CN106225718B - Contour detecting gauge head, detector and detection method - Google Patents
Contour detecting gauge head, detector and detection method Download PDFInfo
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- CN106225718B CN106225718B CN201610817113.XA CN201610817113A CN106225718B CN 106225718 B CN106225718 B CN 106225718B CN 201610817113 A CN201610817113 A CN 201610817113A CN 106225718 B CN106225718 B CN 106225718B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
Abstract
A kind of contour detecting gauge head, detector and detection method, wherein, the contour detecting gauge head includes：Connecting rod, top are used to be fixed to detector body；Probe position, top are arranged on the bottom end of connecting rod, and bottom is for offer probe installation position；First probe is arranged on the first probe installation position of probe position bottom, for carrying out contour detecting in the first pattern；Second probe is arranged on the second probe installation position of probe position bottom, for carrying out contour detecting in a second mode.So that the data of different mode detection are referred to, convenient for the adjustment of detection parameters between different mode, contour detecting precision is improved while can then improving detection efficiency.
Description
Technical field
The present invention relates to instruments to detect field of sensing technologies, and in particular to a kind of contour detecting gauge head, detector and detection
Method.
Background technology
Nineteen twenty-nine Germany scientist Schmaltz has developed the profile recorder of First contact pin type, which is utilized
Optical lever amplification principle measurement surface profile.After this, Taylor Hobson companies of Britain also put into surface profiler
Research and development in and obtain not small achievement.With the development of sensing detection technology, the resolution ratio and precision of measuring surface form are big
It is big to improve, sub-micron even Nano grade can be reached.Nowadays, the measurement method of surface topography is roughly divided into five kinds：Mechanical stylus
Formula measures, optical probe formula measures, interferes micrometering, scanning electron microscope (SEM) and scanning probe microscopy (SPM),
Wherein, due to being in direct contact measured surface, measurement result is reliable and stable, and Mechanical stylus formula measures wide by application in industrial circle
It is general.
Mechanical stylus formula is measured for the small spacing of measurement surface and peak valley, is needed using superfine needle point, contact pilotage needle
Point fits closely under the action of mechanism its own gravity, external mechanical force or electromagnetic force with measured surface.In scanning process,
Objective table or contact pilotage are moved in parallel along certain orientation, and system is made to sample point by point, so as to obtain the contour curve of measured surface.
The shortcomings that this contact type measurement instrument is：(a) sample rate is slow, and efficiency is low；(b) due to the uncertainty of measured surface hardness,
Contact pilotage may scratch measured surface, so not being suitable for the detection of soft material；(c) since the limitation of needle type radius can not survey
It measures ultra-precision surface and measures profile medium-high frequency part of concern, thus be not suitable for the detection of ultra-precision surface.
For every drawback of Mechanical stylus formula, and the surface profile detector for having come into being contactless, wherein wrapping
It includes and mechanical gauge head is changed to laser feeler.But non-contact surface outline detector is solving the measurement of tradition machinery contact pin type
While three big drawback of instrument, the problem of bringing a bigger, that is, unstable, precision is not high enough.For example, (a) is tested
The material reflectance of workpiece directly affects measurement result；(b) measured surface needs very bright and clean, and dust or greasy dirt can all influence
Measurement result；(c) when measuring the contour surface containing larger inclination angle, distorted signals or distortion etc. can be caused.
Therefore, how to improve contour detecting precision while detection efficiency is improved becomes the technical issues of urgently to be resolved hurrily.
Invention content
The technical problem to be solved in the present invention is how contour detecting precision is improved while detection efficiency is improved.
For this purpose, according in a first aspect, the embodiment of the invention discloses a kind of contour detecting gauge head, including：
Connecting rod, top are used to be fixed to detector body；Probe position, top are arranged on the bottom end of connecting rod,
Its bottom is for offer probe installation position；First probe is arranged on the first probe installation position of probe position bottom, for first
Pattern carries out contour detecting；Second probe is arranged on the second probe installation position of probe position bottom, for carrying out in a second mode
Contour detecting.
Optionally, it first pops one's head in as laser type gauge head, the second probe positioning contact type gauge head.
Optionally, in contour detecting, the detection track of the first probe is located in front of the detection track of the second probe.
Optionally, it further includes：Turntable is arranged on the top of connecting rod, for connecting rod detachably to be fixed to detection
On instrument body.
Optionally, turntable is additionally operable to drive connection bar movement.
According to second aspect, the embodiment of the invention discloses a kind of outline detector, including：
Above-mentioned contour detecting gauge head；Column for putting contour detecting gauge head, is additionally operable to driving contour detecting gauge head and prolongs
Z-direction moves；Planar tracks, for providing the track of X-axis and/or Y-axis translation to column；Check bit is arranged on plane rail
Below road, position is placed for being provided to profile to be measured.
Optionally, outline detector position three coordinate measuring machine.
According to the third aspect, the embodiment of the invention discloses a kind of profile testing method, including：
The starting point of first probe from default detective path detects profile to be measured and obtains the preliminary survey curve of profile to be measured successively；
Second probe adjusts measurement frequency to complete second along default detective path according to the curvature information extracted from preliminary survey curve
The detection of probe.
Optionally, after the first probe detection to the terminating point of default detective path, turntable driving probe displacement move to
Next default detective path, and probe position adjustment posture is driven, so that when carrying out next default detective path detection, first visits
Head is located at the front of the second probe.
Optionally, the curvature of curvature information of the measurement frequency of the second probe to extracting is directly proportional.
Technical solution of the present invention has the following advantages that：
Contour detecting gauge head provided in an embodiment of the present invention, detector and detection method, due to by the first probe and second
Probe is arranged on same probe position, therefore, can be by the first probe with first when treating measuring wheel exterior feature progress contour detecting
Pattern carries out contour detecting, contour detecting is carried out in a second mode by the second probe, so that different mode detects
Data referred to, convenient for the adjustment of detection parameters between different mode, improved while can then improving detection efficiency
Contour detecting precision.
As preferred technical solution, the second measurement frequency popped one's head in and the curvature of curvature information extracted are into just
Than so as to when carrying out contour detecting in a second mode using the second probe, can adaptively adjust its measurement frequency, then can
Enough pools for further realizing efficiency and precision.
Description of the drawings
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution of the prior art
Embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, in being described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is a kind of contour detecting measuring head structure schematic diagram in the embodiment of the present invention；
Fig. 2 is a kind of outline detector structure diagram in the embodiment of the present invention；
Fig. 3 is a kind of profile testing method flow chart in the embodiment of the present invention；
Fig. 4 is a kind of contour detecting process signal in the embodiment of the present invention.
Specific embodiment
Technical scheme of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's all other embodiments obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instructions such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, merely to
Convenient for the description present invention and simplify description rather than instruction or imply signified device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is only used for description purpose, and it is not intended that instruction or hint relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or be integrally connected；It can
To be mechanical connection or be electrically connected；It can be directly connected, can also be indirectly connected by intermediary, it can be with
It is the connection inside two elements, can is wireless connection or wired connection.For those of ordinary skill in the art
For, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
As long as in addition, technical characteristic involved in invention described below different embodiments non-structure each other
It can be combined with each other into conflict.
It please refers to Fig.1, includes for a kind of contour detecting gauge head, the contour detecting gauge head disclosed in the present embodiment：Connecting rod
1st, 3 and second probe 4 of probe position 2, first probe, wherein：
Its top of connecting rod 1 is used to be fixed to detector body.In general, contour detecting gauge head is arranged on outline detector
On (such as three coordinate measuring machine), the movement of gauge head is detected by driving, contour detecting is carried out to object to be detected to realize.Cause
Gauge head, in the present embodiment, is fixed on detector body by this by connecting rod 1 to realize.
Its top of probe position 2 is arranged on the bottom end of connecting rod 1, and bottom is for offer probe installation position.It is being embodied
In example, the top of connecting rod 1 is connected on detector body, and the bottom end of connecting rod 1 can set probe position 2.It is being embodied
In example, the bottom of probe position 2 can connect probe, and corresponding contour detecting is carried out to object to be measured to realize.
First probe 3 is arranged on the first probe installation position of probe 2 bottom of position, for carrying out profile inspection in the first pattern
It surveys.In the present embodiment, setting at least two probe installation positions in probe 2 bottom of position please refer to Fig.1, and at least two probe positions can be with
It is arranged side by side, for example, by using the mode of left and right side by side, to realize the arrangement of at least two probes position one in front and one in back.In this implementation
It in example, is illustrated so that two are popped one's head in position as an example, the first probe 3 is arranged on the first probe installation position, in the present embodiment, first
Probe 3 is laser type gauge head, and the first probe 3 can be such as non-contact sensors such as laser sensor (laser probe, LP)
Device, to improve contour detecting efficiency.In a particular embodiment, the first probe 3 can take wing plate that screw is added to connect, easy to disassemble
Installation.
Second probe 4 is arranged on the second probe installation position of probe 2 bottom of position, for carrying out profile inspection in a second mode
It surveys.In the present embodiment, the second probe 4 is contact measuring head, to improve accuracy of detection.Specifically, in the present embodiment, second visits
First 4 can be contact trigger sensor (touch-trigger probe, TP).
In the present embodiment, when carrying out contour detecting to object to be measured, the detection track of the first probe 3 is located at the second probe
In front of 4 detection track.Also that is, the first probe 3 can be collected prior to second 4 pairs of outline datas of probe, the work such as arrange,
It is prejudged with the frequency acquisition for giving the second probe 4.
It is detachably connected for the rotation for realizing gauge head and/or with detector body, in a particular embodiment, profile inspection
Surveying gauge head can also include：Turntable 5, turntable 5 are arranged on the top of connecting rod 1, for being detachably fixed to connecting rod 1
On detector body.Specifically, turntable 5 is additionally operable to drive connection bar 1 and moves, which can for example rotate, certainly,
Can be translatable by other Auxiliary Tracks.With turntable connection, it can be achieved that the scanning of different directions of feed.
The present embodiment also discloses a kind of outline detector, please refers to Fig.2, which includes：Above-described embodiment
Disclosed contour detecting gauge head 10, column 20, planar tracks 30 and check bit, wherein：
Contour detecting gauge head 10 is used to carry out contour detecting to object to be measured.
Column 20 is additionally operable to driving contour detecting gauge head 10 and prolongs Z-direction movement for putting contour detecting gauge head 10.Tool
Body, it can be connected on column 20 by the top of connecting rod 1, certainly, in an alternate embodiment of the invention, connecting rod 1 can lead to
It crosses turntable 5 to be connected on column 20, so that gauge head can rotate in direction about the z axis.
Planar tracks 30 are used to provide the track of X-axis and/or Y-axis translation to column 20.In a particular embodiment, by column
20 are movably disposed in planar tracks 30, so as to provide along the track of X-axis and/or Y-axis translation and support for column 20.
Check bit is arranged on 30 lower section of planar tracks, and position is placed for being provided to profile to be measured.
In an alternate embodiment of the invention, outline detector position three coordinate measuring machine.
The present embodiment also discloses a kind of profile testing method, please refers to Fig.3, which includes following step
Suddenly：
Step S100, the starting point of the first probe from default detective path detect profile to be measured and obtain profile to be measured successively
Preliminary survey curve.In general, the first probe is contactless gauge head, therefore more can comprehensively obtain the general profile of profile to be measured
Curve (preliminary survey curve), the information such as the shape, flatness, curvature of profile can be tentatively judged by the preliminary survey curve, this is preliminary
Judgement can be that comparison is efficient.
Step S200, the second probe adjust measurement frequency to complete along pre- according to the curvature information extracted from preliminary survey curve
If the detection of the second probe of detective path.In a particular embodiment, the measurement frequency of the second probe and the curvature extracted are believed
The curvature of breath is directly proportional, specifically, after the first probe obtains preliminary survey curve, can be extracted from the preliminary survey calibration curve information
Curvature information can adjust the measurement frequency of the second probe according to the curvature information, such as when curvature is higher, and measurement frequency can
To increase, so as to more thickly detect, when curvature is relatively low relatively flat, measurement frequency can be reduced, increase and measure step
It is long, so as to which detection is rapidly completed.
In a preferred embodiment, when performing step S100, in the first probe detection to the terminating point of default detective path
Afterwards, turntable driving probe displacement is moved to next default detective path, and drives probe position adjustment posture, so that next in progress
During default detective path detection, the first probe is located at the front of the second probe.
For ease of it will be appreciated by those skilled in the art that hereafter being illustrated with specific example to detection process.It please refers to Fig.4,
Illustrate to carry out the different moments in the measurement process of contour detecting in the present embodiment to a certain object to be measured, Fig. 4 is illustrated
(1), (2), (3), (4), (5) and (6) a different detection process, the detective path of the detection process have l1, l2, l3, l4 and
L5, such as when being scanned to path l1, the contour line of l1 is can obtain, this is scanned to be personalized.Specifically：
After initial sweep point (starting point of default detective path) and X, Y positive direction can have been predefined, visited by LP
Survey the starting point of path l1.When LP captures jump signal, show that LP has reached surface location, at this point it is possible to record coordinate
Value, i.e. LP enter the boundary point (being the starting point in path) of curved surface to be measured.At this point, Y-axis movement is controlled on bridge-type supporting rack
Servo motor locks, and measuring system can not be moved in Y direction.Meanwhile the servo motor of turntable locks, sensor can not be around
Z axis to be rotated.
Then, measuring system is moved along X-axis positive direction, when TP is moved to boundary point (starting point of default detective path)
When, TP remeasures it, and result is integrated into system, is recorded as starting point.If the at this point, coordinate with LP records
It is larger to be worth error, machine alarm opens protection system, and all movements stop, which can be empirically determined.
During being scanned along X positive directions, LP is detected always in leading portion, keeps surveying with preset Δ X unit length
Path l1 is measured, to obtain the coordinate information of surface profile point.Coordinate information at this time is used for two different processing systems, a side
Face is digitized by the information of collection, is then fitted to preliminary survey curve, and therefrom extract curvature information；Another aspect root
The negative-feedback of signal is carried out according to preset curvature criterion, adjusts the measurement frequency of TP, it is adaptively sampled to complete.Sentencing here
According to, curvature usually may be used, when the curvature ki of TP sweep tests is more than preset curvature value k0, scan frequency increase；Work as TP
When the curvature ki of sweep test is less than preset curvature value k0, scan frequency reduces.And due to the precision higher of TP, so with reference to TP
Measurement result, the key point of preliminary survey curve is modified, is finally fitted to final curves.In Fig. 4 (2), to measure
Cheng Zhong, the signal of different state phases.
When LP captures jump signal, show that LP has arrived at the end in path, record the coordinate value of the jump signal,
That is LP leaves the boundary point (terminating point of default detective path) of curved surface.Then, measuring device continues on X positive directions movement d+
Δ d (d is the horizontal distance between the laser beam that the central shaft of TP measuring staffs and LP are sent out, and Δ d is measuring instrument preset value).
When TP is moved to boundary point (terminating point of default detective path), it is remeasured, and result is whole
System is closed, is fitted to curve.If at this point, larger with the coordinate value error of LP records, machine alarm opens protection system,
All movements stop, and referring specifically to above-described embodiment, details are not described herein.
After TP completes the measurement of path terminating point, the unlock of turntable servo motor, and be rotated by 90 ° around Z axis, become LP
On a left side, on the right side, then, turntable servo motor locks TP, to be measured to path l2, is surveyed as a result, to path l2
During amount, but also LP is before TP.
The servo motor unlock of Y-axis movement is controlled on bridge-type supporting rack, measuring device moves Δ Y along Y-axis positive direction.So
Afterwards, the servo motor of Y-axis movement is controlled to lock on bridge-type supporting rack.After the measurement for completing path l2, turntable rotates again
90 °, to be measured along path l3.
At this point, whether LP is to measure table top to determine whether having been enter into curved surface according to focus.If so, then continue to X-direction
Mobile, the boundary point of catastrophe point, as curved surface profile line until encountering signal completes the measurement of path l3.It repeats above-mentioned
Step can measure other path l4, l5 etc..
Contour detecting gauge head provided in this embodiment, detector and detection method, due to by the first probe and the second probe
It is arranged on same probe position, it therefore, can be by the first probe in the first pattern when treating measuring wheel exterior feature progress contour detecting
Contour detecting is carried out, contour detecting is carried out by the second probe in a second mode, so that the number of different mode detection
According to being referred to, convenient for the adjustment of detection parameters between different mode, profile is improved while can then improving detection efficiency
Accuracy of detection.
In a preferred embodiment, the curvature of curvature information of the measurement frequency of the second probe to extracting is directly proportional,
So as to when carrying out contour detecting in a second mode using the second probe, can adaptively adjust its measurement frequency, then can
Further realize the pool of efficiency and precision.
It should be understood by those skilled in the art that, the embodiment of the present invention can be provided as method, system or computer program
Product.Therefore, the reality in terms of complete hardware embodiment, complete software embodiment or combination software and hardware can be used in the present invention
Apply the form of example.Moreover, the computer for wherein including computer usable program code in one or more can be used in the present invention
The computer program production that usable storage medium is implemented on (including but not limited to magnetic disk storage, CD-ROM, optical memory etc.)
The form of product.
The present invention be with reference to according to the method for the embodiment of the present invention, the flow of equipment (system) and computer program product
Figure and/or block diagram describe.It should be understood that it can be realized by computer program instructions every first-class in flowchart and/or the block diagram
The combination of flow and/or box in journey and/or box and flowchart and/or the block diagram.These computer programs can be provided
The processor of all-purpose computer, special purpose computer, Embedded Processor or other programmable data processing devices is instructed to produce
A raw machine so that the instruction performed by computer or the processor of other programmable data processing devices is generated for real
The device of function specified in present one flow of flow chart or one box of multiple flows and/or block diagram or multiple boxes.
These computer program instructions, which may also be stored in, can guide computer or other programmable data processing devices with spy
Determine in the computer-readable memory that mode works so that the instruction generation being stored in the computer-readable memory includes referring to
Enable the manufacture of device, the command device realize in one flow of flow chart or multiple flows and/or one box of block diagram or
The function of being specified in multiple boxes.
These computer program instructions can be also loaded into computer or other programmable data processing devices so that counted
Series of operation steps are performed on calculation machine or other programmable devices to generate computer implemented processing, so as in computer or
The instruction offer performed on other programmable devices is used to implement in one flow of flow chart or multiple flows and/or block diagram one
The step of function of being specified in a box or multiple boxes.
Obviously, the above embodiments are merely examples for clarifying the description, and is not intended to limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And the obvious variation thus extended out or
Among changing still in the protection domain of the invention.
Claims (7)
1. a kind of contour detecting gauge head, which is characterized in that including：
Connecting rod (1), top are used to be fixed to detector body；
It pops one's head in position (2), top is arranged on the bottom end of the connecting rod (1), and bottom is for offer probe installation position；
First probe (3) is arranged on the first probe installation position of described probe position (2) bottom, for being taken turns in the first pattern
Exterior feature detection；
Second probe (4) is arranged on the second probe installation position of described probe position (2) bottom, for being taken turns in a second mode
Exterior feature detection；
Turntable (5) is arranged on the top of the connecting rod (1), for the connecting rod (1) detachably to be fixed to detector
On body；
The turntable (5) is for driving the connecting rod (1) to realize the movement of different directions of feed.
2. contour detecting gauge head as described in claim 1, which is characterized in that described first pops one's head in (3) as laser type gauge head, institute
The second probe (4) is stated as contact measuring head.
3. contour detecting gauge head as claimed in claim 2, which is characterized in that in contour detecting, first probe (3)
Track is detected to be located in front of the detection track of the described second probe (4).
4. a kind of outline detector, which is characterized in that including：
Contour detecting gauge head (10) as described in claim 1-3 any one；
Column (20) for putting the contour detecting gauge head (10), is additionally operable to that the contour detecting gauge head (10) is driven to prolong Z axis
It moves in direction；
Planar tracks (30), for providing the track of X-axis and/or Y-axis translation to the column (20)；
Check bit is arranged below the planar tracks (30), and position is placed for being provided to profile to be measured.
5. outline detector as claimed in claim 4, which is characterized in that the outline detector is three coordinate measuring machine.
6. a kind of profile testing method, which is characterized in that including：
The starting point of first probe from default detective path detects profile to be measured and obtains the preliminary survey curve of profile to be measured successively；
Second probe adjusts measurement frequency to complete along the default spy according to the curvature information extracted from the preliminary survey curve
Survey the detection of second probe in path；
After first probe detection to the terminating point of the default detective path, turntable driving probe displacement is moved to next
Default detective path, and the probe position is driven to adjust posture, so that when carrying out next default detective path detection, described the
One probe is located at the front of the described second probe.
7. profile testing method as claimed in claim 6, which is characterized in that the measurement frequency of second probe is carried with described
The curvature of the curvature information of taking-up is directly proportional.
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| CN107664478B (en) * | 2017-10-26 | 2023-11-03 | 成都众鑫聚合科技有限公司 | Vertical non-contact gyrosome high-precision measuring device and measuring method thereof |
| CN108917657A (en) * | 2018-09-26 | 2018-11-30 | 常州利腾机械有限公司 | A kind of laser multi-diameter shaft testing apparatus for verticality |
| CN110108238A (en) * | 2019-05-27 | 2019-08-09 | 浙江机电职业技术学院 | It is a kind of for measuring the measuring system and measurement method of part flatness |
| CN114910014B (en) * | 2022-04-24 | 2023-07-07 | 浙江大学 | Measurement system and method for surface shape measurement of high-aspect-ratio curved surface component |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101000499A (en) * | 2006-12-18 | 2007-07-18 | 浙江大学 | Contour machining method and system based on multi-sensor integral measuring |
| CN101149253A (en) * | 2007-10-16 | 2008-03-26 | 浙江大学 | Unknown free-form surface self-adaptive measuring method based on exploration method and measuring head device |
| CN104613897A (en) * | 2015-02-12 | 2015-05-13 | 哈尔滨理工大学 | Car outer cover part mold free-form surface self-adaption sampling device and measuring method |
| CN206073931U (en) * | 2016-09-12 | 2017-04-05 | 武汉科技大学 | Contour detecting gauge head and detector |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8649024B2 (en) * | 2010-12-03 | 2014-02-11 | Zygo Corporation | Non-contact surface characterization using modulated illumination |
-
2016
- 2016-09-12 CN CN201610817113.XA patent/CN106225718B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101000499A (en) * | 2006-12-18 | 2007-07-18 | 浙江大学 | Contour machining method and system based on multi-sensor integral measuring |
| CN101149253A (en) * | 2007-10-16 | 2008-03-26 | 浙江大学 | Unknown free-form surface self-adaptive measuring method based on exploration method and measuring head device |
| CN104613897A (en) * | 2015-02-12 | 2015-05-13 | 哈尔滨理工大学 | Car outer cover part mold free-form surface self-adaption sampling device and measuring method |
| CN206073931U (en) * | 2016-09-12 | 2017-04-05 | 武汉科技大学 | Contour detecting gauge head and detector |
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