use, measurement efficiency it is low.Also some Terahertz near field micro-imaging detectors use
The mode of three-dimensional trim holder and test platform realizes three kinds of measurements, and the advantage of this mode is easy for group in laboratory conditions
Dress, measurement accuracy is very high.It is that laboratory environment is lower mostly for this mechanism is current to be used, and because adjustment link is more,
During actual measurement, this mechanism measurement efficiency is relatively low.
The content of the invention
An object of the present invention is, overcomes the shortcoming of above-mentioned prior art can be by combining come very fast there is provided one kind
Realize the detector of two kinds of measurement in a closed series modes of plane of incidence microscope group mobile handoff formation reflection and transmission, using line slideway and
Slider guide mode ensures the accuracy of measurement, so that it is guaranteed that the rapidity of two kinds of metering systems and accurate in identical platform
Property.
The technical solution adopted for the present invention to solve the technical problems is：A kind of Terahertz micro-imaging detector, including
Be disposed with flat board and cuboid paraboloidal mirror, described flat board incident parabolic microscope group in input path,
Plane of reflection microscope group and transmission parabola microscope group and poly- popin face microscope group on reflected light path, exit plane microscope group and go out
Penetrate to be provided with paraboloidal mirror, described incident parabolic microscope group in paraboloidal mirror, described plane of reflection microscope group and be provided with instead
Penetrate and transmission paraboloidal mirror is provided with level crossing, described transmission parabola microscope group, set in front of described cuboid paraboloidal mirror
It is equipped with and described poly- ripple level crossing, described exit plane mirror is provided with metallic nano detecting probe, described poly- popin face microscope group
The straight line being provided with described exit plane mirror, described flat board in front of transmission parabola microscope group is provided with group to lead
It is provided with rail, described line slideway in plane of incidence microscope group, described plane of incidence microscope group and is provided with plane of incidence mirror.
A kind of described Terahertz micro-imaging detector, its flat board includes lower floor's flat board and passes through left support frame and the right side
Support frame is fixed on the upper panel on lower floor's flat board, described cuboid paraboloidal mirror, plane of reflection microscope group, poly- ripple level crossing
Group and exit plane microscope group are arranged in upper panel, and described outgoing paraboloidal mirror, transmission parabola microscope group, metal nano are visited
Pin, incident parabolic microscope group and line slideway are arranged on lower floor's flat board.
A kind of described Terahertz near field micro-imaging detector, its plane of reflection microscope group includes plane of reflection mirror fixed plate
And the plane of reflection mirror supporting plate in plane of reflection mirror fixed plate, described plane of reflection mirror are arranged on by T-shaped spring leaf
Some holding screws are installed in supporting plate, steel ball is fixed between described holding screw and plane of reflection mirror fixed plate.
A kind of described Terahertz near field micro-imaging detector, its poly- popin face microscope group includes poly- ripple level crossing supporting plate
And the poly- ripple level crossing fixed plate in poly- ripple level crossing supporting plate, described poly- ripple level crossing are arranged on by T-shaped spring leaf
Some holding screws are installed in supporting plate, steel ball is fixed between described holding screw and poly- ripple level crossing fixed plate.
A kind of described Terahertz near field micro-imaging detector, its exit plane microscope group includes exit plane mirror supporting plate
And the exit plane mirror fixed plate in exit plane mirror supporting plate, described exit plane mirror are arranged on by T-shaped spring leaf
Some holding screws are installed in supporting plate, steel ball is fixed between described holding screw and exit plane mirror fixed plate.
A kind of described Terahertz near field micro-imaging detector, it, which transmits parabola microscope group, includes transmission paraboloidal mirror branch
Fagging and the transmission paraboloidal mirror fixed plate by T-shaped spring leaf in transmission paraboloidal mirror supporting plate, described is saturating
Penetrate and some holding screws are installed in paraboloidal mirror supporting plate, it is solid between described holding screw and transmission paraboloidal mirror fixed plate
Surely there is steel ball.
A kind of described Terahertz near field micro-imaging detector, its plane of incidence microscope group includes plane of incidence mirror supporting plate
And the plane of incidence mirror fixed plate in plane of incidence mirror supporting plate, described plane of incidence mirror are arranged on by T-shaped spring leaf
Some holding screws are installed in supporting plate, steel ball is fixed between described holding screw and plane of incidence mirror fixed plate.
A kind of described Terahertz near field micro-imaging detector, its line slideway includes fixed plate, fixed by screw
Guide pad and the sliding block that is arranged between guide pad in the fixed plate left and right sides.
A kind of described Terahertz near field micro-imaging detector, its incident parabolic microscope group is solid including incident parabolic mirror
Fixed board and the paraboloidal mirror and incident parabolic mirror supporting plate installed in incident parabolic mirror fixed plate tow sides, it is described
T-shaped spring leaf, described incident parabolic mirror are connected between incident parabolic mirror supporting plate and incident parabolic mirror fixed plate
Some holding screws are installed in supporting plate, steel ball is fixed between described holding screw and incident parabolic mirror fixed plate.
The beneficial effects of the invention are as follows：The achievable reflective near field micro-imaging of Terahertz of the present invention and Terahertz transmission-type
The combinations of two kinds of metering systems of near field micro-imaging, the rigidity and optical path of integrated model are ensure that using double-layer plate
Stability；Using double guide rail mobile ellipse shape level crossings, realize that two kinds of metering systems switch rapidly, THz wave can be converged to
Between needle point and sample, so as to realize the combination of two kinds of metering systems, with this ensure that the reflective near field micro-imaging of Terahertz,
The measurement accuracy of Terahertz transmission-type near field micro-imaging, the combination for solving different metering systems in the case of different samples is asked
Topic.
Brief description of the drawings
Fig. 1 is the reflective instrumentation plan of the present invention；
Fig. 2 is the transmission-type instrumentation plan of the present invention；
Fig. 3 is the schematic three dimensional views of plane of reflection microscope group of the present invention；
Fig. 4 is the schematic three dimensional views of poly- popin face microscope group of the invention；
Fig. 5 is the schematic three dimensional views of exit plane microscope group of the present invention；
Fig. 6 is the schematic three dimensional views of present invention transmission parabola microscope group；
Fig. 7 is the schematic three dimensional views of plane of incidence microscope group of the present invention；
Fig. 8 is the schematic three dimensional views of line slideway of the present invention；
Fig. 9 is the schematic three dimensional views of incident parabolic microscope group of the present invention.
Each reference is：1-upper panel, 2-cuboid paraboloidal mirror, 3-plane of reflection microscope group, 3.1-reflection
Plane mirror supporting plate, 3.2-holding screw, 3.3-screw, 3.4-steel ball, 3.5-plane of reflection mirror fixed plate, 3.6-anti-
Penetrate level crossing, 3.7-screw, 3.8-T-shaped spring leaf, 4-poly- popin face microscope group, 4.1-holding screw, 4.2-poly- popin face
Mirror supporting plate, 4.3-screw, 4.4-T-shaped spring leaf, 4.5-screw, 4.6-poly- ripple level crossing fixed plate, 4.7-steel ball,
4.8-poly- ripple level crossing, 5-exit plane microscope group, 5.1-screw, 5.2-screw, 5.3-T-shaped spring leaf, 5.4-tightening
Screw, 5.5-exit plane mirror supporting plate, 5.6-exit plane mirror, 5.7-steel ball, 5.8-exit plane mirror fixed plate,
6-screw, 7-right support frame, 8-outgoing paraboloidal mirror, 9-lower floor flat board, 10-transmission parabola microscope group, 10.1-transmission
Paraboloidal mirror, 10.2-sunk screw, 10.3-transmission paraboloidal mirror fixed plate, 10.4-steel ball, 10.5-screw, 10.6-
T-shaped spring leaf, 10.7-screw, 10.8-transmission paraboloidal mirror supporting plate, 10.9-holding screw, 11-metal nano is visited
Pin, 12-sample, 13-plane of incidence microscope group, 13.1-steel ball, 13.2-plane of incidence mirror, 13.3-plane of incidence mirror is fixed
Plate, 13.4-screw, 13.5-plane of incidence mirror supporting plate, 13.6-holding screw, 13.7-screw, 13.8-T-shaped spring
Piece, 14-line slideway, 14.1-sliding block, 14.2-guide pad, 14.3-screw, 14.4-fixed plate, 15-screw,
16-screw, 17-left support frame, 18-incident parabolic microscope group, 18.1-holding screw, 18.2-incident parabolic mirror branch
Fagging, 18.3-screw, 18.4-sunk screw, 18.5-steel ball, 18.6-paraboloidal mirror, 18.7-incident parabolic mirror is consolidated
Fixed board, 18.8-screw, 18.9-T-shaped spring leaf.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with accompanying drawing and specific implementation
Example is described in further details to the present invention.
Shown in reference picture 1, Fig. 2, a kind of combine the invention discloses reflective and transmission-type Terahertz near field it is micro- into
As detector, solve conventional non-focus optical system and participate in whole optical system imaging, the problem that can not but test, it includes one
Plant to be disposed with Terahertz micro-imaging detector, including flat board and cuboid paraboloidal mirror 2, described flat board and be located at
Incident parabolic microscope group 18, plane of reflection microscope group 3 in input path and transmission parabola microscope group 10 and positioned at reflected light path
On poly- popin face microscope group 4, exit plane microscope group 5 and outgoing paraboloidal mirror 8, be provided with described incident parabolic microscope group 18
Plane of reflection mirror 3.6, described transmission parabola microscope group 10 are provided with paraboloidal mirror 18.6, described plane of reflection microscope group 3
On be provided with transmission paraboloidal mirror 10.1, the front of described cuboid paraboloidal mirror 2 is provided with metallic nano detecting probe 11 and sample
12, it is provided with described poly- popin face microscope group 4 in described poly- ripple level crossing 4.8, described exit plane microscope group 5 and is provided with
It is provided with described exit plane mirror 5.6, described flat board by screw 15 and screw 16 positioned at transmission parabola microscope group 10
Plane of incidence microscope group 13, described plane of incidence microscope group 13 are installed on the line slideway 14 in front, described line slideway 14
On be provided with plane of incidence mirror 13.2.
Its middle plateform includes lower floor's flat board 9 and is fixed on by left support frame 17 and right support frame 7 on lower floor's flat board 9
Upper panel 1, described left support frame 17, right support frame 7 are fastenedly connected with lower floor flat board 9, upper panel 1 by screw 6, institute
Cuboid paraboloidal mirror 2, plane of reflection microscope group 3, poly- popin face microscope group 4 and the exit plane microscope group 5 stated are arranged on upper panel 1
On, described outgoing paraboloidal mirror 8, transmission parabola microscope group 10, metallic nano detecting probe 11, incident parabolic microscope group 18 and straight line
Guide rail 14 is arranged on lower floor's flat board 9.
Plane of incidence microscope group 13 is moved to by near-end by line slideway 14 when using and cuts THz wave light path, Terahertz
Ripple sequentially passes through incident parabolic microscope group 18, plane of incidence microscope group 13, plane of reflection microscope group 3 and cuboid paraboloidal mirror 2, focuses on
To between metallic nano detecting probe 11 and sample 12, then passing through cuboid paraboloidal mirror 2, poly- popin face microscope group 4, exit plane mirror
Group 5 and outgoing paraboloidal mirror 8 are reflected, you can complete the reflective near field micro-imaging measurement of Terahertz.
THz wave light path is cut out by the way that plane of incidence microscope group 13 is moved into distal end, THz wave sequentially passes through incident throwing
Object plane microscope group 18 and transmission parabola microscope group 10, focus between metallic nano detecting probe 11 and sample 12, then pass through cuboid
Paraboloidal mirror 2, poly- popin face microscope group 4, exit plane microscope group 5 and outgoing paraboloidal mirror 8 are reflected, Terahertz transmission-type near field
Micro-imaging is measured.
Plane of reflection microscope group 3 is fixed on 1 in upper panel, when plane of incidence microscope group 13 is moved to near-end incision THz wave
During light path, THz wave reflexes to plane of incidence microscope group 13 by incident parabolic microscope group 18, and then plane of incidence microscope group 13 will too
Hertz wave is reflected up to plane of reflection microscope group 3, and THz wave is reflexed to cuboid parabola by further plane of reflection microscope group 3
On the parabola of mirror 2, THz wave is by the parabolic reflective focusing of cuboid paraboloidal mirror 2 to metallic nano detecting probe 11 and sample
Between 12, reflection type optical path is now formd；When plane of incidence microscope group 13, which is moved to distal end, cuts out THz wave light path, terahertz
Hereby ripple reflexes to transmission parabola microscope group 10 by incident parabolic microscope group 18, and THz wave needs not move through plane of reflection microscope group 3, and
It is directly to be penetrated sample 12 by the reflection of transmission parabola microscope group 10 and focused between metallic nano detecting probe 11 and sample 12, now shape
Into transmission-type light path.
Plane of incidence microscope group 13 of the present invention is fixed on the sliding block 14.1 of line slideway 14, is moved by sliding block 14.1
Dynamic plane of incidence microscope group 13 is cut or cut out employs line slideway movement combination gear to sliding block in THz wave light path, this example
Plate fixed form, that is, the reliability and accuracy of light path when ensureing incision and removing THz wave light path.
As shown in figure 3, described plane of reflection microscope group 3 includes plane of reflection mirror fixed plate 3.5 and passes through T-shaped spring leaf
3.8 are arranged on the plane of reflection mirror supporting plate 3.1 in plane of reflection mirror fixed plate 3.5, and described plane of reflection mirror 3.6 passes through viscous
Glue is fixed with plane of reflection mirror fixed plate 3.5, and the T-shaped one side of spring leaf 3.8 is fixed by two screws 3.3 and plane of reflection mirror
Plate 3.5 is connected, and is on the other hand connected by two screws 3.7 with plane of reflection mirror supporting plate 3.1, makes plane of reflection mirror fixed plate
Elastic connection is formed between 3.5 and plane of reflection mirror supporting plate 3.1, if being provided with described plane of reflection mirror supporting plate 3.1
Dry holding screw 3.2, is fixed with steel ball 3.4 between described holding screw 3.2 and plane of reflection mirror fixed plate 3.5, three tight
Determine screw 3.2 and be fixed on by being threadably mounted at three angles of plane of reflection mirror supporting plate 3.1, three steel balls 3.4 by viscose glue
In plane of reflection mirror fixed plate 3.5, three holding screws 3.2 are leant with corresponding three steel balls 3.4, and three are turned with spanner
Holding screw 3.2 realizes the luffing angle regulation of plane of reflection mirror 3.6 to different depth and jack-up steel ball 3.4.
As shown in figure 4, described poly- popin face microscope group 4 includes poly- ripple level crossing supporting plate 4.2 and passes through T-shaped spring leaf
4.4 are arranged on the poly- ripple level crossing fixed plate 4.6 in poly- ripple level crossing supporting plate 4.2, and described poly- ripple level crossing 4.8 passes through viscous
Glue is fixed with poly- ripple level crossing fixed plate 4.6, and the T-shaped one side of spring leaf 4.4 is fixed by two screws 4.5 with poly- ripple level crossing
Plate 4.6 is connected, and is on the other hand connected by two screws 4.3 with poly- ripple level crossing supporting plate 4.2, is made poly- ripple level crossing fixed plate
Elastic connection is formed between 4.6 and poly- ripple level crossing supporting plate 4.2, if being provided with described poly- ripple level crossing supporting plate 4.2
Dry holding screw 4.1, is fixed with steel ball 4.7 between described holding screw 4.1 and poly- ripple level crossing fixed plate 4.6, three tight
Determine screw 4.1 and be fixed on by being threadably mounted at three angles of poly- ripple level crossing supporting plate 4.2, three steel balls 4.7 by viscose glue
In poly- ripple level crossing fixed plate 4.6, three holding screws 4.1 are leant with corresponding three steel balls 4.7, and three are turned with spanner
Holding screw 4.1 realizes the luffing angle regulation of poly- ripple level crossing 4.8 to different depth and jack-up steel ball 4.7.
As shown in figure 5, described exit plane microscope group 5 includes exit plane mirror supporting plate 5.5 and passes through T-shaped spring leaf
5.3 are arranged on the exit plane mirror fixed plate 5.8 in exit plane mirror supporting plate 5.5, and described exit plane mirror 5.6 passes through viscous
Glue is fixed with exit plane mirror fixed plate 5.8, and the T-shaped one side of spring leaf 5.3 is fixed by two screws 5.1 and exit plane mirror
Plate 5.8 is connected, and is on the other hand connected by two screws 5.2 with exit plane mirror supporting plate 5.5, makes outgoing level crossing fixed plate
Elastic connection is formed between 5.8 and exit plane mirror supporting plate 5.5, if being provided with described exit plane mirror supporting plate 5.5
Dry holding screw 5.4, is fixed with steel ball 5.7 between described holding screw 5.4 and exit plane mirror fixed plate 5.8, three tight
Determine screw 5.4 and be fixed on by being threadably mounted at three angles of exit plane mirror supporting plate 5.5, three steel balls 5.7 by viscose glue
In exit plane mirror fixed plate 5.8, three holding screws 5.4 are leant with corresponding three steel balls 5.7, and three are turned with spanner
Holding screw 5.4 realizes the luffing angle regulation of exit plane mirror 5.6 to different depth and jack-up steel ball 5.7.
As shown in fig. 6, described transmission parabola microscope group 10 includes transmission paraboloidal mirror supporting plate 10.8 and by T-shaped
Spring leaf 10.6 is arranged on the transmission paraboloidal mirror fixed plate 10.3 in transmission paraboloidal mirror supporting plate 10.8, and described transmission is thrown
Object plane mirror 10.1 is fixed by sunk screw 10.2 with transmission paraboloidal mirror fixed plate 10.3, and on the one hand T-shaped spring leaf 10.6 leads to
Cross two screws 10.5 to be connected with transmission paraboloidal mirror fixed plate 10.3, on the other hand pass through two screws 10.7 and transmission parabolic
Face mirror supporting plate 10.8 is connected, and makes to form bullet between transmission paraboloidal mirror fixed plate 10.3 and transmission paraboloidal mirror supporting plate 10.8
Property connection, some holding screws 10.9, described holding screw are installed in described transmission paraboloidal mirror supporting plate 10.8
Steel ball 10.4 is fixed between 10.9 and transmission paraboloidal mirror fixed plate 10.3, three holding screws 10.9 are by being threadably mounted at
Three angles of paraboloidal mirror supporting plate 10.8 are transmitted, three steel balls 10.4 are fixed on plane of incidence mirror fixed plate 13.3 by viscose glue
On, three holding screws 10.9 are leant with corresponding three steel balls 10.4, and three holding screws 10.9 are turned with spanner to not
Same depth and jack-up steel ball 10.4, realize the luffing angle regulation of transmission paraboloidal mirror 10.1.
As shown in fig. 7, described plane of incidence microscope group 13 includes plane of incidence mirror supporting plate 13.5 and passes through T-shaped spring
Piece 13.8 is arranged on the plane of incidence mirror fixed plate 13.3 in plane of incidence mirror supporting plate 13.5, described plane of incidence mirror 13.2
Fixed by viscose glue with plane of incidence mirror fixed plate 13.3, the T-shaped one side of spring leaf 13.8 passes through two screws 13.4 and incidence
Level crossing fixed plate 13.3 is connected, and is on the other hand connected by two screws 13.7 with plane of incidence mirror supporting plate 13.5, make into
Penetrate and elastic connection is formed between level crossing fixed plate 13.3 and plane of incidence mirror supporting plate 13.5, described plane of incidence mirror support
Some holding screws 13.6 are installed on plate 13.5, it is solid between described holding screw 13.6 and plane of incidence mirror fixed plate 13.3
Surely there is a steel ball 13.1, three holding screws 13.6 are by being threadably mounted at three angles of plane of incidence mirror supporting plate 13.5, three
Steel ball 13.1 is fixed in plane of incidence mirror fixed plate 13.3 by viscose glue, three holding screws 13.6 and corresponding three steel balls
13.1 are leant, and three holding screws 13.6 are turned with spanner to different depth and jack-up steel ball 13.1, plane of incidence is realized
The luffing angle regulation of mirror 13.2.
As shown in figure 8, described line slideway 14 includes fixed plate 14.4, is fixed on fixed plate 14.4 by screw 14.3
The guide pad 14.2 of the left and right sides and the sliding block 14.1 being arranged between guide pad 14.2, sliding block 14.1 is in fixed plate 14.4
It can be slided along the guide groove of two formation of guide pad 14.2.
As shown in figure 9, described incident parabolic microscope group 18 includes incident parabolic mirror fixed plate 18.7 and is arranged on
The paraboloidal mirror 18.6 and incident parabolic mirror supporting plate 18.2 of the tow sides of incident parabolic mirror fixed plate 18.7, described throwing
Object plane mirror 18.6 is fixed by sunk screw 18.4 with incident parabolic mirror fixed plate 18.7, described incident parabolic mirror support
T-shaped spring leaf 18.9, the described side of T-shaped spring leaf 18.9 1 are connected between plate 18.2 and incident parabolic mirror fixed plate 18.7
Face is connected by two screws 18.8 with incident parabolic mirror fixed plate 18.7, on the other hand passes through two screws 18.3 and incidence
Paraboloidal mirror supporting plate 18.2 is connected, and makes shape between incident parabolic mirror fixed plate 18.7 and incident parabolic mirror supporting plate 18.2
Into elastic connection, some holding screws 18.1, described clamp screw are installed in described incident parabolic mirror supporting plate 18.2
Steel ball 18.5 is fixed between nail 18.1 and incident parabolic mirror fixed plate 18.7, three holding screws 18.1 are installed by screw thread
At three angles of incident parabolic mirror supporting plate 18.2, three steel balls 18.5 are fixed on incident parabolic mirror fixed plate by viscose glue
On 18.7, three holding screws 18.1 are leant with corresponding three steel balls 18.5, and three holding screws 18.1 are turned with spanner
To different depth and jack-up steel ball 18.5, the luffing angle regulation of paraboloidal mirror 18.6 can be achieved.
The present invention is by incident parabolic microscope group 18, plane of incidence microscope group 13, plane of reflection microscope group 3, cuboid paraboloidal mirror
2nd, poly- popin face microscope group 4, exit plane microscope group 5, transmission parabola microscope group 10 and outgoing paraboloidal mirror 8 are arranged on whole by screw
On two layers of flat board up and down of body structure, it is ensured that overall rigidity, and auxiliary straight line guide rail and sliding block are ensureing as director element
The angle of pitch of each level crossing and each paraboloidal mirror is adjusted while light axis consistency also by T-shaped spring leaf combination holding screw
Degree, it is ensured that measurement accuracy；Two kinds of metering systems can be realized simultaneously on same structure, the agility of overall measurement is improved；Together
The integrated guide rail base of two layers of flat board of Shi Caiyong, is also beneficial to the machining accuracy of component, reduces resetting difficulty, improves and debug
Precision.
The claims in the present invention protection domain is not limited to above-described embodiment.
Claims (9)
1. a kind of Terahertz micro-imaging detector, it is characterised in that：Including flat board and cuboid paraboloidal mirror（2）, it is described
Flat board on be disposed with the incident parabolic microscope group in input path（18）, plane of reflection microscope group（3）Thrown with transmission
Object plane microscope group（10）And the poly- popin face microscope group on reflected light path（4）, exit plane microscope group（5）With outgoing paraboloidal mirror
（8）, described incident parabolic microscope group（18）On be provided with paraboloidal mirror（18.6）, described plane of reflection microscope group（3）On set
It is equipped with plane of reflection mirror（3.6）, described transmission parabola microscope group（10）On be provided with transmission paraboloidal mirror（10.1）, it is described
Cuboid paraboloidal mirror（2）Front is provided with metallic nano detecting probe（11）, described poly- popin face microscope group（4）On be provided with it is described
Poly- ripple level crossing（4.8）, described exit plane microscope group（5）On be provided with described exit plane mirror（5.6）, described is flat
It is provided with plate positioned at transmission parabola microscope group（10）The line slideway in front（14）, described line slideway（14）On be provided with
Plane of incidence microscope group（13）, described plane of incidence microscope group（13）On be provided with plane of incidence mirror（13.2）.
2. a kind of Terahertz micro-imaging detector according to claim 1, it is characterised in that under described flat board includes
Layer flat board（9）And pass through left support frame（17）And right support frame（7）It is fixed on lower floor's flat board（9）On upper panel（1）, institute
The cuboid paraboloidal mirror stated（2）, plane of reflection microscope group（3）, poly- popin face microscope group（4）With exit plane microscope group（5）It is arranged on
Upper panel（1）On, described outgoing paraboloidal mirror（8）, transmission parabola microscope group（10）, metallic nano detecting probe（11）, it is incident
Parabola microscope group（18）And line slideway（14）Installed in lower floor's flat board（9）On.
3. a kind of Terahertz near field micro-imaging detector according to claim 1 or 2, it is characterised in that described is anti-
Penetrate plane microscope group（3）Including plane of reflection mirror fixed plate（3.5）And pass through T-shaped spring leaf（3.8）Installed in plane of reflection mirror
Fixed plate（3.5）On plane of reflection mirror supporting plate（3.1）, described plane of reflection mirror supporting plate（3.1）On be provided with it is some
Holding screw（3.2）, described holding screw（3.2）With plane of reflection mirror fixed plate（3.5）Between be fixed with steel ball（3.4）.
4. a kind of Terahertz near field micro-imaging detector according to claim 1 or 2, it is characterised in that described is poly-
Popin face microscope group（4）Including poly- ripple level crossing supporting plate（4.2）And pass through T-shaped spring leaf（4.4）Installed in poly- ripple level crossing
Supporting plate（4.2）On poly- ripple level crossing fixed plate（4.6）, described poly- ripple level crossing supporting plate（4.2）On be provided with it is some
Holding screw（4.1）, described holding screw（4.1）With poly- ripple level crossing fixed plate（4.6）Between be fixed with steel ball（4.7）.
5. a kind of Terahertz near field micro-imaging detector according to claim 1 or 2, it is characterised in that described goes out
Penetrate plane microscope group（5）Including exit plane mirror supporting plate（5.5）And pass through T-shaped spring leaf（5.3）Installed in exit plane mirror
Supporting plate（5.5）On exit plane mirror fixed plate（5.8）, described exit plane mirror supporting plate（5.5）On be provided with it is some
Holding screw（5.4）, described holding screw（5.4）With exit plane mirror fixed plate（5.8）Between be fixed with steel ball（5.7）.
6. a kind of Terahertz near field micro-imaging detector according to claim 1 or 2, it is characterised in that described is saturating
Penetrate parabola microscope group（10）Including transmission paraboloidal mirror supporting plate（10.8）And pass through T-shaped spring leaf（10.6）Installed in transmission
Paraboloidal mirror supporting plate（10.8）On transmission paraboloidal mirror fixed plate（10.3）, described transmission paraboloidal mirror supporting plate
（10.8）On some holding screws are installed（10.9）, described holding screw（10.9）With transmission paraboloidal mirror fixed plate
（10.3）Between be fixed with steel ball（10.4）.
7. a kind of Terahertz near field micro-imaging detector according to claim 1 or 2, it is characterised in that described enters
Penetrate plane microscope group（13）Including plane of incidence mirror supporting plate（13.5）And pass through T-shaped spring leaf（13.8）Installed in plane of incidence
Mirror supporting plate（13.5）On plane of incidence mirror fixed plate（13.3）, described plane of incidence mirror supporting plate（13.5）On be provided with
Some holding screws（13.6）, described holding screw（13.6）With plane of incidence mirror fixed plate（13.3）Between be fixed with steel ball
（13.1）.
8. a kind of Terahertz near field micro-imaging detector according to claim 1 or 2, it is characterised in that described is straight
Line guide rail（14）Including fixed plate（14.4）, pass through screw（14.3）It is fixed on fixed plate（14.4）The guide pad of the left and right sides
（14.2）And it is arranged on guide pad（14.2）Between sliding block（14.1）.
9. a kind of Terahertz near field micro-imaging detector according to claim 1 or 2, it is characterised in that described enters
Penetrate parabola microscope group（18）Including incident parabolic mirror fixed plate（18.7）And installed in incident parabolic mirror fixed plate
（18.7）The paraboloidal mirror of tow sides（18.6）With incident parabolic mirror supporting plate（18.2）, described incident parabolic mirror branch
Fagging（18.2）With incident parabolic mirror fixed plate（18.7）Between be connected with T-shaped spring leaf（18.9）, described incident parabolic
Face mirror supporting plate（18.2）On some holding screws are installed（18.1）, described holding screw（18.1）With incident parabolic mirror
Fixed plate（18.7）Between be fixed with steel ball（18.5）.
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| CN107101941B (en) | 2019-08-02 |
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