CN111854587B - Guide rail five-degree-of-freedom motion error online measurement device and method - Google Patents
Guide rail five-degree-of-freedom motion error online measurement device and method Download PDFInfo
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- CN111854587B CN111854587B CN202010705645.0A CN202010705645A CN111854587B CN 111854587 B CN111854587 B CN 111854587B CN 202010705645 A CN202010705645 A CN 202010705645A CN 111854587 B CN111854587 B CN 111854587B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention belongs to the field of precision mechanical error measurement, and discloses a device and a method for measuring five-degree-of-freedom motion errors of a guide rail on line. The device consists of five eddy current displacement sensors which are embedded into a motion platform and are arranged according to a certain rule, wherein the eddy current sensors measure the displacement change of different positions of a guide rail relative to a reference straight line in the motion process. The invention adopts the plane with general precision as the measuring reference, realizes the high-precision, real-time and non-contact measurement of the five-degree-of-freedom error of the guide rail by eliminating the influence of the measuring reference plane on the measurement of the five-degree-of-freedom error of the guide rail, solves the problem that a single-parameter measuring device cannot carry out on-line measurement, has stronger anti-interference capability of a measuring system, and can realize the stability measurement in the actual working condition. And the influence of the reference on the measurement of the error of the guide rail is considered and reduced when the error of the five degrees of freedom of the guide rail is actually measured.
Description
Technical Field
The invention belongs to the field of precision mechanical error measurement, and particularly relates to a device and a method for measuring five-degree-of-freedom motion errors of a guide rail on line.
Background
When the guide rail kinematic pair moves along the linear guide rail, six-degree-of-freedom errors, namely a positioning error along the guide rail direction, a two-dimensional linearity error (a horizontal linearity error and a vertical linearity error) perpendicular to the guide rail direction, a two-dimensional angle error (a pitch angle error and a yaw angle error) and a roll angle error exist. The motion errors of the guide rail are generally measured by an off-line method, but when the manufacturing equipment is in the machining process, due to the influence of cutting force and the like, the motion errors are different from the measurement results obtained by the off-line measurement method, so that the machining precision and the production efficiency of the manufacturing equipment can be improved by rapidly and accurately detecting the errors in real time. In 6 errors in the guide rail movement, the general positioning error can be measured by a grating ruler of the numerical control machine tool, and the other five geometric errors are the key points of the guide rail error measurement. At present, devices such as a level meter, a laser interferometer and a collimator can only realize the measurement of single-parameter or two-degree-of-freedom errors, the measurement of the multi-degree-of-freedom errors of the guide rail can be realized only by measuring for many times, the measurement belongs to off-line measurement, the on-line measurement cannot be realized, and time and labor are wasted. The device for measuring the motion error of the guide rail with multiple degrees of freedom developed by the companies of Renyshao and the like can obtain the motion error of the guide rail with multiple degrees of freedom by one-time measurement, has the characteristics of high measurement speed and the like, and belongs to an off-line measurement method.
Disclosure of Invention
In order to solve the problems, the invention provides a method and a device for measuring errors of five degrees of freedom of a guide rail on line.
In the measuring process, the eddy current displacement sensors can measure the straightness errors in the horizontal direction and the vertical direction relative to the reference plane when the guide rail sliding block moves, and the two eddy current displacement sensors arranged according to a certain rule respectively realize the measurement of the yaw angle error, the pitch angle error and the roll angle error.
Different from the prior art, the invention adopts a plane with general precision as a measurement reference and realizes accurate measurement by eliminating the influence of the measurement reference plane on the five-degree-of-freedom error measurement of the guide rail. The reference plane may be an existing bed plane of the machine tool, or may be separately attached to the machine tool. The method is conveniently integrated in the machine tool without extra and excessive cost increase.
A five-degree-of-freedom error online measuring device for a guide rail comprises two reference surfaces, the guide rail, five eddy current displacement sensors, a motion platform, two connecting plates and a calibration device; the guide rail is arranged on the reference surface B, and the two guide rail sliding blocks form a moving platform through an upper connecting flat plate and slide along the guide rail; the reference surface A is parallel to the sliding direction of the guide rail; the connecting plate A and the connecting plate B are symmetrically arranged on two sides of the moving platform, the eddy current displacement sensor A and the eddy current displacement sensor B are vertically arranged on the connecting plate A, and a connecting line of the two eddy current sensors is parallel to the moving direction of the guide rail and forms a pitch angle measuring unit with the reference plane B; the eddy current displacement sensor C is vertically arranged on the connecting plate B, is perpendicular to the motion direction of the guide rail and is connected with the eddy current sensor B to form a roll angle measuring unit with the reference plane B; the eddy current displacement sensor D and the eddy current displacement sensor E are horizontally arranged on the connecting plate B, the connecting line of the two eddy current sensors is parallel to the motion direction of the guide rail, and a deflection angle measuring unit is formed by the connecting line and the reference plane A;
in the process that the guide rail sliding block moves along the guide rail, the eddy current can scan a straight line on the reference surface A, and the probes of the eddy current displacement sensor D and the probe E are positioned on the side surface of the scanning straight line; two scanning straight lines are arranged on the reference surface B, and probes of the eddy current displacement sensor A, the eddy current displacement sensor B and the eddy current displacement sensor C are respectively positioned above the scanning straight lines.
The calibration device comprises a collimator, an autocollimator and a level meter.
The method for measuring the five-degree-of-freedom error of the guide rail by the online measuring device comprises the following steps of:
step 1: calibrating the variable quantity generated by the reference surfaces A and B for the five-degree-of-freedom error measurement of the guide rail;
step 1-1, firstly fixing a four-quadrant receiver of a laser collimator on a moving platform, so that the distance between a measuring axis of the collimator and eddy current displacement sensors C and D is minimum, and the influence of Braun error is reduced; measuring once at the same distance from the starting point of the guide rail until the whole guide rail stroke is measured, and recording the numerical values of the collimator and the eddy current displacement sensors C and D;
step 1-2: fixing a target lens of the autocollimator on a moving platform, and enabling a measuring axis of the autocollimator to be parallel to a connecting line of the eddy current displacement sensor A and the eddy current displacement sensor B and to be parallel to the moving direction of the guide rail; measuring once at the same distance from the starting point of the guide rail until the whole guide rail stroke is measured, and recording the measurement data of the pitch angle and the yaw angle of the autocollimator, the numerical value of a pitch angle measurement unit consisting of the eddy current displacement sensor A and the eddy current displacement sensor B, and the numerical value of a yaw angle measurement unit consisting of the eddy current displacement sensors D and E;
step 1-3: fixing the level meter on the motion platform, so that the measuring axis of the level meter is parallel to the connecting line of the eddy current displacement sensors B and C and is vertical to the motion direction of the guide rail; measuring once at the same distance from the starting point of the guide rail until the whole guide rail stroke is measured, and recording the numerical value of a roll angle measuring unit consisting of a level meter and eddy current displacement sensors B and C;
step 1-4: calculating the variation of the reference surface error on the measurement of the straightness errors in the vertical direction and the horizontal direction according to the values of the collimator and the eddy current displacement sensors C and D; calculating the angle variation generated by the measurement of the reference surface error to the pitch angle error by the autocollimator and the pitch angle measuring unit; calculating the angle variation generated by the measurement of the deviation angle error by the reference surface error through the autocollimator and the deviation angle measuring unit; calculating the angle variation generated by the reference surface error to the roll angle error measurement by the level meter and the roll angle measuring unit;
step 1-5: performing least square fitting on the variation generated by measuring the five-degree-of-freedom error of the guide rail by the reference surface error obtained in the steps 1-1 to 1-4, establishing an optimal fitting function, and fitting to obtain the variation generated by measuring the five-degree-of-freedom error by the reference surface error of any point in the whole stroke; the calibrated reference surface is used as the reference for measuring the five-degree-of-freedom error of the guide rail, error compensation is carried out, and the measuring precision is ensured;
step 2: measuring five-degree-of-freedom error of the guide rail;
step 2-1: sliding the motion platform along the guide rail, and respectively scanning the corresponding references by the five probes of the eddy current displacement sensor;
step 2-2: in the process of measuring the straightness error of the guide rail, compensating the variation generated by measuring the straightness error by the reference fitted in the step 1-5 through an error compensation method for the numerical values of the eddy current displacement sensors C and D at any position, namely calculating the straightness error of the guide rail;
step 2-3: in the process of measuring errors of the pitch angle and the yaw angle of the guide rail, the value of a pitch angle measuring unit at any position compensates the angle variation generated by measuring the pitch angle error by the reference fitted in the step 1-5 by an error compensation method, namely the pitch angle error of the guide rail is calculated; the numerical value of a yaw angle measuring unit at any position compensates the angle variation generated by the yaw angle error measurement by the reference fitted in the step 1-5 through an error compensation method, namely the yaw angle error of the guide rail is calculated;
step 2-4: the rolling angle measuring unit value at any position in the rolling angle error measuring process of the guide rail compensates the angle variation generated by the rolling angle error measurement by the reference fitted in the step 1-5 through an error compensation method, namely the rolling angle error of the guide rail is calculated;
step 2-5: analyzing the motion state of the guide rail: and sequentially measuring the straightness errors, the pitch angle errors, the yaw angle errors and the roll angle errors of all the points of the guide rail on line according to the step 2-2, the step 2-3 and the step 2-4.
The invention has the advantages of realizing high-precision, real-time and non-contact measurement of the five-degree-of-freedom error of the guide rail, solving the problem that a single-parameter measuring device cannot carry out on-line measurement, having stronger anti-interference capability of a measuring system and realizing stability measurement in actual working conditions. And the influence of the reference on the measurement of the error of the guide rail is considered and reduced when the error of the five degrees of freedom of the guide rail is actually measured.
Drawings
FIG. 1 is a schematic view of a guide rail straightness calibrating device;
FIG. 2 is a schematic diagram of a device for calibrating the pitch angle and yaw angle of a guide rail;
FIG. 3 is a schematic view of a rail roll angle calibration apparatus;
FIG. 4 is a schematic diagram of a five-degree-of-freedom error measuring device for a guide rail;
FIG. 5 is a guide rail straightness calibration schematic;
FIG. 6 is a schematic diagram of the calibration of the pitch angle and yaw angle of the guide rails;
FIG. 7 is a schematic diagram of rail roll angle calibration;
in the figure: 1, a reference surface A; 2, a guide rail; 3, a reference plane B; 4, a motion platform; 5, an eddy current displacement sensor A; 6 connecting the board A; 7, an eddy current displacement sensor B; 8, an eddy current displacement sensor C; 9 electric eddy current displacement sensor D; 10 connecting the board B; 11 electric eddy current displacement sensor E; 12 a collimator; 13 an autocollimator; 14 level gauge.
Detailed Description
The technical scheme of the invention is described in detail in the following by combining the drawings and specific examples.
An embedded guide rail five-degree-of-freedom error online measuring device comprises reference planes A1 and B3, a guide rail 2, a motion platform 4, eddy current displacement sensors A5, B7, C8, D9 and E11 and connecting plates A6 and B10; the calibration device comprises a collimator 12, an autocollimator 13 and a level meter 14; the measurement method is as follows:
Step 1-1: as shown in the five-degree-of-freedom error measuring device of the guide rail in fig. 4, the eddy current displacement sensors a5 and B7 are embedded into the connecting plate a6, the eddy current displacement sensors C8, D9 and E11 are embedded into the connecting plate B11, and then the sensors are fixed on the moving platform 4 as a whole;
step 1-2: adjusting the mounted eddy current displacement sensors A5 and B7 to ensure that the sensor probes are perpendicular to the moving platform 4 and the connecting line of the two probes is parallel to the moving direction of the guide rail; adjusting the eddy current displacement sensors B7 and C8 to ensure that the sensor probes are perpendicular to the motion platform 4 and the connecting line of the two probes is perpendicular to the motion direction of the guide rail; adjusting the eddy current displacement sensors D9 and E11 to ensure that the displacement sensor probes are perpendicular to the motion platform 4 and the connecting line of the two probes is parallel to the motion direction of the guide rail;
step 1-3: the laser collimator 12, the autocollimator 13 and the photoelectric level meter 14 are respectively used as reference instruments for measuring straightness errors, yaw angle and pitch angle errors and roll angle errors of the motion platform in two directions, motion error parameters of the guide rail motion platform are measured, and compared with eddy current measurement data provided by the invention, the influence of geometric errors of the reference surface 3 and the reference surface 1 on measurement of each degree of freedom error is calculated and analyzed, and then compensation is carried out. As shown in fig. 1, the straightness calibrating device comprisesThe four-quadrant receiver of the collimator 12 is fixed on the moving platform 4, so that the distance between the measuring axis of the collimator 12 and the eddy current displacement sensors C8 and D9 is minimum, and the influence of Braun error is reduced; starting from the start of the guide rail 2, measurements are made at the same distance until the complete guide rail travel is measured and the values Z 'of the collimator 12 and of the eddy current displacement sensors C8 and D9 are recorded'CiAnd X'Di(i ═ 1,2,3, …, n), as shown in the straightness calibration diagram of FIG. 5, Z'CiAnd X'DiIncluding the rail straightness error and the amount of change in the rail straightness measurement from the reference.
Step 1-4: measuring distance L between A5 and B7 of eddy current displacement sensor1Distance L between eddy current displacement sensors D9 and E113As shown in fig. 2, the calibration device for the pitch angle and the yaw angle fixes the objective lens of the autocollimator 13 on the moving platform 4, so that the measuring axis of the autocollimator 13 is parallel to the connecting line of the eddy current displacement sensors a5 and B7 and the connecting line of the eddy current displacement sensors D9 and E11; and measuring once at the same distance from the starting point of the guide rail 2 until the whole guide rail travel is measured, and recording the measurement data of the pitch angle and the yaw angle of the autocollimator 13, the numerical value of a pitch angle measurement unit consisting of eddy current displacement sensors A5 and B7 and the numerical value of a yaw angle measurement unit consisting of eddy current displacement sensors D9 and E11. As shown in the calibration schematic diagram of the pitch angle and the yaw angle in fig. 6, the values of the pitch angle measurement unit and the yaw angle measurement unit are calculated by the formula (1);
in formula (II), Z'Ai、Z′Bi、X′DiAnd X'EiRespectively the values of the current eddy currents A5, B7, D9 and E11, alphai' and betaiThe measurement unit data of the yaw angle and the pitch angle comprises errors of the yaw angle and the pitch angle of the guide rail and angle variation generated by measuring the yaw angle and the pitch angle of the guide rail by a reference, and the measurement principle of the yaw angle is the same as that of the pitch angle;
step 1-5: measuring the eddy current positionDistance L between displacement sensors B7 and C82As shown in the roll angle calibration device in fig. 3, the level gauge 14 is fixed on the moving platform 4, so that the measuring axis of the level gauge 14 is parallel to the connecting line of the eddy current displacement sensors B7 and C8 and is perpendicular to the moving direction of the guide rail; starting from the starting point of the guide rail 2, measurements are carried out once at the same distance until the entire guide rail travel is measured, and the roll angle measuring unit values of the level gauge 14 and the eddy current displacement sensors B7 and C8 are recorded. As shown in the roll angle calibration diagram of fig. 7, the roll angle measurement unit value is calculated by formula (2);
in formula (II), Z'BiAnd Z'CiRespectively the values of eddy current propagation B7 and C8, gamma'iThe roll angle measuring unit data comprises the guide rail roll angle error and the angle variation generated by the measurement of the reference to the guide rail roll angle;
step 1-6: after the above steps are completed, the value Z 'of the collimator 12 and the eddy current displacement sensors C8 and D9'CiAnd X'DiCalculating the variation Z' of the reference surface error on the measurement of the straightness errors in the vertical and horizontal directions by the formula (3)CiAnd X ″)Di，
In the formula, ZCiAnd XDiRespectively measuring the straightness errors of the guide rail in the vertical direction and the horizontal direction by the collimator;
from autocollimator 13 and pitch angle measurement Unit value α'iAnd yaw angle measurement unit value β'iCalculating the angle variation alpha' generated by measuring the pitch angle and the yaw angle by the reference surface error through a formula (4)iAnd beta ″)i，
In the formula, alphaiAnd betaiRespectively measuring errors of a guide rail pitch angle and a yaw angle measured by an autocollimator;
from the level gauge 14 and the roll angle measuring unit numerical value γ'iCalculating the angle variation gamma' generated by measuring the reference surface error and the rolling angle error by the formula (5)i；
γ″i＝γi-γ′i(i＝1,2,3,…,n) (5)
In the formula, gammaiThe error of the guide rail rolling angle measured by the level meter;
step 1-7: performing least square fitting on the variation generated by measuring the five-degree-of-freedom error of the guide rail by the reference surface error obtained in the steps 1-3 to 1-6, establishing an optimal fitting function, and fitting to obtain the variation generated by measuring the five-degree-of-freedom error by any point in the whole stroke;
demarcating n points, recording the position y of the guide rail 2iThe reference measures the error of the vertical and horizontal direction straightness, pitch angle, yaw angle and roll angle of the guide rail to generate variable quantity ZC(yi)、XD(yi)、α(yi) And beta (y)i) And gamma (y)i) (i ═ 1,2,3, …, n), each yiCorresponds to a ZC(yi)、XD(yi)、α(yi) And beta (y)i) And gamma (y)i). Based on the least square principle, an optimal harmonic fitting function Z is establishedC(y)、XD(y), α (y), β (y), and γ (y), as shown in equation (6), it can be seen from the sampling theorem that when the number n of index points is an even number, only m is calculated as n/2 order coefficient; when n is an odd number, only m ═ 1)/2 order coefficients can be calculated.
Because the five geometric error fitting functions of the guide rail are similar, only the vertical straightness fitting function is explained, wherein Z isC(y)＝[ZC(y1)，ZC(y2)，…，ZC(yi)，…，ZC(yn)]，y＝[y1，y2，…，yi，…，yn]，
m is the highest order number of which the height difference harmonic can be calculated, AkAnd BkIs the k-th order error harmonic coefficient, CkAnd
the amplitude and phase of the k-th error harmonic.
Solving the k-th order error harmonic coefficient A by least square methodkAnd BkAnd then the amplitude C is obtainedkAnd phase
The variable quantity Z generated by the error of the reference surface of any point in the whole stroke to the error measurement of the five degrees of freedom is obtained by fittingC(yj)、XD(yj)、α(yj) And beta (y)j) And gamma (y)j) (j is 1,2,3, …), the calibrated reference surface is used as the reference of the five-degree-of-freedom error measurement of the guide rail, error compensation is carried out, and the precision of the five-degree-of-freedom error measurement of any point of the guide rail, y, is ensuredjShowing the arbitrary movement position of the guide rail 2 at the time of a specific measurement.
Step 2: five-degree-of-freedom error measurement of guide rail
Step 2-1: as shown in fig. 4, the moving platform 4 slides along the guide rail 2, and the five probes of the eddy current displacement sensor scan the corresponding references respectively; the five eddy current displacement sensors embedded in the motion platform and the motion platform 4 are regarded as a whole (at the moment, the readings of the collimator 12, the autocollimator 13 and the level gauge 14 are not read), and the relative position relationship of all the parts is consistent with that during calibration;
step 2-2: in the process of measuring the straightness error of the guide rail, the variation Z generated by measuring the straightness error of the reference fit in the step 1-7 through an error compensation formula (7)C(yj) And XD(yj) Compensating, namely calculating the straightness error of any point of the guide rail 2;
step 2-3: in the process of measuring errors of the pitch angle and the yaw angle of the guide rail, measuring the angle variation alpha (y) generated by measuring the errors of the pitch angle and the yaw angle by the reference fitted in the step 1-7 through an error compensation formula (8)j) And beta (y)j) Compensating, namely calculating the pitch angle and the yaw angle error of any point of the guide rail 2;
step 2-4: in the process of measuring the rolling angle error of the guide rail, the angle variation gamma (y) generated by measuring the rolling angle error of the reference pair fitted in the steps 1-7 is measured by an error compensation formula (9)j) Compensating, namely calculating the rolling angle error of any point of the guide rail 2;
γj＝γ′j+γ(yj)(j＝1,2,3,…) (9)
step 2-5: analyzing the motion state of the guide rail 2: and (3) sequentially measuring the straightness errors, the pitch angle errors, the yaw angle errors and the roll angle errors of all the points of the guide rail 2 on line according to the step 2-2, the step 2-3 and the step 2-4.
The invention can simultaneously detect five-degree-of-freedom errors of the guide rail on line, has stronger anti-interference capability of a measurement system and is suitable for actual working conditions.
Claims (3)
1. The five-degree-of-freedom error online measuring device for the guide rail is characterized by comprising two reference surfaces, the guide rail (2), five eddy current displacement sensors, a motion platform (4), two connecting plates and a calibration device; the guide rail (2) is arranged on a reference surface B (3), and the two guide rail sliding blocks are connected with a flat plate through the upper part to form a moving platform (4) and slide along the guide rail (2); the reference surface A (1) is parallel to the sliding direction of the guide rail (2); the connecting plate A (6) and the connecting plate B (10) are symmetrically arranged on two sides of the moving platform (4), the eddy current displacement sensor A (5) and the eddy current displacement sensor B (7) are vertically arranged on the connecting plate A (6), the connecting line of the two eddy current displacement sensors is parallel to the moving direction of the guide rail, and the connecting line and the reference plane B (3) form a pitch angle measuring unit; the eddy current displacement sensor C (8) is vertically arranged on the connecting plate B (10), is perpendicular to the motion direction of the guide rail along the connecting line of the eddy current displacement sensor B (7), and forms a roll angle measuring unit with the reference plane B (3); the eddy current displacement sensor D (9) and the eddy current displacement sensor E (11) are horizontally arranged on the connecting plate B (10), the connecting line of the two eddy current displacement sensors is parallel to the motion direction of the guide rail, and the connecting line and the reference plane A (1) form a yaw angle measuring unit;
in the process that the guide rail sliding block moves along the guide rail, the eddy current can scan a straight line on the reference surface A (1), and probes of an eddy current displacement sensor D (9) and an eddy current displacement sensor E (11) are positioned on the side surface of the scanning straight line; two scanning straight lines are arranged on the reference surface B (3), and probes of the eddy current displacement sensor A (5), the eddy current displacement sensor B (7) and the eddy current displacement sensor C (8) are respectively positioned above the scanning straight lines.
2. The on-line measuring device for five-degree-of-freedom error of guide rail according to claim 1, characterized in that the calibration device comprises a collimator (12), an autocollimator (13) and a level (14).
3. The method for measuring five-degree-of-freedom error of the guide rail by adopting the online measuring device as claimed in claim 2 is characterized by comprising the following steps:
step 1: calibrating the variable quantity generated by measuring the five-degree-of-freedom error of the guide rail by the reference surfaces A (1) and B (3);
step 1-1, firstly, fixing a four-quadrant receiver of a laser collimator (12) on a moving platform (4), so that the distance between a measuring axis of the collimator (12) and eddy current displacement sensors C (8) and D (9) is minimum, and the influence of Braun error is reduced; measuring once at the same distance from the starting point of the guide rail (2) until the whole guide rail stroke is measured, and recording the numerical values of a collimator (12) and eddy current displacement sensors C (8) and D (9);
step 1-2: fixing a target lens of an autocollimator (13) on a moving platform (4), and enabling a measuring axis of the autocollimator (13) to be parallel to a connecting line of an eddy current displacement sensor A (5) and an eddy current displacement sensor B (7) and to be parallel to the moving direction of a guide rail; measuring once at the same distance from the starting point of the guide rail (2) until the whole guide rail travel is measured, and recording the measurement data of the pitch angle and the yaw angle of the autocollimator (13), the numerical value of a pitch angle measurement unit consisting of the eddy current displacement sensor A (5) and the eddy current displacement sensor B (7), and the numerical value of a yaw angle measurement unit consisting of the eddy current displacement sensor D (9) and the eddy current displacement sensor E (11);
step 1-3: fixing a level meter (14) on a moving platform (4), and enabling a measuring axis of the level meter (14) to be parallel to a connecting line of an eddy current displacement sensor B (7) and a current displacement sensor C (8) and to be vertical to the moving direction of a guide rail; measuring once at the same distance from the starting point of the guide rail (2) until the whole guide rail stroke is measured, and recording the value of a roll angle measuring unit consisting of a level meter (14) and eddy current displacement sensors B (7) and C (8);
step 1-4: calculating the variation of the reference surface error on the measurement of the straightness errors in the vertical direction and the horizontal direction according to the values of the collimator (12) and the eddy current displacement sensors C (8) and D (9); calculating the angle variation generated by the measurement of the reference surface error to the pitch angle error by the autocollimator (13) and the pitch angle measuring unit; calculating the angle variation generated by the measurement of the deviation angle error by the reference surface error through the autocollimator (13) and the deviation angle measuring unit; the angle variation generated by the reference surface error to the roll angle error measurement is calculated by the gradienter (14) and the roll angle measuring unit;
step 1-5: performing least square fitting on the variation generated by measuring the five-degree-of-freedom error of the guide rail by the reference surface error obtained in the steps 1-1 to 1-4, establishing an optimal fitting function, and fitting to obtain the variation generated by measuring the five-degree-of-freedom error by the reference surface error of any point in the whole stroke; the calibrated reference surface is used as the reference for measuring the five-degree-of-freedom error of the guide rail, error compensation is carried out, and the measuring precision is ensured;
step 2: measuring five-degree-of-freedom error of the guide rail;
step 2-1: sliding the motion platform (4) along the guide rail (2), and respectively scanning the corresponding references by the probes of the five eddy current displacement sensors;
step 2-2: in the process of measuring the straightness error of the guide rail, compensating the variation generated by measuring the straightness error by the reference fitted in the step 1-5 through an error compensation method according to the numerical values of the eddy current displacement sensors C (8) and D (9) at any position, namely calculating the straightness error of the guide rail;
step 2-3: in the process of measuring errors of the pitch angle and the yaw angle of the guide rail, the value of a pitch angle measuring unit at any position compensates the angle variation generated by measuring the pitch angle error by the reference fitted in the step 1-5 by an error compensation method, namely the pitch angle error of the guide rail is calculated; the numerical value of a yaw angle measuring unit at any position compensates the angle variation generated by the yaw angle error measurement by the reference fitted in the step 1-5 through an error compensation method, namely the yaw angle error of the guide rail is calculated;
step 2-4: the rolling angle measuring unit value at any position in the rolling angle error measuring process of the guide rail compensates the angle variation generated by the rolling angle error measurement by the reference fitted in the step 1-5 through an error compensation method, namely the rolling angle error of the guide rail is calculated;
step 2-5: analyzing the motion state of the guide rail (2): and sequentially measuring the straightness error, the pitch angle error, the yaw angle error and the roll angle error of each point of the guide rail (2) on line according to the step 2-2, the step 2-3 and the step 2-4.
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