CN106403847A - Orthogonal degree adjusting method of photoelectric sensor of double-axis photoelectric autocollimator - Google Patents
Orthogonal degree adjusting method of photoelectric sensor of double-axis photoelectric autocollimator Download PDFInfo
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- CN106403847A CN106403847A CN201510462800.XA CN201510462800A CN106403847A CN 106403847 A CN106403847 A CN 106403847A CN 201510462800 A CN201510462800 A CN 201510462800A CN 106403847 A CN106403847 A CN 106403847A
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Abstract
The invention belongs to the field of design and debugging of photoelectric autocollimators, and specifically relates to an orthogonal degree adjusting method of a photoelectric sensor of a double-axis photoelectric autocollimator in order to solve the problem of difficult adjustment due to two vertical optical paths of the double-axis photoelectric autocollimator. Through an orthogonal transfer method, positions of two reticles and two CCD sensors are adjusted, the operation method of two optical axes is easy and convenient, the method is suitable for adjustment of two optical paths of any double-axis photoelectric autocollimator, and the verticality of the two optical paths can be well guaranteed; and according to the method, the orthogonality of the reticles and CCDs in the middle stage is effectively improved, test results are more accurate, and the reliability is higher.
Description
Technical field
The invention belongs to photoelectric auto-collimator design debugging field is and in particular to a kind of twin shaft photoelectric auto-collimation
Instrument photoelectric sensor intercept method of adjustment.
Background technology
Dual axis photoelectric autocollimation is a kind of real-time, contactless high precision two-dimensional Angle Measuring Equipment.
The core devices of photoelectric auto-collimator are charge coupled device ccds.Charge coupled device ccd is a kind of skill
Art is ripe, the extensive imageing sensor of application technology.Develop very fast since early 1970s
Speed.
Traditional photoelectric sensor method of adjustment has two kinds.One kind is to be imaged battle array using micro- sem observation CCD
Row, another kind of method is using theodolite light side two differentiation plate imaging, and both approaches adjust two light paths
Orthogonality can only ensure the orthogonality being finally imaged it is impossible to ensure the orthogonality of two light path intermediate links.
The problem existing for both the above method, have studied and judge the orthogonal method of two light paths, sends out
Understand a kind of dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment, have passed through series of experiments
Checking, this method can accurately and effectively adjust the verticality of two light paths.
Content of the invention
The purpose of the present invention, not enough for prior art, a kind of solution dual axis photoelectric autocollimation two is provided
Light path is mutually perpendicular to adjust the dual axis photoelectric autocollimation photoelectric sensor intercept adjustment side of difficult problem
Method.
The technical scheme is that：
A kind of dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment, comprises the following steps
Step one, installs line array CCD bidimensional test device；
This device include Y-axis CCD, adjusting screw, Y-axis differentiation plate, Y-axis light source, X-axis light source,
X-axis differentiation plate, adjusting screw, X-axis CCD, three spectroscopes and camera lens, wherein, described X-axis light
Source, X-axis graticle, spectroscope A, spectroscope B and lens optical are coaxial, wherein spectroscope A, point
Light microscopic B is located between camera lens and X-axis graticle, and described adjusting screw fixes X-axis CCD, described X
Axle CCD is coaxial with spectroscope A, and described X-axis graticle and X-axis CCD are positioned at the focal plane of camera lens
On；Described Y-axis light source, Y-axis graticle, spectroscope C, spectroscope B and lens optical are coaxial；Institute
State spectroscope C be located at spectroscope B top and with its with, described adjusting screw in Y-axis CCD,
Described Y-axis graticle and Y-axis CCD are respectively positioned on the focal plane of camera lens；
Step 2, adjusts X-axis light path, and X-axis differentiation plate is adjusted to be mutually perpendicular to X-axis CCD；
Light X-axis light source, close Y-axis light source, prism of corner cube is arranged on camera lens, realizes optical system
Auto-collimation, oscillographic probe is connected to the outfan of X-axis CCD, adjusts X by adjusting screw 7
The position of axle CCD, observation oscilloscope output waveform, when output waveform is for square wave, then X-axis differentiation
Plate is vertical with X-axis CCD；
Step 3, close X-axis light source, light Y-axis light source, at this moment should by Y-axis differentiation plate be adjusted to
X-axis CCD is parallel, and when Y-axis differentiation plate is parallel with X-axis CCD, Y-axis differentiation plate is in X-axis CCD
On imaging maximum, the pulse width observing X-axis ccd output signal with oscillograph is maximum, by adjusting
Whole Y-axis dividing sheet base position detection X-axis ccd output signal, can find X-axis CCD by regulation
Output image width can by the narrow process widening into and narrowing, adjust Y-axis differentiation plate to X-axis CCD
Output image to position the widest, now represent that Y-axis differentiation plate is adjusted to parallel with X-axis CCD；
Step 4, adjusts Y-axis light path, and Y-axis differentiation plate is adjusted to be mutually perpendicular to Y-axis CCD；
Light Y-axis light source, close X-axis light source, prism of corner cube is arranged on camera lens, realizes optical system
Auto-collimation, oscillographic probe is connected to the outfan of Y-axis CCD, adjusts Y by adjusting screw 2
The position of axle CCD, observation oscilloscope output waveform, when output waveform is for square wave, then Y-axis differentiation
Plate is vertical with Y-axis CCD；Now, dual axis photoelectric autocollimation X-axis, Y-axis two light path intercept are adjusted
Whole finish.
The invention has the beneficial effects as follows：
1. pass through orthogonal transmission method, the position of adjustment two differentiation plate and two ccd sensors, make two optical axises
Operational approach simple, convenient.
2. it is applied to the regulation of two light paths of any dual axis photoelectric autocollimation, can preferably ensure two light
The verticality on road.
3. the present invention effectively raises the orthogonality of intermediate link graticle and CCD, makes test result more
Plus accurately, reliability is higher.
Brief description
Fig. 1 is line array CCD bidimensional test schematic diagram；
Fig. 2 is line array CCD two-dimensional structure sectional view；
Fig. 3 is differentiation plate schematic diagram；
Fig. 4 is ccd signal square wave schematic diagram；
Fig. 5 is pulse diagram in X-axis CCD for the Y-axis light source igniting；
1.Y axle CCD；2. adjusting screw；3.Y axle breaks up plate；4.Y axle light source；5.X axle light source；6.X
Axle breaks up plate；7. adjusting screw；8.X axle CCD；9. spectroscope B；10. camera lens；11. spectroscope C；12.
Spectroscope A.
Specific embodiment
Below in conjunction with the accompanying drawings with embodiment to a kind of dual axis photoelectric autocollimation photoelectric sensing proposed by the present invention
Device intercept method of adjustment is further introduced：
A kind of dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment, comprises the following steps
Step one, installs line array CCD bidimensional test device；
This device includes Y-axis CCD1, adjusting screw 2, Y-axis differentiation plate 3, Y-axis light source 4, X-axis
Light source 5, X-axis differentiation plate 6, adjusting screw 7, X-axis CCD8, three spectroscopes 9 and camera lens 10,
Wherein, described X-axis light source 5, X-axis graticle 6, spectroscope A12, spectroscope B9 and camera lens 10
Optics is coaxial, and wherein spectroscope A12, spectroscope B9 are located between camera lens 10 and X-axis graticle 6,
Described adjusting screw 7 fixes X-axis CCD8, and described X-axis CCD is coaxial with spectroscope A12, described
X-axis graticle and X-axis CCD are located on the focal plane of camera lens；Described Y-axis light source 4, Y-axis graticle
3rd, spectroscope C11, spectroscope B9 and camera lens 10 optics are coaxial；Described spectroscope C11 is located at spectroscope
The top of B9 and with its with, described adjusting screw 2 in Y-axis CCD1, described Y-axis graticle 3
On the focal plane that Y-axis CCD1 is respectively positioned on camera lens 10；
Step 2, adjusts X-axis light path, and X-axis differentiation plate is adjusted to be mutually perpendicular to X-axis CCD；
Light X-axis light source, close Y-axis light source, prism of corner cube is arranged on camera lens, realizes optical system
Auto-collimation, oscillographic probe is connected to the outfan of X-axis CCD, adjusts X by adjusting screw 7
The position of axle CCD, observation oscilloscope output waveform, when output waveform is for square wave, then X-axis differentiation
Plate is vertical with X-axis CCD；
Step 3, close X-axis light source, light Y-axis light source, at this moment should by Y-axis differentiation plate be adjusted to
X-axis CCD is parallel, and when Y-axis differentiation plate is parallel with X-axis CCD, Y-axis differentiation plate is in X-axis CCD
On imaging maximum, the pulse width observing X-axis ccd output signal with oscillograph is maximum, by adjusting
Whole Y-axis dividing sheet base position detection X-axis ccd output signal, can find X-axis CCD by regulation
Output image width can by the narrow process widening into and narrowing, adjust Y-axis differentiation plate to X-axis CCD
Output image to position the widest, now represent that Y-axis differentiation plate is adjusted to parallel with X-axis CCD；
Step 4, adjusts Y-axis light path, and Y-axis differentiation plate is adjusted to be mutually perpendicular to Y-axis CCD；
Light Y-axis light source, close X-axis light source, prism of corner cube is arranged on camera lens, realizes optical system
Auto-collimation, oscillographic probe is connected to the outfan of Y-axis CCD, adjusts Y by adjusting screw 2
The position of axle CCD, observation oscilloscope output waveform, when output waveform is for square wave, then Y-axis differentiation
Plate is vertical with Y-axis CCD；Now, dual axis photoelectric autocollimation X-axis, Y-axis two light path intercept are adjusted
Whole finish.
Dual axis photoelectric autocollimation line array CCD bidimensional test schematic diagram is as shown in figure 1, light source, X-axis are divided
Change plate, beam splitter, X-axis CCD, object lens and illuminator and constitute X-axis light path system, X-axis light path
What system was imaged on object lens is vertical hair；Light source, Y-axis differentiation plate, beam splitter, Y-axis CCD, thing
Mirror and illuminator constitute Y-axis light path system, and what Y-axis light path system was imaged on object lens is horizontal hair.
When X-axis Y-axis two light path is mutually perpendicular to, imaging on object lens for two axles is mutually perpendicular to.
It is mutually perpendicular to Y-axis imaging to realize X-axis imaging.By beam splitter by X-axis graticle, Y
Axle graticle, X-axis ccd sensor, Y-axis ccd sensor is individually placed to the different of optical system
Four conjugate positions, may determine that X-axis graticle and X-axis CCD by ccd sensor output waveform
Sensor is orthogonal, and Y-axis graticle is orthogonal with Y-axis ccd sensor, and Y-axis breaks up plate and X-axis CCD
Sensor parallel.During test, each light path graticle is illuminated respectively by each light path light-source system and pass through beam splitting
Device separation X-axis, Y-axis optical signalling, are individually gathered by each light path ccd sensor.
Claims (1)
1. a kind of dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment, its feature
It is：Comprise the following steps
Step one, installs line array CCD bidimensional test device；
This device include Y-axis CCD (1), adjusting screw (2), Y-axis differentiation plate (3),
Y-axis light source (4), X-axis light source (5), X-axis differentiation plate (6), adjusting screw (7), X
Axle CCD (8), three spectroscopes (9) and camera lens (10), wherein, described X-axis light source
(5), X-axis graticle (6), spectroscope A (12), spectroscope B (9) and camera lens (10)
Optics is coaxial, and wherein spectroscope A (12), spectroscope B (9) are located at camera lens (10) and X
Between axle graticle (6), fixing X-axis CCD (8) of described adjusting screw (7) is described
X-axis CCD is coaxial with spectroscope A (12), described X-axis graticle and X-axis CCD position
On the focal plane of camera lens；Described Y-axis light source (4), Y-axis graticle (3), spectroscope C
(11), spectroscope B (9) and camera lens (10) optics are coaxial；Described spectroscope C (11)
Positioned at the top of spectroscope B (9) and with it with described adjusting screw (2) is located at Y-axis
On CCD (1), described Y-axis graticle (3) and Y-axis CCD (1) are respectively positioned on camera lens
(10) on focal plane；
Step 2, adjusts X-axis light path, and X-axis differentiation plate is adjusted to phase with X-axis CCD
Mutually vertical；Light X-axis light source, close Y-axis light source, prism of corner cube is arranged on camera lens,
Realize the auto-collimation of optical system, oscillographic probe be connected to the outfan of X-axis CCD,
Adjust the position of X-axis CCD by adjusting screw 7, observation oscilloscope output waveform, when defeated
When going out waveform for square wave, then X-axis differentiation plate is vertical with X-axis CCD；
Step 3, closes X-axis light source, lights Y-axis light source, at this moment Y-axis should be broken up plate
It is adjusted to parallel with X-axis CCD, when Y-axis differentiation plate is parallel with X-axis CCD, Y-axis is divided
Change imaging in X-axis CCD for the plate maximum, observe X-axis ccd output signal with oscillograph
Pulse width maximum, by adjusting Y-axis dividing sheet base position detection X-axis CCD output letter
Number, can be widened into and be narrowed by narrow by the output image width that regulation can find X-axis CCD
Process, adjustment Y-axis break up plate to X-axis CCD output image to position the widest, this
When represent Y-axis differentiation plate be adjusted to parallel with X-axis CCD；
Step 4, adjusts Y-axis light path, and Y-axis differentiation plate is adjusted to phase with Y-axis CCD
Mutually vertical；Light Y-axis light source, close X-axis light source, prism of corner cube is arranged on camera lens,
Realize the auto-collimation of optical system, oscillographic probe be connected to the outfan of Y-axis CCD,
Adjust the position of Y-axis CCD by adjusting screw 2, observation oscilloscope output waveform, when defeated
When going out waveform for square wave, then Y-axis differentiation plate is vertical with Y-axis CCD；Now, twin shaft light
Electric autocollimator X-axis, the adjustment of Y-axis two light path intercept finish.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106403909A (en) * | 2015-07-31 | 2017-02-15 | 北京航天计量测试技术研究所 | Novel double-head photoelectric autocollimator |
| CN113959469A (en) * | 2021-12-22 | 2022-01-21 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | Electronic internal focusing collimator |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3197091B2 (en) * | 1993-01-08 | 2001-08-13 | 株式会社竹中工務店 | Parting concrete structure between pillar and girder or girder and girder |
| CN101042811A (en) * | 2007-02-14 | 2007-09-26 | 中国人民解放军电子工程学院 | Linear array CCD synthesis experiment method and apparatus thereof |
| CN101639351A (en) * | 2008-07-30 | 2010-02-03 | 北京航天计量测试技术研究所 | Double-shaft CCD sensor photoelectric auto-collimator |
| CN102023082A (en) * | 2010-09-29 | 2011-04-20 | 中国科学院上海光学精密机械研究所 | Two-dimensional pointing mirror dynamic performance detection device and detection method |
| CN103308005A (en) * | 2013-06-12 | 2013-09-18 | 西安应用光学研究所 | Optical axis adjusting method for linear-array inverse-photoelectric observing and sighting device |
-
2015
- 2015-07-31 CN CN201510462800.XA patent/CN106403847B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3197091B2 (en) * | 1993-01-08 | 2001-08-13 | 株式会社竹中工務店 | Parting concrete structure between pillar and girder or girder and girder |
| CN101042811A (en) * | 2007-02-14 | 2007-09-26 | 中国人民解放军电子工程学院 | Linear array CCD synthesis experiment method and apparatus thereof |
| CN101639351A (en) * | 2008-07-30 | 2010-02-03 | 北京航天计量测试技术研究所 | Double-shaft CCD sensor photoelectric auto-collimator |
| CN102023082A (en) * | 2010-09-29 | 2011-04-20 | 中国科学院上海光学精密机械研究所 | Two-dimensional pointing mirror dynamic performance detection device and detection method |
| CN103308005A (en) * | 2013-06-12 | 2013-09-18 | 西安应用光学研究所 | Optical axis adjusting method for linear-array inverse-photoelectric observing and sighting device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106403909A (en) * | 2015-07-31 | 2017-02-15 | 北京航天计量测试技术研究所 | Novel double-head photoelectric autocollimator |
| CN113959469A (en) * | 2021-12-22 | 2022-01-21 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | Electronic internal focusing collimator |
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