CN109211088B - Magnetic control variable-rigidity micro-nano measuring head with layered structure - Google Patents
Magnetic control variable-rigidity micro-nano measuring head with layered structure Download PDFInfo
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- CN109211088B CN109211088B CN201811345146.4A CN201811345146A CN109211088B CN 109211088 B CN109211088 B CN 109211088B CN 201811345146 A CN201811345146 A CN 201811345146A CN 109211088 B CN109211088 B CN 109211088B
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- end cover
- measuring head
- rigidity
- rubber gasket
- layered structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
Abstract
The invention relates to the technical field of miniature workpiece surface characteristic equipment, in particular to a magnetic control variable-rigidity micro-nano measuring head with a layered structure; the design of the measuring head layered structure and the electromagnetic system is beneficial to realizing the adjustable rigidity of the measuring head system; the rigidity adjustment of the measuring head system is realized by independently controlling the current of the cylindrical magnetic coil winding, and the isotropic rigidity of the measuring head system can be achieved; the rubber gasket has certain micro-deformation capacity, can adjust the gap between the magnetic coil winding and the cylindrical permanent magnet, and adjusts and compensates the installation error; the upper end cover and the lower end cover which adopt the equilateral triangle connecting body structure have enough installation and operation space, and are uniform in stress, high in rigidity, stable in structure and strong in robustness.
Description
Technical Field
The invention relates to the technical field of miniature workpiece surface characteristic equipment, in particular to a magnetic control variable-rigidity micro-nano measuring head with a layered structure.
Background
The rapid development of microsystem technology has led to the emergence of many miniature precision measurement instruments, the surface dimensional accuracy of which is typically on the micrometer scale, and some of which are required even on the nanometer scale.
When the electromagnetic layered variable-stiffness micro-nano measuring head is used for measuring the surface characteristics of a miniature workpiece, a measuring ball at the top of a stepped measuring rod is in contact with the surface of the workpiece to be measured, contact force acts on a central body along the measuring rod to deform the central body, so that a sensitive elastic beam connected with the central body generates tiny deformation, a strain sensor on the sensitive elastic beam is triggered, and the coordinate value of the measuring point is recorded through a corresponding conversion circuit.
The prior magnetic control variable-rigidity micro-nano measuring head has the following problems:
1. the rigidity of the measuring head is fixed, the rigidity cannot be adjusted, and the same-property rigidity is difficult to achieve;
2. the measuring head with higher rigidity is adopted, so that the contact force required by the trigger sensor in the measuring process is higher, and the surface of a measured workpiece is easily scratched;
3. a measuring head with smaller rigidity is adopted, so that the dynamic response is slowed, the resonant frequency is low, and the stability is poor;
4. the inertial force generated when the measuring head is rapidly close to or far away from the measured workpiece can bring about false triggering;
5. van der Waals force between the measuring ball and the workpiece can cause potential damage to a suspension system of the measuring head;
6. the existing compression bar type variable-rigidity measuring head is easy to generate center deviation of the measuring bar.
Disclosure of Invention
Technical problem to be solved
The invention aims to overcome the defects in the prior art and provides a magnetic control variable-rigidity micro-nano measuring head with a layered structure.
(II) technical scheme
A magnetic control variable-rigidity micro-nano measuring head with a layered structure comprises a base, an upper end cover, a lower end cover, a rubber gasket I, a rubber gasket II, a central suspension mechanism and a bolt;
the upper end cover and the lower end cover are symmetrically arranged on two sides of the central suspension structure, a rubber gasket I is arranged between the upper end cover and the central suspension structure, and a rubber gasket II is arranged between the lower end cover and the central suspension structure; the upper end cover, the rubber gasket I, the central suspension mechanism, the rubber gasket II and the lower end cover are provided with corresponding through threaded holes, one side of the base is also provided with corresponding fixed threaded holes, and the other side of the base is provided with a connecting end used for connecting a three-coordinate measuring machine;
the upper end cover and the lower end cover have the same structure, are both in hollow design, and are provided with an equilateral triangle connecting body in the center; the three ends of the connecting body are provided with magnetic coil windings, and the magnetic coil windings of the upper end cover and the lower end cover are oppositely arranged;
the central suspension mechanism comprises an outer ring and a mounting seat, and the mounting seat is arranged at the central position of the outer ring; three rigid transverse beams are uniformly connected with the mounting seat in the circumferential direction, and cylindrical permanent magnets are arranged at the outer ends of the rigid transverse beams; the mounting seat is also uniformly connected with three sensitive elastic beams in the circumferential direction, and the outer ends of the sensitive elastic beams are connected with the outer ring; strain sensors are arranged on the upper surface and the lower surface of the sensitive elastic beam; the upper end cover side of the mounting seat surface is connected with a step measuring rod, and the step measuring rod extends out of the upper end cover and is provided with a measuring ball;
the bolt penetrates through the through threaded hole and is screwed into the fixing threaded hole, and the upper end cover, the rubber gasket I, the central suspension mechanism, the rubber gasket II, the lower end cover and the base are combined into a whole in sequence; the two ends of the permanent magnet extend into the corresponding magnetic coil windings.
As the preferred technical scheme, the outer diameter of the permanent magnet is smaller than the inner diameter of the magnetic coil winding, and a gap is reserved to ensure the displacement space and the assembly space of the permanent magnet.
As a preferred technical scheme, the strain sensor adopts a polysilicon strain gauge and is connected with a signal amplification circuit, the amplification circuit is connected with a data acquisition unit, and the data acquisition unit is connected with a computer.
As the preferred technical scheme, the upper end cover, the lower end cover and the outer ring are made of aluminum alloy materials; the rigid transverse beam and the mounting seat are the same in thickness and are made of aluminum alloy materials; the sensitive elastic beam is made of beryllium bronze; the step measuring rod is made of tungsten carbide material; the measuring ball is made of ruby material.
As preferred technical scheme, the ladder measuring staff includes frustum section and cylinder section, and frustum section bottom corresponds connects mount pad central point and puts, and the top is connected with cylinder section one end, surveys the ball setting at the cylinder section other end.
As a preferred technical scheme, the magnetic coil winding is externally connected with input current with adjustable magnitude.
(III) advantageous effects
The invention provides a magnetic control variable-rigidity micro-nano measuring head with a layered structure, which has the following advantages:
1, by designing a measuring head layered structure and an electromagnetic system, the rigidity of the measuring head system can be adjusted;
2, the rigidity adjustment of the measuring head system is realized by independently controlling the current of the cylindrical magnetic coil winding, so that the isotropic rigidity of the measuring head system can be achieved;
3, the rubber gasket has certain micro-deformation capacity, can adjust the gap between the magnetic coil winding and the cylindrical permanent magnet, and adjusts and compensates the installation error;
4, adopt equilateral triangle connector structure's upper and lower end cover, have sufficient installation operating space, and the atress is even, and rigidity is great, stable in structure, and the robustness is strong.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only for the present invention and protect some embodiments, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a view showing a combination structure of the present invention;
FIG. 2 is an exploded view of the present invention;
FIG. 3 is a block diagram of the end cap of the present invention;
FIG. 4 is a block diagram of the central suspension mechanism of the present invention;
FIG. 5 is a view showing the construction of the base in the present invention;
FIG. 6 is a schematic diagram of the use of the present invention;
in the drawings, the components represented by the respective reference numerals are listed below:
1-upper end cover, 101-connector, 102-magnetic coil winding, 103-through threaded hole;
2-rubber gasket I;
3-a central suspension mechanism, 301-an outer ring, 302-a mounting seat, 303-a sensitive elastic beam, 304-a rigid transverse beam, 305-a permanent magnet, 306-a stepped measuring rod and 307-a measuring head;
4-rubber gasket II;
5-lower end cap;
6-base, 601-fixed threaded hole, 602-connecting end.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, a magnetic control variable-stiffness micro-nano measuring head with a layered structure comprises a base 6, an upper end cover 1, a lower end cover 5, a rubber gasket i 2, a rubber gasket ii 4, a central suspension mechanism 3 and a bolt (not shown);
an upper end cover 1 and a lower end cover 5 are symmetrically arranged on two sides of a central suspension structure 3, a rubber gasket I2 is arranged between the upper end cover 1 and the central suspension structure 3, and a rubber gasket II 4 is arranged between the lower end cover 5 and the central suspension structure 3; the upper end cover 1, the rubber gasket I2, the central suspension mechanism 3, the rubber gasket II 4 and the lower end cover 5 are provided with corresponding through threaded holes 103, one side of the base 6 is also provided with corresponding fixed threaded holes 601, and the other side of the base is provided with a connecting end 602 for connecting a three-coordinate measuring machine;
the upper end cover 1 and the lower end cover 5 have the same structure, are both in hollow design, and are provided with an equilateral triangular connecting body 101 in the center; three ends of the connecting body 101 are provided with magnetic coil windings 102, and the magnetic coil windings 102 of the upper end cover and the lower end cover are oppositely arranged;
the central suspension mechanism 3 comprises an outer ring 301 and a mounting seat 302, wherein the mounting seat 302 is arranged at the central position of the outer ring 301; three rigid transverse beams 304 are uniformly connected to the mounting base 302 in the circumferential direction, and cylindrical permanent magnets 305 are arranged at the outer ends of the rigid transverse beams 304; the mounting base 302 is also uniformly connected with three sensitive elastic beams 303 in the circumferential direction, and the outer ends of the sensitive elastic beams 303 are connected with the outer ring 301; strain sensors are attached to the upper surface and the lower surface of the sensitive elastic beam 303; the installation seat 302 is connected with a step measuring rod 306 facing the upper end cover 1 side, and the step measuring rod 306 extends out of the upper end cover 1 and is provided with a measuring ball 307;
referring to fig. 2, the parts are aligned such that the through threaded hole 103 and the fixing threaded hole 601 are concentric; the bolt penetrates through the through threaded hole 103 and is screwed into the fixing threaded hole 601, and the upper end cover 1, the rubber gasket I2, the central suspension mechanism 3, the rubber gasket II 4, the lower end cover 5 and the base 6 are combined into a whole in sequence; both ends of the permanent magnet 305 protrude into the corresponding magnetic coil windings 102.
Wherein, the outer diameter of the permanent magnet 305 is smaller than the inner diameter of the magnetic coil winding 102, and a gap is left to ensure the displacement space and the assembly space of the permanent magnet 305;
the stepped measuring rod 306 comprises a frustum section and a cylindrical section, the bottom end of the frustum section corresponds to the center of the mounting seat 302, the top end of the frustum section is connected with one end of the cylindrical section, and the measuring ball 307 is arranged at the other end of the cylindrical section.
The magnetic coil winding 102 is externally connected with an input current with adjustable magnitude.
Wherein, the strain sensor adopts a polysilicon strain gauge.
In one embodiment, the upper end cover 1, the lower end cover 5 and the outer ring 301 are made of aluminum alloy materials; the rigid transverse beam 305 and the mounting base 302 are the same in thickness and are made of aluminum alloy materials; the sensitive elastic beam 303 is made of beryllium bronze; the step measuring rod 306 is made of tungsten carbide material; the ball 307 is ruby material.
In another embodiment, the angle between adjacent sensitive elastic beams 303 and rigid transverse beams 304 is 60 °.
When the strain gauge is used on site, the strain sensor is connected with the signal amplification circuit, the amplification circuit is connected with the data acquisition unit, the data acquisition unit is connected with the computer, the computer analyzes the collected data, and the measuring head can adjust the overall rigidity of the measuring head in real time by controlling the current of the coil in the working process so as to achieve the purpose of changing the rigidity. Specifically, according to the homopolar repulsion principle, when the coil is not electrified or the current is very small, the coil generates very small extra rigidity to the central suspension mechanism 3 connected with the permanent magnet 305, the measuring head system is in a low rigidity mode, the measuring force generated by the measuring head is small, and the surface of a measured workpiece can be effectively protected; when the coil is electrified with large current, large extra rigidity is generated on the central suspension mechanism 3 connected with the permanent magnet 305, and the measuring head system is in a high rigidity mode, so that false triggering and van der Waals force attraction caused by inertia force can be prevented from damaging the suspension mechanism, and the stability of the measuring head system is ensured; and the potential error of the offset of the central body of the pressure bar type rigidity-changing measuring head does not exist.
Referring to fig. 6, the stylus has two states during measurement, a "hard" state and a "soft" state. a represents the "hard" state assumed by the stylus during its movement close to the workpiece, in which state the stiffness K of the stylus ist＝K1+ K', wherein K1The rigidity is measured, the K' is the anti-interference rigidity, larger inertia force can be borne, the moving speed of the measuring head can be higher than that of the traditional measuring head, and the anti-interference capability is larger. b represents the "soft" condition adopted when the feeler reaches a preset threshold close to the workpiece, the electromagnetic field is removed, at which time KtK' gauge head rigidity is for measuring rigidity, and c shows that the gauge head takes place the contact with the work piece, and the gauge head central part takes place to deflect, has triggered the gauge head and has noted the measuring point, and the measuring power of gauge head to the work piece surface is less, can protect the measuring surface. d represents that when the measuring head leaves the surface of the workpiece after being triggered, the measuring head takes a hard state, so that the damage of the measuring head supporting mechanism caused by excessive attraction force can be prevented.
The control method of the above-mentioned electric control element is the prior art, and is explained here in order to avoid the description redundancy.
In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (6)
1. A magnetic control variable-rigidity micro-nano measuring head with a layered structure is characterized by comprising a base, an upper end cover, a lower end cover, a rubber gasket I, a rubber gasket II, a central suspension mechanism and a bolt;
the upper end cover and the lower end cover are symmetrically arranged on two sides of the central suspension structure, a rubber gasket I is arranged between the upper end cover and the central suspension structure, and a rubber gasket II is arranged between the lower end cover and the central suspension structure; the upper end cover, the rubber gasket I, the central suspension mechanism, the rubber gasket II and the lower end cover are provided with corresponding through threaded holes, one side of the base is also provided with corresponding fixed threaded holes, and the other side of the base is provided with a connecting end used for connecting a three-coordinate measuring machine;
the upper end cover and the lower end cover have the same structure and are both in hollow design, and an equilateral triangle connecting body is arranged in the center; the magnetic coil windings are arranged at three ends of the connecting body, and the magnetic coil windings of the upper end cover and the lower end cover are arranged oppositely;
the central suspension mechanism comprises an outer ring and a mounting seat, and the mounting seat is arranged at the central position of the outer ring; the mounting seat is uniformly connected with three rigid transverse beams in the circumferential direction, and the outer ends of the rigid transverse beams are provided with cylindrical permanent magnets; the mounting seat is also uniformly connected with three sensitive elastic beams in the circumferential direction, and the outer ends of the sensitive elastic beams are connected with the outer ring; strain sensors are arranged on the upper surface and the lower surface of the sensitive elastic beam; the mounting seat surface is connected with a step measuring rod towards the upper end cover, and the step measuring rod extends out of the upper end cover and is provided with a measuring ball;
the bolt penetrates through the through threaded hole and is screwed into the fixing threaded hole, and the upper end cover, the rubber gasket I, the central suspension mechanism, the rubber gasket II, the lower end cover and the base are combined into a whole in sequence; and two ends of the permanent magnet extend into the corresponding magnetic coil windings.
2. The magnetic control variable stiffness micro-nano measuring head of a layered structure according to claim 1, wherein the outer diameter of the permanent magnet is smaller than the inner diameter of the magnetic coil winding, and a gap is left to ensure the displacement space and the assembly space of the permanent magnet.
3. The magnetic control variable-stiffness micro-nano measuring head of the layered structure according to claim 2, wherein the strain sensor adopts a polysilicon strain gauge and is connected with a signal amplifying circuit, the amplifying circuit is connected with a data collector, and the data collector is connected with a computer.
4. The magnetic control variable-rigidity micro-nano measuring head of the layered structure according to claim 3, wherein the upper end cover, the lower end cover and the outer ring are made of aluminum alloy materials; the thickness of the rigid transverse beam is the same as that of the mounting seat, and the rigid transverse beam and the mounting seat are made of aluminum alloy materials; the sensitive elastic beam is made of beryllium bronze; the step measuring rod is made of tungsten carbide material; the measuring ball is made of ruby materials.
5. The magnetic control variable-stiffness micro-nano measuring head of the layered structure according to claim 4, wherein the step measuring rod comprises a frustum section and a cylindrical section, the bottom end of the frustum section is correspondingly connected with the central position of the mounting seat, the top end of the frustum section is connected with one end of the cylindrical section, and the measuring ball is arranged at the other end of the cylindrical section.
6. The magnetic control rigidity-variable micro-nano measuring head with the layered structure according to claim 5, wherein the magnetic coil winding is externally connected with input current with adjustable magnitude.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811345146.4A CN109211088B (en) | 2018-11-13 | 2018-11-13 | Magnetic control variable-rigidity micro-nano measuring head with layered structure |
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| CN201811345146.4A CN109211088B (en) | 2018-11-13 | 2018-11-13 | Magnetic control variable-rigidity micro-nano measuring head with layered structure |
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| CN109211088B true CN109211088B (en) | 2020-06-19 |
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| CN110095050B (en) * | 2019-04-19 | 2021-03-26 | 安徽理工大学 | Triangular beam flexible constraint variable-rigidity micro-nano measuring head |
| CN111854662B (en) * | 2020-07-16 | 2021-05-28 | 西安交通大学 | Single-piezoelectric parallel synchronous driving variable-stiffness measuring head |
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