CN109764803A - A kind of stiffness variable micro-nano gauge head of three suspensions constraint support - Google Patents
A kind of stiffness variable micro-nano gauge head of three suspensions constraint support Download PDFInfo
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- CN109764803A CN109764803A CN201910062756.1A CN201910062756A CN109764803A CN 109764803 A CN109764803 A CN 109764803A CN 201910062756 A CN201910062756 A CN 201910062756A CN 109764803 A CN109764803 A CN 109764803A
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- gauge head
- centerbody
- capacitor
- moving platform
- submissive
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Abstract
The present invention relates to a kind of variation rigidity micro-nano gauge heads of three suspensions constraint support, including submissive guiding mechanism, suspension, bolt hole, Piexoelectric actuator, moving platform, pedestal, capacitor top crown, capacitor bottom crown, centerbody, measuring staff, survey ball, capacitor digital switching device, PC machine.The measuring staff is glued in centerbody lower surface center；The capacitor top crown is glued in moving platform upper surface center；The capacitor bottom crown is glued in centerbody upper surface center；Centerbody is fixed in described suspension one end, and submissive guiding mechanism is fixed in one end；The pedestal is welded in moving platform；The Piexoelectric actuator is welded between pedestal and submissive guiding mechanism；The submissive guiding mechanism is fixed on moving platform lower surface；The present invention can change the tensioning degree of suspension, and then change the rigidity of gauge head, can meet has the needs of different-stiffness to gauge head because of measurement process, measurement object difference by adjusting the different working condition of piezo-electric device.
Description
Technical field
The present invention relates to miniature workpiece surface body characteristics fields of measurement, and in particular to what one kind three suspensions constraint supported can
Variation rigidity micro-nano gauge head.
Background technique
The performance of micro-nano measuring instrument, directly affects the surface quality of miniature workpiece, and micro-nano head mechanism is micro-nano
The important component of rice measuring instrument, performance directly determine the items such as the precision of micro-nano measuring instrument, sensitivity
Energy.
When gauge head is when contacting fragile workpiece surface, to avoid destruction of the workpiece in measurement, it is desirable that gauge head supporting mechanism
With lower rigidity, and during gauge head motion of main shaft, for guarantee gauge head system stability to avoid false triggering, again
Seek gauge head supporting mechanism rigidity with higher.
The present invention can change the tensioning degree of suspension, and then change and survey by adjusting the different working condition of piezo-electric device
The rigidity of head, can meet has the needs of different-stiffness to gauge head because of measurement process, measurement object difference.
Currently there are most of micro-nano gauge heads, mostly fixed constraint gauge head, once be installed, rigidity without
Method changes, and is primarily present following problems:
1, rigidity of fixation gauge head can not adjust rigidity, be not easy to realize the isotropism of rigidity；
2, the inertia force that Low rigidity gauge head generates when closer and farther from workpiece easily brings false triggering；
3, Low rigidity gauge head craftsmanship is poor, and difficulty of processing is big, and precision is low；
4, Low rigidity gauge head can potentially destroy sensibility elasticity beam during absorption and attraction；
5, high rigidity gauge head easily damages measured workpiece surface in measurement.
Summary of the invention
(1) the technical issues of solving
Present invention aims to overcome that the shortcomings of the prior art, and the variable rigid of one kind three suspensions constraint support is provided
Spend micro-nano gauge head.
(2) technical solution
A kind of stiffness variable micro-nano gauge head of suspension constraint support, including submissive guiding mechanism, suspension, bolt hole, piezoelectricity
Driving device, moving platform, pedestal, capacitor top crown, capacitor bottom crown, centerbody, measuring staff, survey ball, capacitor digital switching device,
PC machine；
The pedestal is by being fixedly welded on moving platform lower surface；The Piexoelectric actuator is submissive by being fixedly welded on
Between guiding mechanism and pedestal；The submissive guiding mechanism is fixed by bolts in moving platform lower surface；The bolt hole is uniform
It is distributed in moving platform, for being connected and fixed gauge head and measuring machine；
The center suspension mechanism includes centerbody, measuring staff, surveys ball and suspension；Described suspension one end connects submissive Guiding machine
Structure, the other end connect centerbody；The centerbody lower surface is connected to ladder measuring staff using epoxide-resin glue, and ladder measuring staff lower end is set
It is equipped with survey ball；
The capacitance sensor is symmetrically distributed in moving platform both ends center, and capacitor top crown is connected to dynamic using epoxide-resin glue
Platform upper surface center, capacitor bottom crown are glued in centerbody upper surface center.
As optimal technical scheme, capacitance sensor is connect with capacitor digital switching device, capacitor digital switching device with
PC machine connection.
As optimal technical scheme, moving platform is invar material；Pedestal is carbide material；Suspension is molybdenum filament；Centerbody
For aluminum alloy materials；Measuring staff is carbide material；Survey ball is ruby material.
As optimal technical scheme, ladder measuring staff includes frustum section and cylindrical section, and frustum section top is correspondingly connected with centerbody
Lower surface, bottom end are connect with cylindrical section one end, are surveyed ball and are arranged in measuring staff bottom end.
(3) beneficial effect
The present invention provides a kind of variation rigidity micro-nano gauge heads of three suspensions constraint support, have the advantage that
1, the present invention uses two capacitor plates, greatly reduces the installation space and manufacturing cost of capacitor plate；
2, the present invention uses six Piexoelectric actuators relative to four Piexoelectric actuators, can be every separately adjustable
The tensioning degree of suspension, reduces manufacturing and fixing error；
3, the present invention can reasonably distribute dress using six Piexoelectric actuators relative to eight Piexoelectric actuators
With space, the influence of interference is reduced；
4, the present invention can change the rigidity of gauge head, can meet because of measurement by adjusting the different working condition of piezo-electric device
Process, measurement object are different and have the demand of different-stiffness to gauge head.
Detailed description of the invention
Implement ground technical solution in order to illustrate more clearly of the present invention, attached drawing required for describing below to embodiment is made
Simply introduce, it should be apparent that, the accompanying drawings in the following description be only it is of the invention, some embodiments are protected, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is centerbody of the invention, bottom crown on capacitor, measuring staff, surveys ball combining structure schematic diagram；
In attached drawing, parts list represented by the reference numerals are as follows:
The submissive guiding mechanism of 1-, 2- suspension, 3- bolt hole, 4- Piexoelectric actuator, 5- moving platform, 6- pedestal, 7- capacitor
Top crown, 8- capacitor bottom crown, 9- centerbody, 10- measuring staff, 11- survey ball, 12- capacitor digital switching device, 13-PC machine.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts all other
Embodiment shall fall within the protection scope of the present invention.
With reference to Fig. 1, a kind of variation rigidity micro-nano gauge head of three suspension constraint support, it specifically include that submissive guiding mechanism 1,
Suspension 2, Piexoelectric actuator 4, moving platform 5, pedestal 6, capacitor top crown 7, capacitor bottom crown 8, centerbody 9, is surveyed bolt hole 3
Bar 10 surveys ball 11, capacitor digital switching device 12, PC machine 13；
Six pedestals 6 are uniformly fixed on 5 lower surface of moving platform by welding manner, and rectangular recess is arranged convenient for peace in pedestal 6
Piexoelectric actuator 4 is filled, three submissive guiding mechanisms 1, which are bolted, is uniformly distributed in 5 lower surface of moving platform, submissive guiding
Mechanism 1 is provided with circular groove, positions convenient for the installation of suspension 2；
With reference to Fig. 2, ladder measuring staff 10 includes frustum section and cylindrical section, and frustum section top is correspondingly connected with 9 lower surface of centerbody,
Bottom end is connect with cylindrical section one end, is surveyed ball 11 and is mounted on 10 bottom end of measuring staff；9 lower surface of centerbody is provided with circular groove, measuring staff
10 tops are connected in 9 lower surface circular groove of centerbody using epoxide-resin glue；There are three at 120 for setting at 9 circumference of centerbody
The circular hole of angle distribution is spent, is positioned convenient for the installation of suspension 2；Capacitor top crown 7 is connected to 5 upper surface of moving platform using epoxide-resin glue
Center, capacitor bottom crown 8 are connected to 9 upper surface center of centerbody using epoxide-resin glue；Capacitor top crown 7 is by conducting wire in capacitor
Digital switching device 12 connects, and capacitance information is converted to electric signal, handles signal by PC machine 13, completes measurement process.
The constraint supporting mechanism of three suspensions constraint support variation rigidity micro-nano gauge head of the invention includes centerbody 9, suspension 2, soft
Along guiding mechanism 1；The present invention utilizes the piezoelectric effect of Piexoelectric actuator 4, and making compliant mechanism, deformation occurs, to change suspension
Tensioning degree, and then change measuring staff support construction rigidity；The specific course of work are as follows: when gauge head 11 is close to workpiece, pressure
Electric driver 4 is started to work, and the rigidity of measuring staff support construction increases, and can reduce gauge head during the motion due to inertia force
Caused false triggering；When gauge head 11 and measured workpiece contact, Piexoelectric actuator 4 does not work, and gauge head restores its initial stiffness,
Because using suspension, as gauge head supporting mechanism, initial stiffness is smaller, can avoid when being contacted with workpiece to measured workpiece surface
It destroys, meets measurement demand；When gauge head 11 is completed to measure, Piexoelectric actuator 4 works, and measuring staff support construction rigidity increases,
The attraction between gauge head 11 and measured workpiece can be overcome, quickly leave device under test surface.
Present invention disclosed above preferred embodiment is only intended to help to illustrate the present invention.There is no detailed for preferred embodiment
All details are described, also do not limit the specific embodiment that the invention is only.Obviously, according to the content of this specification, can make
Many modifications and variations.These embodiments are chosen and specifically described to this specification, is original in order to better explain the present invention
Reason and practical application, so that skilled artisan be enable to better understand and utilize the present invention.The present invention is only authorized
The limitation of sharp claim and its full scope and equivalent.
Claims (3)
1. a kind of variation rigidity micro-nano gauge head of three suspensions constraint support, which is characterized in that including submissive guiding mechanism, suspension, spiral shell
Keyhole, moving platform, pedestal, capacitor top crown, capacitor bottom crown, centerbody, measuring staff, surveys ball, capacitor number at Piexoelectric actuator
Conversion equipment, PC machine；The measuring staff is glued in centerbody lower surface center；The capacitor top crown is glued in moving platform upper surface
Center；The capacitor bottom crown is glued in centerbody upper surface center；Centerbody is fixed in described suspension one end, and one end is fixed on
Submissive guiding mechanism；The pedestal is welded in moving platform；The Piexoelectric actuator be welded in pedestal and submissive guiding mechanism it
Between；The submissive guiding mechanism is fixed on moving platform lower surface.
2. a kind of variation rigidity micro-nano gauge head of three suspension constraint support according to claim 1, it is characterised in that: it is described can
By adjusting the different working condition of piezo-electric device, change the tensioning degree of suspension, and then change the rigidity of gauge head, can meet because
Measurement process, measurement object are different and have the demand of different-stiffness to gauge head.
3. a kind of variation rigidity micro-nano gauge head of three suspensions constraint support according to claim 1, it is characterised in that: on capacitor
Pole plate is fixed on moving platform upper surface, and capacitor bottom crown is fixed on centerbody upper surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910062756.1A CN109764803A (en) | 2019-01-23 | 2019-01-23 | A kind of stiffness variable micro-nano gauge head of three suspensions constraint support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910062756.1A CN109764803A (en) | 2019-01-23 | 2019-01-23 | A kind of stiffness variable micro-nano gauge head of three suspensions constraint support |
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| CN109764803A true CN109764803A (en) | 2019-05-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910062756.1A Pending CN109764803A (en) | 2019-01-23 | 2019-01-23 | A kind of stiffness variable micro-nano gauge head of three suspensions constraint support |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111707178A (en) * | 2020-07-07 | 2020-09-25 | 安徽理工大学 | Variable-rigidity micro-nano measuring head based on three sensitive beams |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105953714A (en) * | 2016-06-30 | 2016-09-21 | 安徽理工大学 | Variable-rigidity parallel flexible constraint micro-nano probe |
| CN106123738A (en) * | 2016-06-15 | 2016-11-16 | 安徽理工大学 | A kind of precision feeler based on parallel connection compliant mechanism |
| US20170234785A1 (en) * | 2014-10-13 | 2017-08-17 | Aleksandras Stulginskis University | Device for Evaluation of the Working Surface Fretting Wear Characteristics |
| CN107560573A (en) * | 2017-08-31 | 2018-01-09 | 安徽理工大学 | A kind of suspension-wire type stiffness variable micro-nano gauge head |
| CN107830793A (en) * | 2017-10-30 | 2018-03-23 | 安徽理工大学 | A kind of micro-nano Probe Heads of Coordinate Measuring Machines of stiffness variable contact |
| CN107990818A (en) * | 2018-01-23 | 2018-05-04 | 安徽理工大学 | A kind of new suspension-wire type stiffness variable micro-nano gauge head |
-
2019
- 2019-01-23 CN CN201910062756.1A patent/CN109764803A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170234785A1 (en) * | 2014-10-13 | 2017-08-17 | Aleksandras Stulginskis University | Device for Evaluation of the Working Surface Fretting Wear Characteristics |
| CN106123738A (en) * | 2016-06-15 | 2016-11-16 | 安徽理工大学 | A kind of precision feeler based on parallel connection compliant mechanism |
| CN105953714A (en) * | 2016-06-30 | 2016-09-21 | 安徽理工大学 | Variable-rigidity parallel flexible constraint micro-nano probe |
| CN107560573A (en) * | 2017-08-31 | 2018-01-09 | 安徽理工大学 | A kind of suspension-wire type stiffness variable micro-nano gauge head |
| CN107830793A (en) * | 2017-10-30 | 2018-03-23 | 安徽理工大学 | A kind of micro-nano Probe Heads of Coordinate Measuring Machines of stiffness variable contact |
| CN107990818A (en) * | 2018-01-23 | 2018-05-04 | 安徽理工大学 | A kind of new suspension-wire type stiffness variable micro-nano gauge head |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111707178A (en) * | 2020-07-07 | 2020-09-25 | 安徽理工大学 | Variable-rigidity micro-nano measuring head based on three sensitive beams |
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