CN106053886B - A kind of a wide range of afm scan positioning system - Google Patents
A kind of a wide range of afm scan positioning system Download PDFInfo
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- CN106053886B CN106053886B CN201610601352.1A CN201610601352A CN106053886B CN 106053886 B CN106053886 B CN 106053886B CN 201610601352 A CN201610601352 A CN 201610601352A CN 106053886 B CN106053886 B CN 106053886B
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- piezoelectric ceramics
- afm
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- scanner
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
Abstract
The invention discloses a kind of a wide range of afm scan positioning systems.The center for being observed sample and being placed in prism square objective table in the present invention, AFM7 included Z-direction scanner complete Z-direction control and move and realize atom force feedback；The displacement measurement of prism square objective table uses X-axis heterodyne laser interferometer and Y-axis heterodyne laser interferometer；The movement of X/Y plane scanner uses lock-out pulse trigger with the synchronous acquisition of AFM, and the pulse signal of synchronous scanning trigger is from the encoder of X/Y plane scanner and high-frequency phase shift circuit；When X/Y plane scanner acts every time, lock-out pulse trigger sends interruption pulse to the data collecting card of AFM by computer, for acquiring Z axis position signal.Piezoelectric ceramics of the present invention uses phase-locked loop stepper drive, overcomes that piezoelectric ceramics itself is non-linear from measurement and driving method and the mechanical defects such as creep, to solve the problems, such as AFM scan pattern distortion.
Description
Technical field
The present invention relates to microscopy apparatus technical fields, scan more particularly to a kind of a wide range of atomic force microscope (AFM)
Positioning system.
Background technique
Atomic force microscope (AFM) is limited with spatial resolution height, not by sample electric conductivity, can be supported simultaneously in atmosphere
With observing samples in liquid phase environment, so that it be made to be widely used in the nanometers related science such as chemistry, material, physics, biology field
The features such as.But the primary limitation of existing commercialization AFM is first is that scanning range is smaller, generally in several hundred nanometers to several microns
Size in；Second is that scanning speed is slower, imaging efficiency is low.Current related application field proposes the performance of AFM higher
Requirement, the imaging in place as being directed to vital movement in biotechnology realizes semiconductor material sample structure in semicon industry
Measurement, require a wide range of size high speed imaging of hundred micron orders even grade.The expose thoroughly high speed AFM of range of exploitation is
Fall over each other the hot spot of research in various countries.
Currently, big stroke (grade range) nano-precision Scan orientation system both domestic and external has realized millimeter stroke
Nano-precision positioning, but limitation essentially consists in that sweep speed is low, and the reproducibility of image is poor.Also, existing millimeter stroke
Scan orientation system mostly uses macro micro- two-stage positioning, and macro movement realizes large travel high-speed fortune using servo motor or stepper motor
Dynamic, micromotion uses piezoelectric actuator.Application publication number CN103941044A discloses a kind of atomic force microscope across ruler
High-precision sample introduction mechanism is spent, is combined using screw-nut structure and piezoelectric ceramics, can realize sub-micro in micron measurement range
The positioning accuracy of rice.Application publication number CN102788889A discloses a kind of method of puncture of atomic force microscope, using stepping
The thick movement of motor and the thin movement of piezoelectric ceramics combine, and realize quick nondestructive inserting needle.The main problem of existing AFM has: one
It is that the mechanical defects such as sluggish, non-linear of piezoelectric ceramics affect the repeatability precision of positioning movement.It is existing if compensation is not added
Positioning scanning platform be difficult break through 100nm the positioning accuracy limit.Second is that system complex, macro micro- switching control difficulty is big, whole
The dynamic property of system system is undesirable, and bandwidth is low.
Summary of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the present invention provides a kind of a wide range of afm scans to position
System.
The technical solution adopted in the present invention is as follows:
The present invention is by X/Y plane scanner, prism square objective table, X-axis heterodyne laser interferometer, Y-axis heterodyne laser interference
Instrument, afm tip, AFM, high-frequency phase shift circuit, lock-out pulse trigger controller, computer composition.
The connection relationship of each part mentioned above is as follows:
It is observed the center that sample is placed in prism square objective table, AFM included Z-direction scanner completes Z-direction control fortune
It moves and realizes atom force feedback.The displacement measurement of prism square uses X-axis heterodyne laser interferometer and Y-axis heterodyne laser interferometer.
The movement of X/Y plane scanner uses lock-out pulse trigger, the pulse signal of synchronous scanning trigger with the synchronous acquisition of AFM
Encoder and high-frequency phase shift circuit from X-axis mechanical movement platform and Y-axis mechanical movement platform.X/Y plane scanner acts every time
When, lock-out pulse trigger sends interruption pulse to the data collecting card of AFM by PC machine, for acquiring Z axis position signal.
The X/Y plane scanner is by X-axis mechanical movement platform, Y-axis mechanical movement platform, adjusting bracket, XY piezoelectric ceramics group
At.X-axis mechanical movement platform orthogonal superposition constitutes macro dynamic platform on Y-axis mechanical movement platform, and XY piezoelectric ceramics is fixed by adjusting bracket
On X-axis mechanical movement platform, prism square objective table is installed on XY piezoelectric ceramics.
The XY piezoelectric ceramics uses phase-locked loop stepper drive, and the phase-locked loop is by laser heterodyne interferometer, piezoelectricity
Ceramics, high-frequency phase shift circuit, servo-system are constituted, and by means of Doppler effect, piezoelectric ceramics is by stepper drive and step value can
Control.
The X/Y plane scanner uses macro micro- Dual servo loop.There are two types of motion control modes: first is that free module
Formula, i.e., macro dynamic platform and piezoelectric ceramics servo loop closed loop control, and big travel displacement is completed by macro dynamic platform and piezoelectric ceramics is not held
Row, when leaning on close-target (according to selected threshold value), piezoelectric ceramics movement, piezoelectric ceramics executes the step-wise displacement of nanometer step-length
Step wise approximation target.In this way, piezoelectric ceramics only compensates for the displacement defect of macro dynamic platform in target position.The position control mode is suitable
It is moved for point.Second is that track following mode, in this mode, all actuator simultaneously operations.In entire displacement process
In, high-frequency phase shift circuit constantly generates phase shift signalling, i.e. piezoelectric ceramics executes the displacement of nanometer step-length always to compensate macro dynamic platform
Defect is until reach target position.This position control method is suitable for continuous movement.
Compared with prior art, the beneficial effects of the present invention are:
1. scanner is macro dynamic using X-axis and Y-axis the invention proposes a kind of new AFM millimeter stroke X/Y plane scanner
Platform superposition, micropositioner are placed between the central point and macro micro mechanism of X-axis, Y-axis the design that multi freedom degree mechanical regulating mechanism is arranged
Overcome the shortcomings that common big stroke motion platform is affected by Abbe error；The AFM scan positioning system X of building, Y-direction
It scans and is separated with the feedback control of AFM Z-direction, avoid the X/Y plane of AFM scan process generation and the non-thread sexual intercourse of Z-direction
Pitch coupling error.
2. piezoelectric ceramics uses phase-locked loop stepper drive, piezoelectric ceramics itself is overcome from measurement and driving method
The mechanical defects such as non-linear and creep, to solve the problems, such as AFM scan pattern distortion；
3. the present invention uses the error for going to compensate macro dynamic platform with the high frequency sound piezoelectric ceramics of high-frequency signal circuit driving, improve
Locating speed avoids the decline of locating speed caused by the complicated algorithm for commonly using macro micro- Two-stage control.
Detailed description of the invention
Fig. 1 is Scan orientation overall system architecture schematic diagram of the invention.
Fig. 2 is X/Y plane scanner structure schematic diagram of the invention.
Fig. 3 is X/Y plane scanner movements control principle block diagram of the invention.
Specific embodiment
The following further describes the present invention with reference to the drawings.
There are the characteristics that the deficiencies of sluggish, creep and non-linear displacement for piezoelectric ceramics, the present invention uses phase-locked loop
Stepper drive piezoelectric ceramics, what it is due to measurement and control is photoelectricity phase shift signalling, and positioning accuracy is sluggish, compacted not by piezoelectric ceramics
Become the influence with mechanical defects such as non-linear displacements.For macro, micro-positioning complex control, the present invention is first is that proposed adoption threshold
It is worth setting method, completes macro micro- switching with software, realize the Scan orientation of two o'clock or multi-point；Second is that macro dynamic platform, micropositioner are with together
Pace pulse triggering mode realizes macro micro- linkage, implements to compensate the movement of macro dynamic platform with the piezoelectric ceramics of nanoscale step value driving
Error.The utilization of two kinds of localization methods can be satisfied with the demand of multi-way, multi-trace Scan orientation.
Scan orientation overall system architecture schematic diagram of the invention as shown in Figure 1, include by X/Y plane scanner 1, cube
Mirror objective table 2, X-axis heterodyne laser interferometer 4, Y-axis heterodyne laser interferometer 5, afm tip 6, AFM7, high-frequency phase shift circuit 8,
Lock-out pulse trigger controller 9, computer 10.It is observed the center that sample 4 is placed in prism square objective table, X/Y plane scanner band
The X/Y plane movement of dynamic test sample, AFM included Z-direction scanner complete Z-direction control and move and realize atom force feedback.
The displacement measurement of X/Y plane scanner uses Frequency Stabilized Lasers round trip heterodyne ineterferometer, is divided into X-axis interferometer and Y-axis interferometer.It is flat
The movement of Surface scan device uses lock-out pulse trigger controller with the synchronous acquisition of AFM.The pulse of lock-out pulse trigger controller
Linear motor optical encoder and high-frequency phase shift circuit of the signal from X/Y plane scanner.When plane scanner acts every time, together
Pace pulse trigger controller sends interruption pulse to the data collecting card of AFM by PC machine, for acquiring Z axis position signal.
The structure of X/Y plane scanner of the invention is as shown in Fig. 2, the quasi- macro micro- secondary structure of X/Y plane scanner, macro dynamic
Platform is made of X-axis mechanical movement platform 1-2 and Y-axis mechanical movement platform 1-1, X-axis mechanical movement platform and mutual with Y-axis mechanical movement platform
It is orthogonal.Micropositioner uses Plane Piezoelectric Materials ceramics 1-6, and piezoelectric ceramics has the resolution ratio of sub-nanometer precision on 15 μm of stroke,
The highest cutoff frequency of two axis is 2.5KHz.Prism square objective table is installed on piezoelectric ceramics.Two adjustable machines of gradient
Tool adjusting bracket 1-3,1-4 and rotatable support frame 1-5 is fixed on X-axis mechanical movement platform, adjusts mechanical adjustment frame 1-3,1-4 and can
Runing rest 1-5 makes interferometer measurement optical axis, linear motor mechanical axis, piezoelectric ceramics mechanical axis precise alignment (by N.Boroff
Nm interference measurement request, angular error uncertainty should be lower than 5 arcseconds), the purpose is to make pitch angle in position fixing process,
The influence of rolling pendulum angle and angle of oscillation to measurement accuracy minimizes.The residue of X-axis mechanical movement platform of the present invention and Y-axis machinery
Straightness can lock the X/Y plane piezoelectric ceramics of control by closed loop to compensate.Sports platform is commercial air bearing hydrostatic slideway,
It is driven by linear motor, X-axis mechanical movement platform and Y-axis mechanical movement platform carry PID/feedback control, and built-in resolution ratio is 5nm's
Linear motor encoder, range 50mm, maximum displacement speed are 300mm/s, and linearity and flatness are 0.5 μm.
X/Y plane scanner movements control principle block diagram of the invention is as shown in Figure 3.The macro microcontroller of X/Y plane scanner
For Dual servo loop, including the macro dynamic platform servo loop of linear motor and piezoelectric ceramics micropositioner servo loop, big travel displacement is used
Two kinds of position control methods: first is that free schema, i.e., macro dynamic platform and piezoelectric ceramics servo loop closed loop control, big travel displacement
By macro dynamic platform completion, piezoelectric ceramics is not executed, when leaning on close-target (according to selected threshold value), piezoelectric ceramics movement, and piezoelectricity
Ceramics execute the step-wise displacement Step wise approximation target of nanometer step-length.In this way, piezoelectric ceramics only compensates for macro dynamic platform in target position
Displacement defect.The position control method is moved suitable for point.Second is that track following mode, in this mode, all is held
Row device simultaneously operation.In entire displacement process, high-frequency phase shift circuit constantly generates phase shift signalling, i.e. piezoelectric ceramics executes always
Nanometer step-length is displaced to compensate the defect of macro dynamic platform until reaching target position.This position control method is suitable for continuous fortune
It is dynamic.Macro dynamic platform of the present invention is made of X-axis mechanical movement platform and Y-axis mechanical movement platform.
Piezoelectric ceramics of the invention uses phase-locked loop circuit stepper drive.By taking X-motion as an example, X-axis interferometer, piezoelectricity
Ceramics, high-frequency phase shift circuit, X-axis servo-system 11-2 constitute phase-locked loop, and by means of Doppler effect, piezoelectric ceramics is by stepping
Driving, step value are as follows:
λ is optical maser wavelength in formula (1),The phase shift value generated for high-frequency phase shift circuit.
Piezoelectric ceramics step value is controllable as a result,.Y-motion principle is identical as X axis, Y-axis interferometer, piezoelectric ceramics,
High-frequency phase shift circuit, X-axis servo-system 11-2 constitute phase-locked loop.Piezoelectric ceramics can step in X/Y plane to quantify as a result,
Long value stepper drive.High-frequency phase shift circuit of the present invention can generate the phase shift signalling with interferometer same frequency.
Different from traditional zigzag track scanning mode, based on the adoptable scanning mould of atomic force microscope of the invention
Formula mainly has: A) former formula, macro dynamic platform does a millimeter stroke motion under the mode, and piezoelectric ceramics is only to the straight line of the motor movement
Degree is modified, and is not compensated the displacement error of the macro dynamic platform direction of motion.As initial position is located at position (0:0) of X/Y plane
It sets, X-axis mechanical movement platform is along X-motion, and piezoelectric ceramics only compensates the straightness of Y-axis at this time, does not do X-motion
Position fine compensation.When a line is completed, sample stage is placed in second row parallel with previous row by positioning system, so round-trip,
Until covering whole image scanning area.B) matrix pattern is completed on micron stroke by macro dynamic platform first in this mode
Initial matrix scanning, once first scan is completed, sample is placed in the start bit close to first image by piezoelectric ceramics movement
It sets, macro dynamic platform completes the scanning of adjacency matrix several times until the end of scan；C) trajectory track mode, in this mode, macro dynamic platform
During executing long stroke, piezoelectric ceramics executes nanoscale step-length always in X-axis and Y-axis to compensate the defect of macro dynamic platform.This
Sample, displacement accuracy and straightness in X-axis and Y-axis are guaranteed simultaneously.
Claims (4)
1. a kind of a wide range of afm scan positioning system, it is characterised in that the Scan orientation system is scanned by X/Y plane
Device, prism square objective table, X-axis heterodyne laser interferometer, Y-axis heterodyne laser interferometer, afm tip, AFM, high-frequency phase shift circuit,
Lock-out pulse trigger controller, computer composition；
It is observed the center that sample is placed in prism square objective table, AFM included Z-direction scanner completes Z-direction control movement simultaneously
Realize atom force feedback；The displacement measurement of prism square objective table uses X-axis heterodyne laser interferometer and Y-axis heterodyne laser interference
Instrument；The movement of X/Y plane scanner uses lock-out pulse trigger with the synchronous acquisition of AFM, and the pulse of synchronous scanning trigger is believed
Number encoder and high-frequency phase shift circuit from X/Y plane scanner；When X/Y plane scanner acts every time, lock-out pulse triggering
Device sends interruption pulse to the data collecting card of AFM by computer, for acquiring Z axis position signal.
2. a kind of a wide range of afm scan positioning system according to claim 1, it is characterised in that: described
X/Y plane scanner is made of X-axis mechanical movement platform, Y-axis mechanical movement platform, adjusting bracket, XY piezoelectric ceramics；X-axis mechanical movement platform
Orthogonal superposition constitutes macro dynamic platform on Y-axis mechanical movement platform, and XY piezoelectric ceramics is fixed on X-axis mechanical movement platform by adjusting bracket
On, prism square objective table is installed on XY piezoelectric ceramics.
3. a kind of a wide range of afm scan positioning system according to claim 2, it is characterised in that: described
XY piezoelectric ceramics uses phase-locked loop stepper drive；The phase-locked loop is by heterodyne laser interferometer, piezoelectric ceramics, high-frequency phase shift electricity
Road, servo-system constitute, by means of Doppler effect, piezoelectric ceramics by stepper drive and step value it is controllable.
4. a kind of a wide range of afm scan positioning system according to claim 2, it is characterised in that: the XY
Plane scanner uses macro micro- Dual servo loop；There are two types of motion control modes: first is that free schema, i.e., macro dynamic platform and piezoelectricity
Ceramic servo loop closed loop control, big travel displacement is completed by macro dynamic platform and piezoelectric ceramics does not execute, when leaning on close-target, pressure
Electroceramics movement, piezoelectric ceramics execute the step-wise displacement Step wise approximation target of nanometer step-length；In this way, piezoelectric ceramics is only in target position
Set the displacement defect for compensating for macro dynamic platform；Second is that track following mode, in this mode, all actuator simultaneously operations；?
In entire displacement process, high-frequency phase shift circuit constantly generates phase shift signalling, i.e. it is next to execute the displacement of nanometer step-length always for piezoelectric ceramics
The defect of macro dynamic platform is compensated until reaching target position.
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2016
- 2016-07-28 CN CN201610601352.1A patent/CN106053886B/en not_active Expired - Fee Related
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| JPH06265345A (en) * | 1993-03-12 | 1994-09-20 | Nikon Corp | Scanning probe microscope |
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| CN102629122A (en) * | 2012-04-17 | 2012-08-08 | 中国科学院光电技术研究所 | Long-stroke high-speed dual-drive nano positioning system |
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