CN101857186B - Silica optical fiber microprobe for three-dimensional micro-force measurement - Google Patents
Silica optical fiber microprobe for three-dimensional micro-force measurement Download PDFInfo
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- CN101857186B CN101857186B CN2010101707562A CN201010170756A CN101857186B CN 101857186 B CN101857186 B CN 101857186B CN 2010101707562 A CN2010101707562 A CN 2010101707562A CN 201010170756 A CN201010170756 A CN 201010170756A CN 101857186 B CN101857186 B CN 101857186B
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- optical fiber
- feeler lever
- silica optical
- microprobe
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Abstract
The invention provides a silica optical fiber microprobe for three-dimensional micro-force measurement. The microprobe consists of a probe base, a probe rod and a probe, wherein the probe base is made of organic glass and is a cylinder provided with a blind hole; the probe rod has a cylindrical stepped silica optical fiber structure which has a large bottom end and becomes smaller from the bottom end to the top; the bottom end of the probe rod is in close fit with the blind hole on the probe base; the top end of the probe rod is provided with the probe; and the probe is prepared by pulling a silica optical fiber core from the top end of the probe rod. The microprobe has the characteristics of high accuracy, low cost, simple processing, long service life and high anti-jamming capability.
Description
Technical field
The invention belongs to little power technical field of measurement and test, particularly a kind of silica optical fiber microprobe that is used for three-dimensional micro-force measurement.
Background technology
In recent years, along with the continuous development of MEMS (MEMS) technology, more and more scholars and research institution began microcosmos is furtherd investigate.Utilizing MEMS probe-type feeler that little power is monitored, is a kind of effective scientific method of understanding microcosmos in depth.MEMS Micro-force sensor probe mainly is divided into two kinds at present: 1. the silicon microprobe that utilizes the processing of MEMS technology: this probe integral body is a feeler lever, does not pop one's head in, and measure error is relatively large; Since the silicon materials bad plasticity, and probe diameter is very little, therefore in order to guarantee the normal use of probe, probe is done very shortly, and environment for use is restricted.2. metal probe: this probe is made up of metal feeler lever and ruby probe, has rigidity preferably.Ruby probe anti-wear performance is good, but the difficult processing that costs an arm and a leg is poor with metal feeler lever cement properties, is prone to become flexible, and the life-span is short.The metal feeler lever is subject to magnetic interference, and a little less than the antijamming capability, error is bigger.
Summary of the invention
To the problem that present prior art exists, the purpose of this invention is to provide a kind of staged silica optical fiber microprobe that precision is high, cost is low, processing is simple, the life-span is long, antijamming capability is strong that is used for three-dimensional micro-force measurement.
To achieve these goals, the technical scheme of the present invention's employing is following:
The silica optical fiber microprobe that is used for three-dimensional micro-force measurement; By probe base 1, feeler lever 3 with pop one's head in and 4 form; Probe base 1 is processed by lucite; Probe base 1 is the cylinder of a band blind hole 2, feeler lever 3 be a bottom big, by the cylindrical staged silica fibre structure that the bottom up diminishes successively, feeler lever 3 bottoms closely cooperate for 2 one-tenth with probe base blind hole; The top of feeler lever 3 disposes probe 4, and probe 4 is formed by the silica fibre fibre core drawing on feeler lever 3 tops.
The probe rapidoprint is a silica fibre, and the cylinder diameter of probe base 1 is 1.6mm, and height is 1mm.
Blind hole 2 diameters are 0.9mm, dark 0.8mm.
Feeler lever 3 bottom diameters are 0.9mm.
Probe 4 is less than or equal to the quartz ball of 40 μ m for diameter.
Probe 4 is that the silica fibre fibre core of 125 μ m draws and to form by feeler lever 3 top end diameter.
The cylindrical staged silica fibre structure of feeler lever 3 is three joints, and its diameter is followed successively by 900 μ m, 250 μ m, 125 μ m.
Because the probe 8 that machines will be installed on the sensor sensing unit,, therefore, adopt proportion little, the lucite processing probe base 1 that intensity is big for the interference of the own wt that reduces probe 8 to sensor; Lucite is a kind of macromolecule transparent material, and its chemical name is polymethyl methacrylate, and the English PMMA that is called for short is formed by methyl methacrylate polymerization; Have smooth surface, the transparency is good, and proportion is little, and intensity is bigger; Corrosion-resistant, moisture-proof, sun-proof; Good insulation preformance, sound insulation property is good, anti-interference advantage such as strong.Can be when sensor package through the fixed installation situation of the transparent real-time monitoring probe of lucite base.Base is by the laser engraving machined, and finished product accuracy is high.
The feeler lever of probe is in when design, and two factors limit each other: for guaranteeing by dynamometry must to improve the rigidity of probe through complete being delivered on the sensor sensing element of probe, reduce the distortion of feeler lever; But improve the measurement sensitivity of sensor and the accurate operation under minute yardstick, increase the length of feeler lever and the yardstick that reduces to pop one's head in, the result has reduced the rigidity of probe.Therefore in the feeler lever design, must take all factors into consideration this two kinds of constraints, optimize the relevant parameter of feeler lever.
In order to improve the antijamming capability of probe, increase the length of probe, utilize silica fibre processed sensor feeler lever 3.Silica fibre has good optics and mechanical performance: optical fiber is glass fibre, and proportion is little, makes it have little, the lightweight characteristics of diameter, installs very convenient; Antijamming capability is strong, because the basis of optical fiber is quartzy, only passes light, and is non-conductive, do not receive the effect of electromagnetic field, and electromagnetic interference, industry disturbance are had very strong defensive ability/resistance ability; Because it is very abundant to make material (quartz) source of optical fiber, the optical fiber cost is low; Good corrosion resistance, the material (quartz) of making optical fiber is difficult for being corroded by the acid-base material in the industry.
Spherical probe 4 has reduced the damage to measured object, has improved certainty of measurement.
Description of drawings
Fig. 1 is the stereogram of probe base of the present invention.
Fig. 2 is the stereogram of probe feeler lever of the present invention and probe.
Fig. 3 is the mounting structure figure of the present invention on sensor.
Among the figure: 1 ... The probe base; 2 ... Probe base blind hole; 3 ... Feeler lever; 4 ... Probe; 5 ... The sensor sensing element; 6 ... The sensing element cantilever beam; 7 ... The sensing element platform; 8 ... Probe.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is elaborated.
Like Fig. 1, shown in 2, probe 8 of the present invention is by probe base 1, feeler lever 3 and pop one's head in and 4 form; Probe base 1 is processed by lucite, and probe base 1 is the cylinder of a band blind hole 2, and blind hole 2 diameters are 0.9mm; Dark 0.8mm, feeler lever 3 be a bottom big, by the cylindrical staged silica fibre structure that the bottom up diminishes successively, feeler lever 3 bottom diameters are 0.9mm; Because the silica fibre skin has certain elasticity, so feeler lever 3 bottoms can closely cooperate with probe base blind hole 2; The feeler lever 3 that the bottom is scribbled epoxy resin is assembled in the blind hole 2, and under 60 ℃ of environment, dries one hour, makes the probe 8 among its fixing Fig. 3 of formation; Probe 4 is less than or equal to the quartz ball of 40 μ m for diameter, is that the silica fibre fibre core drawing of 125 μ m forms by feeler lever 3 top end diameter.
As shown in Figure 3; Combine to paste method based on the laser positioning method probe 8 is installed on the sensor sensing component platform 7, extraneous tested masterpiece is used on the probe 4, is delivered on the sensor sensing component platform 7 through probe 8; Make sensing element cantilever beam 6 produce distortion; Cause that the piezo-resistance on the cantilever beam 6 changes, output voltage records active force.
Claims (7)
1. the silica optical fiber microprobe that is used for three-dimensional micro-force measurement; Form by probe base (1), feeler lever (3) and probe (4); It is characterized in that: probe base (1) is processed by lucite; Probe base (1) is the cylinder of a band blind hole (2), feeler lever (3) be a bottom big, by the cylindrical staged silica fibre structure that the bottom up diminishes successively, feeler lever (3) bottom becomes to closely cooperate with probe base blind hole (2); The top of feeler lever (3) disposes probe (4), and probe (4) is formed by the silica fibre fibre core drawing on feeler lever (3) top.
2. according to the said silica optical fiber microprobe of claim 1, it is characterized in that: the cylinder diameter of probe base (1) is 1.6mm, and height is 1mm.
3. according to the said silica optical fiber microprobe of claim 1, it is characterized in that: blind hole (2) diameter is 0.9mm, dark 0.8mm.
4. according to the said silica optical fiber microprobe of claim 1, it is characterized in that: feeler lever (3) bottom diameter is 0.9mm.
5. according to the said silica optical fiber microprobe of claim 1, it is characterized in that: probe (4) is less than or equal to the quartz ball of 40 μ m for diameter.
6. according to claim 1 or 5 said silica optical fiber microprobes, it is characterized in that: probe (4) is that the silica fibre fibre core of 125 μ m draws and to form by feeler lever (3) top end diameter.
7. according to the said silica optical fiber microprobe of claim 1, it is characterized in that: the cylindrical staged silica fibre structure of feeler lever (3) is three joints, and its diameter is followed successively by 900 μ m, 250 μ m, 125 μ m.
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CN2010101707562A CN101857186B (en) | 2010-05-12 | 2010-05-12 | Silica optical fiber microprobe for three-dimensional micro-force measurement |
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CN2010101707562A CN101857186B (en) | 2010-05-12 | 2010-05-12 | Silica optical fiber microprobe for three-dimensional micro-force measurement |
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CN101857186B true CN101857186B (en) | 2012-05-23 |
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Families Citing this family (3)
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CN104142225B (en) * | 2014-08-06 | 2016-11-09 | 中国科学院电子学研究所 | The small area fiber YAG probe detection device of high current electronics note |
CN105953714B (en) * | 2016-06-30 | 2018-07-17 | 安徽理工大学 | A kind of variation rigidity parallel flexible constraint micro-nano gauge head |
CN107957230A (en) * | 2017-12-27 | 2018-04-24 | 河北银隆新能源有限公司 | A kind of pulp of lithium ion battery is coated with dimension measuring device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0752601A1 (en) * | 1994-03-24 | 1997-01-08 | Kanagawa Academy Of Science And Technology | Optical fiber and its manufacture |
CN1975322A (en) * | 2006-12-04 | 2007-06-06 | 天津大学 | Micro-geometric sense measuring device based on nano-measuring machine and micro-tactometering head |
CN101308051A (en) * | 2008-07-01 | 2008-11-19 | 西安交通大学 | Three-dimensional micro- force silicon micro- sensor |
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2010
- 2010-05-12 CN CN2010101707562A patent/CN101857186B/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0752601A1 (en) * | 1994-03-24 | 1997-01-08 | Kanagawa Academy Of Science And Technology | Optical fiber and its manufacture |
CN1975322A (en) * | 2006-12-04 | 2007-06-06 | 天津大学 | Micro-geometric sense measuring device based on nano-measuring machine and micro-tactometering head |
CN101308051A (en) * | 2008-07-01 | 2008-11-19 | 西安交通大学 | Three-dimensional micro- force silicon micro- sensor |
Non-Patent Citations (1)
Title |
---|
W.Z.Wang et al.An Integrated MEMS Tactile Tri-axial Micro-force Probe Sensor for Minimally Invasive Surgery.《Proceedings of the 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering》.2009,第71-76页. * |
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