CN105651218A - Dimension and tolerance on-line measurement device and method for multi-step shaft - Google Patents

Abstract

The invention discloses a dimension and tolerance on-line measurement device and method for a multi-step shaft. The measurement device comprises a fine adjustment automatic feeding device, an anti-collision automatic retraction device, a sensor displacement and angle fine adjustment device and a sensor fixed installation arc-shaped support. The fine adjustment automatic feeding device and the anti-collision automatic retraction device are connected together and fixed to a machine tool movable slide carriage through fixing bolts. The sensor fixed installation arc-shaped support is installed on a ball screw movement guide rail pair of the fine adjustment automatic feeding device. By means of the dimension and tolerance on-line measurement device, the stepped shaft section circular form error and the machine tool main shaft rotation error can be separated out through the section three-laser-displacement-sensor measurement matrix separation algorithm. The stepped shaft generatrix linearity error, the slide carriage guider rail movement error and the angle deflection error of the slide carriage can be separated out through the three-eddy-current-sensor linearity measurement and separation algorithm. When the measurement device moves together with the slide carriage, measurement of dimensions and tolerances such as the circularity, coaxiality, cylindricity, linearity, end face beating degree and radical beating degree of the multi-step shaft can be achieved. The dimension and tolerance on-line measurement device has the advantages of being high in measurement efficiency and precision, capable of achieving automation, and the like.

Description

A kind of multi-ladder axle line position tolerance is in level detecting apparatus and detection method thereof

Technical field

The present invention relates in mechanical measurement technique field, it is adaptable to the measurement of multi-ladder axle line position tolerance.

Technical background

Along with developing rapidly of science and technology, engineering measuring technology there occurs deep change, and achieves huge development achievements. But some multi-ladder axles are measured, domestic a lot of enterprise generally more adopts off-line measurement, the Quadratic Measurement Error brought is installed in introduction unavoidably, even some factory adopts human contact to measure more for the measurement of multidiameter, owing to multi-factor comprehensive causes that certainty of measurement is relatively low, being difficult to ensure that the requirement of accuracy of detection, the method for manual measurement also add hand labor intensity, and therefore high precision test in place or online has become the development trend of detection technique.

Present invention aim to address that manual detection labor intensity is high, certainty of measurement is low, it is impossible to the problem facilitating implementation on-position measure; Thering is provided a kind of multi-ladder axle line position tolerance in level detecting apparatus and detection method thereof, measurement apparatus has automaticity height, it is simple to realizes automatically measuring, reduces the advantages such as manual detection intensity.

To achieve these goals, the technical scheme of the employing of the present invention:

A kind of multi-ladder axle line position tolerance is in level detecting apparatus and detection method thereof; This measurement apparatus includes fine setting auto-feeder, crashproof self-retracting device, sensor displacement angle vernier device, and fixing arc support installed by sensor; Fine setting auto-feeder links together with crashproof self-retracting device, is bolted on machine tool motion slide carriage by fixing, and sensor is installed fixing arc support and is arranged on fine setting auto-feeder ball-screw guide rail pair; This device measures separation algorithm by cross section three laser displacement sensor can isolate multidiameter cross section deviation from circular from and machine spindle rotary error; Three eddy current sensor straight line degree measurement separation algorithms can isolate multidiameter bus straightness error, slide carriage guide rail movement error, the angle Run-out error of slide carriage. This measurement apparatus moves the measurement that can realize the line position tolerances such as multi-ladder axle circularity, axiality, cylindricity, linearity, end face run-out degree, radius run-out degree with slide carriage.

Fine setting feed arrangement includes linear electric motors, support post, servomotor, decelerator, ball-screw, grating scale, ball-screw guide rail movement pair;Support post is fixedly placed on linear electric motors movable plate, support post is provided with servomotor and is connected with ball-screw by decelerator, and ball-screw guide rail movement pair is positioned on ball-screw.

Crashproof self-retracting device includes vertical column, telescoping cylinder.

Sensor displacement angle vernier device can finely tune measurement sensor measurement angle and displacement.

IL-065 laser displacement sensor, reference range 65mm, measure distance 55 to 105mm, the linearity is F.S. �� 0.1%*2. repeatable accuracy 2um*3.

XZY3300 eddy current sensor, probe diameterLinearity measuring range 4mm, range of linearity 1.0-5.0mm, linear midpoint 3.0mm, nonlinearity erron �� 1%.

A kind of multi-ladder axle line position tolerance is in level detecting apparatus and detection method, and three laser displacement sensor calculation matrix separation algorithms can isolate multidiameter cross section deviation from circular from and machine spindle rotary error; Three eddy current sensor straight line degree measurement separation algorithms can isolate multidiameter bus straightness error, slide carriage guide rail movement error, the angle Run-out error of slide carriage.

A kind of multi-ladder axle line position tolerance, at level detecting apparatus, is characterized in that, laser displacement sensing clamp gripping member two adjacent side is all by protection device.

The method have the benefit that

1 this device has compact conformation, and certainty of measurement is high, the feature that the suitability is strong;

2 these plant automation degree are high, reduce people's working strength, improve work efficiency;

Accompanying drawing explanation

Fig. 1 invention measurement apparatus assembling structural representation;

The crashproof automatic retraction structure schematic diagram of Fig. 2 invention measurement apparatus;

This invention measurement apparatus of Fig. 3 finely tunes at a slow speed feeding assembly structure schematic diagram;

Fig. 4 invention measurement apparatus sensor displacement angle automatic fine tuning structural representation;

Fig. 5 sensor placement figure;

Fig. 6 tri-laser displacement sensor cross section roundness measurement schematic diagram;

Fig. 7 tri-eddy current displacement sensor straight line degree measurement schematic diagram;

Fig. 1 is this invention measurement apparatus assembling structural representation, including slide carriage 1, 2 crashproof self-retracting devices, 3 fine setting auto-feed assembly apparatus, 4 sensor displacement angle vernier devices, fixing plate 5, telescoping cylinder body 6, active contractile cylinder 7, Miniature servo-motors 8, decelerator 9, fine setting body 10, ball-screw 11, linear electric motors body 12, workbench 13, connect axle 14, grating scale 15, fine setting body reinforcement 16, protection device 17 laser displacement sensor 18, sensor holder 19, replaceable bar 20, angle vernier device 21, displacement micro-adjusting mechanism 22, rotary part 23, arc measures frame 24, ball-screw guideway 25, laser displacement sensor 26, 28, 30, eddy current sensor 27, micrometric displacement angle regulator 29.

Detailed description of the invention

A kind of multi-ladder axle line position tolerance is in level detecting apparatus and detection method thereof, this device includes fine setting auto-feed assembly apparatus 3, crashproof self-retracting device 2, sensor displacement angle vernier device 4, laser displacement sensor 18, 26, 28, 29, 30, clamped by sensor holder 19 (4), connect replaceable bar 20, arc is installed and measures frame 24, fine setting auto-feed assembly apparatus 3 is bolted on machine tool motion slide carriage 1 by fixing, crashproof self-retracting device 2 is bolted on slide carriage 1 by fixing, fine setting auto-feed assembly apparatus 2 links together with crashproof self-retracting device 2, arc is measured frame 24 and is arranged on fine setting auto-feeder ball-screw 11 this device by ball-screw guideway 25 and can isolate multidiameter cross section deviation from circular from and machine spindle rotary error by cross section three laser displacement sensor separation algorithm,Three eddy current sensor straight line degree measurements can isolate multidiameter bus straightness error, slide carriage guide rail movement error, the angle Run-out error of slide carriage; This device moves the measurement that can realize the line position tolerances such as multi-ladder axle circularity, axiality, cylindricity, linearity, end face run-out degree, radius run-out degree with slide carriage.

Crashproof self-retracting device includes fixing plate 5, telescoping cylinder body 6, movable telescopic cylinder 7 is constituted, fixing plate 5 passes through corresponding fixing and is bolted on slide carriage 1, and telescoping cylinder body 6 is bolted to fixing plate 5 by corresponding fixing, and movable telescopic cylinder 7 can realize horizontal direction telescopic moving.

Fine setting auto-feed assembly apparatus 3 includes Miniature servo-motors 8, decelerator 9, fine setting body 10, ball-screw 11, linear electric motors body 12, workbench 13, connection axle 14, grating scale 15, fine setting body reinforcement 16; Miniature servo-motors 8, connects axle 14, decelerator 9, ball-screw 11, it is sequentially arranged on fine setting body 10, fine setting body 10 is bolted on workbench 13 by corresponding fixing, and fine setting body reinforcement 16 is connected on fine setting body 10, strengthens the fastness of fine setting body 10; Grating scale 15 (2) accurately record z to y to displacement.

Sensor displacement angle vernier device 4 includes protection device 17 laser displacement sensor 18, sensor holder 19, replaceable bar 20, angle vernier device 21, displacement micro-adjusting mechanism 22, rotary part 23. Protection device 17 is arranged on displacement transducer both sides of edges and prevents sensor impact, and replaceable bar 20 can be able to be replaced according to different measurement requirement.

29 is micrometric displacement angle regulator, it is possible to vernier angle, it is achieved 28 laser displacement sensor incident raies keep vertical with surveyed end face.

This device is by program set in advance, position to be specified is arrived by fast feed system driving device, then, after feed system is automatically adjusted distance arrival distance to a declared goal at a slow speed, regulates micrometric displacement angle device and make laser displacement sensor incident ray reach measurement requirement, complete to measure front preparation.

When protection device signal enabling on measurement apparatus laser displacement sensor holder, crashproof self-retracting device is retracted automatically, it is prevented that sensor impact is impaired.

Fig. 6 is three laser displacement sensor cross section roundness measurement schematic diagrams, and three laser displacement sensor 18,26,30 installations at a certain angle, the intersection point O of three sensor measurement axis is that zero sets up rectangular coordinate system XOY.

If: r (��) for tested part at �� place circularity form error. ��_x(��)����_y(��) gyroaxis turn error at �� place component on coordinate system XOY coordinate axes is respectively measured, ��, �� respectively angle between sensor 26,18 and sensor 30. Sensor during measurement, sensor is fixed, and tested part does gyration, if S₀(��)��S₁(��)��S₂(��) the signal output for sensor 30,26,18 then can obtain:

S₀(��)=r (��)+��_x(��)(1)

S₁(��)=r (��+��)+��_x(��)cos��+��_y(��)sin��(2)

S₂(��)=r (��+��)+��_x(��)cos��+��_y(��)sin��(3)

(1), (2), (3) are multiplied by weight coefficient c respectively₀��c₁��c₂And addition obtains;

S_n(��)=c₀S₀(��)+c₁S₁(��)+c₂S₂(��)=c₀r(��)+c₁r(��+��)+c₂r(��+��)

+(c₀+c₁cos��+c₂cos��)��_x(��)+(c₁sin��+c₂sin��)��_y(��)(4)

Separation circularity by mistake, makes c₀+c₁cos��+c₂Cos ��=0, c₁sin��+c₂Sin ��=0; Take c₀=1, obtain weight coefficient c₀=1, $c_1=\frac{sin\mathrm{\β}}{\sin a(\mathrm{\α}-\mathrm{\β})},c_2=-\frac{sin\mathrm{\α}}{\sin a(\mathrm{\α}-\mathrm{\β})}---\left(5\right)$

By c in (5)₀��c₁��c₂Bring abbreviation in (4) into and obtain S_n(��)=c₀r(��)+c₁r(��+��)+c₂r(��+��)(6)

By (6) discrete Fourier transform, and apply Fourier transformation time delay phase shift properties, can obtain:

R (n)=S (n)/G (n) (7)

Wherein $G\left(n\right)=1+c_1{e}^{j2{\mathrm{\πp}}_1/N}+c_2{e}^{j2{\mathrm{\πp}}_2/N},$ p₁=�� N/2 ��, p₂=�� N/2 ��,

(7) formula is carried out inverse discrete Fourier transformer inverse-discrete, measured surface deviation from circular from r (i) can be obtained, namely

R (i)=F^-1[R(n)](8)

By (1), (2), (3) discretization, obtain S₀(i)=r (i)+��_x(i)(9)

$S_1\left(i\right)=r(i+P_1)+{\mathrm{\δ}}_x\left(i\right)cos\left(\frac{2{\mathrm{\πp}}_1}{N}\right)+{\mathrm{\δ}}_y\left(i\right)sin\left(\frac{2{\mathrm{\πp}}_1}{N}\right)---\left(10\right)$

$S_2\left(i\right)=r(i+P_2)+{\mathrm{\δ}}_x\left(i\right)cos\left(\frac{2{\mathrm{\πp}}_2}{N}\right)+{\mathrm{\δ}}_y\left(i\right)sin\left(\frac{2{\mathrm{\πp}}_2}{N}\right)---\left(11\right)$

Being brought into (8) by G (n), simultaneous (9), (10), (11) obtain ��_x(i)=S₀(i)-r(i),(12)

${\mathrm{\δ}}_y\left(i\right)=\frac{S_1\left(i\right)-r(i+P_1)-\left(S_0\right(i)-r(i\left)\right)cos(2{\mathrm{\πp}}_1/N)}{sin(2{\mathrm{\πp}}_1/N)}---\left(13\right)$

Fig. 7 is three eddy current displacement sensor straight line degree measurement schematic diagrams, arranges three displacement transducers with distance D for interval and scans north side shape f (x with s for the sampling interval_n) .N is sampling number, transverse axis position is with x_nRepresenting, the translation error of vertical direction is S_y, error of tilt is S_p, then the measured value m of sensor₁,m₂,m₃Can below formula represent.

m₁(x_n)=f (x_n)+S_y(x_n)(14)

m₂(x_n)=f (x_n+D)+S_y(x_n)+DS_p(x_n)(15)

m₃(x_n)=f (x_n+2D)+S_y(x_n)+2DS_p(x_n) scope n=[1, N] (16)

Square being divided by of above formula (14), (15), the difference of (16) three formula measured values and transducer spacing, then scan the kinematic error of guide rail and be eliminated that to obtain relational expression as follows:

$m^{\′\′}\left(x_n\right)=\frac{M_1\left(x_n\right)-2m_2\left(x_n\right)+m_3\left(x_n\right)}{D^2}=\frac{1}{D}\[\frac{f(x_n+2D)-f(x_n+D)}{D}-\frac{f(x_n+D)-f\left(x_n\right)}{D}\]---\left(17\right)$

It is f (x that the item of above formula (17) right-hand member can be approximately considered_n) second differential of upper each point, above formula is carried out the reconstruct shape that quadratic integral is hungered and thirst.

$f\left(x_n\right)\≈m\left(x_n\right)={\mathrm{s\Σ}}_{i=1}^n\[{\mathrm{s\Σ}}_{j=1}^i{m}^{\′\′}\left(x_j\right)\]=\frac{s^2}{D^2}{\mathrm{\Σ}}_{i=1}^n{\mathrm{\Σ}}_{j=1}^i\[m_1\left(x_j\right)-$ $2m2xj+m3xj\]$ Scope n=[1, N] (18)

Result of study according to kiyono, makes the relative error of integration line-of-sight course less than 6%, then the wavelength of tested form error must be 8 times of transducer spacing.

Slide carriage straightness error S_y(x_n)=m₁(x_n)-f(x_n)(19)

Slide carriage pivot angle error S_p(x_n)=[-f (x_n+D)+m₂(x_n)-S_y(x_n)] �� is interval sampling in/(D ��) (19) formula;

Three current vortex sensor straight line degree measurement separation algorithms can isolate multidiameter bus straightness error, slide carriage guide rail movement error, the angle Run-out error of slide carriage.

Claims (8)

1. a multi-ladder axle line position tolerance is in level detecting apparatus and detection method thereof; This measurement apparatus includes fine setting auto-feeder, crashproof self-retracting device, sensor displacement angle vernier device, and fixing arc support installed by sensor; Fine setting auto-feeder links together with crashproof self-retracting device, is bolted on machine tool motion slide carriage by fixing, and sensor is installed fixing arc support and is arranged on fine setting auto-feeder ball-screw guide rail pair; This device can isolate multidiameter cross section deviation from circular from and machine spindle rotary error by cross section three laser displacement sensor calculation matrix separation algorithm; Three eddy current sensor straight line degree measurement separation algorithms can isolate multidiameter bus straightness error, slide carriage guide rail movement error, the angle Run-out error of slide carriage. This measurement apparatus moves the measurement that can realize the line position tolerances such as multi-ladder axle circularity, axiality, cylindricity, linearity, end face run-out degree, radius run-out degree with slide carriage.

2. a kind of multi-ladder axle line position tolerance, at level detecting apparatus, is characterized in that as claimed in claim 1, and fine setting feed arrangement includes linear electric motors, support post, servomotor, decelerator, ball-screw, grating scale, ball-screw guide rail movement pair; Support post is fixedly placed on linear electric motors movable plate, support post is provided with servomotor and is connected with ball-screw by decelerator, and ball-screw guide rail movement pair is positioned on ball-screw.

3. a kind of multi-ladder axle line position tolerance, at level detecting apparatus, is characterized in that as claimed in claim 1, and crashproof self-retracting device includes vertical column, telescoping cylinder.

4. a kind of multi-ladder axle line position tolerance, at level detecting apparatus, is characterized in that as claimed in claim 1, and sensor displacement angle vernier device can finely tune measurement sensor measurement angle and displacement.

5. IL-065 laser displacement sensor as claimed in claim 1, reference range 65mm, measures distance 55 to 105mm, and the linearity is F.S. �� 0.1%*2. repeatable accuracy 2um*3.

6. XZY3300 eddy current sensor as claimed in claim 1, probe diameterLinearity measuring range 4mm, range of linearity 1.0-5.0mm, linear midpoint 3.0mm, nonlinearity erron �� 1%.

7. a kind of multi-ladder axle line position tolerance is in level detecting apparatus and detection method as claimed in claim 1, and three laser displacement sensor calculation matrix separation algorithms can isolate multidiameter cross section deviation from circular from and machine spindle rotary error; Three eddy current sensor straight line degree measurement separation algorithms can isolate multidiameter bus straightness error, slide carriage guide rail movement error, the angle Run-out error of slide carriage.

8. a kind of multi-ladder axle line position tolerance, at level detecting apparatus, is characterized in that as claimed in claim 1, and laser displacement sensing clamp gripping member two adjacent side is all by protection device.