CN106225718A - Contour detecting gauge head, detector and detection method - Google Patents
Contour detecting gauge head, detector and detection method Download PDFInfo
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- CN106225718A CN106225718A CN201610817113.XA CN201610817113A CN106225718A CN 106225718 A CN106225718 A CN 106225718A CN 201610817113 A CN201610817113 A CN 201610817113A CN 106225718 A CN106225718 A CN 106225718A
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- probe
- gauge head
- contour detecting
- detection
- detector
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
Abstract
A kind of contour detecting gauge head, detector and detection method, wherein, described contour detecting gauge head includes: connecting rod, and its top is used for being fixed to detector body；Probe position, its top is arranged on the bottom of connecting rod, is used for providing probe installation position bottom it；First probe, is arranged on the first probe installation position bottom probe position, for carrying out contour detecting in the first pattern；Second probe, is arranged on the second probe installation position bottom probe position, for carrying out contour detecting in a second mode.So that the data of different mode detection carry out reference, it is simple to detect the adjustment of parameter between different mode, while then can improving detection efficiency, improve contour detecting precision.
Description
Technical field
The present invention relates to instrument detection field of sensing technologies, be specifically related to a kind of contour detecting gauge head, detector and detection
Method.
Background technology
Nineteen twenty-nine Germany scientist Schmaltz have developed the profile monitor of First contact pin type, and this instrument make use of
Optical lever amplification principle measures surface profile.After this, Taylor Hobson company of Britain also puts into surface profiler
Research and development in the middle of and acquirement the least achievement.Along with the development of sensing detection technology, the resolution of measuring surface form is big with precision
Big raising, can reach submicron even Nano grade.Nowadays, the metering system of surface topography is roughly divided into five kinds: Mechanical stylus
Formula is measured, optical probe formula is measured, interfere micrometering, scanning electron microscope (SEM) and scanning probe microscopy (SPM),
Wherein, owing to directly contacting measured surface, its measurement result is reliable and stable, and Mechanical stylus formula is measured and is employed extensively at industrial circle
General.
Mechanical stylus formula is measured to measure the small spacing in surface and peak valley, needs to use superfine needle point, contact pilotage pin
Point fits tightly with measured surface under the effect of mechanism's self gravitation, external mechanical force or electromagnetic force.In scanning process,
Object stage or contact pilotage move in parallel along certain orientation, make system pointwise sample, thus obtain the contour curve of measured surface.
The shortcoming of this contact type measurement instrument is: (a) sample rate is slow, and efficiency is low；(b) due to the uncertainty of measured surface hardness,
Contact pilotage may scratch measured surface, so not being suitable for the detection of soft material；C () cannot survey due to the restriction of needle type radius
Measure ultra-precision surface and measure profile medium-high frequency part of interest, thus be not suitable for the detection of ultra-precision surface.
For every drawback of Mechanical stylus formula, the surface profile detector having arisen at the historic moment again contactless, wherein wrap
Include and machinery gauge head is replaced by laser feeler.But non-contact surface outline detector is solving the measurement of traditional mechanical contact pin type
While the big drawback of the three of instrument, bring a bigger problem, that is, unstable, precision is not high enough.Such as, (a) is tested
The material reflectance of workpiece directly affects measurement result；B () measured surface needs the brightest and the cleanest, dust or greasy dirt all can affect
Measurement result；C (), when measuring the contour surface containing bigger inclination angle, can cause distorted signals or distortion etc..
Therefore, how while improving detection efficiency, the technical problem that contour detecting precision becomes urgently to be resolved hurrily is improved.
Summary of the invention
The technical problem to be solved in the present invention is how to improve contour detecting precision while improving detection efficiency.
To this end, according to first aspect, the embodiment of the invention discloses a kind of contour detecting gauge head, including:
Connecting rod, its top is used for being fixed to detector body；Probe position, its top is arranged on the bottom of connecting rod,
It is used for bottom it providing probe installation position；First probe, is arranged on the first probe installation position bottom probe position, for first
Pattern carries out contour detecting；Second probe, is arranged on the second probe installation position bottom probe position, for carrying out in a second mode
Contour detecting.
Alternatively, the first probe is laser type gauge head, the second probe positioning contact type gauge head.
Alternatively, when contour detecting, the detection track of the first probe is positioned at the detection track front of the second probe.
Alternatively, also include: turntable, be arranged on the top of connecting rod, be fixed to detect by connecting rod for detachable
On instrument body.
Alternatively, turntable is additionally operable to the motion of drive connection bar.
According to second aspect, the embodiment of the invention discloses a kind of outline detector, including:
Above-mentioned contour detecting gauge head；Column, is used for putting contour detecting gauge head, is additionally operable to drive contour detecting gauge head to prolong
Z-direction moves；Planar tracks, for providing X-axis and/or the track of Y-axis translation to column；Detecting position, is arranged on plane rail
Below road, place position for providing to profile to be measured.
Alternatively, outline detector position three coordinate measuring machine.
According to the third aspect, the embodiment of the invention discloses a kind of profile testing method, including:
First probe detects profile to be measured successively from the starting point presetting detective path and obtains the preliminary survey curve of profile to be measured；
Second probe adjusts according to the curvature information extracted from preliminary survey curve measures frequency to complete along presetting the second of detective path
The detection of probe.
Alternatively, the first probe detection to preset detective path terminating point after, turntable drive probe displacement move to
Next default detective path, and drive probe position to adjust attitude, so that when carrying out the detection of next default detective path, first visits
Head is positioned at the front of the second probe.
Alternatively, the measurement frequency of the second probe is directly proportional to the flexibility of the curvature information extracted.
Technical solution of the present invention, has the advantage that
Contour detecting gauge head, detector and the detection method that the embodiment of the present invention provides, due to by the first probe and second
Probe is arranged on same probe position, therefore, when treating measuring wheel exterior feature and carrying out contour detecting, it is possible to by the first probe with first
Pattern carries out contour detecting, carries out contour detecting in a second mode by the second probe such that it is able to different mode is detected
Data carry out reference, it is simple to detect the adjustment of parameter between different mode, then can improve and improve while detection efficiency
Contour detecting precision.
As preferred technical scheme, the measurement frequency of the second probe just becomes with the flexibility of the curvature information extracted
Ratio, thus when utilizing the second probe to carry out contour detecting in a second mode, it is possible to its measurement frequency of self-adaptative adjustment, then can
Enough pools realizing efficiency and precision further.
Accompanying drawing explanation
In order to be illustrated more clearly that the specific embodiment of the invention or technical scheme of the prior art, below will be to specifically
In embodiment or description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that, in describing below
Accompanying drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not paying creative work
Put, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is a kind of contour detecting measuring head structure schematic diagram in the embodiment of the present invention；
Fig. 2 is a kind of outline detector structural representation in the embodiment of the present invention；
Fig. 3 is a kind of profile testing method flow chart in the embodiment of the present invention；
Fig. 4 is a kind of contour detecting process signal in the embodiment of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, technical scheme is clearly and completely described, it is clear that described enforcement
Example is a part of embodiment of the present invention rather than whole embodiments.Based on the embodiment in the present invention, ordinary skill
The every other embodiment that personnel are obtained under not making creative work premise, broadly falls into the scope of protection of the invention.
In describing the invention, it should be noted that term " " center ", " on ", D score, "left", "right", " vertically ",
Orientation or the position relationship of the instruction such as " level ", " interior ", " outward " they are based on orientation shown in the drawings or position relationship, merely to
Be easy to describe the present invention and simplifying describe rather than instruction or the hint device of indication or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.Additionally, term " first ", " second ",
" the 3rd " is only used for describing purpose, and it is not intended that indicate or hint relative importance.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " is installed ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be fixing connection, it is also possible to be to removably connect, or be integrally connected；Can
To be mechanical connection, it is also possible to be electrical connection；Can be to be joined directly together, it is also possible to be indirectly connected to by intermediary, it is also possible to
It is the connection of two element internals, can be wireless connections, it is also possible to be wired connection.For those of ordinary skill in the art
For, above-mentioned term concrete meaning in the present invention can be understood with concrete condition.
If additionally, the most non-structure of technical characteristic involved in invention described below difference embodiment
Become conflict just can be combined with each other.
Refer to Fig. 1, a kind of contour detecting gauge head disclosed in the present embodiment, this contour detecting gauge head includes: connecting rod
1, probe position the 2, first probe 3 and the second probe 4, wherein:
Its top of connecting rod 1 is used for being fixed to detector body.Generally, contour detecting gauge head is arranged on outline detector
On (such as three coordinate measuring machine), by driving the movement of detection gauge head to realize object to be detected is carried out contour detecting.Cause
This, in the present embodiment, realize being fixed on detector body gauge head by connecting rod 1.
Probe its top, position 2 is arranged on the bottom of connecting rod 1, is used for providing probe installation position bottom it.It is being embodied as
In example, the top of connecting rod 1 is connected on detector body, and the bottom of connecting rod 1 can arrange probe position 2.It is being embodied as
In example, the bottom of probe position 2 can connect probe, to realize object to be measured is carried out corresponding contour detecting.
First probe 3 is arranged on the first probe installation position bottom probe position 2, for carrying out profile inspection in the first pattern
Survey.In the present embodiment, arranging at least two probe installation position bottom probe position 2, refer to Fig. 1, at least two probe position is permissible
It is arranged side by side, for example with left and right mode side by side, to realize the tandem layout in this at least two probe position.In this enforcement
In example, illustrating as a example by two probe positions, the first probe 3 is arranged on the first probe installation position, in the present embodiment, first
Probe 3 is laser type gauge head, and the first probe 3 can be the contactless sensings such as such as laser sensor (laser probe, LP)
Device, to improve contour detecting efficiency.In a particular embodiment, the first probe 3 can take wing plate to add screw connection, convenient dismounting
Install.
Second probe 4 is arranged on the second probe installation position bottom probe position 2, for carrying out profile inspection in a second mode
Survey.In the present embodiment, the second probe 4 is contact measuring head, to improve accuracy of detection.Specifically, in the present embodiment, second visits
4 can be contact trigger sensor (touch-trigger probe, TP).
In the present embodiment, when object to be measured is carried out contour detecting, the detection track of the first probe 3 is positioned at the second probe
The detection track front of 4.That is, the work such as outline data 4 can be collected by the first probe 3 prior to the second probe, arrangement,
Do anticipation giving the frequency acquisition of the second probe 4.
In order to realize the rotation of gauge head and/or removably connect with detector body, in a particular embodiment, this profile inspection
Surveying gauge head can also include: turntable 5, turntable 5 is arranged on the top of connecting rod 1, for detachably connecting rod 1 being fixed to
On detector body.Specifically, turntable 5 is additionally operable to drive connection bar 1 and moves, and this motion can be such as to rotate, certainly, also
Can be to carry out translation by other Auxiliary Track.Connect with turntable, the scanning of different direction of feed can be realized.
The present embodiment also discloses a kind of outline detector, refer to Fig. 2, and this outline detector includes: above-described embodiment
Disclosed contour detecting gauge head 10, column 20, planar tracks 30 and detecting position, wherein:
Contour detecting gauge head 10 is for carrying out contour detecting to object to be measured.
Column 20 is used for putting contour detecting gauge head 10, is additionally operable to drive contour detecting gauge head 10 to prolong Z-direction and moves.Tool
Body ground, can be connected on column 20 by the top of connecting rod 1, and certainly, in an alternate embodiment of the invention, connecting rod 1 can be led to
Cross turntable 5 to be connected on column 20, so that gauge head can rotate in direction about the z axis.
Planar tracks 30 is for providing X-axis and/or the track of Y-axis translation to column 20.In a particular embodiment, by column
20 are movably disposed in planar tracks 30, thus, the track provided along X-axis and/or Y-axis translation for column 20 supports.
Detecting position is arranged on below planar tracks 30, places position for providing to profile to be measured.
In an alternate embodiment of the invention, outline detector position three coordinate measuring machine.
The present embodiment also discloses a kind of profile testing method, refer to Fig. 3, and this profile testing method includes walking as follows
Rapid:
Step S100, the first probe detects profile to be measured successively from the starting point presetting detective path and obtains profile to be measured
Preliminary survey curve.Generally, the first probe is contactless gauge head, therefore, it is possible to obtain the general profile of profile to be measured the most all sidedly
Curve (preliminary survey curve), can tentatively judge the information such as the shape of profile, flatness, curvature by this preliminary survey curve, and this is preliminary
Judgement can be that comparison is efficient.
Step S200, the second probe adjusts according to the curvature information extracted from preliminary survey curve measures frequency to complete along pre-
If the detection of the second probe of detective path.In a particular embodiment, the measurement frequency of the second probe and the curvature letter extracted
The flexibility of breath is directly proportional, and specifically, after the first probe obtains preliminary survey curve, can extract from this preliminary survey calibration curve information
Curvature information, can adjust the measurement frequency of the second probe according to this curvature information, such as, when flexibility is higher, measuring frequency can
To strengthen such that it is able to more thickly detect, when flexibility relatively low relatively flat time, can reduce measurement frequency, strengthen and measure step
Long such that it is able to be rapidly completed detection.
In a preferred embodiment, when performing step S100, at the first probe detection to the terminating point presetting detective path
After, turntable drives probe displacement to move to next default detective path, and drives probe position to adjust attitude, so that carrying out next
When presetting detective path detection, the first probe is positioned at the front of the second probe.
Hereafter with concrete example, detection process is illustrated for ease of it will be appreciated by those skilled in the art that.Refer to Fig. 4,
For a certain object to be measured carries out in the present embodiment illustrating the most in the same time during the measurement of contour detecting, Fig. 4 illustrates
(1), (2), (3), (4), (5) and (6) individual different detection process, the detective path of this detection process have l1, l2, l3, l4 and
L5, such as, when being scanned path l1, the contour line of available l1, this is personalized scanning.Specifically:
Initial sweep point (presetting the starting point of detective path) can be predefined, and after X, Y positive direction, LP visited
Survey the starting point of path l1.When LP captures jump signal, show that LP has arrived surface location, at this point it is possible to record coordinate
Value, i.e. LP enters the boundary point (being the starting point in path) of curved surface to be measured.Now, bridge-type bracing frame controls what Y-axis moved
Servomotor is locked, and measurement system cannot move in Y direction.Meanwhile, the servomotor of turntable is locked, and sensor cannot be around
Z axis to rotate.
Then, measurement system moves along X-axis positive direction, when TP moves to boundary point (presetting the starting point of detective path)
Time, it is remeasured by TP, and result is incorporated into system, is recorded as starting point.Now, if with LP record coordinate
Value error is relatively big, and machine alarm opens protection system, and all motions stop, and this coordinate figure error can be empirically determined.
During scanning along X positive direction, LP detects at leading portion always, keeps surveying with default Δ X unit length
Amount path l1, to obtain the coordinate information of surface profile point.Coordinate information now is used for two different processing systems, a side
Face is digitized by the information collected, and then fits to preliminary survey curve, and therefrom extracts curvature information；On the other hand root
Carry out the negative feedback of signal according to default curvature criterion, adjust the measurement frequency of TP, adaptively sampled to complete.Sentencing here
According to, generally can use curvature, when curvature ki of TP sweep test is more than preset curvature value k0, rate of scanning increases；Work as TP
When curvature ki of sweep test is less than preset curvature value k0, rate of scanning reduces.And owing to the precision of TP is higher, so combine TP
Measurement result, the key point of preliminary survey curve is modified, finally fits to final curves.In Fig. 4 (2), for measuring
Cheng Zhong, different state phase signals.
When LP captures jump signal, show that LP has arrived at the end in path, record the coordinate figure of this jump signal,
I.e. LP leaves the boundary point (presetting the terminating point of detective path) of curved surface.Then, measurement apparatus continues on X positive direction and moves d+
Δ d (horizontal range between the laser beam that d is the central shaft of TP measuring staff and LP sends, Δ d is measuring instrument preset value).
When TP moves to boundary point (presetting the terminating point of detective path), it is remeasured, and result is whole
Close system, fit to curve.Now, if relatively big with the coordinate figure error of LP record, machine alarm, open protection system,
All motions stop, and referring specifically to above-described embodiment, do not repeat them here.
After TP completes the measurement of path terminating point, turntable servomotor unlocks, and around Z axis half-twist, becomes LP
On a left side, TP is on the right side, and then, turntable servomotor is locked, to measure path l2, thus, is surveying path l2
During amount, also make LP before TP.
Controlling the servomotor unblock that Y-axis moves on bridge-type bracing frame, measurement apparatus moves Δ Y along Y-axis positive direction.So
After, the servomotor that on bridge-type bracing frame, control Y-axis moves is locked.After the measurement completing path l2, turntable rotates again
90 °, to measure along path l3.
Now, whether LP is to measure table top to judge whether to have been enter into curved surface according to focus.In this way, then continue to X-direction
Mobile, until running into the catastrophe point of signal, being the boundary point of curved surface profile line, completing the measurement of path l3.Repeat above-mentioned
Step, can measure other path l4, l5 etc..
Contour detecting gauge head, detector and the detection method that the present embodiment provides, due to by the first probe and the second probe
It is arranged on same probe position, therefore, when treating measuring wheel exterior feature and carrying out contour detecting, it is possible to by the first probe in the first pattern
Carry out contour detecting, carry out contour detecting in a second mode by the second probe such that it is able to make the number that different mode detects
According to carrying out reference, it is simple to detect the adjustment of parameter between different mode, while then can improving detection efficiency, improve profile
Accuracy of detection.
In a preferred embodiment, the measurement frequency of the second probe is directly proportional to the flexibility of the curvature information extracted,
Thus when utilizing the second probe to carry out contour detecting in a second mode, it is possible to its measurement frequency of self-adaptative adjustment, then can
Realize the pool of efficiency and precision further.
Those skilled in the art are it should be appreciated that embodiments of the invention can be provided as method, system or computer program
Product.Therefore, the reality in terms of the present invention can use complete hardware embodiment, complete software implementation or combine software and hardware
Execute the form of example.And, the present invention can use at one or more computers wherein including computer usable program code
The upper computer program product implemented of usable storage medium (including but not limited to disk memory, CD-ROM, optical memory etc.)
The form of product.
The present invention is with reference to method, equipment (system) and the flow process of computer program according to embodiments of the present invention
Figure and/or block diagram describe.It should be understood that can the most first-class by computer program instructions flowchart and/or block diagram
Flow process in journey and/or square frame and flow chart and/or block diagram and/or the combination of square frame.These computer programs can be provided
Instruction arrives the processor of general purpose computer, special-purpose computer, Embedded Processor or other programmable data processing device to produce
A raw machine so that the instruction performed by the processor of computer or other programmable data processing device is produced for real
The device of the function specified in one flow process of flow chart or multiple flow process and/or one square frame of block diagram or multiple square frame now.
These computer program instructions may be alternatively stored in and computer or other programmable data processing device can be guided with spy
Determine in the computer-readable memory that mode works so that the instruction being stored in this computer-readable memory produces and includes referring to
Make the manufacture of device, this command device realize at one flow process of flow chart or multiple flow process and/or one square frame of block diagram or
The function specified in multiple square frames.
These computer program instructions also can be loaded in computer or other programmable data processing device so that at meter
Perform sequence of operations step on calculation machine or other programmable devices to produce computer implemented process, thus at computer or
The instruction performed on other programmable devices provides for realizing at one flow process of flow chart or multiple flow process and/or block diagram one
The step of the function specified in individual square frame or multiple square frame.
Obviously, above-described embodiment is only for clearly demonstrating example, and not restriction to embodiment.Right
For those of ordinary skill in the field, can also make on the basis of the above description other multi-form change or
Variation.Here without also cannot all of embodiment be given exhaustive.And the obvious change thus extended out or
Change among still in the protection domain of the invention.
Claims (10)
1. a contour detecting gauge head, it is characterised in that including:
Connecting rod (1), its top is used for being fixed to detector body；
Probe position (2), its top is arranged on the bottom of described connecting rod (1), is used for providing probe installation position bottom it；
First probe (3), is arranged on the first probe installation position of described probe position (2) bottom, for taking turns in the first pattern
Wide detection；
Second probe (4), is arranged on the second probe installation position of described probe position (2) bottom, for taking turns in a second mode
Wide detection.
2. contour detecting gauge head as claimed in claim 1, it is characterised in that described first probe (3) is laser type gauge head, institute
State the second probe (4) positioning contact type gauge head.
3. contour detecting gauge head as claimed in claim 2, it is characterised in that when contour detecting, described first probe (3)
Detection track is positioned at the detection track front of described second probe (4).
4. the contour detecting gauge head as described in claim 1-3 any one, it is characterised in that also include:
Turntable (5), is arranged on the top of described connecting rod (1), for detachably described connecting rod (1) being fixed to detector
On body.
5. contour detecting gauge head as claimed in claim 4, it is characterised in that described turntable (5) is additionally operable to drive described company
Extension bar (1) moves.
6. an outline detector, it is characterised in that including:
Contour detecting gauge head (10) as described in claim 1-5 any one；
Column (20), is used for putting described contour detecting gauge head (10), is additionally operable to drive described contour detecting gauge head (10) to prolong Z axis
Direction is moved；
Planar tracks (30), for providing X-axis and/or the track of Y-axis translation to described column (20)；
Detecting position, is arranged on described planar tracks (30) lower section, places position for providing to profile to be measured.
7. outline detector as claimed in claim 6, it is characterised in that described outline detector position three coordinate measuring machine.
8. a profile testing method, it is characterised in that including:
First probe detects profile to be measured successively from the starting point presetting detective path and obtains the preliminary survey curve of profile to be measured；
Second probe adjusts according to the curvature information extracted from described preliminary survey curve and measures frequency to complete along described default spy
Survey the detection of second probe in path.
9. profile testing method as claimed in claim 8, it is characterised in that also include:
After the terminating point of described first probe detection to described default detective path, turntable drives probe displacement to move to next
Preset detective path, and drive described probe position to adjust attitude, so that when carrying out the detection of next default detective path, described the
One probe is positioned at the front of described second probe.
10. profile testing method as claimed in claim 8 or 9, it is characterised in that the measurement frequency of described second probe and institute
The flexibility stating the curvature information extracted is directly proportional.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107664478A (en) * | 2017-10-26 | 2018-02-06 | 成都众鑫聚合科技有限公司 | A kind of vertical non-contact revolving body high precision measuring device and its measuring method |
| CN108917657A (en) * | 2018-09-26 | 2018-11-30 | 常州利腾机械有限公司 | A kind of laser multi-diameter shaft testing apparatus for verticality |
| CN110108238A (en) * | 2019-05-27 | 2019-08-09 | 浙江机电职业技术学院 | It is a kind of for measuring the measuring system and measurement method of part flatness |
| CN114910014A (en) * | 2022-04-24 | 2022-08-16 | 浙江大学 | Measuring system and method for surface shape measurement of high-aspect-ratio curved surface component |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101000499A (en) * | 2006-12-18 | 2007-07-18 | 浙江大学 | Contour machining method and system based on multi-sensor integral measuring |
| CN101149253A (en) * | 2007-10-16 | 2008-03-26 | 浙江大学 | Unknown free-form surface self-adaptive measuring method based on exploration method and measuring head device |
| US20120140243A1 (en) * | 2010-12-03 | 2012-06-07 | Zygo Corporation | Non-contact surface characterization using modulated illumination |
| CN104613897A (en) * | 2015-02-12 | 2015-05-13 | 哈尔滨理工大学 | Car outer cover part mold free-form surface self-adaption sampling device and measuring method |
| CN206073931U (en) * | 2016-09-12 | 2017-04-05 | 武汉科技大学 | Contour detecting gauge head and detector |
-
2016
- 2016-09-12 CN CN201610817113.XA patent/CN106225718B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101000499A (en) * | 2006-12-18 | 2007-07-18 | 浙江大学 | Contour machining method and system based on multi-sensor integral measuring |
| CN101149253A (en) * | 2007-10-16 | 2008-03-26 | 浙江大学 | Unknown free-form surface self-adaptive measuring method based on exploration method and measuring head device |
| US20120140243A1 (en) * | 2010-12-03 | 2012-06-07 | Zygo Corporation | Non-contact surface characterization using modulated illumination |
| CN104613897A (en) * | 2015-02-12 | 2015-05-13 | 哈尔滨理工大学 | Car outer cover part mold free-form surface self-adaption sampling device and measuring method |
| CN206073931U (en) * | 2016-09-12 | 2017-04-05 | 武汉科技大学 | Contour detecting gauge head and detector |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107664478A (en) * | 2017-10-26 | 2018-02-06 | 成都众鑫聚合科技有限公司 | A kind of vertical non-contact revolving body high precision measuring device and its measuring method |
| CN107664478B (en) * | 2017-10-26 | 2023-11-03 | 成都众鑫聚合科技有限公司 | Vertical non-contact gyrosome high-precision measuring device and measuring method thereof |
| CN108917657A (en) * | 2018-09-26 | 2018-11-30 | 常州利腾机械有限公司 | A kind of laser multi-diameter shaft testing apparatus for verticality |
| CN110108238A (en) * | 2019-05-27 | 2019-08-09 | 浙江机电职业技术学院 | It is a kind of for measuring the measuring system and measurement method of part flatness |
| CN114910014A (en) * | 2022-04-24 | 2022-08-16 | 浙江大学 | Measuring system and method for surface shape measurement of high-aspect-ratio curved surface component |
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| CN106225718B (en) | 2018-06-26 |
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