CN111707178A - Variable-rigidity micro-nano measuring head based on three sensitive beams - Google Patents
Variable-rigidity micro-nano measuring head based on three sensitive beams Download PDFInfo
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- CN111707178A CN111707178A CN202010647865.2A CN202010647865A CN111707178A CN 111707178 A CN111707178 A CN 111707178A CN 202010647865 A CN202010647865 A CN 202010647865A CN 111707178 A CN111707178 A CN 111707178A
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- measuring
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- nano
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- 239000003990 capacitor Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 8
- 230000008569 process Effects 0.000 claims abstract description 8
- 238000006073 displacement reaction Methods 0.000 claims abstract description 6
- 238000001125 extrusion Methods 0.000 claims abstract description 3
- 230000008859 change Effects 0.000 abstract description 2
- 239000003822 epoxy resin Substances 0.000 description 7
- 229920000647 polyepoxide Polymers 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 229910000906 Bronze Inorganic materials 0.000 description 3
- 229910052790 beryllium Inorganic materials 0.000 description 3
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 3
- 239000010974 bronze Substances 0.000 description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 238000005411 Van der Waals force Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
- G01B7/016—Constructional details of contacts
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
Abstract
The invention relates to a variable-rigidity micro-nano measuring head based on three sensitive beams, which comprises a measuring ball, a measuring rod, a central body, an upper electrode plate and a lower electrode plate of a capacitor, a sensor beam, a sensitive beam, a constraint supporting beam, a piezoelectric driver, a triangular fixing piece and a base. The measuring ball is bonded to the top end of the measuring rod; the lower surface of the conical section of the measuring rod is bonded at the center of the upper surface of the central body; the upper polar plate of the capacitive sensor is bonded on the upper surface of the sensor beam; the lower polar plate of the capacitive sensor is adhered to the upper surface of the base; one end of the sensitive beam is bonded to the central body, and the other end of the sensitive beam is bonded to the center of the constraint supporting beam; the constraint supporting beam is adhered to the triangular fixing piece; the triangular fixing piece is welded on the base; the invention can change the extrusion force of the sensitive beam by adjusting the output displacement of the piezoelectric driver, thereby changing the rigidity of the measuring head and meeting different measuring processes and measuring objects.
Description
Technical Field
The invention relates to the field of detection of three-dimensional characteristics of micro-nano elements, in particular to a variable-rigidity micro-nano measuring head based on three sensitive beams.
Background
With the continuous progress of micro-nano processing technology, the three-dimensional size of a micro-nano element is also continuously reduced, the measurement uncertainty is continuously increased, and the requirements on the coordinate measuring technology are also continuously increased. In a three-coordinate measuring system, a measuring head system is a main factor influencing the measuring precision of the micro-nano element. The performance of the measuring head directly determines the performance of a measuring instrument and directly influences the surface processing quality of the micro-nano element, and the performance of the micro-nano measuring head is closely related to the sensitivity of the micro-nano detecting instrument as a core component of the micro-nano detecting instrument.
When a measuring head and a micro-nano element are in contact measurement, the hardness of a common commercial measuring head ball measuring part is higher, so that the surface of the micro-nano element is not damaged when the measuring head is used for measuring, the micro-nano measuring head is required to have lower rigidity, and when the measuring head is used for measuring the micro-nano element or the measuring head finishes measuring the micro-nano element, the micro-nano measuring head is required to have higher rigidity in order to overcome van der Waals force between the measuring head and the micro-nano element and enable an integral measuring system to have higher stability.
The invention utilizes the piezoelectric driver to extrude the sensitive beam of the measuring head, the output displacement of the piezoelectric driver is in direct proportion to the extrusion force of the sensitive beam, and the rigidity of the sensitive beam of the micro-nano measuring head can be controlled by adjusting different output displacements, thereby meeting different measuring processes and measuring objects.
Most of micro-nano measuring heads manufactured in the industry at present cannot adjust the rigidity, once the micro-nano measuring heads are installed on a measuring machine, the rigidity is determined, and the micro-nano measuring heads mainly have the following defects:
1. the measuring head with unchanged rigidity cannot adjust the rigidity in real time, and the isotropy of the rigidity of the measuring head is not favorably achieved;
2. when the measuring head with lower rigidity approaches or leaves the surface of the micro-nano element, the coordinate value of the point can be recorded by the measuring head in a wrong way due to the inertia force;
3. the measuring head with lower rigidity is easy to damage due to lower rigidity in the processing process, and the processing precision is low;
4. the measuring head with higher rigidity has higher rigidity relative to the measuring head of the micro-nano element in the measuring process, so that the surface of the micro-nano element is easy to damage.
Disclosure of Invention
Technical problem to be solved
The invention aims to overcome the defects in the prior art and provides a variable-rigidity micro-nano measuring head based on three sensitive beams.
(II) technical scheme
A variable-stiffness micro-nano measuring head based on three sensitive beams comprises a measuring ball, a measuring rod, a central body, a sensor beam, upper and lower capacitor plates, a triangular fixing part, a constraint supporting beam, a piezoelectric driver, a base and the sensitive beams;
the triangular fixing pieces are fixed on the upper surface of the base through welding and are uniformly distributed at an angle of 120 degrees; the piezoelectric driver is fixed on the upper surface of the base through welding; the two ends of the constraint supporting beam are bonded to the triangular fixing piece;
the constraint support mechanism comprises a central body, a sensor beam, a sensitive beam, a constraint support beam, a measuring rod and a measuring ball; one end of the sensitive beam is bonded and fixed on the central body through epoxy resin, and the other end of the sensitive beam is bonded and fixed at the center of the restraint support beam; a measuring rod is bonded on the upper surface of the central body by using epoxy resin, and a measuring ball is arranged at the upper end of the measuring rod;
the upper pole plate of the variable-pole-distance capacitive sensor is bonded to the upper surface of the sensor beam by epoxy resin, and the lower pole plate of the capacitive sensor is bonded to the upper surface of the base.
As the preferred technical scheme, the measuring ball is made of ruby materials; the measuring rod is made of tungsten carbide material; the central body is made of aluminum alloy material; the sensor beam is made of beryllium bronze; the sensitive beam is made of beryllium bronze; the restraint support beam is made of beryllium bronze; the triangular fixing piece is made of aluminum alloy material; the base is made of invar steel.
As preferred technical scheme, survey pole cone segment lower surface passes through epoxy and bonds in central body upper surface center department, and the ball setting is surveyed at the survey pole top.
(III) advantageous effects
The invention provides a variable-rigidity micro-nano measuring head based on three sensitive beams, which has the following advantages:
1. the three variable-polar-distance capacitive sensors are adopted, so that the variable quantity of the three-dimensional coordinates of the micro-nano element can be detected simultaneously, and the measurement precision of the measuring head is improved;
2. the invention adopts three piezoelectric drivers to reasonably distribute the installation space relative to four piezoelectric drivers, thereby solving the problem of interference of the piezoelectric drivers;
3. the invention can change the rigidity of the measuring head by independently adjusting the output displacement of the piezoelectric driver, and can meet different measuring processes and measuring objects.
Drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings required for the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only for the present invention and protect some embodiments, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
in the drawings, the components represented by the respective reference numerals are listed below:
1-measuring ball, 2-measuring rod, 3-central body, 4-sensor beam, 5-capacitance upper and lower polar plates, 6-triangular fixing piece, 7-constraint supporting beam, 8-piezoelectric driver, 9-base and 10-sensitive beam.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, a variable-stiffness micro-nano measuring head based on three sensitive beams mainly comprises: the device comprises a measuring ball 1, a measuring rod 2, a central body 3, a sensor beam 4, an upper capacitor plate 5, a lower capacitor plate 5, a triangular fixing piece 6, a constraint supporting beam 7, a piezoelectric driver 8, a base 9 and a sensitive beam 10;
the three triangular fixing pieces 6 are uniformly fixed on the upper surface of the base 9 in a welding mode, the three piezoelectric drivers 8 are arranged at the centers of the three constraint supporting beams 7, two ends of each constraint supporting beam 7 are bonded to the triangular fixing pieces 6, one end of each sensitive beam 10 is bonded to the center of each constraint supporting beam 7, the other end of each sensitive beam is bonded to the intermediate body 3, and the three sensor beams 4 are uniformly distributed on the central body 3;
referring to fig. 1, the measuring rod 2 comprises a conical section and a cylindrical section, the lower surface of the conical section is correspondingly connected with the upper surface of the central body 3, the top end of the conical section is connected with the bottom end of the cylindrical section, and the measuring ball 1 is arranged at the top end of the measuring rod 2; the upper surface of the central body 3 is provided with a circular groove, and the bottom end of the conical section of the measuring rod 2 is bonded in the circular groove on the upper surface of the central body 3 by epoxy resin; three square grooves distributed at an angle of 120 degrees are formed in the periphery of the central body 3, so that the sensitive beam 10 can be conveniently installed and positioned; the upper capacitor plate 5 is bonded to the upper surface of the sensor beam 4 by epoxy resin, and the lower capacitor plate 5 is bonded to the upper surface of the base 9 by epoxy resin; the constraint support beam 7 is bonded to the triangular fixing piece 6 by using epoxy resin; the triangular fixing piece 6 is welded on the upper surface of the base 9;
the invention relates to a constraint support mechanism of a variable-rigidity micro-nano measuring head based on three sensitive beams, which comprises a central body 3, a sensor beam 4, a sensitive beam 10, a constraint support beam 7, a measuring rod 2 and a measuring ball 1; the invention utilizes the piezoelectric effect of the piezoelectric driver 8 to lead the sensitive beam to be extruded and deformed, thereby changing the rigidity of the sensitive beam and further changing the rigidity of the measuring head restraining and supporting mechanism; the specific working process is as follows: when the measuring ball 1 approaches the micro-nano element, the piezoelectric driver 8 does not work, the rigidity of the measuring rod supporting mechanism is unchanged, and van der Waals force in the process of approaching the micro-nano element can be overcome; when the measuring ball 1 is contacted with the surface of the micro-nano element, the piezoelectric driver 8 starts to work, so that the damage to the surface of the micro-nano element caused by the high rigidity of the measuring head can be reduced; when the measuring ball 1 leaves the micro-nano element, the piezoelectric driver 8 does not work, the rigidity of the measuring head returns to the initial size, the attraction between the measuring ball 1 and the micro-nano element can be overcome, and the measuring ball can quickly leave the surface of the micro-nano element.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (3)
1. A variable-stiffness micro-nano measuring head based on three sensitive beams is characterized by comprising a measuring ball, a measuring rod, a central body, an upper capacitor plate, a lower capacitor plate, a sensor beam, a sensitive beam, a constraint supporting beam, a piezoelectric driver, a triangular fixing part and a base; the measuring ball is bonded to the top end of the measuring rod; the lower surface of the conical section of the measuring rod is bonded at the center of the upper surface of the central body; the upper capacitor polar plate is bonded on the upper surface of the sensor beam; the lower capacitor polar plate is adhered to the upper surface of the base; one end of the sensitive beam is bonded to the central body, and the other end of the sensitive beam is bonded to the center of the constraint supporting beam; the constraint supporting beam is adhered to the triangular fixing piece; the triangular fixing piece is welded on the base.
2. The variable-rigidity micro-nano measuring head based on three sensitive beams according to claim 1, is characterized in that: the output displacement of the piezoelectric driver can be adjusted, the extrusion force borne by the sensitive beam is changed, the rigidity of the measuring head is further changed, and different measuring processes and measuring objects can be met.
3. The variable-rigidity micro-nano measuring head based on three sensitive beams according to claim 1, is characterized in that: 3 capacitive sensor evenly distributed in sensor roof beam, the detectable gauge head is at the displacement volume of arbitrary direction in the space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010647865.2A CN111707178A (en) | 2020-07-07 | 2020-07-07 | Variable-rigidity micro-nano measuring head based on three sensitive beams |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010647865.2A CN111707178A (en) | 2020-07-07 | 2020-07-07 | Variable-rigidity micro-nano measuring head based on three sensitive beams |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111707178A true CN111707178A (en) | 2020-09-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010647865.2A Pending CN111707178A (en) | 2020-07-07 | 2020-07-07 | Variable-rigidity micro-nano measuring head based on three sensitive beams |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111707178A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107830793A (en) * | 2017-10-30 | 2018-03-23 | 安徽理工大学 | A kind of micro-nano Probe Heads of Coordinate Measuring Machines of stiffness variable contact |
| CN108827137A (en) * | 2018-07-31 | 2018-11-16 | 安徽理工大学 | A kind of micro-nano gauge head of contact variation rigidity of Electromagnetic Control |
| CN109579677A (en) * | 2019-01-24 | 2019-04-05 | 安徽理工大学 | A kind of variation rigidity micro-nano gauge head of right-angled intersection compression cantilever beam |
| CN109764803A (en) * | 2019-01-23 | 2019-05-17 | 安徽理工大学 | A kind of stiffness variable micro-nano gauge head of three suspensions constraint support |
-
2020
- 2020-07-07 CN CN202010647865.2A patent/CN111707178A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107830793A (en) * | 2017-10-30 | 2018-03-23 | 安徽理工大学 | A kind of micro-nano Probe Heads of Coordinate Measuring Machines of stiffness variable contact |
| CN108827137A (en) * | 2018-07-31 | 2018-11-16 | 安徽理工大学 | A kind of micro-nano gauge head of contact variation rigidity of Electromagnetic Control |
| CN109764803A (en) * | 2019-01-23 | 2019-05-17 | 安徽理工大学 | A kind of stiffness variable micro-nano gauge head of three suspensions constraint support |
| CN109579677A (en) * | 2019-01-24 | 2019-04-05 | 安徽理工大学 | A kind of variation rigidity micro-nano gauge head of right-angled intersection compression cantilever beam |
Non-Patent Citations (3)
| Title |
|---|
| ALBLALAIHID K: "Fabrication and characterisation of a novel", 《SENSORS & ACTUATORS A PHYSICAL,》 * |
| KHALID A: "Performance assessment of a new variable", 《SENSORS》 * |
| 吴耀东: "基于压杆失稳和磁控约束的两类新型测头变刚度机理研究", 《中国优秀硕士学位论文全文数据库工程科技Ⅰ辑》 * |
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Application publication date: 20200925 |
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