CN102023082A - Device and method for detecting dynamic properties of two-dimensional directional mirror - Google Patents
Device and method for detecting dynamic properties of two-dimensional directional mirror Download PDFInfo
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- CN102023082A CN102023082A CN 201010298621 CN201010298621A CN102023082A CN 102023082 A CN102023082 A CN 102023082A CN 201010298621 CN201010298621 CN 201010298621 CN 201010298621 A CN201010298621 A CN 201010298621A CN 102023082 A CN102023082 A CN 102023082A
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Abstract
The invention relates to a device and method for detecting the dynamic properties of a two-dimensional directional mirror. The device comprises a dynamic photoelectric autocollimator, a controller of the dynamic photoelectric autocollimator, a hollow rotary platform, a controller of the hollow rotary platform, a rotary target, an adjustment platform, a data acquiring and processing system and a computer measurement and control system. Under the guidance of the computer measurement and control system, a target simulation reflector on the rotary target is driven by the rotary platform to simulate an optical target in movement, the dynamic photoelectric autocollimator provides the rapid and high-precision angle miss distance for the two-dimensional directional mirror, the data acquiring and processing system feeds back and controls the two-dimensional directional mirror to track the target simulation movement in real time, and the computer measurement and control system processes the measurement data of the photoelectric autocollimator in real time to obtain the data reflecting the dynamic response properties of the two-dimensional directional mirror. The device and method provided by the invention can be used for detection of properties of the two-dimensional directional mirror, such as axis shaking, step response, dynamic continuous tracking and the like.
Description
Technical field
The invention belongs to photoelectric detection technology field, particularly a kind of two-dimentional scan mirror dynamic property pick-up unit and detection method.The present invention can be used for the indoor detection and the checking of quiet, the dynamic property of wide-angle beam direction devices such as two-dimentional scan mirror.
Background technology
Photoelectricity acquisition and tracking point technique has important application in fields such as laser radar, free space laser communication, photoelectronic warfares.From system architecture and rotation characteristics, the tracking aiming frame can be divided into two classes: a class is a rotary frame, is about to the telescopic system whole erection on gimbals, during the tracking aiming target, needs to rotate frame; Another kind of is sense of rotation mirror (also claiming scanning mirror or tilting mirror), and promptly the rigid telescope system only controls scan mirror and rotates the realization target following.Rotary frame structure obtains ripe the application in all kinds of transits and laser space communication terminal; And scan mirror relative mass is lighter, and response frequency is higher, also obtains at present more and more widely attention and application, particularly in fields such as laser radar, aerial cameras, be used to refer to the sight line of stabilized lasers bundle or camera.The photoelectric tracking sighting system is comprehensive complication systems such as light harvesting, machinery, electronics, computing machine, in the development process of system, must set up high-precision Performance Detection and verification platform, the static state of system and each essential elements, dynamic precision are analyzed and detected, with the characteristic variations in timely its each stage of grasp.Indoor detection and checking also must be carried out to its performance before using in the outfield.To the Performance Detection of tracker, mainly be to set up high-precision beam direction device with the virtual space target, the motion of tracker closed loop tracking target realizes himself performance detection.And at two-dimentional scan mirror such one self not with the rotation driving mechanism of target detection function, also be necessary for it and be equipped with high-precision target location probe unit, detect to realize that closed loop is followed the tracks of.
At present following several method is arranged at the theodolite system of rotary frame structure and optical communication terminal and two-dimentional scan mirror performance detection.
One of existing detection scheme is (referring to Zhang Bo, the research of Programmable Dynamic target [D]. Changchun Institute of Optics, Fine Mechanics and Physics, CAS's Master of engineering paper, 2003), be to detect the optics dynamic target method that the electro-optic theodolite tracking performance generally uses, promptly drive the parallel light tube rotation with the virtual space moving target with precision electric motor, the transit closed loop is followed the tracks of the detection that this target can realize its tracking performance.
Existing detection scheme two (referring to Li Anhu, Sun Jianfeng, Liu Li people etc., laser communication light beam microradian is with the design concept [J] of taking aim at device for detecting performance between star. the optics journal, 2006,26 (7): 975～979), be to follow the Performance Detection demand of taking aim at for laser communication light beam microradian between the solution star, utilize two identical cascade prism quadratures to rotate the deflection of simulating light beam, and realize laser communication tracking terminal performance detection.
Existing detection scheme three (referring to Qin Yi, Wang Jianmin, Wang Lili, Xu Quan. satellite laser communications is with taking aim at method for testing precision and experimental study [J] thereof. optical technology, 2007,33 (4): 557～563), propose on the long-focus lens focal plane, to do linear movement, realize the beam deflection of microradian magnitude with piezoelectric ceramics (PZT) drive point light source.
Existing detection scheme four (referring to Ramuhalli Krishna, " Improved pointing accuracy usinghigh precision theodolite measurements ", Proc.SPIE vol.2812,199-209,1996) be to utilize the high precision autocollimation theodolite that the pointing accuracy of two-dimentional scan mirror is detected.
Existing detection scheme five (referring to Zhang Guoyu, Jiang Huilin, Xu Xiping, Yu Huadong, Wang Lingyun, Liu Xuli, Huang Lan, Yue Shixin, Peng Hui. infrared earth sensor scanning mirror pivot angle dynamic Laser method of testing [J]. optics journal, 2007,27 (5): 875～881), be based on laser measuring technology and CCD Detection Techniques, propose a kind of dynamic testing method the scanning mirror pivot angle.
Existing detection scheme six (referring to Darryll J.Pines.A lightweight high performancedual-axis gimbal for space applications[C] .SPIE, 1995,2468:261～273), indoor detection at the scan mirror tracking performance, propose with pointolite along rectilinear orbit back and forth movement simulated optical moving target, adopt video camera real-time detection moving target position, for scan mirror provides the detection method of position miss distance, obtained the step response curve and the closed loop tracking error curve of scan mirror.
Above scheme (one) (two) (three) mainly is the check at the tracker that self has the target detection function, as theodolite system, and laser space communication terminal etc.These methods can not be directly used in self not with the Performance Detection of the scan mirror of target detection system.Scheme (four) (five) is respectively the method for testing to the pointing accuracy of scan mirror and dynamic pivot angle performance, and can not be used for the detection of its performance of dynamic tracking.Scheme (six) is though can realize that to scan mirror step response and indoor Continuous Tracking performance detection, it has following 2 deficiencies:
1. adopt the direct photographic subjects of video camera, the target location detecting error is bigger, and measuring speed is limited, and these all can cause bigger tracking error, have influence on the analysis of the performance of dynamic tracking of tilting mirror;
2. target travel form is single, is difficult to realize the Performance Detection of two-dimentional wide-angle deflection simultaneously and the simulation of various compound movement states.
Summary of the invention
The axle system that the pick-up unit and the detection method that the purpose of this invention is to provide a kind of two-dimentional scan mirror dynamic property, this device can be used for two-dimentional scan mirror rocks, step response and dynamic performance detection such as Continuous Tracking.
Core concept of the present invention is to make full use of the characteristic that the high-precision quick angle of dynamic photoelectric self-collimater is measured, and the dynamic property of two-dimentional scan mirror is detected and the pick-up unit self performance detects the measurement that all is converted into dynamic angular tolerance.The present invention puts on moving target simulated reflections mirror etc. with tested two-dimentional scan mirror and rotary target and includes in cleverly in the travel path of dynamic photoelectric self-collimater collimated light beam, and constitutes closed optical autocollimating and measure the loop.Wherein rotary target is put on the optical target of target simulation catoptron skimulated motion under the drive of rotation platform, dynamic photoelectric self-collimater provides the angle miss distance of quick high accuracy as active angle measurement unit for two-dimentional scan mirror, with the target travel of real-time FEEDBACK CONTROL two dimension scan mirror trace simulation.Tracking error under closed loop is followed the tracks of has reflected the dynamic response performance of two-dimentional scan mirror.
Technical solution of the present invention is as follows:
A kind of two-dimentional scan mirror dynamic property pick-up unit, characteristics are that its formation comprises: dynamic photoelectric self-collimater, the hollow rotating platform, the rotation target, adjust platform and computer measurement and control system, described rotation target is by pivot arm, 45 ° of catoptrons, target simulation catoptron and auxiliary mirror are formed, described pivot arm is fixed on the described hollow rotating platform, and the optical axis of described dynamic photoelectric self-collimater, the turning axle of hollow rotating platform and the turning axle of pivot arm are coaxial, described 45 ° of catoptrons be installed in pivot arm with respect on the described hollow rotating platform another side, these 45 ° of catoptrons are positioned at the central through hole of pivot arm, reflecting surface is towards this central through hole and the position at 45 with pivot arm, described target simulation catoptron is installed in an end of pivot arm, reflecting surface is towards the reflecting surface of described 45 ° of catoptrons and angled with pivot arm, and described auxiliary mirror is installed in the other end of pivot arm, reflecting surface is pivot arm and angled with pivot arm dorsad; Described hollow rotating platform self has high-precision optical electric axial angle encoder; The weight of described target simulation catoptron and auxiliary mirror and installation site are to guarantee the equalising torque of pivot arm turning axle;
The central through hole that the parallel beam that described dynamic photoelectric self-collimater sends passes hollow rotating platform, pivot arm successively incides on the described target simulation catoptron after described 45 ° of mirror reflects, form the output of simulated target light beam through this target simulation mirror reflects again, the rotation of hollow rotating platform driven rotary arm forms coning motion light beam target;
Described computer measurement and control system is mainly finished the rotational speed of hollow rotation platform and acceleration is controlled to simulate the target of various forms of motion, accept that dynamic photoelectric self-collimater measuredly angle metricly reads, data processing and transmit the angle miss distance to two-dimentional scan mirror controller, motion to two-dimentional scan mirror to be measured is controlled, the two-dimentional scan mirror twin shaft dynamic error data that dynamic photoelectric self-collimater detects are handled and analyzed, obtain the dynamic property of two-dimentional scan mirror.
Utilize described two-dimentional scan mirror dynamic property pick-up unit to the method that two-dimentional scan mirror dynamic property detects, it is characterized in that comprising the following steps:
1. described two-dimentional scan mirror dynamic property pick-up unit is carried out self check;
2. dynamic photoelectric self-collimater and the hollow rotating platform with described two-dimentional scan mirror dynamic property pick-up unit is fixed on the dip plane of adjusting platform, described two-dimentional scan mirror to be measured is fixed on the bracing or strutting arrangement, make the two-dimentional rotation center of described two-dimentional scan mirror be arranged on the extended line of optical axis of described dynamic photoelectric self-collimater and the intersection point of the target simulation light beam of light beam behind described target simulation catoptron that dynamic photoelectric self-collimater sends, the angle of the turning axle of described target simulation light beam and hollow rotating platform is a, and the turning axle of described hollow rotating platform and horizontal plane angle are b; The controller of described dynamic photoelectric self-collimater links to each other with data Collection ﹠ Processing System with the driving governor of described two-dimentional scan mirror, the output terminal of the controller of hollow rotating platform links to each other with computer measurement and control system, and described data Collection ﹠ Processing System links to each other with computer measurement and control system;
3. adjust and detect original state, the parallel beam that described dynamic photoelectric self-collimater sends passes the central through hole of hollow rotating platform, pivot arm successively, through inciding after 45 ° of mirror reflects on the described target simulation catoptron, through impinging perpendicularly on the minute surface of tested two-dimentional scan mirror after the reflection once more, at this moment, light beam is back to dynamic autocollimator along former road, and angular deviation is zero;
When 4. detecting, under the control guiding of computer measurement and control system, the target simulation catoptron is driven by the hollow rotating platform and rotates according to the speed of setting, form a virtual space target with space circumference movement locus, dynamic photoelectric self-collimater is the angular deviation of measurement target simulated reflections mirror and tested two-dimentional scan mirror in real time initiatively, described data Collection ﹠ Processing System reads the measured angular error data of dynamic photoelectric self-collimater in real time and provides the angle miss distance to two-dimentional scan mirror controller in real time, this two dimension scan mirror controller is controlled described two-dimentional scan mirror according to preset program and is followed the tracks of described target simulation catoptron and do the motion of pitching and orientation, is back to described dynamic photoelectric self-collimater to make light beam in real time;
When 5. closed loop is followed the tracks of, data Collection ﹠ Processing System will read the measured angular error data of dynamic photoelectric self-collimater in real time and send described computer measurement and control system to;
6. described computer measurement and control system carries out data processing: the tracking error data that the closed loop tracking test experience of consecutive periods obtains also are periodic, to the angle error information
Do Fourier expansion:
Wherein:
Be the two-dimentional scan mirror twin shaft dynamic error data that dynamic photoelectric self-collimater detects, q=1,2,3...... each harmonic sequence number for launching,
Be constant term,
Be angle position,
M is counting of sampling in the error information one-period;
Constant term
Physical meaning be that initial ray machine is debug error;
The physical meaning of the fundamental component during q=1 is an axial system error;
When q=2,3......, motion deformation, distortion with target are rocked by expression axle system;
Described constant term component is a systematic error, has represented initial ray machine to debug error, and it is coaxiality error that fundamental component has been represented initial axle, and promptly dynamic photoelectric self-collimater sends the coaxiality error of the turning axle of the optical axis of light beam and hollow rotating platform; Remove DC component and fundamental component in the angular error data, remaining data are the dynamic tracking precision of tested two-dimentional scan mirror, and this tracking accuracy has reflected the dynamic response performance of tested two-dimentional scan mirror.
By choosing different target parameters: the target brachium, semi-cone angle a, inclination angle b, the distance between rotational speed omega and tested two-dimentional scan mirror and the described pivot arm is with the simulation of the target travel form that realizes various different spatial scopes, friction speed and accelerating curve.
Described two-dimentional scan mirror dynamic property pick-up unit carries out self check, comprises the following steps:
1. on the extended line of the optical axis of the dynamic photoelectric self-collimater of described two-dimentional scan mirror dynamic property pick-up unit, the synergic reflex mirror is set, the parallel beam that described dynamic photoelectric collimator is sent passes the hollow rotating platform successively, the central through hole of pivot arm, through inciding after 45 ° of mirror reflects on the target simulation catoptron, incide after reflection on the synergic reflex mirror of fixed placement, after impinging perpendicularly on the auxiliary mirror reflection once more after reflection, light beam is back to dynamic photoelectric self-collimater along former road, the controller of photoelectric auto-collimator links to each other with computer measurement and control system through the data acquisition process unit, and the hollow rotating platform controller links to each other with described computer measurement and control system;
2. described computer measurement and control system starts pivot arm by the hollow rotating platform controller and rotates continuously, data Collection ﹠ Processing System reads the measured angular error data of dynamic photoelectric self-collimater in real time and sends computer control system to, computer control system is carried out analyzing and processing to the angle error information, under the rotation of pivot arm consecutive periods, the angular error data that obtain also are periodic, the angle error information is done Fourier expansion to be got
Wherein
Be two-dimentional scan mirror self the trueness error data that dynamic photoelectric self-collimater detects, k=1,2,3...... are the each harmonic sequence number of launching,
Be constant term,
Be angle position.Wherein
N is a sampling number in the error information one-period;
Constant term
Physical meaning be that initial ray machine is debug error;
The physical meaning of the fundamental component during k=1 is an axial system error;
When k=2,3......, motion deformation, distortion with target are rocked by expression axle system;
Constant term
Be systematic error, represented initial ray machine to debug error, it is coaxiality error that fundamental component has been represented initial axle, it is the coaxiality error that dynamic photoelectric self-collimater sends the turning axle of the optical axis of light beam and hollow rotating platform, remove constant term and fundamental component in the error information, remaining data are two-dimentional scan mirror dynamic property pick-up unit self dynamic precision.
Described adjustment platform has X, Y, three-dimensional thick, the accurate adjustment function of Z as the support and the adjustment component of rotation target and dynamic photoelectric self-collimater.
Technique effect of the present invention:
1, the present invention proposes a kind of new dynamic autocollimation method, be about to tested two-dimentional scan mirror and rotary target and put on moving target simulated reflections mirror etc. and include in cleverly in the travel path of dynamic photoelectric self-collimater collimated light beam, and constitute closed optical autocollimating and measure the loop.Wherein rotary target is put on the optical target of target simulation catoptron skimulated motion under the drive of rotation platform, and dynamic photoelectric self-collimater provides the angle miss distance of quick high accuracy for two-dimentional scan mirror as active angle measurement unit.High-precision rotation platform drives the rotation of target simulation catoptron under the guiding of computer measurement and control system, can realize various high-precision target simulations with various compound movement forms.And high-precision dynamic photoelectric self-collimater detects for two-dimentional scan mirror provides the miss distance of quick high accuracy, has got rid of the measuring error of miss distance in the tracking error.Therefore, pick-up unit of the present invention can provide the target simulation and the high-precision check of compound movement curve simultaneously for two-dimentional scan mirror.
2, the rotation target requires himself to have higher dynamic accuracy as the moving target analogue unit.The present invention utilizes the external fixing catoptron of a slice as the synergic reflex mirror, the synergic reflex mirror of catoptron on the target and fixed placement is included in the photoelectric auto-collimator collimated light beam travel path, constitute closed autocollimation angle measurement loop, debug the variation that error etc. converts dynamic angular tolerance to influencing the motion deformation amount of axle system rolling momentum, pivot arm of himself dynamic accuracy and other ray machines, measure and note with dynamic photoelectric self-collimater.This self checking method has the characteristics convenient, that precision is high of implementing.
Description of drawings
Fig. 1 is a dynamic photoelectric self-collimater principle of work synoptic diagram
Fig. 2 is the present invention's two dimension scan mirror dynamic property pick-up unit synoptic diagram
Fig. 3 is self dynamic property detection method synoptic diagram of the present invention two dimension scan mirror dynamic property pick-up unit
Fig. 4 is that the present invention's two dimension scan mirror dynamic property pick-up unit is used for the structural representation that two-dimentional scan mirror twin shaft dynamic property detects
Fig. 5 is the single armed dynamic accuracy detection method synoptic diagram of pick-up unit self
Fig. 6 is that two-dimentional scan mirror single shaft dynamic property independent detection device is used for the independent detection method synoptic diagram of two-dimentional scan mirror azimuth axis performance
Fig. 7 is that two-dimentional scan mirror single shaft dynamic property independent detection device is used for the independent detection method synoptic diagram of two-dimentional scan mirror pitch axis performance
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this.
See also Fig. 1 earlier, Figure 1 shows that dynamic photoelectric self-collimater principle of work synoptic diagram.Along the horizon light direction of principal axis, laser instrument A1 sends light beam and illuminate graticule A3 after condenser A2 assembles, wherein A3 is positioned at the place, focal plane of collimator objective A5, behind Amici prism and collimator objective, form parallel beam output, the wherein beam-splitting surface of Amici prism and horizontal optical axis angle at 45 successively through the light beam behind the graticule A3.The parallel beam of output is through tested catoptron A6 reflection and once more behind collimator objective and Amici prism, imaging on photoelectric detector P.When tested catoptron A6 rotated the θ angle around horizontal optical axis, photoelectric detector P went up the linear displacement that imaging point G has Δ x, supposes that the focal length of collimator objective is f, and according to geometric optical theory, rotational angle theta can be expressed as
Δx＝f*tg2θ
Because θ is very little, following formula can be approximately Δ x=f*2 θ, then has
θ＝Δx/2f
Therefore, do relevant treatment behind the variable quantity by hot spot collection and processing unit B1 real-time and dynamic collection Δ x and calculate, can obtain the variation of the dynamic rotational angle theta of tested catoptron.
See also Fig. 2, Fig. 2 is two-dimentional scan mirror dynamic property pick-up unit synoptic diagram.As seen from the figure, the present invention's two dimension scan mirror dynamic property pick-up unit, its formation comprises two-dimentional dynamic photoelectric self-collimater 1 and the controller A thereof that places successively along optical axis, hollow rotating platform 2 and controller B thereof, be fixedly mounted on the pivot arm 3 on the hollow rotating platform, be installed in pivot arm intermediate throughholes position, reflecting surface is towards through hole, and the catoptron 4 at 45 with pivot arm, be installed in pivot arm one end, reflecting surface is towards 45 ° of mirror reflection surface and with the angled target simulation catoptron 5 of pivot arm and be installed in the pivot arm other end, reflecting surface is pivot arm and the compositions such as auxiliary mirror 6 angled with pivot arm dorsad, target simulation catoptron 5 is identical with respect to the moment of pivot arm turning axle with auxiliary mirror 6, to avoid pivot arm when rotation because the rocking of moment unbalance.The angle of target simulation catoptron 5 and auxiliary mirror 6 and pivot arm is according to the actual measurement requirements set.The parallel beam that dynamic photoelectric self-collimater 1 sends passes the center through hole of hollow rotating platform 2, pivot arm 3 successively, incides on the target simulation catoptron 5 after 4 reflections of 45 ° of catoptrons, once more through reflecting to form the output of simulated target light beam.3 rotations of hollow rotating platform 2 driven rotary arms form coning motion light beam target.Data acquisition and processing unit C realize to the dynamic photoelectric self-collimater measurement data collection, with the communication of computer measurement and control system D and with the exchanges data of tested two-dimentional scan mirror.
Fig. 3 is self dynamic property detection method synoptic diagram of pick-up unit of the present invention, its formation comprises two-dimentional dynamic laser autocollimator 1 and the controller A thereof that places successively along optical axis, hollow rotating platform 2 and controller B thereof, be fixed on the pivot arm 3 on the hollow rotating platform 2, be installed in pivot arm 3 intermediate throughholes positions, reflecting surface is towards through hole, and the catoptron 4 at 45 with pivot arm 3, be installed in pivot arm one end, reflecting surface is towards the reflecting surface of described 45 ° of catoptrons 4 and the target simulation catoptron 5 angled with pivot arm, vertical with hollow rotating platform turning axle, and reflecting surface is towards the synergic reflex mirror 7 of described 45 ° of catoptrons 4 and fixed placement and be installed in the pivot arm other end, reflecting surface is pivot arm and the auxiliary mirror 6 angled with pivot arm dorsad, and compositions such as data acquisition process unit C and computer measurement and control system D.Pick-up unit self precision depends on rotary target target precision, also is that the axle system of hollow rotating platform 2 rocks with the distortion of pivot arm 3 etc.The self checking method of its dynamic property is under the situation that pivot arm 3 rotates continuously, is the variation that rolling momentum and twist angle are transformed into dynamic angular tolerance with above-mentioned axle, detects with dynamic photoelectric self-collimater 1.The implementation method of performance self check mainly is to utilize the synergic reflex mirror 7 of a fixed placement, all includes in each catoptron on the pivot arm 3 in the travel path that dynamic collimation instrument 1 sends light beam and constitutes closed optical autocollimating and measure the loop.It specifically is the center through hole that parallel beam that described dynamic photoelectric self-collimater 1 sends passes hollow rotating platform 2, pivot arm 3 successively, after 4 reflections of 45 ° of catoptrons, incide on the target simulation catoptron 5 of pivot arm 3 one ends, incide after reflection on the synergic reflex mirror 7 of fixed placement, impinge perpendicularly on after reflection once more on the auxiliary mirror 6 of the pivot arm other end.At this moment, light beam is back to dynamic photoelectric self-collimater 1 along former road.Start 2 rotations of hollow rotating platform, pivot arm 3 is rotation continuously under the drive of rotation platform 2, and the axle system of pivot arm 3 rocks, motion deformation and ray machine are debug error etc., all will be embodied in the measured angular error data of dynamic photoelectric self-collimater 1.Data Collection ﹠ Processing System C is real-time reads the measured angular error data of dynamic photoelectric self-collimater 1 and sends computer control system D to, computer control system D carries out analyzing and processing to the angle error information, can obtain pick-up unit self dynamic precision.It is described that the angle error information is carried out analyzing and processing is a kind of Fourier transform processing method.Under the rotation of pivot arm consecutive periods, the angular error data that obtain also are periodic.The angle error information is done Fourier expansion gets,
Wherein
Be two-dimentional scan mirror self the trueness error data that dynamic photoelectric self-collimater 1 detects, k=1,2,3...... are the each harmonic sequence number of launching,
Be constant term,
Be angle position.Wherein
N is a sampling number in the error information one-period;
Constant term
Physical meaning be that initial ray machine is debug error;
The physical meaning of the fundamental component during k=1 is an axial system error;
When k=2,3......, expression axle system rocks and the motion deformation of target, distortion etc.
Hence one can see that, and its DC component is a systematic error, has represented initial ray machine to debug error, and it is coaxiality error that fundamental component has been represented initial axle, and promptly dynamic photoelectric self-collimater sends the coaxiality error of the turning axle of the optical axis of light beam and hollow rotating platform.Remove DC component and fundamental component in the error information, remaining data are two-dimentional scan mirror dynamic property pick-up unit self dynamic precision.Himself dynamic accuracy must be that the checked object precision is 5～10 times, just can be used for test experience.
Fig. 4 is that pick-up unit is used for the structural representation that the two-dimensional rotating mirror dynamic property detects, it is included in adjusts dynamic photoelectric self-collimater 1 and the controller A thereof that places successively on platform 9 dip plane, hollow rotating platform 2 and controller B thereof, be fixed on the pivot arm 3 on the hollow rotating platform 2, be installed in pivot arm 3 intermediate throughholes positions, reflecting surface is towards through hole, and the catoptron 4 at 45 with pivot arm, be installed in pivot arm one end, reflecting surface is towards 45 ° of catoptron 4 reflectings surface and the target simulation catoptron 5 angled with pivot arm 3, tested two-dimentional scan mirror 8 and bracing or strutting arrangement E thereof, the driving governor F of tested two-dimentional scan mirror 8 is installed in pivot arm 3 other ends, reflecting surface is pivot arm 3 and form with processing unit and computer measurement and control 10 with angled auxiliary mirror 6 and the data acquisition of pivot arm 3 dorsad.The turning axle of described hollow rotating platform 2 and horizontal plane angle are b.After the parallel beam that described dynamic photoelectric self-collimater 1 sends passes through hollow rotating platform 2 successively, arrive target simulation catoptron 5 after 4 reflections of 45 ° of catoptrons, the light beam after reflecting once more and the turning axle angle of hollow rotating platform 2 are a.According to different detection demands, can adjust the value of a and b.When detecting original state, the parallel beam that dynamic photoelectric self-collimater 1 sends passes the center through hole of hollow rotating platform 2, pivot arm 3 successively, after 4 reflections of 45 ° of catoptrons, incide on the target simulation catoptron 5, through impinging perpendicularly on the minute surface of tested two-dimentional scan mirror 8 after the reflection once more, at this moment, light beam is back to dynamic autocollimator 1 along former road, angular deviation is zero.During detection, under the control guiding of computer measurement and control system D, target simulation catoptron 5 is driven by hollow rotating platform 2 and according to the speed rotation of setting, forms a virtual space target with space circumference movement locus.Dynamic photoelectric self-collimater 1 is the angular deviation of measurement target simulated reflections mirror 5 and tested two-dimentional scan mirror 8 in real time initiatively, and data Collection ﹠ Processing System C is real-time reads the measured angular error data of dynamic autocollimator 1 and real-time provide the angle miss distance to two-dimentional scan mirror controller F.Two dimension scan mirror controller F controls two-dimentional scan mirror 8 these target simulation catoptrons 5 of tracking according to certain strategy and does pitching and orientation motion, is back to dynamic photoelectric self-collimater 1 with the real-time light beam that makes.When closed loop was followed the tracks of, the angular error data that dynamic photoelectric self-collimater that data Collection ﹠ Processing System C will read in real time 1 is measured also sent computer measurement and control system D to and do late time data and handle.Data processing adopts Fourier transform processing method.The tracking error data that the closed loop tracking test experience of consecutive periods obtains also are periodic.The angle error information is done Fourier expansion gets,
Wherein
Be the two-dimentional scan mirror twin shaft dynamic error data that dynamic photoelectric self-collimater 1 detects, q=1,2,3...... each harmonic sequence number for launching,
Be constant term,
Be angle position.Wherein
M is counting of sampling in the error information one-period;
Constant term
Physical meaning be that initial ray machine is debug error;
The physical meaning of the fundamental component during q=1 is an axial system error;
When q=2,3......, expression axle system rocks and the motion deformation of target, distortion etc.
Hence one can see that, and its DC component is a systematic error, has represented initial ray machine to debug error, and it is coaxiality error that fundamental component has been represented initial axle, and promptly dynamic photoelectric self-collimater 1 sends the coaxiality error of the turning axle of the optical axis of light beam and hollow rotating platform 2.Remove DC component and fundamental component in the angular error data, remaining data are the dynamic tracking precision of tested two-dimentional scan mirror 8, and this tracking accuracy has reflected the dynamic response performance of tested two-dimentional scan mirror 8.
Fig. 5 is the single armed dynamic accuracy detection method synoptic diagram of pick-up unit self.Before pick-up unit being applied to two-dimentional scan mirror single shaft dynamic property independence test, need the single armed dynamic accuracy of himself is detected, the dynamic accuracy of single armed must be 5～10 times of tested two-dimentional scan mirror single shaft dynamic accuracy, just can effectively check experiment.Its formation comprises dynamic photoelectric self-collimater 1 and controller A thereof, hollow rotating platform 2 and controller B thereof, be fixed on the pivot arm 3 on the hollow rotating platform, be installed in pivot arm intermediate throughholes position, reflecting surface towards through hole and the catoptron 4 at 45 with pivot arm, be installed in pivot arm one end, reflecting surface towards 45 ° of mirror reflection surface and the target simulation catoptron 11 vertical, data Collection ﹠ Processing System C and computer measurement and control system D etc. with pivot arm.The self checking method of its dynamic property is under the situation of pivot arm 3 continuous rotations, and the axle system rolling momentum of hollow rotating platform 2 and the twist angle of pivot arm 3 are transformed into the variation that dynamic angular is measured, and detects with dynamic photoelectric self-collimater 1.It specifically is the center through hole that parallel beam that described dynamic photoelectric self-collimater 1 sends passes hollow rotating platform 2, pivot arm 3 successively, on reflecting surface through impinging perpendicularly on pivot arm one end after the 45 ° of catoptrons 4 reflection target simulation catoptron 11 vertical with pivot arm, at this moment, light beam is back to dynamic photoelectric self-collimater 1 along former road.Start 2 rotations of hollow rotating platform, pivot arm 3 is rotation continuously under the drive of hollow rotating platform 2, the axle system of pivot arm 3 rocks, the motion deformation and the ray machine of pivot arm 3 are debug error etc., all will be embodied in the measured angular error data of dynamic photoelectric self-collimater 1.Data Collection ﹠ Processing System C is real-time reads the measured angular error data of dynamic photoelectric self-collimater 1 and sends computer control system D to, computer control system D carries out analyzing and processing to the angle error information, can obtain the single armed dynamic accuracy of pick-up unit self.It is described that the angle error information is carried out analyzing and processing is a kind of Fourier transform processing method.Under the rotation of pivot arm consecutive periods, the angular error data that obtain also are periodic.The angle error information is done Fourier expansion gets,
Wherein
Be the angular error data that dynamic photoelectric self-collimater 1 detects, r=1,2,3...... each harmonic for launching,
Be constant term,
Be angle position.Wherein
X is the sampling number in the error information one-period;
Constant term
Physical meaning be that initial ray machine is debug error;
The physical meaning of the fundamental component during r=1 is an axial system error;
When r=2,3......, expression axle system rocks and the motion deformation of target, distortion etc.
Hence one can see that, and its DC component is a systematic error, has represented initial ray machine to debug error, and it is coaxiality error that fundamental component has been represented initial axle, and promptly dynamic photoelectric self-collimater sends the coaxiality error of the turning axle of the optical axis of light beam and hollow rotating platform.Remove DC component and fundamental component in the angular error data, remaining data are the single armed dynamic accuracy of pick-up unit self.
Fig. 6 is the independent detection method synoptic diagram of azimuth axis dynamic property that two-dimentional scan mirror single shaft dynamic property independent detection device is used for two-dimentional scan mirror, its formation comprises dynamic laser autocollimator 1 and controller A thereof, hollow rotating platform 2 and controller B thereof, be fixedly mounted on the pivot arm 3 on the hollow rotating platform, tested two-dimentional scan mirror 8 and bracing or strutting arrangement E thereof that original state reflecting surface and pivot arm are at 45, the driving governor F of tested two-dimentional scan mirror 8, be installed in pivot arm one end, reflecting surface is towards 45 ° of mirror reflection surface and the target simulation catoptron 11 vertical with pivot arm, and compositions such as data Collection ﹠ Processing System C and computer measurement and control system D.The parallel beam that dynamic photoelectric self-collimater 1 sends passes the center through hole of hollow rotating platform 2, pivot arm 3 successively, incide on the reflecting surface of tested two-dimentional scan mirror 8, on the vertical target simulation catoptron 11 of reflecting surface through impinging perpendicularly on pivot arm 3 one ends after tested two-dimentional scan mirror 8 reflections and pivot arm 3, at this moment, light beam is back in the dynamic photoelectric self-collimater 1 along former road.Start 2 rotations of hollow rotating platform, pivot arm 3 is rotation continuously under the drive of hollow rotating platform 2, dynamic photoelectric self-collimater 1 is initiatively measured the angular deviation of the reflecting surface target simulation catoptron vertical with pivot arm 11 and tested two-dimentional scan mirror 8 in real time, data Collection ﹠ Processing System C is real-time read the measured angular error data of dynamic photoelectric self-collimater 1 also real-time provide the angle miss distance to two-dimentional scan mirror controller F.Two dimension scan mirror controller F controls two-dimentional scan mirror 8 according to certain strategy and follows the tracks of this target simulation catoptron, 8 need of two-dimentional scan mirror this moment are done the orientation motion, pitch axis only need be kept state and not rotate, and light beam is back in the dynamic photoelectric self-collimater 1.When closed loop was followed the tracks of, the dynamic photoelectric self-collimater 1 measured angular error data that data Collection ﹠ Processing System C will read in real time sent computer measurement and control system D to and do the late time data processing.Data processing adopts Fourier transform processing method.The tracking error data that the closed loop tracking test experience of consecutive periods obtains also are periodic.The angle error information is done Fourier expansion gets,
Wherein:
Be the angular error data that dynamic photoelectric self-collimater 1 detects, f=1,2,3...... each harmonic sequence number for launching,
Be constant term,
Be angle position.Wherein
Y is the sampling number in the error information one-period;
Constant term
Physical meaning be that initial ray machine is debug error;
The physical meaning of the fundamental component during f=1 is an axial system error;
When f=2,3......, expression axle system rocks and the motion deformation of target, distortion etc.
Hence one can see that, and its DC component is a systematic error, has represented initial ray machine to debug error, and it is coaxiality error that fundamental component has been represented initial axle, and promptly dynamic photoelectric self-collimater 1 sends the coaxiality error of the turning axle of the optical axis of light beam and hollow rotating platform 2.Remove DC component and fundamental component in the angular error data, remaining data are the azimuth axis dynamic tracking precision independently of tested two-dimentional scan mirror 8, and the azimuth axis that this tracking accuracy has reflected tested two-dimentional scan mirror 8 is dynamic response performance independently.
Fig. 7 is the independent detection method synoptic diagram of pitch axis dynamic property that two-dimentional scan mirror single shaft dynamic property independent detection device is used for two-dimentional scan mirror, its formation comprises dynamic laser autocollimator 1 and controller A thereof, rotary axis sends vertical hollow rotating platform 2 of light beam and controller B thereof with dynamic laser autocollimator 1, be fixedly mounted on the pivot arm 3 on the hollow rotating platform, reflecting surface is vertical with pivot arm and send light beam tested two-dimentional scan mirror 8 and bracing or strutting arrangement E thereof at 45 with dynamic photoelectric self-collimater 1, the driving governor F of tested two-dimentional scan mirror 8, be installed in pivot arm one end, reflecting surface is towards 45 ° of mirror reflection surface and the target simulation catoptron 11 vertical with pivot arm, reflecting surface is pivot arm and the auxiliary mirror 6 angled with pivot arm dorsad, and compositions such as data Collection ﹠ Processing System C and computer measurement and control system D.When initial, the parallel beam that dynamic photoelectric self-collimater 1 sends incides on the reflecting surface of tested two-dimentional scan mirror 8, on reflecting surface through impinging perpendicularly on pivot arm one end after tested two-dimentional scan mirror 8 reflections target simulation catoptron 11 vertical with pivot arm, at this moment, light beam is back to dynamic photoelectric self-collimater 1 along former road.Start 2 rotations of hollow rotating platform, pivot arm 3 is rotation continuously under the drive of rotation platform, dynamic photoelectric self-collimater 1 is initiatively measured the angular deviation of the reflecting surface target simulation catoptron vertical with pivot arm 11 and tested two-dimentional scan mirror 8 in real time, data Collection ﹠ Processing System C is real-time read the measured angular error data of dynamic photoelectric self-collimater 1 also real-time provide the angle miss distance to two-dimentional scan mirror controller F.Two dimension scan mirror controller F controls two-dimentional scan mirror 8 according to certain strategy and follows the tracks of this target simulation catoptron 11,8 need of two-dimentional scan mirror this moment are done luffing, azimuth axis only need be kept state and not rotate, and light beam is back in the dynamic photoelectric self-collimater 1.When closed loop was followed the tracks of, the dynamic photoelectric self-collimater 1 measured angular error data that data Collection ﹠ Processing System C will read in real time sent computer measurement and control system D to and do the late time data processing.Data processing adopts Fourier transform processing method.The tracking error data that the closed loop tracking test experience of consecutive periods obtains also are periodic.The angle error information is done Fourier expansion gets,
Wherein
Be the angular error data that dynamic photoelectric self-collimater 1 detects, g=1,2,3...... each harmonic for launching,
Be constant term,
Be angle position.Wherein
Y is the sampling number in the error information one-period;
Constant term
Physical meaning be that initial ray machine is debug error;
The physical meaning of the fundamental component during g=1 is an axial system error;
When g=2,3......, expression axle system rocks and the motion deformation of target, distortion etc.
Its DC component that hence one can see that is a systematic error, represented initial ray machine to debug error, it is the error of perpendicularity that fundamental component has been represented initial axle, and promptly the turning axle of dynamic photoelectric self-collimater 1 optical axis that sends light beam and hollow rotating platform 2 spool is the error of perpendicularity.Remove DC component and fundamental component in the angular error data, remaining data are the pitch axis dynamic tracking precision independently of tested two-dimentional scan mirror 8, and the pitch axis that this tracking accuracy has reflected tested two-dimentional scan mirror 8 is dynamic response performance independently.
Claims (5)
1. two-dimentional scan mirror dynamic property pick-up unit, be characterised in that its formation comprises: dynamic photoelectric self-collimater (1), hollow rotating platform (2), the rotation target, adjust platform (9) and computer measurement and control system (D), described rotation target is by pivot arm (3), 45 ° of catoptrons (4), target simulation catoptron (5) and auxiliary mirror (6) are formed, described pivot arm (3) is fixed on the described hollow rotating platform (2), and the optical axis of described dynamic photoelectric self-collimater, the turning axle of hollow rotating platform (2) and the turning axle of pivot arm are coaxial, described 45 ° of catoptrons (4) be installed in pivot arm with respect on described hollow rotating platform (2) another side, these 45 ° of catoptrons (4) are positioned at the central through hole of pivot arm, reflecting surface is towards this central through hole and the position at 45 with pivot arm, described target simulation catoptron (5) is installed in an end of pivot arm, reflecting surface is towards the reflecting surface of described 45 ° of catoptrons (4) and angled with pivot arm, and described auxiliary mirror (6) is installed in the other end of pivot arm, reflecting surface is pivot arm and angled with pivot arm dorsad; Described hollow rotating platform self has high-precision optical electric axial angle encoder; The weight of described target simulation catoptron (5) and auxiliary mirror (6) and installation site are to guarantee the equalising torque of pivot arm turning axle;
The central through hole that the parallel beam that described dynamic photoelectric self-collimater (1) sends passes hollow rotating platform (2), pivot arm (3) successively incides on the described target simulation catoptron (5) after described 45 ° of catoptrons (4) reflection, reflect to form the output of simulated target light beam through this target simulation catoptron (5) again, hollow rotating platform (2) driven rotary arm (3) rotation forms coning motion light beam target;
Described computer measurement and control system (D) is mainly finished the rotational speed of hollow rotation platform (2) and acceleration is controlled to simulate the target of various forms of motion, read the measured angular metric of dynamic photoelectric self-collimater (1), data processing and transmit the angle miss distance to two-dimentional scan mirror controller (F), motion to two-dimentional scan mirror to be measured (8) is controlled, the two-dimentional scan mirror twin shaft dynamic error data that dynamic photoelectric self-collimater detects are handled and analyzed, obtain the dynamic property of two-dimentional scan mirror.
2. utilize the described two-dimentional scan mirror dynamic property pick-up unit of claim 1 to the method that two-dimentional scan mirror dynamic property detects, it is characterized in that comprising the following steps:
1. described two-dimentional scan mirror dynamic property pick-up unit is carried out self check;
2. dynamic photoelectric self-collimater (1) and the hollow rotating platform (2) with described two-dimentional scan mirror dynamic property pick-up unit is fixed on the dip plane of adjusting platform (9), described two-dimentional scan mirror (8) to be measured is fixed on the bracing or strutting arrangement (E), make the two-dimentional rotation center of described two-dimentional scan mirror (8) be arranged on the extended line of optical axis of described dynamic photoelectric self-collimater (1) and the intersection point of the target simulation light beam of light beam behind described target simulation catoptron (5) that dynamic photoelectric self-collimater (1) sends, the angle of the turning axle of described target simulation light beam and hollow rotating platform (2) is a, and the turning axle of described hollow rotating platform 2 and horizontal plane angle are b; The controller (A) of described dynamic photoelectric self-collimater (1) and the driving governor (F) of described two-dimentional scan mirror link to each other with data Collection ﹠ Processing System (C), the output terminal of the controller of hollow rotating platform (B) links to each other with computer measurement and control system (D), and described data Collection ﹠ Processing System (C) links to each other with computer measurement and control system (D);
When 3. detecting original state, the parallel beam that described dynamic photoelectric self-collimater (1) sends passes the central through hole of hollow rotating platform (2), pivot arm (3) successively, after 45 ° of catoptrons (4) reflection, incide on the described target simulation catoptron (5), through impinging perpendicularly on the minute surface of tested two-dimentional scan mirror 8 after the reflection once more, at this moment, light beam is back to dynamic autocollimator (1) along former road, angular deviation is zero;
When 4. detecting, under the control guiding of computer measurement and control system (D), target simulation catoptron (5) is driven by hollow rotating platform (2) and rotates according to the speed of setting, form a virtual space target with space circumference movement locus, dynamic photoelectric self-collimater (1) is the angular deviation of measurement target simulated reflections mirror (5) and tested two-dimentional scan mirror (8) in real time initiatively, described data Collection ﹠ Processing System (C) reads the measured angular error data of dynamic photoelectric self-collimater (1) in real time and provides the angle miss distance to two-dimentional scan mirror controller (F) in real time, this two dimension scan mirror controller (F) is controlled described two-dimentional scan mirror (8) the described target simulation catoptron of tracking (5) according to preset program and is done pitching and orientation motion, is back to described dynamic photoelectric self-collimater (1) to make light beam in real time;
When 5. closed loop is followed the tracks of, data Collection ﹠ Processing System (C) will read the measured angular error data of dynamic photoelectric self-collimater (1) in real time and send described computer measurement and control system (D) to;
6. described computer measurement and control system (D) carries out data processing: the tracking error data that the closed loop tracking test experience of consecutive periods obtains also are periodic, to the angle error information
Do Fourier expansion:
Wherein:
Be two-dimentional scan mirror (8) the twin shaft dynamic error data that dynamic photoelectric self-collimater (1) detects, q=1,2,3...... each harmonic sequence number for launching,
Be constant term,
Be angle position,
M is counting of sampling in the error information one-period;
Constant term
Physical meaning be that initial ray machine is debug error;
The physical meaning of the fundamental component during q=1 is an axial system error;
When q=2,3......, motion deformation, distortion with target are rocked by expression axle system;
Described constant term component is a systematic error, represented initial ray machine to debug error, it is coaxiality error that fundamental component has been represented initial axle, and promptly dynamic photoelectric self-collimater (1) sends the coaxiality error of the turning axle of the optical axis of light beam and hollow rotating platform (2); Remove DC component and fundamental component in the angular error data, remaining data are the dynamic tracking precision of tested two-dimentional scan mirror (8), and this tracking accuracy has reflected the dynamic response performance of tested two-dimentional scan mirror (8).
3. the method for detection according to claim 2, it is characterized in that by choosing different target parameters: the target brachium, semi-cone angle a, inclination angle b, distance between rotational speed omega and tested two-dimentional scan mirror (8) and the described pivot arm (3) is with the simulation of the target travel form that realizes various different spatial scopes, friction speed and accelerating curve.
4. the method for detection according to claim 2 is characterized in that described two-dimentional scan mirror dynamic property pick-up unit carries out self check, comprises the following steps:
1. on the extended line of the optical axis of the dynamic photoelectric self-collimater (1) of described two-dimentional scan mirror dynamic property pick-up unit, synergic reflex mirror (7) is set, the parallel beam that described dynamic photoelectric collimator (1) is sent passes hollow rotating platform (2) successively, the central through hole of pivot arm (3), after 45 ° of catoptrons (4) reflection, incide on the target simulation catoptron (5), incide after reflection on the synergic reflex mirror (7) of fixed placement, after impinging perpendicularly on the last reflection of auxiliary mirror (6) once more after reflection, light beam is back to dynamic photoelectric self-collimater (1) along former road, the controller (A) of photoelectric auto-collimator (1) links to each other with computer measurement and control system (D) through data acquisition process unit (C), and hollow rotating platform controller (B) links to each other with described computer measurement and control system (D);
2. described computer measurement and control system (D) starts pivot arm (3) rotation continuously by hollow rotating platform controller (B), data Collection ﹠ Processing System (C) reads the measured angular error data of dynamic photoelectric self-collimater (1) in real time and sends computer control system (D) to, computer control system (D) is carried out analyzing and processing to the angle error information, under the rotation of pivot arm consecutive periods, the angular error data that obtain also are periodic.
The angle error information is done Fourier expansion gets,
Wherein
Be two-dimentional scan mirror self the trueness error data that dynamic photoelectric self-collimater (1) detects, k=1,2,3...... are the each harmonic sequence number of launching,
Be constant term,
Be angle position.Wherein
N is a sampling number in the error information one-period;
Constant term
Physical meaning be that initial ray machine is debug error;
The physical meaning of the fundamental component during k=1 is an axial system error;
When k=2,3......, motion deformation, distortion with target are rocked by expression axle system;
Constant term
Be systematic error, represented initial ray machine to debug error, it is coaxiality error that fundamental component has been represented initial axle, it is the coaxiality error that dynamic photoelectric self-collimater sends the turning axle of the optical axis of light beam and hollow rotating platform, remove constant term and fundamental component in the error information, remaining data are two-dimentional scan mirror dynamic property pick-up unit self dynamic precision.
5. the method for detection according to claim 2 is characterized in that support and the adjustment component of described adjustment platform (9) as rotation target and dynamic photoelectric self-collimater, has X, Y, three-dimensional thick, the accurate adjustment function of Z.
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