CN207797989U - A kind of novel suspension-wire type stiffness variable micro-nano gauge head - Google Patents
A kind of novel suspension-wire type stiffness variable micro-nano gauge head Download PDFInfo
- Publication number
- CN207797989U CN207797989U CN201820111566.5U CN201820111566U CN207797989U CN 207797989 U CN207797989 U CN 207797989U CN 201820111566 U CN201820111566 U CN 201820111566U CN 207797989 U CN207797989 U CN 207797989U
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- China
- Prior art keywords
- gauge head
- suspension
- capacitance
- pedestal
- moving platform
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Abstract
A kind of novel suspension-wire type stiffness variable micro-nano gauge head of the utility model includes：Gauge head, measuring staff, intermediate, capacitance top crown, capacitance bottom crown, suspension, compliant mechanism, Piexoelectric actuator, pedestal, moving platform, capacitance digital switching device, PC machine.The measuring staff is mounted on intermediate center；The intermediate is fixed on moving platform center by suspension；Described suspension one end connects intermediate, and the other end connects compliant mechanism；The pedestal is fixed on moving platform；The intermediate is evenly distributed in the upper surface four capacitance bottom crowns；The Piexoelectric actuator is fixed between compliant mechanism and pedestal.The utility model drives compliant mechanism to deform upon by the piezoelectric effect of Piexoelectric actuator, changes the tensioning degree of suspension, and then change the rigidity of measuring staff supporting mechanism, to meet the requirement of measurement process variation rigidity.
Description
Technical field
The utility model is related to micro-nano fields of measurement, specifically a kind of novel suspension-wire type stiffness variable micro-nano gauge head.
Background technology
In recent years, the manufacture of microelectronic mechanical devices is rapidly developed, these device geometries are between millimeter to micro-
Between rice, to ensure the processing quality of microelectronic mechanical devices, high-precision micro-nano measuring machine is required higher and higher.Gauge head is to survey
The significant components of amount machine, performance directly affect the measurement accuracy and stability of measuring machine.According to different classifications method, gauge head
It is divided into contact and two kinds contactless.Contact measuring head is used widely in three-dimensional measurement technical field, is connect compared to non-
Touch gauge head, contact measuring head have many advantages, such as precision height, good reliability, are easy to correction.Currently, contact micro-nano gauge head is also deposited
In following defect, such as：When gauge head supporting mechanism rigidity is larger, the sensitivity of gauge head is relatively low, meeting when being contacted with measuring cell
Larger measuring force is generated, measuring cell is caused to scratch and is even destroyed；When gauge head supporting mechanism rigidity is relatively low, the spirit of gauge head
Sensitivity is higher, and required measuring force is small, but the Van der Waals force between gauge head and measuring cell can damage the repeatable accuracy of gauge head system,
Inertia force easily causes false triggering etc. simultaneously.
Invention content
In order to solve problem above, the utility model discloses a kind of novel suspension-wire type stiffness variable micro-nano gauge heads.
Technical solution adopted by the utility model to solve its technical problems is：A kind of novel suspension-wire type stiffness variable micro-nano
Gauge head, it includes mainly：Gauge head, measuring staff, intermediate, capacitance bottom crown, capacitance top crown, suspension, compliant mechanism, Piezoelectric Driving
Device, pedestal, screw hole, moving platform, capacitance digital switching device, PC machine.The gauge head and measuring staff are an integral structure；It is described
Measuring staff is fixed on intermediate center by cementation method；The intermediate is fixed on moving platform center by suspension；The suspension
One end connects intermediate, and the other end connects compliant mechanism；The pedestal is fixed on by welding manner on moving platform；The piezoelectricity
Driving device is fixed between compliant mechanism and pedestal；The capacitance top crown is fixed on by cementation method under moving platform center
Surface；Capacitance bottom crown is fixed on intermediate upper surface by cementation method.
With the prior art, the beneficial effects of the utility model are embodied in：
Four capacitor plate positions are uniformly distributed in intermediate upper surface by the utility model, improve the inspection of gauge head unit
Precision is surveyed, capacitor plate is reduced and is unevenly distributed or negligible amounts and the measurement error that generates.It is filled using eight Piezoelectric Drivings
It sets relative to four Piexoelectric actuators, can individually adjust the tensioning degree in each suspension direction, reduce due to processing
The error of precision and installation process.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the utility model gauge head, measuring staff, gauge head supporting mechanism, Piexoelectric actuator, pedestal and moving platform assembly
Vertical view；
Figure label：Gauge head -1, measuring staff -2, intermediate -3, capacitance bottom crown -4, capacitance top crown -5, suspension -6, flexibility
Mechanism -7, Piexoelectric actuator -8, pedestal -9, screw hole -10, moving platform -11, capacitance digital switching device -12, PC machine -13.
Specific implementation mode
Below in conjunction with attached drawing, by the description of the embodiment, being described further to the utility model：
A kind of novel suspension-wire type stiffness variable micro-nano gauge head, it includes mainly：Under gauge head 1, measuring staff 2, intermediate 3, capacitance
Pole plate 4, capacitance top crown 5, suspension 6, compliant mechanism 7, Piexoelectric actuator 8, pedestal 9, screw hole 10, moving platform 11, capacitance
Digital switching device 12, PC machine 13.Gauge head 1 and measuring staff 2 are an integral structure, and the setting of 3 lower surface center of intermediate is round
Groove, measuring staff 2 are fixed on by cementation method at 3 lower surface circular groove of intermediate.3 circumferential position of intermediate is symmetrical arranged 4
Circular groove is arranged in a boss, each boss center, is convenient for the positioning and installation of suspension 6.Eight pedestals 9 pass through welding side
Formula is distributed in 11 lower surface of moving platform, pedestal 9 be arranged rectangular recess convenient for Piexoelectric actuator 8 and compliant mechanism 7 positioning with
Installation.8 both ends of the surface of Piexoelectric actuator by cementation method respectively with outside 9 rectangular recess inner surface of pedestal and compliant mechanism 7
End face is connected.Boss is equipped among compliant mechanism 7, boss center is equipped with circular groove, is convenient for the positioning and installation of suspension 6.
6 end face of suspension is fixed on 3 boss central circular groove of intermediate by cementation method, and the other end is fixed on compliant mechanism 7
Boss central circular groove.Intermediate 3 is evenly distributed in the upper surface 4 capacitance pole plate supports, at 45 ° point of the boss mechanism with intermediate 3
Cloth.Capacitance bottom crown 4 is fixed on by cementation method at capacitance pole plate support, and capacitance top crown 5 is by cementation method due to dynamic flat
11 lower surface of platform, position are corresponding with capacitance bottom crown 4.Capacitance top crown 5 passes through conducting wire and 12 phase of capacitance digital switching device
Even, by capacitance variation information, electric signal is converted to, signal is handled by PC machine 13, completed to gauge head change in displacement
Detection, and then complete entire measurement process.
The supporting mechanism of the novel suspension-wire type variation rigidity micro-nano gauge head of the utility model includes intermediate 3, suspension 6, flexible machine
Structure 7.The utility model utilizes the piezoelectric effect of Piexoelectric actuator 8, driving compliant mechanism 7 to deform upon, and changes of suspension 6
Tight degree, and then change the rigidity of measuring staff support construction.Specific work process：When micro-nano gauge head unit start to work and not in contact with
When element under test, Piexoelectric actuator 8 works, and the rigidity of measuring staff support construction becomes larger, and 1 response speed of gauge head increases, while energy
Enough reduce the false triggering generated due to inertia in device measurement process；When 1 contact measured element of gauge head, Piexoelectric actuator 8
Do not work, the rigidity of measuring staff support construction becomes smaller, and reduces the contact force of gauge head 1 and workpiece, avoid that rigidity is excessive due to estimating and
The scuffing of measuring cell is even destroyed；When gauge head 1, which leaves member to be measured, to be made, Piexoelectric actuator 8 works, measuring staff support construction
Rigidity become larger, the Van der Waals force between gauge head 1 and element under test can be overcome, while increasing the dynamic response characteristic of gauge head 1.This
Course of work when utility model can be measured according to the material property and gauge head of element to be measured, by changing Piexoelectric actuator
8 voltage obtains the rigidity for adapting to the gauge head supporting mechanism of element under test, meets the requirement of measurement process variation rigidity.
Claims (3)
1. a kind of novel suspension-wire type stiffness variable micro-nano gauge head, it is characterised in that：It includes gauge head (1), measuring staff (2), intermediate
(3), capacitance bottom crown (4), capacitance top crown (5), suspension (6), compliant mechanism (7), Piexoelectric actuator (8), pedestal (9),
Screw hole (10), moving platform (11), capacitance digital switching device (12), PC machine (13)；The gauge head (1) and measuring staff (2) are one
Body formula structure；The measuring staff (2) is mounted on intermediate (3) center；The intermediate (3) is fixed on moving platform by suspension (6)
(11) center；Suspension (6) one end connection intermediate (3), the other end connect compliant mechanism (7)；The pedestal (9) is fixed on
On moving platform (11)；The Piexoelectric actuator (8) is fixed between compliant mechanism (7) and pedestal (9)；The intermediate (3)
It is evenly distributed in the upper surface four capacitance bottom crowns.
2. a kind of novel suspension-wire type stiffness variable micro-nano gauge head according to claim 1, it is characterised in that：It is described each soft
Property mechanism (7) driven by two Piexoelectric actuators (8), so that compliant mechanism (7) is deformed upon being parallel to suspension direction, use
To change the rigidity of gauge head supporting mechanism.
3. a kind of novel suspension-wire type stiffness variable micro-nano gauge head according to claim 1, it is characterised in that：Under four capacitances
Pole plate is distributed on intermediate upper surface, and with the distribution at 45 ° of intermediate (3) boss mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820111566.5U CN207797989U (en) | 2018-01-23 | 2018-01-23 | A kind of novel suspension-wire type stiffness variable micro-nano gauge head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820111566.5U CN207797989U (en) | 2018-01-23 | 2018-01-23 | A kind of novel suspension-wire type stiffness variable micro-nano gauge head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207797989U true CN207797989U (en) | 2018-08-31 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820111566.5U Expired - Fee Related CN207797989U (en) | 2018-01-23 | 2018-01-23 | A kind of novel suspension-wire type stiffness variable micro-nano gauge head |
Country Status (1)
| Country | Link |
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| CN (1) | CN207797989U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107990818A (en) * | 2018-01-23 | 2018-05-04 | 安徽理工大学 | A kind of new suspension-wire type stiffness variable micro-nano gauge head |
-
2018
- 2018-01-23 CN CN201820111566.5U patent/CN207797989U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107990818A (en) * | 2018-01-23 | 2018-05-04 | 安徽理工大学 | A kind of new suspension-wire type stiffness variable micro-nano gauge head |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180831 Termination date: 20190123 |