CN106403847B - A kind of dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment - Google Patents
A kind of dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment Download PDFInfo
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- CN106403847B CN106403847B CN201510462800.XA CN201510462800A CN106403847B CN 106403847 B CN106403847 B CN 106403847B CN 201510462800 A CN201510462800 A CN 201510462800A CN 106403847 B CN106403847 B CN 106403847B
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Abstract
The invention belongs to photoelectric auto-collimators to design debugging field, solve the problems, such as that two optical path of dual axis photoelectric autocollimation is mutually perpendicular to the difficult dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment of adjustment more particularly to a kind of；By orthogonal transmission method, the positions of adjustment two differentiation plates and two ccd sensors, making the operating methods of two optical axises, simply, conveniently the adjusting of two optical paths suitable for any dual axis photoelectric autocollimation can preferably guarantee the up rightness of two optical paths；The present invention effectively raises intermediate link graticle and the orthogonality of CCD, keeps test result more accurate, reliability is higher.
Description
Technical field
The invention belongs to photoelectric auto-collimators to design debugging field, and in particular to a kind of dual axis photoelectric autocollimation photoelectric transfer
Sensor intercept method of adjustment.
Background technique
Dual axis photoelectric autocollimation is a kind of real-time, contactless high precision two-dimensional Angle Measuring Equipment.Photoelectric auto
The core devices of straight instrument are charge coupled device ccds.Charge coupled device ccd is that a kind of technology maturation, application technology are extensive
Imaging sensor.Develop since early 1970s very fast.
There are two types of traditional photoelectric sensor methods of adjustment.One is utilize micro- sem observation CCD imaging array, another kind
Method is to break up plate using theodolite light side two to be imaged, and the orthogonality that both methods adjusts two optical paths can only guarantee finally to be imaged
Orthogonality, it cannot be guaranteed that the orthogonality of two optical path intermediate links.
Both the above method there are aiming at the problem that, have studied and judge the orthogonal method of two optical paths, invented one kind
Dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment, have passed through a series of experiments verifying, and this method can be accurate
The up rightness of two optical paths of effective adjustment.
Summary of the invention
The purpose of the present invention, in view of the shortcomings of the prior art, it is mutual to provide a kind of two optical paths of solution dual axis photoelectric autocollimation
The dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment of the difficult problem of vertical adjustment.
The technical scheme is that
A kind of dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment, includes the following steps
Step 1 installs line array CCD bidimensional test device；
The present apparatus includes Y-axis CCD, adjusts screw, Y-axis differentiation plate, Y-axis light source, X-axis light source, X-axis differentiation plate, adjusts spiral shell
Nail, X-axis CCD, three spectroscopes and camera lens, wherein the X-axis light source, X-axis graticle, spectroscope A, spectroscope B and camera lens light
It learns coaxially, wherein between camera lens and X-axis graticle, the adjusting screw fixes X-axis CCD, described by spectroscope A, spectroscope B
X-axis CCD and spectroscope A are coaxial, and the X-axis graticle and X-axis CCD are located on the focal plane of camera lens；The Y-axis light source, Y-axis point
It is coaxial to draw plate, spectroscope C, spectroscope B and lens optical；The spectroscope C is located at the top of spectroscope B and same with it, described
It adjusts screw to be set on Y-axis CCD, the Y-axis graticle and Y-axis CCD are respectively positioned on the focal plane of camera lens；
Step 2 adjusts X-axis optical path, and X-axis differentiation plate is adjusted to be mutually perpendicular to X-axis CCD；X-axis light source is lighted, is closed
Y-axis light source, prism of corner cube is mounted on camera lens, realizes the auto-collimation of optical system, and the probe of oscillograph is connected to X-axis
The output end of CCD adjusts the position of X-axis CCD, observation oscilloscope output waveform, when output waveform is square wave by adjusting screw 7
When, then X-axis differentiation plate is vertical with X-axis CCD；
Step 3 closes X-axis light source, lights Y-axis light source, at this moment Y-axis should be broken up plate and adjusted to, Y parallel with X-axis CCD
When axis differentiation plate is parallel with X-axis CCD, Y-axis breaks up imaging maximum of the plate on X-axis CCD, is believed with oscillograph observation X-axis CCD output
Number pulse width it is maximum, by adjusting Y-axis dividing sheet base position detection X-axis ccd output signal, can find X-axis by adjusting
The output picture traverse of CCD can adjust Y-axis differentiation plate to the output image of X-axis CCD to most by the narrow process for widening into and narrowing
Wide position indicates that Y-axis differentiation plate is adjusted to parallel with X-axis CCD at this time；
Step 4 adjusts Y-axis optical path, and Y-axis differentiation plate is adjusted to be mutually perpendicular to Y-axis CCD；Y-axis light source is lighted, is closed
X-axis light source, prism of corner cube is mounted on camera lens, realizes the auto-collimation of optical system, and the probe of oscillograph is connected to Y-axis
The output end of CCD adjusts the position of Y-axis CCD, observation oscilloscope output waveform, when output waveform is square wave by adjusting screw 2
When, then Y-axis differentiation plate is vertical with Y-axis CCD；At this point, the adjustment of dual axis photoelectric autocollimation X-axis, two optical path intercept of Y-axis finishes.
The beneficial effects of the present invention are:
1. by orthogonal transmission method, the position of adjustment two differentiation plate and two ccd sensors makes the operating method of two optical axises
Simply, facilitate
2. being suitable for the adjusting of two optical paths of any dual axis photoelectric autocollimation, it can preferably guarantee the vertical of two optical paths
Property.
3. the present invention effectively raises intermediate link graticle and the orthogonality of CCD, keep test result more accurate, it can
It is higher by property.
Detailed description of the invention
Fig. 1 is line array CCD bidimensional test schematic diagram；
Fig. 2 is line array CCD two-dimensional structure cross-sectional view；
Fig. 3 is differentiation plate schematic diagram；
Fig. 4 is ccd signal square wave schematic diagram；
Fig. 5 is pulse diagram of the Y-axis light source igniting on X-axis CCD；
1.Y axis CCD；2. adjusting screw；3.Y axis breaks up plate；4.Y axis light source；5.X axis light source；6.X axis breaks up plate；7. adjusting
Save screw；8.X axis CCD；9. spectroscope B；10. camera lens；11. spectroscope C；12. spectroscope A.
Specific embodiment
It is orthogonal to a kind of dual axis photoelectric autocollimation photoelectric sensor proposed by the present invention with embodiment with reference to the accompanying drawing
Degree method of adjustment is further introduced:
A kind of dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment, includes the following steps
Step 1 installs line array CCD bidimensional test device；
The present apparatus include Y-axis CCD1, adjust screw 2, Y-axis differentiation plate 3, Y-axis light source 4, X-axis light source 5, X-axis differentiation plate 6,
Adjust screw 7, X-axis CCD8, three spectroscopes 9 and camera lens 10, wherein the X-axis light source 5, X-axis graticle 6, spectroscope A12,
Spectroscope B9 and 10 optics of camera lens are coaxial, and wherein spectroscope A12, spectroscope B9 are between camera lens 10 and X-axis graticle 6, institute
It states and adjusts the fixed X-axis CCD8 of screw 7, the X-axis CCD and spectroscope A12 are coaxial, and the X-axis graticle and X-axis CCD are located at mirror
On the focal plane of head；The Y-axis light source 4, Y-axis graticle 3, spectroscope C11, spectroscope B9 and 10 optics of camera lens are coaxial；It is described
Spectroscope C11 is located at the top of spectroscope B9 and same with it, and the adjustings screw 2 is on Y-axis CCD1, the Y-axis graticle 3
It is respectively positioned on Y-axis CCD1 on the focal plane of camera lens 10；
Step 2 adjusts X-axis optical path, and X-axis differentiation plate is adjusted to be mutually perpendicular to X-axis CCD；X-axis light source is lighted, is closed
Y-axis light source, prism of corner cube is mounted on camera lens, realizes the auto-collimation of optical system, and the probe of oscillograph is connected to X-axis
The output end of CCD adjusts the position of X-axis CCD, observation oscilloscope output waveform, when output waveform is square wave by adjusting screw 7
When, then X-axis differentiation plate is vertical with X-axis CCD；
Step 3 closes X-axis light source, lights Y-axis light source, at this moment Y-axis should be broken up plate and adjusted to, Y parallel with X-axis CCD
When axis differentiation plate is parallel with X-axis CCD, Y-axis breaks up imaging maximum of the plate on X-axis CCD, is believed with oscillograph observation X-axis CCD output
Number pulse width it is maximum, by adjusting Y-axis dividing sheet base position detection X-axis ccd output signal, can find X-axis by adjusting
The output picture traverse of CCD can adjust Y-axis differentiation plate to the output image of X-axis CCD to most by the narrow process for widening into and narrowing
Wide position indicates that Y-axis differentiation plate is adjusted to parallel with X-axis CCD at this time；
Step 4 adjusts Y-axis optical path, and Y-axis differentiation plate is adjusted to be mutually perpendicular to Y-axis CCD；Y-axis light source is lighted, is closed
X-axis light source, prism of corner cube is mounted on camera lens, realizes the auto-collimation of optical system, and the probe of oscillograph is connected to Y-axis
The output end of CCD adjusts the position of Y-axis CCD, observation oscilloscope output waveform, when output waveform is square wave by adjusting screw 2
When, then Y-axis differentiation plate is vertical with Y-axis CCD；At this point, the adjustment of dual axis photoelectric autocollimation X-axis, two optical path intercept of Y-axis finishes.
Dual axis photoelectric autocollimation line array CCD bidimensional test schematic diagram as shown in Figure 1, light source, X-axis differentiation plate, beam splitter,
X-axis CCD, object lens and reflective mirror constitute X-axis light path system, and what X-axis light path system was imaged on object lens is vertical hair；Light source, Y
Axis differentiation plate, beam splitter, Y-axis CCD, object lens and reflective mirror constitute Y-axis light path system, and Y-axis light path system is imaged on object lens
At be horizontal hair.When two optical path of X-axis Y-axis is mutually perpendicular to, imaging of two axis on object lens is mutually perpendicular to.
In order to realize that X-axis imaging is mutually perpendicular to Y-axis imaging.By beam splitter by X-axis graticle, Y-axis graticle, X-axis
Ccd sensor, Y-axis ccd sensor are individually placed to different four conjugate position of optical system, are exported by ccd sensor
Waveform may determine that X-axis graticle is orthogonal with X-axis ccd sensor, and Y-axis graticle is orthogonal with Y-axis ccd sensor, and Y-axis breaks up plate
It is parallel with X-axis ccd sensor.When test each optical path graticle is illuminated by each optical path light-source system respectively and is divided by beam splitter
From X-axis, Y-axis optical signalling, individually acquired by each optical path ccd sensor.
Claims (1)
1. a kind of dual axis photoelectric autocollimation photoelectric sensor intercept method of adjustment, it is characterised in that: include the following steps
Step 1 installs line array CCD bidimensional test device；
The present apparatus includes Y-axis CCD (1), adjusts screw (2), Y-axis differentiation plate (3), Y-axis light source (4), X-axis light source (5), X-axis point
Change plate (6), adjust screw (7), X-axis CCD (8), three spectroscope B (9) and camera lens (10), wherein the X-axis light source (5), X
Axis graticle (6), spectroscope A (12), spectroscope B (9) and camera lens (10) optics are coaxial, wherein spectroscope A (12), spectroscope B
(9) between camera lens (10) and X-axis graticle (6), the adjusting screw (7) is fixed X-axis CCD (8), the X-axis CCD with point
Coaxially, the X-axis graticle and X-axis CCD are located on the focal plane of camera lens light microscopic A (12)；The Y-axis light source (4), Y-axis graduation
Plate (3), spectroscope C (11), spectroscope B (9) and camera lens (10) optics are coaxial；The spectroscope C (11) is located at spectroscope B (9)
Top and coaxially, the adjustings screw (2) is set on Y-axis CCD (1), and the Y-axis graticle (3) and Y-axis CCD (1) are
On the focal plane of camera lens (10)；
Step 2 adjusts X-axis optical path, and X-axis differentiation plate is adjusted to be mutually perpendicular to X-axis CCD；X-axis light source is lighted, Y-axis is closed
Prism of corner cube is mounted on camera lens by light source, realizes the auto-collimation of optical system, and the probe of oscillograph is connected to X-axis CCD's
Output end, by adjust screw 7 adjust X-axis CCD position, observation oscilloscope output waveform, when output waveform be square wave when, then
It is vertical with X-axis CCD that X-axis breaks up plate；
Step 3 closes X-axis light source, lights Y-axis light source, and at this moment Y-axis should be broken up to plate adjusted to, Y-axis point parallel with X-axis CCD
When change plate is parallel with X-axis CCD, Y-axis breaks up imaging maximum of the plate on X-axis CCD, with oscillograph observation X-axis ccd output signal
Pulse width is maximum, by adjusting Y-axis dividing sheet base position detection X-axis ccd output signal, can find X-axis CCD by adjusting
Y-axis differentiation plate can be adjusted to the output image of X-axis CCD to widest by the narrow process for widening into and narrowing by exporting picture traverse
Position indicates that Y-axis differentiation plate is adjusted to parallel with X-axis CCD at this time；
Step 4 adjusts Y-axis optical path, and Y-axis differentiation plate is adjusted to be mutually perpendicular to Y-axis CCD；Y-axis light source is lighted, X-axis is closed
Prism of corner cube is mounted on camera lens by light source, realizes the auto-collimation of optical system, and the probe of oscillograph is connected to Y-axis CCD's
Output end, by adjust screw 2 adjust Y-axis CCD position, observation oscilloscope output waveform, when output waveform be square wave when, then
It is vertical with Y-axis CCD that Y-axis breaks up plate；At this point, the adjustment of dual axis photoelectric autocollimation X-axis, two optical path intercept of Y-axis finishes.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106403909A (en) * | 2015-07-31 | 2017-02-15 | 北京航天计量测试技术研究所 | Novel double-head photoelectric autocollimator |
| CN113959469A (en) * | 2021-12-22 | 2022-01-21 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | Electronic internal focusing collimator |
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| JP3197091B2 (en) * | 1993-01-08 | 2001-08-13 | 株式会社竹中工務店 | Parting concrete structure between pillar and girder or girder and girder |
| CN101042811A (en) * | 2007-02-14 | 2007-09-26 | 中国人民解放军电子工程学院 | Linear array CCD synthesis experiment method and apparatus thereof |
| CN101639351A (en) * | 2008-07-30 | 2010-02-03 | 北京航天计量测试技术研究所 | Double-shaft CCD sensor photoelectric auto-collimator |
| CN102023082A (en) * | 2010-09-29 | 2011-04-20 | 中国科学院上海光学精密机械研究所 | Two-dimensional pointing mirror dynamic performance detection device and detection method |
| CN103308005A (en) * | 2013-06-12 | 2013-09-18 | 西安应用光学研究所 | Optical axis adjusting method for linear-array inverse-photoelectric observing and sighting device |
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Patent Citations (5)
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|---|---|---|---|---|
| JP3197091B2 (en) * | 1993-01-08 | 2001-08-13 | 株式会社竹中工務店 | Parting concrete structure between pillar and girder or girder and girder |
| CN101042811A (en) * | 2007-02-14 | 2007-09-26 | 中国人民解放军电子工程学院 | Linear array CCD synthesis experiment method and apparatus thereof |
| CN101639351A (en) * | 2008-07-30 | 2010-02-03 | 北京航天计量测试技术研究所 | Double-shaft CCD sensor photoelectric auto-collimator |
| CN102023082A (en) * | 2010-09-29 | 2011-04-20 | 中国科学院上海光学精密机械研究所 | Two-dimensional pointing mirror dynamic performance detection device and detection method |
| CN103308005A (en) * | 2013-06-12 | 2013-09-18 | 西安应用光学研究所 | Optical axis adjusting method for linear-array inverse-photoelectric observing and sighting device |
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