CN117053751A - Compensation system, method, apparatus, and medium - Google Patents
Compensation system, method, apparatus, and medium Download PDFInfo
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- CN117053751A CN117053751A CN202311317266.4A CN202311317266A CN117053751A CN 117053751 A CN117053751 A CN 117053751A CN 202311317266 A CN202311317266 A CN 202311317266A CN 117053751 A CN117053751 A CN 117053751A
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- 238000004590 computer program Methods 0.000 claims description 13
- 238000005259 measurement Methods 0.000 abstract description 4
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
- G01B21/24—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes for testing alignment of axes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
Abstract
The application discloses a compensation system, a compensation method, compensation equipment and a compensation medium, and belongs to the technical field of error compensation. In the application, firstly, the combination of the displacement sensor and the plane mirror is used in the compensation system to eliminate the influence of the flatness error of the reflecting surface of the basic displacement table on the measurement result, namely, the error caused by the rough surface of the basic displacement table. Secondly, acquiring interval data between the displacement sensor and the plane mirror, which are acquired by the displacement sensor when the basic displacement platform is stationary and when the basic displacement platform moves, determining the movement error of the basic displacement platform in the movement process through the interval data, and performing movement compensation on the basic displacement platform based on the movement error. Therefore, the motion error during the motion of the displacement table is accurately compensated, the motion error during the motion of the displacement table is eliminated, and the precision during the assembly of products is improved.
Description
Technical Field
The present application relates to the field of error compensation, and in particular, to a compensation system, a compensation method, a compensation device, and a computer readable storage medium.
Background
Currently, errors in assembling high-precision optical components of head-mounted display devices affect optical imaging effects, requiring a high-precision displacement stage to complete the assembly step. However, the conventional displacement table has various unavoidable motion errors, which affect the accuracy of product assembly.
Disclosure of Invention
The application mainly aims to provide a compensation system, a compensation method, compensation equipment and a computer readable storage medium, which aim to accurately compensate the motion error of a displacement table during motion, eliminate the motion error of the displacement table during motion and improve the precision of products during assembly.
To achieve the above object, the present application provides a compensation system, the system comprising:
an adapter plate;
the base displacement platform is arranged on the mounting surface of the adapter plate, a sliding block which moves back and forth is arranged on the base displacement platform, and the moving direction of the sliding block is parallel to the extending direction of the mounting surface;
the plane mirror module is arranged on one side of the sliding block, which is away from the basic displacement table;
the displacement sensing module is arranged on the adapter plate, and the sensing direction of the displacement sensing module is perpendicular to the moving direction of the sliding block and the mirror surface direction of the plane mirror module so as to acquire the moving error of the basic displacement table in the moving process, wherein the moving error comprises a straightness error and an angle error;
and the compensation mechanism is linked with the basic displacement platform so as to perform motion compensation on the basic displacement platform according to the motion error.
The displacement sensor module comprises a first displacement sensor and a second displacement sensor, and the first displacement sensor and the second displacement sensor are arranged on the same side of the adapter plate opposite to the basic displacement table at intervals.
The displacement sensing module comprises a third displacement sensor and a fourth displacement sensor, and the third displacement sensor and the fourth displacement sensor are oppositely arranged on different sides of the adapter plate relative to the basic displacement table;
the plane mirror module comprises a first plane mirror and a second plane mirror which are respectively arranged in the sensing directions of the third displacement sensor and the fourth displacement sensor.
The displacement sensing module comprises a fifth displacement sensor and a sixth displacement sensor, wherein the fifth displacement sensor and the sixth displacement sensor are respectively arranged on the adjacent sides of the adapter plate relative to the basic displacement table;
the plane mirror module comprises a third plane mirror and a fourth plane mirror which are respectively arranged in the sensing directions of the fifth displacement sensor and the sixth displacement sensor.
To achieve the above object, the present application provides a compensation method, the method comprising:
Acquiring first interval data acquired by a displacement sensing module when a basic displacement platform stands still;
controlling the basic displacement platform to move for a preset distance;
acquiring second interval data acquired by the displacement sensing module;
determining straightness errors of the basic displacement table in the motion process according to the first interval data and the second interval data, and determining angle errors of the basic displacement table in the motion process according to the straightness errors and the preset distance;
and performing motion compensation on the basic displacement platform based on the straightness error and the angle error.
The displacement sensing module comprises a first displacement sensor and a second displacement sensor, and the first displacement sensor and the second displacement sensor are arranged on the same side of the adapter plate relative to the basic displacement table at intervals; the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data comprises the following steps:
determining a first straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the first displacement sensor, determining a second straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the second displacement sensor, and determining a target straightness error based on the first straightness error and the second straightness error.
The displacement sensing module comprises a third displacement sensor and a fourth displacement sensor, and the third displacement sensor and the fourth displacement sensor are oppositely arranged on different sides of the adapter plate relative to the basic displacement table; the plane mirror module comprises a first plane mirror and a second plane mirror which are respectively arranged in the sensing directions of the third displacement sensor and the fourth displacement sensor; the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data comprises the following steps:
determining a third straightness error of the basic displacement platform in the motion process according to the first distance data and the second distance data of the third displacement sensor, determining a fourth straightness error of the basic displacement platform in the motion process according to the first distance data and the second distance data of the fourth displacement sensor, and determining a target straightness error based on the third straightness error and the fourth straightness error.
The displacement sensor module comprises a fifth displacement sensor and a sixth displacement sensor, wherein the fifth displacement sensor and the sixth displacement sensor are respectively arranged on the adjacent sides of the adapter plate relative to the basic displacement table; the plane mirror module comprises a third plane mirror and a fourth plane mirror which are respectively arranged in the sensing directions of the fifth displacement sensor and the sixth displacement sensor; the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data and determining the angle error of the basic displacement platform in the motion process according to the straightness error and the preset distance comprises the following steps:
Determining a fifth straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the fifth displacement sensor, and determining a first angle error of the basic displacement table in the motion process according to the fifth straightness error and the preset distance;
and determining a sixth straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the sixth displacement sensor, and determining a second angle error of the basic displacement table in the motion process according to the sixth straightness error and the preset distance.
Illustratively, the step of performing motion compensation on the base displacement stage based on the straightness error and the angle error includes:
performing motion compensation on the base displacement table in the sensing direction of the fifth displacement sensing module based on the fifth straightness error and the first angle error;
and performing motion compensation on the basic displacement table in the sensing direction of the sixth displacement sensing module based on the sixth straightness error and the second angle error.
The application also provides a compensation device, comprising:
The first acquisition module is used for acquiring first interval data acquired by the displacement sensing module when the basic displacement platform is kept still;
the control module is used for controlling the basic displacement platform to move by a preset distance;
the second acquisition module is used for acquiring second interval data acquired by the displacement sensing module;
the determining module is used for determining straightness errors of the basic displacement platform in the motion process according to the first interval data and the second interval data, and determining angle errors of the basic displacement platform in the motion process according to the straightness errors and the preset distance;
and the output module is used for performing motion compensation on the basic displacement platform based on the straightness error and the angle error.
The present application also provides a compensation apparatus comprising: a memory, a processor, and a computer program stored on the memory and executable on the processor, which when executed by the processor, performs the steps of the compensation method as described above.
The application also provides a computer readable storage medium having stored thereon a computer program which, when executed by a processor, implements the steps of the compensation method as described above.
The embodiment of the application provides a compensation system, a compensation method, compensation equipment and a computer readable storage medium, wherein the system comprises: an adapter plate; the base displacement platform is arranged on the mounting surface of the adapter plate, a sliding block which moves back and forth is arranged on the base displacement platform, and the moving direction of the sliding block is parallel to the extending direction of the mounting surface; the plane mirror module is arranged on one side of the sliding block, which is away from the basic displacement table; the displacement sensing module is arranged on the adapter plate, and the sensing direction of the displacement sensing module is perpendicular to the moving direction of the sliding block and the mirror surface direction of the plane mirror module so as to acquire the moving error of the basic displacement table in the moving process, wherein the moving error comprises a straightness error and an angle error; and the compensation mechanism is linked with the basic displacement platform so as to perform motion compensation on the basic displacement platform according to the motion error.
The method comprises the following steps: acquiring first interval data acquired by a displacement sensing module when a basic displacement platform stands still; controlling the basic displacement platform to move for a preset distance; acquiring second interval data acquired by the displacement sensing module; determining straightness errors of the basic displacement table in the motion process according to the first interval data and the second interval data, and determining angle errors of the basic displacement table in the motion process according to the straightness errors and the preset distance; and performing motion compensation on the basic displacement platform based on the straightness error and the angle error.
In the application, a method for measuring the motion error of the displacement platform in real time and providing compensation for the motion error is provided by adopting the cooperation of the displacement sensor and the displacement platform. Firstly, in the compensation system, the combination of the displacement sensor and the plane mirror is used for eliminating the influence of flatness errors of the reflecting surface of the basic displacement table on the measurement result, namely eliminating errors caused by rough surfaces of the basic displacement table. Secondly, acquiring interval data between the displacement sensor and the plane mirror, which are acquired by the displacement sensor when the basic displacement platform is stationary and when the basic displacement platform moves, determining the movement error of the basic displacement platform in the movement process through the interval data, and performing movement compensation on the basic displacement platform based on the movement error. Therefore, the motion error during the motion of the displacement table is accurately compensated, the motion error during the motion of the displacement table is eliminated, and the precision during the assembly of products is improved.
Drawings
FIG. 1 is a schematic diagram of an operating device of a hardware operating environment according to an embodiment of the present application;
FIG. 2 is a schematic view of a first view angle structure of an embodiment of a compensation system according to an embodiment of the present application;
FIG. 3 is a schematic view of a second view angle structure of an embodiment of a compensation system according to an embodiment of the present application;
FIG. 4 is a schematic diagram illustrating an error analysis of an embodiment of a compensation system according to an embodiment of the present application;
FIG. 5 is a schematic view of a first arrangement of displacement sensors in an embodiment of a compensation system according to an embodiment of the present application;
FIG. 6 is a schematic diagram of a second arrangement of displacement sensors in an embodiment of a compensation system according to an embodiment of the present application;
FIG. 7 is a schematic diagram of an embodiment of a compensation system according to an embodiment of the present application;
FIG. 8 is a schematic diagram of a third arrangement of displacement sensors in an embodiment of a compensation system according to an embodiment of the present application;
FIG. 9 is a flow chart of an embodiment of a compensation method according to an embodiment of the present application;
fig. 10 is a schematic diagram of a compensation device according to an embodiment of the present application.
Reference numerals illustrate:
the achievement of the objects, functional features and advantages of the present application will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
Referring to fig. 1, fig. 1 is a schematic diagram of an operating device of a hardware operating environment according to an embodiment of the present application.
As shown in fig. 1, the operation device may include: a processor 1001, such as a central processing unit (Central Processing Unit, CPU), a communication bus 1002, a user interface 1003, a network interface 1004, a memory 1005. Wherein the communication bus 1002 is used to enable connected communication between these components. The user interface 1003 may include a Display, an input unit such as a Keyboard (Keyboard), and the optional user interface 1003 may further include a standard wired interface, a wireless interface. The network interface 1004 may optionally include a standard wired interface, a WIreless interface (e.g., a WIreless-FIdelity (WI-FI) interface). The Memory 1005 may be a high-speed random access Memory (Random Access Memory, RAM) Memory or a stable nonvolatile Memory (NVM), such as a disk Memory. The memory 1005 may also optionally be a storage device separate from the processor 1001 described above.
It will be appreciated by those skilled in the art that the structure shown in fig. 1 is not limiting of the operating device and may include more or fewer components than shown, or certain components may be combined, or a different arrangement of components.
As shown in fig. 1, an operating system, a data storage module, a network communication module, a user interface module, and a computer program may be included in the memory 1005 as one type of storage medium.
In the operating device shown in fig. 1, the network interface 1004 is mainly used for data communication with other devices; the user interface 1003 is mainly used for data interaction with a user; the processor 1001, the memory 1005 in the operation device of the present application may be provided in an operation device that calls a computer program stored in the memory 1005 through the processor 1001 and performs the following operations:
acquiring first interval data acquired by a displacement sensing module when a basic displacement platform stands still;
controlling the basic displacement platform to move for a preset distance;
acquiring second interval data acquired by the displacement sensing module;
determining straightness errors of the basic displacement table in the motion process according to the first interval data and the second interval data, and determining angle errors of the basic displacement table in the motion process according to the straightness errors and the preset distance;
and performing motion compensation on the basic displacement platform based on the straightness error and the angle error.
In an embodiment, the displacement sensing module comprises a first displacement sensor and a second displacement sensor, and the first displacement sensor and the second displacement sensor are arranged on the same side of the adapter plate relative to the basic displacement table at intervals; the processor 1001 may call a computer program stored in the memory 1005, and also perform the following operations:
the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data comprises the following steps:
determining a first straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the first displacement sensor, determining a second straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the second displacement sensor, and determining a target straightness error based on the first straightness error and the second straightness error.
In an embodiment, the displacement sensing module comprises a third displacement sensor and a fourth displacement sensor, and the third displacement sensor and the fourth displacement sensor are oppositely arranged on different sides of the adapter plate relative to the basic displacement table; the plane mirror module comprises a first plane mirror and a second plane mirror which are respectively arranged in the sensing directions of the third displacement sensor and the fourth displacement sensor; the processor 1001 may call a computer program stored in the memory 1005, and also perform the following operations:
The step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data comprises the following steps:
determining a third straightness error of the basic displacement platform in the motion process according to the first distance data and the second distance data of the third displacement sensor, determining a fourth straightness error of the basic displacement platform in the motion process according to the first distance data and the second distance data of the fourth displacement sensor, and determining a target straightness error based on the third straightness error and the fourth straightness error.
In an embodiment, the displacement sensor module includes a fifth displacement sensor and a sixth displacement sensor, where the fifth displacement sensor and the sixth displacement sensor are respectively disposed on adjacent sides of the adapter plate relative to the base displacement table; the plane mirror module comprises a third plane mirror and a fourth plane mirror which are respectively arranged in the sensing directions of the fifth displacement sensor and the sixth displacement sensor; the processor 1001 may call a computer program stored in the memory 1005, and also perform the following operations:
the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data and determining the angle error of the basic displacement platform in the motion process according to the straightness error and the preset distance comprises the following steps:
Determining a fifth straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the fifth displacement sensor, and determining a first angle error of the basic displacement table in the motion process according to the fifth straightness error and the preset distance;
and determining a sixth straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the sixth displacement sensor, and determining a second angle error of the basic displacement table in the motion process according to the sixth straightness error and the preset distance.
In an embodiment, the processor 1001 may call a computer program stored in the memory 1005, and further perform the following operations:
the step of performing motion compensation on the basic displacement stage based on the straightness error and the angle error includes:
performing motion compensation on the base displacement table in the sensing direction of the fifth displacement sensing module based on the fifth straightness error and the first angle error;
and performing motion compensation on the basic displacement table in the sensing direction of the sixth displacement sensing module based on the sixth straightness error and the second angle error.
An embodiment of the present application provides a compensation system, including:
an adapter plate;
the base displacement platform is arranged on the mounting surface of the adapter plate, a sliding block which moves back and forth is arranged on the base displacement platform, and the moving direction of the sliding block is parallel to the extending direction of the mounting surface;
the plane mirror module is arranged on one side of the sliding block, which is away from the basic displacement table;
the displacement sensing module is arranged on the adapter plate, and the sensing direction of the displacement sensing module is perpendicular to the moving direction of the sliding block and the mirror surface direction of the plane mirror module so as to acquire the moving error of the basic displacement table in the moving process, wherein the moving error comprises a straightness error and an angle error;
and the compensation mechanism is linked with the basic displacement platform so as to perform motion compensation on the basic displacement platform according to the motion error.
In an embodiment, referring to fig. 2 and 3, the compensation system includes a base displacement stage 1, an adapter plate 2, a displacement sensing module 3, a plane mirror module 4 and a compensation mechanism (not shown in the drawings), where the base displacement stage 1 may be a single-axis displacement stage or a multi-axis displacement stage, and in the present application, the single-axis displacement stage is taken as an example to describe that the compensation of the multi-axis displacement stage on each axis is similar to that of the single-axis displacement stage, and will not be repeated herein.
The basic displacement platform 1 is arranged on the mounting surface of the adapter plate 2, the basic displacement platform 1 is provided with a sliding block which moves back and forth, the moving direction of the sliding block is parallel to the extending direction of the mounting surface of the adapter plate 2, the adapter plate 2 and the basic displacement platform 1 are arranged in parallel and fixedly connected, and the two can be connected and fixed through a screw.
The plane mirror module 4 is disposed on one side of the slider away from the base displacement platform 1, where the base displacement platform 1 has a plurality of sides, and according to the setting relationship between the adapter plate 2 and the base displacement platform 1, the displacement sensing module 3 may be disposed on the adapter plate 2 corresponding to the plurality of sides of the base displacement platform 1. By using the displacement sensing module 3 and the plane mirror module 4 in combination, the influence of the flatness error of the side surface of the basic displacement table 1 on the measurement result is eliminated, that is, the plane mirror module 4 is taken as an ideal mirror surface, so that the error caused by the rough surface of the side surface of the basic displacement table 1 is eliminated.
It should be noted that, the adapter plate 2 and the base displacement table 1 need to be arranged in parallel, so that when the base displacement table 1 moves to drive the plane mirror 4 to move together, measurement errors caused by non-parallelism of the two can be eliminated when the displacement sensor 3 measures different positions.
The displacement sensing module 3 is arranged on the adapter plate 2, the measuring direction is perpendicular to the moving direction of the sliding block of the basic displacement table 1 and is aligned with the plane mirror module 4, and the sensing direction of the displacement sensing module 3 is perpendicular to the moving direction of the sliding block and the mirror surface direction of the plane mirror module 4 and is used for collecting the moving error of the basic displacement table 1 in the moving process, wherein the moving error comprises straightness error and angle error. In an embodiment, referring to fig. 4, the straightness error a refers to an error in a direction perpendicular to a slider movement direction of the base displacement stage 1, and the angle error b refers to an error in the slider movement direction of the base displacement stage 1.
The compensation mechanism is linked with the basic displacement table 1, and optionally, the compensation mechanism is fixedly connected with the basic displacement table 1 and is used for performing motion compensation on the basic displacement table 1 according to motion errors, wherein the compensation mechanism can be a six-degree-of-freedom displacement table, the basic displacement table 1 can be fixed on the six-degree-of-freedom displacement table, and the six-degree-of-freedom displacement table is used for performing motion compensation according to the obtained motion errors.
In this embodiment, a high-precision compensation system is provided, which can measure a straightness error (parallelism error) and an angle error (yaw error) when the basic displacement platform moves during the movement of the basic displacement platform, and then compensate the measured errors by using the displacement platform with other degrees of freedom as a compensation mechanism, thereby finally realizing high-precision linear movement of the basic displacement platform.
The displacement sensor module comprises a first displacement sensor and a second displacement sensor, and the first displacement sensor and the second displacement sensor are arranged on the same side of the adapter plate opposite to the basic displacement table at intervals.
In an embodiment, referring to fig. 5, the displacement sensor module includes a first displacement sensor 31 and a second displacement sensor 32, where the first displacement sensor 31 and the second displacement sensor 32 are disposed at intervals on the same side of the adapter plate 2 relative to the base displacement table 1, are installed on the same side of the base displacement table 1 in the moving direction of the sliding block, and are placed parallel to each other, and the first displacement sensor 31 and the second displacement sensor 32 respectively collect a first movement error and a second movement error of the base displacement table 1 in the moving process, so that the compensation mechanism performs movement compensation on the base displacement table 1 according to the first movement error and the second movement error.
In an embodiment, when the base displacement table 1 is kept stationary, the measured values of the first displacement sensor 31 and the second displacement sensor 32 are recorded as pitch data A1 and pitch data A2, and when the base displacement table 1 is moved by a preset distance L, the measured values of the first displacement sensor 31 and the second displacement sensor 32 are recorded as pitch data A3 and pitch data A4, so that the change amount of the straightness and the change amount of the angle of the base displacement table 1 when the base displacement table 1 moves by the preset distance L can be calculated, the change amount of the straightness (straightness error) is Δx= (a1+a2-a3-A4)/2, and the change amount of the angle (angle error) is Δθ=arctan ((a1-a2-a3+a4)/2L), and the straightness error Δx and the angle error Δθ are used for motion compensation of the base displacement table 1. Therefore, the straightness error (parallelism error) and angle error (deflection error) of the basic displacement platform during movement are accurately measured through data acquired by the plurality of sensors, and then the measured errors are more accurately compensated through the displacement platform with other degrees of freedom as a compensation mechanism.
The displacement sensing module comprises a third displacement sensor and a fourth displacement sensor, and the third displacement sensor and the fourth displacement sensor are oppositely arranged on different sides of the adapter plate relative to the basic displacement table;
the plane mirror module comprises a first plane mirror and a second plane mirror which are respectively arranged in the sensing directions of the third displacement sensor and the fourth displacement sensor.
In an embodiment, the displacement sensing module comprises a third displacement sensor and a fourth displacement sensor, the plane mirror module comprises a first plane mirror and a second plane mirror which are respectively arranged in the sensing directions of the third displacement sensor and the fourth displacement sensor, optionally, one side of the plane mirror perpendicular to the moving direction of the sliding block of the basic displacement platform is fixedly attached with the first plane mirror corresponding to the third displacement sensor, the opposite side of the one side is fixedly attached with the second plane mirror corresponding to the fourth displacement sensor, the third displacement sensor and the fourth displacement sensor are respectively arranged on the adapter plates at two sides of the moving direction of the sliding block of the basic displacement platform, the first plane mirror and the second plane mirror are respectively aligned, and the compensation mechanism is used for carrying out motion compensation on the basic displacement platform according to the third motion error acquired by the third displacement sensor and the fourth motion error acquired by the fourth displacement sensor.
That is, compared with the first displacement sensor and the second displacement sensor located at the same side of the base displacement table in the moving direction of the sliding block shown in fig. 5, the third displacement sensor and the fourth displacement sensor are located at two opposite sides of the base displacement table in the moving direction of the sliding block, and correspond to the first plane mirror and the second plane mirror located at two sides of the base displacement table in the moving direction of the sliding block, respectively, so that the acquisition deviation existing in the acquisition of the pitch data at the same side can be eliminated through the pitch data acquired by the displacement sensors at two sides, and more accurate error data can be obtained. In addition, the calculation process of the straightness change amount (straightness error) Δx and the angle change amount (angle error) Δθ is similar to the calculation process of the two displacement sensors on the same side, and will not be described here. Therefore, the straightness error (parallelism error) and angle error (deflection error) of the basic displacement platform during movement can be accurately measured through the data acquired by the plurality of sensors, and then the measured errors are more accurately compensated through the displacement platform with other degrees of freedom as a compensation mechanism.
The displacement sensing module comprises a fifth displacement sensor and a sixth displacement sensor, wherein the fifth displacement sensor and the sixth displacement sensor are respectively arranged on the adjacent sides of the adapter plate relative to the basic displacement table;
The plane mirror module comprises a third plane mirror and a fourth plane mirror which are respectively arranged in the sensing directions of the fifth displacement sensor and the sixth displacement sensor.
In an embodiment, referring to fig. 6, the displacement sensing module includes a fifth displacement sensor 33 and a sixth displacement sensor 34, the plane mirror module includes a third plane mirror and a fourth plane mirror respectively disposed in the sensing directions of the fifth displacement sensor and the sixth displacement sensor, the third plane mirror is fixedly attached to the sliding block of the base displacement table 1, the side surface in the first vertical direction of the sliding block movement direction of the base displacement table 1, and the fourth plane mirror is fixedly attached to the sliding block of the base displacement table 1, the side surface in the second vertical direction of the sliding block movement direction of the base displacement table 1; the fifth displacement sensor 33 and the sixth displacement sensor 34 are respectively arranged on adjacent sides of the adapter plate 2 relative to the basic displacement table 1, and optionally, the fifth displacement sensor 33 is mounted on the adapter plate 2 in the first vertical direction and aligned with the third plane mirror, and the sixth displacement sensor 34 is mounted on the adapter plate 2 in the second vertical direction and aligned with the fourth plane mirror; referring to fig. 7, the sliding block moving direction, the first vertical direction and the second vertical direction of the base displacement table 1 are perpendicular to each other. In addition, referring to fig. 8, a plurality of displacement sensors such as a seventh displacement sensor 35, an eighth displacement sensor 36, a ninth displacement sensor 37, and a tenth displacement sensor 38 may be mounted in each perpendicular direction to the direction of movement of the slider of the base displacement stage 1, and flat mirrors corresponding to the respective displacement sensors may be provided, thereby obtaining more accurate error data in each direction.
By the above arrangement, the compensation mechanism can perform the motion compensation in the first vertical direction and the second vertical direction on the base displacement table 1 according to the fifth motion error acquired by the fifth displacement sensor 33 and the sixth motion error acquired by the sixth displacement sensor 34, respectively, so as to perform the error compensation in multiple directions at the same time.
An embodiment of the present application provides a compensation method, in an embodiment of the compensation method, referring to fig. 9, the method includes:
step S10, acquiring first interval data acquired by a displacement sensing module when a basic displacement platform is kept still;
step S20, controlling the basic displacement platform to move a preset distance;
step S30, second interval data acquired by the displacement sensing module are acquired;
step S40, determining straightness errors of the basic displacement platform in the motion process according to the first interval data and the second interval data, and determining angle errors of the basic displacement platform in the motion process according to the straightness errors and the preset distance;
and S50, performing motion compensation on the basic displacement platform based on the straightness error and the angle error.
In an embodiment, reference is made to the compensation system of fig. 2 and 3, and the description of the compensation system is referred to above and will not be repeated here. When the basic displacement platform keeps static, the measured value of the displacement sensor is recorded as first interval data A1, and when the basic displacement platform moves for a preset distance L, the measured value of the displacement sensor is second interval data A3, so that the change amount of straightness and the change amount of angle of the basic displacement platform when the basic displacement platform moves for the preset distance L can be calculated, the change amount of straightness (straightness error) is delta X=A1-A3, the change amount of angle (angle error) is delta theta=arctan ((A1-A3)/L), and the straightness error delta X and the angle error delta theta are further used for motion compensation of the displacement platform.
In this embodiment, a high-precision compensation method is provided, which can measure straightness (parallelism) error and angle (deflection) error when the basic displacement platform moves during the movement of the basic displacement platform, then compensate the measured errors by using the displacement platform with other degrees of freedom as a compensation mechanism, and finally realize high-precision linear movement of the basic displacement platform.
The displacement sensing module comprises a first displacement sensor and a second displacement sensor, and the first displacement sensor and the second displacement sensor are arranged on the same side of the adapter plate relative to the basic displacement table at intervals; the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data comprises the following steps:
determining a first straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the first displacement sensor, determining a second straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the second displacement sensor, and determining a target straightness error based on the first straightness error and the second straightness error.
In an embodiment, reference is made to the compensation system of fig. 5, and the description of the compensation system is referred to above, which is not repeated herein. And determining a first straightness error delta X1= (A1-A3) of the basic displacement table in the motion process according to the first distance data A1 and the second distance data A3 of the first displacement sensor, determining a second straightness error delta X2= (A2-A4) of the basic displacement table in the motion process according to the first distance data A2 and the second distance data A4 of the second displacement sensor, and determining a target straightness error delta X= (A1+A2-A3-A4)/2 based on the first straightness error delta X1 and the second straightness error delta X2. Therefore, the straightness error (parallelism error) and angle error (deflection error) of the basic displacement platform during movement are accurately measured through data acquired by the plurality of sensors, and then the measured errors are more accurately compensated through the displacement platform with other degrees of freedom as a compensation mechanism.
The displacement sensing module comprises a third displacement sensor and a fourth displacement sensor, and the third displacement sensor and the fourth displacement sensor are oppositely arranged on different sides of the adapter plate relative to the basic displacement table; the plane mirror module comprises a first plane mirror and a second plane mirror which are respectively arranged in the sensing directions of the third displacement sensor and the fourth displacement sensor; the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data comprises the following steps:
Determining a third straightness error of the basic displacement platform in the motion process according to the first distance data and the second distance data of the third displacement sensor, determining a fourth straightness error of the basic displacement platform in the motion process according to the first distance data and the second distance data of the fourth displacement sensor, and determining a target straightness error based on the third straightness error and the fourth straightness error.
In an embodiment, the target straightness error Δx is determined according to a third displacement sensor and a fourth displacement sensor which are respectively located at two sides of the base displacement table in the moving direction of the sliding block and are oppositely arranged, and the third straightness error and the fourth straightness error are respectively corresponding to the third straightness error and the fourth straightness error. The calculation process of the target straightness error Δx is similar to that of the two displacement sensors on the same side, and will not be described herein.
Subsequently, the angle error is determined to be Δθ=arctan (Δx/L), and then the straightness error Δx and the angle error Δθ are used for motion compensation of the displacement stage. Therefore, the straightness error (parallelism error) and angle error (deflection error) of the basic displacement platform during movement can be accurately measured through the data acquired by the plurality of sensors, and then the measured errors are more accurately compensated through the displacement platform with other degrees of freedom as a compensation mechanism.
The displacement sensor module comprises a fifth displacement sensor and a sixth displacement sensor, wherein the fifth displacement sensor and the sixth displacement sensor are respectively arranged on the adjacent sides of the adapter plate relative to the basic displacement table; the plane mirror module comprises a third plane mirror and a fourth plane mirror which are respectively arranged in the sensing directions of the fifth displacement sensor and the sixth displacement sensor; the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data and determining the angle error of the basic displacement platform in the motion process according to the straightness error and the preset distance comprises the following steps:
determining a fifth straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the fifth displacement sensor, and determining a first angle error of the basic displacement table in the motion process according to the fifth straightness error and the preset distance;
and determining a sixth straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the sixth displacement sensor, and determining a second angle error of the basic displacement table in the motion process according to the sixth straightness error and the preset distance.
In an embodiment, reference is made to the compensation system of fig. 6, 7 and 8, wherein the description of the compensation system is referred to above and will not be repeated herein.
Determining a fifth straightness error delta X1= (A1-A3) of the basic displacement table in the motion process according to the first interval data A1 and the second interval data A3 of the fifth displacement sensor, and determining a first angle error delta theta 1 = arctan (delta X1/L) of the basic displacement table in the motion process according to the fifth straightness error and a preset distance L;
and determining a sixth straightness error delta X2= (A2-A4) of the basic displacement table in the motion process according to the first interval data A2 and the second interval data A4 of the sixth displacement sensor, and determining a second angle error delta theta 2= arctan (delta X2/L) of the basic displacement table in the motion process according to the sixth straightness error and a preset distance L.
Illustratively, the step of performing motion compensation on the base displacement stage based on the straightness error and the angle error includes:
performing motion compensation on the base displacement table in the sensing direction of the fifth displacement sensing module based on the fifth straightness error and the first angle error;
and performing motion compensation on the basic displacement table in the sensing direction of the sixth displacement sensing module based on the sixth straightness error and the second angle error.
And performing error compensation on the basis of the fifth straightness error delta X1 and the first angle error delta theta 1 in the sensing direction of the fifth displacement sensing module of the basic displacement platform, and performing error compensation on the basis of the sixth straightness error delta X2 and the second angle error delta theta 2 in the sensing direction of the sixth displacement sensing module of the basic displacement platform.
Illustratively, the method further comprises:
if the maximum installation interval between the displacement sensors on the corresponding adapter plates on the same side of the sliding blocks of the basic displacement table is smaller than the preset distance, the number of the displacement sensors on the corresponding adapter plates on the same side is increased, wherein the maximum installation interval between the displacement sensors after the number of the displacement sensors is increased is larger than or equal to the preset distance.
It should be noted that, the compensation system can realize compensation based on at least one displacement sensor, and at this time, accurate error data is obtained based on the combined use of the displacement sensor and the plane mirror; the compensation can be realized based on two displacement sensors, more accurate error data can be obtained based on data processing (such as averaging) at the moment, or more accurate error data can be obtained based on data processing and data acquisition (opposite side acquisition) at the moment; data can be collected simultaneously on a plurality of sides, at the moment, two or more displacement sensors can be installed in all directions at the same time, and error compensation can be performed simultaneously in a plurality of directions according to accurate error data in all directions. In addition, compensation may be achieved based on a larger number of displacement sensors, and in this embodiment, the number and mounting positions of the displacement sensors are not limited.
In an embodiment, if the maximum installation interval between the displacement sensors on the corresponding adapter plates on the same side of the sliding block of the basic displacement platform is smaller than the preset distance, the number of the displacement sensors on the corresponding adapter plates on the same side needs to be increased, so that the situation that the movement error cannot be detected by the displacement sensors when the basic displacement platform stops moving is avoided, wherein the maximum installation interval between the displacement sensors is larger than or equal to the preset distance after the number of the displacement sensors is increased, and therefore when the measured stroke (the preset distance) is larger than the maximum installation interval of the displacement sensors, the movement error of the whole stroke can be acquired by increasing the number of the displacement sensors. The maximum mounting interval is the maximum mounting interval between two displacement sensors positioned at two ends among displacement sensors mounted at the same side of the base displacement table in the moving direction of the sliding block.
Illustratively, the method further comprises:
controlling the basic displacement platform to move for a preset distance;
acquiring a plurality of interval data acquired by the displacement sensor according to a preset acquisition frequency in the process that the basic displacement table moves by the preset distance;
determining straightness errors of the basic displacement table in the motion process according to the plurality of interval data, and determining angle errors of the basic displacement table in the motion process according to the straightness errors and the preset distance;
And performing motion compensation on the basic displacement platform based on the straightness error and the angle error.
In this embodiment, the straightness error in the motion process is directly determined by considering the first interval data and the second interval data acquired by the displacement sensor at the motion start time and the motion end time of the basic displacement platform, and since the overall motion process is not considered, only two endpoint data of the start time and the end time are considered, and a larger error exists. Therefore, in this embodiment, further considering that the motion precision of the basic displacement platform is already high, the phase difference between the interval data of each moment in the motion process is very small, so that a more accurate straightness error in the motion process can be determined by a method such as averaging according to the instantaneous interval data of each moment in the motion process of the basic displacement platform, and therefore, compared with a data inaccuracy mode caused by a smaller data quantity at two ends, a more accurate straightness error is obtained by fitting a large amount of data in the whole motion process.
In addition, referring to fig. 10, an embodiment of the present application further provides a compensation device, including:
the first acquisition module M1 is used for acquiring first interval data acquired by the displacement sensing module when the basic displacement platform is kept still;
The control module M2 is used for controlling the basic displacement platform to move for a preset distance;
the second acquisition module M3 is used for acquiring second interval data acquired by the displacement sensing module;
the determining module M4 is used for determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data, and determining the angle error of the basic displacement platform in the motion process according to the straightness error and the preset distance;
and the output module M5 is used for performing motion compensation on the basic displacement platform based on the straightness error and the angle error.
The displacement sensing module comprises a first displacement sensor and a second displacement sensor, and the first displacement sensor and the second displacement sensor are arranged on the same side of the adapter plate relative to the basic displacement table at intervals; the determining module is used for:
determining a first straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the first displacement sensor, determining a second straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the second displacement sensor, and determining a target straightness error based on the first straightness error and the second straightness error;
The displacement sensing module comprises a third displacement sensor and a fourth displacement sensor, and the third displacement sensor and the fourth displacement sensor are oppositely arranged on different sides of the adapter plate relative to the basic displacement table; the plane mirror module comprises a first plane mirror and a second plane mirror which are respectively arranged in the sensing directions of the third displacement sensor and the fourth displacement sensor; the determining module is used for:
determining a third straightness error of the basic displacement platform in the motion process according to the first distance data and the second distance data of the third displacement sensor, determining a fourth straightness error of the basic displacement platform in the motion process according to the first distance data and the second distance data of the fourth displacement sensor, and determining a target straightness error based on the third straightness error and the fourth straightness error.
The displacement sensor module comprises a fifth displacement sensor and a sixth displacement sensor, wherein the fifth displacement sensor and the sixth displacement sensor are respectively arranged on the adjacent sides of the adapter plate relative to the basic displacement table; the plane mirror module comprises a third plane mirror and a fourth plane mirror which are respectively arranged in the sensing directions of the fifth displacement sensor and the sixth displacement sensor; the determining module is used for:
Determining a fifth straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the fifth displacement sensor, and determining a first angle error of the basic displacement table in the motion process according to the fifth straightness error and the preset distance;
and determining a sixth straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the sixth displacement sensor, and determining a second angle error of the basic displacement table in the motion process according to the sixth straightness error and the preset distance.
Illustratively, the output module is configured to:
performing motion compensation on the base displacement table in the sensing direction of the fifth displacement sensing module based on the fifth straightness error and the first angle error;
and performing motion compensation on the basic displacement table in the sensing direction of the sixth displacement sensing module based on the sixth straightness error and the second angle error.
The compensation device provided by the application adopts the compensation method in the embodiment, and aims to accurately compensate the motion error of the displacement table during motion, eliminate the motion error of the displacement table during motion and improve the precision of the product during assembly. Compared with the conventional technology, the beneficial effects of the compensation device provided by the embodiment of the application are the same as those of the compensation method provided by the embodiment, and other technical features in the compensation device are the same as those disclosed by the method of the embodiment, and are not repeated here.
In addition, an embodiment of the present application further provides a compensation apparatus, including: a memory, a processor, and a computer program stored on the memory and executable on the processor, which when executed by the processor, performs the steps of the compensation method as described above.
Furthermore, embodiments of the present application also provide a computer-readable storage medium having stored thereon a computer program which, when executed by a processor, implements the steps of the compensation method as described above.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or system. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or system that comprises the element.
From the above description of embodiments, it will be clear to a person skilled in the art that the above embodiment method may be implemented by means of software plus a necessary general hardware platform, but may of course also be implemented by means of hardware, but in many cases the former is a preferred embodiment. Based on such understanding, the technical solution of the present application may be embodied essentially or in a part contributing to the conventional technology in the form of a software product stored in a storage medium (e.g. ROM/RAM, magnetic disk, optical disk) as described above, including several instructions for causing a terminal device (which may be a mobile phone, a computer, a server, or a network device, etc.) to perform the method according to the embodiments of the present application.
The foregoing description is only of the preferred embodiments of the present application, and is not intended to limit the scope of the application, but rather is intended to cover any equivalents of the structures or equivalent processes disclosed herein or in the alternative, which may be employed directly or indirectly in other related arts.
Claims (11)
1. A compensation system, the system comprising:
an adapter plate;
The base displacement platform is arranged on the mounting surface of the adapter plate, a sliding block which moves back and forth is arranged on the base displacement platform, and the moving direction of the sliding block is parallel to the extending direction of the mounting surface;
the plane mirror module is arranged on one side of the sliding block, which is away from the basic displacement table;
the displacement sensing module is arranged on the adapter plate, and the sensing direction of the displacement sensing module is perpendicular to the moving direction of the sliding block and the mirror surface direction of the plane mirror module so as to acquire the moving error of the basic displacement table in the moving process, wherein the moving error comprises a straightness error and an angle error;
and the compensation mechanism is linked with the basic displacement platform so as to perform motion compensation on the basic displacement platform according to the motion error.
2. The compensation system of claim 1, wherein the displacement sensing module comprises a first displacement sensor and a second displacement sensor, the first displacement sensor and the second displacement sensor being disposed at a spaced apart location on a same side of the adapter plate relative to the base displacement table.
3. The compensation system of claim 1, wherein the displacement sensing module comprises a third displacement sensor and a fourth displacement sensor disposed opposite each other on different sides of the adapter plate relative to the base displacement table;
the plane mirror module comprises a first plane mirror and a second plane mirror which are respectively arranged in the sensing directions of the third displacement sensor and the fourth displacement sensor.
4. The compensation system of claim 1, wherein the displacement sensing module comprises a fifth displacement sensor and a sixth displacement sensor, the fifth displacement sensor and the sixth displacement sensor being disposed on adjacent sides of the adapter plate relative to the base displacement table, respectively;
the plane mirror module comprises a third plane mirror and a fourth plane mirror which are respectively arranged in the sensing directions of the fifth displacement sensor and the sixth displacement sensor.
5. A compensation method, the method comprising:
acquiring first interval data acquired by a displacement sensing module when a basic displacement platform stands still;
controlling the basic displacement platform to move for a preset distance;
Acquiring second interval data acquired by the displacement sensing module;
determining straightness errors of the basic displacement table in the motion process according to the first interval data and the second interval data, and determining angle errors of the basic displacement table in the motion process according to the straightness errors and the preset distance;
and performing motion compensation on the basic displacement platform based on the straightness error and the angle error.
6. The compensation method of claim 5, wherein the displacement sensing module comprises a first displacement sensor and a second displacement sensor, the first displacement sensor and the second displacement sensor being disposed at a distance on the same side of the adapter plate relative to the base displacement table; the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data comprises the following steps:
determining a first straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the first displacement sensor, determining a second straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the second displacement sensor, and determining a target straightness error based on the first straightness error and the second straightness error.
7. The compensation method of claim 5, wherein the displacement sensing module comprises a third displacement sensor and a fourth displacement sensor, the third displacement sensor and the fourth displacement sensor being disposed opposite to each other on different sides of the adapter plate relative to the base displacement table; the plane mirror module comprises a first plane mirror and a second plane mirror which are respectively arranged in the sensing directions of the third displacement sensor and the fourth displacement sensor; the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data comprises the following steps:
determining a third straightness error of the basic displacement platform in the motion process according to the first distance data and the second distance data of the third displacement sensor, determining a fourth straightness error of the basic displacement platform in the motion process according to the first distance data and the second distance data of the fourth displacement sensor, and determining a target straightness error based on the third straightness error and the fourth straightness error.
8. The compensation method of claim 5, wherein the displacement sensing module comprises a fifth displacement sensor and a sixth displacement sensor, the fifth displacement sensor and the sixth displacement sensor being disposed on adjacent sides of the adapter plate relative to the base displacement table, respectively; the plane mirror module comprises a third plane mirror and a fourth plane mirror which are respectively arranged in the sensing directions of the fifth displacement sensor and the sixth displacement sensor; the step of determining the straightness error of the basic displacement platform in the motion process according to the first interval data and the second interval data and determining the angle error of the basic displacement platform in the motion process according to the straightness error and the preset distance comprises the following steps:
Determining a fifth straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the fifth displacement sensor, and determining a first angle error of the basic displacement table in the motion process according to the fifth straightness error and the preset distance;
and determining a sixth straightness error of the basic displacement table in the motion process according to the first interval data and the second interval data of the sixth displacement sensor, and determining a second angle error of the basic displacement table in the motion process according to the sixth straightness error and the preset distance.
9. The compensation method of claim 8, wherein the step of motion compensating the base displacement stage based on the straightness error and the angle error comprises:
performing motion compensation on the base displacement table in the sensing direction of the fifth displacement sensing module based on the fifth straightness error and the first angle error;
and performing motion compensation on the basic displacement table in the sensing direction of the sixth displacement sensing module based on the sixth straightness error and the second angle error.
10. A compensation device, the device comprising: memory, a processor and a computer program stored on the memory and executable on the processor, the computer program being configured to implement the steps of the compensation method according to any one of claims 5 to 9.
11. A computer-readable storage medium, characterized in that it has stored thereon a computer program which, when executed by a processor, implements the steps of the compensation method according to any of claims 5 to 9.
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