JP4280382B2

JP4280382B2 - Information detecting apparatus and information detecting method having scanning probe

Info

Publication number: JP4280382B2
Application number: JP37013399A
Authority: JP
Inventors: 淳一関; 俊一紫藤
Original assignee: Canon Inc
Current assignee: Canon Inc
Priority date: 1999-12-27
Filing date: 1999-12-27
Publication date: 2009-06-17
Anticipated expiration: 2019-12-27
Also published as: JP2001183282A

Description

【０００１】
【発明の属する技術分野】
本発明は、走査型プローブを有する情報検出装置及び情報検出方法に関し、特に、複数のプローブで測定試料を同時観察する走査型プローブ顕微鏡に好適な技術の実現を目指すものである。
【０００２】
【従来の技術】
近年、導体の電子構造を直接観察できる走査型トンネル顕微鏡（以後、ＳＴＭと略す）の開発［Ｇ．Ｂｉｎｎｉｎｇｅｔａｌ．Ｐｈｙｓ．Ｒｅｖ．Ｌｅｔｔ，４９，５７（１９８２）］以来、ＡＦＭ（原子間力顕微鏡）、ＳＣＭ（走査型容量顕微鏡）、ＮＳＯＭ（近接場光学顕微鏡）といった、先端の尖ったプローブを走査することにより様々な情報とその分布を得る顕微鏡装置が、次々と開発されてきた。現在、これらの顕微鏡群は、走査型プローブ顕微鏡（ＳＰＭ）と総称され、原子、分子レベルの解像度を持つ、微細構造の観察手段として、広く用いられるようになっている。
【０００３】
走査型プローブ顕微鏡を用いた測定では、測定試料の面に沿ってプローブを走査する時間が、工業的な応用を考える際にスループットの点で障害となっていた。また、走査を行うためのステージ（アクチュエータ）の動作精度が測定精度を左右するが、より広範囲の試料を測定したいという要求に対して、技術的およびコスト的な観点から、広い走査範囲と高い精度を両立するステージの開発が困難であるということが障害となっていた。
【０００４】
これらの問題に対する回答として、複数のプローブを用いて試料を同時観察する方法があり、例えば、特開平３−２８７００６号公報では、試料の表面形状を測定するために、複数のＡＦＭ探針を試料面と平行な面内において動作する同一ステージ上に配置し、個々のＡＦＭ探針ごとに試料表面との距離を制御することで、広範囲に渡り、高精度な、試料の形状情報を得る方法が提案されている。
【０００５】
しかしながら、前記方式のように、個々のプローブについて独立に距離制御を行う場合、プローブごとに制御系と駆動系を持つ必要があり、装置構成が非常に複雑になる。特に駆動系はプローブと一体化した場合、高価なものとなるという問題がある。これを避けるため、プローブごとに交換可能とした場合は、交換時に非常に高い取り付け精度が要求され、結果として装置全体のコスト増を招く。また、多数の微小なアクチュエータ（例えば圧電素子）を用いるため、アクチュエータ間の特性ばらつきが測定結果に影響しやすい。
【０００６】
この問題を解決するための方法として、弾性体に支持された探針を持つ複数のプローブを一体として試料表面と平行に走査し、前記弾性体のたわみにより、試料表面の凹凸を吸収しながら試料表面の情報を得るという方法が知られている。例えば、形状情報を得るためには、個々のプローブの前記弾性体のたわみ量を計測する、導電性の分布情報を得るためには導電性の探針を用いて、試料との間に電圧を印加し、電流値を計測するなどする。
このような接触走査方式は、探針先端を試料に対し接触させたまま走査する場合に、試料に対する個々のプローブの試料面垂直方向位置のフィードバック制御が不必要であるため、構成が複雑にならず、特に複数のプローブを有する装置に適している。
【０００７】
【発明が解決しようとする課題】
さて、複数のプローブを同時に使用する場合、製造時に生ずる誤差により、各プローブの短針先端が完全な平面内に並ぶということは通常考えにくく、いわゆる探針先端の高さのばらつきが発生する。
図９は、平滑な試料１０５に前述のような探針先端の高さのばらつきを持つプローブアレイ１０４の全探針先端を接触させた場合を示した模式図である。なお、説明のため、探針先端の高さのばらつき及び、プローブの大きさについては、強調して示してある。この時、弾性体１０１の最大たわみ量は図９中のｄとなる。
【０００８】
探針先端の高さのばらつきが大きい場合、あるいは、有機物等、破損しやすい試料を測定する場合、この最大たわみ量の大きさが問題となる。弾性体１０１は板ばねとして機能するため、たわみ量が大きいほど探針１０２先端と試料１０５表面との間に働く押し付け力が大きくなり、最悪の場合、探針１０２や試料１０５表面の破損を招く結果となる。また、探針１０２の摩耗という観点からも押し付け力は小さい方が望ましい。
【０００９】
また、探針１０２と試料１０５の材料定数、形状、測定精度等から、許容される押し付け力が定まれば、許容される最大たわみ量も定まるため、高さ方向の測定レンジはこれで制限を受ける。
また、従来技術に述べたような、個々のプローブにアクチュエータを配する構成においても、アクチュエータの動作範囲があるため、探針先端の高さのばらつきにより、同様に試料１０５表面に垂直方向の測定レンジは制限を受ける。
【００１０】
そこで、本発明は、上記課題を解決するため、試料とプローブの破損を最小限に押さえながら、より広い高さ方向の測定レンジをもつ広範囲な試料面を、高分解能かつ高速に測定し、情報を検出することができる走査型プローブを有する情報検出装置及び情報検出方法、特に、複数のプローブで測定試料を同時観察する走査型プローブ顕微鏡に適した情報検出装置及び情報検出方法を提供するものである。
【００１１】
【課題を解決するための手段】
本発明は、上記課題を達成するために、つぎの（１）〜（１６）のように構成した走査型プローブを有する情報検出装置及び情報検出方法を提供する。
（１）複数のプローブを一体として試料に対して相対走査し、前記試料上の物理情報を検出する走査型プローブを有する情報検出装置において、
前記複数のプローブの各探針先端の位置関係を検出する位置関係検出手段と、
前記複数のプローブの各探針先端の変位を検出する変位検出手段と、
前記各探針先端の位置関係に基づいて、全プローブの探針先端までの距離の最大値と最小値の差が小さくなるような基準面を計算する基準面演算手段と、
前記基準面と前記試料との相対角度を検出する角度検出手段と、
前記複数の測定プローブを一体として前記試料との相対角度を変化させる角度制御手段と、
前記複数の測定プローブを一体として前記試料との相対位置を制御する位置制御手段と、
を有し、前記プローブの角度を制御して前記基準面と前記試料との面あわせを行い、前記複数のプローブと前記試料を位置制御して相対走査を行うことを特徴とする情報検出装置。
（２）前記基準面演算手段が、前記位置関係検出手段により検出された各探針先端の位置にその頂点のすべてが含まれ、かつ前記各探針先端の位置のすべてを内包するような凸多面体の各面から、最も離れた頂点までの距離を比較し、前記距離が最小となる基準面を検出する手段であることを特徴とする上記（１）に記載の情報検出装置。
（３）前記角度制御手段が、前記基準面と前記試料との面あわせに際し、前記角度検出手段によって検出された前記基準面と前記試料との相対角度を参照して、前記基準面と前記試料が平行になるように角度制御量を計算する角度制御量演算手段を有することを特徴とする上記（１）または（２）に記載の情報検出装置。
（４）前記位置制御手段が、探針先端の変位量が最小となるプローブの前記変位量を一定値とする位置制御量の計算を行う位置制御量演算手段を有することを特徴とする上記（１）〜（３）のいずれかに記載の情報検出装置。
（５）前記位置関係検出手段が、複数の前記変位量検出手段で構成されることを特徴とする上記（１）〜（４）のいずれかに記載の情報検出装置。
（６）前記角度検出手段が、複数の前記変位量検出手段で構成されることを特徴とする上記（１）〜（５）のいずれかに記載の情報検出装置。
（７）前記変位量検出手段は、前記プローブの前記探針を支持する弾性体のたわみ量を検出するたわみ量検出手段であることを特徴とする上記（１）〜（６）のいずれかに記載の情報検出装置。
（８）前記変位量検出手段による変位量と、前記位置関係検出手段による位置関係と、前記位置制御手段による位置制御量とから、前記試料の表面形状の情報を合成する情報合成手段を有することを特徴とする上記（１）〜（７）のいずれかに記載の情報検出装置。
（９）複数のプローブを一体として試料を相対走査し、試料上の情報を検出する走査型プローブを有する情報検出方法において、
前記複数のプローブの各探針先端の位置関係を検出し、
前記各探針先端の位置関係に基づいて、全プローブの探針先端までの距離の最大値と最小値の差が小さくなるような基準面を計算し、
前記基準面と前記試料との相対角度を検出し、
前記複数のプローブを一体として前記試料との相対角度を変化させて前記基準面と前記試料との面あわせを行い、前記複数のプローブと前記試料を位置制御して相対走査を行うことを特徴とする情報検出方法。
（１０）前記基準面の計算が、前記位置関係検出により検出された各探針先端の位置にその頂点のすべてが含まれ、かつ前記各探針先端の位置のすベてを内包するような凸多面体の各面から、最も離れた頂点までの距離を比較し、前記距離が最小となる基準面を検出することにより行われることを特徴とする上記（９）に記載の情報検出方法。
（１１）前記角度制御が、前記基準面と前記試料との面あわせに際し、前記基準面と前記試料との前記相対角度を参照して、前記基準面と前記試料が平行になるように角度制御量を計算することにより行われることを特徴とする上記（９）または（１０）に記載の情報検出方法。
（１２）測定走査中に、探針先端の変位量が最小となるプローブの前記変位量を一定値とするように位置制御を行うことを特徴とする上記（９）〜（１１）のいずれかに記載の情報検出方法。
（１３）前記位置関係の検出が、前記複数のプローブの探針先端の変位量を検出することによって行われることを特徴とする上記（９）〜（１２）のいずれかに記載の情報検出方法。
（１４）前記相対角度の検出が、前記複数のプローブの探針先端の変位量を検出することによって行われることを特徴とする上記（９）〜（１３）のいずれかに記載の情報検出方法。
（１５）前記変位量の検出が、前記プローブの前記探針を支持する弾性体のたわみ量の検出によることを特徴とする上記（９）〜（１４）のいずれかに記載の情報検出方法。
（１６）前記検出された変位量、前記プローブの探針先端の位置関係、及び前記位置制御量とから、前記試料の表面形状の情報を合成することを特徴とする上記（９）〜（１５）のいずれかに記載の情報検出方法。
【００１２】
【発明の実施の形態】
上記した構成によって、一体となって測定試料と相対動作する複数本の測定プローブを有するプローブアレイを用いた走査型プローブ顕微鏡において、各探針先端の位置を検出し、頂点すべてが前記検出した各探針先端の位置に含まれ、かつ各探針先端の位置すべてを内包するような凸多面体の各面から、最も離れた頂点までの距離を比較し、これが最小になるような面を探して基準面とし、この基準面と試料の測定面が平行になるように、プローブの角度を制御して面あわせを行い、探針先端の変位量が最小となるプローブの探針先端の変位量が一定となるようにプローブアレイと試料との間隔を制御しながら走査を行う事により、探針の試料に対する最大押し付け力を小さくし、両者の損傷を小さくすることができる。
また、上記構成によれば、許容される押し付け力の範囲、あるいはアクチュエータの動作範囲において、測定できる試料測定面垂直方向の測定レンジを実効的に拡大することができる。
さらに、前記動作に加えて、前記各プローブの探針先端の前記基準面に対する相対的な位置関係を計算し、各プローブの探針先端の変位量、距離制御量から試料の表面形状を計算、合成することにより、例えば、簡便なプローブで、大面積の形状情報を安全かつ高速に取得可能な原子間力顕微鏡を構成できる。
【００１３】
【実施例】
以下、図に基づいて、本発明の実施例について説明する。
まず、実施例の説明に先立ち、本発明の原理について説明する。
図１０は、本発明の原理を説明するための図であり、図９に示す状態からプローブアレイ１０４と試料１０５とのなす角度をθだけ変化させてから、すべての探針１０２が試料１０５に接触するように両者を接近させた様子の模式図である。なお、説明のため、探針先端の高さのばらつき及び、プローブの大きさについては強調して示してある。この時、探針１０２先端の最大変位量は図１０中のｄ’であり、図９中のｄに対して、この例ではｄ’＜ｄなる関係が成り立っていることが分かる。また、一般的に実際の測定時にはこれに加えて、所定の押し込み量ｄ₀を与えて走査する。このため、変位量最小の探針１０２先端の変位量がｄ₀、変位量最大の探針１０２先端の変位量がｄ₀＋ｄ’となる。
【００１４】
このようにｄ’＜ｄなる関係を与えるθは一般に存在し、θの選び方によりｄ’の値を最小にすることができる。プローブアレイ１０４側から見れば、このような関係を示す面の向きは一意に定まるので、図２に示すように、プローブアレイ１０４ごとに、あらかじめプローブアレイ基準面１０６を選んでおき、測定時にはこれと試料１０５とが平行になるように、両者のなす角度の調節、すなわち面あわせを行えば、試料１０５の測定時にプローブアレイ１０４に含まれる探針１０２先端の最大変位量すなわち、弾性体１０１の最大たわみ量を最小とする事が出来る。弾性体１０１は構造上、板ばねとして作用するため、探針１０２の試料１０５に対する最大押し付け力を最小とし、両者の損傷を最大量を最小とすることが出来る。あるいは、許容される押し付け力の範囲において、試料測定面垂直方向の測定レンジを実効的に最大とすることが出来る。
【００１５】
次に、前述したプローブアレイ基準面１０６の選び方について述べる。直線状に並ぶ様に作成されたｎ本のプローブ１０３からなるプローブアレイ１０４を考える。
ここでは説明のため、ｎ＝８とし、図３に示すように、それぞれのプローブの実際の探針１０２の先端の位置をＰ１からＰ８とおく。
図４に示すようにこれらＰ１からＰ８までの少なくとも１点ずつを通り、かつ８点すべてを間に挟み込むことができる平行な２本の直線ｌ１、ｌ２を考える。試料１０５の表面をｌ１、ｌ２と平行にした場合、プローブアレイ１０４の各探針１０２先端の変位量の最大値と最小値の差は、図４中ｄで示す、ｌ１とｌ２の距離となる。
ここで、前述したように、変位量最小の探針１０２先端の変位量をｄ₀で一定とすると変位量最大の探針１０２先端の変位量はｄ₀＋ｄであり、変位量最大の探針１０２先端の変位量を最小とするようなプローブアレイ基準面１０６を求めるという問題は、図４中ｄを最小にするようなｌ１、ｌ２を求めるという問題に置き換えて考えることができる。
【００１６】
図４に示すように、ｌ１、ｌ２がそれぞれＰ３、Ｐ２を通るとする。Ｐ３とＰ２を結ぶ直線を考え、この長さを図４中Ｌ、ｌ１となす角の鋭角側を図４中θとすると、ｄ＝Ｌｓｉｎθなる関係が成り立つ。Ｌは一定だからθが最小のときｄが最小となる。前述の通り、すべての点はｌ１とｌ２の間になければならないため、θを徐々に小さくしていき、ｌ１、ｌ２のいずれかがＰ３、Ｐ２以外の１点を通る状態になったときにθは最小となる。図４の例では、ｌ２がＰ５を通るとき、θは最小となり、このようなｌ１、ｌ２、ｄをそれぞれｌ１’、ｌ２’、ｄ’として図５に示す。
【００１７】
以上のことから、２本の直線ｌ１’、ｌ２’のいずれかは必ず２点を通る。さらに、すべての点はｌ１’とｌ２’の間になければならない事を踏まえた上で、Ｐ３、Ｐ２以外の組み合わせについても考えると、ｌ１’、ｌ２’の通る点と、ｌ１’、ｌ２’のうち２点を通るものとの集合は、頂点すべてが、Ｐ１からＰ８のいずれかで構成され、すべての点を内側に含む凸多角形である。この多角形の各辺から最も離れた頂点までの距離を比較し、これが最小になるような辺を探し、図２中のプローブアレイ基準面１０６として使用することにより、プローブアレイ１０４中の探針１０２先端の最大変位量を最小とする、すなわち弾性体１０１の最大たわみ量を最小とすることができる。
【００１８】
以上、説明のため探針１０２先端の位置が同一直線上にあるように作成されたプローブアレイ１０４について議論したが、たとえば図６に示すように、探針１０２先端の位置が同一平面上にあるように作成されたプローブアレイ１０４についても、凸多角形を凸多面体、辺を面、角度を立体角とすることにより、まったく同じ議論が可能であり、この場合、凸多面体の各面から最も離れた頂点までの距離を比較し、これが最小になるような面を探して、図２中のプローブアレイ基準面１０６として使用すればよい。
【００１９】
次に、以上の事を実際の装置に適用した例について述べる。図１に示すように、複数のプローブ１０３からなるプローブアレイ１０４が、試料１０５の表面に対向するように配置される。プローブアレイ１０４はαβ駆動ステージ１００７にとりつけられており、試料１０５は、ｘｙｚ駆動ステージ１００８に取り付けられる。
プローブアレイ１０４は、半導体プロセスにより、図６に示すように一体成形される。各プローブ１０３の探針１０２は、Ｓｉで構成される弾性体１０１により支持される。弾性体１０１の表面には、Ａｓを打ち込むことで、図７に示すように、ピエゾ抵抗層６０１が形成されており、弾性体の変形によって生じる応力に応じて、抵抗値が変化する。
【００２０】
条件記憶回路１００２は、プローブアレイ１０４における各探針１０２先端の並び方向の位置関係を記憶している。この位置関係は、プローブアレイ１０４をＳＥＭ（走査型電子顕微鏡）を用いてあらかじめ測定しておく。
変位量検出回路１００４はプローブアレイ１０４の弾性体１０１のピエゾ抵抗層６０１にバイアス電圧を印加し、抵抗値の変化を電流値として検出することで、探針１０２先端の変位量を検出する。
角度制御回路１００５は、αβ駆動ステージ１００７を駆動して、試料１０５とプローブアレイ１０４との相対角度を変化させる。位置制御回路１００６は、ｘｙｚ駆動ステージ１００８を駆動して、試料１０５とプローブアレイ１０４との相対位置を変化させる。
【００２１】
まず、図１に示す装置の試料１０５の代わりに基準試料７０１を取り付ける。基準試料７０１はＳｉ基板であり、研磨により、試料測定時の要求精度より高い平面度と面粗さ精度を持つように仕上げられている。図８に示すようにプローブアレイ１０４と基準試料７０１との相対位置を近づけていき、変位量検出回路１００４で各プローブ１０３の探針１０２先端の変位をモニタし、すべてのプローブ１０３に変位が生じた時点で両者の接近を止め、基準面演算回路１０１０は全プローブ１０３の探針１０２先端の変位量から、前記方法により、プローブアレイ基準面１０６を計算し、条件記憶回路１００２に記憶させる。さらに、プローブアレイ基準面１０６を基準とした、各プローブ１０３の探針１０２先端の位置を計算し、条件記憶回路１００２に記憶させる。
【００２２】
次に基準試料７０１の代わりに測定する試料１０５を取り付ける。同様にプローブアレイ１０４と試料１０５とを近づけていき、変位量検出回路１００４で各プローブ１０３の探針１０２先端の変位をモニタし、変位の生ずるプローブ１０３の本数が３本になった時点で両者の接近を止め、角度制御量演算回路１００９は、この３本のプローブ１０３の変位量と、条件記憶回路１００２に記憶された、この３本のプローブ１０３の探針１０２先端のプローブアレイ基準面１０６に対する位置関係を参照して、試料１０５の表面とプローブアレイ基準面１０６とを平行にするような角度制御量を計算し、プローブアレイ１０４と試料１０５を離した後に、角度制御回路１００５に計算値を送る。
【００２３】
次に、プローブアレイ１０４の全探針１０２先端を試料１０５表面に接触させ、試料１０５上を走査する。走査中、位置制御量演算回路１００３は変位量の最も少ないプローブ１０３の変位量をあらかじめ定められた一定値に保つように、制御量を計算し、位置制御回路１００６に送る。また、情報合成回路１００１は全プローブ１０３の変位量と、条件記憶回路１００２に記憶された各探針１０２先端の位置関係、位置制御量１００３が計算した制御量とから、試料１０５表面の形状情報分布を計算、合成する。
なお、本実施例では、探針１０２先端の変位量の検出に弾性体１０１のたわみによるピエゾ抵抗層６０１の抵抗変化を用いたが、もちろんこれは、光てこ等、他の変位検出手段でもかまわない。
【００２４】
また、本実施例では、試料１０５表面と、プローブアレイ基準面１０６との相対角度の検出を、プローブアレイ１０４と試料１０５との接触を用いて行ったが、もちろんこれは、静電容量センサ、レーザ変位センサ等、他の検出手段でもかまわない。
【００２５】
また、本実施例では、各探針の先端の位置を測定する際に、プローブ１０３の探針先端の変位を用いたが、別の測定手段、例えば、ＳＥＭ（走査型電子顕微鏡）等で測定しても構わない。
また、本実施例では、試料１０５の表面形状を測定する原子間力顕微鏡としての装置構成例を示したが、走査中に別の物理量を同時に検出することで、例えば、近接場光学顕微鏡、静電容量顕微鏡等、他の走査型プローブ顕微鏡装置にも本発明は適用可能である。
また、特開平３−２８７００６号公報に見られるような、個々のプローブにアクチュエータを持ち、それぞれで、探針先端と試料との距離を調節する構成の装置にも応用可能であり、この場合、試料面垂直方向の局所的な測定レンジは個々のアクチュエータの動作レンジで制限を受けるため、探針先端の変位すなわち個々のアクチュエータの変位を検出し、これを用いて同様の制御を行うことにより、測定レンジを実効的に拡大することができる。
【００２６】
【発明の効果】
以上に説明したとおり、一体となって測定試料と相対動作する複数本の測定プローブを有するプローブアレイを用いた走査型プローブ顕微鏡において、各探針先端の位置を検出し、頂点すべてが前記検出した各探針先端の位置に含まれ、かつ各探針先端の位置すべてを内包するような凸多面体の各面から、最も離れた頂点までの距離を比較し、これが最小になるような面を探して基準面とし、この基準面と試料の測定面が平行になるように、プローブの角度を制御して面あわせを行い、探針先端の変位量が最小となるプローブの探針先端の変位量が一定となるようにプローブアレイと試料との間隔を制御しながら走査を行うことにより、探針の試料に対する最大押し付け力を小さくし、両者の損傷を小さくすることができる。
また、本発明によれば、許容される押し付け力の範囲、あるいはアクチュエータの動作範囲において、測定できる試料測定面垂直方向の測定レンジを実効的に拡大することができる。
さらに、本発明によれば、前記動作に加えて、前記各プローブの探針先端の前記基準面に対する相対的な位置関係を計算し、各プローブの探針先端の変位量、距離制御量から試料の表面形状を計算、合成することにより、例えば、簡便なプローブで、大面積の形状情報を安全かつ高速に取得可能な原子間力顕微鏡を構成することができる。
【図面の簡単な説明】
【図１】本発明の実施例における装置の構成を説明する図。
【図２】本発明の実施例における面あわせ方法を説明する図。
【図３】本発明の基準面決定方法の原理を説明する図。
【図４】本発明の基準面決定方法の原理を説明する図。
【図５】本発明の基準面決定方法の原理を説明する図。
【図６】本発明の実施例におけるプローブアレイの構成を説明する図。
【図７】本発明の実施例におけるプローブの構成を説明する図。
【図８】本発明の実施例における動作を説明する図。
【図９】本発明において解決すべき課題を説明する図。
【図１０】本発明の原理を説明する図。
【符号の説明】
１０１：弾性体
１０２：探針
１０３：プローブ
１０４：プローブアレイ
１０５：試料
１０６：プローブアレイ基準面
６０１：ピエゾ抵抗層
７０１：基準試料
１００１：情報合成回路
１００２：条件記憶回路
１００３：位置制御量演算回路
１００４：変位量検出回路
１００５：角度制御回路
１００６：位置制御回路
１００７：αβ駆動ステージ
１００８：ｘｙｚ駆動ステージ
１００９：角度制御量演算回路
１０１０：基準面演算回路[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an information detection apparatus and an information detection method having a scanning probe, and particularly aims to realize a technique suitable for a scanning probe microscope that simultaneously observes a measurement sample with a plurality of probes.
[0002]
[Prior art]
In recent years, the development of a scanning tunneling microscope (hereinafter abbreviated as STM) that can directly observe the electronic structure of a conductor [G. Binning et al. Phys. Rev. Lett, 49, 57 (1982)] Since scanning a probe with a sharp tip such as AFM (Atomic Force Microscope), SCM (Scanning Capacitance Microscope), NSOM (Near Field Optical Microscope) Microscope devices that obtain this distribution have been developed one after another. Currently, these groups of microscopes are collectively referred to as scanning probe microscopes (SPM), and are widely used as fine-structure observation means having atomic and molecular resolution.
[0003]
In the measurement using a scanning probe microscope, the time to scan the probe along the surface of the measurement sample has been an obstacle in terms of throughput when considering industrial applications. In addition, although the operation accuracy of the stage (actuator) for scanning affects the measurement accuracy, a wide scanning range and high accuracy are required from the technical and cost viewpoints to meet the demand for measuring a wider range of samples. It was an obstacle that it was difficult to develop a stage that achieved both.
[0004]
As an answer to these problems, there is a method of simultaneously observing a sample using a plurality of probes. For example, in Japanese Patent Laid-Open No. 3-287006, a plurality of AFM probes are used to measure a sample in order to measure the surface shape of the sample. There is a method for obtaining highly accurate and accurate sample shape information over a wide range by arranging on the same stage operating in a plane parallel to the plane and controlling the distance to the sample surface for each AFM probe. Proposed.
[0005]
However, when the distance control is performed independently for each probe as in the above-described method, it is necessary to have a control system and a drive system for each probe, and the apparatus configuration becomes very complicated. In particular, there is a problem that the drive system becomes expensive when integrated with the probe. In order to avoid this, if each probe can be replaced, a very high mounting accuracy is required at the time of replacement, resulting in an increase in the cost of the entire apparatus. In addition, since a large number of minute actuators (for example, piezoelectric elements) are used, characteristic variations among the actuators easily affect the measurement results.
[0006]
As a method for solving this problem, a plurality of probes having a probe supported by an elastic body are integrally scanned in parallel with the sample surface, and the sample is obtained while absorbing the irregularities on the sample surface by the deflection of the elastic body. A method of obtaining surface information is known. For example, in order to obtain shape information, the amount of deflection of the elastic body of each probe is measured, and in order to obtain conductive distribution information, a voltage is applied to the sample using a conductive probe. Apply and measure the current value.
Such a contact scanning method does not require feedback control of the position of each probe in the direction perpendicular to the sample surface when scanning while the tip of the probe is in contact with the sample. In particular, it is suitable for an apparatus having a plurality of probes.
[0007]
[Problems to be solved by the invention]
When a plurality of probes are used at the same time, it is usually difficult to imagine that the tips of the short needles of the probes are aligned in a complete plane due to errors that occur during manufacturing, and so-called variations in the heights of the tips of the probes occur.
FIG. 9 is a schematic diagram showing a case where all the probe tips of the probe array 104 having the above-described variation in the height of the probe tips are brought into contact with the smooth sample 105. For the sake of explanation, the variation in the height of the probe tip and the size of the probe are highlighted. At this time, the maximum deflection amount of the elastic body 101 is d in FIG.
[0008]
When the variation in the height of the tip of the probe is large, or when measuring a fragile sample such as an organic substance, the size of the maximum deflection becomes a problem. Since the elastic body 101 functions as a leaf spring, the greater the amount of deflection, the greater the pressing force acting between the tip of the probe 102 and the surface of the sample 105. In the worst case, the probe 102 or the surface of the sample 105 is damaged. Result. Further, from the viewpoint of wear of the probe 102, it is desirable that the pressing force is small.
[0009]
In addition, if the allowable pressing force is determined from the material constant, shape, measurement accuracy, etc. of the probe 102 and the sample 105, the allowable maximum deflection amount is also determined. Therefore, the measurement range in the height direction is limited by this. receive.
Further, in the configuration in which the actuator is arranged on each probe as described in the prior art, since there is an operating range of the actuator, measurement in the direction perpendicular to the surface of the sample 105 is similarly performed due to variations in the height of the probe tip. Range is limited.
[0010]
Therefore, in order to solve the above-described problems, the present invention measures a wide range of sample surfaces having a wider measurement range in a high height direction with high resolution and high speed while minimizing damage to the sample and the probe. Information detection apparatus and information detection method having a scanning probe capable of detecting a detection probe, and in particular, an information detection apparatus and information detection method suitable for a scanning probe microscope that simultaneously observes a measurement sample with a plurality of probes. is there.
[0011]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides an information detection apparatus and an information detection method having a scanning probe configured as described in (1) to (16) below.
(1) In an information detection apparatus having a scanning probe for integrally scanning a sample with a plurality of probes and detecting physical information on the sample,
A positional relationship detecting means for detecting a positional relationship between the tips of the probes of the plurality of probes;
Displacement detecting means for detecting the displacement of the tip of each probe of the plurality of probes;
Based on the positional relationship of each probe tip, a reference surface calculation means for calculating a reference surface such that the difference between the maximum value and the minimum value of the distances to the probe tips of all probes is reduced,
An angle detection means for detecting a relative angle between the reference surface and the sample;
Angle control means for changing the relative angle with the sample by integrating the plurality of measurement probes;
Position control means for controlling the relative position with the sample by integrating the plurality of measurement probes;
An information detection apparatus comprising: adjusting the angle of the probe to perform surface alignment between the reference surface and the sample, and performing relative scanning by controlling the position of the plurality of probes and the sample.
(2) The convexity such that the reference plane calculation means includes all of the apexes at the positions of the tips of the probes detected by the positional relationship detection means and includes all of the positions of the tips of the probes. The information detection apparatus according to (1), wherein the information detection device is means for comparing a distance from each surface of the polyhedron to the farthest vertex and detecting a reference surface having the minimum distance.
(3) When the angle control means refers to the relative angle between the reference surface and the sample detected by the angle detection means when aligning the reference surface and the sample, the reference surface and the sample The information detection apparatus according to (1) or (2), further including angle control amount calculation means for calculating an angle control amount so that the two are parallel to each other.
(4) The position control means includes position control amount calculation means for calculating a position control amount with a constant value of the displacement amount of the probe that minimizes the displacement amount of the probe tip. The information detection apparatus according to any one of 1) to (3).
(5) The information detection apparatus according to any one of (1) to (4), wherein the positional relationship detection unit includes a plurality of displacement amount detection units.
(6) The information detection apparatus according to any one of (1) to (5), wherein the angle detection unit includes a plurality of the displacement amount detection units.
(7) The displacement amount detection unit is a deflection amount detection unit that detects a deflection amount of an elastic body that supports the probe of the probe. The information detection apparatus described.
(8) It has information combining means for combining information on the surface shape of the sample from the displacement amount by the displacement amount detection means, the positional relationship by the positional relationship detection means, and the position control amount by the position control means. The information detection apparatus according to any one of (1) to (7), characterized in that:
(9) In an information detection method having a scanning probe that relatively scans a sample with a plurality of probes integrated to detect information on the sample,
Detecting the positional relationship of the probe tips of the plurality of probes,
Based on the positional relationship of each probe tip, calculate a reference plane that reduces the difference between the maximum value and the minimum value of the distance to the probe tip of all probes,
Detecting a relative angle between the reference surface and the sample;
The plurality of probes are integrated, the relative angle with the sample is changed, the reference surface and the sample are aligned, and the plurality of probes and the sample are controlled to perform relative scanning. Information detection method.
(10) The calculation of the reference plane includes all of the apexes at the positions of the tips of the probes detected by the positional relationship detection, and includes all of the positions of the tips of the probes. The information detection method according to (9), wherein the information detection method is performed by comparing a distance from each surface of the convex polyhedron to the farthest vertex and detecting a reference surface having the minimum distance.
(11) The angle control refers to the relative angle between the reference surface and the sample when the surfaces of the reference surface and the sample are aligned, so that the reference surface and the sample are parallel to each other. The information detection method according to (9) or (10), wherein the information detection method is performed by calculating an amount.
(12) Any one of the above (9) to (11), wherein the position control is performed so that the displacement amount of the probe that minimizes the displacement amount of the probe tip is a constant value during the measurement scan. Information detection method described in 1.
(13) The information detection method according to any one of (9) to (12), wherein the detection of the positional relationship is performed by detecting a displacement amount of probe tips of the plurality of probes. .
(14) The information detection method according to any one of (9) to (13), wherein the relative angle is detected by detecting a displacement amount of probe tips of the plurality of probes. .
(15) The information detection method according to any one of (9) to (14), wherein the displacement amount is detected by detecting a deflection amount of an elastic body supporting the probe of the probe.
(16) The information of the surface shape of the sample is synthesized from the detected displacement amount, the positional relationship of the probe tip of the probe, and the position control amount. ) The information detection method according to any of the above.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
With the above configuration, in the scanning probe microscope using the probe array having a plurality of measurement probes that operate integrally with the measurement sample, the position of each probe tip is detected, and all the vertices are detected by the above Compare the distance from each surface of the convex polyhedron that is included in the position of the probe tip and contains all the positions of each probe tip to the farthest vertex, and look for the surface that minimizes this The reference plane is adjusted so that the reference plane and the measurement surface of the sample are parallel, and the angle of the probe is adjusted so that the amount of displacement of the probe tip is minimized. By performing scanning while controlling the distance between the probe array and the sample so as to be constant, the maximum pressing force of the probe against the sample can be reduced, and damage to both can be reduced.
Further, according to the above configuration, the measurement range in the direction perpendicular to the sample measurement surface can be effectively expanded within the allowable pressing force range or actuator operating range.
Further, in addition to the above operation, the relative positional relationship of the probe tip of each probe with respect to the reference plane is calculated, and the surface shape of the sample is calculated from the displacement amount and distance control amount of the probe tip of each probe. By synthesizing, for example, an atomic force microscope that can acquire shape information of a large area safely and at high speed can be configured with a simple probe.
[0013]
【Example】
Embodiments of the present invention will be described below with reference to the drawings.
First, prior to the description of the embodiments, the principle of the present invention will be described.
FIG. 10 is a diagram for explaining the principle of the present invention. After changing the angle between the probe array 104 and the sample 105 by θ from the state shown in FIG. 9, all the probes 102 are attached to the sample 105. It is a schematic diagram of a mode that both approached so that it might contact. For the sake of explanation, the variation in the height of the probe tip and the size of the probe are highlighted. At this time, the maximum amount of displacement at the tip of the probe 102 is d ′ in FIG. 10, and it can be seen that d ′ <d in this example holds with respect to d in FIG. Further, in general, in actual measurement, scanning is performed with a predetermined push amount d ₀ added thereto. Therefore, the displacement amount at the tip of the probe 102 with the smallest displacement amount is d ₀ , and the displacement amount at the tip of the probe 102 with the largest displacement amount is d ₀ + d ′.
[0014]
Thus, θ that gives the relationship d ′ <d generally exists, and the value of d ′ can be minimized by selecting θ. When viewed from the probe array 104 side, the orientation of the surface showing such a relationship is uniquely determined. Therefore, as shown in FIG. 2, a probe array reference surface 106 is selected in advance for each probe array 104, and this is used at the time of measurement. If the angle between the two is adjusted, that is, the surfaces are aligned so that the sample 105 is parallel to the sample 105, the maximum displacement of the tip of the probe 102 included in the probe array 104 when the sample 105 is measured, that is, the elastic body 101 The maximum amount of deflection can be minimized. Since the elastic body 101 acts as a leaf spring in structure, the maximum pressing force of the probe 102 against the sample 105 can be minimized, and the maximum amount of damage to both can be minimized. Alternatively, the measurement range in the direction perpendicular to the sample measurement surface can be effectively maximized within the allowable pressing force range.
[0015]
Next, how to select the probe array reference surface 106 will be described. Consider a probe array 104 composed of n probes 103 that are arranged in a straight line.
Here, for the sake of explanation, n = 8, and the actual tip position of the probe 102 of each probe is set as P1 to P8 as shown in FIG.
As shown in FIG. 4, two parallel straight lines l1 and l2 that pass through at least one point from P1 to P8 and can sandwich all eight points are considered. When the surface of the sample 105 is parallel to l1 and l2, the difference between the maximum value and the minimum value of the displacement amount at the tip of each probe 102 of the probe array 104 is the distance between l1 and l2, indicated by d in FIG. .
Here, as described above, if the displacement amount at the tip of the probe 102 with the minimum displacement amount is constant at d ₀ , the displacement amount at the tip of the probe 102 with the maximum displacement amount is d ₀ + d, and the probe with the maximum displacement amount is d ₀ + d. The problem of obtaining the probe array reference surface 106 that minimizes the amount of displacement of the tip of 102 can be considered by replacing it with the problem of obtaining l1 and l2 that minimize d in FIG.
[0016]
As shown in FIG. 4, it is assumed that l1 and l2 pass through P3 and P2, respectively. Considering a straight line connecting P3 and P2, and assuming that the length is L in FIG. 4 and the acute angle side of the angle formed by l1 is θ in FIG. 4, the relationship d = Lsin θ holds. Since L is constant, d is minimum when θ is minimum. As described above, since all points must be between l1 and l2, θ is gradually decreased, and when either l1 or l2 passes through one point other than P3 and P2. θ is minimized. In the example of FIG. 4, when l2 passes P5, θ is minimized, and such l1, l2, and d are shown in FIG. 5 as l1 ′, l2 ′, and d ′, respectively.
[0017]
From the above, one of the two straight lines l1 ′ and l2 ′ always passes through two points. Furthermore, considering that all points must be between l1 'and l2', and considering combinations other than P3 and P2, the points through which l1 'and l2' pass, and l1 'and l2' The set that passes through two points is a convex polygon in which all the vertices are configured by any one of P1 to P8 and include all the points inside. By comparing the distance from each side of the polygon to the farthest vertex, searching for the side that minimizes this, and using it as the probe array reference plane 106 in FIG. 2, the probes in the probe array 104 The maximum amount of displacement at the tip of 102 can be minimized, that is, the maximum amount of deflection of the elastic body 101 can be minimized.
[0018]
For the sake of explanation, the probe array 104 created so that the position of the tip of the probe 102 is on the same straight line has been discussed. For example, as shown in FIG. 6, the position of the tip of the probe 102 is on the same plane. The probe array 104 created in this way can be discussed in exactly the same way by defining a convex polygon as a convex polyhedron, a side as a surface, and an angle as a solid angle. In this case, the probe array 104 is farthest from each surface of the convex polyhedron. It is sufficient to compare the distances to the vertices, find a surface that minimizes the distance, and use it as the probe array reference surface 106 in FIG.
[0019]
Next, an example in which the above is applied to an actual apparatus will be described. As shown in FIG. 1, a probe array 104 including a plurality of probes 103 is arranged so as to face the surface of the sample 105. The probe array 104 is attached to an αβ drive stage 1007, and the sample 105 is attached to an xyz drive stage 1008.
The probe array 104 is integrally formed as shown in FIG. 6 by a semiconductor process. The probe 102 of each probe 103 is supported by an elastic body 101 made of Si. As shown in FIG. 7, a piezoresistive layer 601 is formed on the surface of the elastic body 101 as shown in FIG. 7, and the resistance value changes in accordance with the stress generated by the deformation of the elastic body.
[0020]
The condition storage circuit 1002 stores the positional relationship in the alignment direction of the tips of the probes 102 in the probe array 104. This positional relationship is previously measured for the probe array 104 using an SEM (scanning electron microscope).
The displacement amount detection circuit 1004 detects a displacement amount of the tip of the probe 102 by applying a bias voltage to the piezoresistive layer 601 of the elastic body 101 of the probe array 104 and detecting a change in resistance value as a current value.
The angle control circuit 1005 drives the αβ drive stage 1007 to change the relative angle between the sample 105 and the probe array 104. The position control circuit 1006 drives the xyz drive stage 1008 to change the relative position between the sample 105 and the probe array 104.
[0021]
First, a reference sample 701 is attached instead of the sample 105 of the apparatus shown in FIG. The reference sample 701 is a Si substrate, and is finished by polishing so as to have higher flatness and surface roughness accuracy than required accuracy at the time of sample measurement. As shown in FIG. 8, the relative positions of the probe array 104 and the reference sample 701 are brought closer to each other, and the displacement detection circuit 1004 monitors the displacement of the tip of the probe 102 of each probe 103, and all the probes 103 are displaced. Then, the reference plane calculation circuit 1010 calculates the probe array reference plane 106 from the displacement amounts of the tips of the probes 102 of all the probes 103 by the above method and stores it in the condition storage circuit 1002. Further, the position of the tip of the probe 102 of each probe 103 with respect to the probe array reference surface 106 is calculated and stored in the condition storage circuit 1002.
[0022]
Next, the sample 105 to be measured is attached instead of the reference sample 701. Similarly, the probe array 104 and the sample 105 are brought close to each other, the displacement detection circuit 1004 monitors the displacement of the tip of the probe 102 of each probe 103, and when the number of probes 103 in which displacement occurs becomes three, both of them are detected. , The angle control amount calculation circuit 1009 detects the displacement amount of the three probes 103 and the probe array reference surface 106 at the tip of the probe 102 of the three probes 103 stored in the condition storage circuit 1002. , The angle control amount is calculated so that the surface of the sample 105 and the probe array reference plane 106 are parallel to each other, and the calculated value is sent to the angle control circuit 1005 after the probe array 104 and the sample 105 are separated. Send.
[0023]
Next, the tips of all the probes 102 of the probe array 104 are brought into contact with the surface of the sample 105, and the sample 105 is scanned. During scanning, the position control amount calculation circuit 1003 calculates the control amount so as to keep the displacement amount of the probe 103 having the smallest displacement amount at a predetermined constant value, and sends it to the position control circuit 1006. Further, the information synthesis circuit 1001 obtains the shape information on the surface of the sample 105 from the displacement amount of all the probes 103, the positional relationship between the tips of the probes 102 stored in the condition storage circuit 1002, and the control amount calculated by the position control amount 1003. Calculate and synthesize the distribution.
In this embodiment, the resistance change of the piezoresistive layer 601 due to the deflection of the elastic body 101 is used to detect the displacement amount of the tip of the probe 102. Of course, this may be another displacement detecting means such as an optical lever. Absent.
[0024]
In this embodiment, the relative angle between the surface of the sample 105 and the probe array reference surface 106 is detected by using the contact between the probe array 104 and the sample 105. Of course, this is a capacitance sensor, Other detection means such as a laser displacement sensor may be used.
[0025]
In this embodiment, the displacement of the probe tip of the probe 103 is used when measuring the position of the tip of each probe. However, the measurement is performed by another measuring means such as an SEM (scanning electron microscope). It doesn't matter.
In the present embodiment, an example of an apparatus configuration as an atomic force microscope that measures the surface shape of the sample 105 is shown. However, by simultaneously detecting different physical quantities during scanning, for example, a near-field optical microscope, The present invention can also be applied to other scanning probe microscope apparatuses such as a capacitance microscope.
Further, as seen in Japanese Patent Laid-Open No. 3-287006, each probe has an actuator and can be applied to an apparatus configured to adjust the distance between the probe tip and the sample. In this case, Since the local measurement range in the vertical direction of the sample surface is limited by the operation range of each actuator, the displacement of the tip of the probe, that is, the displacement of each actuator is detected and the same control is performed using this. The measurement range can be effectively expanded.
[0026]
【The invention's effect】
As described above, in the scanning probe microscope using a probe array having a plurality of measurement probes that move together relative to the measurement sample, the positions of the tips of the probes are detected, and all the vertices are detected. Compare the distance from each surface of the convex polyhedron that is included in the position of each probe tip and contains all the positions of each probe tip to the farthest vertex, and find the surface that minimizes this The probe tip is adjusted so that the reference surface is parallel to the measurement surface of the sample so that the reference surface and the sample measurement surface are parallel. By performing scanning while controlling the distance between the probe array and the sample so as to be constant, the maximum pressing force of the probe against the sample can be reduced, and damage to both can be reduced.
Further, according to the present invention, the measurement range in the direction perpendicular to the sample measurement surface can be effectively expanded within the allowable pressing force range or the actuator operation range.
Further, according to the present invention, in addition to the above operation, the relative positional relationship of the probe tip of each probe with respect to the reference plane is calculated, and the sample is calculated from the displacement amount and distance control amount of the probe tip of each probe. By calculating and synthesizing the surface shape, it is possible to construct an atomic force microscope capable of acquiring shape information of a large area safely and at high speed with a simple probe, for example.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating a configuration of an apparatus according to an embodiment of the present invention.
FIG. 2 is a diagram for explaining a surface matching method according to an embodiment of the present invention.
FIG. 3 is a diagram for explaining the principle of a reference plane determination method according to the present invention.
FIG. 4 is a diagram for explaining the principle of a reference plane determination method according to the present invention.
FIG. 5 is a diagram for explaining the principle of a reference plane determination method according to the present invention.
FIG. 6 is a diagram illustrating the configuration of a probe array in an embodiment of the present invention.
FIG. 7 is a diagram illustrating a configuration of a probe according to an embodiment of the present invention.
FIG. 8 is a diagram for explaining the operation in the embodiment of the present invention.
FIG. 9 is a diagram illustrating a problem to be solved in the present invention.
FIG. 10 is a diagram illustrating the principle of the present invention.
[Explanation of symbols]
101: elastic body 102: probe 103: probe 104: probe array 105: sample 106: probe array reference plane 601: piezoresistive layer 701: reference sample 1001: information synthesis circuit 1002: condition storage circuit 1003: position control amount calculation circuit 1004: Displacement detection circuit 1005: Angle control circuit 1006: Position control circuit 1007: αβ drive stage 1008: xyz drive stage 1009: Angle control amount calculation circuit 1010: Reference plane calculation circuit

Claims

In an information detection apparatus having a scanning probe that integrally scans a plurality of probes relative to a sample and detects physical information on the sample,
A positional relationship detecting means for detecting a positional relationship between the tips of the probes of the plurality of probes;
Displacement detecting means for detecting the displacement of the tip of each probe of the plurality of probes;
Based on the positional relationship of each probe tip, a reference surface calculation means for calculating a reference surface such that the difference between the maximum value and the minimum value of the distances to the probe tips of all probes is reduced,
An angle detection means for detecting a relative angle between the reference surface and the sample;
Angle control means for changing the relative angle with the sample by integrating the plurality of measurement probes;
Position control means for controlling the relative position with the sample by integrating the plurality of measurement probes;
An information detection apparatus comprising: adjusting the angle of the probe to perform surface alignment between the reference surface and the sample, and performing relative scanning by controlling the position of the plurality of probes and the sample.

Each of the convex polyhedrons in which the reference plane calculation means includes all of the apexes at the positions of the tips of the probes detected by the positional relationship detection means, and includes all of the positions of the tips of the probes. The information detection apparatus according to claim 1, wherein the information detection apparatus is a unit that compares a distance from a surface to a farthest vertex and detects a reference surface having the minimum distance.

When the angle control means refers to the relative angle between the reference surface and the sample detected by the angle detection means when aligning the reference surface and the sample, the reference surface and the sample are parallel to each other. The information detection apparatus according to claim 1, further comprising an angle control amount calculation unit that calculates the angle control amount.

4. The position control means includes position control amount calculation means for calculating a position control amount with a constant value of the displacement amount of the probe that minimizes the displacement amount of the probe tip. The information detection apparatus according to any one of the above.

The information detection apparatus according to claim 1, wherein the positional relationship detection unit includes a plurality of displacement amount detection units.

The information detection apparatus according to claim 1, wherein the angle detection unit includes a plurality of displacement amount detection units.

The information detection according to any one of claims 1 to 6, wherein the displacement amount detection means is a deflection amount detection means for detecting a deflection amount of an elastic body that supports the probe of the probe. apparatus.

It has an information synthesizing unit that synthesizes information on the surface shape of the sample from the displacement amount by the displacement amount detection unit, the positional relationship by the positional relationship detection unit, and the position control amount by the position control unit. The information detection apparatus according to any one of claims 1 to 7.

In an information detection method having a scanning probe that relatively scans a sample with a plurality of probes as one body and detects information on the sample,
Detecting the positional relationship of the probe tips of the plurality of probes,
Based on the positional relationship of each probe tip, calculate a reference plane that reduces the difference between the maximum value and the minimum value of the distance to the probe tip of all probes,
Detecting a relative angle between the reference surface and the sample;
The plurality of probes are integrated, the relative angle with the sample is changed, the reference surface and the sample are aligned, and the plurality of probes and the sample are controlled to perform relative scanning. Information detection method.

The calculation of the reference plane is a convex polyhedron that includes all of the apexes at the positions of the tips of the probes detected by the positional relationship detection and includes all of the positions of the tips of the probes. The information detection method according to claim 9, wherein the information detection method is performed by comparing a distance from each surface to the farthest vertex and detecting a reference surface having the minimum distance.

The angle control calculates an angle control amount so that the reference surface and the sample are parallel by referring to the relative angle between the reference surface and the sample when the reference surface and the sample are aligned. The information detection method according to claim 9, wherein the information detection method is performed.

The information according to any one of claims 9 to 11, wherein position control is performed during measurement scanning so that the displacement amount of the probe that minimizes the displacement amount of the probe tip is a constant value. Detection method.

The information detection method according to claim 9, wherein the positional relationship is detected by detecting a displacement amount of probe tips of the plurality of probes.

The information detection method according to claim 9, wherein the detection of the relative angle is performed by detecting a displacement amount of probe tips of the plurality of probes.

The information detection method according to claim 9, wherein the displacement amount is detected by detecting a deflection amount of an elastic body that supports the probe of the probe.

16. The surface shape information of the sample is synthesized from the detected displacement amount, the positional relationship of the probe tip of the probe, and the position control amount. Information detection method described in 1.