CN105953714B - A kind of variation rigidity parallel flexible constraint micro-nano gauge head - Google Patents
A kind of variation rigidity parallel flexible constraint micro-nano gauge head Download PDFInfo
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- CN105953714B CN105953714B CN201610513796.XA CN201610513796A CN105953714B CN 105953714 B CN105953714 B CN 105953714B CN 201610513796 A CN201610513796 A CN 201610513796A CN 105953714 B CN105953714 B CN 105953714B
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- fixed
- shell
- moving platform
- platform
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
- G01B7/016—Constructional details of contacts
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention discloses a kind of variation rigidity parallel flexibles to constrain micro-nano gauge head, including circular shell, the top of shell is equipped with upper end cover, the medial center of upper end cover lifts an object carrier, the bottom of shell connects a variation rigidity parallel flexible constraint mechanism by shell plummer, variation rigidity parallel flexible constraint mechanism is equipped with measuring staff at the center of the side far from upper end cover, one end end of the measuring staff far from moving platform, which is equipped with, surveys ball, the present invention can be according to the demand for measuring object and the course of work, change the lateral stiffness of flexible constraint mechanism, to meet the needs of to measuring work.
Description
Technical field
The present invention relates to measuring instrument technical field, specifically a kind of variation rigidity parallel flexible constrains micro-nano gauge head.
Background technology
Gauge head is one of critical component of precision measurement instrument, and the geological information of measured workpiece, development are provided as sensor
Level directly affects measurement accuracy, working performance, service efficiency and the flexible degree of precision measurement instrument.Currently, contact trigger-type
The three-dimensional measurement technology of gauge head is widely used.Compared to contactless gauge head, touch trigger probe has enough essences
Degree, and it is at low cost, reliability is high, the advantages that easily correction.
Three dimensional probe, 3-D probe is one of the parts of coordinate measuring machine key, and the precision of coordinate measuring machine depends directly on gauge head
Precision.Contact touch trigger probe is mainly contacted by probe with workpiece, generates opposing force each other, which forces probe to be sent out
It gives birth to micro-deformation and the trigger mechanism inside gauge head is made to trigger, to generate a trigger signal, measuring system reads the triggering
The relevant informations such as the Form and position error of the point are write down after signal in time, to complete to measure.Currently, there is also some for contact measuring head
Defect, such as:The rigidity of the constraint supporting device of contact measuring head has a prodigious influence to measurement, rigidity is relatively low can cause it is humorous
False triggering problem etc. caused by vibration frequency is low, dynamic response is slow, " the golf effect " of moment, inertia force are collided in measurement；Just
It spends high and measurement process sensitivity, dynamic responding speed can be made to decline, even damaged so as to cause larger measuring force tested
Element surface.
Invention content
It is an object of the invention in view of the foregoing drawbacks, provide a kind of variation rigidity parallel flexible constraint micro-nano gauge head.
To achieve the above object, the present invention provides technical solution below：A kind of variation rigidity parallel flexible constraint micro-nano survey
The top of head, including circular shell, shell is equipped with upper end cover, and the medial center of upper end cover lifts an object carrier, loading
Body is located at the intracavitary surrounded by shell, and the bottom of shell connects a variation rigidity parallel flexible by shell plummer and constrains machine
Structure, variation rigidity parallel flexible constraint mechanism include moving platform and fixed platform, are circle, circular edge external three among moving platform
A spaced 120 ° of rectangle external part, three external rectangle external parts post movement close to a side surface of upper end cover
Speculum is connected between moving platform and fixed platform by three rectangular thin-wall beams, and one end of three thin walled beams is put down with dynamic respectively
Platform is in an integralization structure, and three thin walled beams are mutually perpendicular to and connect with the rectangle external part of moving platform respectively, three thin walled beams
The other end be respectively and fixedly connected on three variable shaped beams of fixed platform, piezoelectric ceramic fibers piece is posted in variable shaped beam centre position, Gu
Fixed platform is in equilateral triangle, and three corner locations of fixed platform are designed with fixed pedestal, each adjacent two fixed pedestal it
Between connected by variable shaped beam, be useful for the circular hole being connect with shell plummer, the moving platform on each fixed pedestal
At the center of fixed platform；Three laser interferometer are uniformly distributed on the loading body sidewall, adjacent two laser are dry
The angle of cut between interferometer is 120 °, and object carrier is in the fixed interference mirror that is respectively arranged below with of laser interferometer, each laser interference
Instrument is directed at a fixed interference mirror, and laser interferometer is corresponded with the mobile mirror being distributed on moving platform；It is described dynamic
Platform is equipped with measuring staff at the center of the side far from upper end cover, and one end end of the measuring staff far from moving platform, which is equipped with, surveys ball.
Preferably, the end that measuring staff is connect with moving platform is equipped with measuring staff matrix, and measuring staff matrix is pasted by adhesive dynamic
The center of platform, the measuring staff, survey ball, measuring staff matrix are an integral structure.
Preferably, object carrier is hollow regular hexagonal prism, and the laser interferometer is fixed on by clamper on object carrier,
The bottom of object carrier is equipped with object carrier end cap, and object carrier, which is equipped on the side of laser interferometer, is respectively welded a fixed interference
Mirror support, three fixed interference mirrors are bolted respectively on fixed interference mirror support.
Preferably, the edge of upper end cover is uniformly distributed four for the threaded hole I with cage connection, and the center of upper end cover is set
It is useful for the threaded hole II of lifting object carrier.
Preferably, fixed platform is connect by bolt with shell plummer, is also set between fixed platform and shell plummer
There is gasket.
Using above-mentioned technical proposal, common elastic bearing is replaced using variation rigidity parallel flexible constraint mechanism, passes through pressure
The piezoelectric effect of electroceramics fibre plate generates action of lateral load to the variable shaped beam of fixed platform, variable shaped beam is made to generate bending, from
And so that thin walled beam is stretched or compresses, change the lateral stiffness of thin walled beam on moving platform.Based on Stress stiffening principle, pass through
The lateral stiffness for reducing thin walled beam is squeezed, the measuring force needed for measuring is reduced, improves the sensitivity of gauge head；It can by stretching
To increase the lateral stiffness of flexible constraint mechanism, improve the dynamic response characteristic of gauge head.The present invention can according to measure object and
The demand of the course of work changes the lateral stiffness of flexible constraint mechanism, to meet the needs of to measuring work.
Description of the drawings
Fig. 1 is schematic structural view of the invention；
Fig. 2 is the structural schematic diagram of variation rigidity parallel flexible constraint mechanism and measuring staff assembly, shell plummer of the present invention；
Fig. 3 is object carrier structural schematic diagram of the present invention；
Fig. 4 is the connection diagram of shell and upper end cover of the present invention.
Specific implementation mode
Below in conjunction with the accompanying drawings, by the description of the embodiment, the present invention will be further described：
As shown in fig. 1 to 4, a kind of variation rigidity parallel flexible of the present invention constrains micro-nano gauge head, including circular shell 1,
The top of shell 1 is equipped with upper end cover 2, and the edge of upper end cover 2 is uniformly distributed four threaded holes I 6 for being connect with shell 1, on
The center of end cap 2 is equipped with the threaded hole II 4 for lifting object carrier 5, and the medial center of upper end cover 2 is lifted by threaded hole II 4
Object carrier 5, object carrier 5 are located at the intracavitary surrounded by shell 1, and object carrier 5 is hollow regular hexagonal prism, make the whole knot of the present invention
Structure weight saving.
Three laser interferometer 3 are uniformly distributed on 5 side wall of object carrier, three laser interferometer 3 are located on the same circumference,
And the angle of cut between every two adjacent laser interferometer 3 is 120 °, laser interferometer 3 is fixed on object carrier by clamper 19
On 5, the bottom of object carrier 5 is equipped with object carrier end cap 14, and object carrier 5 is equipped on the side of laser interferometer 3 and is respectively welded one
A fixed interference mirror support 20, object carrier 5 are respectively arranged below with fixed interference mirror 15, fixed interference mirror laser interferometer 3
15 are threaded on fixed interference mirror support 20, and interference mirror 15 and laser interferometer 3 are fixed by the form installation of holder,
So that easy for installation.Each laser interferometer 3 is directed at a fixed interference mirror 15, and the bottom of shell 1 is connected by shell plummer 8
Connect a variation rigidity parallel flexible constraint mechanism.
Variation rigidity parallel flexible constraint mechanism includes moving platform 18 and fixed platform 9, is circle among moving platform 18, round
The rectangle external part that external three spaced 120 ° of edge, side table of three external rectangle external parts close to upper end cover 2
Mobile mirror 10 is posted in face, and laser interferometer 3 and the mobile mirror 10 being distributed on moving platform correspond.
Connected by three rectangular thin-wall beams between moving platform 18 and fixed platform 9, one end of three thin walled beams respectively with
Moving platform 18 is in an integralization structure, and three thin walled beams are mutually perpendicular to and connect, three with the rectangle external part of moving platform 18 respectively
The other end of a thin walled beam is respectively and fixedly connected on three variable shaped beams 21 of fixed platform 9, and fixed platform 9 is in equilateral triangle, Gu
9 three corner locations of fixed platform are designed with fixed pedestal, are connected by a variable shaped beam 21 between each adjacent two fixed pedestal
It connects, piezoelectric ceramic fibers piece 17 is posted in 21 centre position of variable shaped beam, is useful for connecting with shell plummer 8 on each fixed pedestal
The circular hole connect, moving platform 18 are located at the center of fixed platform 9, fixed platform 9 by bolt 7 pass through fixed pedestal circular hole with
Shell plummer 8 connects, and gasket 16 is additionally provided between fixed platform 9 and shell plummer 8, for protecting fixed pedestal；It is dynamic flat
Platform 18 is equipped with measuring staff 11 at the center of the side far from upper end cover 2, and one end end of the measuring staff 11 far from moving platform 18, which is equipped with, surveys ball
12。
The end that measuring staff 11 is connect with moving platform 18 is equipped with measuring staff matrix 13, and measuring staff matrix 13 is pasted by adhesive dynamic
The center of platform 18, the measuring staff 11, survey ball 12, measuring staff matrix 13 are an integral structure, and can ensure to survey what ball transmitted in this way
Accuracy reduces error.
The moving platform 18 of variation rigidity parallel flexible constraint mechanism of the present invention and fixed platform 9 are unusual herein in same plane
At the shape of position, which can move along the normal direction of arbitrary line rotation and moving platform 18 in moving platform, when gauge head surveys ball
12 are acted on by power, this acts through measuring staff 11 and passes to the dynamic flat of variation rigidity parallel flexible constraint mechanism with measuring staff matrix 13
Platform 18 makes platform's position and pose change by the variation of the thin walled beam of moving platform 18, and what three laser interferometer 3 were sent out at this time swashs
Light can be reflected back laser interferometer 3 by the effect of mobile mirror 10 and fixed interference mirror 15, so as to obtain three
The change in displacement of point calculates the variation of moving platform pose and posture, to complete to survey based on the change in displacement of these three points
Amount.
The present invention replaces common elastic bearing using variation rigidity parallel flexible constraint mechanism, passes through piezoelectric ceramic fibers piece
17 piezoelectric effect generates action of lateral load to the variable shaped beam 21 of fixed platform 9, so that variable shaped beam 21 is generated bending, to make
It obtains thin walled beam to be stretched or compress, changes the lateral stiffness of thin walled beam on moving platform 18.Based on Stress stiffening principle, by squeezing
Pressure reduces the lateral stiffness of thin walled beam, reduces the measuring force needed for measuring, improves the sensitivity of gauge head；It can be with by stretching
The lateral stiffness for increasing flexible constraint mechanism, improves the dynamic response characteristic of gauge head.The present invention can be according to measurement object and work
Make the demand of process, change the lateral stiffness of flexible constraint mechanism, to meet the needs of to measuring work.
What has been described above is only a preferred embodiment of the present invention, it is noted that for those of ordinary skill in the art
For, without departing from the concept of the premise of the invention, various modifications and improvements can be made, these belong to the present invention
Protection domain.
Claims (5)
1. a kind of variation rigidity parallel flexible constrains micro-nano gauge head, including circular shell (1), the top of shell (1) is equipped with upper
The medial center of end cap (2), upper end cover (2) lifts an object carrier (5), and object carrier (5) is located at the chamber surrounded by shell (1)
Interior, the bottom of shell (1) connects a variation rigidity parallel flexible constraint mechanism by shell plummer (8), it is characterised in that：Institute
It includes moving platform (18) and fixed platform (9) to state variation rigidity parallel flexible constraint mechanism, is circle among moving platform (18), round
The rectangle external part that external three spaced 120 ° of edge, side of three external rectangle external parts close to upper end cover (2)
Mobile mirror (10) is posted on surface, is connect by three rectangular thin-wall beams between moving platform (18) and fixed platform (9), three
One end of thin walled beam is in respectively an integralization structure with moving platform (18), and rectangle of three thin walled beams respectively with moving platform (18) is stretched
Outlet is mutually perpendicular to and connects, and the other end of three thin walled beams is respectively and fixedly connected on three variable shaped beams (21) of fixed platform (9),
Piezoelectric ceramic fibers piece (17) is posted in variable shaped beam (21) centre position, and fixed platform (9) is in equilateral triangle, fixed platform (9)
Three corner locations are designed with fixed pedestal, are connected by a variable shaped beam (21) between each adjacent two fixed pedestal, often
The circular hole being connect with shell plummer (8) is all useful on a fixed pedestal, the moving platform (18) is located at fixed platform (9)
At center；Be uniformly distributed three laser interferometer (3) on object carrier (5) side wall, adjacent two laser interferometer (3) it
Between the angle of cut be 120 °, object carrier (5) is respectively arranged below with fixed interference mirror (15), each laser laser interferometer (3)
Interferometer (3) is directed at a fixed interference mirror (15), and laser interferometer (3) and the mobile mirror that is distributed on moving platform
(10) it corresponds；The moving platform (18) is equipped with measuring staff (11) at the center of the side far from upper end cover (2), and measuring staff (11) is remote
One end end from moving platform (18), which is equipped with, surveys ball (12).
2. variation rigidity parallel flexible according to claim 1 constrains micro-nano gauge head, it is characterised in that：The measuring staff (11) with
The end of moving platform (18) connection is equipped with measuring staff matrix (13), and measuring staff matrix (13) is pasted by adhesive in moving platform (18)
Center, the measuring staff (11), survey ball (12), measuring staff matrix (13) are an integral structure.
3. variation rigidity parallel flexible according to claim 1 or 2 constrains micro-nano gauge head, it is characterised in that：The object carrier
(5) it is hollow regular hexagonal prism, the laser interferometer (3) is fixed on by clamper (19) on object carrier (5), object carrier
(5) bottom is equipped with object carrier end cap (14), and object carrier (5), which is equipped on the side of laser interferometer (3), is respectively welded one
Fixed interference mirror support (20), three fixed interference mirrors (15) are bolted respectively on fixed interference mirror support (20).
4. variation rigidity parallel flexible according to claim 1 constrains micro-nano gauge head, it is characterised in that：The upper end cover (2)
Edge be uniformly distributed four for the threaded holes I (6) that connects with shell (1), the center of upper end cover (2) is equipped with for lifting load
The threaded hole II (4) of object (5).
5. variation rigidity parallel flexible according to claim 4 constrains micro-nano gauge head, it is characterised in that：The fixed platform
(9) it is connect with shell plummer (8) by bolt (7), gasket is additionally provided between fixed platform (9) and shell plummer (8)
(16)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610513796.XA CN105953714B (en) | 2016-06-30 | 2016-06-30 | A kind of variation rigidity parallel flexible constraint micro-nano gauge head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610513796.XA CN105953714B (en) | 2016-06-30 | 2016-06-30 | A kind of variation rigidity parallel flexible constraint micro-nano gauge head |
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| CN105953714A CN105953714A (en) | 2016-09-21 |
| CN105953714B true CN105953714B (en) | 2018-07-17 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107830793B (en) * | 2017-10-30 | 2020-04-07 | 安徽理工大学 | Variable-rigidity contact type micro-nano coordinate measuring machine measuring head |
| CN108422413B (en) * | 2018-06-19 | 2020-01-07 | 哈尔滨工业大学 | Rigidity-variable flexible continuous parallel robot |
| CN109211088B (en) * | 2018-11-13 | 2020-06-19 | 安徽理工大学 | Magnetic control variable-rigidity micro-nano measuring head with layered structure |
| CN109764803A (en) * | 2019-01-23 | 2019-05-17 | 安徽理工大学 | A kind of stiffness variable micro-nano gauge head of three suspensions constraint support |
| CN111854662B (en) * | 2020-07-16 | 2021-05-28 | 西安交通大学 | Single-piezoelectric parallel synchronous driving variable-stiffness measuring head |
| CN115079402B (en) * | 2022-07-08 | 2023-06-30 | 中国科学院光电技术研究所 | Quick reflection mirror based on piezoelectric fiber actuation |
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| JPH1073430A (en) * | 1996-08-30 | 1998-03-17 | Mitsutoyo Corp | Touch signal probe |
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2016
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| CN1975322A (en) * | 2006-12-04 | 2007-06-06 | 天津大学 | Micro-geometric sense measuring device based on nano-measuring machine and micro-tactometering head |
| CN101308051A (en) * | 2008-07-01 | 2008-11-19 | 西安交通大学 | Three-dimensional micro- force silicon micro- sensor |
| CN101857186A (en) * | 2010-05-12 | 2010-10-13 | 西安交通大学 | Silica optical fiber microprobe for three-dimensional micro-force measurement |
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