CN210135858U - Comprehensive calibration device for wide-range length measurement measuring tool based on laser interference - Google Patents

Comprehensive calibration device for wide-range length measurement measuring tool based on laser interference Download PDF

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CN210135858U
CN210135858U CN201921350763.3U CN201921350763U CN210135858U CN 210135858 U CN210135858 U CN 210135858U CN 201921350763 U CN201921350763 U CN 201921350763U CN 210135858 U CN210135858 U CN 210135858U
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seat
caliper
mirror
laser interference
bracket
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黄玉珠
朱记全
苏清磊
李博
程鹏里
林芳芳
范乃胤
刘红乐
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Henan Institute of Metrology
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Abstract

本实用新型公开了一种基于激光干涉的大量程长度测量量具综合检校装置,属于长度测量量具的计量检定技术领域,包括底座,所述底座的顶部为工作平台,在工作平台上设有校准棒检校机构和卡尺检校机构和激光干涉组件;所述校准棒检校机构包括设置在工作平台上的直轨道,在直轨道上滑动连接有干涉镜支架、左测量座、可调V型支架、四维工作台和右测量座,在左测量座内浮动连接有左测微杆,在左测微杆的非测量端设有反射镜支座;本实用新型特别适合大量程通用卡尺、内径千分尺、校对棒的检定和校准;其中,干涉光路的调整只与待测工件移动部分的直线度有关,而对底座上直轨道的线性度要求不高,因此大大降低了底座本身的制作要求,降低了成本。

Figure 201921350763

The utility model discloses a comprehensive calibration device for long-range length measuring instruments based on laser interference, which belongs to the technical field of metrological verification of length measuring instruments. Rod inspection mechanism, caliper inspection mechanism and laser interference assembly; the calibration rod inspection mechanism includes a straight track set on the working platform, and an interference mirror bracket, a left measuring seat, and an adjustable V-shaped track are slidably connected on the straight track. The bracket, the four-dimensional worktable and the right measuring seat are floatingly connected with a left micrometer rod in the left measurement seat, and a mirror support is arranged at the non-measurement end of the left micrometer rod; the utility model is particularly suitable for large-range universal calipers, inner diameter Verification and calibration of micrometers and calibration rods; among them, the adjustment of the interference optical path is only related to the straightness of the moving part of the workpiece to be tested, and the linearity of the straight track on the base is not high, so the production requirements of the base itself are greatly reduced. Reduced costs.

Figure 201921350763

Description

一种基于激光干涉的大量程长度测量量具综合检校装置A Comprehensive Calibration Device for Large Range Length Measuring Tools Based on Laser Interference

技术领域technical field

本实用新型属于长度测量量具的计量检定技术领域,特别涉及一种基于激光干涉的大量程长度测量量具综合检校装置。The utility model belongs to the technical field of metrological verification of length measuring instruments, in particular to a comprehensive verification device for large-range length measuring instruments based on laser interference.

背景技术Background technique

在机械工业中比较常用的长度测量量具主要包括通用卡尺、内径千分尺,其广泛应用于制造业、安装业和科研院所等领域,生产企业或计量检定部门都需要按照国家检定规程要求对其进行周期检定、校准,针对小量程通用卡尺和内径千分尺的检定用量具或者检定仪已比较成熟能够满足检定要求。然而随着装备制造业的迅速发展,对大量程长度测量量具的要求不断增加,尤其是对大量程的通用卡尺、内径千分尺体现更为明显,最近几年河南省在500mm以上量程通用卡尺、1000mm以上量程内径千分尺、校对棒的送检数量逐年递增,这就对其检定、校准装置也提出了更高要求,需要一种更方便、更便捷、能够实现测量不确定度自动评价的综合检校装置。The commonly used length measuring tools in the machinery industry mainly include general-purpose calipers and inner micrometers, which are widely used in manufacturing, installation, and scientific research institutes. Periodic verification and calibration, the verification measuring tools or calibrators for small-scale universal calipers and inner micrometers are relatively mature and can meet the verification requirements. However, with the rapid development of the equipment manufacturing industry, the requirements for large-range length measuring tools are increasing, especially for large-range general-purpose calipers and inner diameter micrometers. The number of internal micrometers and calibration rods submitted for inspection of the above ranges is increasing year by year, which puts forward higher requirements for their verification and calibration devices, and requires a more convenient and convenient comprehensive inspection and calibration that can realize automatic evaluation of measurement uncertainty device.

目前对大量程长度测量量具示值误差的检定、校准主要是采用组合量块的方式进行。由于主尺比较长较重且跨度大,如按常规用量块作为标准器进行检定,操作相对比较困难,存在很多不确定度的分量,很难达到一定的检定准确度。中国专利公开号为CN108917515A,公开了一种用于大量程通用卡尺示值误差的续接检定方法,其通过辅助装置和标准量块的续接零点操作,能够对1000mm以上量程的通用卡尺示值标注的准确检定;还可以通过续接零点操作操作使标准量块组合使用,减少标准量块应用数量,从而部分解决了组合量块测量时产生的问题。其测量精度还不能够满足所有大量程长度测量量具的检定、校准要求,而且不能够满足大量程内径千分尺、校对棒测量时拐点的正确判断,通用性不高。At present, the verification and calibration of the indication error of the large-scale length measuring instruments are mainly carried out by means of a combined gauge block. Because the main ruler is relatively long, heavy and has a large span, if the conventional measuring block is used as the standard for verification, the operation is relatively difficult, and there are many uncertain components, so it is difficult to achieve a certain verification accuracy. The Chinese Patent Publication No. CN108917515A discloses a continuous connection verification method for the indication error of a large-scale general-purpose caliper. Through the continuous zero-point operation of an auxiliary device and a standard gauge block, it can indicate the value of a general-purpose caliper with a range of more than 1000mm. Accurate verification of markings; standard gauge blocks can also be used in combination by continuing the zero-point operation, reducing the number of standard gauge blocks applied, thus partially solving the problems arising from the measurement of combined gauge blocks. Its measurement accuracy can not meet the verification and calibration requirements of all large-range length measuring instruments, and it cannot meet the correct judgment of the inflection point when measuring the large-range inner diameter micrometer and calibration rod, and the versatility is not high.

发明内容SUMMARY OF THE INVENTION

本实用新型目的是为解决上述现有技术中存在的问题而提出了一种基于激光干涉的大量程长度测量量具综合检校装置;为达到上述目的所采取的技术方案是:The purpose of this utility model is to solve the problems existing in the above-mentioned prior art and propose a large-scale length measuring instrument comprehensive calibration device based on laser interference; the technical scheme adopted in order to achieve the above-mentioned purpose is:

一种基于激光干涉的大量程长度测量量具综合检校装置,包括底座,所述底座的顶部为工作平台,在工作平台上设有校准棒检校机构和卡尺检校机构;所述校准棒检校机构包括设置在工作平台上的直轨道,在直轨道上滑动连接有干涉镜支架、左测量座、可调V型支架、四维工作台和右测量座,所述干涉镜支架位于左测量座的左侧,所述可调V型支架、四维工作台均位于左测量座和右测量座之间,在左测量座内浮动连接有左测微杆,在右测量座内设有右测微杆,在左测微杆的非测量端设有反射镜支座;A comprehensive calibration device for large-range length measuring instruments based on laser interference, comprising a base, the top of the base is a working platform, and a calibration rod calibration mechanism and a caliper calibration mechanism are arranged on the working platform; The calibration mechanism includes a straight track set on the working platform, on which is slidably connected an interference mirror bracket, a left measurement seat, an adjustable V-shaped bracket, a four-dimensional workbench and a right measurement seat, and the interference mirror bracket is located on the left measurement seat. The adjustable V-shaped bracket and the four-dimensional worktable are located between the left measurement seat and the right measurement seat, and a left micrometer rod is floatingly connected in the left measurement seat, and a right micrometer is arranged in the right measurement seat. rod, with a mirror support at the non-measurement end of the left micrometer rod;

所述卡尺检校机构包括设置在工作平台上的反射镜支架、左卡尺支撑座和右卡尺支撑座,所述反射镜支架位于左卡尺支撑座的左侧,左卡尺支撑座和右卡尺支撑座分别用于夹持固定大量程通用卡尺的两端;The caliper inspection mechanism includes a mirror bracket, a left caliper support seat and a right caliper support seat arranged on the working platform, the mirror bracket is located on the left side of the left caliper support seat, the left caliper support seat and the right caliper support seat They are respectively used to clamp and fix the two ends of the universal caliper with large range;

还包括激光干涉组件,所述激光干涉组件包括激光干涉仪支架、激光干涉仪、干涉镜和多个反射镜,所述干涉镜和反射镜均配有机械固定座或者磁力固定座;其中干涉镜安装在干涉镜支架上,反射镜支座、反射镜支架和大量程通用卡尺的活动爪上各固定一个反射镜。Also includes a laser interference component, the laser interference component includes a laser interferometer bracket, a laser interferometer, an interferometer and a plurality of mirrors, the interference mirror and the mirror are equipped with a mechanical fixing seat or a magnetic fixing seat; wherein the interference mirror It is installed on the interference mirror bracket, and a mirror is fixed on the mirror support, the mirror bracket and the movable claw of the large-range universal caliper.

优选的,所述可调V型支架包括滑动连接在直轨道上的滑动座,在滑动座上设有升降臂,在升降臂顶部一体成型设有V型分支臂,在V型分支臂设有滚轮或者缓冲弹性套。Preferably, the adjustable V-shaped bracket includes a sliding seat slidably connected to a straight track, a lifting arm is provided on the sliding seat, a V-shaped branch arm is integrally formed on the top of the lifting arm, and a V-shaped branch arm is provided with Roller or buffer elastic sleeve.

优选的,所述四维工作台包括滑动连接在直轨道上的滑动座,在滑动座上设有四轴支撑工作平台。Preferably, the four-dimensional worktable includes a sliding seat slidably connected to a straight track, and a four-axis supporting work platform is provided on the sliding seat.

优选的,所述直轨道为齿条形轨道,在左测量座和右测量座内均设有与齿条相啮合的齿轮或齿轮组,且在左测量座和右测量座上设有用于带动齿轮或齿轮组转动的手动转轮或者步进电机。Preferably, the straight track is a rack-shaped track, a gear or a gear set meshing with the rack is arranged in the left measuring seat and the right measuring seat, and the left measuring seat and the right measuring seat are provided with a gear for driving A manual wheel or stepper motor that is turned by a gear or set of gears.

优选的,所述卡尺检校机构包括与直轨道平行设置的辅助直轨道,所述左卡尺支撑座和右卡尺支撑座滑动连接在辅助直轨道上。Preferably, the caliper checking mechanism includes an auxiliary straight track arranged in parallel with the straight track, and the left caliper support seat and the right caliper support seat are slidably connected to the auxiliary straight track.

优选的,所述左卡尺支撑座和右卡尺支撑座通过螺栓或者磁力座固定在辅助直轨道上。Preferably, the left caliper support base and the right caliper support base are fixed on the auxiliary straight track by bolts or magnetic bases.

优选的,所述左卡尺支撑座和右卡尺支撑座的结构相同将两者统称为卡尺支撑座,所述卡尺支撑座包括固定座,在固定座上转动连接有调节螺母,在调节螺母内螺纹连接有竖直设置的调节柱,在调节柱顶端设有夹持工作台,在夹持工作台侧壁上固定有L型夹持臂,在L型夹持臂的横臂伸向升降工作台上方且上设有夹紧螺栓。Preferably, the left caliper support seat and the right caliper support seat have the same structure, and the two are collectively referred to as a caliper support seat. A vertically arranged adjustment column is connected, a clamping table is arranged at the top of the adjustment column, an L-shaped clamping arm is fixed on the side wall of the clamping table, and the transverse arm of the L-shaped clamping arm extends to the lifting table. Clamping bolts are provided above and above.

优选的,在夹紧螺栓的末端铰接有顶紧片。Preferably, a top tightening piece is hinged at the end of the clamping bolt.

优选的,夹持工作台与调节柱顶端之间设有沿前后方向设置的滑轨以实现夹持工作台沿前后方向的微调。Preferably, between the clamping table and the top end of the adjusting column, there are sliding rails arranged in the front-rear direction to realize the fine adjustment of the clamping table in the front-rear direction.

优选的,所述干涉镜的机械固定座上设有用于穿过干涉镜支架支撑杆的穿孔,在机械固定座上配有紧固螺栓,所述紧固螺栓伸入穿孔内。Preferably, the mechanical fixing seat of the interference mirror is provided with a through hole for passing through the support rod of the interference mirror bracket, and the mechanical fixing seat is provided with a fastening bolt, and the fastening bolt extends into the through hole.

本实用新型所具有的有益效果为:(1)本实用新型通过校准棒检校机构和卡尺检校机构的设置实现了对大量程内径千分尺、校对棒以及大量程通用卡尺的综合检定和校准,大大提高了工作效率;而且激光干涉仪、干涉镜和反射镜的快速组合式固定方式实现了迈克尔逊干涉光路的快速准确调整,干涉镜和反射镜的固定对卡尺本身无损坏;The beneficial effects of the utility model are as follows: (1) the utility model realizes the comprehensive verification and calibration of the large-scale inner diameter micrometer, the calibration rod and the large-scale general-purpose caliper through the setting of the calibration rod calibration mechanism and the caliper calibration mechanism, The work efficiency is greatly improved; and the fast combined fixing method of the laser interferometer, the interference mirror and the mirror realizes the fast and accurate adjustment of the Michelson interference optical path, and the fixing of the interference mirror and the mirror does not damage the caliper itself;

(2)反射镜通过磁力座固定在卡尺上的活动爪上,移动过程中对活动爪的滑动和移动量无影响保证了活动爪本身移动的准确度;(2) The mirror is fixed on the movable claw on the caliper through the magnetic base, which has no influence on the sliding and movement of the movable claw during the movement process, ensuring the accuracy of the movable claw itself;

(3)两端的夹紧螺栓对卡尺主尺的夹持比较稳固,在活动爪移动过程中不易松动,保证了测量准确度;(3) The clamping bolts at both ends hold the main ruler of the caliper relatively firmly, and it is not easy to loosen during the movement of the movable claw, which ensures the measurement accuracy;

(4)卡尺支撑座上的夹持工作台能够前后方向移动从而可以将光路沿着前后方式整体移动很方便地避开了左测量座、反射镜支架对光路的干扰;(4) The clamping table on the caliper support seat can move in the front and rear directions, so that the optical path can be moved as a whole along the front and rear, which is very convenient to avoid the interference of the left measuring seat and the mirror bracket on the optical path;

(5)对内径千分尺、校对棒等待测工件进行检定或者校准时,与传统测量方式相比待测工件的毫米小数部分测量更加准确快速,而且测量精度大大提高;(5) When calibrating or calibrating the inner micrometer and calibration rod waiting for the workpiece to be measured, compared with the traditional measurement method, the measurement of the fractional part of the workpiece to be measured is more accurate and fast, and the measurement accuracy is greatly improved;

(6)本实用新型能够适用于通用卡尺、内径千分尺、校对棒等长度测量量具的检定和校准,特别适合大量程长度测量量具的检定和校准;(6) The utility model can be applied to the verification and calibration of length measuring instruments such as general-purpose calipers, inner micrometers, calibration rods, etc., and is especially suitable for the verification and calibration of large-range length measuring instruments;

(7)本实用新型的干涉光路的调整只与待测工件移动部分的直线度有关,而对底座上直轨道的线性度要求不高,因此大大降低了底座本身的制作要求,降低了成本。(7) The adjustment of the interference optical path of the present utility model is only related to the straightness of the moving part of the workpiece to be measured, and the linearity of the straight track on the base is not high, so the manufacturing requirements of the base itself are greatly reduced, and the cost is reduced.

附图说明Description of drawings

图1为本实用新型的结构示意图;Fig. 1 is the structural representation of the utility model;

图2为图1的俯视图;Fig. 2 is the top view of Fig. 1;

图3为卡可调V型支架的结构示意图;Fig. 3 is the structural schematic diagram of the adjustable V-shaped bracket of the card;

图4为四维工作台的结构示意图;Fig. 4 is the structural representation of the four-dimensional workbench;

图5为图4的俯视图;Fig. 5 is the top view of Fig. 4;

图6为左测量座的结构示意图;Fig. 6 is the structural schematic diagram of the left measuring seat;

图7为图6的左视图;Fig. 7 is the left side view of Fig. 6;

图8为左卡尺支撑座的结构示意图;Fig. 8 is the structural schematic diagram of the left caliper support seat;

图9为图7的左视图。FIG. 9 is a left side view of FIG. 7 .

具体实施方式Detailed ways

下面结合附图对本实用新型进一步描述。The present utility model will be further described below in conjunction with the accompanying drawings.

如图1、图2所示,本实用新型包括底座7,所述底座7的顶部为工作平台6,在工作平台6上设有校准棒检校机构和卡尺检校机构;所述校准棒检校机构包括设置在工作平台6上的直轨道,在直轨道上滑动连接有干涉镜支架31、左测量座32、可调V型支架33、四维工作台34和右测量座35,所述干涉镜支架31位于左测量座32的左侧,所述可调V型支架33、四维工作台34均位于左测量座32和右测量座35之间,如图1、图6和图7所示,在左测量座32内浮动连接有左测微杆323,在右测量座35内设有右测微杆,在右测量杆上设置有用于测量帽对零位时进行微调节的两个调节螺钉8。在左测微杆323的非测量端设有反射镜支座322。As shown in Figures 1 and 2, the utility model includes a base 7, the top of which is a working platform 6, and a calibration rod checking mechanism and a caliper checking mechanism are arranged on the working platform 6; The calibration mechanism includes a straight track arranged on the working platform 6, on which an interference mirror bracket 31, a left measurement seat 32, an adjustable V-shaped bracket 33, a four-dimensional workbench 34 and a right measurement seat 35 are slidably connected. The mirror bracket 31 is located on the left side of the left measurement seat 32, and the adjustable V-shaped bracket 33 and the four-dimensional worktable 34 are located between the left measurement seat 32 and the right measurement seat 35, as shown in Figure 1, Figure 6 and Figure 7 , a left micrometer rod 323 is floatingly connected in the left measurement seat 32, a right micrometer rod is arranged in the right measurement seat 35, and two adjustment rods are provided on the right measurement rod for micro-adjustment of the measuring cap when the zero position is adjusted. screw 8. A mirror support 322 is provided at the non-measurement end of the left micrometer rod 323 .

此处的左测微杆323浮动结构可以采用如下具体结构:所述左测微杆323位于左测量座32的通孔329内,在通孔329内靠近左端口和右端口位置处均设有支撑滚轮组,所述支撑滚轮组包括绕左测微杆323周向均匀分布的三个偏心滚动轴承328,通过左右六个偏心滚动轴承328对左测微杆323起到浮动支撑作用;同时在左测量座32内部设有转向轮325,在转向轮325绕有牵引绳324,牵引绳324的左端固定在左测微杆323上,牵引绳324的右端连接有重锤,从而将重锤326的重力转化为测量力,以确保左测量帽329和被检校量具可靠接触。The floating structure of the left micrometer rod 323 here can adopt the following specific structure: the left micrometer rod 323 is located in the through hole 329 of the left measurement base 32, and is provided with a position near the left port and the right port in the through hole 329. The support roller set includes three eccentric rolling bearings 328 evenly distributed around the left micrometer rod 323 in the circumferential direction, and the left and right six eccentric rolling bearings 328 play a floating support role for the left micrometer rod 323; There is a steering wheel 325 inside the seat 32, a traction rope 324 is wound around the steering wheel 325, the left end of the traction rope 324 is fixed on the left micrometer rod 323, and the right end of the traction rope 324 is connected with a weight, so as to reduce the gravity of the weight 326 Converted into measuring force to ensure reliable contact between the left measuring cap 329 and the calibrated measuring tool.

进一步在左测微杆323沿左右方向加工出一个导向平面327,并将支撑滚轮组的一个偏心滚动轴承328位于导向平面327处以阻止左测微杆323的转动。Further, a guide plane 327 is machined on the left micrometer rod 323 in the left-right direction, and an eccentric rolling bearing 328 supporting the roller set is located at the guide plane 327 to prevent the rotation of the left micrometer rod 323 .

所述卡尺检校机构包括设置在工作平台6上的反射镜支架21、左卡尺支撑座22和右卡尺支撑座23,所述反射镜支架21位于左卡尺支撑座22的左侧,左卡尺支撑座22和右卡尺支撑座23分别用于夹持固定大量程通用卡尺4的两端;The caliper inspection mechanism includes a mirror bracket 21, a left caliper support seat 22 and a right caliper support seat 23 arranged on the working platform 6, the mirror bracket 21 is located on the left side of the left caliper support seat 22, and the left caliper support seat 22. The seat 22 and the right caliper support seat 23 are respectively used to clamp and fix both ends of the large-range universal caliper 4;

还包括激光干涉组件,所述激光干涉组件包括激光干涉仪支架11、激光干涉仪12、干涉镜14和多个反射镜13,15,16,所述干涉镜14和反射镜13,15,16均配有机械固定座或者磁力固定座;其中干涉镜14安装在干涉镜支架31上,反射镜支座322、反射镜支架21和大量程通用卡尺的活动爪5上对应固定一个反射镜13,15,16;所述干涉镜14的机械固定座上设有用于穿过干涉镜支架31支撑杆的穿孔,在机械固定座上配有紧固螺栓,所述紧固螺栓伸入穿孔内。Also includes a laser interference component, the laser interference component includes a laser interferometer bracket 11, a laser interferometer 12, an interferometer 14 and a plurality of mirrors 13, 15, 16, the interferometer 14 and the mirrors 13, 15, 16 Equipped with a mechanical fixing seat or a magnetic fixing seat; wherein the interference mirror 14 is installed on the interference mirror bracket 31, and a mirror 13 is fixed on the mirror bracket 322, the mirror bracket 21 and the movable claw 5 of the large-range universal caliper. 15,16; The mechanical fixing seat of the interference mirror 14 is provided with a through hole for passing through the support rod of the interference mirror bracket 31, and the mechanical fixing seat is provided with a fastening bolt, and the fastening bolt extends into the through hole.

如图3所示,为了提高大量程内径千分尺和校对棒的测量准确度,增加了对其支撑部分可调V型支架33,所述可调V型支架33包括滑动连接在直轨道上的滑动座331,在滑动座331上设有升降臂,在升降臂顶部一体成型设有V型分支臂332,在V型分支臂332设有滚轮或者缓冲弹性套333;其中V型分支臂332的升降结构可采用现有技术中的升降结构。As shown in FIG. 3 , in order to improve the measurement accuracy of the large-scale inner diameter micrometer and the calibration rod, an adjustable V-shaped bracket 33 is added for its supporting part, and the adjustable V-shaped bracket 33 includes a sliding connection on a straight track. The seat 331 is provided with a lifting arm on the sliding seat 331, a V-shaped branch arm 332 is integrally formed on the top of the lifting arm, and a roller or a buffer elastic sleeve 333 is provided on the V-shaped branch arm 332; The structure can adopt the lifting structure in the prior art.

如图4和图5所示,所述四维工作台34包括滑动连接在直轨道上的滑动座341,在滑动座341上设有四轴支撑工作平台342;四维工作台34为现有测长机的调节平台,能够实现上下浮动、前后方向移动、左右方向移动、前后方向倾斜微调、左右方向倾斜微调功能。As shown in FIG. 4 and FIG. 5 , the four-dimensional worktable 34 includes a sliding seat 341 slidably connected to a straight track, and a four-axis support work platform 342 is provided on the sliding seat 341; the four-dimensional worktable 34 is an existing length measurement The adjustment platform of the machine can realize the functions of floating up and down, moving in the front and rear directions, moving in the left and right directions, inclining fine-tuning in the front and rear directions, and fine-tuning the inclination in the left and right directions.

所述直轨道为齿条形轨道,在左测量座32和右测量座35内均设有与齿条相啮合的齿轮或齿轮组,且在左测量座32和右测量座35上设有用于带动齿轮或齿轮组转动的手动转轮321或者步进电机。The straight track is a rack-shaped track, the left measuring seat 32 and the right measuring seat 35 are provided with gears or gear sets that mesh with the rack, and the left measuring seat 32 and the right measuring seat 35 are provided with A manual wheel 321 or a stepper motor that drives the gear or gear set to rotate.

其中,左卡尺支撑座22和右卡尺支撑座23与工作平台6之间可以采用多种固定连接方式,例如(1)所述卡尺检校机构包括与直轨道平行设置的辅助直轨道,所述左卡尺支撑座22和右卡尺支撑座23滑动连接在辅助直轨道上;(2)也可以使左卡尺支撑座22和右卡尺支撑座23通过螺栓或者磁力座固定在工作平台6上,两种方式都可以根据实际情况很方便地改变左卡尺支撑座22和右卡尺支撑座23之间的距离。Among them, various fixed connection methods can be adopted between the left caliper support base 22 and the right caliper support base 23 and the working platform 6 , for example (1) the caliper calibration mechanism includes an auxiliary straight track arranged in parallel with the straight track, the The left caliper support base 22 and the right caliper support base 23 are slidably connected to the auxiliary straight track; (2) the left caliper support base 22 and the right caliper support base 23 can also be fixed on the working platform 6 by bolts or magnetic bases. The distance between the left caliper support base 22 and the right caliper support base 23 can be easily changed according to the actual situation.

如图8和图9所示,为了便于描述,所述左卡尺支撑座22和右卡尺支撑座23的结构相同将两者统称为卡尺支撑座,所述卡尺支撑座包括固定座222,在固定座222上转动连接有调节螺母221,在调节螺母221内螺纹连接有竖直设置的调节柱223,在调节柱223顶端设有夹持工作台225,在夹持工作台225侧壁上固定有L型夹持臂228,在L型夹持臂228的横臂伸向升降工作台上225方且上设有夹紧螺栓227;为了增大夹紧螺栓227与通用卡尺主尺接触面积以增加卡尺的稳定性,在夹紧螺栓227的末端铰接有顶紧片226。As shown in FIG. 8 and FIG. 9 , for the convenience of description, the left caliper support base 22 and the right caliper support base 23 have the same structure, and they are collectively referred to as caliper support bases. An adjusting nut 221 is rotatably connected to the seat 222, a vertically arranged adjusting column 223 is threadedly connected in the adjusting nut 221, a clamping table 225 is arranged at the top of the adjusting column 223, and a side wall of the clamping table 225 is fixed with a L-shaped clamping arm 228, the transverse arm of L-shaped clamping arm 228 extends to 225 squares on the lifting table and is provided with clamping bolts 227; in order to increase the contact area between clamping bolts 227 and the main ruler of the universal caliper to increase the For the stability of the caliper, a top tightening piece 226 is hinged at the end of the clamping bolt 227 .

为了适应不同位置处对干涉镜的固定,在夹持工作台225与调节柱顶端223之间设有沿前后方向设置的燕尾滑动副224以实现夹持工作台225沿前后方向的微调。In order to adapt to the fixation of the interference mirror at different positions, a dovetail sliding pair 224 is arranged between the clamping table 225 and the top end 223 of the adjusting column in the front-rear direction to realize fine adjustment of the clamping table 225 in the front-rear direction.

本实用新型在工作时:When the utility model is working:

(1)对大量程通用卡尺进行检定或者校准时,如图1和图2所示,根据大量程卡尺的量程调整左卡尺支撑座22和右卡尺支撑座23之间的距离,旋紧对应固定旋钮进行固定,然后将大量程通用卡尺4的两端横放在夹持工作台225上,旋转调节螺母221调节大量程通用卡尺4两端的高度让其两端大致位于同一水平面即可,旋紧夹紧螺栓227从而将大量程通用卡尺固定牢固;接着将反射镜13通过机械固定座固定安装在反射镜支架21上,将反射镜16通过磁力固定座磁吸在大量程通用卡尺的活动爪5上,其中机械固定座和磁力固定座与反射镜13、反射镜16通过螺钉对应可拆卸式固定连接;架好激光干涉仪12,让发出的激光首先经过干涉镜14,被分成参考光路和测量光路,测量光路依次经过反射镜13和反射镜16,然后经过反射镜16反射后与参考光路形成干涉被激光干涉仪12再次接收从而形成麦克尔逊干涉光路,来回移动活动爪5,同时对激光干涉仪12进行微调以使得在活动爪5整个移动范围内均能形成麦克尔逊干涉光路,即激光与活动爪5移动方向相平行,从而通过激光干涉仪12准确快速地测出活动爪5移动的距离,最终将激光干涉仪12测量值与大量程通用卡尺4上的刻度值进行对比以计算出大量程通用卡尺的示值误差,也可以利用自身数据处理系统给出测量不确定度评价。(1) When verifying or calibrating a large-range universal caliper, as shown in Figures 1 and 2, adjust the distance between the left caliper support base 22 and the right caliper support base 23 according to the range of the large-range caliper, and tighten the corresponding fixed The knob is fixed, and then the two ends of the large-range universal caliper 4 are placed horizontally on the clamping table 225, and the adjustment nut 221 is rotated to adjust the height of both ends of the large-range universal caliper 4 so that the two ends are roughly on the same level. Clamp the bolts 227 to fix the large-range universal caliper firmly; then, the reflector 13 is fixedly installed on the reflector bracket 21 through the mechanical fixing seat, and the reflector 16 is magnetically attracted to the movable claw 5 of the large-range universal caliper through the magnetic fixing seat. Above, the mechanical fixing seat and the magnetic fixing seat are connected with the reflector 13 and the reflector 16 in a detachable and fixed manner through screws; set up the laser interferometer 12, let the emitted laser pass through the interferometer 14 first, and be divided into the reference optical path and the measurement The optical path, the measurement optical path passes through the mirror 13 and the mirror 16 in turn, and then is reflected by the mirror 16 to form interference with the reference optical path, and is received again by the laser interferometer 12 to form a Michelson interference optical path, and the movable claw 5 is moved back and forth. The interferometer 12 is fine-tuned so that the Michelson interference optical path can be formed in the entire moving range of the movable claw 5, that is, the laser is parallel to the moving direction of the movable claw 5, so that the movement of the movable claw 5 can be accurately and quickly measured by the laser interferometer 12. Finally, the measured value of the laser interferometer 12 is compared with the scale value on the large-range universal caliper 4 to calculate the indication error of the large-range universal caliper, and the measurement uncertainty evaluation can also be given by using its own data processing system.

(2)对内径千分尺或者校对棒等待测工件进行检定或者校准时,将反射镜15通过磁力固定座磁吸在反射镜支座322上,将干涉镜支架31上的干涉镜14水平转动90度,让干涉镜14的测量光路与反射镜15位置相对应,架好激光干涉仪12,让发出的激光首先经过干涉镜14,被分成参考光路和测量光路,测量光路经反射镜15,然后经过反射镜15反射后与参考光路形成干涉被激光干涉仪12再次接收从而形成麦克尔逊干涉光路;该干涉光路调整好后,移动左测量座32,让左测微杆323的左测量帽330与右测量帽接触,通过调整右测微杆螺钉8来改变右测量帽的微移动,寻找拐点,使得左测量帽330与右测量帽处于同一条直线,然后清零激光干涉仪12读数,此位置作为零点。(2) When the inner micrometer or calibration rod is waiting for the workpiece to be verified or calibrated, the mirror 15 is magnetically attracted to the mirror support 322 through the magnetic fixing seat, and the interference mirror 14 on the interference mirror support 31 is horizontally rotated 90 degrees , let the measuring optical path of the interfering mirror 14 correspond to the position of the reflecting mirror 15, set up the laser interferometer 12, let the emitted laser pass through the interfering mirror 14 first, and be divided into the reference optical path and the measuring optical path, the measuring optical path passes through the reflecting mirror 15, and then passes through the After the reflection mirror 15 interferes with the reference optical path, it is received again by the laser interferometer 12 to form a Michelson interference optical path; after the interference optical path is adjusted, move the left measuring seat 32, so that the left measuring cap 330 of the left micrometer rod 323 and the left measuring cap 330 of the left micrometer rod 323 The right measuring cap is in contact, the micro-movement of the right measuring cap is changed by adjusting the right micrometer rod screw 8, and the inflection point is searched, so that the left measuring cap 330 and the right measuring cap are in the same straight line, and then the reading of the laser interferometer 12 is reset, this position as zero point.

最后,将待测工件放置在可调V型支架33、四维工作台34上,调节可调V型支架33的高度,让待测工件与两测量帽之间连线重合,然后移动左测量座32使得左测微杆323和右测微杆端部的测量帽对应与待测工件两端接触,然后调整四轴调节平台以改变待测工件的多维度微动带动左测微杆323进行左右方向的微动,左测微杆323的微动会带动反射镜支座322微动从而通过激光干涉仪12测量出改变量,其中出现拐点时的测量值即为待测工件的读数,与标值进行对比以计算出待测工件的示值误差,也可以利用自身数据处理系统给出测量不确定度评价。Finally, place the workpiece to be measured on the adjustable V-shaped bracket 33 and the four-dimensional worktable 34, adjust the height of the adjustable V-shaped bracket 33, and make the connection between the workpiece to be measured and the two measuring caps coincide, and then move the left measuring seat 32 Make the left micrometer rod 323 and the measuring caps at the ends of the right micrometer rod correspond to both ends of the workpiece to be measured, and then adjust the four-axis adjustment platform to change the multi-dimensional micro-motion of the workpiece to be measured, and drive the left micrometer rod 323 to perform left and right The micro-movement of the direction, the micro-movement of the left micrometer rod 323 will drive the mirror support 322 to micro-move so that the amount of change is measured by the laser interferometer 12, and the measured value when the inflection point occurs is the reading of the workpiece to be measured, which is the same as the standard. The values are compared to calculate the indication error of the workpiece to be measured, and the measurement uncertainty evaluation can also be given by using its own data processing system.

本实施例并非对本实用新型的形状、材料、结构等作任何形式上的限制,凡是依据本实用新型的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均属于本实用新型技术方案的保护范围。This embodiment does not limit the shape, material, structure, etc. of the present invention in any form, and any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention belong to the technology of the present invention. The scope of protection of the program.

最后应说明的是:以上实施例仅用以说明本实用新型的技术方案,而非对其限制;尽管参照前述实施例对本实用新型进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换,但这些修改或者替换,并不使相应技术方案的本质脱离本实用新型各实施例技术方案的精神和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model, but not to limit them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: It is still possible to modify the technical solutions recorded in the foregoing embodiments, or to perform equivalent replacements to some of the technical features, but these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit of the technical solutions of the embodiments of the present invention. and range.

Claims (10)

1.一种基于激光干涉的大量程长度测量量具综合检校装置,包括底座,所述底座的顶部为工作平台,其特征在于,在工作平台上设有校准棒检校机构和卡尺检校机构;所述校准棒检校机构包括设置在工作平台上的直轨道,在直轨道上滑动连接有干涉镜支架、左测量座、可调V型支架、四维工作台和右测量座,所述干涉镜支架位于左测量座的左侧,所述可调V型支架、四维工作台均位于左测量座和右测量座之间,在左测量座内浮动连接有左测微杆,在右测量座内设有右测微杆,在左测微杆的非测量端设有反射镜支座;1. a comprehensive calibration device based on a large range length measurement measuring tool based on laser interference, comprises a base, and the top of the base is a working platform, and it is characterized in that, on the working platform, a calibration rod calibration mechanism and a caliper calibration mechanism are provided ; The calibration rod inspection mechanism includes a straight track arranged on the working platform, and an interference mirror bracket, a left measuring seat, an adjustable V-shaped bracket, a four-dimensional workbench and a right measuring seat are slidably connected on the straight track. The mirror bracket is located on the left side of the left measurement seat, the adjustable V-shaped bracket and the four-dimensional worktable are located between the left measurement seat and the right measurement seat, and a left micrometer rod is floatingly connected in the left measurement seat. There is a right micrometer rod inside, and a mirror support is provided at the non-measurement end of the left micrometer rod; 所述卡尺检校机构包括设置在工作平台上的反射镜支架、左卡尺支撑座和右卡尺支撑座,所述反射镜支架位于左卡尺支撑座的左侧,左卡尺支撑座和右卡尺支撑座分别用于夹持固定大量程通用卡尺的两端;The caliper inspection mechanism includes a mirror bracket, a left caliper support seat and a right caliper support seat arranged on the working platform, the mirror bracket is located on the left side of the left caliper support seat, the left caliper support seat and the right caliper support seat They are respectively used to clamp and fix the two ends of the universal caliper with large range; 还包括激光干涉组件,所述激光干涉组件包括激光干涉仪支架、激光干涉仪、干涉镜和多个反射镜,所述干涉镜和反射镜均配有机械固定座或者磁力固定座;其中干涉镜安装在干涉镜支架上,反射镜支座、反射镜支架和大量程通用卡尺的活动爪上各固定一个反射镜。Also includes a laser interference component, the laser interference component includes a laser interferometer bracket, a laser interferometer, an interferometer and a plurality of mirrors, the interference mirror and the mirror are equipped with a mechanical fixing seat or a magnetic fixing seat; wherein the interference mirror It is installed on the interference mirror bracket, and a mirror is fixed on the mirror support, the mirror bracket and the movable claw of the large-range universal caliper. 2.根据权利要求1所述的基于激光干涉的大量程长度测量量具综合检校装置,其特征在于,所述可调V型支架包括滑动连接在直轨道上的滑动座,在滑动座上设有升降臂,在升降臂顶部一体成型设有V型分支臂,在V型分支臂设有滚轮或者缓冲弹性套。2 . The comprehensive calibration device for large-range length measuring tools based on laser interference according to claim 1 , wherein the adjustable V-shaped bracket comprises a sliding seat slidably connected on a straight track, and a sliding seat is provided on the sliding seat. 3 . There is a lift arm, a V-shaped branch arm is integrally formed on the top of the lift arm, and a roller or a buffer elastic sleeve is arranged on the V-shaped branch arm. 3.根据权利要求1所述的基于激光干涉的大量程长度测量量具综合检校装置,其特征在于,所述四维工作台包括滑动连接在直轨道上的滑动座,在滑动座上设有四轴支撑工作平台。3. The comprehensive calibration device for large-range length measuring tools based on laser interference according to claim 1, wherein the four-dimensional workbench comprises a sliding seat that is slidably connected on a straight track, and four are provided on the sliding seat. The shaft supports the work platform. 4.根据权利要求1所述的基于激光干涉的大量程长度测量量具综合检校装置,其特征在于,所述直轨道为齿条形轨道,在左测量座和右测量座内均设有与齿条相啮合的齿轮或齿轮组,且在左测量座和右测量座上设有用于带动齿轮或齿轮组转动的手动转轮或者步进电机。4. The comprehensive calibration device for large-range length measuring instruments based on laser interference according to claim 1, wherein the straight track is a rack-shaped track, and the left measuring seat and the right measuring seat are provided with and A gear or a gear group meshed with a rack, and a manual runner or a stepper motor for driving the gear or the gear group to rotate is arranged on the left measuring seat and the right measuring seat. 5.根据权利要求1至4任一项所述的基于激光干涉的大量程长度测量量具综合检校装置,其特征在于,所述卡尺检校机构包括与直轨道平行设置的辅助直轨道,所述左卡尺支撑座和右卡尺支撑座滑动连接在辅助直轨道上。5. The comprehensive calibration device for large-range length measuring instruments based on laser interference according to any one of claims 1 to 4, wherein the caliper calibration mechanism comprises an auxiliary straight track arranged in parallel with the straight track, so The left caliper support seat and the right caliper support seat are slidably connected on the auxiliary straight track. 6.根据权利要求5所述的基于激光干涉的大量程长度测量量具综合检校装置,其特征在于,所述左卡尺支撑座和右卡尺支撑座通过螺栓或者磁力座固定在辅助直轨道上。6 . The comprehensive calibration device for large-range length measuring instruments based on laser interference according to claim 5 , wherein the left caliper support seat and the right caliper support seat are fixed on the auxiliary straight track by bolts or magnetic seats. 7 . 7.根据权利要求6所述的基于激光干涉的大量程长度测量量具综合检校装置,其特征在于,所述左卡尺支撑座和右卡尺支撑座的结构相同将两者统称为卡尺支撑座,所述卡尺支撑座包括固定座,在固定座上转动连接有调节螺母,在调节螺母内螺纹连接有竖直设置的调节柱,在调节柱顶端设有夹持工作台,在夹持工作台侧壁上固定有L型夹持臂,在L型夹持臂的横臂伸向升降工作台上方且上设有夹紧螺栓。7. The comprehensive calibration device for a large-range length measuring tool based on laser interference according to claim 6, wherein the left caliper support seat and the right caliper support seat have the same structure, and the two are collectively referred to as a caliper support seat, The caliper support base includes a fixed base, an adjusting nut is rotatably connected to the fixed base, a vertically arranged adjusting column is threadedly connected in the adjusting nut, a clamping table is provided at the top of the adjusting column, and a side of the clamping table is provided. An L-shaped clamping arm is fixed on the wall, and the transverse arm of the L-shaped clamping arm extends above the lifting table and is provided with clamping bolts. 8.根据权利要求7所述的基于激光干涉的大量程长度测量量具综合检校装置,其特征在于,在夹紧螺栓的末端铰接有顶紧片。8 . The comprehensive calibration device for large-range length measuring tools based on laser interference according to claim 7 , wherein a top tightening piece is hinged on the end of the clamping bolt. 9 . 9.根据权利要求7所述的基于激光干涉的大量程长度测量量具综合检校装置,其特征在于,夹持工作台与调节柱顶端之间设有沿前后方向设置的滑轨以实现夹持工作台沿前后方向的微调。9 . The comprehensive calibration device for large-range length measuring tools based on laser interference according to claim 7 , wherein a slide rail arranged in the front-rear direction is provided between the clamping table and the top of the adjusting column to realize clamping. 10 . Fine adjustment of the table in the front and rear direction. 10.根据权利要求7所述的基于激光干涉的大量程长度测量量具综合检校装置,其特征在于,所述干涉镜的机械固定座上设有用于穿过干涉镜支架支撑杆的穿孔,在机械固定座上配有紧固螺栓,所述紧固螺栓伸入穿孔内。10 . The comprehensive calibration device for large-range length measuring instruments based on laser interference according to claim 7 , wherein the mechanical fixing seat of the interferometer is provided with a perforation for passing through the support rod of the interferometer bracket. 10 . Fastening bolts are arranged on the mechanical fixing seat, and the fastening bolts extend into the through holes.
CN201921350763.3U 2019-08-19 2019-08-19 Comprehensive calibration device for wide-range length measurement measuring tool based on laser interference Expired - Fee Related CN210135858U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110345837A (en) * 2019-08-19 2019-10-18 河南省计量科学研究院 A kind of comprehensive calibration device of the wide range measuring tool for measuring length based on laser interference
CN112965241A (en) * 2021-04-12 2021-06-15 杨兆柱 Microelectronic laser scanning device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110345837A (en) * 2019-08-19 2019-10-18 河南省计量科学研究院 A kind of comprehensive calibration device of the wide range measuring tool for measuring length based on laser interference
CN110345837B (en) * 2019-08-19 2024-02-13 河南省计量测试科学研究院 Comprehensive checking device of wide-range length measuring tool based on laser interference
CN112965241A (en) * 2021-04-12 2021-06-15 杨兆柱 Microelectronic laser scanning device

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