CN201047823Y - Sample nondestructive approach device facing to nano observation and operation - Google Patents
Sample nondestructive approach device facing to nano observation and operation Download PDFInfo
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- CN201047823Y CN201047823Y CNU2006201685295U CN200620168529U CN201047823Y CN 201047823 Y CN201047823 Y CN 201047823Y CN U2006201685295 U CNU2006201685295 U CN U2006201685295U CN 200620168529 U CN200620168529 U CN 200620168529U CN 201047823 Y CN201047823 Y CN 201047823Y
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Abstract
The utility model relates to a sample undamaged approach device for nanometer observation and operation, which includes an initial setting motion platform that is connected with one-dimensional motion platform via a stepping motor; a precision motion platform that is formed by a PZT driver and positioned in the one-dimensional motion platform; a feedback control unit, the probe which is above the sample is positioned on the laser path of rays and the generated laser rays to a photoelectric sensor; a drive control that connects with the photoelectric sensor and that is communicated with the stepping motor and the PZT driver; a photoelectric limit switch which is fixed on the pedestal lateral wall and on the one-way dimensional motion platform; wherein, the drive control takes single chip as the core, and exchanges the information of system status and control parameter with an upper machine. Through the control sample, the probe receives the initial setting and nanometer precision motion. After checking reflection laser facula position variation signal control step, the feedback control is carried by photoelectric examination information generated by the atomic force when the tested sample approaches the probe; thereby realizing the aim of the undamaged sample approach probe.
Description
Technical field
The utility model relates to and adopts atomic force microscope (AFM) probe to carry out a kind of sample in nano collimation and the operating process to can't harm and approach device.
Background technology
Nano collimation and operative technique are in nano material observation, nano-device manufacturing, nano science research and nanoprocessing have a very important role in using, and adopt the nano collimation of AFM probe patterns and the important directions that operation has become present nano science research.The AFM probe patterns is carried out nano collimation and principle of operation is, control fine cantilever beam structure probe sample surfaces is produced contact or contactless state (nanoscale), utilize photoelectric sense technology to detect the stress deformation of probe under this state, obtain the operating physical force information of the shape characteristic or the probe of sample, to reach observation of nanoscale pattern and operation to sample.This need apply driving voltage by the kinematic system that PZT (piezoelectric can produce the micromotion of hundreds of micron stroke) is constituted, and control PZT drives observation and the operating distance that sample approaches probe, and this distance generally need be controlled at a few to tens of nanometers.Whether usually the control method of approaching that adopts is that control step driven by motor sample stage is approached, and whether the position signalling that detects on the photoelectrical position sensor via the laser facula place of probe reflection suddenly change, come test sample to reach with probe with this and contact configuration state.Because probe (usually by made such as antimony platinum, chromium gold, silicon nitrides) typically has a diameter from several to tens nanometers, there are very high precise and stable control and response speed ability in this direct mode requirement system, the realization difficulty is higher, approach the collision that also forms easily in the contact process between sample and the probe, this collision may cause that promptly probe damages, also easily to soft sample for example biological sample such as DNA produce injury.Typical silicon materials probe is referring to Fig. 1-1 (silicon probe), and Fig. 1-2 (tip portion).
The utility model content
For the sample that solves based on the AFM probe patterns approaches the rapid wear problem, the utility model proposes that a kind of sample is harmless to approach control device, can realize that by the utility model the not damaged of sample and probe approaches.
To achieve these goals, technical solutions of the utility model comprise:
The initial adjustment motion platform is made up of stepper motor, reducing gear, motion in one dimension platform, and wherein stepper motor is installed on the base, and output shaft links to each other with reducing gear; The terminal motion in one dimension platform that connects of reducing gear;
Precision movement platform is made of the PZT driver, and the bottom is fixedly mounted on initial adjustment motion platform free end, and promptly an end is fixed in the motion in one dimension platform, and the top is provided with the sample stage that is used for placing sample;
Feedback control unit is made of laser instrument, photoelectric sensor, probe and driving governor, and probe is positioned at sample top, on laser optical path, and the reflector laser of its generation is to photoelectric sensor; The installation site of photoelectric sensor is on the light path position that can receive by the probe reflection laser beam;
Driving governor, respectively be installed in substructure member on photoelectric sensor be electrically connected; And with stepper motor and the communication of PZT driver, by output encoder/voltage signal control step motor and PZT driver;
Photoelectric limit switch is fixed on base side wall and the motion in one dimension platform, and its measuring point is positioned at slide block one side;
Driving governor is a core with the single-chip microcomputer, has serial communication and pre-programmed ability, with host computer communication switch system state and control parameter information;
Described probe constitutes and can make time spent generation deformed configurations in atomic force for installing a needle point on the at one end fixing semi-girder tip additional; Described motion in one dimension platform comprises leading screw, and slide block and feed rod, slide block are installed on the leading screw, is located on the slide block side by side with feed rod; Described precision movement platform adopts one dimension, two dimension or three-dimensional type.
The utility model has following advantage:
1. the utility model adopts the spacing technology of optoelectronic switch, finishes the relative positioning between sample and the operation probe, can finish once protection to sample.
2. because the utility model adopts the PZT driver to realize the nanoscale displacement in the continuous change condition of driving voltage, then can avoid colliding with being used of stepper motor and approach probe or the sample damage that is caused.
Description of drawings
Fig. 1 forces the into implement device structure diagram of method for the utility model.
Fig. 2 is the utility model approach method process flow diagram.
Fig. 3 is used for the implement device structural representation of the nondestructive approach method of nano collimation operation A FM device.
Fig. 4 is the AFM schematic diagram.
Embodiment
Below in conjunction with embodiment and accompanying drawing the utility model is described in further detail.
Shown in Fig. 1,3, the utility model device comprises:
The initial adjustment motion platform is used for the micron order adjustment, comprises stepper motor 1, reducing gear 2, motion in one dimension platform, and wherein stepper motor 1 is installed on the fixing base, and output shaft links to each other with reducing gear 2; The terminal motion in one dimension platform that connects of reducing gear; The motion in one dimension platform comprises leading screw 3, and slide block 4 and feed rod 5, slide block 4 are installed on the leading screw 3, is located at side by side on the slide block 4 with feed rod 5;
Precision movement platform (nanoscale adjustment; Can adopt one dimension, two dimension or three-dimensional type, present embodiment adopts three-dimensional type), constitute by PZT driver 12, the bottom is fixedly mounted on initial adjustment motion platform free end, and promptly an end is fixed in the slide block 4, and the top is provided with the sample stage 11 that is used for placing sample 10;
Feedback control unit is made of laser instrument 7, photoelectric sensor 8, probe 9 and driving governor, and probe 9 is positioned at sample 10 tops, on laser optical path, and the reflector laser of its generation is to photoelectric sensor 8; The installation site of photoelectric sensor 8 is on the position light path that can receive by probe 9 flares;
Driving governor 14, respectively be installed in substructure member on photoelectric sensor 8 be electrically connected; And can communicate by letter with PZT driver 12 with stepper motor 1, by output encoder/voltage signal control step motor 1 and PZT driver 12;
Wherein driving governor 14 is a core with the single-chip microcomputer, has serial communication and pre-programmed ability, can with host computer communication switch system state and control parameter information, and can carry out data, state (as reference quantity such as whether putting in place) and graphic presentation by host computer.
Its middle probe is: at one end most advanced and sophisticated processing one needle point (Tip) of going up of Gu Ding semi-girder (Cantilever) freedom constitutes and can make time spent generation deformed configurations (existing product) in atomic force.When beam of laser (Laser Beam) but when being radiated on this semi-girder this laser beam design reflectivity on photoelectric sensor (Photodetector).When needle point and sample surfaces distance is very near (＜several-tens nanometers), the microcosmic acting force that needle point is subjected to will cause the semi-girder distortion, thereby causes that laser penetrates the variation of facula position on photoelectric sensor, obtains semi-girder stress deformation signal.Photoelectric sensor facula position variable signal has two kinds of interpretive modes: the one, the sample topography of nanoscale is described, and the 2nd, the signal interpretation of probe stress and deformation is become the size and Orientation of operating physical force, the motion of probe and direction during in order to control operation.(wherein: 6 is laser, and 91 is probe tip, and 92 is that (probe tip is installed in this semi-girder one end to semi-girder as shown in Figure 4 with principle of operation in observation, the other end is to be fixed on the supporting mechanism), 16 is the probe scanning path, 17 needle points for amplification, 18 sample surfaces for amplification).
Referring to Fig. 2, the utility model nondestructive approach method is as follows:
Carry out micron-sized initial adjustment campaign and nano level precise motion by the control sample with respect to probe, the FEEDBACK CONTROL step of the position variation signal of reflected laser light spot after testing, approach probe by test sample and produce atomic force and make the Photoelectric Detection information that the time spent produces and carry out FEEDBACK CONTROL, reach the harmless purpose of approaching probe of control sample;
Described FEEDBACK CONTROL step refers to: cantilever beam structure can produce the distortion that is caused by atomic force effect between sample and needle point, and then cause that reflector laser penetrates the variation of facula position on photoelectric sensor, this facula position change reflected probe tip and sample interval from the variation of atomic interaction power; Institute thinks realization based on atomic nano collimation and operation, sample need be approached the very near distance of distance probes last (nanoscale), and keeps or change this distance by FEEDBACK CONTROL.
Specifically:
When initially approaching, stepper motor 1 drives the initial adjustment motion platform and approaches motion to probe 9 directions, finish the initial alignment of sample (the relative probes distance of sample 11 is controlled at 1mm ± 0.01mm by being installed in initial adjustment motion platform (being slide block) upper side or top limiting photoelectric switch 13, can determine by the installation site and the precision movement platform of optoelectronic switch 13), and start laser 7 and photoelectrical position sensor 8.
Approach the direction driving voltage by progressively adding on 14 pairs of PZT drivers 12 of driving governor, detect on the photoelectrical position sensor 8 by probe 9 laser light reflected facula position variable signals, if light spot position signal produces sudden change, interpret sample 11 contact probe then, finish approximate procedure, the output mutation signal stops to approach action.
When if the driving voltage of PZT driver 12 is added to maximum rating, photoelectric sensor 8 does not still have the output mutation signal, then cancels the driving voltage that approaches of PZT driver 12.
Claims (4)
1. the sample towards nano collimation and operation can't harm and approaches device, it is characterized in that comprising:
The initial adjustment motion platform is made up of stepper motor (1), reducing gear (2), motion in one dimension platform, and wherein stepper motor (1) is installed on the base, and output shaft links to each other with reducing gear (2); The terminal motion in one dimension platform that connects of reducing gear (2);
Precision movement platform is made of PZT driver (12), and the bottom is fixedly mounted on initial adjustment motion platform free end, and promptly an end is fixed in the motion in one dimension platform, and the top is provided with the sample stage (11) that is used for placing sample (10);
Feedback control unit is made of laser instrument (7), photoelectric sensor (8), probe (9) and driving governor, and probe (9) is positioned at sample (10) top, on laser optical path, and the reflector laser of its generation is to photoelectric sensor (8); The installation site of photoelectric sensor (8) is on the light path position that can receive by probe (9) reflection lasering beam;
Driving governor (14), respectively be installed in substructure member on photoelectric sensor (8) be electrically connected; And with stepper motor (1) and PZT driver (12) communication, by output encoder/voltage signal control step motor (1) and PZT driver (12);
Photoelectric limit switch (13) is fixed on base side wall and the motion in one dimension platform, and its measuring point is positioned at slide block (4) one sides;
Driving governor (14) is a core with the single-chip microcomputer, has serial communication and pre-programmed ability, with host computer communication switch system state and control parameter information.
2. by the described device of claim 1, it is characterized in that: described probe is: at one end install a needle point on the Gu Ding semi-girder tip additional and constitute and can make time spent generation deformed configurations in atomic force.
3. by the described implement device of claim 1, it is characterized in that: described motion in one dimension platform, comprise leading screw (3), slide block (4) and feed rod (5), slide block (4) are installed on the leading screw (3), are located at side by side on the slide block (4) with feed rod (5).
4. by the described implement device of claim 1, it is characterized in that: described precision movement platform adopts one dimension, two dimension or three-dimensional type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006201685295U CN201047823Y (en) | 2006-12-22 | 2006-12-22 | Sample nondestructive approach device facing to nano observation and operation |
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| Application Number | Priority Date | Filing Date | Title |
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| CNU2006201685295U CN201047823Y (en) | 2006-12-22 | 2006-12-22 | Sample nondestructive approach device facing to nano observation and operation |
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| CN201047823Y true CN201047823Y (en) | 2008-04-16 |
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| CNU2006201685295U Expired - Fee Related CN201047823Y (en) | 2006-12-22 | 2006-12-22 | Sample nondestructive approach device facing to nano observation and operation |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111679100A (en) * | 2020-07-16 | 2020-09-18 | 上海华力微电子有限公司 | Nano probe testing method |
| CN111879451A (en) * | 2020-07-30 | 2020-11-03 | 合肥工业大学 | Microcosmic acting force measuring system and method for judging contact zero point and surface property of microcosmic acting force measuring system |
| CN113406165A (en) * | 2021-06-17 | 2021-09-17 | 哈尔滨工业大学 | Electrochemical detection device control system and detection method based on vibration mode |
| CN113759770A (en) * | 2021-08-10 | 2021-12-07 | 华中科技大学 | Two-dimensional nanometer positioning platform control system |
-
2006
- 2006-12-22 CN CNU2006201685295U patent/CN201047823Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111679100A (en) * | 2020-07-16 | 2020-09-18 | 上海华力微电子有限公司 | Nano probe testing method |
| CN111879451A (en) * | 2020-07-30 | 2020-11-03 | 合肥工业大学 | Microcosmic acting force measuring system and method for judging contact zero point and surface property of microcosmic acting force measuring system |
| CN111879451B (en) * | 2020-07-30 | 2021-10-15 | 合肥工业大学 | Microcosmic acting force measuring system and method for judging contact zero point and surface property of microcosmic acting force measuring system |
| CN113406165A (en) * | 2021-06-17 | 2021-09-17 | 哈尔滨工业大学 | Electrochemical detection device control system and detection method based on vibration mode |
| CN113406165B (en) * | 2021-06-17 | 2023-08-29 | 哈尔滨工业大学 | Electrochemical detection device control system and detection method based on vibration mode |
| CN113759770A (en) * | 2021-08-10 | 2021-12-07 | 华中科技大学 | Two-dimensional nanometer positioning platform control system |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080416 Termination date: 20111222 |