CN206073931U - Contour detecting gauge head and detector - Google Patents
Contour detecting gauge head and detector Download PDFInfo
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- CN206073931U CN206073931U CN201621050012.6U CN201621050012U CN206073931U CN 206073931 U CN206073931 U CN 206073931U CN 201621050012 U CN201621050012 U CN 201621050012U CN 206073931 U CN206073931 U CN 206073931U
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Abstract
A kind of contour detecting gauge head and detector, wherein, the contour detecting gauge head includes：Connecting rod, its top are used to be fixed to detection instrument body；Probe position, is arranged on the bottom of connecting rod at the top of which, its bottom is used to provide probe installation position；First probe, is arranged on the first probe installation position of probe position bottom, for carrying out contour detecting in the first pattern；Second probe, is arranged on the second probe installation position of probe position bottom, for carrying out contour detecting in a second mode.So that the data of different mode detection are referred to, it is easy between different mode detect the adjustment of parameter, while detection efficiency can be improved then, improves contour detecting precision.
Description
Technical field
The present invention relates to instrument detection field of sensing technologies, and in particular to a kind of contour detecting gauge head and detector.
Background technology
Nineteen twenty-nine Germany scientist Schmaltz have developed the profile monitor of First contact pin type, and the instrument make use of
Optical lever amplification principle measurement surface profile.After this, Taylor Hobson companies of Britain also put into surface profiler
Research and development in the middle of and the not little achievement of acquirement.With the development of sensing detection technology, the resolution of measuring surface form is big with precision
It is big to improve, submicron even Nano grade can be reached.Nowadays, the metering system of surface topography is roughly divided into five kinds：Mechanical stylus
Formula measurement, the measurement of optical probe formula, interference micrometering, scanning electron microscope (SEM) and scanning probe microscopy (SPM),
Wherein, due to directly contact measured surface, its measurement result is reliable and stable, and the measurement of Mechanical stylus formula is employed extensively in industrial circle
It is general.
Mechanical stylus formula is measured for the small spacing of measurement surface and peak valley, is needed using superfine needle point, contact pilotage pin
Point is brought into close contact with measured surface in the presence of mechanism's self gravitation, external mechanical force or electromagnetic force.In scanning process,
Object stage or contact pilotage are moved in parallel along certain orientation, make system pointwise sample, so as to obtain the contour curve of measured surface.
The shortcoming of this contact type measurement instrument is：A () sample rate is slow, efficiency is low；(b) due to the uncertainty of measured surface hardness,
Contact pilotage may scratch measured surface, so not being suitable for the detection of soft material；C () cannot be surveyed due to the restriction of needle type radius
Measure ultra-precision surface and measure profile medium-high frequency part of concern, thus be not suitable for the detection of ultra-precision surface.
For every drawback of Mechanical stylus formula, the surface profile detector for having arisen at the historic moment contactless, wherein wrapping again
Include and mechanical gauge head is replaced by into laser feeler.But non-contact surface outline detector is solving the measurement of traditional mechanical contact pin type
While three big drawback of instrument, a bigger problem is brought, that is, unstable, precision is not high enough.For example, it is (a) tested
The material reflectance of workpiece directly affects measurement result；B () measured surface needs are very bright and clean, dust or greasy dirt can all affect
Measurement result；C () can cause distorted signals or distortion etc. in contour surface of the measurement containing larger inclination angle.
Therefore, how to improve contour detecting precision while detection efficiency is improved becomes technical problem urgently to be resolved hurrily.
The content of the invention
The technical problem to be solved in the present invention is how contour detecting precision to be improved while detection efficiency is improved.
For this purpose, according in a first aspect, the embodiment of the invention discloses a kind of contour detecting gauge head, including：
Connecting rod, its top are used to be fixed to detection instrument body；Probe position, is arranged on the bottom of connecting rod at the top of which,
Its bottom is used to provide probe installation position；First probe, is arranged on the first probe installation position of probe position bottom, for first
Pattern carries out contour detecting；Second probe, is arranged on the second probe installation position of probe position bottom, for carrying out in a second mode
Contour detecting.
Alternatively, first pop one's head in as laser type gauge head, the second probe positioning contact type gauge head.
Alternatively, in contour detecting, the detection track of the first probe is in front of the detection track of the second probe.
Alternatively, also include：Turntable, is arranged on the top of connecting rod, for connecting rod is fixed to detection detachably
On instrument body.
Alternatively, turntable is additionally operable to drive connection bar motion.
According to second aspect, the embodiment of the invention discloses a kind of outline detector, including：
Above-mentioned contour detecting gauge head；Column, for putting contour detecting gauge head, is additionally operable to drive contour detecting gauge head to prolong
Z-direction is moved；Planar tracks, for the track of X-axis and/or Y-axis translation is provided to column；Detecting position, is arranged on plane rail
Below road, position is placed for providing to profile to be measured.
Alternatively, outline detector position three coordinate measuring machine.
Technical solution of the present invention, has the advantage that：
Contour detecting gauge head provided in an embodiment of the present invention, detector and detection method, as first being popped one's head in and second
Probe is arranged on same probe position, therefore, when treating measuring wheel exterior feature and carrying out contour detecting, can be by the first probe with first
Pattern carries out contour detecting, carries out contour detecting in a second mode by the second probe such that it is able to so that different mode detection
Data referred to, be easy between different mode detect the adjustment of parameter, improve while can improving then detection efficiency
Contour detecting precision.
Used as preferred technical scheme, the measurement frequency of the second probe is with the flexibility of the curvature information for extracting into just
Than, so as to when contour detecting is carried out in a second mode using the second probe, can self-adaptative adjustment its measurement frequency, then can
Enough pools for further realizing efficiency and precision.
Description of the drawings
In order to be illustrated more clearly that the specific embodiment of the invention or technical scheme of the prior art, below will be to concrete
Needed for embodiment or description of the prior art, accompanying drawing to be used is briefly described, it should be apparent that, in describing below
Accompanying drawing is some embodiments of the present invention, for those of ordinary skill in the art, before creative work is not paid
Put, can be with according to these other accompanying drawings of accompanying drawings acquisition.
Fig. 1 is a kind of contour detecting measuring head structure schematic diagram in the embodiment of the present invention；
Fig. 2 is a kind of outline detector structural representation in the embodiment of the present invention；
Fig. 3 is a kind of profile testing method flow chart in the embodiment of the present invention；
Fig. 4 is a kind of contour detecting process signal in the embodiment of the present invention.
Specific embodiment
Technical scheme is clearly and completely described below in conjunction with accompanying drawing, it is clear that described enforcement
Example is a part of embodiment of the invention, rather than the embodiment of whole.Based on the embodiment in the present invention, ordinary skill
The every other embodiment obtained under the premise of creative work is not made by personnel, belongs to the scope of protection of the invention.
In describing the invention, it should be noted that term " " center ", " on ", D score, "left", "right", " vertical ",
The orientation or position relationship of the instruction such as " level ", " interior ", " outward " be based on orientation shown in the drawings or position relationship, merely to
Be easy to description the present invention and simplify description, rather than indicate or imply indication device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.Additionally, term " first ", " second ",
" the 3rd " is only used for describing purpose, and it is not intended that indicating or implying relative importance.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Company ", " connection " should be interpreted broadly, for example, it may be being fixedly connected, or being detachably connected, or be integrally connected；Can
Being to be mechanically connected, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be with
It is the connection of two element internals, can is wireless connection, or wired connection.For one of ordinary skill in the art
For, above-mentioned term concrete meaning in the present invention can be understood with concrete condition.
As long as additionally, the non-structure each other of technical characteristic involved in invention described below different embodiments
Can just be combined with each other into conflict.
Fig. 1 is refer to, is a kind of contour detecting gauge head disclosed in the present embodiment, the contour detecting gauge head includes：Connecting rod
1st, probe position 2, first probe 3 and the second probe 4, wherein：
Its top of connecting rod 1 is used to be fixed to detection instrument body.Generally, contour detecting gauge head is arranged on outline detector
On (such as three coordinate measuring machine), realize that treating detection object carries out contour detecting by driving the movement for detecting gauge head.Cause
This, in the present embodiment, realizes gauge head is fixed on detection instrument body by connecting rod 1.
Probe position 2 is arranged on the bottom of connecting rod 1 at the top of which, and its bottom is used to provide probe installation position.It is being embodied as
In example, the top of connecting rod 1 is connected on detection instrument body, and the bottom of connecting rod 1 can arrange probe position 2.It is being embodied as
In example, the bottom of position 2 of popping one's head in can connect probe, to realize carrying out corresponding contour detecting to object to be measured.
First probe 3 is arranged on the first probe installation position of probe 2 bottom of position, for carrying out profile inspection in the first pattern
Survey.In the present embodiment, probe 2 bottom of position arranges at least two and pops one's head in installation positions, refer to Fig. 1, and at least two probe positions can be with
It is arranged side by side, for example with left and right mode side by side, to realize the tandem arrangement at least two probes position.In this enforcement
In example, illustrate so that two are popped one's head in position as an example, the first probe 3 is arranged on the first probe installation position, in the present embodiment, first
Probe 3 is laser type gauge head, and the first probe 3 can be such as non-contact sensor such as laser sensor (laser probe, LP)
Device, to improve contour detecting efficiency.In a particular embodiment, the first probe 3 can take wing plate to add mode connects for screw, convenient to dismantle
Install.
Second probe 4 is arranged on the second probe installation position of probe 2 bottom of position, for carrying out profile inspection in a second mode
Survey.In the present embodiment, the second probe 4 is contact measuring head, to improve accuracy of detection.Specifically, in the present embodiment, second visits
4 can be contact trigger sensor (touch-trigger probe, TP).
In the present embodiment, when contour detecting is carried out to object to be measured, the detection track of the first probe 3 is positioned at the second probe
In front of 4 detection track.That is, the first probe 3 work such as can be collected, arrange prior to the second 4 pairs of outline datas of probe,
Anticipation is done with the frequency acquisition for giving the second probe 4.
In order to realize the rotation of gauge head and/or be detachably connected with detection instrument body, in a particular embodiment, the profile is examined
Surveying gauge head can also include：Turntable 5, turntable 5 are arranged on the top of connecting rod 1, for being detachably fixed to connecting rod 1
On detection instrument body.Specifically, turntable 5 is additionally operable to drive connection bar 1 and moves, and the motion can for example be rotated, certainly,
Can carry out translation by other Auxiliary Tracks.Connected with turntable, be capable of achieving the scanning of difference direction of feed.
The present embodiment also discloses a kind of outline detector, refer to Fig. 2, and the outline detector includes：Above-described embodiment
Disclosed contour detecting gauge head 10, column 20, planar tracks 30 and detecting position, wherein：
Contour detecting gauge head 10 is for carrying out contour detecting to object to be measured.
Column 20 is used to put contour detecting gauge head 10, is additionally operable to drive contour detecting gauge head 10 to prolong Z-direction movement.Tool
Body ground, can be connected on column 20, certainly, in an alternate embodiment of the invention by the top of connecting rod 1, and connecting rod 1 can be led to
Cross turntable 5 to be connected on column 20, so that gauge head can be rotated in direction about the z axis.
Planar tracks 30 are for the track to the offer X-axis of column 20 and/or Y-axis translation.In a particular embodiment, by column
20 are movably disposed in planar tracks 30, so as to being column 20 supports there is provided the track along X-axis and/or Y-axis translation.
Detecting position is arranged on below planar tracks 30, places position for providing to profile to be measured.
In an alternate embodiment of the invention, outline detector position three coordinate measuring machine.
The present embodiment also discloses a kind of profile testing method, refer to Fig. 3, and the profile testing method includes following step
Suddenly：
Step S100, the first probe detect profile to be measured successively from the starting point of default detective path and obtain profile to be measured
Preliminary survey curve.Generally, the first probe is contactless gauge head, therefore, it is possible to the general profile for more comprehensively obtaining profile to be measured
Curve (preliminary survey curve), can tentatively judge the information such as the shape of profile, flatness, curvature by the preliminary survey curve, and this is preliminary
Judgement can be that comparison is efficient.
Step S200, the second probe adjust measurement frequency to complete along pre- according to the curvature information extracted from preliminary survey curve
If the detection of the second probe of detective path.In a particular embodiment, the measurement frequency of the second probe and the curvature letter for extracting
The flexibility of breath is directly proportional, and specifically, after the first probe obtains preliminary survey curve, can extract from the preliminary survey calibration curve information
Curvature information, can adjust the measurement frequency of the second probe according to the curvature information, such as, when flexibility is higher, measurement frequency can
To increase such that it is able to more thickly detect, when flexibility is relatively low relatively flat, measurement frequency can be reduced, increase measurement step
It is long such that it is able to be rapidly completed detection.
In a preferred embodiment, in execution step S100, in the terminating point of the first probe detection to default detective path
Afterwards, turntable drives probe position to be moved to next default detective path, and drives probe position adjustment attitude so that carry out it is next
When default detective path is detected, the first probe is positioned at the front of the second probe.
For ease of it will be appreciated by those skilled in the art that hereafter being illustrated to detection process with specific example.Refer to Fig. 4,
To carry out not illustrating in the same time in the measurement process of contour detecting to a certain object to be measured in the present embodiment, Fig. 4 is illustrated
(1), (2), (3), (4), (5) and (6) individual different detection process, the detective path of the detection process have l1, l2, l3, l4 and
L5, such as, when being scanned to path l1, be obtained the contour line of l1, and this is personalized scanning.Specifically：
Initial sweep point (starting point of default detective path) can be predefined, and after X, Y positive direction, has been visited by LP
Survey the starting point of path l1.When LP captures jump signal, show that LP has reached surface location, at this point it is possible to record coordinate
Value, i.e. LP enter the boundary point (the as starting point in path) of curved surface to be measured.Now, Y-axis movement is controlled on bridge-type bracing frame
Servomotor is locked, and measuring system cannot be moved in Y direction.Meanwhile, the servomotor of turntable is locked, and sensor cannot be around
Z axis to be rotated.
Then, measuring system is moved along X-axis positive direction, when TP moves to boundary point (starting point of default detective path)
When, TP is remeasured to which, and result is incorporated into system, is recorded as starting point.Now, if the coordinate with LP records
Value error is larger, machine alarm, opens protection system, and all motions stop, and the coordinate figure error can be with empirically determined.
During scanning along X positive directions, LP is detected in leading portion always, keeps surveying with default Δ X unit length
Amount path l1, to obtain the coordinate information of surface profile point.Coordinate information now is used for two different processing systems, a side
Face is digitized by the information collected, and is then fitted to preliminary survey curve, and is therefrom extracted curvature information；Another aspect root
The negative feedback of signal is carried out according to default curvature criterion, the measurement frequency of TP is adjusted, it is adaptively sampled to complete.Sentencing here
According to, curvature can be generally adopted, when curvature ki of TP sweep tests is more than preset curvature value k0, rate of scanning increases；Work as TP
When curvature ki of sweep test is less than preset curvature value k0, rate of scanning is reduced.And due to the precision of TP it is higher, so combining TP
Measurement result, the key point of preliminary survey curve is modified, final curves are finally fitted to.As, in Fig. 4 (2), being to measure
Cheng Zhong, different state phases illustrate.
When LP captures jump signal, show that LP has arrived at the end in path, record the coordinate figure of the jump signal,
That is LP leaves the boundary point (terminating point of default detective path) of curved surface.Then, measurement apparatus continue on X positive directions movement d+
Δ d (d is the horizontal range between the laser beam that the central shaft and LP of TP measuring staffs sends, and Δ d is measuring instrument preset value).
When TP moves to boundary point (terminating point of default detective path), which is remeasured, and result is whole
System is closed, curve is fitted to.Now, if larger with the coordinate figure error of LP records, machine alarm opens protection system,
All motions stop, and referring specifically to above-described embodiment, will not be described here.
After TP completes the measurement of path terminating point, the unblock of turntable servomotor, and be rotated by 90 ° around Z axis, it is changed into LP
On a left side, on the right side, then, turntable servomotor is locked for TP, to measure to path l2, thus, path l2 is being surveyed
During amount, also so that LP is before TP.
The servomotor unblock of Y-axis movement is controlled on bridge-type bracing frame, measurement apparatus move Δ Y along Y-axis positive direction.So
Afterwards, the servomotor that Y-axis movement is controlled on bridge-type bracing frame is locked.After the measurement for completing path l2, turntable rotates again
90 °, to measure along path l3.
Now, whether LP is to measure table top to judge whether to have been enter into curved surface according to focus.In this way, then continue to X-direction
Mobile, the catastrophe point until running into signal, the as boundary point of curved surface profile line complete the measurement of path l3.Repetition is above-mentioned
Step, can measure to other paths l4, l5 etc..
Contour detecting gauge head, detector and detection method that the present embodiment is provided, as the first probe and second being popped one's head in
It is arranged on same probe position, therefore, when treating measuring wheel exterior feature and carrying out contour detecting, can be by the first probe in the first pattern
Contour detecting is carried out, contour detecting is carried out in a second mode by the second probe such that it is able to so that the number of different mode detection
According to being referred to, it is easy between different mode detect the adjustment of parameter, while detection efficiency can be improved then, improves profile
Accuracy of detection.
In a preferred embodiment, the measurement frequency of the second probe is directly proportional to the flexibility of the curvature information for extracting,
So as to when contour detecting is carried out in a second mode using the second probe, can self-adaptative adjustment its measurement frequency, then can
The pool of efficiency and precision is realized further.
Those skilled in the art are it should be appreciated that embodiments of the invention can be provided as method, system or computer program
Product.Therefore, the present invention can adopt complete hardware embodiment, complete software embodiment or with reference to the reality in terms of software and hardware
Apply the form of example.And, the present invention can be using the computer for wherein including computer usable program code at one or more
The computer program implemented in usable storage medium (including but not limited to disk memory, CD-ROM, optical memory etc.) is produced
The form of product.
The present invention be with reference to method according to embodiments of the present invention, equipment (system), and computer program flow process
Figure and/or block diagram are describing.It should be understood that can be by computer program instructions flowchart and/or each stream in block diagram
The combination of journey and/or square frame and flow chart and/or flow process and/or square frame in block diagram.These computer programs can be provided
The processor of general purpose computer, special-purpose computer, Embedded Processor or other programmable data processing devices is instructed to produce
A raw machine so that produced for reality by the instruction of computer or the computing device of other programmable data processing devices
The device of the function of specifying in present one flow process of flow chart or one square frame of multiple flow processs and/or block diagram or multiple square frames.
These computer program instructions may be alternatively stored in and can guide computer or other programmable data processing devices with spy
Determine in the computer-readable memory that mode works so that the instruction being stored in the computer-readable memory is produced to be included referring to
Make the manufacture of device, the command device realize in one flow process of flow chart or one square frame of multiple flow processs and/or block diagram or
The function of specifying in multiple square frames.
These computer program instructions can be also loaded in computer or other programmable data processing devices so that in meter
Series of operation steps is performed on calculation machine or other programmable devices to produce computer implemented process, so as in computer or
The instruction performed on other programmable devices is provided for realizing in one flow process of flow chart or multiple flow processs and/or block diagram one
The step of function of specifying in individual square frame or multiple square frames.
Obviously, above-described embodiment is only intended to clearly illustrate example, and the not restriction to embodiment.It is right
For those of ordinary skill in the art, can also make on the basis of the above description other multi-forms change or
Change.There is no need to be exhaustive to all of embodiment.And thus it is extended obvious change or
Among changing still in the protection domain of the invention.
Claims (7)
1. a kind of contour detecting gauge head, it is characterised in that include：
Connecting rod (1), its top are used to be fixed to detection instrument body；
Probe position (2), is arranged on the bottom of the connecting rod (1) at the top of which, its bottom is used to provide probe installation position；
First probe (3), is arranged on the first probe installation position of probe position (2) bottom, for entering road wheel in the first pattern
Wide detection；
Second probe (4), is arranged on the second probe installation position of probe position (2) bottom, for entering road wheel in a second mode
Wide detection.
2. contour detecting gauge head as claimed in claim 1, it is characterised in that first probe (3) is laser type gauge head, institute
State the second probe (4) positioning contact type gauge head.
3. contour detecting gauge head as claimed in claim 2, it is characterised in that in contour detecting, first probe (3)
Detection track is in front of the detection track of the described second probe (4).
4. the contour detecting gauge head as described in claim 1-3 any one, it is characterised in that also include：
Turntable (5), is arranged on the top of the connecting rod (1), for the connecting rod (1) is fixed to detector detachably
On body.
5. contour detecting gauge head as claimed in claim 4, it is characterised in that the turntable (5) is additionally operable to drive the company
Extension bar (1) is moved.
6. a kind of outline detector, it is characterised in that include：
Contour detecting gauge head (10) as described in claim 1-5 any one；
Column (20), for putting the contour detecting gauge head (10), is additionally operable to drive the contour detecting gauge head (10) to prolong Z axis
Move in direction；
Planar tracks (30), for the track of X-axis and/or Y-axis translation is provided to the column (20)；
Detecting position, is arranged on below the planar tracks (30), places position for providing to profile to be measured.
7. outline detector as claimed in claim 6, it is characterised in that outline detector position three coordinate measuring machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621050012.6U CN206073931U (en) | 2016-09-12 | 2016-09-12 | Contour detecting gauge head and detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621050012.6U CN206073931U (en) | 2016-09-12 | 2016-09-12 | Contour detecting gauge head and detector |
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| CN206073931U true CN206073931U (en) | 2017-04-05 |
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ID=58437932
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| Application Number | Title | Priority Date | Filing Date |
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| CN201621050012.6U Withdrawn - After Issue CN206073931U (en) | 2016-09-12 | 2016-09-12 | Contour detecting gauge head and detector |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106225718A (en) * | 2016-09-12 | 2016-12-14 | 武汉科技大学 | Contour detecting gauge head, detector and detection method |
| CN109253715A (en) * | 2017-07-13 | 2019-01-22 | 株式会社三丰 | Measuring Device Management System and computer-readable medium |
| CN109540059A (en) * | 2018-11-27 | 2019-03-29 | 惠州绿保科技有限公司 | A kind of contourgraph rotary scanning mechanism |
| CN111578876A (en) * | 2020-05-29 | 2020-08-25 | 英格索兰（中国）工业设备制造有限公司 | Measuring rod and three-coordinate measuring machine |
-
2016
- 2016-09-12 CN CN201621050012.6U patent/CN206073931U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106225718A (en) * | 2016-09-12 | 2016-12-14 | 武汉科技大学 | Contour detecting gauge head, detector and detection method |
| CN106225718B (en) * | 2016-09-12 | 2018-06-26 | 武汉科技大学 | Contour detecting gauge head, detector and detection method |
| CN109253715A (en) * | 2017-07-13 | 2019-01-22 | 株式会社三丰 | Measuring Device Management System and computer-readable medium |
| CN109540059A (en) * | 2018-11-27 | 2019-03-29 | 惠州绿保科技有限公司 | A kind of contourgraph rotary scanning mechanism |
| CN111578876A (en) * | 2020-05-29 | 2020-08-25 | 英格索兰（中国）工业设备制造有限公司 | Measuring rod and three-coordinate measuring machine |
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Granted publication date: 20170405 Effective date of abandoning: 20180626 |