CN104019750B - Device and method for measuring effective arm length of swing arm type contourgraph - Google Patents

Device and method for measuring effective arm length of swing arm type contourgraph Download PDF

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CN104019750B
CN104019750B CN201410243303.6A CN201410243303A CN104019750B CN 104019750 B CN104019750 B CN 104019750B CN 201410243303 A CN201410243303 A CN 201410243303A CN 104019750 B CN104019750 B CN 104019750B
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target ball
arm
sphere
turntable
transverse arm
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陈林
曹学东
景洪伟
匡龙
李�杰
魏中伟
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Institute of Optics and Electronics of CAS
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Abstract

本发明一种摆臂式轮廓仪有效臂长的测量装置和方法,该装置由第一靶球、第二靶球、微调机构、横臂、横臂支座、配重块、计算机、第一角度块、横臂转台、第二角度块、激光跟踪仪、工件转台、待测镜面、接触式传感器和工作台面组成;横臂绕横臂转台轴心线旋转,接触式传感器的测头球心、第一靶球的球心和第二靶球的球心在空间形成绕横臂转台轴心线旋转的圆弧轨迹,激光跟踪仪分别跟踪测量第一靶球的球心和第二靶球的球心在空间形成的圆弧轨迹,通过计算机的数据处理,得到接触式传感器的测头球心到横臂转台轴心线的距离,即摆臂式轮廓仪有效臂长。

The present invention is a measuring device and method for the effective arm length of a swing-arm type profiler. The device consists of a first target ball, a second target ball, a fine-tuning mechanism, a cross arm, a cross-arm support, a counterweight, a computer, a first Angle block, cross-arm turntable, second angle block, laser tracker, workpiece turntable, mirror to be tested, contact sensor and worktable; the cross-arm rotates around the axis of the cross-arm turntable, and the ball center of the contact sensor probe 1. The center of the first target ball and the center of the second target ball form an arc trajectory that rotates around the axis of the cross-arm turntable in space, and the laser tracker tracks and measures the center of the first target ball and the second target ball respectively. The arc trajectory formed by the center of the sphere in space, through the data processing of the computer, the distance from the sphere center of the touch sensor probe to the axis line of the cross-arm turntable is obtained, that is, the effective arm length of the swing-arm profiler.

Description

一种摆臂式轮廓仪有效臂长的测量装置和方法Device and method for measuring effective arm length of swing arm profiler

技术领域technical field

本发明属于几何量精密测试领域,涉及摆臂式轮廓仪有效臂长的测量装置和方法,适用于摆臂式轮廓仪有效臂长的测量。The invention belongs to the field of precise measurement of geometric quantities, relates to a measuring device and method for the effective arm length of a swing-arm profiler, and is suitable for measuring the effective arm length of a swing-arm profiler.

背景技术Background technique

摆臂式轮廓仪的有效臂长是指:接触式传感器的测头球心到横臂转台轴心线的垂直距离。The effective arm length of the swing arm profiler refers to the vertical distance from the sphere center of the probe head of the contact sensor to the axis line of the cross arm turntable.

摆臂式轮廓仪是一种有效的光学镜面加工过程的在位检测仪器,其最大的特点是直接安装在待测光学镜面旁,将待测光学镜面加工机床的转台作为摆臂式轮廓仪的工作转台使用,对待测镜面进行实现在位检测。在摆臂式轮廓仪测量过程中,有效臂长对摆臂式轮廓仪测量的面形结果会产生影响;有效臂长对面形上点坐标造成影响,在点坐标存在误差的前提下,无法保证镜面的继续精确加工;在利用摆臂式轮廓仪双测头扫描数据拼接技术实现工件转台误差分离时,有效臂长的测量误差将会影响数据拼接的精度。The swing arm profiler is an effective in-situ inspection instrument for optical mirror processing. Its biggest feature is that it is directly installed next to the optical mirror to be tested, and the turntable of the optical mirror processing machine tool to be tested is used as the swing arm profiler. The working turntable is used to realize in-situ inspection of the mirror surface to be tested. During the measurement process of the swing-arm profiler, the effective arm length will affect the surface shape measured by the swing-arm profiler; the effective arm length will affect the point coordinates on the surface shape, and it cannot be guaranteed under the premise that there is an error in the point coordinates Continue to accurately process the mirror surface; when using the swing-arm profiler dual-probe scanning data stitching technology to realize the error separation of the workpiece turntable, the measurement error of the effective arm length will affect the accuracy of the data stitching.

由于摆臂式轮廓仪的有效臂长是空间的一个虚拟几何尺寸,无法用传统的几何量测量方法进行测量,国内外未见摆臂式轮廓仪有效臂长测量的相关报道。Since the effective arm length of the swing-arm profiler is a virtual geometric dimension of space, it cannot be measured by traditional geometric measurement methods. There are no relevant reports on the measurement of the effective arm length of the swing-arm profiler at home and abroad.

发明内容Contents of the invention

(一)要解决的技术问题(1) Technical problems to be solved

为了解决现有技术有效臂长对面形上点坐标造成影响,有效臂长的测量误差影响数据拼接的精度的技术问题,本发明的目的是提供能精确测量摆臂式轮廓仪的有效臂的测量装置和方法。In order to solve the technical problem that the effective arm length affects the point coordinates on the surface and the measurement error of the effective arm length affects the accuracy of data splicing in the prior art, the purpose of the present invention is to provide the measurement of the effective arm that can accurately measure the swing arm type profiler Apparatus and methods.

(二)技术方案(2) Technical solution

本发明的第一方面,提供一种摆臂式轮廓仪有效臂长的测量装置,该装置由第一靶球、第二靶球、微调机构、横臂、横臂支座、配重块、计算机、第一角度块、横臂转台、第二角度块、激光跟踪仪、工件转台、待测镜面、接触式传感器和工作台面组成,其中:第一靶球、第二靶球靠磁力吸附连接于微调机构上;横臂的一端置于微调机构的安装孔中;横臂支座的一端具有一通孔,横臂的另一端置于并穿过通孔;配重块与横臂的另一端连接,用于平衡接触式传感器和横臂,用以保证横臂转台保持平稳的旋转;第一角度块的上端面与横臂支座的底端面固定连接;横臂转台上端面与第一角度块的斜端面固定连接;第二角度块的斜端面与横臂转台下端面固定连接;第二角度块的下端面固定安装在工作台面上;激光跟踪仪置于靠近横臂转台的轴心线的位置,并保证激光跟踪仪不能干涉横臂转台转动,激光跟踪仪的底端面置于工作台面上;待测镜面位于工件转台上;接触式传感器的一端与微调机构连接,接触式传感器的测头外轮廓与待测镜面接触;横臂绕横臂转台的轴心线旋转,带动接触式传感器、第一靶球和第二靶球绕横臂转台的轴心线旋转,同时第一靶球的球心和第二靶球的球心在空间形成绕横臂转台的轴心线旋转的圆弧轨迹,激光跟踪仪分别跟踪测量第一靶球的球心和第二靶球的球心在空间形成的圆弧轨迹;计算机通过数据采集线与激光跟踪仪的数据端连接,对第一靶球的球心和第二靶球的球心的圆弧轨迹数据处理,获得摆臂式轮廓仪有效臂长。The first aspect of the present invention provides a measuring device for the effective arm length of a swing-arm type profiler, the device consists of a first target ball, a second target ball, a fine-tuning mechanism, a cross arm, a cross arm support, a counterweight, Composed of computer, first angle block, cross-arm turntable, second angle block, laser tracker, workpiece turntable, mirror to be tested, contact sensor and worktable, among which: the first target ball and the second target ball are connected by magnetic adsorption On the fine-tuning mechanism; one end of the cross-arm is placed in the installation hole of the fine-tuning mechanism; one end of the cross-arm support has a through hole, and the other end of the cross-arm is placed and passes through the through-hole; the counterweight and the other end of the cross-arm Connection, used to balance the touch sensor and the cross arm, to ensure the stable rotation of the cross arm turntable; the upper end surface of the first angle block is fixedly connected with the bottom end surface of the cross arm support; the upper end surface of the cross arm turntable and the first angle The inclined end face of the block is fixedly connected; the inclined end face of the second angle block is fixedly connected with the lower end face of the cross-arm turntable; the lower end face of the second angle block is fixedly installed on the worktable; the laser tracker is placed close to the axis of the cross-arm turntable line, and ensure that the laser tracker does not interfere with the rotation of the cross-arm turntable. The bottom end of the laser tracker is placed on the worktable; the mirror surface to be measured is placed on the workpiece turntable; The outer contour of the probe is in contact with the mirror surface to be tested; the cross arm rotates around the axis of the cross arm turntable, driving the contact sensor, the first target ball and the second target ball to rotate around the axis of the cross arm turntable, and the first target The center of the ball and the center of the second target ball form an arc trajectory around the axis of the cross-arm turntable in space, and the laser tracker tracks and measures the center of the first target ball and the center of the second target ball respectively. The arc trajectory formed in space; the computer is connected to the data terminal of the laser tracker through the data acquisition line, and the arc trajectory data processing of the center of the first target ball and the center of the second target ball is obtained to obtain the swing arm profile The effective arm length of the instrument.

本发明的第二方面,提供一种摆臂式轮廓仪有效臂长的测量方法,包括步骤如下:The second aspect of the present invention provides a method for measuring the effective arm length of a swing-arm profiler, comprising the following steps:

步骤S1:由已知的接触式传感器的测头球心、第一靶球的球心和第二靶球的球心的空间位置关系进行坐标平移变换,得到第一坐标系,从而得到接触式传感器的测头球心、第一靶球的球心和第二靶球的球心在第一坐标系下的坐标;Step S1: Carry out coordinate translation transformation based on the known spatial position relationship of the center of the touch sensor probe, the center of the first target ball, and the center of the second target ball to obtain the first coordinate system, thereby obtaining the contact type The coordinates of the center of the measuring head of the sensor, the center of the first target ball and the center of the second target ball in the first coordinate system;

步骤S2:激光跟踪仪测量第一靶球的球心和第二靶球的球心的初始位置,以及第一靶球和第二靶球绕横臂转台旋转形成的圆弧轨迹上的数据;Step S2: the laser tracker measures the initial positions of the center of the first target ball and the center of the second target ball, and the data on the arc trajectory formed by the rotation of the first target ball and the second target ball around the cross-arm turntable;

步骤S3:将第一坐标系旋转平移变换到激光跟踪仪坐标系,得到接触式传感器的测头球心在激光跟踪仪坐标系下的坐标;Step S3: transforming the rotation and translation of the first coordinate system to the laser tracker coordinate system to obtain the coordinates of the probe sphere center of the touch sensor in the laser tracker coordinate system;

步骤S4:通过计算机实现对以上数据的处理,得到接触式传感器的测头球心到横臂转台轴心线的距离,即摆臂式轮廓仪有效臂长。Step S4: Process the above data by computer to obtain the distance from the sphere center of the probe of the contact sensor to the axis of the cross-arm turntable, that is, the effective arm length of the swing-arm profiler.

(三)有益效果(3) Beneficial effects

本发明与现有技术相比具有如下优点:本发明采用激光跟踪仪测量摆臂式轮廓仪有效臂长的方法,利用激光跟踪仪高精度的测量特点,准确测量出有效臂长,提高了有效臂长的测量精度,从而消除了有效臂长存在误差的前提下对面形上点坐标造成影响,能够保证镜面的继续精确加工;保证了利用摆臂式轮廓仪双测头扫描数据拼接技术实现工件转台误差分离的精度。同时该种方法可以更加方便快捷地测量有效臂长,为摆臂式轮廓仪在光学加工现场的在位测量提供了实用化的解决方案。Compared with the prior art, the present invention has the following advantages: the present invention uses a laser tracker to measure the effective arm length of a swing-arm type profiler, utilizes the high-precision measurement characteristics of the laser tracker, accurately measures the effective arm length, and improves the effective arm length. The measurement accuracy of the arm length eliminates the influence of the point coordinates on the surface under the premise of the error of the effective arm length, which can ensure the continuous precise processing of the mirror surface; ensure the use of the swing arm profiler dual probe scanning data splicing technology to realize the workpiece Accuracy of turntable error separation. At the same time, this method can measure the effective arm length more conveniently and quickly, and provides a practical solution for the in-situ measurement of the swing arm profiler in the optical processing site.

附图说明Description of drawings

图1是本发明测量摆臂式轮廓仪有效臂长的装置的结构示意图。Fig. 1 is a schematic structural view of the device for measuring the effective arm length of a swing-arm profiler according to the present invention.

图2是本发明测量摆臂式轮廓仪有效臂长的方法流程图。Fig. 2 is a flow chart of the method for measuring the effective arm length of a swing-arm profiler according to the present invention.

图3是第一靶球的球心、第二靶球的球心和接触式传感器的测头球心的空间位置关系。Fig. 3 is the spatial positional relationship of the center of the first target ball, the center of the second target ball and the center of the measuring head of the touch sensor.

图4是坐标平移后新的第一坐标系oxyz。Fig. 4 is the new first coordinate system oxyz after coordinate translation.

图5是激光跟踪仪扫描测量第一靶球的球心和第二靶球的球心。Fig. 5 is the scanning measurement of the center of the first target ball and the center of the second target ball by the laser tracker.

图6是圆面及圆心求解参考图。Figure 6 is a reference diagram for solving the circular surface and the center of the circle.

具体实施方式detailed description

为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明进一步详细说明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

如图1所示,激光跟踪仪测量摆臂式轮廓仪有效臂长的装置的结构包括:第一靶球1、第二靶球2、微调机构3、横臂4、横臂支座5、配重块6、计算机7、第一角度块8、横臂转台9、第二角度块10、激光跟踪仪11、工件转台12、待测镜面13、接触式传感器14和工作台面15,其中:第一靶球1、第二靶球2靠磁力吸附连接于微调机构3上;横臂4的一端置于微调机构3的安装孔中;横臂支座5的一端具有一通孔,横臂4的另一端置于并穿过通孔;配重块6与横臂4的另一端连接,用于平衡接触式传感器14和横臂4,用以保证横臂转台9保持平稳的旋转;第一角度块8的上端面与横臂支座5的底端面固定连接;横臂转台9上端面与第一角度块8的斜端面固定连接;第二角度块10的斜端面与横臂转台9下端面固定连接;第二角度块10的下端面固定安装在工作台面15上;激光跟踪仪11置于靠近横臂转台9的轴心线的位置,并保证激光跟踪仪11不能干涉横臂转台9转动,激光跟踪仪11的底端面置于工作台面15上;待测镜面13位于工件转台12上;工件转台12安装于工作台面15上;接触式传感器14的一端与微调机构3连接,接触式传感器14的测头外轮廓与待测镜面13接触,横臂4绕横臂转台9的轴心线旋转,带动接触式传感器14、第一靶球1和第二靶球2绕横臂转台9的轴心线旋转,同时第一靶球1的球心和第二靶球2的球心在空间形成绕横臂转台9的轴心线旋转的圆弧轨迹,激光跟踪仪11分别跟踪测量第一靶球1的球心和第二靶球2的球心在空间形成的圆弧轨迹;计算机7通过数据采集线与激光跟踪仪11的数据端连接,得到并对第一靶球1的球心和第二靶球2的球心的圆弧轨迹数据处理,获得摆臂式轮廓仪有效臂长。As shown in Figure 1, the structure of the device for measuring the effective arm length of a swing arm profiler by a laser tracker includes: a first target ball 1, a second target ball 2, a fine-tuning mechanism 3, a cross arm 4, a cross arm support 5, Counterweight 6, computer 7, first angle block 8, cross-arm turntable 9, second angle block 10, laser tracker 11, workpiece turntable 12, mirror surface to be measured 13, contact sensor 14 and worktable 15, wherein: The first target ball 1 and the second target ball 2 are connected to the fine-tuning mechanism 3 by magnetic adsorption; one end of the cross arm 4 is placed in the installation hole of the fine-tuning mechanism 3; The other end of the counterweight 6 is connected to the other end of the cross arm 4 to balance the touch sensor 14 and the cross arm 4, so as to ensure the smooth rotation of the cross arm turntable 9; the first The upper end face of the angle block 8 is fixedly connected with the bottom end face of the cross arm support 5; the upper end face of the cross arm turntable 9 is fixedly connected with the oblique end face of the first angle block 8; The end face is fixedly connected; the lower end face of the second angle block 10 is fixedly installed on the worktable 15; the laser tracker 11 is placed close to the axis line of the cross-arm turntable 9, and the laser tracker 11 cannot interfere with the cross-arm turntable 9 Rotate, the bottom surface of the laser tracker 11 is placed on the worktable 15; the mirror surface 13 to be measured is located on the workpiece turntable 12; the workpiece turntable 12 is installed on the worktable 15; one end of the contact sensor 14 is connected with the fine-tuning mechanism 3, and the contact The outer contour of the measuring head of the sensor 14 is in contact with the mirror surface 13 to be tested, and the cross arm 4 rotates around the axis of the cross arm turntable 9, driving the contact sensor 14, the first target ball 1 and the second target ball 2 around the cross arm turntable 9 At the same time, the center of the first target ball 1 and the center of the second target ball 2 form an arc trajectory in space that rotates around the axis of the cross-arm turntable 9, and the laser tracker 11 tracks and measures the first target ball respectively. The arc trajectory formed by the center of a target ball 1 and the center of a second target ball 2 in space; the computer 7 is connected with the data end of the laser tracker 11 through a data collection line to obtain and check the ball of the first target ball 1 center and the arc track data processing of the center of the second target ball 2 to obtain the effective arm length of the swing arm type profiler.

第一靶球1、第二靶球2由铁材料制成,并为反射式,直径为0.5英寸,主要反射来自激光跟踪仪10的激光,从而保证激光跟踪仪10可以跟踪测量第一靶球1的球心和第二靶球2的球心在空间形成的圆弧轨迹上的数据。The first target ball 1 and the second target ball 2 are made of iron material, and are reflective, with a diameter of 0.5 inches, mainly reflecting the laser light from the laser tracker 10, so as to ensure that the laser tracker 10 can track and measure the first target ball 1 and the center of the second target ball 2 on the arc trajectory data formed in space.

激光跟踪仪11的测距范围大于60m,静态测量精度5μm/m,动态测量精度10μm/m,坐标重复性优于2.5μm/m。The ranging range of the laser tracker 11 is greater than 60m, the static measurement accuracy is 5 μm/m, the dynamic measurement accuracy is 10 μm/m, and the coordinate repeatability is better than 2.5 μm/m.

工件转台12为加工现场的机床转台,用于支撑待测镜面13。The workpiece turntable 12 is a machine tool turntable on the processing site, and is used to support the mirror surface 13 to be measured.

接触式传感器14分辨力为25nm,测量精度为50nm。The resolution of the touch sensor 14 is 25nm, and the measurement accuracy is 50nm.

微调机构3可实现X轴方向、Y轴方向、Z轴方向、俯仰方向和偏摆方向的微调。The fine-tuning mechanism 3 can realize fine-tuning in the X-axis direction, the Y-axis direction, the Z-axis direction, the pitch direction and the yaw direction.

横臂4和横臂支座5,用于连接横臂转台9和接触式传感器14,并完成对接触式传感器14的旋转运动。The cross arm 4 and the cross arm support 5 are used to connect the cross arm turntable 9 and the touch sensor 14 , and complete the rotation movement of the touch sensor 14 .

第一角度块8、第二角度块10,用于支撑横臂转台9和横臂支座5,并使横臂转台9保持在设定的倾角;第一角度块8的角度范围为20°~40°、第二角度块10的角度范围为20°~40°。The first angle block 8 and the second angle block 10 are used to support the cross arm turntable 9 and the cross arm support 5, and keep the cross arm turntable 9 at a set inclination angle; the angle range of the first angle block 8 is 20° ~40°, the angle range of the second angle block 10 is 20°~40°.

横臂转台9为高精度气浮转台,横臂转台9的端面跳动为25nm,横臂转台9的角晃动为0.02″,用于实现接触式传感器14的旋转运动。The cross-arm turntable 9 is a high-precision air-floating turntable. The end surface runout of the cross-arm turntable 9 is 25nm, and the angular shake of the cross-arm turntable 9 is 0.02″, which is used to realize the rotary motion of the contact sensor 14.

本发明摆臂式轮廓仪有效臂长的测量装置工作时,横臂4绕横臂转台9的轴心线旋转,带动接触式传感器14、第一靶球1和第二靶球2绕横臂转台9的轴心线旋转,同时第一靶球1的球心和第二靶球2的球心在空间形成绕横臂转台9的轴心线旋转的圆弧轨迹,激光跟踪仪11分别跟踪测量第一靶球1的球心和第二靶球2的球心在空间形成的圆弧轨迹,通过计算机的数据处理,对第一靶球1的球心和第二靶球2的球心的圆弧轨迹数据处理是得到两段圆弧轨迹所在圆面的圆心坐标,利用两段圆弧轨迹所在圆面的圆心坐标,获得两圆心坐标的空间直线方程即是横臂转台的轴心线方程;再利用空间点和空间直线的距离方程,求出得到接触式传感器14的测头球心到横臂转台9轴心线的距离,即摆臂式轮廓仪有效臂长。When the measuring device for the effective arm length of the swing arm type profiler of the present invention works, the cross arm 4 rotates around the axis of the cross arm turntable 9, driving the contact sensor 14, the first target ball 1 and the second target ball 2 around the cross arm The axis line of the turntable 9 rotates, and at the same time, the center of the first target ball 1 and the center of the second target ball 2 form an arc trajectory in space that rotates around the axis line of the cross-arm turntable 9, and the laser tracker 11 tracks them respectively. Measure the arc trajectory formed by the center of the first target ball 1 and the center of the second target ball 2 in space, through the data processing of the computer, the center of the first target ball 1 and the center of the second target ball 2 The arc trajectory data processing is to obtain the center coordinates of the circular surface where the two arc trajectories are located, and use the center coordinates of the circular surface where the two arc trajectories are located to obtain the space linear equation of the two center coordinates, which is the axis line of the cross-arm turntable Equation; then use the distance equation of the space point and the space straight line to obtain the distance from the center of the stylus of the touch sensor 14 to the center line of the cross-arm turntable 9 axes, that is, the effective arm length of the swing-arm type profiler.

如图2所示为摆臂式轮廓仪有效臂长的测量方法,所述测量方法利用摆臂式轮廓仪有效臂长的测量装置的测量步骤包括:As shown in Figure 2, it is the measurement method of the effective arm length of the swing-arm type profiler, and the measuring method utilizes the measurement steps of the measuring device of the swing-arm type profiler effective arm length to include:

步骤S1:由已知的接触式传感器14的测头球心、第一靶球1的球心和第二靶球2的球心的空间位置关系进行坐标平移变换,得到第一坐标系,从而得到接触式传感器14的测头球心、第一靶球1的球心和第二靶球2的球心在第一坐标系下的坐标;Step S1: Carry out coordinate translation transformation based on the known spatial position relationship of the center of the stylus of the touch sensor 14, the center of the first target ball 1, and the center of the second target ball 2 to obtain the first coordinate system, thereby Obtain the coordinates of the center of the stylus of the touch sensor 14, the center of the first target 1 and the center of the second target 2 in the first coordinate system;

如图3所示为第一靶球1的球心、第二靶球2的球心和接触式传感器14的测头球心在某一坐标系下空间位置关系:第一靶球1的球心坐标是(X1Y1Z1),第二靶球2的球心坐标是(X2Y2Z2),接触式传感器14的测头球心坐标是(X3Y3Z3)。由坐标平移公式,将某一坐标系的坐标原点平移到第二靶球2的球心处,记此时得到的新直角坐标系为第一坐标系oxyz,如图4所示。由某一坐标系到第一坐标系的平移矩阵为[Δx1Δy1Δz1]T,则有:As shown in Figure 3, the spatial position relationship of the center of the first target ball 1, the center of the second target ball 2, and the probe center of the touch sensor 14 in a certain coordinate system: the ball of the first target ball 1 The coordinates of the center are (X 1 Y 1 Z 1 ), the coordinates of the center of the second target ball 2 are (X 2 Y 2 Z 2 ), and the coordinates of the center of the sphere of the touch sensor 14 are (X 3 Y 3 Z 3 ) . According to the coordinate translation formula, the coordinate origin of a certain coordinate system is translated to the center of the second target ball 2, and the new rectangular coordinate system obtained at this time is designated as the first coordinate system oxyz, as shown in Fig. 4 . The translation matrix from a certain coordinate system to the first coordinate system is [Δx 1 Δy 1 Δz 1 ] T , then:

Xx 22 YY 22 ZZ 22 ++ ΔxΔx 11 ΛyΛy 11 ΔzΔz 11 == 00 00 00 -- -- -- (( 11 ))

式中Δx1、Δy1、Δz1为平移矩阵参数,则有:[Δx1Δy1Δz1]T=[-X2-Y2-Z2]T,由此可以得到第一靶球1的球心和接触式传感器14的测头球心在第一坐标系下的坐标分别为(X1-X2Y1-Y2Z1-Z2),(X3-X2Y3-Y2Z3-Z2)。In the formula, Δx 1 , Δy 1 , Δz 1 are translation matrix parameters, then: [Δx 1 Δy 1 Δz 1 ] T =[-X 2 -Y 2 -Z 2 ] T , thus the first target ball 1 can be obtained The coordinates of the center of the sphere and the center of the stylus of the touch sensor 14 in the first coordinate system are (X 1 -X 2 Y 1 -Y 2 Z 1 -Z 2 ), (X 3 -X 2 Y 3 - Y 2 Z 3 -Z 2 ).

综上第一靶球1的球心、第二靶球2的球心和接触式传感器14的测头球心在第一坐标系下的坐标分别为(X1-X2Y1-Y2Z1-Z2),(000),(X3-X2Y3-Y2Z3-Z2)。In summary, the coordinates of the center of the first target ball 1, the center of the second target ball 2, and the center of the probe of the touch sensor 14 in the first coordinate system are (X 1 -X 2 Y 1 -Y 2 Z 1 -Z 2 ), (000), (X 3 -X 2 Y 3 -Y 2 Z 3 -Z 2 ).

步骤S2:激光跟踪仪11测量第一靶球1的球心和第二靶球2的球心的初始位置,以及第一靶球1和第二靶球2绕横臂转台9旋转形成的圆弧轨迹上的数据。Step S2: The laser tracker 11 measures the initial positions of the center of the first target ball 1 and the center of the second target ball 2, and the circle formed by the rotation of the first target ball 1 and the second target ball 2 around the cross-arm turntable 9 Data on the arc trajectory.

第一靶球1、第二靶球2和接触式传感器14放置于图1所示初始位置,激光跟踪仪11分别测量第一靶球1的球心、第二靶球2的球心在激光跟踪仪11坐标系下初始位置空间坐标,第一靶球1的球心、第二靶球2的球心的坐标分别为(X10Y10Z10)、(X20Y20Z20)。然后激光跟踪仪11跟踪扫描第一靶球1的球心、第二靶球2的球心绕横臂转台9轴心线旋转的轨迹,激光跟踪仪11测得第一靶球1的球心在旋转轨迹上的坐标的数据为(X11Y11Z11)、(X12Y12Z12)、…、(X1iY1iZ1i)、…、(X1nY1nZ1n),激光跟踪仪11测得第二靶球2的球心在旋转轨迹上的坐标的数据为(X21Y21Z21)、(X22Y22Z22)、…、(X2iY2iZ2i)、…、(X2nY2nZ2n),如图5所示。The first target ball 1, the second target ball 2 and the contact sensor 14 are placed in the initial position shown in Fig. The space coordinates of the initial position in the coordinate system of the tracker 11, the coordinates of the center of the first target ball 1 and the center of the second target ball 2 are (X 10 Y 10 Z 10 ), (X 20 Y 20 Z 20 ), respectively. Then the laser tracker 11 tracks and scans the center of the first target ball 1, the center of the second target ball 2 rotates around the center line of the horizontal arm turntable 9 axes, and the laser tracker 11 measures the center of the first target ball 1 The coordinate data on the rotation track are (X 11 Y 11 Z 11 ), (X 12 Y 12 Z 12 ), ..., (X 1i Y 1i Z 1i ), ..., (X 1n Y 1n Z 1n ), laser The data of the coordinates of the center of the second target ball 2 on the rotation track measured by the tracker 11 are (X 21 Y 21 Z 21 ), (X 22 Y 22 Z 22 ), ..., (X 2i Y 2i Z 2i ) , ..., (X 2n Y 2n Z 2n ), as shown in FIG. 5 .

步骤S3:将第一坐标系旋转平移变换到激光跟踪仪坐标系,可以得到接触式传感器14的测头球心在激光跟踪仪坐标系下的坐标。Step S3: Transform the rotation and translation of the first coordinate system into the laser tracker coordinate system to obtain the coordinates of the probe sphere center of the touch sensor 14 in the laser tracker coordinate system.

将第一靶球1的球心、第二靶球2的球心和接触式传感器14的测头球心在第一坐标系下的坐标(X1-X2Y1-Y2Z1-Z2)、(000)、(X3-X2Y3-Y2Z3-Z2)转换到激光跟踪仪11坐标系下,需要通过坐标系的旋转平移变换。不妨记旋转矩阵为R,平移矩阵为PL。The coordinates (X 1 -X 2 Y 1 -Y 2 Z 1 - Z 2 ), (000), (X 3 -X 2 Y 3 -Y 2 Z 3 -Z 2 ) are transformed into the coordinate system of the laser tracker 11, which requires a rotation and translation transformation of the coordinate system. May wish to record the rotation matrix as R and the translation matrix as PL.

由于第一靶球1的球心、第二靶球2的球心都分别位于第一坐标系和激光跟踪仪11坐标系下,则有:Since the center of the first target ball 1 and the center of the second target ball 2 are located in the first coordinate system and the laser tracker 11 coordinate system respectively, then:

Xx 1010 YY 1010 ZZ 1010 == RR Xx 11 -- Xx 22 YY 11 -- YY 22 ZZ 11 -- ZZ 22 ++ PLPL Xx 2020 YY 2020 ZZ 2020 == PLPL -- -- -- (( 22 ))

式中R是旋转矩阵,PL是平移矩阵,可以得到:where R is the rotation matrix and PL is the translation matrix, we can get:

PL=[X20Y20Z20]T(3)PL=[X 20 Y 20 Z 20 ] T (3)

Xx 1010 -- Xx 2020 YY 1010 -- YY 2020 ZZ 1010 -- ZZ 2020 // Xx 11 -- Xx 22 YY 11 -- YY 22 ZZ 11 -- ZZ 22 -- -- -- (( 44 ))

式中“/”为矩阵的右除。In the formula, "/" is the right division of the matrix.

记接触式传感器14的测头球心在激光跟踪仪11坐标系下的位置为P点,设P的坐标为(X0Y0Z0),则有:Note that the position of the stylus center of the contact sensor 14 under the coordinate system of the laser tracker 11 is point P, and the coordinate of P is (X 0 Y 0 Z 0 ), then:

Xx 00 YY 00 ZZ 00 == RR Xx 33 -- Xx 22 YY 33 -- YY 22 ZZ 33 -- ZZ 22 ++ PLPL -- -- -- (( 55 ))

步骤S4:通过计算机实现对以上数据的处理,得到接触式传感器的测头球心到横臂转台轴心线的距离,即摆臂式轮廓仪有效臂长。Step S4: Process the above data by computer to obtain the distance from the sphere center of the probe of the contact sensor to the axis of the cross-arm turntable, that is, the effective arm length of the swing-arm profiler.

拟合出横臂转台9轴心线在激光跟踪仪11坐标系中的方程,需要拟合出第一靶球1的球心和第二靶球2的球心在激光跟踪仪11坐标系下所在的圆面的圆心坐标,以下为第一靶球1的球心圆弧轨迹所在平面的圆心坐标的求解过程并结合图6进行阐述。To fit the equation of the 9-axis center line of the cross-arm turntable in the 11 coordinate system of the laser tracker, it is necessary to fit the center of the first target ball 1 and the center of the second target ball 2 in the 11 coordinate system of the laser tracker The center coordinates of the circular surface where it is located, the following is the solution process of the center coordinates of the plane where the center arc trajectory of the first target ball 1 is located, and is explained in conjunction with FIG. 6 .

O为第一靶球1的球心圆弧轨迹所在圆面的圆心,P0、P1、P01为轨迹上的点。首先求出平面P0P1O的方程,设AX1i+BY1i+CZ1i-D=0。在测量的时候平面不经过原点,因此在此处就可以使D=1。第一靶球1的球心圆弧轨迹均在该平面上,则有:O is the center of the circular surface where the arc track of the center of the first target ball 1 is located, and P 0 , P 1 , and P 01 are points on the track. First find the equation of the plane P 0 P 1 O, and set AX 1i +BY 1i +CZ 1i -D=0. The plane does not pass through the origin when measuring, so D=1 can be set here. The arc trajectory of the center of the first target ball 1 is all on this plane, then:

Xx 1010 YY 1010 ZZ 1010 Xx 1111 YY 1111 ZZ 1111 .. .. .. .. .. .. .. .. .. Xx 11 nno YY 11 nno ZZ 11 nno ** AA BB CC -- 11 11 .. .. .. 11 == 00 -- -- -- (( 66 ))

式中A、B、C为平面方程参数,记N为系数矩阵,则 N = X 10 Y 10 Z 10 X 11 Y 11 Z 11 . . . . . . . . . X 1 n Y 1 n Z 1 n , l = 1 1 . . . 1 , 可以得到: A B C = ( N T N ) - 1 N T l . In the formula, A, B, and C are the parameters of the plane equation, and N is the coefficient matrix, then N = x 10 Y 10 Z 10 x 11 Y 11 Z 11 . . . . . . . . . x 1 no Y 1 no Z 1 no , l = 1 1 . . . 1 , can get: A B C = ( N T N ) - 1 N T l .

在图6中,设O的坐标为(x0y0z0),向量 P 0 P 1 → = ( X 11 - X 10 , Y 11 - Y 10 , Z 11 - Z 10 ) , P01是点P0和P1的中点,容易得到 OP 01 → , 则有:In Figure 6, let the coordinates of O be (x 0 y 0 z 0 ), the vector P 0 P 1 &Right Arrow; = ( x 11 - x 10 , Y 11 - Y 10 , Z 11 - Z 10 ) , P 01 is the midpoint of points P 0 and P 1 , it is easy to get OP 01 &Right Arrow; , Then there are:

Δx01x0+Δy01y0+Δz01z0-l0=0(7)Δx 01 x 0 +Δy 01 y 0 +Δz 01 z 0 -l 0 =0(7)

式中Δx01=X11-X10,Δy01=Y11-Y10,Δz01=Z11-Z10 l 0 = ( X 11 2 + Y 11 2 + Z 11 2 ) - ( X 10 2 + Y 10 2 + Z 10 2 ) 2 . In the formula, Δx 01 =X 11 -X 10 , Δy 01 =Y 11 -Y 10 , Δz 01 =Z 11 -Z 10 , l 0 = ( x 11 2 + Y 11 2 + Z 11 2 ) - ( x 10 2 + Y 10 2 + Z 10 2 ) 2 .

由第一靶球1的球心圆弧轨迹数据(X10Y10Z10)、(X11Y11Z11)、(X12Y12Z12)、…、(X1iY1iZ1i)、…、(X1nY1nZ1n)这(n+1)个点可以列出n个线性无关的中垂面方程,将其与(6)式联立得:From the center arc trajectory data of the first target ball 1 (X 10 Y 10 Z 10 ), (X 11 Y 11 Z 11 ), (X 12 Y 12 Z 12 ),..., (X 1i Y 1i Z 1i ) , ..., (X 1n Y 1n Z 1n ) These (n+1) points can list n linearly independent vertical surface equations, which can be combined with (6) to get:

AA BB CC ΔxΔx 0101 ΔyΔy 0101 ΔzΔz 0101 ΔxΔx 1212 ΔyΔy 1212 ΔzΔz 1212 .. .. .. .. .. .. .. .. .. ΔxΔx (( nno -- 11 )) nno ΔyΔy (( nno -- 11 )) nno ΔΔ zz (( nno -- 11 )) nno ** xx 00 ythe y 00 zz 00 == 11 ll 00 ll 11 .. .. .. ll (( nno -- 11 )) -- -- -- (( 88 ))

式中x0、y0、z0为O点坐标参数,记W为系数矩阵, W = A B C Δx 01 Δy 01 Δz 01 Δx 12 Δy 12 Δz 12 . . . . . . . . . Δx ( n - 1 ) n Δy ( n - 1 ) n Δ z ( n - 1 ) n , L 1 = 1 l 0 l 1 . . . l ( n - 1 ) , 可以得到 x 0 y 0 z 0 = ( W T W ) - 1 W T L 1 . In the formula, x 0 , y 0 , z 0 are the coordinate parameters of point O, record W as the coefficient matrix, W = A B C Δx 01 Δy 01 Δz 01 Δx 12 Δy 12 Δz 12 . . . . . . . . . Δx ( no - 1 ) no Δy ( no - 1 ) no Δ z ( no - 1 ) no , L 1 = 1 l 0 l 1 . . . l ( no - 1 ) , can get x 0 the y 0 z 0 = ( W T W ) - 1 W T L 1 .

第二靶球2的球心圆弧轨迹所在圆面的圆心坐标处理过程与第一靶球2的球心圆弧轨迹所在圆面的圆心坐标处理过程一样,在此处不再详细介绍,设求得第二靶球2的球心圆弧轨迹所在圆面的圆心O1坐标为(x1y1z1),此时横臂转台9轴心线所在空间直线为OO1,如图5所示。The processing process of the center coordinates of the circular surface where the arc track of the center of the second target ball 2 is the same as the process of processing the coordinates of the center of circle of the arc track of the first target ball 2, no more detailed introduction here, assuming Obtain the coordinates of the circle center O 1 of the circular surface where the arc track of the center of the second target ball 2 is (x 1 y 1 z 1 ), and at this time the straight line in the space where the axis center line of the cross-arm turntable 9 is OO 1 , as shown in Figure 5 shown.

此时有效臂长L指的是接触式传感器14的测头球心P到横臂转台9轴心线所在空间直线OO1的垂直距离,直线OO1的方程为:At this time, the effective arm length L refers to the vertical distance from the center of the probe sphere P of the touch sensor 14 to the space line OO1 where the axis center line of the cross-arm turntable 9 is located, The equation of line OO 1 is:

xx -- xx 11 xx 11 -- xx 00 == ythe y -- ythe y 11 ythe y 11 -- ythe y 00 == zz -- zz 11 zz 11 -- zz 00 -- -- -- (( 99 ))

由空间点到空间直线的距离方程,可以得到P(X0Y0Z0)到直线OO1的垂直距离:From the distance equation from a spatial point to a spatial straight line, the vertical distance from P(X 0 Y 0 Z 0 ) to the straight line OO 1 can be obtained:

LL == || || ii jj kk xx 11 -- xx 00 ythe y 11 -- ythe y 00 zz 11 -- zz 00 Xx 00 -- xx 11 YY 00 -- ythe y 11 ZZ 00 -- zz 11 || (( xx 11 -- xx 00 )) 22 ++ (( ythe y 11 -- ythe y 00 )) 22 ++ (( zz 11 -- zz 00 )) 22 || -- -- -- (( 1010 ))

式中,i,j,k为直角坐标系单位向量。In the formula, i, j, k are the unit vectors of the Cartesian coordinate system.

以上所述,仅为本发明中的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉该技术的人在本发明所揭露的技术范围内,可理解想到的变换或替换,都应涵盖在本发明的包含范围之内。The above is only a specific implementation mode in the present invention, but the scope of protection of the present invention is not limited thereto. Anyone familiar with the technology can understand the conceivable transformation or replacement within the technical scope disclosed in the present invention. All should be covered within the scope of the present invention.

Claims (8)

1. the measurement apparatus of a swing-arm profilometry effective rake, it is characterized in that: be made up of the first target ball, the second target ball, micro-adjusting mechanism, transverse arm, transverse arm bearing, balancing weight, computer, the first angle block gauge, transverse arm turntable, the second angle block gauge, laser tracker, workpiece rotary table, minute surface to be measured, touch sensor and work top, wherein: the first target ball, the second target ball are connected on micro-adjusting mechanism by magnetic-adsorption;One end of transverse arm is placed in the installing hole of micro-adjusting mechanism;One end of transverse arm bearing has a through hole, and the other end of transverse arm is placed in and passes through hole;Balancing weight is connected with the other end of transverse arm, for equilibrium contact formula sensor and transverse arm, in order to ensure the rotation of transverse arm turntable held stationary;The upper surface of the first angle block gauge is fixing with the bottom face of transverse arm bearing to be connected;Transverse arm turntable upper surface is fixing with the angled end-face of the first angle block gauge to be connected;The angled end-face of the second angle block gauge is fixing with transverse arm turntable lower surface to be connected;The lower surface of the second angle block gauge is fixedly mounted on work top;Laser tracker is disposed adjacent to the position of the axial line of transverse arm turntable, and ensures that laser tracker can not interfere transverse arm turntable to rotate, and the bottom face of laser tracker is placed on work top;Minute surface to be measured is positioned on workpiece rotary table;One end of touch sensor is connected with micro-adjusting mechanism, and the gauge head outline of touch sensor contacts with minute surface to be measured;Transverse arm rotates around the axial line of transverse arm turntable, touch sensor, the first target ball and the second target ball is driven to rotate around the axial line of transverse arm turntable, simultaneously the centre of sphere of the first target ball and the centre of sphere of the second target ball form the arc track that the axial line around transverse arm turntable rotates, the arc track that the centre of sphere of the centre of sphere and the second target ball that laser tracker distinguishes tracking measurement the first target ball is formed in space in space;Computer is connected with the data terminal of laser tracker by data acquisition line concentration, the arc track data process to the centre of sphere of the first target ball and the centre of sphere of the second target ball, it is thus achieved that swing-arm profilometry effective rake。
2. the measurement apparatus of swing-arm profilometry effective rake according to claim 1, it is characterised in that: the finding range of described laser tracker is more than 60m, 5 μm/m of static measurement precision, and 10 μm/m of dynamic measurement precision, coordinate repeatability is better than 2.5 μm/m。
3. the measurement apparatus of swing-arm profilometry effective rake according to claim 1, it is characterized in that: the arc track data of the centre of sphere of the described centre of sphere to the first target ball and the second target ball process, it it is the central coordinate of circle obtaining two sections of arc track place discs, utilize the central coordinate of circle of two sections of arc track place discs, it is thus achieved that namely the space line equation of two central coordinate of circle is the axial line equation of transverse arm turntable;The range equation of recycling spatial point and space line, obtains the gauge head centre of sphere distance to transverse arm turntable axial line of touch sensor, is the effective rake of swing-arm profilometry。
4. the measurement apparatus of swing-arm profilometry effective rake according to claim 1, it is characterized in that: described first target ball, the second target ball are made up of iron material, and be reflective, for reflecting the laser from laser tracker, thus ensureing the centre of sphere of the centre of sphere of laser tracker tracking measurement the first target ball and the second target ball data on the arc track that space is formed。
5. the measurement apparatus of swing-arm profilometry effective rake according to claim 1, it is characterised in that: the resolving power of described touch sensor is 25nm, and certainty of measurement is 50nm。
6. the measurement apparatus of swing-arm profilometry effective rake according to claim 1, it is characterised in that: described micro-adjusting mechanism is the fine setting that can realize X-direction, Y direction, Z-direction, pitch orientation and beat direction。
7. the measurement apparatus of swing-arm profilometry effective rake according to claim 1, it is characterized in that: described transverse arm turntable is air-float turntable, the end face run-out of transverse arm turntable is 25nm, and it is 0.02 that the angle of transverse arm turntable is rocked ", for realizing the rotary motion of touch sensor。
8. the method that swing-arm profilometry effective rake is measured by the measurement apparatus according to any one of claim 1~7, comprises the following steps that
Step S1: carried out coordinate translation conversion by the spatial relation of the gauge head centre of sphere of known touch sensor, the centre of sphere of the first target ball and the centre of sphere of the second target ball, obtain the first coordinate system, thus obtaining the centre of sphere of the gauge head centre of sphere of touch sensor, the centre of sphere of the first target ball and the second target ball coordinate under the first coordinate system;
Step S2: laser tracker measures the centre of sphere of the first target ball and the initial position of the centre of sphere of the second target ball, and the first target ball and the second target ball rotate the data on the arc track formed around transverse arm turntable;
Step S3: the first coordinate system is rotated translation and transforms to laser tracker coordinate system, obtains the gauge head centre of sphere of the touch sensor coordinate under laser tracker coordinate system;
Step S4: realize the process to data above by computer, obtain the gauge head centre of sphere distance to transverse arm turntable axial line of touch sensor, i.e. swing-arm profilometry effective rake。
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