CN108557756B - A kind of micromachined knife rest with force servo function - Google Patents

A kind of micromachined knife rest with force servo function Download PDF

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Publication number
CN108557756B
CN108557756B CN201810069712.7A CN201810069712A CN108557756B CN 108557756 B CN108557756 B CN 108557756B CN 201810069712 A CN201810069712 A CN 201810069712A CN 108557756 B CN108557756 B CN 108557756B
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Prior art keywords
flexible hinge
displacement
displacement sensor
knife rest
probe
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CN108557756A (en
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闫永达
蔡建雄
张景然
王豫章
耿延泉
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0004—Apparatus specially adapted for the manufacture or treatment of nanostructural devices or systems or methods for manufacturing the same
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0085—Testing nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

The invention discloses a kind of micro Process knife rest with force servo function, the micro Process knife rest includes PZT actuator, the first displacement sensor, second displacement sensor, screw rod, nut, rotating ring, flexible hinge, probe, guiding trestle and XY displacement platform.The present invention utilizes flexible hinge, will switch to the measurement to flexible hinge normal deformation amount to the measurement of normal force, simpler to the measurement of displacement, more accurately；Using the symmetrical flexible hinge of annular center, it can be effective against the deformation of lateral force generation, probe is made as to keep vertical as possible with X/Y plane, reduce deflection angle；The angle that the adjustable probe of screw is marked closely using rotating ring cooperation, realizes the micromachined of different angle；It can change maximum load by replacing flexible hinge, to be suitable for processing the workpiece of different hardness；It is convenient for measuring by the spacing of feed screw nut's adjustable second displacement sensor and flexible hinge convenient for determining initial spacing.

Description

A kind of micromachined knife rest with force servo function
Technical field
The present invention relates to a kind of micromachined knife rest more particularly to a kind of micromachined knives with force servo function Frame.
Background technique
With the development of nanotechnology, especially atomic force microscope (Atomic Force Microscope, AFM) Invention, it has been found that machining process still has immeasurable potentiality in the processing of nanostructure.Nano-machine adds Work is the extension of tradition machinery processing, and the probe of micro-or nano size is instead of traditional mechanical cutting tool, benefit in this method With the interaction force between needle point and sample, micro-nano knot is generated in sample surfaces scraping, impression, lifting or pushing material Structure.Nano-machine processing method using the processing method of force servo control has the advantages that protrusion: can be realized more accurate " to knife "；Workpiece does not need to carry out stringent leveling；There is " following " effect to workpiece surface, particularly suitable in curved surface and Nanostructure is processed on inclined-plane.
Currently, atomic force microscope (AFM) is common nano-machine process equipment, its main feature is that machining accuracy is high, adds Work and detection are integrated；Nano dot, nano wire/groove etc. can be processed in surfaces of various materials such as metal, semiconductor, polymer Structure.But AFM is applied to the effect of workpiece surface by needle point as a kind of system for measuring in atomic level and evaluating surface Power is very small, so that working ability and workpiece material are restricted, and processing efficiency is lower, range is smaller, instrument cost is high, Also far from the process requirements for meeting current micro-nano structure.
Summary of the invention
In order to solve above-mentioned deficiency, the present invention provides it is a kind of with top load, advantage of low cost have force servo function The micro Process knife rest of energy.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of micro Process knife rest with force servo function, including PZT actuator, the first displacement sensor, second displacement Sensor, screw rod, nut, rotating ring, flexible hinge, probe, guiding trestle and XY displacement platform, in which:
The guiding trestle is inverted " t " type, is made of horizontal bracket and vertical rack, on the right side of the middle part of the vertical rack Equipped with horizontal branch frame；
The work of the XY displacement platform is face-down；
The fixing end of the PZT actuator is mounted on the working face of the XY displacement platform, tache motorice and the level The left side upper surface of bracket connects；
First displacement sensor is mounted on the working face of the XY displacement platform, and is located at the vertical rack Surface；
The screw rod is mounted on horizontal branch frame；
The nut is mounted on the screw rod, and is located at the lower section of horizontal branch frame；
The second displacement sensor is mounted on the nut；
The rotating ring is mounted on the right side of the horizontal bracket, is fixed by marking closely screw；
The flexible hinge is installed on the lower section of the rotating ring, and the two is concentric；
The probe is mounted on the flexible hinge central lower.
The present invention has the advantage that
1, the present invention utilizes flexible hinge, will switch to the measurement to flexible hinge normal deformation amount to the measurement of normal force, It is simpler to the measurement of displacement, more accurately.
2, as shown in Fig. 2, the present invention uses the symmetrical flexible hinge of annular center, the change of lateral force generation can be effective against Shape makes probe as keep vertical as possible with X/Y plane, reduces deflection angle.
3, as shown in 3 figures, the present invention marks closely the angle of the adjustable probe of screw using rotating ring cooperation, and rotating ring can band Dynamic flexible hinge and probe rotate about the axis together, adjust and are locked with marking closely screw after angle, realize the microcomputer of different angle Tool processing.
4, the present invention can change maximum load by replacing flexible hinge, to be suitable for processing the workpiece of different hardness.
5, the present invention passes through the spacing of feed screw nut adjustable second displacement sensor and flexible hinge, convenient for determining just Beginning spacing, is convenient for measuring.
6, knife rest of the invention has the function of force servo, can process micro-nano-scale on plane, inclined-plane and curved surface Impression, scratch etc..
7, knife rest of the invention can control normal force size from micro- ox to several milli ox magnitudes, and higher hardness material may be implemented The processing of material has stronger working ability and wider array of adaptability than commercial AFM system.
8, large range of micromachined may be implemented using XY displacement platform in knife rest of the invention.
9, knife rest of the invention in process, can measure the depth and corresponding normal force of processing simultaneously.
Detailed description of the invention
Fig. 1 is the schematic diagram of the micromachined knife rest with force servo function, in figure: the first displacement sensor of 1-, 2- Screw rod, 3- nut, 4- second displacement sensor, 5- flexible hinge, 6- rotating ring, 7- are marked closely screw, 8- guiding trestle, 9- and are visited Needle, 10-PZT actuator, 11-XY displacement platform；
Fig. 2 is the structural schematic diagram of flexible hinge；
Fig. 3 is the schematic diagram of probe angulation method of adjustment；
Fig. 4 is the control system schematic diagram of the micromachined knife rest with force servo function, in figure: 12- display, 13- main control computer, 14- kinetic control system, 15- signal acquiring system, 16-PZT actuator driver, 17-XY displacement are flat Platform driver；
Fig. 5 is the perspective view of the micromachined knife rest with force servo function；
Fig. 6 is the main view of the micromachined knife rest with force servo function；
Fig. 7 is the enlarged drawing of Fig. 6 part section A；
Fig. 8 is the B-B cross-sectional view of Fig. 6.
Specific embodiment
Further description of the technical solution of the present invention with reference to the accompanying drawing, and however, it is not limited to this, all to this Inventive technique scheme is modified or replaced equivalently, and without departing from the spirit and scope of the technical solution of the present invention, should all be covered Within the protection scope of the present invention.
Micro Process knife rest provided by the invention with force servo function includes mechanical system and control system two parts.
As shown in Fig. 1,5-8, the mechanical system includes PZT actuator 10, the first displacement sensor 1, second displacement biography Sensor 4, screw rod 2, nut 3, rotating ring 6, flexible hinge 5, probe 9, guiding trestle 8 and XY displacement platform 11.Wherein:
The guiding trestle 8 is inverted " t " type, is made of horizontal bracket and vertical rack, and the middle part of the vertical rack is right Side is equipped with horizontal branch frame；
The work of the XY displacement platform 11 is face-down；
The fixing end of the PZT actuator 10 is mounted on the working face of XY displacement platform 11, tache motorice and the level The left side upper surface of bracket connects, and the guiding trestle 8 can be driven to move up and down；
First displacement sensor 1 is mounted on the working face of the XY displacement platform 11, and is located at the vertical branch The surface of frame, the spacing with the vertical rack are l1；
The probe 9 is mounted on 5 central lower of flexible hinge；
The flexible hinge 5 is installed on 6 lower section of rotating ring, and the two is concentric, and the rotating ring 6 is mounted on the horizontal branch The right side of frame is fixed by marking closely screw 7, flexible hinge 5 can be driven to rotate about the axis, to adjust the angle of probe 9 Degree；
The screw rod 2 is mounted on horizontal branch frame；
The nut 3 is mounted on the screw rod 2, and is located at the lower section of the horizontal branch frame；
The second displacement sensor 4 is mounted on the nut 3, and the nut 3 can be transported by about 2 screw rod It is dynamic, to adjust the spacing l of the second displacement sensor 4 and the flexible hinge 52。
As shown in figure 4, the control system includes main control computer 13, kinetic control system 14 and signal acquiring system 15 Three parts.Control signal specifically includes: the driving signal of PZT actuator, the driving signal of XY displacement platform, the first displacement pass The measuring signal of sensor 1 and second displacement sensor 4.Pass through kinetic control system, two D/A modules, PZT actuator driver The motion control of 16 and XY displacement platform driver 17 realization PZT actuator 10 and XY displacement platform 11.Pass through signal acquisition system Unite 15, two A/D modules, the first displacement sensor 1 and second displacement sensor 4 realizes 10 output displacement of PZT actuator and soft The measurement of property 5 normal deformation amount of hinge.Data processing is carried out by the software of main control computer 13, and provides depth-normal direction in real time Force curve.
Working principle:
As initial position when just touching the contactless power of workpiece surface using 9 needle point of probe.
Loading procedure, PZT actuator 10, which increases output displacement, moves downward guiding trestle 8, l1As guiding trestle 8 Displacement, that is, PZT actuator 10 output displacement.Guiding trestle 8 drives probe 9 to move downward；When probe 9 is pressed into workpiece, Flexible hinge 5 is kept its upwardly-deformed by upward normal force, the spacing l with second displacement sensor 42Reduce, so l2For The normal deformation amount of flexible hinge 5.The normal deformation amount of the output displacement and flexible hinge 5 of PZT actuator 10 difference ( l1-∆l2) it is the depth that probe 9 is pressed into workpiece.The normal deformation amount of flexible hinge 5 and suffered normal force have certain line Sexual intercourse, so as to calculate normal force suffered by probe 9.
Uninstall process, PZT actuator 10, which reduces output displacement, moves upwards guiding trestle 8, the method that flexible hinge 5 is subject to It is gradually recovered to deformation, normal force is gradually reduced, and final probe 9 is detached from workpiece.
In process, the depth and corresponding normal force of processing can be measured simultaneously.Then using XY displacement platform 11 It can be in the processing of the specific position and larger range of workpiece progress micro/nano-scale impression, scratch etc..

Claims (2)

1. a kind of micro Process knife rest with force servo function, it is characterised in that the micro Process knife rest includes PZT actuator, One displacement sensor, second displacement sensor, screw rod, nut, rotating ring, flexible hinge, probe, guiding trestle and XY displacement are flat Platform, in which:
The guiding trestle is inverted " t " type, is made of horizontal bracket and vertical rack, is equipped on the right side of the middle part of the vertical rack Horizontal branch frame；
The work of the XY displacement platform is face-down；
The fixing end of the PZT actuator is mounted on the working face of the XY displacement platform, tache motorice and the horizontal bracket Left side upper surface connection；
First displacement sensor is mounted on the working face of the XY displacement platform, and be located at the vertical rack just on Side；
The screw rod is mounted on horizontal branch frame；
The nut is mounted on the screw rod, and is located at the lower section of horizontal branch frame；
The second displacement sensor is mounted on the nut, and the nut is moved up and down by the screw rod, to adjust The spacing of the second displacement sensor and the flexible hinge；
The right side that the rotating ring is fixedly mounted on the horizontal bracket by marking closely screw；
The flexible hinge is installed on the lower section of the rotating ring, and the two is concentric；
The probe is mounted on the flexible hinge central lower.
2. the micro Process knife rest according to claim 1 with force servo function, it is characterised in that the flexible hinge is The symmetrical flexible hinge of annular center.
CN201810069712.7A 2018-01-24 2018-01-24 A kind of micromachined knife rest with force servo function Active CN108557756B (en)

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CN110316695B (en) * 2019-05-05 2022-02-08 哈尔滨工业大学 Micro-nano dual-mode detection processing module

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