CN107421964A - A kind of scanning system - Google Patents
A kind of scanning system Download PDFInfo
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- CN107421964A CN107421964A CN201710775091.XA CN201710775091A CN107421964A CN 107421964 A CN107421964 A CN 107421964A CN 201710775091 A CN201710775091 A CN 201710775091A CN 107421964 A CN107421964 A CN 107421964A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
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Abstract
Scanning system provided by the invention, including：At least one probe, at least one scanning driving device and a rotating device, the number of the probe is identical with the number of the scanning driving device, and a probe is provided with a scanning driving device.When within a scan period, scanning driving device control probe location keeps constant, probe is scanned according to the driving frequency of scanning driving device to sample, and rotating device is used to drive sample rotation, therefore, when being scanned using above-mentioned scanning system to circular sample, resulting scanning track is circle.So as to, a kind of scanning system for the scanning track that can obtain circle is provided, when being scanned to circular sample, will not be omitted on the circular sample, the important point of the sample pattern is characterized, the accurate scanning result of circular sample can be obtained.
Description
Technical field
The present invention relates to Material Field, more particularly to a kind of scanning system.
Background technology
At present in Material Field, frequently with AFM (Atomic Force Microscope, AFM) to tested
The surface texture of sample is scanned, and due to by AFM scan, high-resolution surface texture can be got, therefore,
AFM is usually used in being scanned precise materials.For example, during chip is manufactured, chip surface is swept frequently with AFM
Retouch, and then get high-resolution chip surface structure.
In the prior art, AFM system uses Single probe, using the scan mode of breakpoint line by line, to the surface of sample
It is scanned.When being scanned with the scan mode of this breakpoint line by line to sample, obtained scanning track is generally straight
Line, it is scanned suitable for square shaped sample.
And be not suitable for being scanned circular sample using above-mentioned scan mode, the scan mode can only obtain directly
Line scans track, often due to lacking the scanning to some points on sample circumference, and causes scanning result not accurate enough,
It can not meet to scan required required precision.
The content of the invention
In order to solve above technical problem present in prior art, the embodiment of the present invention provides a kind of scanning system, energy
Enough scanning results for relatively accurately getting circular sample.
The invention provides a kind of scanning system, including：At least one probe, at least one scanning driving device and one
Rotating device, the number of the probe is identical with the number of the scanning driving device, pacifies on a scanning driving device
Equipped with a probe；
The rotating device, sample rotation is driven in scanning；
The scanning driving device, the probe of the control on the scanning driving device is to the sample
It is scanned；
The probe, the sample is scanned, in a scan period, the probe location is constant, institute
It is the time for scanning the scanning used in a circumference to state a scan period.
Optionally, the scanning driving device and the probe all only have one；
The scanning driving device, control is arranged on the probe on the scanning driving device, at first position
The sample is scanned, after completing a scan period, the scanning driving device control the probe from
The first position is moved to the second place, the first position and the second place and the center of the sample away from
From difference.
Optionally, the scanning driving device controls the probe to be moved to the second place from the first position
Afterwards, the scanning driving device controls the scan frequency of the probe to switch to second frequency, the scanning frequency by first frequency
Rate to visiting the heart apart from directly proportional, it is described visit heart distance be between the probe position and the sample center away from
From.
Optionally, the scanning driving device and the probe are all at least two, and at least two scanning is driven
Dynamic device and at least two probes form a scanning array；
The spy heart of each probe in the scanning array is apart from different.
Optionally, in the scanning array, the scanning driving device controls the scan frequency of the probe, with the spy
The spy heart of pin is apart from directly proportional.
Optionally, after the scanning array completes a scan period, the driving dress in the scanning array
Put the control scanning array and be moved to the 4th position from the 3rd position；
Spy heart distance of each probe before scanning array movement, with the spy after scanning array movement
Heart distance is different.
Optionally, after the scanning array is moved to the 4th position from the 3rd position, the movement of each probe away from
From less than the distance between two described probes in the scanning array.
Optionally, the scanning system includes multigroup scanning array；
In multigroup scanning array, each probe is different from the distance at the center of the sample.
Optionally, the scanning driving device includes：
Cantilever and piezo electric module；
One end of the cantilever connects the probe, and the other end of the cantilever connects the piezo electric module；
The piezo electric module, what control was connected with the piezo electric module, the probe installed on the cantilever is swept
Retouch.
Optionally, the scanning system also includes：Laser and position detector；
The laser, for laser to be exported to the cantilever；
The position detector, for receiving the laser of the cantilever reflection, according to probe described in the laser detection
Position.
Optionally, the scanning system also includes：Rotary information recording device；
The rotary information recording device is used for the scan period for recording the rotating device.
Compared with prior art, the present invention at least has advantages below：
Scanning system provided by the invention, including：At least one probe, at least one scanning driving device and a rotation
Device, the number of the probe is identical with the number of the scanning driving device, is provided with a scanning driving device
One probe.When within a scan period, scanning driving device control probe location keeps constant, and probe is according to scanning
The driving frequency of drive device is scanned to sample, and uses rotating device to drive sample rotation, therefore, is used
When above-mentioned scanning system is scanned to circular sample, resulting scanning track is circle.So as to, there is provided Yi Zhongneng
Enough scanning systems for obtaining circular scanning track, when being scanned to circular sample, will not omit the circular detected sample
On product, the important point of the sample pattern is characterized, the accurate scanning result of circular sample can be obtained.
Brief description of the drawings
, below will be to embodiment or existing in order to illustrate more clearly of the embodiment of the present application or technical scheme of the prior art
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments described in application, for those of ordinary skill in the art, on the premise of not paying creative work,
Other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is a kind of structural representation of scanning system provided by the invention；
Fig. 2 is a kind of scanning system embodiment schematic diagram provided by the invention；
Fig. 3 is the structural representation of another scanning system provided by the invention；
Fig. 4 is another scanning system embodiment schematic diagram provided by the invention；
Fig. 5 is the structural representation of another scanning system provided by the invention；
Fig. 6 is the structural representation of another scanning system provided by the invention.
Embodiment
In order that those skilled in the art more fully understand the present invention program, below in conjunction with the embodiment of the present invention
Accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is only this
Invention part of the embodiment, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art exist
The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
Due to the Single probe in AFM system in the prior art, more scan modes using breakpoint line by line are entered to sample
Row scanning.The scanning track of the scan mode of this breakpoint line by line is generally straight line, is swept suitable for square shaped sample
Retouch.But above-mentioned scan mode of the prior art, it is not suitable for being scanned circular sample.It is if tested in circle
Scan mode of the prior art is used on sample, it is scanned line by line breakpoint, is formed on the circular sample
Scanning track be straight line, that is, the scanning result got be also for the linear scanning result corresponding to linear scanning track, should
In linear scanning track, some scanning feature points on sample circumference are often lacked, the scanning feature point can characterize
Important shape characteristic on the sample circumference, thus the scanning result for causing to finally give can not accurately react this and be tested
The shape characteristic of sample.
And scanning system provided by the invention, when within a scan period, scanning driving device controls the position of probe
Keep constant, probe is scanned according to the driving frequency of scanning driving device to sample, and uses rotating device to drive
Sample rotates, and therefore, when being scanned using above-mentioned scanning system to circular sample, resulting scanning track is
It is circular.Therefore, when the sample to circle is scanned, the scanning track will not omit each heavy on sample circumference
The scanning feature point wanted, the scanning result according to obtained by the scanning track is more accurate, can more accurately react circular and be tested
The shape characteristic of sample.
System embodiment
As shown in figure 1, the structural representation for scanning system provided by the invention.
The scanning system includes：At least one probe 103, at least one scanning driving device 102 and a rotating device
101, the number of the probe 103 is identical with the number of the scanning driving device 102, a scanning driving device 102
On a probe 103 is installed.
The rotating device 101, sample 104 is driven to rotate in scanning.
When being scanned to sample 104, rotating device 101 drives sample 104 to rotate, and the speed of rotation can
To be configured according to the sweep speed of reality, any restriction is not done herein.
It should be noted that it is scanning system that the present invention, which provides, apply in general to be scanned circular sample,
Before being scanned to circular sample, for the ease of the progress of follow up scan, preferably when putting circular sample so that
The center of circular sample and the center superposition of rotating device.
Certainly, in practical application, the sample can also be other shapes, as long as needing to scan on the sample
Circular scanning track, you can the scanning system provided using the application.Before being scanned to sample, sample
It can place on the spinning device according to being actually needed, do not do any restriction herein.Detected sample in the following embodiments of the application
Product are circular sample, and in embodiments herein, the center of circular sample and the center of rotating device 101
Coincide.
The scanning driving device 102, the probe 103 of the control on the scanning driving device 102 is to institute
Sample 104 is stated to be scanned.
The probe 103, the sample 104 is scanned, in a scan period, the probe 103 with
The distance at the center of sample 104 is constant, and one scan period is to scan the sweep time used in a circumference.
The control of scanning driving device 102 is arranged on the probe 103 on itself, and according to certain frequency, sample is carried out
Scanning.Scanning driving device 102 is perpendicular to the plane where the rotating device 101.In one be scanned to sample 104
In the individual scan period, the position of the control probe 103 of scanning driving device 102 is constant, i.e., probe 103 is in scanning driving device 102
Control under, only on the direction of the rotating device 101, carry out up-down vibration；And parallel to the rotating device 101
Direction on, position keep it is constant.Probe 103 is once contacted during up-down vibration with the sample 104,
Complete single pass.And a scan period, refer to that the probe 103 is scanned on the sample, obtain one
Circular scan track duration.
During a scan period, because probe 103 and the distance at the center of sample 104 are constant all the time, i.e.,
For probe 103 on the direction parallel to the rotating device 101, position keeps constant, at the same time, the band always of rotating device 101
Dynamic sample 104 is rotated, can be at different moments, so as to the probe 103 to the circumference of the sample 104 not
It is scanned with position, and then in a scan period, a circular scan rail as shown in phantom in Figure 1 can be obtained
Mark.
In order to facilitate understanding, now to being explained corresponding to the scan method of scanning system provided by the invention：
Before scanning, circular sample 104 is positioned on rotating device 101, and causes circular sample 104
Center and the center of rotating device 101 coincide.So it is for resulting circular scan track, is in circular sample
On concentric circles.
It should be noted that during probe 103 is scanned to sample 104, probe 103 and sample
When 104 surfaces contact, the active force between the surface of sample 104 changes, so as to realize to sample 104
Surface texture is scanned, i.e., as the change of the surface texture of sample 104, probe 103 scan obtained signal and can also sent out
Changing, the signal of the change are the surface texture for having reacted sample 104.And in scanning process, what probe was got
Scanning signal is relative signal, but according only to relative signal, actual structure can not be got, therefore, to detected sample
, it is necessary to select a reference position from the sample 104 before product 104 are scanned, probe 103 passes through to the reference position
It is scanned, realizes the demarcation of reference signal, and then the reference signal is combined into progress with the relative signal obtained during scanning again
Processing, obtains actual scanning result.
In actual applications, the center of sample 104 can be chosen as reference signal calibration point, entered to sample
Before row scanning, scanning driving device 102 controls probe 103 to be moved to the center of sample 104, in the sample 104
The heart is scanned, and realizes the demarcation of reference signal.
Scanning driving device 102 controls probe 103 to be moved to position to be scanned again, and rotating device 101 drives detected sample
Product 104 are rotated.And position of the probe 103 on the direction parallel to the rotating device 101 remains constant, at one
In scan period, according to predetermined scan frequency in vertical direction, the sample 104 rotated is scanned, obtained
Circular scanning track, so as to obtain corresponding circular scan result, the circular scanning result, can characterize the circular quilt
Detect shape characteristic circular on sample 104.It should be noted that rotating device 101 drives the rotation speed of sample 104
Degree, can be set according to the scan frequency of probe 103.
The scanning system that the present embodiment provides, when within a scan period, scanning driving device control probe with it is tested
The relative position at sample center keeps constant, and probe is scanned according to the driving frequency of scanning driving device to sample,
And use rotating device to drive sample rotation, and therefore, when being scanned using above-mentioned scanning system to circular sample,
Resulting scanning track is circle.Therefore, when the sample to circle is scanned, the scanning track will not omit quilt
Each important scanning feature point on sample circumference is surveyed, the scanning result according to obtained by the scanning track is more accurate, can be more smart
The shape characteristic of the circular sample of accurate reaction.
As shown in Fig. 2 when the probe in scanning system only has one, in order to obtain the entirety of a circular sample
Or part surface shape characteristic, the system that the present embodiment can be used to provide are scanned to the surface of circular sample.
The scanning system that the present embodiment provides, the scanning driving device 102 and the probe 103 all only have one.
The scanning driving device 102, control are arranged on the probe 103 on the scanning driving device 102, the
One opening position is scanned to the sample 104, after completing a scan period, the scanning driving device 102
Control the probe 103 to be moved to the second place, the first position and the second place from first position, be tested with described
The distance at the center of sample is different.
Using the system described in above-described embodiment, after scanning a cycle is completed to circular sample, that is, one is got
After individual circular scan result, the probe 103 that scanning driving device 102 also needs control to be arranged on above itself is moved to another one
Put, carry out the scanning of next scan period.As shown in Fig. 2 probe 103 is under the control of scanning driving device 102, first
The scanning of a scan period is completed on position, i.e., on first position, gets a circular scan track.
But an only circular scan result can not obtain a sample part or overall surface appearance feature,
Also need to continue Multiple-Scan to the circular sample, obtain multiple circular scan results, and then by the scanning of acquisition
As a result combine to obtain the surface appearance feature of the circular sample.
Thus, after scanning driving device 102 controls probe 103 to complete a scan period in first position, it is moved to the
Two positions, as shown in Fig. 2 the second place and first position, different from the distance at sample center.It is understood that by
First position is moved to the second place, can basis on the premise of ensureing two positions with sample centre distance difference
It is actually needed determination moving direction, you can, can also be to away from sample to be moved to close to the direction at sample center
The direction movement at center, the track of certain probe movement can also be set as needed, not do any restriction herein.
After probe 103 is moved to the second place, scanning driving device 102 controls probe 103 on the position, according to upper
Scan mode is stated, continues the scanning in next cycle to sample.
It should be noted that the scanning driving device 102 controls the probe 103 to be moved to institute from the first position
After stating the second place, the scanning driving device 102 controls the scan frequency of the probe 103 to switch to second by first frequency
Frequency, the scan frequency, to visiting the heart apart from directly proportional, the spy heart distance is the probe position and the detected sample
The distance between product center.
Because position of the probe 103 on the direction parallel to the rotating device 101 is changed, therefore, gained
Scanning track is also correspondingly changed, and probe 103 is in the scanning track of first position, and probe 103 is in the second place
Scanning track it is as shown in Figure 2.In order to ensure to scan the accuracy of obtained scanning result, it is desirable to which what diverse location was obtained sweeps
Retouch on track, the density of scanning element should keep constant, i.e., on every scanning track, two adjacent scanning elements are on scanning track
Distance should be ensured that it is roughly the same.Therefore, it is necessary to change sweeping for the probe 103 simultaneously while 103 position of probe is changed
Frequency is retouched, the size of the scan frequency depends on the distance between probe position and sample center.Generally,
Distance of the probe 103 apart from sample center is nearer, and frequency is lower；Distance of the probe 103 apart from the center of sample 104 is got over
Far, frequency is higher.
Specifically, if probe 103 is moved to second along the direction away from the center of sample 104 by first position
Put, accordingly, the circular scan track that the scanning that probe 103 carries out a cycle in first position is obtained is the first scanning rail
Mark, the circular scan track that the scanning that probe 103 carries out a cycle in the second place is obtained are the second scanning track.Such as figure
Shown in 2, the second scanning track is longer than the first scanning track.Correspondingly, in order to ensure the second scanning track with first scanning rail
On mark, the density of scanning element is similar, and probe 103 is moved to behind the second place, it is necessary to further improve the probe 103 to detected sample
The scan frequency of product.
If conversely, probe 103 along close to the center of sample 104 direction, the second place is moved to by first position,
The the second scanning track obtained is more shorter than the first scanning track, correspondingly, in order to ensure that the density of scanning element is similar, can drop
Scan frequency of the low probe 103 to sample 104.
During specific implementation, the corresponding relation for visiting heart distance and scan frequency can be pre-set, probe 103 is by first position
After being moved to the second place, scan frequency corresponding to the spy heart distance of now probe 103 is searched, according to the scan frequency to tested
Sample is scanned.By that analogy, when probe 103 is moved to different positions, search the spy heart of the probe 103 at the position away from
From corresponding scan frequency, the sample is scanned.
, can also be when probe 103 be moved to the second place by first position when implementing in addition, scanning system detection
Probe 103 is in the spy heart distance of the second place, scanning element of the internal system according to needed for spy heart distance and scanning track
Density, calculate the spy heart distance corresponding to scan frequency, as scan frequency of the probe 103 on the second place.Certainly,
Other method can be used, the scan frequency after probe location changes is obtained, does not do any restriction herein.
When it is implemented, the spy heart distance after the change of the position of 102 detection probe of scanning driving device 103, this is detected
Spy heart distance send to controller, can if preserving the corresponding relation visited between heart distance and scan frequency inside controller
Directly according to the corresponding relation, to search scan frequency corresponding to the spy heart distance that this is detected；If do not protected inside controller
Deposit the corresponding relation between spy heart distance and scanning, the scanning element that controller can be according to needed for visiting heart distance and scan track
Density, calculate corresponding to the spy heart away from scan frequency.Controller corresponds to sweeping for above-mentioned spy heart distance by what is got
Frequency is retouched, is put on scanning driving device 102, scanning driving device 102 controls probe 103 with above-mentioned scan frequency, to quilt
Test sample product 104 are scanned.
The scanning system that the present embodiment provides, is swept using Single probe system to the surface texture of circular sample
Retouch, specifically, in scanning process, by the position of traveling probe, and the position according to where probe, change sweeping for probe
Frequency is retouched, circular sample is scanned, obtains the surface appearance feature of the sample.It is circular in scanning track
On the basis of, it furthermore achieved that the entire scan to circular scan region.
When probe only has one, it is necessary to by moving repeatedly repeatedly, and scan frequency is varied multiple times, just can obtain by
Multiple scanning tracks of test sample product, so as to obtain the scanning result in region to be scanned on the sample.During in order to reduce scanning
Between, as shown in figure 3, the scanning system that the present embodiment provides, includes at least two probes 303 and at least two scanning driving devices
302, at least two 302 and at least two probe 303 of scanning driving device forms a scanning array.
The spy heart of each probe 303 in the scanning array is apart from different.
In order to ensure quickly to get the scanning result in the region to be scanned of sample, using scanning array to the quilt
Test sample product are scanned, and in the scanning array, the spy heart of each probe 303 is apart from different so that each probe 303 is to this
After sample 304 carries out the scanning of a cycle, that is, it is different to ensure that each probe 303 scans obtained scanning result.
Therefore, within a scan period, the scanning result of multiple border circular areas of the sample 304 is got.Compared to relatively upper one
Embodiment, reduce the mobile number of probe, also reduce the time scanned in the sample used in region to be scanned.
It should be noted that in scanning array, in the case of a kind of, each probe 303 is along arranged in a straight line, two neighboring spy
The distance between pin 303 is all identical；In another case, each probe 303 is along arranged in a straight line.Between two neighboring probe 303
Distance it is different；Also in the case of one kind, each probe 303 is not along arranged in a straight line, arbitrarily distribution, as long as ensureing each spy
Pin 303 and the distance difference at the center of sample 304, are not limited the distribution situation of each probe 303 herein.
In the scanning array, the scanning driving device 302 controls the scan frequency of the probe 303, with the spy
The spy heart of pin is apart from directly proportional.
Because in scanning array, each probe is different from the distance at sample center, i.e., the spy heart of each probe away from
From difference.Similar to the above embodiments, the spy heart of probe distance is different, in order to ensure circular scan rail that each probe is detected
On mark, the density of scanning element is essentially identical, then the scan frequency of each probe is different.That is the scan frequency of probe, with spy
The distance at pin and sample center is directly proportional, that is to say, that for the spy heart of probe apart from smaller, the scan frequency of probe is lower；
The spy heart distance of probe is bigger, and the scan frequency of probe is higher.During specific implementation, it can pre-set and visit heart distance and scanning frequency
The corresponding relation of rate, the scan frequency according to corresponding to searching the spy heart of probe distance.Can also according to the spy heart of probe away from
From the number of the scanning element needed for a scan period, calculating scan frequency in real time.
During specific implementation, the spy heart distance of each probe 303 in the detection probe array of scanning driving device 302, and will inspection
The spy heart distance of each probe 303 measured is all sent to controller, and heart distance and scanning frequency are visited if being preserved inside controller
Corresponding relation between rate, spy heart distance and above-mentioned corresponding relation of the controller according to each probe 303 received, is directly looked into
Look for the scan frequency that heart distance is visited corresponding to each probe 303；If visit heart distance and scan frequency without preservation inside controller
Between corresponding relation, controller can according to each probe 303 visit heart distance and scan track needed for scanning element it is close
Degree, calculate the scan frequency corresponding to each spy heart distance.By the scanning frequency for corresponding to each spy heart distance of above-mentioned acquisition
Rate, put on accordingly on corresponding scanning driving device 302, scanning driving device 302 is according to getting each probe
303 scan frequency, corresponding probe 303 is controlled to be scanned.
When including multiple probes in scanning array, it is possible to reduce to scanning array movement number, you can with by compared with
The probe movement of few number, completes the scanning to sample region to be scanned.Certainly, if in scanning array, what probe was set
It is intensive enough, and the closeness can meet the scanning accuracy to sample region to be scanned, only pass through a scanning week
The scanning of phase, you can obtain the scanning result in region to be scanned.
But during actual scanning, often also need to move scanning array.
As shown in figure 4, after above-mentioned scanning array completes a scan period, the driving in the scanning array
Device 302 controls the scanning array to be moved to the 4th position from the 3rd position.
Spy heart distance of each probe 303 before scanning array movement, and after scanning array movement
Spy heart distance it is different.
As shown in figure 4, the probe 303 in scanning array is scanned in the 3rd position to the surface texture of sample,
After one scan period of progress to be scanned, upper circular scan result of each probe in its corresponding 3rd position is got.
Scanning driving device 302 controls the probe 303 in scanning array to be moved to the 4th position, each spy from the 3rd position
The distance between the 4th position and sample center where pin, with each probe at three positions and in sample
Probe in the distance between heart difference, i.e. scanning array scans obtained circular scan result at four positions, with probe
The circular scan result got at three positions is not overlapping.
Specifically, scanning driving device 302 controls each probe 303 in scanning array to complete one in the 3rd position and swept
After retouching the cycle, each probe 303 is moved to the 4th position, as shown in figure 4, on the 3rd position and the 4th position, each probe
Heart distance is visited to differ.It is understood that the 4th position is moved to by the 3rd position, each spy on two positions are ensured
, can be according to determination moving direction be actually needed, parallel to sample on the premise of the spy heart distance of pin differs
On direction, you can be moved to close to the direction at sample center, can also be moved to the direction away from sample center,
The track of each probe movement can also be set as needed in certain scanning array, not do any restriction herein.
Because the distance between each probe 303 be able to can also be differed with identical in scanning array, therefore in overall shifting
When moving the scanning array, following two situation can be divided into：If the distance between each probe 303 is identical in scanning array, whole
When body moves the scanning array, in order to ensure that the scanning track of each probe 303 in scanning array is not overlapping, mobile distance should
The distance between less than two probes 303；If the distance between each probe 303 differs in scanning array, scanning battle array is obtained
Minimum range in row between two probes 303, when moving integrally scanning array, mobile distance is less than the minimum between the probe
Distance.
It is similar with above-described embodiment, in the mobile scanning array, the spy heart distance of each probe 303 in scanning array
Change, therefore, the scan frequency of each probe 303 also will be correspondingly changed in scanning array.Specifically, if scanning
Array is overall to be moved to the direction away from the center of sample 304, and in scanning array, the scanning track of each probe 303 is with moving
The scanning track of the probe 303 correspondingly, is scanned to ensure each probe 303 to scan on track compared to will be elongated before dynamic
The density of point is constant, it should improves the scan frequency of each probe 303；If scanning array is overall in sample 304
The direction of the heart is moved, and in scanning array, 303 scanning track of each probe will shorten compared with the probe 303 before movement,
Correspondingly, to ensure that the density of scanning element on each scanning of probe 303 track is constant, it should reduce sweeping for each probe 303
Retouch frequency.
The specific acquisition modes of scan frequency are similar with above-described embodiment, will not be repeated here, referring particularly to above-mentioned reality
Apply example.
In addition, in order to further speed up sweep speed, multigroup scanning array can be set in scanning system, as shown in Figure 5.
In multigroup scanning array, each probe is different from the distance at the center of the sample.
In order to obtain the scanning result in sample region to be scanned faster, can further be set in scanning system
Multigroup scanning array, and in multigroup scanning array, each probe is all different from the distance at sample center, and then each spy
The scanning track of pin is not overlapping, within a scan period, can get the scanning result in more circular scan regions.
As a result of multigroup scanning array, and the spy heart of each probe in each scanning array is apart from variant, because
The scanning track of this corresponding each probe is not overlapping, and then, more circle can be obtained within a scan period and swept
Retouch result.If the scanning array set is more, it can realize and get enough circular scan within a scan period
As a result, and then by the way that the enough circular scan results got are combined, the overall scanning knot of sample is obtained
Fruit.I.e. under conditions of not motion scan array, you can get the entire scan result of sample.
The scanning system that the present embodiment provides includes the scanning array being made up of multiple probes and multiple driving scanning means,
The scanning array can get multiple circular scan tracks within a scan period, compared to the scanning system with Single probe,
Scan efficiency is greatly improved.
As shown in fig. 6, the scanning driving device of the scanning system includes：Cantilever 605 and piezo electric module 604.
One end of the cantilever 603 connects the probe 602, and the other end of the cantilever connects the piezo electric module 604.
The piezo electric module 604, what control was connected with the piezo electric module 604, the spy installed on the cantilever 603
Pin 602 is scanned.
In addition, the scanning system also includes：Laser 607 and position detector 608.
The laser 607, for laser to be exported to the cantilever 603.
The position detector 608, for receiving the laser of the cantilever reflection, according to probe described in the laser detection
Position.
After having the interaction of power between the needle point and sample of probe 602, cantilever 603 can be produced correspondingly
Swing, the laser exported by laser 607 is exposed on cantilever, because cantilever 603 is swung, correspondingly, exposes to cantilever
On the position of reflection light irradiation of laser also can be with the swing of cantilever, and change, i.e., produced on position detector 608
Raw certain offset.Position detector records above-mentioned offset, and is converted into electric signal, exists for recording sample
Surface structure information on the scanning element.
The electric signal changed out by offset that position detector 608 will collect, the feedback using the signal as system
Signal.System promotes piezo electric module 604 to produce deformation, and then cause cantilever 603 to drive probe 602 to move according to the feedback signal
It is dynamic, to ensure the power that had certain effect between the needle point of probe 602 and the surface of sample.
In addition, the scanning system can also include：Rotary information recording module 606.
The rotary information recording module 606, record the rotation information of the sample 605.
Specifically, due to many samples structure of itself, breach mark, rotation letter on the circumference of sample be present
Logging modle 606 is ceased, can be marked by detecting the breach, judge that sample 605 lives through a scan period, meanwhile,
Record the rotation information that sample 605 has gone through a scan period.
It is of course also possible to marked by being set on rotating device 601, to realize the record of rotation information.Specifically, can
To set mark on rotating device 601, rotary information recording module, if detecting the mark, illustrates in scanning process
Sample has rotated a circle, and completes a scan period.
The rotary information recording module can be CCD image sensor, or other detection devices, not appoint herein
What is limited.
The scanning system that the present embodiment provides, more completely describe the work side of scanning system provided by the invention
Method.
Scanning system provided by the invention in actual applications, can apply to the production of chip manufacturing factory chips,
It can be used for being scanned less sample in laboratory, when for scanning less sample in laboratory, use is above-mentioned
The Single probe system provided in embodiment can meet to require.
The above described is only a preferred embodiment of the present invention, any formal limitation not is made to the present invention.Though
So the present invention is disclosed above with preferred embodiment, but is not limited to the present invention.It is any to be familiar with those skilled in the art
Member, without departing from the scope of the technical proposal of the invention, all using the methods and technical content of the disclosure above to the present invention
Technical scheme makes many possible changes and modifications, or is revised as the equivalent embodiment of equivalent variations.Therefore, it is every without departing from
The content of technical solution of the present invention, the technical spirit according to the present invention is to any simple modification made for any of the above embodiments, equivalent
Change and modification, still fall within technical solution of the present invention protection in the range of.
Claims (11)
- A kind of 1. scanning system, it is characterised in that including：At least one probe, at least one scanning driving device and a rotation Rotary device, the number of the probe is identical with the number of the scanning driving device, is installed on a scanning driving device There is a probe；The rotating device, sample rotation is driven in scanning；The scanning driving device, the probe that control is arranged on the scanning driving device are carried out to the sample Scanning；The probe, the sample is scanned, in a scan period, the probe location is constant, and described one The individual scan period is the time for scanning the scanning used in a circumference.
- 2. system according to claim 1, it is characterised in thatThe scanning driving device and the probe all only have one；The scanning driving device, control is arranged on the probe on the scanning driving device, to institute at first position State sample to be scanned, after completing a scan period, the scanning driving device controls the probe from described First position is moved to the second place, and the distance at the first position and the second place and the center of the sample is not Together.
- 3. system according to claim 2, it is characterised in thatAfter the scanning driving device controls the probe to be moved to the second place from the first position, the scanning is driven Dynamic device controls the scan frequency of the probe to switch to second frequency by first frequency, the scan frequency with visit heart distance into Direct ratio, the spy heart distance is the distance between the probe position and the sample center.
- 4. system according to claim 1, it is characterised in thatThe scanning driving device and the probe are all at least two, at least two scanning driving device and at least Two probes form a scanning array；The spy heart of each probe in the scanning array is apart from different.
- 5. system according to claim 4, it is characterised in thatIn the scanning array, the scanning driving device controls the scan frequency of the probe, the spy with the probe The heart is apart from directly proportional.
- 6. system according to claim 5, it is characterised in thatAfter the scanning array completes a scan period, swept described in the drive device control in the scanning array Retouch array and be moved to the 4th position from the 3rd position；Spy heart distance of each probe before scanning array movement, with the spy heart after scanning array movement away from From difference.
- 7. system according to claim 6, it is characterised in thatAfter the scanning array is moved to the 4th position from the 3rd position, the distance of the movement of each probe, less than described The distance between two described probes in scanning array.
- 8. system according to claim 4, it is characterised in that the scanning system includes multigroup scanning array；In multigroup scanning array, each probe is different from the distance at the center of the sample.
- 9. system according to claim 1, it is characterised in that the scanning driving device includes：Cantilever and piezo electric module；One end of the cantilever connects the probe, and the other end of the cantilever connects the piezo electric module；The piezo electric module, what control was connected with the piezo electric module, the probe installed on the cantilever is scanned.
- 10. according to the system described in claim 1-9, it is characterised in that also include：Laser and position detector；The laser, for laser to be exported to the cantilever；The position detector, for receiving the laser of the cantilever reflection, according to the position of probe described in the laser detection.
- 11. according to the system described in claim 1-9, it is characterised in that also include：Rotary information recording device；The rotary information recording device is used for the scan period for recording the rotating device.
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Application publication date: 20171201 |