CN101603813A - A kind of dimension measuring device for optical standing wave nano-particles - Google Patents
A kind of dimension measuring device for optical standing wave nano-particles Download PDFInfo
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- CN101603813A CN101603813A CNA2009101006150A CN200910100615A CN101603813A CN 101603813 A CN101603813 A CN 101603813A CN A2009101006150 A CNA2009101006150 A CN A2009101006150A CN 200910100615 A CN200910100615 A CN 200910100615A CN 101603813 A CN101603813 A CN 101603813A
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Abstract
The present invention relates to a kind of dimension measuring device for optical standing wave nano-particles.The prior art measuring accuracy is low, measurement environment is required high.The present invention includes LASER Light Source, beam-expanding collimation device, isosceles prism, first and second catoptron, first and second condenser lens, phase regulator, plano-convex lens, converge object lens, photoelectric sensor.Laser beam is waited two light beams of central plane reflection to intersect through light beam behind catoptron and the condenser lens respectively by two of isosceles prisms, forms interference region; The plane that is arranged on the plano-convex lens of light beam intersection is positioned at interference region, and the nano particle setting in the plane; Phase place by a light beam of phase regulator change causes moving interference fringes, and the nano particle scattered light intensity takes place by strong and weak variation the synchronously; Photoelectric sensor detects the nano particle scattered light intensity, measures nanoparticle size by calculating light intensity contrast ratio.Apparatus of the present invention have no particulate material interference, measuring accuracy height, to measurement environment require low, characteristics such as be widely used.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of measurement mechanism, particularly a kind of dimension measuring device for optical standing wave nano-particles is mainly used in the measurement of nanometer molecule size.
Technical background
Nanoscale science and technology has caused people's extensive concern, and nanometer technology has greatly promoted multi-field development such as industrial or agricultural, health care, life science, Environmental security, becomes one of main expulsive force of social development.At present, the nano material industry is flourish, has begun to take shape the industry of scale.The particle size of nano material is to the nano material important influence, particle size how to measure nano material rapidly and accurately is the problem of being concerned about the most in the nano materials research always, be subjected to people's generally attention, developed into a ten minutes important branch in modern surveying and the nanometer technology gradually.Formerly in the technology, there are several nanoparticle size measuring techniques, mainly comprise, 1) sieve method: with particulate samples by a series of standard sieves with different sieve diameters, be separated into several grades, weigh respectively again, try to achieve the particle size distribution of representing with massfraction then.The method wretched insufficiency is that this measuring principle has determined that the nanoparticle size precision is low, can't realize high-acruracy survey.2) microscopic method: utilize electron microscope, scanning tunnel microscope, atomic force microscope, magnetic force microscopy, scan ion electricity to lead microscope, scanning thermal microscope etc. nano particle is carried out the pattern scanning microscopy imaging, thereby obtain nanoparticle size, referring to " micro-nano electronic technology " journal article of the 1st phase in 2005 " measurement of nano particle and sign ".The method wretched insufficiency is easily tested nano particle to be caused damage, and measurement environment is required harsh.3) light scattering method: light scattering method is that development in recent years is the fastest, most widely used a kind of particle sizing method, light beam is when existing the pure medium of particle, light beam is space scattering towards periphery, scattered light intensity and light intensity fluctuation are closely related with particle size, obtain particle size information by detecting the fluctuation of scattered light intensity or light intensity, referring to Jilin University's PhD dissertation " being used for the analog detection dynamic light scattering technical research that nano particles is measured " of doctor Wang Gang.Though the method has certain advantage, but still have the principle deficiency, adopting light beam is the capable glistening light of waves bundle of far field light, and accuracy of detection is subjected to the beam characteristics parameter influence big, influences measuring accuracy; The fluctuation of scattered light intensity and light intensity all with particulate material characteristic (for example specific inductive capacity, magnetic permeability, parameters such as conductivity) direct correlation, can't eliminate of the influence of particulate material characteristic, and measuring method and system constitute complicated to the light scattering method measuring accuracy in the technology formerly at all.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art, a kind of dimension measuring device for optical standing wave nano-particles is provided, this device is simple to operate, it is convenient to realize, no particulate material and light beam parameters interference, measuring accuracy height, low to the measurement environment requirement.
Apparatus of the present invention comprise LASER Light Source, beam-expanding collimation device, isosceles prism, first catoptron, first condenser lens, phase regulator, second catoptron, second condenser lens, plano-convex lens, converge object lens, photoelectric sensor.
Beam-expanding collimation device and isosceles prism are successively set on the outgoing beam light path of LASER Light Source, the corresponding LASER Light Source setting of the entrance pupil of beam-expanding collimation device, the top rib of the corresponding isosceles prism of the emergent pupil of beam-expanding collimation device is provided with, and forms the beam-expanding collimation laser beam behind the LASER Light Source outgoing beam process beam-expanding collimation device.The bottom surface of isosceles prism beam-expanding collimation device dorsad is provided with, and two waist planes are that the first waist plane and the second waist plane all are coated with reflectance coating formation beam reflection face, and the isosceles prism base angle is 20 °～80 °.The beam-expanding collimation laser beam direction of propagation is vertical with the bottom surface of isosceles prism, behind the beam-expanding collimation laser beam directive isosceles prism, is formed two bundle collimated laser beams by the first waist plane and the second waist plane reflection.
Light path by the collimated laser beam behind the first waist plane reflection is provided with first catoptron, and first condenser lens is arranged on the reflected light path of first catoptron, and collimated laser beam is focused on by first condenser lens after through first mirror reflects.
Be disposed with the phase regulator and second catoptron by the light path of the collimated laser beam behind the second waist plane reflection, second condenser lens is arranged on the reflected light path of second catoptron, and collimated laser beam is focused on by second condenser lens after through second mirror reflects.
All greater than the base angle of isosceles prism, the outgoing focused beam of first condenser lens and the outgoing focused beam of second condenser lens intersect the angle of the reflecting surface of first catoptron and second catoptron and the bottom surface of isosceles prism, form the beam interference zone; Plano-convex lens is arranged on the top of first condenser lens and second condenser lens, the one side of described plano-convex lens is the plane, another side is a sphere, wherein sphere is towards first condenser lens and second condenser lens, and the plane is arranged on the outgoing focused beam of first condenser lens and the focused beam intersecting area of second condenser lens; Measured nano-metal particle is arranged on the plane of plano-convex lens, is positioned at the beam interference zone.The top, plane of plano-convex lens is disposed with converges object lens and photoelectric sensor, and the photoelectric sensing face of photoelectric sensor is positioned at the focus area after measured nano-metal particle astigmatism process converges object lens.
Described LASER Light Source is a kind of in semiconductor laser, solid state laser, gas laser, the liquid laser.
Described beam-expanding collimation device is a kind of in Kepler's type beam-expanding collimation device, the Galileo type beam-expanding collimation device.
Described phase regulator is a kind of in liquid crystal type phase regulator, reflective phase regulator, low-light grid phase regulator, the wave plate formula phase regulator.
Described photoelectric sensor is a kind of in photodiode, snowslide pipe, photomultiplier, the photon counter.
Phase regulator in apparatus of the present invention carries out phase adjusted to laser beam, and photoelectric sensor detects and the optical telecommunications signal is carried out signal processing analysis after the photosignal, and these all are mature technologies.Inventive point of the present invention is to provide a kind of optical standing wave nano-particles dimension measurement method and device light channel structure thereof.
The course of work of the present invention is: directive isosceles prism behind the beam-expanding collimation of LASER Light Source outgoing beam process beam-expanding collimation device, wanted plane reflection by the first waist plane and second; By the light beam that forms behind the first waist plane reflection of isosceles prism successively through first catoptron and first condenser lens, converged by first condenser lens, because the reflecting surface of first catoptron and the angle on plane, place, isosceles prism bottom surface are greater than the base angle of isosceles prism, light beam is retrodeviated by first mirror reflects and is folded to LASER Light Source outgoing beam optical path direction; Passed through phase regulator, second catoptron, second condenser lens successively by the light beam that forms behind the second waist plane reflection of isosceles prism, converged by second condenser lens, the angle on the reflecting surface of second catoptron and plane, place, isosceles prism bottom surface is greater than the base angle of isosceles prism, and light beam is retrodeviated by second mirror reflects and is folded to LASER Light Source outgoing beam optical path direction.The outgoing focused beam of first condenser lens and the outgoing focused beam of second condenser lens intersect, and form the beam interference zone; Plano-convex lens is arranged on the light beam intersection, and the sphere of plano-convex lens is towards first condenser lens and second condenser lens, and the plane of plano-convex lens is arranged on the outgoing focused beam of first condenser lens and the focused beam intersecting area of second condenser lens; Measured nano particle is arranged on the plane of plano-convex lens, is positioned at the beam interference zone; Continuously change the phase place of the collimated laser beam that forms behind the second waist plane reflection by phase regulator, phase adjustment range is greater than 2 π, phase change causes that the beam interference striped moves on the plane of plano-convex lens, and the nano particle scattered light intensity takes place by strong and weak variation the synchronously; The object lens that converge that are arranged on top, plano-convex lens plane converge to photoelectric sensor with the nano particle scattered light, and photoelectric sensor detects the nano particle scattered light intensity, calculate the light intensity contrast ratio that the nano particle astigmatism strength changes, and realize the nanoparticle size test.
Compared with prior art, the present invention has the following advantages and effect:
1) provide a kind of optical standing wave nano-particles dimension measurement method, have that performing step is simple, realization and easy to adjust, nano-scale measuring accuracy height, to measurement environment require low, characteristics such as be widely used;
2) the present invention is based on beam interference and forms optical standing wave formation measured zone, has eliminated formerly and has used light beam parameter measurement influence when going glistening light of waves bundle in the measuring technique;
3) realize regulating the optical standing wave position by the light path phase change, in the optical standing wave moving process, detect the light intensity contrast ratio that the nano particle astigmatism strength changes, the test of realization nanoparticle size, because the nano-particle material characterisitic parameter is divided by and disappears when calculating light intensity contrast ratio, so the present invention has eliminated the interference of nano-particle material characteristic to measuring;
4) reasonable in design of the present invention, realization expense are low, operation is convenient, to measurement environment require low, measuring accuracy is high and eliminated light beam parameters and the influence of nano-particle material characteristic to measuring.
Description of drawings
Fig. 1 is the structural representation of apparatus of the present invention.
Embodiment
The present invention is described in further detail below in conjunction with embodiment.
As shown in Figure 1, a kind of dimension measuring device for optical standing wave nano-particles comprises LASER Light Source 1, beam-expanding collimation device 2, isosceles prism 3, first catoptron 4, first condenser lens 5, phase regulator 9, second catoptron 10, second condenser lens 11, plano-convex lens 6, converges object lens 7, photoelectric sensor 8.
Beam-expanding collimation device 2 and isosceles prism 3 are successively set on the outgoing beam light path of LASER Light Source 1, the corresponding LASER Light Source 1 of the entrance pupil of beam-expanding collimation device 2 is provided with, the top rib of the corresponding isosceles prism 3 of the emergent pupil of beam-expanding collimation device 2 is provided with, and LASER Light Source 1 outgoing beam forms the beam-expanding collimation laser beam through beam-expanding collimation device 2 backs.The bottom surface 303 of isosceles prism 3 beam-expanding collimation device 2 dorsad is provided with, and two waist planes are that the first waist plane 301 and the second waist plane 302 all are coated with reflectance coating formation beam reflection face, and isosceles prism 3 base angles are 20 °～80 °.The beam-expanding collimation laser beam direction of propagation is vertical with the bottom surface 303 of isosceles prism 3, behind the beam-expanding collimation laser beam directive isosceles prism 3, is formed two bundle collimated laser beams by the first waist plane and the second waist plane reflection.
Be provided with first catoptron, 4, the first condenser lenses 5 by the light path of the collimated laser beam after 301 reflections of the first waist plane and be arranged on the reflected light path of first catoptron 4, collimated laser beam is focused on by first condenser lens 5 through first catoptron, 4 reflection backs.
Light path by the collimated laser beam after 302 reflections of the second waist plane is disposed with the phase regulator 9 and second catoptron 10, second condenser lens 11 is arranged on the reflected light path of second catoptron 10, and collimated laser beam is focused on by second condenser lens 11 through second catoptron, 10 reflection backs.
The angle of the reflecting surface of first catoptron 4 and second catoptron 10 and the bottom surface 303 of isosceles prism 3 is all greater than the base angle of isosceles prism 3, the outgoing focused beam of the outgoing focused beam of first condenser lens 5 and second condenser lens 11 intersects, and forms the beam interference zone; Plano-convex lens 6 is arranged on the top of first condenser lens 5 and second condenser lens 11, the one side of described plano-convex lens 6 is plane 602, another side is a sphere 601, wherein sphere 601 is towards first condenser lens 5 and second condenser lens 11, and plane 602 is arranged on the outgoing focused beam of first condenser lens 5 and the focused beam intersecting area of second condenser lens 11; Measured nano-metal particle is arranged on the plane 602 of plano-convex lens 6, is positioned at the beam interference zone; 602 tops, plane of plano-convex lens 6 are disposed with converges object lens 7 and photoelectric sensor 8, and the photoelectric sensing face of photoelectric sensor 8 is positioned at the focus area after measured nano-metal particle astigmatism process converges object lens 7.
LASER Light Source 1 is a helium-neon gas laser, and wavelength is 632.8nm; Beam-expanding collimation device 2 is Kepler's type beam-expanding collimation device; Phase regulator is the liquid crystal type phase regulator; Photoelectric sensor 8 is a photomultiplier.
The course of work of apparatus of the present invention is LASER Light Source 1 outgoing beam through directive isosceles prism 3 behind the beam-expanding collimation of beam-expanding collimation device 2, is wanted plane 302 to reflect by the first waist plane 301 and second; The light beam of back formation is reflected successively through first catoptron 4 and first condenser lens 5 in the first waist plane 301 by isosceles prism 3, converged by first condenser lens 5, because the reflecting surface of first catoptron 4 and the angle on plane, 303 place, isosceles prism 3 bottom surfaces are greater than the base angle of isosceles prism 3, light beam is retrodeviated by 4 reflections of first catoptron and is folded to LASER Light Source 1 outgoing beam optical path direction; The light beam that is formed by the 303 reflection backs, the second waist plane of isosceles prism 3 passes through phase regulator 9, second catoptron 10, second condenser lens 11 successively, converged by second condenser lens 11, the angle on the reflecting surface of second catoptron 10 and plane, 303 place, isosceles prism 3 bottom surfaces is greater than the base angle of isosceles prism 3, and light beam is retrodeviated by 10 reflections of second catoptron and is folded to LASER Light Source 1 outgoing beam optical path direction.
The outgoing focused beam of the outgoing focused beam of first condenser lens 5 and second condenser lens 11 intersects, and forms the beam interference zone; Plano-convex lens 6 is arranged on the light beam intersection, the sphere 601 of plano-convex lens 6 is towards first condenser lens 5 and second condenser lens 11, and the plane 602 of plano-convex lens 6 is arranged on the outgoing focused beam of first condenser lens 5 and the focused beam intersecting area of second condenser lens 11; Measured nano particle is arranged on the plane 602 of plano-convex lens 6, is positioned at the beam interference zone; Continuously change the phase place of the collimated laser beam of the second waist plane, 302 reflection back formation by phase regulator 9, phase adjustment range is greater than 2 π, phase change causes that the beam interference striped moves on the plane 602 of plano-convex lens 6, and the nano particle scattered light intensity takes place by strong and weak variation the synchronously; The object lens 7 that converge that are arranged on 602 tops, plano-convex lens 6 planes converge to photoelectric sensor 8 with the nano particle scattered light, photoelectric sensor 8 detects the nano particle scattered light intensity, calculate the light intensity contrast ratio that the nano particle astigmatism strength changes, realize the nanoparticle size test.
The invention provides a kind of dimension measuring device for optical standing wave nano-particles, realized that step is simple, it is convenient to realize, no particulate material and light beam parameters interferences, measuring accuracy height, to low, the widely used nanoparticle size measurement of measurement environment requirement.
Claims (5)
1, a kind of dimension measuring device for optical standing wave nano-particles, comprise LASER Light Source, beam-expanding collimation device, isosceles prism, first catoptron, first condenser lens, phase regulator, second catoptron, second condenser lens, plano-convex lens, converge object lens, photoelectric sensor, it is characterized in that:
Beam-expanding collimation device and isosceles prism are successively set on the outgoing beam light path of LASER Light Source, the corresponding LASER Light Source setting of the entrance pupil of beam-expanding collimation device, the top rib of the corresponding isosceles prism of the emergent pupil of beam-expanding collimation device is provided with, and forms the beam-expanding collimation laser beam behind the LASER Light Source outgoing beam process beam-expanding collimation device; The bottom surface of isosceles prism beam-expanding collimation device dorsad is provided with, and two waist planes are that the first waist plane and the second waist plane all are coated with reflectance coating formation beam reflection face, and the isosceles prism base angle is 20 °～80 °; The beam-expanding collimation laser beam direction of propagation is vertical with the bottom surface of isosceles prism, behind the beam-expanding collimation laser beam directive isosceles prism, is formed two bundle collimated laser beams by the first waist plane and the second waist plane reflection;
Light path by the collimated laser beam behind the first waist plane reflection is provided with first catoptron, and first condenser lens is arranged on the reflected light path of first catoptron, and collimated laser beam is focused on by first condenser lens after through first mirror reflects;
Be disposed with the phase regulator and second catoptron by the light path of the collimated laser beam behind the second waist plane reflection, second condenser lens is arranged on the reflected light path of second catoptron, and collimated laser beam is focused on by second condenser lens after through second mirror reflects;
All greater than the base angle of isosceles prism, the outgoing focused beam of first condenser lens and the outgoing focused beam of second condenser lens intersect the angle of the reflecting surface of first catoptron and second catoptron and the bottom surface of isosceles prism, form the beam interference zone; Plano-convex lens is arranged on the top of first condenser lens and second condenser lens, the one side of described plano-convex lens is the plane, another side is a sphere, wherein sphere is towards first condenser lens and second condenser lens, and the plane is arranged on the outgoing focused beam of first condenser lens and the focused beam intersecting area of second condenser lens; Measured nano-metal particle is arranged on the plane of plano-convex lens, is positioned at the beam interference zone; The top, plane of plano-convex lens is disposed with converges object lens and photoelectric sensor, and the photoelectric sensing face of photoelectric sensor is positioned at the focus area after measured nano-metal particle astigmatism process converges object lens.
2, a kind of dimension measuring device for optical standing wave nano-particles as claimed in claim 1 is characterized in that: described LASER Light Source is a kind of in semiconductor laser, solid state laser, gas laser, the liquid laser.
3, a kind of dimension measuring device for optical standing wave nano-particles as claimed in claim 1 is characterized in that: described beam-expanding collimation device is a kind of in Kepler's type beam-expanding collimation device, the Galileo type beam-expanding collimation device.
4, a kind of dimension measuring device for optical standing wave nano-particles as claimed in claim 1 is characterized in that: described phase regulator is a kind of in liquid crystal type phase regulator, reflective phase regulator, low-light grid phase regulator, the wave plate formula phase regulator.
5, a kind of dimension measuring device for optical standing wave nano-particles as claimed in claim 1 is characterized in that: described photoelectric sensor is a kind of in photodiode, snowslide pipe, photomultiplier, the photon counter.
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| CN2009101006150A CN101603813B (en) | 2009-07-10 | 2009-07-10 | Dimension measuring device for optical standing wave nano-particles |
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Cited By (6)
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| CN108027312A (en) * | 2015-07-30 | 2018-05-11 | 皇家飞利浦有限公司 | Laser sensor for particle size detection |
| CN109642868A (en) * | 2016-08-19 | 2019-04-16 | 国立大学法人香川大学 | Optical characteristics measurement device and optical characteristics measuring method |
| CN112296023A (en) * | 2019-07-31 | 2021-02-02 | 台湾积体电路制造股份有限公司 | Particle removal tool and method |
| CN112540031A (en) * | 2020-08-06 | 2021-03-23 | 北京安和博控科技有限公司 | Dust measurement feedback system |
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| CN201429409Y (en) * | 2009-07-10 | 2010-03-24 | 杭州电子科技大学 | Optical standing-wave nanoparticle dimension measuring device |
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- 2009-07-10 CN CN2009101006150A patent/CN101603813B/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108027312A (en) * | 2015-07-30 | 2018-05-11 | 皇家飞利浦有限公司 | Laser sensor for particle size detection |
| CN109642868A (en) * | 2016-08-19 | 2019-04-16 | 国立大学法人香川大学 | Optical characteristics measurement device and optical characteristics measuring method |
| CN109642868B (en) * | 2016-08-19 | 2022-03-15 | 国立大学法人香川大学 | Optical characteristic measuring device and optical characteristic measuring method |
| CN112296023A (en) * | 2019-07-31 | 2021-02-02 | 台湾积体电路制造股份有限公司 | Particle removal tool and method |
| US11145427B2 (en) | 2019-07-31 | 2021-10-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Tool and method for particle removal |
| CN112296023B (en) * | 2019-07-31 | 2022-04-08 | 台湾积体电路制造股份有限公司 | Particle removal tool and method |
| CN112540031A (en) * | 2020-08-06 | 2021-03-23 | 北京安和博控科技有限公司 | Dust measurement feedback system |
| CN112684460A (en) * | 2020-12-21 | 2021-04-20 | 武汉光目科技有限公司 | Area array sweep frequency measuring device and method |
| CN112684460B (en) * | 2020-12-21 | 2024-03-22 | 武汉光目科技有限公司 | Area array sweep frequency measuring device and method |
| CN116973337A (en) * | 2023-09-25 | 2023-10-31 | 成都曙创大能科技有限公司 | Fine diamond wire surface particle number density measurement system |
| CN116973337B (en) * | 2023-09-25 | 2023-12-22 | 成都曙创大能科技有限公司 | Fine diamond wire surface particle number density measurement system |
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