CN101857186A - Silica optical fiber microprobe for three-dimensional micro-force measurement - Google Patents
Silica optical fiber microprobe for three-dimensional micro-force measurement Download PDFInfo
- Publication number
- CN101857186A CN101857186A CN201010170756A CN201010170756A CN101857186A CN 101857186 A CN101857186 A CN 101857186A CN 201010170756 A CN201010170756 A CN 201010170756A CN 201010170756 A CN201010170756 A CN 201010170756A CN 101857186 A CN101857186 A CN 101857186A
- Authority
- CN
- China
- Prior art keywords
- probe
- optical fiber
- feeler lever
- silica
- microprobe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention provides a silica optical fiber microprobe for three-dimensional micro-force measurement. The microprobe consists of a probe base, a probe rod and a probe, wherein the probe base is made of organic glass and is a cylinder provided with a blind hole; the probe rod has a cylindrical stepped silica optical fiber structure which has a large bottom end and becomes smaller from the bottom end to the top; the bottom end of the probe rod is in close fit with the blind hole on the probe base; the top end of the probe rod is provided with the probe; and the probe is prepared by pulling a silica optical fiber core from the top end of the probe rod. The microprobe has the characteristics of high accuracy, low cost, simple processing, long service life and high anti-jamming capability.
Description
Technical field
The invention belongs to little power technical field of measurement and test, particularly a kind of silica optical fiber microprobe that is used for three-dimensional micro-force measurement.
Background technology
In recent years, along with the continuous development of MEMS (MEMS) technology, more and more scholars and research institution began microcosmos is furtherd investigate.Utilizing MEMS probe-type feeler that little power is monitored, is a kind of effective scientific method of understanding microcosmos in depth.MEMS Micro-force sensor probe mainly is divided into two kinds at present: 1. the silicon microprobe that utilizes the processing of MEMS technology: this probe integral body is a feeler lever, does not pop one's head in, and measure error is relatively large; Because silicon materials plasticity is poor, and probe diameter is very little, therefore in order to guarantee the normal use of probe, probe is done very shortly, and environment for use is restricted.2. metal probe: this probe is made up of metal feeler lever and ruby probe, has rigidity preferably.Ruby probe anti-wear performance is good, but the difficult processing that costs an arm and a leg is poor with metal feeler lever cement properties, and easily loosening, the life-span is short.The metal feeler lever is subject to magnetic interference, and a little less than the antijamming capability, error is bigger.
Summary of the invention
Problem at present prior art exists the purpose of this invention is to provide a kind of staged silica optical fiber microprobe that precision height, cost are low, processing is simple, the life-span is long, antijamming capability is strong that is used for three-dimensional micro-force measurement.
To achieve these goals, the technical solution used in the present invention is as follows:
The silica optical fiber microprobe that is used for three-dimensional micro-force measurement, by probe base 1, feeler lever 3 with pop one's head in and 4 form, probe base 1 is made by lucite, probe base 1 is the cylinder of a band blind hole 2, feeler lever 3 be a bottom big, by the cylindrical staged silica fibre structure that the bottom up diminishes successively, feeler lever 3 bottoms closely cooperate for 2 one-tenth with probe base blind hole; The top of feeler lever 3 disposes probe 4, and probe 4 is formed by the silica fibre fibre core drawing on feeler lever 3 tops.
The probe rapidoprint is a silica fibre, and the cylinder diameter of probe base 1 is 1.6mm, and height is 1mm.
Feeler lever 3 bottom diameters are 0.9mm.
Probe 4 is less than or equal to the quartz ball of 40 μ m for diameter.
Probe 4 is that the silica fibre fibre core of 125 μ m draws and to form by feeler lever 3 top end diameter.
The cylindrical staged silica fibre structure of feeler lever 3 is three joints, and its diameter is followed successively by 900 μ m, 250 μ m, 125 μ m.
Because the probe 8 that machines will be installed on the sensor sensing unit,, therefore, adopt proportion little, the lucite processing probe base 1 that intensity is big for the interference of the own wt that reduces probe 8 to sensor; Lucite is a kind of macromolecule transparent material, and its chemical name is polymethyl methacrylate, and English is called for short PMMA, formed by methyl methacrylate polymerization, have smooth surface, the transparency is good, proportion is little, intensity is bigger, and is corrosion-resistant, moisture-proof, sun-proof, good insulation preformance, sound insulation property is good, anti-interference advantage such as strong.Can be when sensor package by the fixed installation situation of the transparent real-time monitoring probe of lucite base.Base is by the laser engraving machined, the finished product accuracy height.
The feeler lever of probe is in when design, and two factors limit mutually: for guaranteeing by dynamometry must to improve the rigidity of probe by complete being delivered on the sensor sensing element of probe, reduce the distortion of feeler lever; But improve the measurement sensitivity of sensor and the accurate operation under minute yardstick, increase the length of feeler lever and the yardstick that reduces to pop one's head in, the result has reduced the rigidity of probe.Therefore in the feeler lever design, must take all factors into consideration this two kinds of constraints, optimize the relevant parameter of feeler lever.
In order to improve the antijamming capability of probe, increase the length of probe, utilize silica fibre processed sensor feeler lever 3.Silica fibre has good optics and mechanical performance: optical fiber is glass fibre, and proportion is little, makes it have little, the lightweight characteristics of diameter, installs very convenient; Antijamming capability is strong, because the basis of optical fiber is quartzy, only passes light, and is non-conductive, is not subjected to the effect of electromagnetic field, and electromagnetic interference, industry disturbance are had very strong defensive ability/resistance ability; Because it is very abundant to make material (quartz) source of optical fiber, the optical fiber cost is low; Good corrosion resistance, the material (quartz) of making optical fiber is difficult for being corroded by the acid-base material in the industry.
Spherical probe 4 has reduced the damage to measured object, has improved certainty of measurement.
Description of drawings
Fig. 1 is the stereogram of probe base of the present invention.
Fig. 2 is the stereogram of probe feeler lever of the present invention and probe.
Fig. 3 is the mounting structure figure of the present invention on sensor.
Among the figure: 1 ... the probe base; 2 ... probe base blind hole; 3 ... feeler lever; 4 ... probe; 5 ... the sensor sensing element; 6 ... the sensing element cantilever beam; 7 ... the sensing element platform; 8 ... probe.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is elaborated.
As Fig. 1, shown in 2, probe 8 of the present invention is by probe base 1, feeler lever 3 and pop one's head in and 4 form, and probe base 1 is made by lucite, and probe base 1 is the cylinder of a band blind hole 2, blind hole 2 diameters are 0.9mm, dark 0.8mm, feeler lever 3 be a bottom big, by the cylindrical staged silica fibre structure that the bottom up diminishes successively, feeler lever 3 bottom diameters are 0.9mm, because the silica fibre skin has certain elasticity, so feeler lever 3 bottoms can closely cooperate with probe base blind hole 2; The feeler lever 3 that the bottom is scribbled epoxy resin is assembled in the blind hole 2, and dries one hour under 60 ℃ of environment, makes the probe 8 among its fixing Fig. 3 of formation; Probe 4 is less than or equal to the quartz ball of 40 μ m for diameter, is that the silica fibre fibre core drawing of 125 μ m forms by feeler lever 3 top end diameter.
As shown in Figure 3, probe 8 is installed on the sensor sensing component platform 7 in conjunction with pasting method based on the laser positioning method, extraneous tested masterpiece is used on the probe 4, be delivered on the sensor sensing component platform 7 through probe 8, make sensing element cantilever beam 6 produce distortion, cause that the piezo-resistance on the cantilever beam 6 changes, output voltage records active force.
Claims (7)
1. the silica optical fiber microprobe that is used for three-dimensional micro-force measurement, form by probe base (1), feeler lever (3) and probe (4), it is characterized in that: probe base (1) is made by lucite, probe base (1) is the cylinder of a band blind hole (2), feeler lever (3) is an a bottom cylindrical staged silica fibre structure big, that up diminished successively by the bottom, feeler lever (3) bottom becomes to closely cooperate with probe base blind hole (2), the top of feeler lever (3) disposes probe (4), and probe (4) is formed by the silica fibre fibre core drawing on feeler lever (3) top.
2. according to the said silica optical fiber microprobe of claim 1, it is characterized in that: the probe rapidoprint is a silica fibre, and the cylinder diameter of probe base (1) is 1.6mm, and height is 1mm.
3. according to the said silica optical fiber microprobe of claim 1, it is characterized in that: blind hole (2) diameter is 0.9mm, dark 0.8mm.
4. according to the said silica optical fiber microprobe of claim 1, it is characterized in that: feeler lever (3) bottom diameter is 0.9mm.
5. according to the said silica optical fiber microprobe of claim 1, it is characterized in that: probe (4) is less than or equal to the quartz ball of 40 μ m for diameter.
6. according to claim 1 or 5 said silica optical fiber microprobes, it is characterized in that: probe (4) is that the silica fibre fibre core of 125 μ m draws and to form by feeler lever (3) top end diameter.
7. according to the said silica optical fiber microprobe of claim 1, it is characterized in that: the cylindrical staged silica fibre structure of feeler lever (3) is three joints, and its diameter is followed successively by 900 μ m, 250 μ m, 125 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101707562A CN101857186B (en) | 2010-05-12 | 2010-05-12 | Silica optical fiber microprobe for three-dimensional micro-force measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101707562A CN101857186B (en) | 2010-05-12 | 2010-05-12 | Silica optical fiber microprobe for three-dimensional micro-force measurement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101857186A true CN101857186A (en) | 2010-10-13 |
| CN101857186B CN101857186B (en) | 2012-05-23 |
Family
ID=42943384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101707562A Expired - Fee Related CN101857186B (en) | 2010-05-12 | 2010-05-12 | Silica optical fiber microprobe for three-dimensional micro-force measurement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101857186B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104142225A (en) * | 2014-08-06 | 2014-11-12 | 中国科学院电子学研究所 | High current electron beam small-section optical fiber YAG probe detection device |
| CN105953714A (en) * | 2016-06-30 | 2016-09-21 | 安徽理工大学 | Variable-rigidity parallel flexible constraint micro-nano probe |
| CN107957230A (en) * | 2017-12-27 | 2018-04-24 | 河北银隆新能源有限公司 | A kind of pulp of lithium ion battery is coated with dimension measuring device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0752601B1 (en) * | 1994-03-24 | 2003-05-14 | Kanagawa Academy Of Science And Technology | Optical fiber and its manufacture |
| CN100547346C (en) * | 2006-12-04 | 2009-10-07 | 天津大学 | Little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head |
| CN101308051B (en) * | 2008-07-01 | 2011-01-12 | 西安交通大学 | Three-dimensional micro- force silicon micro- sensor |
-
2010
- 2010-05-12 CN CN2010101707562A patent/CN101857186B/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104142225A (en) * | 2014-08-06 | 2014-11-12 | 中国科学院电子学研究所 | High current electron beam small-section optical fiber YAG probe detection device |
| CN105953714A (en) * | 2016-06-30 | 2016-09-21 | 安徽理工大学 | Variable-rigidity parallel flexible constraint micro-nano probe |
| CN105953714B (en) * | 2016-06-30 | 2018-07-17 | 安徽理工大学 | A kind of variation rigidity parallel flexible constraint micro-nano gauge head |
| CN107957230A (en) * | 2017-12-27 | 2018-04-24 | 河北银隆新能源有限公司 | A kind of pulp of lithium ion battery is coated with dimension measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101857186B (en) | 2012-05-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203824907U (en) | Surface plasma resonance optical fiber pH sensing chip and detecting system | |
| CN204613104U (en) | A kind of light fibre humidity transducer based on dislocation welding | |
| CN203287311U (en) | Double-cone fine-core single mode fiber based transmission-type optical fiber humidity sensor | |
| CN110793450B (en) | High-precision particle size measuring device and method based on optical fiber tweezers | |
| CN108572141B (en) | Composite enhanced optical fiber biosensor and method for detecting concentration of biological protein molecules | |
| CN102778200A (en) | Optical lever measurement method for magnetostrictive effect based on magnetorhrologic grease and measuring device for optical lever measurement method | |
| CN113109592B (en) | Cantilever beam type three-dimensional FBG acceleration sensor | |
| CN101857186B (en) | Silica optical fiber microprobe for three-dimensional micro-force measurement | |
| CN102410850A (en) | Reflective optical fiber sensor device | |
| CN102353494B (en) | Optical sensing based impulse testing method and device | |
| CN106124088B (en) | Built-in cable joint temperature optical fiber on-line monitoring sensor | |
| CN105241842A (en) | Small optical fiber refractive index sensor based on single mode-multimode-single mode optical fiber taper head (SMST) | |
| CN101923028B (en) | Device for detecting creep/thermal deformation and internal crack of high-temperature coating | |
| CN106595479A (en) | Optical fiber type three-dimensional trigger probe device and measuring method | |
| CN204359817U (en) | Based on two optical fiber Bragg raster high frequency acceleration transducer | |
| CN201716393U (en) | Solar silicon surface line marker tester | |
| CN205027314U (en) | Novel experiment of fiber grating displacement sensing device | |
| CN201828277U (en) | Reflective optical fiber sensor device | |
| CN105371815A (en) | Portable rock lateral deformation measurement device | |
| CN103759853A (en) | Probe device of semiconductor optical fiber temperature sensor | |
| CN210863348U (en) | Soft clay early thixotropic strength testing device based on FBG and full flow sounding | |
| CN209116960U (en) | A kind of detector for displacement measuring of non-contact type high-precision wide range | |
| CN203149097U (en) | Fiber grating magnetic sensor | |
| CN202582503U (en) | Transmission type grating strainmeter | |
| Liu | Application of plastic optical fiber fatigue sensor in real-time monitoring of fatigue cracks in steel structures |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120523 Termination date: 20150512 |
|
| EXPY | Termination of patent right or utility model |