CN104142225B - The small area fiber YAG probe detection device of high current electronics note - Google Patents
The small area fiber YAG probe detection device of high current electronics note Download PDFInfo
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- CN104142225B CN104142225B CN201410383766.2A CN201410383766A CN104142225B CN 104142225 B CN104142225 B CN 104142225B CN 201410383766 A CN201410383766 A CN 201410383766A CN 104142225 B CN104142225 B CN 104142225B
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Abstract
The invention discloses the small area fiber YAG probe detection device of a kind of high current electronics note, including high vacuum cavity, optical fiber YAG probe, flexible optical cable, image output detecting apparatus and probe horizontal movement positioner；Cavity is laterally positioned, and front end is used for connecting tested electronics note drift tube, and rear end is used for disposing probe horizontal movement positioner；Probe horizontal movement positioner inserts in high vacuum cavity from the rear end of high vacuum cavity, fixing linking probe, enables the front end of probe just to tested electronics note drift tube axially positioning and moving along high vacuum cavity；Probe is connected to be positioned at the image output detecting apparatus of high vacuum containment portion by flexible optical cable；Image output detecting apparatus is used for gathering the beam current intensity distribution advanced in tested electronics note drift tube in the front end surface of optical fiber YAG probe, and is converted into optical imagery.The present invention can measure a diameter of 10mm of electron propagation ducts with the electronics note down to about 1mm.
Description
Technical field
The present invention relates to microwave device or high current electronics note analyzer detection electron gun and electronics note transmission
The technical field of process electro-optical performance, particularly relates to the note drift of hyperfrequency microwave vacuum device electronic
The Detection Techniques of thin channel electronics note below several millimeters for the diameter of pipe.
Background technology
Fig. 1 is that the traditional miniature electric note used by microwave electron tube high current electronics note analyzer cuts
The structural representation of planar survey system.This system utilizes high current electronics note directly bombardment fluorescent screen or YAG
Screen detects.Fig. 2 is the schematic diagram of the fluorescent screen detecting head machinery of this measurement system.
As depicted in figs. 1 and 2, this measurement systematic vertical is placed, and high current electronics note is launched straight up
Directly bombarding on fluorescent screen, fluorescent screen mechanism includes fluorescent screen and fixes the pull bar being connected with fluorescent screen.
Operator operates this pull bar, thus fluorescent screen moves up and down.
Now, as microwave frequency requires more and more higher, electronics note drift in the diameter of electronics note and device
The passage moving pipe is also increasingly thinner, the device detect to this electron-like note cross section and various improvement thereof
The drift tube that type is all difficult to logarithm mm dia detects.
Secondly as in device electronics note drift tube and electronics note diameter very close to, be all a millimeter magnitude,
Reflection on drift tube wall for the light distributing on fluorescent screen at probe also have impact on fluorescent screen electronics
The luminous intensity measurement of note cross section light image.The more troublesome light image being fluorescent screen probe is from vacuum cavity
Passing out, required optical channel is straight line in a vacuum, therefore required vacuum cavity and detection equipment
Synchronous moving mechanism just long and complex, the optical instrument crossing long-focus during simultaneously measuring brings
Pattern distortion just leverages the electronics note spatial resolution on measurement fluorescent screen.
Content of the invention
(1) to solve the technical problem that
It is desirable to provide one is used for detecting high current electronics note electron-optical in the drift tube of small-bore
Performance the detection device improving the spatial resolution that measurement electronics is noted.
(2) technical scheme
For solving above-mentioned technical problem, the present invention proposes the small area fiber YAG of a kind of high current electronics note
Probe detection device, for detecting the electro-optical performance of the electronics note that tested electronics note drift tube is launched,
Including high vacuum cavity, optical fiber YAG probe, flexible optical cable, image output detecting apparatus and probe
Horizontal movement positioner；Wherein, described high vacuum cavity is laterally positioned, including before and after Xiang Dui two
End, front end is used for connecting described tested electronics note drift tube, and rear end is used for disposing probe horizontal movement fixed
Position device；Described probe horizontal movement positioner inserts described height from the rear end of described high vacuum cavity
In vacuum cavity, the described optical fiber YAG probe of fixing connection, make the front end of described optical fiber YAG probe
Can be just to described tested electronics note drift tube axially positioning and fortune along described high vacuum cavity
Dynamic；Described optical fiber YAG probe is connected to be positioned at outside described high vacuum cavity by described flexible optical cable
The image output detecting apparatus in portion；Described image output detecting apparatus is used for gathering optical fiber YAG probe
Front end surface on by described tested electronics note drift tube in advance beam current intensity distribution,
And it is converted into optical imagery.
According to the detailed description of the invention of the present invention, described high vacuum cavity include front port, observation window,
Pull rod seal device and chamber body, wherein, described chamber body transverse horizontal is placed, including relatively
Before and after two ends；Described front port is positioned at the front end of described chamber body, is used for connecting described tested device
Part drift tube；Described observation window is positioned in the middle of the rear side of described chamber body, as output electronics
The window of note optical imagery；Described pull rod seal device is positioned at the surface of the rear end of described chamber body,
Seal described probe horizontal movement positioner for vacuum.
According to the detailed description of the invention of the present invention, described optical fiber YAG probe and flexible optical cable include light
Fine bundle, described fibre bundle is not surpassed the light of the uniform cross-section of the φ 0.01mm or thinner of 5% by every error
Fibril arrangement lock ring becomes the bundle of φ 5mm or thinner, and every optical fiber is from optical fiber YAG probe to flexibility
Optical cable, arrive signal output part again, all there is no joint and by same arrangement sequence number at whole fibre bundle
Each cross section arranges.
According to the detailed description of the invention of the present invention, described optical fiber YAG probe include optical fiber YAG probe,
Probe tailstock and the probe body of rod, wherein, before described optical fiber YAG probe is positioned at the described probe body of rod
End；The described probe body of rod is fastened on the horizontal movement of described probe by described probe tailstock in the horizontal direction
The leading section of positioner simultaneously makes YAG probe without any rotation.
According to the detailed description of the invention of the present invention, described probe tailstock includes that probe tail end fibre bundle is fixed
Ring and fixed connecting rod, described probe tail end fibre bundle retainer ring is fixed in the rear end of the probe body of rod, Gu
Determine connecting rod and be fixedly connected on the periphery of probe tail end optical fiber retainer ring.
According to the detailed description of the invention of the present invention, the described probe body of rod includes fibre bundle, is coated in optical fiber
Vacuum insulation sealing material coating outside bundle and the flexible rind outside coating, described elastic skin
Layer is wound around by elastic vacuum material.
According to the detailed description of the invention of the present invention, described optical fiber YAG probe includes being plated in fibre bundle
The YAG thin layer of front end face, the outer surface at thin layer is provided with a molybdenum thin layer.
According to the detailed description of the invention of the present invention, the periphery in the front end of optical fiber YAG probe is provided with
Probe front fibre bundle retainer ring and probe protection ring, described probe protection ring overlapping portions is before probe
The outer end of end fibre bundle retainer ring.
According to the detailed description of the invention of the present invention, described image output detecting apparatus includes in described observation
It the transparent optical element of the position seals of window, is positioned at outside chamber body and the CCD of viewed straight-on window
Camera, and it is fixed under chamber body the detecting instrument support platform supporting CCD camera.
According to the detailed description of the invention of the present invention, described flexible optical cable includes being visited by described optical fiber YAG
Fibre bundle, the vacuum material external coating of fibre bundle outer application and the fibre bundle end that pin extends out
The fibre bundle end snap ring of fastening, described fibre bundle end snap ring vacuum glue is adhesively fixed on cavity master
The middle position of the transparent optical element medial surface of the observation window of the inner side of body.
According to the detailed description of the invention of the present invention, described probe horizontal movement positioner is positioned at described chamber
The central upper of the rear end of phosphor bodies, including probe horizontal movement linear bearing, with lengthy bellows
Motion pull rod seal device, servo electrical machinery system, probe movement positioning tie bar and optical table, wherein,
Described probe movement pull bar is joined by described motion pull rod seal device and described pull rod seal device
Close the inside stretching into chamber body；Described servo electrical machinery system drives described spy on described optical table
Head motion positions pull bar horizontal movement.
(3) beneficial effect
One, the present invention can measure a diameter of 10mm of electron propagation ducts with down to about 1mm
The electron gun of hyperfrequency microwave electron tube and transmitting procedure in the electron-optical of electronics note
The equipment of energy, the development to research and design Novel ultra-high frequency microwave electron tube can play critically important work
With.
Its two, the present invention can provide large-sized multifunction horizontal high current electronics note point as parts
Parser uses as crucial pencil electronics note detector, substantially increases high current electronics note analyzer
Application.
Its three, the present invention has very high spatial resolution, can reach 0.03mm.
Brief description
Fig. 1 is the structural representation of traditional small-sized high current electronics note section gauge system；
Fig. 2 is the schematic diagram of the fluorescent screen mechanism of the high current electronics note section gauge system shown in Fig. 1；
Fig. 3 is the detection device for high current electronics note small area fiber YAG probe for the present invention
The schematic diagram of one embodiment, this figure is front view；
Fig. 4 is the top view of Fig. 3；
Fig. 5 is the optical fiber YAG probe of the present invention, the structural representation of flexible optical cable；
Fig. 6 is the structural representation of the optical fiber YAG probe of the present invention.
Description of reference numerals:
400. high vacuum cavitys, 401. front ports, 402. observation windows, 403. pull rod seal device, 404.
Chamber body, 405. discharge ducts, 406. high-vacuum exhaust systems, 407. mountings.
100. optical fiber YAG probes, 110. optical fiber YAG probes, 111.YAG thin layer, 112. molybdenums are thin
Layer, 113. probe front fibre bundle retainer ring, 114. probe protection rings, 120. probe tailstocks, 121.
Probe tail end fibre bundle retainer ring, 122. fixed connecting rods, the 130. probe bodies of rod, 101. fibre bundles, 102.
Coating, 131. flexible rinds.
200. flexible optical cables, 201. fibre bundles, 202. coatings, 203. fibre bundle end snap rings, 300. figures
As output detecting apparatus, 301. transparent optical elements, 302.CCD camera, 303 detecting instruments are supported
Platform.
500. probe horizontal movement positioners, 501. probe horizontal movement linear bearings, 502. motions are drawn
Rod seal apparatus, 503. servo electrical machinery systems, 504. probe movement positioning tie bars, 505. optical tables.
Detailed description of the invention
In order to solve above-mentioned technical problem, the invention provides high current electronics note small area fiber probe
Detection device, this device includes high vacuum cavity 400, optical fiber YAG probe 100, flexible optical cable
200, image output detecting apparatus 300, probe horizontal movement and positioner 500.
Described high vacuum cavity 400 is laterally positioned, including two ends before and after Xiang Dui, front end is used for connecting
Described tested electronics notes drift tube, and rear end is used for disposing probe horizontal movement and positioner 500；Institute
State probe horizontal movement positioner 500 and insert described Gao Zhen from the rear end of described high vacuum cavity 400
In cavity body 400, the described optical fiber YAG probe 100 of fixing connection, make described optical fiber YAG probe
The front end of 100 can be just to described tested electronics note drift tube and along described high vacuum cavity 400
Axially positioning and motion；Described optical fiber YAG probe 100 is connected to by described flexible optical cable 200
It is positioned at the image output detecting apparatus 300 outside described high vacuum cavity 400；The output inspection of described image
Survey device 300 for gather in the front end surface of optical fiber YAG probe 100 by described tested electronics
The optical imagery of the beam current intensity distribution conversion advanced in note drift tube.
Fig. 3 is of the small area fiber YAG probe detection device of high current electronics note of the present invention
The schematic diagram of embodiment, this figure is front view, and Fig. 4 is the top view of Fig. 3.As shown in Figure 3,4,
The 200th, this detection device includes a high vacuum cavity the 400th, optical fiber YAG probe the 100th, flexible optical cable
The 300th, image output detecting apparatus pops one's head in horizontal movement and positioner 500.
Wherein, described high vacuum cavity 400 includes front port the 401st, observation window the 402nd, tie-rod sealing
Device the 403rd, chamber body 404, also can farther include mounting the 405th, discharge duct 406 and Gao Zhen
Empty gas extraction system 407.Chamber body 404 transverse horizontal is placed, including two ends before and after Xiang Dui, its
Front end has interface 401, for connecting the electronics note drift tube of measured device, it is simple to make optical fiber YAG
Probe 100 puts in the electronics note cross section electric current of this drift tube detection different cross section from chamber body 404
Density Distribution.Have an observation window 402 in the middle of the rear side of chamber body 404, as output and
The window of detection electronics note optical imagery.It is arranged above one in the rear end of chamber body 404
The blue dish of pull rod seal device 403, e.g. vacuum sealing method.High vacuum cavity 400 also includes Gao Zhen
Empty gas extraction system 407, high-vacuum exhaust system 407 passes through discharge duct 406 from chamber body 404
Front end side access high vacuum cavity 400, this gas extraction system 407 by mechanical pump, molecular pump,
Ionic pump, high vacuum valve and high vacuum pipe etc. form, and can make when the duty of single unit system
The vacuum of described chamber body 404 reaches to be better than 1 × 10-6Pa, high vacuum cavity 400 is also joined in addition
Having the mounting 405 for fixed cavity main body 404, mounting 405 can guarantee that the present invention in exhaust and work
Cavity 400 not vibration and displacement when making.
Described optical fiber YAG probe the 100th, flexible optical cable the 200th, image output detecting apparatus 300 is this
The core of invention.Described optical fiber YAG probe 100 and flexible optical cable 200 mainly include high-quality
The fibre bundle the 101st, 201 of amount optical property, in a specific embodiment, fibre bundle is by every error not
The optical fiber of the uniform cross-section surpassing the φ 0.01mm or thinner of 5% becomes φ by certain cross sectional arrangements lock ring
The bundle of 5mm or thinner, area of beam determines according to the aperture of measured device electronics drift tube.Every optical fiber
Silk is all not connect from optical fiber YAG probe 100 to flexible optical cable the 200th, again to signal output part
Head and arranging in each cross section of whole fibre bundle by same arrangement sequence number.Strictly do not have between optical fiber
There is optical signal to interfere, and fibre bundle outer layer scribbles the protection of vacuum insulation thin layer.
Fig. 5 is the schematic diagram of optical fiber YAG probe 100.As it can be seen, optical fiber YAG probe 100
Including optical fiber YAG probe the 110th, probe tailstock 120 and the probe body of rod 130.Optical fiber YAG probe
100 central authorities being placed in chamber body 404, YAG probe 110 is by electronics note cross section current strength
Distributed image is changed into the intensity distribution image of light.Described optical fiber YAG probe 110 is positioned at described spy
The front end of shank body 130；Probe tailstock 120 includes that the 121st, probe tail end fibre bundle retainer ring fixes
Connecting rod 122, probe tail end fibre bundle retainer ring 121 is fixed in the rear end of the probe body of rod 130, Gu
Determine connecting rod 122 and be fixedly connected on the periphery of probe tail end optical fiber retainer ring 121.Probe tailstock 120
The probe body of rod 130 is fastened in the horizontal direction the leading section of probe horizontal movement positioner 500
And make YAG probe 100 without any rotation.With the accurate of horizontal movement positioner 500 of popping one's head in
Positioning, moving, the electronics that YAG probe 100 can stretch into measured device is noted in drift tube round accurate
Positioning, motion.
The described probe body of rod 130 includes that the vacuum that the 101st, fibre bundle is coated in outside fibre bundle 101 is exhausted
Edge sealing material coating 102 and the flexible rind outside coating 102 131.Flexible rind 131
Can be used for supporting probe rod by having resilient spring steel band strip or the winding of other elastic vacuum materials
The collimating status of body 130 and can slight elasticity bending, it is simple to optical fiber YAG probe 100 with probe
The close measured device electronics note drift inner telescoping tube of 100 diameters.One critical function of flexible rind
It is the beam current guiding bombardment on optical fiber YAG probe 110, prevent electronics heap on YAG thin layer
Collection, rejection electronics is to fluoroscopic bombardment.
Fig. 6 is the structural representation of optical fiber YAG probe 110.As shown in Figure 6, optical fiber YAG visits
110 include the YAG thin layer 111 being plated in the front end face of fibre bundle 101 flat smooth, at thin layer
The outer surface of 111 is provided with a molybdenum thin layer 112, and the periphery in the front end of probe 110 is provided with spy
Pin front end fibre bundle retainer ring 113 and probe protection ring 114, probe protection ring 114 overlapping portions in
The outer end of probe front fibre bundle retainer ring 113.The effect of probe 110 is for detecting tested device
The cross section CURRENT DISTRIBUTION of part electronics note, and it is translated into optical imagery.
As shown in Figure 4, image output detecting apparatus 300, including in the position seals of observation window 402
Transparent optical element the 301st, be positioned at outside chamber body 404 and the CCD of viewed straight-on window 402
Camera 302, and it is fixed on the detecting instrument support that chamber body supports CCD camera 302 for 404 times
Platform 303.CCD camera 302 is for detecting and recording the optical imagery of fibre bundle 201 end.
Transparent optical element 301 e.g. planar wave glass.
As shown in Figure 3, Figure 4, flexible optical cable 200 includes that optical fiber YAG probe 100 extends out,
The vacuum material of the fibre bundle being extended by the optical fiber tow 101 of same bundle cable the 201st, fibre bundle outer application
Material external coating 202 and the fibre bundle end snap ring 203 of fibre bundle end fastening.As previously mentioned wherein
201 is exactly the same prolongation bundle of fibre bundle 101, and external coating 202 is exactly 102 same external coatings,
But this optical cable extending is relatively soft, can be stacked in bottom chamber body 404 by dish, can be by optical fiber YAG
The optical imagery of probe conversion is delivered on the smooth end face of fibre bundle end without distortions.Fibre bundle end
End snap ring 203 vacuum glue is adhesively fixed on the transparent optical of chamber body 404 lateral blister 402
The middle position of element 301 medial surface.Whole piece optical cable is from the beginning of probe 100, and its every optical fiber exists
Fibre bundle middle section spread geometry, sequence of positions all strict conformances, every silk all even thickness and nothing connect
Head.The optical imagery making probe 110 change accurately is delivered in fibre bundle distal end faces.
Described image output detecting apparatus 300 is by transparent optical element the 301st, optical imagery detector
The 02nd, device CCD3 supports what the detecting instrument platform 303 of CCD 302 formed.Transparent optical element
301 direct vacuum are sealed on the ring flange of observation window 402, and CCD 302 is straight through this glass 301
Connect the optical imagery that the beam current intensity distribution gathering in fibre bundle distal end faces is converted.
As shown in Figure 3, Figure 4, horizontal movement positioner 500 of popping one's head in is positioned at chamber body 404
The central upper of rear end, including probe horizontal movement linear bearing is the 501st, with the motion of lengthy bellows
Pull rod seal device the 502nd, servo electrical machinery system the 503rd, probe movement positioning tie bar 504 and optics are put down
Platform 505.Probe movement pull bar 504 is by motion pull rod seal device 502 and pull rod seal device 403
Cooperation stretch into the inside of chamber body 404.Servo electrical machinery system 503 carries on optical table 505
Dynamic probe movement positioning tie bar 504 horizontal movement, thus drive optical fiber YAG probe 100 being surveyed
Precise motion positioning in the electronics drift tube of device.Wherein optical table the 505th, linear bearing 501 is protected
Demonstrate,prove the motion pull bar 504 transverse horizontal depth of parallelism at the volley.Servo electrical machinery system 503 ensure that
Motion pull bar precise displacement at the volley and positioning, precision is within 0.05mm.At motion pull bar
Fixed connecting rod 122 is passed through in the end of 504, can the probe tail end optical fiber of firm fixing probe tailstock solid
Determine ring 121 and ensure to drive probe 100 not rotate, synchronization and pull bar 504 precise motion positioning.
Operation principle of the present invention
The present invention utilizes YAG crystal to send the characteristic of 550nm wavelength yellow-green light when being excited, and
Modern optical-fibre communications can make diameter 0.01mm following high quality optical performance fiber silk and to do poling tight
The technological achievement of the optical fiber cable of the high capacity transmission optical information of solid matter row and operation principle.
1st, YAG crystal is utilized to be excited to send the characteristic of 550nm wavelength green-yellow light: at present invention tool
Body embodiment is used two kinds of forms.
The first is when electronics notes modulation voltage at below 40kV, and we use the directly bombardment of electronics note
The form of YAG crystallo-luminescence.YAG thin crystal layer thickness 0.1～0.5mm, plates before YAG thin layer
Molybdenum thin layer about about 0.1～1 μm makes incident electron note energy be reduced to below 10keV, then bombards
YAG crystal inspires green-yellow light.In this state beam current Density Distribution be excited YAG
The intensity distribution of crystallo-luminescence is directly proportional, and uses light intensity distributions image to detect beam current
Density Distribution image.In the present embodiment, molybdenum thin layer can also stop the ruddiness that electron gun heating negative electrode sends
The interference being formed through anode hole.Also to select according to different electronics note modulation voltages in the present embodiment
Different-thickness molybdenum thin layer, prevents the impervious molybdenum layer of electronics note or light image to be too secretly not easy to measurement.
Its two be if electronics note modulation voltage higher than 40kV when it is necessary to use X-ray bremsstrahlung side
Formula.Select thicker molybdenum layer, make electronics note bombardment molybdenum sheet produce X-ray and excited YAG brilliant by X-ray again
Body sends the green-yellow light image of 550nm wavelength, same, can use light intensity distributions image and detect
Beam current Density Distribution image.It is to be noted the YAG light image that X-ray bremsstrahlung produces
Spatial resolution electronics to be less than note directly bombards the spatial resolution that YAG crystallo-luminescence produces, and
Relevant with molybdenum layer thickness.In this mode, electronics cannot pass through molybdenum layer, and it is micro-that molybdenum layer thickness is generally number
Rice arrives hundreds of microns.It should be noted that the too thick meeting of molybdenum layer causes X-ray to be absorbed by molybdenum layer cannot be
Form green-yellow light image on YAG crystal.It is however emphasized that it is noted that electricity in order to prevent excess energy
Son note damages YAG crystal and molybdenum layer, and the electronics note modulation voltage that we use in the present embodiment is
Pulse narrow spaces mode, pulsewidth is from hundreds of nanoseconds to several microseconds.
2nd, the optical fiber technology in modern communication is utilized.Current optical fiber can accomplish that diameter is less than 0.01mm,
Between optical fiber, information does not interfere with each other, and more conveniently light can curve transmission in a fiber.At this
Embodiment can make optical fiber YAG probe diameter below several millimeters, and obtain high spatial resolution,
That can also do high vacuum cavity is short and small.
Compared with prior art, the invention has the beneficial effects as follows:
One, can make the drift tube using close to high-frequency microwave electron tube high current electronics note pencil
The size of bore the optical fiber YAG going deep in electron beam channel pop one's head in, it is achieved be less than 10mm to diameter
So that the device electronic of about 1mm is noted in drift tube electron gun and Electronic beam focusing transmitting procedure
Electro-optical performance detect, this is that existing equipment cannot realize.
Its two, can obtain electronics note Section Space resolution ratio reach 0.03mm within high-resolution
Level, meets the purpose of Accurate Analysis research.
They are three years old, it is achieved light path curve is propagated, and can reduce the size of chamber body, save detection auxiliary
Cost and space, decrease simultaneously and crossed long light-path, light in detection record image transmitting process in the past
Learn the Refractive focusing process of instrument and the aberration of generation and distortion.
Its four, the present invention can be as parts by optical fiber probe the 100th, flexible optical cable the 200th, image
Output detecting apparatus 300 accesses in horizontal high current electronics note analyzer and uses.
Particular embodiments described above, is carried out to the purpose of the present invention, technical scheme and beneficial effect
Further describe it should be understood that the foregoing is only the specific embodiment of the present invention,
Being not limited to the present invention, the YAG crystal of such as optical fiber YAG probe can use other high-resolution
Fluorescent material substitutes；And for example the metal molybdenum thin layer for reducing added by electron bombardment energy can use other metals
Stainless steel, oxygen-free copper etc. substitute；For another example electron beam channel is not deformed sections optical fiber that is circular and that make
YAG probe etc..All within the spirit and principles in the present invention, any modification of being made, equivalent replace
Change, improvement etc., should be included within the scope of the present invention.
Claims (10)
1. the small area fiber YAG probe detection device of high current electronics note, is used for detecting tested
The electro-optical performance of the electronics note advanced in electronics note drift tube, it is characterised in that include high vacuum
Cavity (400), optical fiber YAG probe (100), flexible optical cable (200), image output detections
Device (300) and probe horizontal movement positioner (500)；Wherein,
Described high vacuum cavity (400) is laterally positioned, including two ends before and after Xiang Dui, front end is used for
Connecting described tested electronics note drift tube, rear end is used for disposing described probe horizontal movement positioner
(500)；
Described probe horizontal movement positioner (500) is from the rear end of described high vacuum cavity (400)
Insert in described high vacuum cavity (400), described optical fiber YAG probe (100) of fixing connection,
Enable the front end of described optical fiber YAG probe (100) just to described tested electronics note drift tube edge
Axially positioning and the motion of described high vacuum cavity (400)；
Described optical fiber YAG probe (100) is connected to be positioned at institute by described flexible optical cable (200)
State the outside image output detecting apparatus (300) of high vacuum cavity (400), described optical fiber YAG
Probe (100) and flexible optical cable (200) include fibre bundle, and described fibre bundle is not surpassed by every error
The optical fiber arrangement lock ring of the uniform cross-section of the φ 0.01mm or thinner of 5% becomes φ 5mm or thinner
Bundle, every optical fiber is from optical fiber YAG probe (100) to flexible optical cable (200), again to signal
Output, is all not have joint and arrange in each cross section of whole fibre bundle by same arrangement sequence number；
Before described image output detecting apparatus (300) is used for gathering optical fiber YAG probe (100)
The beam current intensity distribution being noted traveling in drift tube by described tested electronics on end end face, and turn
Turn to optical imagery.
2. the small area fiber YAG probe detection device of high current electronics note as claimed in claim 1,
It is characterized in that, described high vacuum cavity (400) include front port (401), observation window (402),
Pull rod seal device (403) and chamber body (404), wherein,
Described chamber body (404) transverse horizontal is placed, including two ends before and after Xiang Dui；
Described front port (401) is positioned at the front end of described chamber body (404), is used for connecting described
Tested electronics notes drift tube；
Described observation window (402) is positioned in the middle of the rear side of described chamber body (404), as
The window of output electronics note optical imagery；
Described pull rod seal device (403) is positioned at the surface of the rear end of described chamber body (404),
Seal described probe horizontal movement positioner (500) for vacuum.
3. the small area fiber YAG probe detection device of high current electronics note as claimed in claim 1,
It is characterized in that, described optical fiber YAG probe (100) includes optical fiber YAG probe (110), visits
Backshank seat (120) and the probe body of rod (130), wherein,
Described optical fiber YAG probe (110) is positioned at the front end of the described probe body of rod (130)；
The described probe body of rod (130) is fastened on institute by described probe tailstock (120) in the horizontal direction
State the leading section of probe horizontal movement positioner (500).
4. the small area fiber YAG probe detection device of high current electronics note as claimed in claim 3,
It is characterized in that, described probe tailstock (120) include probe tail end fibre bundle retainer ring (121) and
Fixed connecting rod (122), described probe tail end fibre bundle retainer ring (121) is fixed in the probe body of rod
(130) rear end, described fixed connecting rod (122) is fixedly connected on probe tail end optical fiber retainer ring
(121) periphery.
5. the small area fiber YAG probe detection of high current electronics note as described in claim 3 or 4
Device, it is characterised in that the described probe body of rod (130) includes fibre bundle (101), is coated in light
The vacuum insulation sealing material coating (102) in fine bundle (101) outside and in coating (102) outward
The flexible rind (131) of side, described flexible rind (131) is wound around by elastic vacuum material.
6. the small area fiber YAG probe detection device of high current electronics note as claimed in claim 3,
It is characterized in that, described optical fiber YAG probe (110) includes the front end being plated in fibre bundle (101)
The YAG thin layer (111) in face, the outer surface described YAG thin layer (111) is provided with a molybdenum
Thin layer (112).
7. the small area fiber YAG probe detection device of high current electronics note as claimed in claim 6,
It is characterized in that, the periphery in the front end of optical fiber YAG probe (110) is provided with probe front optical fiber
Bundle retainer ring (113) and probe protection ring (114), described probe protection ring (114) part is folded
It is placed in the outer end of probe front fibre bundle retainer ring (113).
8. the small area fiber YAG probe detection device of high current electronics note as claimed in claim 2,
It is characterized in that, described image output detecting apparatus (300) includes at described observation window (402)
It the transparent optical element (301) of position seals, is positioned at chamber body (404) outside and faces sight
Examine the CCD camera (302) of window (402), and be fixed under chamber body (404) support
Platform (303) supported by the detecting instrument of CCD camera (302).
9. the small area fiber YAG probe detection device of high current electronics note as claimed in claim 8,
It is characterized in that, described flexible optical cable (200) includes being prolonged by described optical fiber YAG probe (100)
The fibre bundle (201) stretched, the vacuum material external coating (202) of fibre bundle outer application and
Fibre bundle end snap ring (203) of fibre bundle end fastening, described fibre bundle end snap ring (203)
It is fixed on the transparent optical element (301) of the observation window (402) of the inner side of chamber body (404)
Middle position.
10. the small area fiber YAG of high current electronics note as according to any one of claim 2-4
Probe detection device, it is characterised in that
Described probe horizontal movement positioner (500) is positioned at the rear end of described chamber body (404)
Central upper, including probe horizontal movement linear bearing (501), the motion with lengthy bellows
Pull rod seal device (502), servo electrical machinery system (503), probe movement positioning tie bar (504)
And optical table (505), wherein,
Described probe movement pull bar (504) is by described motion pull rod seal device (502) and described
The inside of chamber body (404) is stretched in the cooperation of pull rod seal device (403)；
Described servo electrical machinery system (503) is in the described probe fortune of the upper drive of described optical table (505)
Dynamic positioning tie bar (504) horizontal movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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