CN209116960U - A kind of detector for displacement measuring of non-contact type high-precision wide range - Google Patents

A kind of detector for displacement measuring of non-contact type high-precision wide range Download PDF

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Publication number
CN209116960U
CN209116960U CN201821490891.3U CN201821490891U CN209116960U CN 209116960 U CN209116960 U CN 209116960U CN 201821490891 U CN201821490891 U CN 201821490891U CN 209116960 U CN209116960 U CN 209116960U
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China
Prior art keywords
push rod
module
measurement
sensor
baffle
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CN201821490891.3U
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Chinese (zh)
Inventor
李杨宗
段发阶
叶德超
何赒
郭岩
马雨岚
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Good Test (tianjin) Technology Co Ltd
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Good Test (tianjin) Technology Co Ltd
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Abstract

The utility model discloses a kind of detector for displacement measuring of non-contact type high-precision wide range, including displacement measurement utensil, capacitance sensor and measurement display module, capacitance sensor is by sensor probe, push rod, sleeve and sensor signal lines composition, the nut cap with probe hole is connected through a screw thread at the top of sleeve, sleeve bottom is equipped with baffle, push rod is set between the baffle of sleeve inner and nut cap, the probe hole is protruded on the top of push rod, the top of push rod is embedded with the sensor probe concordant with push rod top end face, tail end is connected with the measurement extension of displacement measurement utensil, the lower part of push rod is equipped with the block matched with the baffle, reset spring is equipped between block and nut cap, push rod is hollow structure inside the push rod from top to block, signal wire connecting hole is equipped on block and baffle, the one of sensor signal lines End is connect by signal wire connecting hole with sensor probe, and the other end is connect with the measurement display module.

Description

A kind of detector for displacement measuring of non-contact type high-precision wide range
Technical field
The utility model belongs to geometric measurement field, in particular to the displacement of a kind of non-contact type high-precision wide range is surveyed Measure instrument.
Background technique
Displacement measurement is the detection basis of a variety of physical quantitys such as vibration, deformation, acceleration, with precision machinery skill in recent years The development and application of art, microdisplacement measurement technology have been an important research directions of modern measure technology.It at present can be real The method of existing high precision position shift measurement mainly has optical measuring method, is measured microscopically method, measurement method of electricity etc..Optical measuring method master It to be measured using the interference of light and the principle of diffraction, but the structure of optical gauge is typically complex, price compares It is expensive and higher to environmental requirement.Being measured microscopically instrument mainly has high-performance projection electron microscope, scanning electron microscopy Mirror and scanning probe microscopy etc., but the measurement accuracy for being measured microscopically instrument is not high.Measurement method of electricity is to utilize photoelectric sensing Device measures, and mainly includes electric-resistivity method, capacitance method, inductance method and electric vortex method, and capacitance method and inductance method development are rapider. Capacitive displacement transducer precision height, high resolution, structure be simple, it is easily fabricated, to realize certain special measurements;It can work In the rugged environments such as high/low temperature, intense radiation and high-intensity magnetic field, to surveyed object, material requirement is not high, can also be magnetic to band Workpiece measure, be constantly subjected to the extensive utilization of people.However current capacitive displacement measuring instrument generally has precision High but small range problem limits its in practical applications general and uses degree.
Utility model content
The purpose of this utility model is to overcome deficiencies in the prior art, and it is a large amount of to provide a kind of non-contact type high-precision The detector for displacement measuring of journey, the detector for displacement measuring is for realizing non-contact displacement, position, vibration, angle, dielectric constant and various The high-precisions of the parameters such as deformation, thickness, rigidity detects, measurement accuracy is high, it is easy to use, be widely used, structure it is simple.
The purpose of this utility model is achieved through the following technical solutions:
A kind of detector for displacement measuring of non-contact type high-precision wide range, including displacement measurement utensil, capacitance sensor and survey Display module is measured, the capacitance sensor is made of sensor probe, push rod, sleeve and sensor signal lines, the sleeve Top is connected through a screw thread the nut cap with probe hole, and sleeve bottom is equipped with baffle, and the push rod is set to sleeve inner Between baffle and nut cap, the probe hole is protruded on the top of push rod, and the top of push rod is embedded with concordant with push rod top end face Sensor probe, tail end are connected with the measurement extension of displacement measurement utensil, and the lower part of push rod is equipped with to match with the baffle The block of conjunction, is equipped with reset spring between the block and nut cap, the push rod is hollow inside the push rod from top to block Structure, signal wire connecting hole is equipped on the block and baffle, and one end of the sensor signal lines passes through the signal wire Connecting hole is connect with sensor probe, and the other end is connect with the measurement display module.
Further, institute's displacement measurer tool is digital micrometer or grating scale.
Further, a part of the sensor signal lines is looped around on push rod using back-shaped winding mode.
Further, the measurement display module includes MCU, signal modulation module, acquisition preprocessing module, key mould Block, USB communication module, power management module, data processing and memory module and LCD display module, the MCU are separately connected Signal modulation module, acquisition preprocessing module, key module, USB communication module, power management module, data processing and storage Module and LCD display module.
Compared with prior art, beneficial effect brought by the technical solution of the utility model is:
(1) contactless micro-displacement measurement may be implemented in the utility model, using large range measuring utensil and high-precision Capacitance sensor conjunction measuring, measuring range is big and precision is high, can carry out micro-displacement measurement to metal, have a wide range of application It is general.
(2) utility model uses non-contact measurement, will not generate interference to measured object, noncontacting measurement may be implemented Error, conjunction measuring display module measure data processing, have the characteristics that measuring speed is fast, frequency response is good.
(3) utility model uses modularization connection type, and structure is simple, and easy to use, manufacturing cost is low, and conjunction measuring is aobvious Show that module measures data processing, stability is strong, and calibration speed is fast.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model.
Fig. 2 is the schematic cross-sectional view of capacitance sensor in the utility model.
Fig. 3 is the composition schematic diagram for measuring display module.
Appended drawing reference: 1- capacitance sensor, 2- digital micrometer, 3- measure display module, 4- sensor signal lines, 5- set Cylinder, 6- nut cap, 7- probe hole, 8- push rod, 9- reset spring, 10- block, 11- baffle
Specific embodiment
The utility model will be further described with reference to the accompanying drawing.
As shown in Figure 1 to Figure 3, the utility model protects a kind of detector for displacement measuring of non-contact type high-precision wide range, should Measuring instrument mainly includes displacement measurement utensil, capacitance sensor 1 and measurement display module 3, displacement measurement utensil in the present embodiment Using three rich 406 series of digital display diameter formula outside micrometer, which will not generate rotation stress to measurement workpiece, It is responsible for large displacement measurement, 2 part of digital micrometer also can be used grating scale and be replaced, and grating scale is also responsible for big displacement survey Amount.Capacitance sensor 1 is connected with the measurement extension of digital micrometer 2, and capacitance sensor 1 is by push rod 8, sleeve 5 and sensing Device signal wire 4 forms, and the top of sleeve 5 is connected through a screw thread the nut cap 6 with probe hole 7, and 5 bottom of sleeve is equipped with baffle 11, push rod 8 is set between the baffle inside sleeve 5 and nut cap 6, and the top of push rod 8 is protruded into probe hole 7 and connect with sensor probe Touching, tail end are connected with the measurement extension of digital micrometer 2, and 8 tail portion of push rod is equipped with the block 10 matched with baffle 11, gear Reset spring 9 is equipped between block 10 and nut cap 6, push rod 8 is hollow structure, block 10 and gear inside the push rod from top to block Signal wire connecting hole is equipped on plate 11, one end of sensor signal lines 4 is connect by signal wire connecting hole with sensor probe, The other end is connect with the measurement display module 3.
Capacitance sensor 1 is responsible for high-precision micro-displacement measurement, range 3mm in the present embodiment, and precision is 1 μm.Number Micrometer will not be generated rotation stress to measurement workpiece, be responsible for big position using three rich 406 series of digital display diameter formula outside micrometer Shift measurement, capacitance sensor inside are connected to measurement by the back-shaped coiling of sensor signal lines 4 stretching by three coaxial signal cables Display module 3, it is contemplated that capacitance sensor probe can not automatically reset after stretching out in measurement, install reset spring 9 additional to reach Measurement terminates the effect to automatically reset.In view of sensor signal lines 4 measurement when can stretch, using the back-shaped coiling of signal wire with The length of control sensor signal lines remains unchanged.
Capacitance sensor probe tip is measurement origin, and digital micrometer pushes push rod in measurement process, capacitor The distance that sensor probe stretches out measurement origin is displacement that digital micrometer pushes push rod, also as digital micrometer Measurement data, when capacitance sensor probe enters capacitance sensor measuring range at a distance from measured target, capacitance sensor Carry out high-acruracy survey, measure capacitance sensor probe tip at a distance from measured target, the measurement data of digital micrometer with The measurement data of capacitance sensor is carried out data processing and integration by measurement display module and then is shown, handle and integrate out Data be the measurement origin measured of entire measuring system at a distance from measured target.
Measurement 3 part of display module includes MCU, signal modulation module, acquisition preprocessing module, key module, USB communication Module, power management module, data processing and memory module and LCD display module, MCU are separately connected signal modulation module, adopt Collect preprocessing module, key module, USB communication module, power management module, data processing and memory module and LCD shows mould Block.Capacitance sensor receives signal, and then signal reaches signal modulation module and is modulated, and enters back into acquisition preprocessing module. Since capacitance sensor is nonlinear transducer, in signal modulation module, acquisition preprocessing module and data processing and storage In module, Fast Calibration is carried out to the signal that capacitance sensor is passed to, and then obtain accurate measurement data.
The utility model is not limited to embodiments described above.Above the description of specific embodiment is intended to describe With illustrate the technical solution of the utility model, the above mentioned embodiment is only schematical, is not restrictive.? In the case of not departing from the utility model aims and scope of the claimed protection, those skilled in the art are practical at this The specific transformation of many forms can be also made under novel enlightenment, these are belonged within the protection scope of the utility model.

Claims (4)

1. a kind of detector for displacement measuring of non-contact type high-precision wide range, which is characterized in that passed including displacement measurement utensil, capacitor Sensor and measurement display module, the capacitance sensor are made of sensor probe, push rod, sleeve and sensor signal lines, institute It states and is connected through a screw thread the nut cap with probe hole at the top of sleeve, sleeve bottom is equipped with baffle, and the push rod is set to set Between baffle and nut cap inside cylinder, the probe hole is protruded on the top of push rod, and the top of push rod is embedded with and push rod top end The concordant sensor probe in face, tail end are connected with the measurement extension of displacement measurement utensil, the lower part of push rod be equipped with it is described The block that baffle matches is equipped with reset spring between the block and nut cap, the push rod is from top to the push rod of block Portion is hollow structure, and signal wire connecting hole is equipped on the block and baffle, and one end of the sensor signal lines passes through institute It states signal wire connecting hole to connect with sensor probe, the other end is connect with the measurement display module.
2. a kind of detector for displacement measuring of non-contact type high-precision wide range according to claim 1, which is characterized in that institute's rheme Shift measurement utensil is digital micrometer or grating scale.
3. a kind of detector for displacement measuring of non-contact type high-precision wide range according to claim 1, which is characterized in that the biography A part of sensor signal line is looped around on push rod using back-shaped winding mode.
4. a kind of detector for displacement measuring of non-contact type high-precision wide range according to claim 1, which is characterized in that the survey Amount display module includes MCU, signal modulation module, acquisition preprocessing module, key module, USB communication module, power management mould Block, data processing and memory module and LCD display module, the MCU are separately connected signal modulation module, acquisition pretreatment mould Block, key module, USB communication module, power management module, data processing and memory module and LCD display module.
CN201821490891.3U 2018-09-12 2018-09-12 A kind of detector for displacement measuring of non-contact type high-precision wide range Active CN209116960U (en)

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CN201821490891.3U CN209116960U (en) 2018-09-12 2018-09-12 A kind of detector for displacement measuring of non-contact type high-precision wide range

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Application Number Priority Date Filing Date Title
CN201821490891.3U CN209116960U (en) 2018-09-12 2018-09-12 A kind of detector for displacement measuring of non-contact type high-precision wide range

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112504069A (en) * 2020-12-09 2021-03-16 合肥埃科光电科技有限公司 Non-contact precision measuring instrument

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112504069A (en) * 2020-12-09 2021-03-16 合肥埃科光电科技有限公司 Non-contact precision measuring instrument

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