CN114087972B - A shape error measuring device for long hole parts - Google Patents

A shape error measuring device for long hole parts Download PDF

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CN114087972B
CN114087972B CN202111463448.3A CN202111463448A CN114087972B CN 114087972 B CN114087972 B CN 114087972B CN 202111463448 A CN202111463448 A CN 202111463448A CN 114087972 B CN114087972 B CN 114087972B
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measuring device
inner cavity
oblique
horizontal
ultrasonic
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CN114087972A (en
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刘志兵
宋慈
王西彬
罗宏松
王耀武
刘炳鑫
李大光
冯彩霞
沈文华
腾龙龙
焦黎
解丽静
梁志强
颜培
周天丰
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Beijing Institute of Technology BIT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/06Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/22Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
    • G01B21/24Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes for testing alignment of axes

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

本发明公开了一种长孔类零件形状误差测量装置,属于长孔类零件形状误差测量领域,包括:基础装置包括主壳机构以及车床主轴,滑移装置与主壳机构固定连接,测量装置包括角度测量装置、干涉仪、干涉镜、反射镜、位移测量装置以及超声测量装置,超声测量装置固定于主壳机构上且与车床主轴回转轴线保持水平,反射镜固定于主壳机构以及超声测量单元连接面上,位移传感器与超声测量装置两者的轴线角度始终保持恒定且位于同一竖直平面内,标定装置包括标定球以及标定基准板,干涉仪以及干涉镜与反射镜同轴线设置,本发明结构简单、成本低廉、使用便捷,可以实现对长孔类零件的圆度和轴线直线度误差精确、高效的在线测量。

Figure 202111463448

The invention discloses a shape error measurement device for long hole parts, which belongs to the field of shape error measurement for long hole parts. Angle measuring device, interferometer, interferometer, reflector, displacement measuring device and ultrasonic measuring device, the ultrasonic measuring device is fixed on the main shell mechanism and kept horizontal with the rotation axis of the lathe spindle, and the reflector is fixed on the main shell mechanism and the ultrasonic measuring unit On the connection surface, the axis angles of the displacement sensor and the ultrasonic measuring device are always kept constant and located in the same vertical plane. The calibration device includes a calibration ball and a calibration reference plate, an interferometer, and an interferometer and a mirror coaxial arrangement. The invention has the advantages of simple structure, low cost and convenient use, and can realize precise and efficient on-line measurement of roundness and axis straightness errors of long-hole parts.

Figure 202111463448

Description

一种长孔类零件形状误差测量装置A shape error measuring device for long hole parts

技术领域technical field

本发明属于长孔类零件形状误差测量领域,更具体的说是涉及一种长孔类零件形状误差测量装置。The invention belongs to the field of measuring the shape error of long-hole parts, and more specifically relates to a shape error measuring device for long-hole parts.

背景技术Background technique

随着现代装备生产的快速发展,高精度长孔类零件被广泛应用于航空、船舶、石油化工和冶金等制造业领域,长孔类零件的加工质量会直接影响整机性能,作为衡量长孔类零件加工质量的重要技术指标,圆度和轴线直线度误差超差会造成零件应力集中,降低其使用寿命,甚至会带来一定的安全隐患,由于长孔类零件一般长径比较大,测量过程受到内部空间狭小、轴向尺寸较大等因素的限制,对其形状误差测量仍然存在一定的困难,使用传统的误差测量设备,如三坐标测量机、圆度仪、塞规和量规等,均难以满足制造业对长孔类零件形状误差测量过程中仪器使用方便、精准、快速的要求,因此,如何提供一种便捷、精准、高效地检测长孔类零件的圆度和轴线直线度误差的装置是本领域技术人员亟需解决的问题。With the rapid development of modern equipment production, high-precision long-hole parts are widely used in manufacturing fields such as aviation, shipbuilding, petrochemical and metallurgy. The processing quality of long-hole parts will directly affect the performance of the whole machine. As a measure of long-hole An important technical indicator of the processing quality of such parts, the error of roundness and axis straightness will cause the stress concentration of the part, reduce its service life, and even bring certain safety hazards. The process is limited by factors such as narrow internal space and large axial dimensions, and there are still certain difficulties in measuring its shape error. Traditional error measuring equipment is used, such as three-coordinate measuring machines, roundness meters, plug gauges and gauges. It is difficult to meet the requirements of the manufacturing industry for the convenience, accuracy and speed of the instrument in the process of measuring the shape error of long-hole parts. Therefore, how to provide a convenient, accurate and efficient way to detect the roundness and axis straightness errors of long-hole parts The device is a problem that those skilled in the art need to solve urgently.

发明内容Contents of the invention

有鉴于此,本发明提供了一种长孔类零件形状误差测量装置,结构简单,使用方便,能够实现对长孔类零件的圆度和轴线直线度误差进行精准、高效地测量,确保零件使用性能。In view of this, the present invention provides a shape error measuring device for long-hole parts, which has a simple structure and is easy to use, and can accurately and efficiently measure the roundness and axis straightness errors of long-hole parts, ensuring that the parts are used performance.

为了实现上述目的,本发明采用如下技术方案:In order to achieve the above object, the present invention adopts the following technical solutions:

一种长孔类零件形状误差测量装置,包括:基础装置、测量装置、标定装置以及滑移装置;A shape error measuring device for long-hole parts, including: a basic device, a measuring device, a calibration device, and a sliding device;

所述基础装置包括主壳机构以及车床主轴;The basic device includes a main housing mechanism and a lathe spindle;

所述滑移装置包括斜向滑移单元、水平滑移单元以及竖直滑移单元,所述滑移装置与所述主壳机构固定连接;The sliding device includes an oblique sliding unit, a horizontal sliding unit and a vertical sliding unit, and the sliding device is fixedly connected with the main housing mechanism;

所述测量装置包括角度测量装置、干涉仪、干涉镜、反射镜、位移测量装置以及超声测量装置,所述角度测量装置固定于所述车床主轴一端,所述超声测量装置固定于所述主壳机构上且与所述车床主轴回转轴线保持水平,所述反射镜固定于所述主壳机构以及超声测量单元连接面上,所述位移传感器与所述超声测量装置两者的轴线角度始终保持恒定且位于同一竖直平面内;The measuring device includes an angle measuring device, an interferometer, an interferometer, a reflector, a displacement measuring device and an ultrasonic measuring device, the angle measuring device is fixed on one end of the main shaft of the lathe, and the ultrasonic measuring device is fixed on the main shell On the mechanism and keep horizontal with the axis of rotation of the main shaft of the lathe, the reflector is fixed on the connecting surface of the main shell mechanism and the ultrasonic measuring unit, and the axis angle between the displacement sensor and the ultrasonic measuring device is always kept constant and lie in the same vertical plane;

所述标定装置包括标定球以及标定基准板;所述干涉仪以及所述干涉镜与所述反射镜同轴线设置,所述标定球与所述位移测量装置固定连接,所述主壳机构上设置有所述标定基准板;The calibration device includes a calibration ball and a calibration reference plate; the interferometer and the interferometer are coaxially arranged with the mirror, the calibration ball is fixedly connected to the displacement measuring device, and the main housing mechanism is The calibration reference plate is provided;

角度测量装置与计算机通讯连接,位移测量装置、超声测量装置以及干涉仪经各自控制器与计算机通讯连接。The angle measuring device is connected to the computer in communication, and the displacement measuring device, the ultrasonic measuring device and the interferometer are connected to the computer through their respective controllers.

优选的,所述超声测量装置包括喷水机构、流水固定机构、探头夹头以及超声探头,所述流水固定机构与所述超声探头固定连接,所述流水固定机构外侧周向设置有若干个所述探头夹头,所述流水固定机构与所述喷水机构连通,所述喷水机构侧壁连通有水管。Preferably, the ultrasonic measuring device includes a water spray mechanism, a running water fixing mechanism, a probe chuck and an ultrasonic probe, the running water fixing mechanism is fixedly connected to the ultrasonic probe, and several sets of The probe chuck, the running water fixing mechanism is in communication with the water spray mechanism, and the side wall of the water spray mechanism is connected with a water pipe.

优选的,所述主壳机构上设有中斜向内腔、右斜向内腔、左斜向内腔、上水平内腔以及下水平内腔。Preferably, the main housing mechanism is provided with a middle oblique inner chamber, a right oblique inner chamber, a left oblique inner chamber, an upper horizontal inner chamber and a lower horizontal inner chamber.

优选的,斜向滑移单元包括:刻度手轮、斜向调动板、微型平面推力滚针轴承、丝杆螺母、丝杆、限位环以及两根斜向导杆,所述丝杆螺母固定在所述主壳机构上,两根所述斜向导杆分别与所述斜向调动板进行紧固;所述丝杆一端与所述刻度手轮连接,所述丝杆另一端连接所述限位环,所述丝杆周向设置两片所述微型平面推力滚针轴承,所述斜向导杆分别设置于所述右斜向内腔以及所述左斜向内腔内。Preferably, the oblique sliding unit includes: a scaled handwheel, an oblique adjustment plate, a miniature planar thrust needle roller bearing, a screw nut, a screw rod, a limit ring and two oblique guide rods, and the screw nut is fixed on On the main housing mechanism, the two oblique guide rods are respectively fastened to the oblique adjustment plate; one end of the screw rod is connected to the scale hand wheel, and the other end of the screw rod is connected to the limit Two pieces of the miniature planar thrust needle roller bearings are arranged in the circumferential direction of the screw rod, and the oblique guide rods are respectively arranged in the right oblique inner chamber and the left oblique inner chamber.

优选的,竖直滑移单元包括:竖直导杆、竖直挡板、滑轨、滑移调动板和夹紧镶条,所述滑移调动板与所述夹紧镶条固定连接,所述夹紧镶条与所述滑轨紧配合,所述竖直挡板与所述滑轨固定连接,所述竖直导杆设置于所述中斜向内腔内。Preferably, the vertical sliding unit includes: a vertical guide rod, a vertical baffle, a slide rail, a sliding adjusting plate and a clamping insert, the sliding adjusting plate is fixedly connected to the clamping insert, the The clamping strip is tightly matched with the slide rail, the vertical baffle is fixedly connected with the slide rail, and the vertical guide rod is arranged in the inner cavity in the middle oblique direction.

优选的,水平滑移单元包括:夹紧块以及两根水平导杆,所述水平滑移单元的两根所述水平导杆的圆柱面分别与所述夹紧块的上、下端凹槽相接触,所述水平导杆与所述滑移调动板固定连接,所述水平导杆设置于所述上水平内腔以及所述下水平内腔内。Preferably, the horizontal sliding unit includes: a clamping block and two horizontal guide rods, the cylindrical surfaces of the two horizontal guiding rods of the horizontal sliding unit are respectively in contact with the upper and lower end grooves of the clamping block. contact, the horizontal guide rod is fixedly connected with the sliding adjusting plate, and the horizontal guide rod is arranged in the upper horizontal inner chamber and the lower horizontal inner chamber.

优选的,所述位移测量装置包括电涡流位移传感器以及位移测量杆,所述电涡流位移传感器固定连接于所述位移测量杆一端,所述标定球固定连接于所述位移测量杆另一端,所述电涡流位移传感器的信号线缆经所述位移测量杆内腔由侧壁穿出并与控制器连接,所述位移测量杆与所述斜向调动板固定连接。Preferably, the displacement measuring device includes an eddy current displacement sensor and a displacement measuring rod, the eddy current displacement sensor is fixedly connected to one end of the displacement measuring rod, and the calibration ball is fixedly connected to the other end of the displacement measuring rod, so The signal cable of the eddy current displacement sensor passes through the inner cavity of the displacement measuring rod through the side wall and is connected to the controller, and the displacement measuring rod is fixedly connected to the inclined adjustment plate.

优选的,所述电涡流位移传感器与所述超声探头两者的轴线始终保持30°夹角恒定。Preferably, the axes of the eddy current displacement sensor and the ultrasonic probe always maintain a constant angle of 30°.

优选的,所述角度测量装置为旋转编码器。Preferably, the angle measuring device is a rotary encoder.

优选的,旋转编码器通过PMAC控制卡与计算机实现连接,所述PMAC控制卡通过I/O接口分别接入所述电涡流位移传感器以及所述超声探头的控制器。Preferably, the rotary encoder is connected to the computer through a PMAC control card, and the PMAC control card is respectively connected to the controller of the eddy current displacement sensor and the ultrasonic probe through an I/O interface.

本发明的有益效果在于:The beneficial effects of the present invention are:

本发明以数控车床和基础结构为基础,以多传感器集成模式为方法,通过位移测量装置以及超声测量装置实现了对工件外表面轮廓和内表面轮廓的重构,并将测量坐标系下的样点坐标值统一于绝对坐标系,角度测量装置外接于车床主轴一端,车床主轴做回转运动的过程中能够精准记录旋转角度,角度测量装置能够在测量截面进行等角度采样,这既可以使同一截面相邻样点间的角度相等化,从而提升测量精度;也可以保证各测量截面的样点数量相同,便于后续评定,结构简单、成本低廉、使用便捷,可以实现对长孔类零件的圆度和轴线直线度误差精确、高效的在线测量。Based on the numerical control lathe and the basic structure, the invention uses the multi-sensor integration mode as the method, realizes the reconstruction of the outer surface contour and the inner surface contour of the workpiece through the displacement measuring device and the ultrasonic measuring device, and measures the sample under the coordinate system The point coordinate values are unified in the absolute coordinate system, and the angle measuring device is externally connected to one end of the lathe spindle. The rotation angle can be accurately recorded during the turning motion of the lathe spindle. The angle measuring device can perform equal-angle sampling on the measurement section, which can make the same section The angles between adjacent sample points are equalized, thereby improving the measurement accuracy; it can also ensure that the number of sample points in each measurement section is the same, which is convenient for subsequent evaluation. The structure is simple, the cost is low, and the use is convenient. It can realize the roundness of long-hole parts Accurate and efficient online measurement of straightness error and axis line.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据提供的附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only It is an embodiment of the present invention, and those skilled in the art can also obtain other drawings according to the provided drawings without creative work.

图1为本发明的具体结构示意图;Fig. 1 is the concrete structural representation of the present invention;

图2为本发明的俯视图;Fig. 2 is the top view of the present invention;

图3为本发明的正视图;Fig. 3 is the front view of the present invention;

图4为本发明的局部剖视图;Fig. 4 is a partial sectional view of the present invention;

图5为本发明的斜向滑移单元剖视图;Fig. 5 is a sectional view of an oblique sliding unit of the present invention;

图6为本发明的车床结构示意图;Fig. 6 is the structural representation of lathe of the present invention;

图7为本发明的测量原理示意图;Fig. 7 is a schematic diagram of the measurement principle of the present invention;

图8为本发明测量装置的参数标定原理示意图;Fig. 8 is a schematic diagram of the parameter calibration principle of the measuring device of the present invention;

图9为本发明活络量块的模型结构示意图。Fig. 9 is a schematic diagram of the model structure of the active gauge block of the present invention.

其中,图中:1-电涡流位移传感器,2-位移测量杆,3-刻度手轮,4-斜向调动板,5-M5×8型螺钉,6-M5×20型螺钉,7-M6×30型螺钉,8-标定球,9-标定基准板,10-竖直导杆垫圈,11-竖直导杆,12-弹性挡圈,13-竖直挡板,14-滑轨,15-夹持柄,16-水平导杆一,17-滑移调动板,18-水平导杆二,19-夹紧块,20-M6×30型螺钉,21-主壳机构,22-反射镜,23-轴用挡片,24-斜向挡圈,25-斜向导杆一,26-斜向导杆二,27-M5×16型螺钉,28-超声探头固定块,29-丝杆螺母,30-丝杆,31-滚花螺钉,32-进水机构垫圈,33-进水口螺母,34-锁紧螺母,35-微型平面推力滚针轴承一,36-微型平面推力滚针轴承二,37-M5×16型螺钉,38-M5×16型螺钉,39-夹紧镶条,40-喷水机构,41-M6×8螺钉,42-流水固定机构,43-密封圈,44-探头夹头,45-超声探头,46-旋转编码器,47-车床主轴,48-三角卡盘,49-干涉镜,50-激光干涉仪,51-工件,52-外表面轮廓,53-固定电涡流传感器轨迹,54-内表面轮廓,55-内孔拟合圆,56-锁紧螺钉,57-旋动块,58-固定块,59-顶针。Among them, in the figure: 1-eddy current displacement sensor, 2-displacement measuring rod, 3-scale handwheel, 4-oblique adjustment plate, 5-M5×8 type screw, 6-M5×20 type screw, 7-M6 ×30 screw, 8-calibration ball, 9-calibration reference plate, 10-vertical guide rod washer, 11-vertical guide rod, 12-retaining ring, 13-vertical baffle, 14-slide rail, 15 -Clamping handle, 16-horizontal guide rod 1, 17-sliding adjustment plate, 18-horizontal guide rod 2, 19-clamping block, 20-M6×30 type screw, 21-main shell mechanism, 22-mirror , 23-shaft block, 24-oblique retaining ring, 25-oblique guide rod one, 26-oblique guide rod two, 27-M5×16 type screw, 28-ultrasonic probe fixing block, 29-screw nut, 30-screw, 31-knurled screw, 32-water inlet mechanism washer, 33-water inlet nut, 34-lock nut, 35-miniature plane thrust needle roller bearing one, 36-miniature plane thrust needle roller bearing two, 37-M5×16 type screw, 38-M5×16 type screw, 39-clamping insert, 40-water spray mechanism, 41-M6×8 screw, 42-flowing water fixing mechanism, 43-sealing ring, 44-probe Chuck, 45-ultrasonic probe, 46-rotary encoder, 47-lathe spindle, 48-triangular chuck, 49-interferometer, 50-laser interferometer, 51-workpiece, 52-outer surface profile, 53-fixed electric Eddy current sensor trajectory, 54-inner surface contour, 55-inner hole fitting circle, 56-locking screw, 57-rotating block, 58-fixing block, 59-thimble.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

参阅附图1-5,一种长孔类零件形状误差测量装置包括:电涡流位移传感器1、斜向滑移单元、标定球8、主壳结构21、水平滑移单元、竖直滑移单元、夹持柄15、反射镜22、标定基准板9、超声探头固定块28和超声测量单元,电涡流位移传感器1依靠自身螺纹与位移测量杆2首端相连接,传感器信号线缆经位移测量杆2内腔由侧壁穿出,连接到采集设备上,这种布置方式使得电涡流位移传感器1既可随斜向滑移单元做斜向滑动,用以保证初始测量截面上测量坐标系原点尽可能与工件轴线重合;也可沿电涡流位移传感器1的轴线方向做前后移动,从而使传感器测量值位于可靠的量程范围内,位移测量杆2尾端连接标定球8,并使用紧固螺钉实现标定球8位置的固定,位移测量杆2通过M6×30型螺钉7与斜向滑移单元中的斜向调动板4实现装夹,既可随斜向滑移单元做斜向滑动,用以保证初始测量截面上测量坐标系原点尽可能与工件轴线重合,也可沿电涡流位移传感器1的轴线方向做前后移动,从而使传感器测量值位于可靠的量程范围内。Referring to accompanying drawings 1-5, a device for measuring the shape error of long hole parts includes: an eddy current displacement sensor 1, an oblique sliding unit, a calibration ball 8, a main shell structure 21, a horizontal sliding unit, and a vertical sliding unit , clamping handle 15, reflector 22, calibration reference plate 9, ultrasonic probe fixing block 28 and ultrasonic measuring unit, the eddy current displacement sensor 1 is connected with the head end of the displacement measuring rod 2 by its own thread, and the sensor signal cable is measured by displacement The inner cavity of the rod 2 passes through the side wall and is connected to the acquisition equipment. This arrangement enables the eddy current displacement sensor 1 to slide obliquely with the oblique sliding unit to ensure the origin of the measurement coordinate system on the initial measurement section. Coincide with the axis of the workpiece as much as possible; it can also move back and forth along the axis of the eddy current displacement sensor 1, so that the measured value of the sensor is within a reliable range. The end of the displacement measuring rod 2 is connected to the calibration ball 8, and a fastening screw is used The position of the calibration ball 8 is fixed, and the displacement measuring rod 2 is clamped through the M6×30 type screw 7 and the oblique adjustment plate 4 in the oblique sliding unit. It can slide obliquely with the oblique sliding unit. In order to ensure that the origin of the measurement coordinate system on the initial measurement section coincides with the axis of the workpiece as much as possible, it can also move back and forth along the axis of the eddy current displacement sensor 1, so that the measured value of the sensor is within a reliable range.

斜向滑移单元包括刻度手轮3、斜向调动板4、滚花螺钉31、斜向挡圈24、斜向导杆一25、斜向导杆二26、微型平面推力滚针轴承一35、微型平面推力滚针轴承二36、丝杆螺母29和丝杆30,丝杆30为阶梯轴式结构,有上、中、下3个阶梯面,根据轴径尺寸的不同,可分为上端轴、上中部轴、下中部轴和下端轴,上端轴与刻度手轮3连接,并利用上阶梯面和M5×8型螺钉5实现两者的固定,上中部轴周向分置微型平面推力滚针轴承一35和微型平面推力滚针轴承二36,前者位于斜向调动板4的凹槽平面上侧,后者位于中阶梯面与斜向调动板4之间,依靠锁紧螺母34、斜向调动板4和中阶梯面间的位置关系实现了两片轴承的轴向固定,下中部轴置于主壳机构21的中斜向内腔中,其周向的丝杆螺母29依靠M5×20型螺钉6固定在主壳机构21上,下端轴与限位环24连接,并利用下阶梯面和轴用挡圈23实现固定,斜向导杆一25和斜向导杆二26分别依靠螺钉与斜向调动板4进行紧固,并分别置于主壳机构21的右、左斜向内腔中,在斜向滑移单元工作前,打开滚花螺钉31,旋动刻度手轮3使整个单元做斜向移动,调整到合适位置后,旋紧滚花螺钉31,从而实现对当前位置的保持,当限位环24接触丝杆螺母29时,到达斜向滑移单元的上极限位置,而当微型平面推力滚针轴承二36接触丝杆螺母29时,出现下极限位置,在丝杆周向分置两片微型平面推力滚针轴承,并利用阶梯面和锁紧螺母实现两片轴承的轴向定位,既可以降低丝杆在旋转过程中所受的摩擦影响,也可以在微小轴向空间内提供极高的刚度,从而对丝杆进行一定程度的保护,提升其使用寿命。The oblique sliding unit includes scale hand wheel 3, oblique adjusting plate 4, knurled screw 31, oblique retaining ring 24, oblique guide rod one 25, oblique guide rod two 26, miniature planar thrust needle roller bearing I 35, miniature Plane thrust needle roller bearing 2 36, screw nut 29 and screw 30. The screw 30 is a stepped shaft structure with upper, middle and lower stepped surfaces. According to the different shaft diameters, it can be divided into upper end shaft, The upper middle shaft, the lower middle shaft and the lower end shaft, the upper end shaft is connected with the scale hand wheel 3, and the two are fixed by the upper stepped surface and the M5×8 type screw 5, and the upper middle shaft is circumferentially separated with miniature plane thrust needle rollers Bearing one 35 and miniature planar thrust needle roller bearing two 36, the former is located on the upper side of the groove plane of the oblique adjustment plate 4, the latter is located between the middle step surface and the oblique adjustment plate 4, relying on the lock nut 34, oblique The positional relationship between the adjusting plate 4 and the middle step surface realizes the axial fixation of the two bearings. The lower middle shaft is placed in the middle oblique inner cavity of the main housing mechanism 21, and its circumferential screw nut 29 relies on M5×20 Type screw 6 is fixed on the main shell mechanism 21, the lower end shaft is connected with the limit ring 24, and is fixed by using the lower step surface and the shaft retaining ring 23, and the oblique guide rod one 25 and the oblique guide rod two 26 rely on the screw and the oblique guide rod respectively. Fasten to the adjusting plate 4, and place them in the right and left oblique inner cavities of the main housing mechanism 21 respectively. Before the oblique sliding unit works, open the knurled screw 31, and turn the scale handwheel 3 to make the whole unit Do oblique movement, after adjusting to a suitable position, tighten the knurled screw 31, so as to maintain the current position, when the limit ring 24 contacts the screw nut 29, it reaches the upper limit position of the oblique sliding unit, and When the miniature planar thrust needle roller bearing 2 36 contacts the screw nut 29, the lower limit position appears, and two miniature planar thrust needle roller bearings are separated in the circumferential direction of the screw mandrel, and the two pieces of bearings are realized by using the stepped surface and the lock nut. Axial positioning can not only reduce the impact of friction on the screw during rotation, but also provide extremely high rigidity in a small axial space, thereby protecting the screw to a certain extent and improving its service life.

水平滑移单元包括水平导杆一16、水平导杆二18、夹紧块19和M6×30型螺钉20,水平导杆一16和水平导杆二18分别置于主壳机构21的上、下水平内腔中,其末端依靠螺钉与滑移调动板17进行固定,夹紧块19位于主壳机构21上,其上端凹槽和下端凹槽分别与水平导杆一16和水平导杆二18的圆柱面相接触,当夹紧块19内部的M6×30型螺钉20拧紧后,夹紧块19和主壳机构21会对水平导杆一16和水平导杆二18产生一定的紧固力,阻碍水平滑移单元的运动,从而保持当前的测量装置状态,当M6×30型螺钉20被旋松后,紧固力下降,使得主壳机构21可以沿水平导杆一16和水平导杆二18做直线运动。The horizontal sliding unit includes a horizontal guide rod 16, a horizontal guide rod 2 18, a clamping block 19 and an M6×30 type screw 20, and the horizontal guide rod 16 and the horizontal guide rod 2 18 are respectively placed on the upper and lower In the lower horizontal inner cavity, its end is fixed by screws and the sliding adjustment plate 17, and the clamping block 19 is located on the main housing mechanism 21, and its upper end groove and lower end groove are connected with the horizontal guide rod one 16 and the horizontal guide rod two respectively. The cylindrical surfaces of 18 are in contact, and when the M6×30 type screw 20 inside the clamping block 19 is tightened, the clamping block 19 and the main shell mechanism 21 will produce a certain fastening force on the first horizontal guide rod 16 and the second horizontal guide rod 18 , to hinder the movement of the horizontal sliding unit, so as to maintain the current state of the measuring device. When the M6×30 type screw 20 is loosened, the fastening force decreases, so that the main housing mechanism 21 can move along the horizontal guide rod 16 and the horizontal guide rod Two 18 do linear motion.

竖直滑移单元包括竖直导杆垫圈10、竖直导杆11、弹性挡圈12、竖直挡板13、滑轨14、滑移调动板17和夹紧镶条39,滑移调动板17以螺钉连接的形式和夹紧镶条39进行固定,并依靠夹紧镶条39与滑轨14实现紧配合,以保证自身的滑动状态,竖直挡板13通过M5×16型螺钉38与滑轨14进行固定,并利用竖直导杆11、弹性挡圈12和竖直导杆垫圈10实现对调整位置的保持,夹持柄15与滑轨14间使用螺钉固连,夹持柄15装夹于车床刀架上,使得测量装置随车床刀架作轴向或径向的直线运动,竖直滑移单元和标定单元统一集成在数控车床或基础结构上,依次联接,彼此配合,在圆度和轴线直线度误差测量上具有良好的效率和精度。The vertical sliding unit comprises a vertical guide rod washer 10, a vertical guide rod 11, a circlip 12, a vertical baffle plate 13, a slide rail 14, a sliding adjustment plate 17 and a clamping strip 39, and the sliding adjustment plate 17 is fixed with the clamping strip 39 in the form of screw connection, and relies on the clamping strip 39 to achieve a tight fit with the slide rail 14 to ensure its own sliding state. The vertical baffle 13 is connected with the M5×16 type screw 38 Slide rail 14 is fixed, and utilizes vertical guide rod 11, circlip 12 and vertical guide rod washer 10 to realize the maintenance to adjustment position, uses screw to be fixedly connected between clamping handle 15 and slide rail 14, and clamping handle 15 Clamped on the lathe turret, so that the measuring device moves axially or radially with the lathe turret, the vertical sliding unit and the calibration unit are integrated on the CNC lathe or the basic structure, connected in sequence, and cooperate with each other. It has good efficiency and precision in the measurement of roundness and axis straightness error.

反射镜22粘贴固连在主壳机构与超声测量单元的连接面上,且位于超声测量单元后侧,用以接受来自激光干涉仪50透过干涉镜49的测量光路,激光干涉仪50和干涉镜49两者轴线需与反射镜22轴线始终位于同一直线上,且三者间不存在任何障碍物,以确保测量光路的准确性和稳定性,标定基准板9采用M5×16型螺钉37连接,超声探头固定块28采用M5×16型螺钉27连接,超声探头固定块28依靠M6×8螺钉41固定超声测量单元的位置,超声测量单元包括喷水机构40、流水固定机构42、密封圈43、探头夹头44和超声探头45,流水固定机构42右端依靠自身的夹持结构与超声探头45相连,其间放置密封圈43,保证水流不会外溢,并在外侧周向放置探头夹头44,以确保流水固定机构42与探头夹头44连接的稳定性,左端依靠螺纹结构与喷水机构40相连,可根据测量系统对水流的需求,对喷水机构40的出水口和管路长度做出调整与更换,侧壁经进水机构垫圈和进水口螺母33与输送层流状态水流的水管相连,进水口螺母33可根据管径大小做出更换,以适应不同管路。Reflector 22 is pasted and fixed on the connection surface of the main shell mechanism and the ultrasonic measurement unit, and is positioned at the rear side of the ultrasonic measurement unit, to accept the measurement optical path from the laser interferometer 50 through the interferometer 49, the laser interferometer 50 and the interferometer The axes of the mirror 49 and the axis of the reflector 22 must always be on the same straight line, and there is no obstacle between the three to ensure the accuracy and stability of the measurement optical path. The calibration reference plate 9 is connected by M5×16 type screws 37 , the ultrasonic probe fixing block 28 is connected by M5×16 type screws 27, the ultrasonic probe fixing block 28 relies on M6×8 screws 41 to fix the position of the ultrasonic measurement unit, and the ultrasonic measurement unit includes a water spray mechanism 40, a running water fixing mechanism 42, and a sealing ring 43 , probe chuck 44 and ultrasonic probe 45, the right end of the running water fixing mechanism 42 is connected to the ultrasonic probe 45 by its own clamping structure, a sealing ring 43 is placed therebetween to ensure that the water flow will not overflow, and the probe chuck 44 is placed circumferentially on the outside, In order to ensure the stability of the connection between the running water fixing mechanism 42 and the probe chuck 44, the left end is connected to the water spray mechanism 40 by means of a threaded structure, and the water outlet and the length of the pipeline of the water spray mechanism 40 can be adjusted according to the demand of the measurement system for water flow. For adjustment and replacement, the side wall is connected to the water pipe for conveying laminar flow through the water inlet mechanism gasket and the water inlet nut 33. The water inlet nut 33 can be replaced according to the diameter of the pipe to adapt to different pipelines.

参阅附图6-7,利用三角卡盘48将被测工件一端固定在数控车床上,若工件很大,则另需使用顶尖对其另一端进行装夹,在车床主轴47末端,以螺钉连接的方式外接旋转编码器46;车床主轴47带动工件做转速恒定的旋转运动,每隔一定角度由旋转编码器46触发电涡流位移传感器1和超声探头45进行同时采样,该角度需要满足:

Figure BDA0003389478160000081
(n为正整数),此角度易于确定电涡流位移传感器1和超声探头15间的位置关系,使得两者的测量数据可以保持良好的一致对应性,在一次旋转过程中,可同时获得某位置对应的位移值和厚度值,将电涡流位移传感器1、超声探头45和激光干涉仪50的干涉镜49统一集成于位移测量装置上,且保证电涡流位移传感器1和超声探头45两者轴线位于同一竖直平面内,并间隔30°分开放置,位移测量装置依靠自身夹持柄结构与车床刀架紧固连接,车床刀架带动位移测量装置沿径向调整,可使各传感器的测量值位于可靠的量程范围内;车床刀架带动位移测量装置沿轴向进给,并利用激光干涉仪50、干涉镜49和反射镜22间的输出光光路、测量光光路、反射光光路以及汇合光光路记录位移测量装置的轴向位移,实现对多个测量截面的获取,旋转编码器46、电涡流位移传感器1、超声探头45和激光干涉仪50经数据采集和处理,以数字信号形式传输至上位机终端,旋转编码器46的方波脉冲信号接入PMAC控制卡,PMAC控制卡依靠计数器和比较器产生的触发脉冲经I/O接口分别接入电涡流位移传感器1和超声探头45两者的控制器,在这种采样控制模式下,旋转编码器46触发电涡流位移传感器1和超声探头45同时在测量截面进行等角度采样,这既可以使同一截面相邻样点间的角度相等化,从而提升测量精度;也可以保证各测量截面的样点数量相同,便于后续评定。Referring to accompanying drawings 6-7, use the triangular chuck 48 to fix one end of the workpiece to be tested on the CNC lathe. If the workpiece is large, you need to use the top to clamp the other end. At the end of the lathe spindle 47, connect it with screws The rotary encoder 46 is externally connected in the manner; the lathe spindle 47 drives the workpiece to perform rotational motion with a constant speed, and the rotary encoder 46 triggers the eddy current displacement sensor 1 and the ultrasonic probe 45 to perform simultaneous sampling at a certain angle, and the angle needs to satisfy:
Figure BDA0003389478160000081
(n is a positive integer), this angle is easy to determine the positional relationship between the eddy current displacement sensor 1 and the ultrasonic probe 15, so that the measurement data of the two can maintain a good consistent correspondence, and in a rotation process, a certain position can be obtained at the same time For the corresponding displacement value and thickness value, the eddy current displacement sensor 1, the ultrasonic probe 45 and the interferometer 49 of the laser interferometer 50 are uniformly integrated on the displacement measuring device, and ensure that the axes of the eddy current displacement sensor 1 and the ultrasonic probe 45 are located at In the same vertical plane and placed separately at intervals of 30°, the displacement measuring device is tightly connected with the lathe tool holder by its own clamping handle structure, and the lathe tool holder drives the displacement measuring device to adjust radially, so that the measured value of each sensor is at Within a reliable measuring range; the lathe tool post drives the displacement measuring device to feed in the axial direction, and utilizes the output light path, measurement light path, reflected light path and converging light path between the laser interferometer 50, the interference mirror 49 and the reflector 22 Record the axial displacement of the displacement measurement device to realize the acquisition of multiple measurement sections. After data collection and processing by the rotary encoder 46, eddy current displacement sensor 1, ultrasonic probe 45 and laser interferometer 50, they are transmitted to the host in the form of digital signals The machine terminal, the square wave pulse signal of the rotary encoder 46 is connected to the PMAC control card, and the PMAC control card relies on the trigger pulse generated by the counter and the comparator to respectively connect the eddy current displacement sensor 1 and the ultrasonic probe 45 through the I/O interface. The controller, in this sampling control mode, the rotary encoder 46 triggers the eddy current displacement sensor 1 and the ultrasonic probe 45 to perform equiangular sampling on the measurement section at the same time, which can equalize the angles between adjacent sample points on the same section, Thereby improving the measurement accuracy; it can also ensure that the number of sample points in each measurement section is the same, which is convenient for subsequent evaluation.

以电涡流位移传感器1和超声探头45两者轴线的交点为原点建立的测量坐标系为o'-x'y'z',主轴轴线方向为z′坐标轴,水平方向为x'坐标轴,竖直方向为y'坐标轴,在初始测量截面上,通过调整竖直滑移单元、斜向滑移单元,使电涡流位移传感器1和超声探头45两者轴线的交点尽可能落在工件轴线上,并以该截面的测量坐标系作为绝对坐标系o-xyz;通过调整水平滑移单元、位移测量杆2,使两传感器的测量值落在各自的可靠量程范围内,以满足传感器的使用条件,经测量与标定,得到测量坐标系原点到电涡流位移传感器1发射端的距离L,电涡流位移传感器1测量得到长孔类零件外表面上对应测量点到传感器发射端的位移值,以此描述工件外表面的实际轮廓;超声探头45经非接触式测量得到工件的壁厚值h,壁厚值h指在工件外表面与测量坐标系原点连线方向上外表面到对应内表面的距离值,根据几何关系,实现对工件内表面轮廓的描述,由于电涡流位移传感器1和超声探头45间隔30°布置,在数据处理时,需将电涡流位移传感器1对应的第n个测点与超声探头45对应的第一个测点相对应,使两传感器的测点保持一致,通过这种布置和处理方法,经一次旋转即可同时获得一个测量截面上所有测点的位移值e和壁厚值h,根据公式(1)计算可得测量坐标原点到孔类零件内表面上各测量位置的距离R。The measurement coordinate system established with the intersection of the axes of the eddy current displacement sensor 1 and the ultrasonic probe 45 as the origin is o'-x'y'z', the axis direction of the main shaft is the z' coordinate axis, and the horizontal direction is the x' coordinate axis, The vertical direction is the y' coordinate axis. On the initial measurement section, by adjusting the vertical sliding unit and the oblique sliding unit, the intersection point of the axes of the eddy current displacement sensor 1 and the ultrasonic probe 45 falls on the axis of the workpiece as much as possible. , and take the measurement coordinate system of this section as the absolute coordinate system o-xyz; by adjusting the horizontal sliding unit and the displacement measuring rod 2, the measured values of the two sensors fall within their respective reliable ranges to meet the requirements of the sensors. Conditions, after measurement and calibration, the distance L from the origin of the measurement coordinate system to the transmitter end of the eddy current displacement sensor 1 is obtained, and the displacement value from the corresponding measurement point on the outer surface of the long-hole part to the transmitter end of the sensor is obtained by the measurement of the eddy current displacement sensor 1, which is described in this way The actual contour of the outer surface of the workpiece; the ultrasonic probe 45 obtains the wall thickness h of the workpiece through non-contact measurement, and the wall thickness h refers to the distance value from the outer surface to the corresponding inner surface in the direction of the line connecting the outer surface of the workpiece and the origin of the measurement coordinate system , according to the geometric relationship, realize the description of the inner surface contour of the workpiece. Since the eddy current displacement sensor 1 and the ultrasonic probe 45 are arranged at an interval of 30°, during data processing, it is necessary to combine the nth measuring point corresponding to the eddy current displacement sensor 1 with the ultrasonic probe 45. The first measuring point corresponding to the probe 45 is corresponding, so that the measuring points of the two sensors are consistent. Through this arrangement and processing method, the displacement value e and wall thickness of all measuring points on a measuring section can be obtained at the same time after one rotation The value h can be calculated according to the formula (1) to obtain the distance R from the origin of the measurement coordinates to each measurement position on the inner surface of the hole part.

R=L-e-h (1)R=L-e-h (1)

在每个测量截面上,根据求解的距离R、旋转编码器46记录的旋转角度和激光干涉仪50记录的测量截面沿轴向移动的距离l,按公式(2)计算得到各测量位置在绝对坐标下对应的坐标值,利用相关评定算法对截面圆度误差和截面圆心坐标值进行求解,获取多个测量截面圆心坐标后,使用直线度误差评定方法,对圆心坐标进行直线拟合,从而得到轴线直线度误差值。On each measurement section, according to the distance R of the solution, the rotation angle recorded by the rotary encoder 46 and the distance l of the axial movement of the measurement section recorded by the laser interferometer 50, the absolute distance of each measurement position is calculated according to formula (2). Corresponding coordinate values under the coordinates, use the relevant evaluation algorithm to solve the cross-section roundness error and the cross-section center coordinates, after obtaining the center coordinates of multiple measurement sections, use the straightness error evaluation method to perform straight line fitting on the center coordinates, thus obtaining Axis straightness error value.

Figure BDA0003389478160000101
Figure BDA0003389478160000101

参阅附图8,由测量原理可知,需要对电涡流位移传感器1和超声探头45两者轴线的交点(即测量坐标系原点)到测量装置上电涡流位移传感器1发射端的距离值L进行标定,根据几何关系,参数值L可按式(3)计算得到:Referring to accompanying drawing 8, it can be seen from the measurement principle that it is necessary to calibrate the distance value L from the intersection of the axes of the eddy current displacement sensor 1 and the ultrasonic probe 45 (i.e. the origin of the measurement coordinate system) to the transmitting end of the eddy current displacement sensor 1 on the measuring device, According to the geometric relationship, the parameter value L can be calculated according to formula (3):

L=3r1+2h1+2h2-l1 (3)L=3r 1 +2h 1 +2h 2 -l 1 (3)

其中,r1为标定球半径,l1为电涡流位移传感器1发射端到标定球8末端的距离值,h2为标定基准板9的基准平面到超声探头45轴线的距离值,这些参数值均可在装配完成后由三坐标测量机测量得到,且始终恒为定值;h1为标定基准板9的基准平面到标定球8下端的距离值,可使用本发明设计的活络量块进行测量,将活络量块置于标定基准板9的基准平面与标定球8下端之间,不断调整量块,使其上下测量面分别与标定球8下端、标定基准板9的基准平面相接触;利用千分尺测量此时量块的厚度值,即可获得距离值。Wherein, r1 is the radius of the calibration ball, l1 is the distance value from the transmitting end of the eddy current displacement sensor 1 to the end of the calibration ball 8 , h2 is the distance value from the reference plane of the calibration reference plate 9 to the axis of the ultrasonic probe 45, these parameter values All can be measured by the three-coordinate measuring machine after the assembly is completed, and it is always a fixed value; h1 is the distance value from the reference plane of the calibration reference plate 9 to the lower end of the calibration ball 8, which can be carried out using the flexible measuring block designed by the present invention. For measurement, place the flexible gauge block between the reference plane of the calibration reference plate 9 and the lower end of the calibration ball 8, and constantly adjust the gauge block so that the upper and lower measurement surfaces are respectively in contact with the lower end of the calibration ball 8 and the reference plane of the calibration reference plate 9; Use a micrometer to measure the thickness of the gauge block at this time to obtain the distance value.

参阅附图9,活络量块包括:锁紧螺钉56、旋动块57、固定块58和顶针59,以旋动块57上表面作为活络量块的上测量面,以固定块58下表面作为活络量块的下测量面,打开锁紧螺钉56,顺时针或逆时针旋转旋动块57,其螺纹部分沿顶针59滑动,使量块的整体厚度发生变化;紧固锁紧螺钉56,可保持量块的当前厚度。Referring to accompanying drawing 9, flexible measuring block comprises: locking screw 56, rotating block 57, fixed block 58 and thimble 59, with rotating block 57 upper surface as the upper measuring surface of flexible measuring block, with fixed block 58 lower surface as Move the lower measuring surface of the measuring block, open the locking screw 56, rotate the rotating block 57 clockwise or counterclockwise, and its threaded part slides along the thimble 59, so that the overall thickness of the measuring block changes; tighten the locking screw 56, you can Holds the current thickness of the gauge block.

对所公开的实施例的上述说明,使本领域专业技术人员能够实现或使用本发明。对实施例的多种修改对本领域的专业技术人员来说将是显而易见的,本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下,在其它实施例中实现。因此,本发明将不会被限制于本文所示的这些实施例,而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。The above description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the invention. Various modifications to the embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention will not be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (5)

1. A long hole part shape error measuring device is characterized by comprising: the device comprises a base device, a measuring device, a calibration device and a sliding device;
the basic device comprises a main shell mechanism and a lathe spindle;
the sliding device comprises an oblique sliding unit, a horizontal sliding unit and a vertical sliding unit, and is fixedly connected with the main shell mechanism;
the measuring device comprises an angle measuring device, an interferometer, an interference mirror, a reflecting mirror, a displacement measuring device and an ultrasonic measuring device, wherein the angle measuring device is fixed at one end of the lathe spindle, the ultrasonic measuring device is fixed on the main shell mechanism and is kept horizontal to the rotary axis of the lathe spindle, the reflecting mirror is fixed on the connecting surface of the main shell mechanism and the ultrasonic measuring device, and the axis angles of the displacement measuring device and the ultrasonic measuring device are always kept constant and are positioned in the same vertical plane;
the calibration device comprises a calibration ball and a calibration reference plate; the interferometer, the interference mirror and the reflector are arranged coaxially, the calibration ball is fixedly connected with the displacement measuring device, and the calibration reference plate is arranged on the main shell mechanism;
the angle measuring device is in communication connection with a computer, and the displacement measuring device, the ultrasonic measuring device and the interferometer are in communication connection with the computer through respective controllers;
the ultrasonic measuring device comprises a water spraying mechanism, a flowing water fixing mechanism, probe chucks and an ultrasonic probe, wherein the flowing water fixing mechanism is fixedly connected with the ultrasonic probe, a plurality of probe chucks are circumferentially arranged on the outer side of the flowing water fixing mechanism, the flowing water fixing mechanism is communicated with the water spraying mechanism, and the side wall of the water spraying mechanism is communicated with a water pipe;
the main shell mechanism is provided with a middle oblique inner cavity, a right oblique inner cavity, a left oblique inner cavity, an upper horizontal inner cavity and a lower horizontal inner cavity;
the slant slip unit includes: the device comprises a scale hand wheel, an inclined adjusting plate, a micro plane thrust needle bearing, a screw nut, a screw rod, a limiting ring and two inclined guide rods, wherein the screw nut is fixed on the main shell mechanism, and the two inclined guide rods are respectively fastened with the inclined adjusting plate; one end of the screw rod is connected with the scale hand wheel, the other end of the screw rod is connected with the limiting ring, two micro plane thrust needle roller bearings are circumferentially arranged on the screw rod, and the inclined guide rods are respectively arranged in the right inclined inner cavity and the left inclined inner cavity;
the displacement measuring device comprises an eddy current displacement sensor and a displacement measuring rod, the eddy current displacement sensor is fixedly connected to one end of the displacement measuring rod, the calibration ball is fixedly connected to the other end of the displacement measuring rod, a signal cable of the eddy current displacement sensor penetrates through the inner cavity of the displacement measuring rod from the side wall and is connected with the controller, and the displacement measuring rod is fixedly connected with the oblique adjusting plate;
the axes of the eddy current displacement sensor and the ultrasonic probe are always kept at a constant included angle of 30 degrees.
2. A long hole part shape error measuring apparatus according to claim 1, wherein the vertical sliding unit comprises: vertical guide arm, vertical baffle, slide rail, the accent board that slides and press from both sides tight panel fixed connection, the accent board that slides with press from both sides tight panel fixed connection, press from both sides tight panel with the slide rail tight fit, vertical baffle with slide rail fixed connection, vertical guide arm set up in well oblique to the intracavity.
3. The long hole part shape error measuring device according to claim 2, wherein the horizontal sliding unit comprises: the clamping block and the two horizontal guide rods, the cylindrical surfaces of the two horizontal guide rods of the horizontal sliding unit are respectively contacted with the grooves at the upper end and the lower end of the clamping block, the horizontal guide rods are fixedly connected with the sliding adjusting plate, and the horizontal guide rods are arranged in the upper horizontal inner cavity and the lower horizontal inner cavity.
4. A long hole type part shape error measuring device according to claim 1, wherein said angle measuring device is a rotary encoder.
5. A long hole part shape error measuring device as claimed in claim 4, wherein the rotary encoder is connected with the computer through a PMAC control card, and the PMAC control card is respectively connected with the eddy current displacement sensor and the controller of the ultrasonic probe through I/O interfaces.
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